JPS4820707B1 - - Google Patents

Info

Publication number
JPS4820707B1
JPS4820707B1 JP4959870A JP4959870A JPS4820707B1 JP S4820707 B1 JPS4820707 B1 JP S4820707B1 JP 4959870 A JP4959870 A JP 4959870A JP 4959870 A JP4959870 A JP 4959870A JP S4820707 B1 JPS4820707 B1 JP S4820707B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4959870A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4820707B1 publication Critical patent/JPS4820707B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
JP4959870A 1969-06-11 1970-06-10 Pending JPS4820707B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83224669A 1969-06-11 1969-06-11

Publications (1)

Publication Number Publication Date
JPS4820707B1 true JPS4820707B1 (enrdf_load_stackoverflow) 1973-06-22

Family

ID=25261097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4959870A Pending JPS4820707B1 (enrdf_load_stackoverflow) 1969-06-11 1970-06-10

Country Status (6)

Country Link
JP (1) JPS4820707B1 (enrdf_load_stackoverflow)
CA (1) CA918601A (enrdf_load_stackoverflow)
CH (1) CH517833A (enrdf_load_stackoverflow)
DE (1) DE2022957A1 (enrdf_load_stackoverflow)
FR (1) FR2049999A5 (enrdf_load_stackoverflow)
GB (1) GB1308243A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375213U (enrdf_load_stackoverflow) * 1976-11-26 1978-06-23

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4042417C2 (de) * 1990-07-17 1993-11-25 Balzers Hochvakuum Ätz- oder Beschichtungsanlage sowie Verfahren zu ihrem Zünden oder intermittierenden Betreiben
DE4022708A1 (de) * 1990-07-17 1992-04-02 Balzers Hochvakuum Aetz- oder beschichtungsanlagen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375213U (enrdf_load_stackoverflow) * 1976-11-26 1978-06-23

Also Published As

Publication number Publication date
DE2022957A1 (de) 1970-12-17
CH517833A (de) 1972-01-15
FR2049999A5 (enrdf_load_stackoverflow) 1971-03-26
GB1308243A (en) 1973-02-21
CA918601A (en) 1973-01-09

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