JPH1197759A - Method for polarizing piezoelectric ceramic element - Google Patents

Method for polarizing piezoelectric ceramic element

Info

Publication number
JPH1197759A
JPH1197759A JP26926797A JP26926797A JPH1197759A JP H1197759 A JPH1197759 A JP H1197759A JP 26926797 A JP26926797 A JP 26926797A JP 26926797 A JP26926797 A JP 26926797A JP H1197759 A JPH1197759 A JP H1197759A
Authority
JP
Japan
Prior art keywords
piezoelectric ceramic
ceramic element
electrodes
high voltage
withstand voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26926797A
Other languages
Japanese (ja)
Other versions
JP3360244B2 (en
Inventor
Kazuhiko Oda
和彦 小田
Yasuo Niwa
康夫 丹羽
Takashi Komatsu
敬 小松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP26926797A priority Critical patent/JP3360244B2/en
Publication of JPH1197759A publication Critical patent/JPH1197759A/en
Application granted granted Critical
Publication of JP3360244B2 publication Critical patent/JP3360244B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To prevent a discharge short-circuiting when a high voltage is applied from being generated between electrodes by forming a covering for withstand voltage that covers the ceramic foundation surface between electrodes from an insulation paste where an inorganic insulator is mixed to an organic macromolecular material and applying a high voltage to the double-sided electrode of the piezoelectric ceramic element in atmosphere. SOLUTION: A ceramic foundation surface 4 is formed so that it is exposed as the insulation gap of double-sided electrodes 2 and 3 being located on the same surface. Also, a covering 5 for withstand voltage is formed in a ring shape so that the ceramic foundation surface 4 is covered from an insulation paste where an inorganic insulator is mixed to a macromolecular material before polarization treatment due to the application of a high voltage to a piezoelectric ceramic element 1. An electric field of 1,000 V/mm or larger is applied to the double-sided electrodes 2 and 3 in the piezoelectric ceramic element 1, thus performing polarization treatment in atmosphere. By using the mixture between silica and alumina as the inorganic insulator of the insulation paste, electrical insulation property and a large volume resistivity can be given, thus preventing a discharge short-circuiting when a high voltage is applied from being generated between the electrodes.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、高電圧を圧電磁器
素子の両面電極に大気中で印加し、圧電磁器素子の分極
処理を行うことにより圧電セラミック部品用の圧電磁器
素子を得るのに適用される圧電磁器素子の分極方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to obtaining a piezoelectric ceramic element for a piezoelectric ceramic component by applying a high voltage to both electrodes of a piezoelectric ceramic element in the atmosphere and performing polarization processing of the piezoelectric ceramic element. The present invention relates to a method for polarizing a piezoelectric ceramic element.

【0002】[0002]

【従来の技術】従来、高電圧を圧電磁器素子の両面電極
に大気中で印加することによる圧電磁器素子の分極方法
としては、高電圧印加時の放電短絡が電極間に生ずるの
を防止するべく、シルカ等をシリコンオイルに混合した
絶縁油を用い、オイルコンパウンドを耐電圧用の被膜と
して電極間の磁器素地面に形成することが提案されてい
る(特開平4−179287号)。
2. Description of the Related Art Conventionally, as a method of polarizing a piezoelectric ceramic element by applying a high voltage to both electrodes of the piezoelectric ceramic element in the atmosphere, a method of preventing a discharge short circuit between the electrodes when a high voltage is applied is used. It has been proposed to form an oil compound as a withstand voltage coating on a porcelain ground between electrodes using insulating oil obtained by mixing silicon oil with silicon oil or the like (JP-A-4-179287).

【0003】そのオイルコンパウンドを耐電圧用の被膜
として電極間の磁器素地面に形成すると、高電圧印加時
の放電短絡が電極間に生ずるのを防ぐことはできる。但
し、シリコンオイル等の絶縁油は後工程での接着或いは
半田付け,絶縁塗料の塗装等に悪影響を及ぼすところか
ら、圧電磁器素子の分極処理後に、通常、塩化炭素系の
溶剤を用いて除去している。
If the oil compound is formed on the porcelain ground between the electrodes as a withstand voltage coating, it is possible to prevent a discharge short circuit between the electrodes when a high voltage is applied. However, since insulating oil such as silicon oil has a bad effect on adhesion or soldering in later processes, painting of insulating paint, etc., it is usually removed using a carbon chloride-based solvent after polarization treatment of piezoelectric ceramic elements. ing.

【0004】然し、シリコンオイル等の絶縁油は圧電磁
器素子の素地面より完全に除去するのが難しく、後工程
での接着或いは半田付け,絶縁塗料の塗装等に悪影響を
及ぼすことが避けられない。また、塩化炭素系の溶剤を
用いては環境に与える影響の防止対策が必要となる。
However, it is difficult to completely remove the insulating oil such as silicon oil from the base surface of the piezoelectric ceramic element, and it is unavoidable that it adversely affects the bonding or soldering, the coating of the insulating paint, etc. in a later process. . Also, using a carbon chloride-based solvent requires measures to prevent the effects on the environment.

【0005】[0005]

【発明が解決しようとする課題】本発明は、シリコンオ
イル等の絶縁油を用いないで、耐電圧用の被膜を電極間
の磁器素地面に形成し、圧電磁器素子の分極処理を大気
中で行うことにより、高電圧印加時の放電短絡が電極間
に生ずるのを防げる圧電磁器素子の分極方法を提供する
ことを目的とする。
SUMMARY OF THE INVENTION In the present invention, a coating for withstand voltage is formed on a porcelain ground between electrodes without using an insulating oil such as silicon oil, and polarization treatment of a piezoelectric ceramic element is performed in air. It is an object of the present invention to provide a method of polarizing a piezoelectric ceramic element which can prevent a discharge short circuit between electrodes when a high voltage is applied.

【0006】また、本発明は事後に簡略な洗浄工程で完
全に除去可能な耐電圧用の被膜を電極間の磁器素地面に
形成することにより、後工程での接着或いは半田付け,
絶縁塗料の塗装等に悪影響を及ぼすのを防げると共に、
高電圧印加時の放電短絡が電極間に生じない分極処理が
行える圧電磁器素子の分極方法を提供することを目的と
する。
Further, the present invention forms a withstand voltage coating which can be completely removed afterwards in a simple cleaning step on the porcelain ground between the electrodes, so that bonding or soldering in a later step can be performed.
In addition to preventing adverse effects on the coating of insulating paint, etc.,
It is an object of the present invention to provide a polarization method of a piezoelectric ceramic element capable of performing a polarization process such that a discharge short circuit does not occur between electrodes when a high voltage is applied.

【0007】更に、本発明は電極間の磁器素地面を完全
に被覆可能な耐電圧用の被膜を印刷形成することによ
り、高電圧印加時の放電短絡が電極間に生じない分極処
理が行える圧電磁器素子の分極方法を提供することを目
的とする。
Further, the present invention provides a piezoelectric device capable of performing a polarization treatment such that a discharge short circuit does not occur between the electrodes when a high voltage is applied by printing a withstand voltage coating capable of completely covering the porcelain ground between the electrodes. An object of the present invention is to provide a method for polarizing a porcelain element.

【0008】[0008]

【課題を解決するための手段】本発明の請求項1に係る
圧電磁器素子の分極方法においては、無機絶縁物を有機
高分子材料に混合した絶縁ペーストから電極間の磁器素
地面を被覆する耐電圧用の被膜を形成し、その圧電磁器
素子の両面電極に大気中で高電圧を印加するようにされ
ている。
According to a first aspect of the present invention, there is provided a method for polarizing a piezoelectric ceramic element, wherein an insulating paste in which an inorganic insulating material is mixed with an organic polymer material covers a porcelain ground between electrodes. A coating for voltage is formed, and a high voltage is applied to the double-sided electrodes of the piezoelectric ceramic element in the atmosphere.

【0009】本発明の請求項2に係る圧電磁器素子の分
極方法においては、無機絶縁物を水溶性の有機高分子材
料に混合した絶縁ペーストから耐電圧用の被膜を形成す
るようにされている。
According to a second aspect of the present invention, in the method for polarizing a piezoelectric ceramic element, a withstand voltage film is formed from an insulating paste obtained by mixing an inorganic insulator with a water-soluble organic polymer material. .

【0010】本発明の請求項3に係る圧電磁器素子の分
極方法においては、シリカまたはアルミナの無機絶縁物
若しくはシリカとアルミナとの混合無機絶縁物を有機高
分子材料に40〜80wt%混合した絶縁ペーストから
耐電圧用の被膜を印刷形成するようにされている。
According to a third aspect of the present invention, there is provided a method for polarizing a piezoelectric ceramic element, comprising mixing an inorganic insulator of silica or alumina or a mixed inorganic insulator of silica and alumina with an organic polymer material in an amount of 40 to 80 wt%. A coating for withstand voltage is formed by printing from the paste.

【0011】[0011]

【発明の実施の形態】以下、添付図面を参照して説明す
ると、図示実施の形態は図1a並びに図1bで示すよう
にPZT系等のセラミック材料から円板状の圧電磁器素
子1を焼結形成し、銀(Ag)を主成分とする導電材料
から両面電極2,3を圧電磁器素子1の素地面に焼付け
形成した後、1000V/mm以上の電界を両面電極
2,3に印加することにより圧電磁器素子1の分極処理
を大気中で行うのに適用されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to the accompanying drawings, the illustrated embodiment sinters a disc-shaped piezoelectric ceramic element 1 from a ceramic material such as PZT as shown in FIGS. 1a and 1b. After forming and baking the double-sided electrodes 2 and 3 from the conductive material containing silver (Ag) as a main component on the ground surface of the piezoelectric ceramic element 1, an electric field of 1000 V / mm or more is applied to the double-sided electrodes 2 and 3. This is applied to perform polarization processing of the piezoelectric ceramic element 1 in the atmosphere.

【0012】図示の圧電磁器素子1においては、磁器素
地面4が同一面上に位置する両面電極2,3の絶縁ギャ
ップとして露出するよう形成されている。また、この圧
電磁器素子1には図2a並びに図2bで示す如く高電圧
の印加による分極処理前に無機絶縁物を有機高分子材料
に混合した絶縁ペーストから磁器素地面4を被覆するよ
う耐電圧用の被膜5がリング状に形成される。
In the piezoelectric ceramic element 1 shown in the figure, a ceramic ground 4 is formed so as to be exposed as an insulating gap between the double-sided electrodes 2 and 3 located on the same plane. As shown in FIGS. 2A and 2B, the piezoelectric ceramic element 1 is coated with an insulating paste in which an inorganic insulating material is mixed with an organic polymer material before the polarization treatment by applying a high voltage. Coating 5 is formed in a ring shape.

【0013】その絶縁ペーストの無機絶縁物としては、
シリカ(SiO2 ),アルミナ(Al23 )またはシ
リカとアルミナとの混合物を用いることができる。これ
ら無機絶縁物を混合すれば、電気絶縁性は勿論、大きな
体積抵抗率を付与することができる。
As the inorganic insulator of the insulating paste,
Silica (SiO 2 ), alumina (Al 2 O 3 ) or a mixture of silica and alumina can be used. When these inorganic insulators are mixed, it is possible to impart not only electrical insulation properties but also a large volume resistivity.

【0014】有機高分子材料は、圧電磁器素子1の分極
処理後に水やアルコール等で容易に洗浄除去可能なバイ
ンダーとして採択されている。特に、水溶性の有機高分
子材料を用いると、水洗除去という簡略な除去工程を適
用することができる。この水溶性の有機高分子材料とし
ては、水溶性のポリビニル・ヒロリドン(PVP)を挙
げることができる。
An organic polymer material has been adopted as a binder which can be easily washed and removed with water, alcohol or the like after the polarization treatment of the piezoelectric ceramic element 1. In particular, when a water-soluble organic polymer material is used, a simple removal step of washing and removing can be applied. Examples of the water-soluble organic polymer material include water-soluble polyvinyl hirolidone (PVP).

【0015】その絶縁ペーストを用いてはスクリーン印
刷等を適用すれば、磁器素地面4の露出がない高精度な
耐電圧用の被膜5を容易に印刷形成することができる。
この印刷性を考慮し、シリカを無機絶縁物として用いる
場合を例示すると、上述した有機高分子材料に40〜8
0wt%混合するとよい。それは無機絶縁物の混合率が
40wt%以下であると、耐電圧用の被膜5が電気絶縁
性に劣るものになり、一方、80wt%以上であると良
好な印刷性が得られないからである。
If screen printing or the like is applied using the insulating paste, a high-precision coating film 5 for withstand voltage without exposing the porcelain ground 4 can be easily formed by printing.
Considering this printability, the case where silica is used as an inorganic insulator is exemplified.
It is good to mix 0 wt%. This is because if the mixing ratio of the inorganic insulator is 40 wt% or less, the withstand voltage coating 5 becomes inferior in electrical insulation, while if it is 80 wt% or more, good printability cannot be obtained. .

【0016】アルミナまたはシリカとの混合物を用いる
場合には、電気絶縁性,印刷性のいずれも好適な一例と
して有機高分子材料に60wt%程度混合するとよい。
これらの絶縁ペーストを用い、耐電圧用の被膜5を両面
電極2,3の縁間に形成した後、その耐電圧用の被膜5
は大気中で加熱乾燥処理することにより分極前の圧電磁
器素子1として得ることができる。
When a mixture with alumina or silica is used, it is preferable to mix about 60 wt% with an organic polymer material as a preferable example of both electric insulation and printability.
After forming a withstand voltage film 5 between the edges of the double-sided electrodes 2 and 3 using these insulating pastes, the withstand voltage film 5 is formed.
Can be obtained as a piezoelectric ceramic element 1 before polarization by heating and drying in the atmosphere.

【0017】その圧電磁器素子1には、1000V/m
m以上の電界を両面電極2,3に印加することにより大
気中で分極処理を施す。この分極処理には、図3で示す
ように電圧印加用の電源10を備え、その電源10に接
続されるコンタクトピン11並びに耐電圧用の被膜5を
形成した圧電磁器素子1の治具として金属台12を備え
る分極処理装置を適用することができる。
The piezoelectric ceramic element 1 has 1000 V / m
By applying an electric field of m or more to the double-sided electrodes 2 and 3, polarization processing is performed in the air. As shown in FIG. 3, the polarization process includes a power supply 10 for applying a voltage, and a contact pin 11 connected to the power supply 10 and a jig for the piezoelectric ceramic element 1 on which the coating 5 for withstand voltage is formed. A polarization processing device including the table 12 can be applied.

【0018】その分極処理装置においては、片面の電極
2を金属台12と面接触させて圧電磁器素子1を板面上
に載置すると共に、コンタクトピン11を他面の電極3
に当接させて電源10から直流電圧を導通することによ
り大気中における圧電磁器素子1の分極処理を行える。
また、金属台12には加熱ヒータ13を備え、高電圧の
印加に伴って金属台13から圧電磁器素子1を加熱処理
することにより分極処理を促進を図ることができる。
In the polarization processing apparatus, the piezoelectric ceramic element 1 is placed on a plate surface by bringing the electrode 2 on one side into surface contact with the metal base 12, and the contact pin 11 is placed on the electrode 3 on the other side.
The DC voltage from the power supply 10 is applied to the piezoelectric ceramic element 1 so that the piezoelectric ceramic element 1 can be polarized in the atmosphere.
Further, the metal stage 12 is provided with a heater 13, and the polarization process can be promoted by heating the piezoelectric ceramic element 1 from the metal stage 13 with the application of a high voltage.

【0019】上述した分極方法の有効性を確認するべ
く、圧電磁器素子としては図1で示す両面電極を焼付け
形成したものを得、従来例として耐電圧用の被膜を設け
ずに試料1とした。これに対し、比較例として耐電圧用
の被膜を設けるべく、水溶性のポリビニル・ピロリドン
をブチルカルビトールで溶解した有機高分子材料にシリ
カまたはアルミナを混合した絶縁ペーストを用意した。
In order to confirm the effectiveness of the above-described polarization method, a piezoelectric ceramic element obtained by baking the double-sided electrode shown in FIG. 1 was obtained as a piezoelectric ceramic element, and a conventional example was used as a sample 1 without providing a withstand voltage coating. . On the other hand, as a comparative example, an insulating paste in which silica or alumina was mixed with an organic polymer material in which water-soluble polyvinyl pyrrolidone was dissolved in butyl carbitol was prepared in order to provide a coating for withstand voltage.

【0020】その絶縁ペーストとしては、シリカを上述
した有機高分子材料に混合率20wt%,40wt%,
60wt%,80wt%,90wt%で混合したものを
用意した。この各混合率のものを試料2〜7として圧電
磁器素子の磁器素地面に印刷したところ、試料2〜6の
混合率20〜80wt%のものは素地面の露出がないリ
ング状の耐電圧用被膜として良好に印刷できた。然し、
試料7の混合率90wt%のものは粘性から耐電圧用の
被膜として印刷できなかった。
As the insulating paste, silica is mixed with the above organic polymer material at a mixing ratio of 20 wt%, 40 wt%,
A mixture of 60 wt%, 80 wt%, and 90 wt% was prepared. Samples 2 to 7 with the respective mixing ratios were printed on the porcelain ground of the piezoelectric ceramic element. Samples 2 to 6 with the mixing ratio of 20 to 80 wt% had a ring-shaped withstand voltage for which the base was not exposed. Printing was good as a coating. But
Sample 7 having a mixing ratio of 90 wt% could not be printed as a withstand voltage film due to its viscosity.

【0021】また、アルミナを60wt%で同じ有機高
分子材料に混合した絶縁ペーストを用意し、その絶縁ペ
ーストを試料8として圧電磁器素子の磁器素地面に印刷
したところ、試料2〜6と同様に素地面の露出がないリ
ング状の耐電圧用の被膜として良好に印刷できた。試料
7を除き、試料2〜6並びに試料8には100℃の温度
で10分間大気中で乾燥処理を施すことにより分極前の
圧電磁器素子を得た。この各試料は、試料1を含み同数
複数個を作成した。
Also, an insulating paste in which alumina was mixed with the same organic polymer material at 60 wt% was prepared, and the insulating paste was printed as a sample 8 on the porcelain ground of the piezoelectric ceramic element. It was printed well as a ring-like withstand voltage coating with no bare ground. Except for Sample 7, Samples 2 to 6 and Sample 8 were subjected to a drying treatment in the atmosphere at a temperature of 100 ° C. for 10 minutes to obtain a piezoelectric ceramic element before polarization. Each of these samples including Sample 1 was prepared in the same number.

【0022】その試料1,試料2〜6並びに試料8に
は、図3で示す分極処理装置を用いて1200V/mm
の高電圧を両面電極に5〜6分間印加した。この高電圧
の印加と共に、分極処理装置の金属台から各圧電磁器素
子をヒータで50℃程度加熱処理した。その電圧印加後
の各圧電磁器素子を常温まで戻し、放電不良の有無を検
査したところ、次の表1で示す通り、従来例の試料1に
は70%,試料2には60%,試料3には40%の放電
不良が認められた。これに対し、試料4〜6並びに試料
8には放電不良が全く認められなかった。
The sample 1, sample 2 to 6 and sample 8 were applied to the polarization processing apparatus shown in FIG.
Was applied to the double-sided electrode for 5 to 6 minutes. Along with the application of the high voltage, each piezoelectric ceramic element was heated at about 50 ° C. with a heater from a metal table of the polarization processing apparatus. Each piezoelectric ceramic element after the application of the voltage was returned to normal temperature and inspected for discharge failure. As shown in Table 1 below, 70% for the conventional sample 1, 60% for the sample 2, and 3% for the sample 2. Showed a discharge failure of 40%. In contrast, Samples 4 to 6 and Sample 8 did not show any discharge failure.

【0023】[0023]

【表1】 [Table 1]

【0024】その放電不良の検査に先立って、試料2〜
6並びに試料8からは水による超音波洗浄を適用するこ
とにより耐電圧用被膜の除去処理を施した。このいずれ
の被膜も水溶性のポリビニル・ピロリドンをブチルカル
ビトールで溶解した有機高分子材料をバインダーとする
絶縁ペーストで形成されているため、水による超音波洗
浄という簡略な設備で完全に除去することができた。
Prior to the inspection for the discharge failure, samples 2 to
6 and Sample 8 were subjected to an ultrasonic cleaning with water to remove the withstand voltage coating. Both coatings are made of an insulating paste with a binder made of an organic polymer material in which water-soluble polyvinyl pyrrolidone is dissolved in butyl carbitol, so they can be completely removed by simple equipment such as ultrasonic cleaning with water. Was completed.

【0025】上述した実施の形態はPZT系のセラミッ
ク材料から形成した圧電磁器素子に基づいて説明した
が、電界値,加熱温度等を適宜設定することにより、チ
タン酸鉛系のセラミック材料から形成した圧電磁器素子
にも同様に適用することができる。また、両面電極を円
板形の圧電磁器素子に設けたものに限らず、方形状等の
各種形状に形成された圧電磁器素子の分極処理に適用す
ることができる。
Although the above embodiment has been described based on a piezoelectric ceramic element formed from a PZT-based ceramic material, the piezoelectric ceramic element is formed from a lead titanate-based ceramic material by appropriately setting an electric field value, a heating temperature, and the like. The same can be applied to piezoelectric ceramic elements. Also, the present invention is not limited to the case where the double-sided electrodes are provided on a disc-shaped piezoelectric ceramic element, and can be applied to polarization processing of piezoelectric ceramic elements formed in various shapes such as a square shape.

【0026】また、有機高分子材料には好適な一例とし
て水溶性のポリビニル・ピロリドンをブチルカルビトー
ルで溶解したものを挙げたが、その他の水溶性の有機高
分子材料或いはアルコール等による溶融乃至は溶解性を
有する有機高分子材料であればいずれのものでも適用す
ることができる。この選択される有機高分子材料の材質
に応じ、無機絶縁物の混合率は電気絶縁性,印刷性等の
要請に基づいて適宜に設定することができる。
As a preferred example of the organic polymer material, a material obtained by dissolving water-soluble polyvinyl pyrrolidone with butyl carbitol is mentioned. Any organic polymer material having solubility can be used. Depending on the selected organic polymer material, the mixing ratio of the inorganic insulator can be appropriately set based on requirements such as electric insulation and printability.

【0027】[0027]

【発明の効果】以上の如く、本発明の請求項1に係る圧
電磁器素子の分極方法に依れば、無機絶縁物を有機高分
子材料に混合した絶縁ペーストから電極間の磁器素地面
を被覆4する耐電圧用の被膜を形成し、その圧電磁器素
子の両面電極に大気中で高電圧を印加することにより、
シリコンオイル等の絶縁油によらない被膜で、高電圧印
加時の放電短絡が電極間に生ずるのを防ぐことができ
る。
As described above, according to the polarization method of the piezoelectric ceramic element according to the first aspect of the present invention, the porcelain ground between the electrodes is covered with an insulating paste in which an inorganic insulator is mixed with an organic polymer material. By forming a film for withstanding voltage 4 and applying a high voltage to the double-sided electrodes of the piezoelectric ceramic element in the atmosphere,
It is possible to prevent the occurrence of a discharge short circuit between the electrodes when a high voltage is applied by using a coating not made of insulating oil such as silicon oil.

【0028】本発明の請求項2に係る圧電磁器素子の分
極方法に依れば、無機絶縁物を水溶性の有機高分子材料
に配合した絶縁ペーストから耐電圧用の被膜を形成する
ことにより、水洗処理による簡略な工程で完全に除去可
能な耐電圧用の被膜を電極間の磁器素地面に形成でき、
高電圧印加時の放電短絡が電極間に生じない分極処理が
行えると共に、後工程での接着或いは半田付け,絶縁塗
料の塗装等に悪影響を及ぼ巣のを防げ、また、その耐電
圧用の被膜除去により環境に与える影響は確実に抑えら
れる。
According to the method for polarizing a piezoelectric ceramic element according to claim 2 of the present invention, a withstand voltage film is formed from an insulating paste in which an inorganic insulator is mixed with a water-soluble organic polymer material. A coating for withstand voltage that can be completely removed by a simple process of washing with water can be formed on the porcelain ground between the electrodes,
Polarization can be performed so that short-circuiting does not occur between the electrodes when high voltage is applied. In addition, it is possible to prevent adverse effects on adhesion or soldering in the subsequent process, coating of insulating paint, etc., and a coating for withstand voltage. The effect on the environment by the removal is reliably suppressed.

【0029】本発明の請求項3に係る圧電磁器素子の分
極方法に依れば、シリカまたはアルミナの無機絶縁物若
しくはシリカとアルミナとの混合無機絶縁物を40〜8
0wt%で有機高分子材料に混合した絶縁ペーストから
耐電圧用の被膜を印刷形成するため、無機絶縁物を混合
しても、素地面の露出がない耐電圧用被膜を高精度に印
刷形成できると共に、高電圧印加時の放電短絡が電極間
に生ずるのを確実に防ぐことができる。
According to the method for polarizing a piezoelectric ceramic element according to claim 3 of the present invention, an inorganic insulator of silica or alumina or a mixed inorganic insulator of silica and alumina is used in an amount of 40 to 8%.
Since a coating for withstand voltage is formed by printing from an insulating paste mixed with an organic polymer material at 0 wt%, a coating for withstand voltage that does not expose a bare ground can be formed with high precision even when an inorganic insulator is mixed. At the same time, it is possible to reliably prevent a discharge short circuit between the electrodes when a high voltage is applied.

【図面の簡単な説明】[Brief description of the drawings]

【図1a】本発明に係る方法で耐電圧用被膜を形成する
前の圧電磁器素子を示す平面図である。
FIG. 1a is a plan view showing a piezoelectric ceramic element before a withstand voltage coating is formed by a method according to the present invention.

【図1b】図1aの圧電磁器素子を示す側断面図であ
る。
FIG. 1b is a side sectional view showing the piezoelectric ceramic element of FIG. 1a.

【図2a】本発明に係る方法で耐電圧用被膜を形成した
後の圧電磁器素子を示す平面図である。
FIG. 2a is a plan view showing a piezoelectric ceramic element after a withstand voltage coating is formed by a method according to the present invention.

【図2b】図2aの圧電磁器素子を示す側断面図であ
る。
2b is a side sectional view showing the piezoelectric ceramic element of FIG. 2a.

【図3】本発明に係る方法で耐電圧用被膜を形成した圧
電磁器素子と共に、分極処理装置の構成を概略的に示す
説明図である。
FIG. 3 is an explanatory view schematically showing a configuration of a polarization processing device together with a piezoelectric ceramic element having a withstand voltage coating formed by a method according to the present invention.

【符号の説明】[Explanation of symbols]

1 圧電磁器素子 2,3 両面電極 4 磁器素地面 5 耐電圧用の被膜 Reference Signs List 1 piezoelectric ceramic element 2, 3 double-sided electrode 4 ceramic ground

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 高電圧を圧電磁器素子の両面電極に大気
中で印加することにより圧電磁器素子の分極処理を行う
圧電磁器素子の分極方法において、 無機絶縁物を有機高分子材料に混合した絶縁ペーストか
ら電極間の磁器素地面を被覆する耐電圧用の被膜を形成
し、その圧電磁器素子の両面電極に大気中で高電圧を印
加するようにしたことを特徴とする圧電磁器素子の分極
方法。
1. A method for polarizing a piezoelectric ceramic element by applying a high voltage to both electrodes of the piezoelectric ceramic element in the atmosphere, the method comprising a step of polarizing the piezoelectric ceramic element. A method for polarizing a piezoelectric ceramic element, comprising forming a withstand voltage coating for covering a ceramic ground between electrodes from a paste, and applying a high voltage in the atmosphere to both side electrodes of the piezoelectric ceramic element. .
【請求項2】 無機絶縁物を水溶性の有機高分子材料に
混合した絶縁ペーストから耐電圧用の被膜を形成するよ
うにしたことを特徴とする請求項1に記載の圧電磁器素
子の分極方法。
2. The polarization method for a piezoelectric ceramic element according to claim 1, wherein a withstand voltage film is formed from an insulating paste obtained by mixing an inorganic insulator with a water-soluble organic polymer material. .
【請求項3】 シリカまたはアルミナの無機絶縁物もし
くはシリカとアルミナとの混合無機絶縁物を有機高分子
材料に40〜80wt%混合した絶縁ペーストから耐電
圧用の被膜を印刷形成するようにしたことを特徴とする
請求項1または2に記載の圧電磁器素子の分極方法。
3. A voltage-resistant coating is formed by printing from an insulating paste in which an inorganic insulating material of silica or alumina or a mixed inorganic insulating material of silica and alumina is mixed with an organic polymer material in an amount of 40 to 80% by weight. 3. The method according to claim 1, wherein the piezoelectric ceramic element is polarized.
JP26926797A 1997-09-16 1997-09-16 Polarization method of piezoelectric ceramic element Expired - Fee Related JP3360244B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26926797A JP3360244B2 (en) 1997-09-16 1997-09-16 Polarization method of piezoelectric ceramic element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26926797A JP3360244B2 (en) 1997-09-16 1997-09-16 Polarization method of piezoelectric ceramic element

Publications (2)

Publication Number Publication Date
JPH1197759A true JPH1197759A (en) 1999-04-09
JP3360244B2 JP3360244B2 (en) 2002-12-24

Family

ID=17469983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26926797A Expired - Fee Related JP3360244B2 (en) 1997-09-16 1997-09-16 Polarization method of piezoelectric ceramic element

Country Status (1)

Country Link
JP (1) JP3360244B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120134059A1 (en) * 2009-08-27 2012-05-31 Murata Manufacturing Co., Ltd. Esd protection device and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120134059A1 (en) * 2009-08-27 2012-05-31 Murata Manufacturing Co., Ltd. Esd protection device and manufacturing method thereof
US8885312B2 (en) * 2009-08-27 2014-11-11 Murata Manufacturing Co., Ltd. ESD protection device and manufacturing method thereof

Also Published As

Publication number Publication date
JP3360244B2 (en) 2002-12-24

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