JPS4814638B1 - - Google Patents
Info
- Publication number
- JPS4814638B1 JPS4814638B1 JP12510570A JP12510570A JPS4814638B1 JP S4814638 B1 JPS4814638 B1 JP S4814638B1 JP 12510570 A JP12510570 A JP 12510570A JP 12510570 A JP12510570 A JP 12510570A JP S4814638 B1 JPS4814638 B1 JP S4814638B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H01L29/0804—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30608—Anisotropic liquid etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
-
- H01L21/8222—
-
- H01L27/00—
-
- H01L27/0825—
-
- H01L29/00—
-
- H01L29/0684—
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Bipolar Transistors (AREA)
- Weting (AREA)
- Bipolar Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2535770A | 1970-04-03 | 1970-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4814638B1 true JPS4814638B1 (nl) | 1973-05-09 |
Family
ID=21825553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12510570A Pending JPS4814638B1 (nl) | 1970-04-03 | 1970-12-24 |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS4814638B1 (nl) |
| BE (1) | BE765014A (nl) |
| CA (1) | CA936969A (nl) |
| DE (1) | DE2115248A1 (nl) |
| FR (1) | FR2085821B1 (nl) |
| GB (1) | GB1334902A (nl) |
| NL (1) | NL7104445A (nl) |
| SE (1) | SE366152B (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52166150U (nl) * | 1976-06-10 | 1977-12-16 | ||
| JPS5317961U (nl) * | 1976-07-27 | 1978-02-15 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2445480A1 (de) * | 1974-09-24 | 1976-04-01 | Ibm Deutschland | Verfahren zur herstellung eines leistungstransistors |
| DE2737073C3 (de) * | 1977-08-17 | 1981-09-17 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum Herstellen eines Isolierschicht-Feldeffekttransistors für eine Ein-Transistor-Speicherzelle |
| JPS5946415B2 (ja) * | 1978-04-28 | 1984-11-12 | 株式会社日立製作所 | 半導体装置の製造方法 |
-
1970
- 1970-12-24 JP JP12510570A patent/JPS4814638B1/ja active Pending
-
1971
- 1971-02-10 CA CA105068A patent/CA936969A/en not_active Expired
- 1971-03-30 DE DE19712115248 patent/DE2115248A1/de active Pending
- 1971-03-30 BE BE765014A patent/BE765014A/xx unknown
- 1971-03-31 SE SE418071A patent/SE366152B/xx unknown
- 1971-04-01 FR FR7111473A patent/FR2085821B1/fr not_active Expired
- 1971-04-02 NL NL7104445A patent/NL7104445A/xx unknown
- 1971-04-19 GB GB2531371A patent/GB1334902A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52166150U (nl) * | 1976-06-10 | 1977-12-16 | ||
| JPS5317961U (nl) * | 1976-07-27 | 1978-02-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2115248A1 (de) | 1971-10-21 |
| SE366152B (nl) | 1974-04-08 |
| FR2085821B1 (nl) | 1977-01-28 |
| CA936969A (en) | 1973-11-13 |
| NL7104445A (nl) | 1971-10-05 |
| BE765014A (fr) | 1971-08-16 |
| FR2085821A1 (nl) | 1971-12-31 |
| GB1334902A (en) | 1973-10-24 |