JPH1190874A - Handling device for plate-like member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the warp of a plate-like member by regulating the magnitude of the positive pressure generated by a pressure generating means with a pressure regulating means, and generating the positive pressure in a main body section. SOLUTION: A hand main body 11 is recessively hollowed in it, and an 0-ring seal 12 is buried over the whole periphery on its outer periphery. An air hole 16a is formed on the bottom section of the hand main body 11, the pressure of a compressed air source is regulated by a pressure regulator 14, and compressed air is sprayed from the air hole 16a. When a glass plate 1 is supported at a peripheral section, for example, a warp is naturally generated at the center section by the tare weight of the glass plate 1. When the force corresponding to the tare weight of the glass plate 1 is applied by the air pressure to prevent the warp while the glass plate 1 is contact-supported at the peripheral section only, the tare weight is offset, and the warp of the glass plate 1 can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-like member handling apparatus for supporting or holding a plate-like member for transport.

[0002]

2. Description of the Related Art Conventionally, a self-luminous flat display as shown in FIG. 18 has been known. In FIG. 18, reference numeral 1 denotes a face plate on which a luminous body 2 such as a phosphor is formed on a glass plate 1 as shown in FIG.
FIG. 20 shows a sectional view of the face plate 1. Usually, the luminous body 2 is thin, so that the luminous body 2 may be peeled off by contact with a jig or the like. The size of the glass plate 1 is, for example, 10
It is 00 mm × 600 mm and the thickness is about 3 mm.

Reference numeral 3 denotes a rear plate, which is an electron source comprising an electron-emitting device for irradiating the glass plate with electrons to the phosphor and wiring for driving the electron-emitting device.
Are formed. Since the electron source 4 is fine, it is easily damaged by contact with a jig or the like. Reference numeral 5 denotes an outer frame for keeping the distance between the glass plates 1 and 3. The flat display consists of face plate 1 and rear plate 3
Is manufactured by aligning the horizontal position of the face plate 1 and the rear plate 3 with a joint 5a such as a low melting point glass frit, heating (for example, 420 ° C.), cooling, and joining.

The manufacturing process is shown in FIGS.

FIG. 21 is a schematic structural view of a manufacturing process. Numeral 8 denotes a robot for gripping and transferring each work.
The robot 8 has a hand 11 holding a glass plate.
Is attached. Reference numeral 12 denotes a glass plate joining apparatus. Reference numeral 6 denotes a face plate transfer belt conveyor in which the face plate 1 is transferred with the luminous body 2 facing upward and stopped at a predetermined position. Reference numeral 7 denotes a belt conveyor for transferring glass plates, and reference numeral 13 denotes a belt conveyor for transferring the outer frame 5. A joint 5a (frit glass) is attached to the outer frame 5 in advance. The robot 8 grips and transports each of the works 1, 3, and 5 with the hand 11, sets the workpieces on the joining device 12, and joins the face plate, the outer frame, and the rear plate by heating and pressing the joining device 12. I do. The robot 8 has a vertical Z axis and a forward / backward r.
Axis, rotation θ axis, and hand rotation α axis.

Conventionally, a method for gripping or supporting an article which is a thin plate and whose surface cannot be mechanically contacted with the hand 11 described above includes, for example, a Bernoulli chuck disclosed in Japanese Patent Application Laid-Open No. 1-127538. Alternatively, there is a method such as an air bearing (air levitation), and both methods are slightly lifted and held or supported by an air flow. FIGS. 24 and 25 show a method of holding and supporting the thin plate at that time (FIG. 24 shows a Bernoulli chuck, and FIG. 25 shows a flat plate supported by an air bearing). FIGS. 3 and 11 show the case where the display area (the area where the light emitting body or the electron source is formed) is supported or gripped (FIG. 3 is supported and FIG. 11 is gripped).

[0007] However, the above-mentioned conventional example is the same as the device 1 described above.
The use of the second hand 11 has the following disadvantages.

In the methods shown in FIGS. 3 and 11, both support and grip only the peripheral portion of the glass plate, and the deflection a occurs due to the weight of the glass plate.
As the glass plate becomes larger, the value of a becomes larger, and furthermore, in the case of supporting and gripping the periphery, the deflection a becomes larger, which may cause breakage.

[0009] Further, even if the support and the grip can be performed,
The formation formed on the surface of the glass plate may be subjected to a force due to the bending, and may be adversely affected such as disconnection (crack) and peeling.

[0010] Further, usually, the robot is conveyed and moved by a robot or the like in the state shown in Figs. 3 and 11, but the vibration at that time also vibrates the glass plate, and in addition, the portion a receives a strong force, and May be damaged, and the glass plate may also be damaged. Therefore, it is difficult to apply the above-mentioned flat display to mass production.

Also, if there is a deflection a in FIG.
When vacuum suction is performed on the upper heating plate 9 of the apparatus 12 in steps S5 and S6 of the manufacturing process described above, air leakage may occur due to the gap a, and vacuum suction may not be performed.

The methods shown in FIGS. 24 and 25 have the following disadvantages.

FIG. 24 is called a Bernoulli chuck,
A high-speed air flow is created between the thin plate and the suction pressure is held by the negative pressure due to the flow velocity, and the clearance between the chuck and the thin plate is only about 0.01 to 0.1 mm. In this case, depending on the thickness of the formed product on the surface of the glass plate shown in FIG. 26, the adsorption may be incomplete and may not be performed. In addition, a high-speed air flow may blow off the formed object.

FIG. 25 shows a so-called air bearing. As in the former case, as shown in FIG. 27, depending on the thickness of the formed product, air levitation is incomplete, and the chuck plane comes into contact with the formed product. In some cases. In addition, since there is always an air flow, it is conceivable that the formed product is blown off and damaged.

Therefore, in the flat display manufacturing process described above, it is necessary to hold and support the surface of the formed glass plate in steps S1 to S7 and S8 to S12 in FIG. Step S3 is support, step S9 is gripping), and application to the hand 11 for manufacturing a flat display is difficult.

In the flat display manufacturing process, in steps S2 and S3 in FIG. 23, it is necessary to rotate the hand 11 by 180 ° from the holding of the glass plate to the support of the glass plate.
In FIGS. 3 and 25, since the gripping force is not generated, the above-described conversion cannot be performed as it is.

Referring to FIG. 11, the conversion is possible,
There are disadvantages as already mentioned.

In FIG. 24, since a large gripping force cannot be obtained, conversion is impossible.

Accordingly, the present invention has been made in view of the above-described problems, and an object of the present invention is to prevent bending of a plate-shaped member while holding or supporting only a peripheral portion of the plate-shaped member. It is an object of the present invention to provide a device for handling a plate-like member.

[0020]

Means for Solving the Problems The above-mentioned problems are solved,
In order to achieve the object, a plate-like member handling device according to the present invention is a plate-like member handling device for supporting a plate-like member, and a box-like member for supporting a peripheral portion of the plate-like member. It is characterized by comprising a main body, pressure generating means for generating a positive pressure in the main body, and pressure adjusting means for adjusting the magnitude of the positive pressure generated by the pressure generating means.

Further, in the plate-like member handling apparatus according to the present invention, the pressure generating means has an ejection hole for ejecting gas into the main body, and the pressure adjusting means ejects the gas from the ejection hole. It is characterized in that the gas pressure is adjusted.

Further, in the plate-like member handling apparatus according to the present invention, the pressure adjusting means may be configured so that the positive pressure is adjusted so that the pressure in the main body portion becomes a pressure that cancels the deformation of the plate-like member due to its own weight. It is characterized by adjusting the size of.

In the plate-like member handling apparatus according to the present invention, the weight per unit area of the plate-like member is calculated in advance, and the pressure adjusting means includes:
The magnitude of the positive pressure is adjusted to a value corresponding to the weight per unit area.

Further, in the plate-like member handling apparatus according to the present invention, a sensor for detecting the amount of deformation of the plate-like member due to its own weight, and the pressure so as to cancel the amount of deformation according to an output signal of the sensor. And control means for controlling the operation of the adjusting means.

Further, in the plate-like member handling apparatus according to the present invention, the main body is provided with a communication hole communicating with outside air.

The plate-like member handling device according to the present invention is a box-like member handling device for gripping a plate-like member, wherein the box includes suction means for sucking a peripheral portion of the plate-like member. A main body, a pressure generating means for generating a negative pressure in the main body, and a pressure adjusting means for adjusting the magnitude of the negative pressure generated by the pressure generating means. .

Further, in the plate-like member handling apparatus according to the present invention, the pressure generating means has a negative pressure generating source for sucking gas from inside the main body, and the pressure adjusting means has a negative pressure generating source. It is characterized in that the suction pressure is adjusted.

Further, in the plate-like member handling apparatus according to the present invention, the pressure adjusting means may be configured so that the negative pressure is adjusted so that the pressure in the main body portion becomes a pressure that cancels the deformation of the plate-like member due to its own weight. It is characterized by adjusting the size of.

Further, in the plate-like member handling apparatus according to the present invention, the weight per unit area of the plate-like member is calculated in advance, and the pressure adjusting means includes:
The magnitude of the negative pressure is adjusted to a value corresponding to the weight per unit area.

Further, in the plate-like member handling apparatus according to the present invention, a sensor for detecting an amount of deformation of the plate-like member due to its own weight, and the sensor is configured to cancel the amount of deformation according to an output signal of the sensor. Control means for controlling the operation of the pressure adjusting means.

Further, in the plate-like member handling apparatus according to the present invention, the main body is provided with a communication hole communicating with outside air.

Further, the plate-like member handling apparatus according to the present invention is a plate-like member handling apparatus for supporting or holding the plate-like member, wherein the suction means for sucking the peripheral portion of the plate-like member is provided. A box-shaped main body provided with the first pressure generating means for generating a positive pressure in the main body; a second pressure generating means for generating a negative pressure in the main body; A first pressure adjusting means for adjusting the magnitude of the positive pressure generated by the pressure generating means, and a second pressure adjusting means for adjusting the magnitude of the negative pressure generated by the second pressure generating means. It is characterized by having.

Further, in the plate-like member handling apparatus according to the present invention, the first pressure generating means has an ejection hole for ejecting gas into the main body, and the first pressure adjusting means includes It is characterized in that the pressure of the gas ejected from the ejection holes is adjusted.

Further, in the plate-like member handling apparatus according to the present invention, the second pressure generating means has a negative pressure generating source for sucking gas from inside the main body, and the second pressure adjusting means has a negative pressure. The suction pressure of the negative pressure source is adjusted.

In the plate-like member handling apparatus according to the present invention, the first and second pressure adjusting means may include a pressure inside the main body portion, wherein the pressure inside the main body cancels the deformation of the plate-like member due to its own weight. The magnitude of the positive pressure or the negative pressure is adjusted so that

Further, in the plate-like member handling apparatus according to the present invention, the weight per unit area of the plate-like member is calculated in advance, and the first and second pressure adjusting means are provided with the positive pressure or the positive pressure or the negative pressure. The magnitude of the negative pressure is adjusted to a value corresponding to the weight per unit area.

Further, in the plate-like member handling apparatus according to the present invention, a sensor for detecting the amount of deformation of the plate-like member due to its own weight, and the sensor is configured to cancel the amount of deformation according to an output signal of the sensor. Control means for controlling operations of the first and second pressure adjusting means.

Further, in the plate-like member handling apparatus according to the present invention, the main body is provided with a communication hole communicating with the outside air.

The apparatus for handling a plate-like member according to the present invention may further comprise a rotating means for rotating the main body, and the first and second pressure adjusting means may include a rotating means for rotating the main body. The pressure is adjusted so that the pressure in the main body changes in a cosine curve with respect to the rotation angle of the portion.

Further, in the plate-like member handling apparatus according to the present invention, a rotating means for rotating the main body, a sensor for detecting an amount of deformation of the plate-like member due to its own weight, and the main body by the rotating means When the part rotates,
It is characterized by further comprising control means for controlling operations of the first and second pressure adjusting means so as to cancel the deformation amount in accordance with an output signal of the sensor.

[0041]

An embodiment of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a schematic configuration of the handling device.

In FIG. 1, 1 is a face plate of a flat display, and 11 is a hand body.

FIG. 2 is a side sectional view of the hand main body 11. The inside of the hand main body 11 is hollowed out. An O-ring seal 12 is embedded around the entire circumference. An air hole 1 is provided at the bottom of the hand body 11.
6 is formed, and the pressure of the compressed air source is adjusted by the pressure adjuster 14 so that the compressed air is ejected from 16 air holes.

The principle of the present embodiment will be described with reference to the following examples.

(Example 1) In FIG. 3, when the glass plate 1 is supported at the peripheral portion, the weight a of the glass plate itself naturally causes the deflection of a at the central portion. The purpose of the present invention is to eliminate and support the flexure a only at the peripheral portion, but for this purpose, if the force corresponding to the weight of the glass is applied by the air pressure in FIG. As a result, the deflection a of the glass plate 1 is eliminated. Here, the thickness t of the glass plate 1 used in this embodiment
Is 3 mm, but the thickness of the glass to which the present invention can be applied is not limited to this. Since the specific gravity of the glass is 2.5, the self-weight of the glass used in this example is F = 1 cm × 1 cm × 0.3 cm × 2.5 = 0.75 g per 1 cm ² . Therefore, the air pressure in FIG.
= 0.75 g / cm ² was adjusted by the pressure regulator 14, and the closed space 1 of the main body 11 in FIG.
1a became a pressure of 0.75 g / cm ² and supported the weight of the glass, so that the deflection a of the glass plate 1 was eliminated.

At this time, the O-ring seal 12 is placed in the space 11a.
It is installed to ensure the degree of airtightness.

FIG. 4 is a view showing a modification of the air hole 16a in FIG. 2 used in this embodiment.
a, the influence on the glass plate 1 due to the intensive air blow to the central portion of the glass plate 1 when the air is blown out is eliminated, and the closed space 11a is quickly released.
Are provided with a plurality of air holes 17a so as to have the same pressure.

FIG. 5 shows that, instead of applying a constant air pressure, the height of the glass plate is detected by a non-contact laser sensor so that the glass plate 1 is horizontal, and the electropneumatic valve 18 is controlled by the control device 20. This is another modified example in which feedback control is performed by the following. It is, for example, the aforementioned P
= 0.75 g / cm ² (1 atm is 1000 g / cm ² ), it is difficult to accurately control the pressure over a large area by the pressure regulator 14.
This is because there is an error in the thickness t = 3 mm and the deflection amount a may not be constant.

FIG. 6 shows a control flowchart when the modification of FIG. 5 is used.

First, as a pre-process, in FIG. 5, the value S0 of the distance sensor 19 when the glass plate 1 is horizontal is shown.
Is measured in advance. In this modification, for example, S0
= 10 mm. In the flowchart of FIG. 6, the initial pressure is set to P = 0.75 g / cm ² assuming that the glass thickness t is 3 mm as described above.

First, in step S1, the distance S (the distance between the glass plate 1 and the sensor 19) is measured.
In step S2, comparison is made with the target value S0 = 10 mm. At this time, if the measured value S is within a predetermined allowable range (for example, set to 9.9 to 10.1 mm in this example), the process returns to step S1 without any processing as a dead zone. When the measured value S is less than the allowable range (less than 9.9 mm), the pressure of P is insufficient, so that the voltage is applied to the electropneumatic valve 18 to increase the pressure. The increase E in this case is 9.9−S = △ S,
E = △ S × Proportional constant. The proportional constant is obtained in advance by an experiment. When the measured value S exceeds the allowable range (10.2 or more), S-10.2 = △ S, E = △
As the S × proportional constant, the voltage of E is reduced to reduce the pressure.

One loop of these controls takes 0.1 s
ec.

FIG. 7 is a view showing an example in which a plurality of vacuum pads 21 are provided on the outer periphery of the glass plate 1 in addition to the O-ring seal 12 of this embodiment shown in FIG. is there. Vacuum pad 2
When vacuum suction is performed in step 1, the height of the pad shrinks, the glass plate 1 is pressed more firmly against the O-ring seal 12, and the degree of sealing of the sealed space 11a increases. This means that O
The instability of the contact state between the ring seal 12 and the glass plate 1 is solved. That is, if there is a gap between the glass plate 1 and the O-ring seal 12 and there is any air leakage, in the above-described operation of measuring the height of the glass plate 1 and performing feedback control of the pressure, control is performed. Inaccurate. In particular, when the gap is not constant (the gap becomes larger or smaller by controlling the pressure), it becomes inaccurate to keep the glass plate 1 horizontal.

FIG. 8 is a modified example of FIG. 7, in which a concave portion for accommodating the vacuum pad 21 is provided in the hand main body 11 and the O-ring seal 12 is removed (the contraction of the vacuum pad causes the hand main body 11 to contract. The glass plate 1 is pressed against the upper surface to maintain the degree of sealing).

FIG. 9 shows an example in which a plurality of holes 11c are provided in the hand body 11. This can increase the pressure of the pressure regulator 14 by providing the hole 11c. This is because the P = 0.75g / cm ² as previously described, since the positive pressure of 1 atm is at 1000 g / cm ^2, must be reduced to about 1/1333, high-performance pressure regulator Cost increases due to Therefore, when the hole 11c is provided, the pressure from the air hole 16a escapes from the hole of the hole 11c, so that the pressure of the pressure regulator 14 is experimentally reduced to 1/133 (7.5 g /
cm ² ). Therefore, the pressure regulator 1
There is no need to use high-performance objects for 4.

FIG. 10 shows a combination of FIGS. 7 and 9 using an inexpensive voltage reducing valve 18 and a distance sensor 19 to
2 shows an example in which feedback control for leveling the glass plate is performed.

In the above description, the case where the glass plate 1 is mounted on the hand 11 and supported is shown.
An example in which the glass plate 1 is gripped by the hand 11 will be described with reference to a second embodiment below.

(Embodiment 2) FIG. 11 shows a vacuum pad 2
1 shows an example in which the periphery of the glass plate 1 is vacuum-adsorbed.

Due to the weight of the glass plate 1, the deflection a occurs. To eliminate this deflection a and make it horizontal,
As shown in FIG. 12, the pressure of the closed space 11a is -0.7.
What is necessary is just to make it 5 g / cm < ² >.

In FIG. 12, reference numeral 22 denotes a negative pressure regulator, which is a negative pressure of a vacuum source (-1 atm = -1000 g / cm ² ).
To P = −0.75 g / cm ² . The description is the same as the case of the positive pressure, so the details are omitted.

FIG. 13 shows an example in which feedback control is performed by the electropneumatic negative pressure regulator 23 by the distance sensor 19, and the details are the same as in the case of the positive pressure.

By providing the hole 11c also in the case of a negative pressure, the rate of pressure adjustment from the negative pressure source can be reduced from 1/1333 to 1
/ 133.

(Embodiment 3) FIG. 14 shows a hand capable of switching between the positive pressure and the negative pressure.

A plurality of vacuum pads 21 are installed around the hand body 11 and a ring seal 12 is attached. The hand body 11 has a plurality of air holes 11c.
Is open. 19 is a distance sensor, 20 is a feedback control device, and outputs a command voltage to the negative pressure regulator 23 and the electropneumatic pressure reducing valve 18 respectively. Reference numeral 24 denotes a nail for preventing the glass plate 1 from sliding down.

The operation of the hand shown in FIG. 14 will be described.

By the feedback controller 20,
The negative pressure regulator 23 is controlled so that the glass plate 1 is horizontal, and the vacuum pad 21 holds the glass plate 1 by suction.

Next, the rotation of the α axis is performed. The deflection due to the glass's own weight decreases with rotation and disappears at 90 ° shown in FIG. 15 (when no control is performed). Therefore, the feedback control is automatically performed by the controller 20 so that the vacuum pressure becomes close to 0 (−0.75 g / cm ² → 0) with the rotation.

90 ° -180 ° is 0 → + 0.75 g / c
m ² , the controller 20 feeds back the value of the sensor 19 to the electropneumatic pressure reducing valve 18 to control the adjustment.

At this time, FIG. 16 through FIG. 14 through FIG.
The change of the air pressure up to the above becomes a cosine curve shown in FIG. If the feedback control is automatically performed by the sensor 19, the pressure changes automatically as shown in FIG.
When the feedback control by the sensor 19 was not performed, if the pressure change shown in FIG. 17 was performed according to the rotation angle of the α axis, the glass plate could be kept horizontal even when rotated in the direction of gravity.

Example 4 Using the hand of Example 3, a flat panel display was manufactured. This will be described below.

FIG. 23 is a flowchart for setting the face plate 1, the rear plate 3, and the outer frame 5 to the display manufacturing apparatus 12 shown in FIG. The operation will be described with reference to FIG. 21, FIG. 22, and FIG. Note that FIG.
FIG. 22 shows a sectional view of the device 12 of FIG.

In step S1, the robot 8 moves the conveyor 6
Move up. At this time, the grip surface of the hand 11 of the present invention is turned downward by the α axis. Since the face plate 1 is stopped at a predetermined position on the conveyor 6, it moves upward. In step S2, the face plate 1 is sucked and gripped. Then rise.

In step S3, the α axis is rotated (180
°), the gripping surface of the hand 11 is turned upward. Step S4
Is transferred below the upper heating plate 9 of the apparatus 12. In step S5, the face plate 1 is brought into contact with the heating plate 9, and the face plate 1 is sucked by the vacuum holes 9a (step S6). In step S7, the suction support of the hand 11 is stopped, and the hand 11 is lowered. Thus, the face plate 1 is set on the upper heating plate 9. Step S8
In step S12, the rear plate 3 is
Although set to 0, unlike step S1 to step S7, it can be set without rotation of the α-axis. Step S
Steps 13 to S16 are a set of the outer frame 5. The workpieces 1, 3, and 5 set in step S17 are joined.
The low-melting glass frit 5 a which is disposed in the outer frame 5 in advance is solid at room temperature, so that the frit 5 a does not adhere to the hand 11 when transported by the hand 11.

The display manufacturing apparatus 12 shown in FIG.
I will explain. In the display manufacturing apparatus 12, the upper heating plate 9 moves up and down. The lower heating plate 10 is on an x, y, θ table 128. Positioning CCD camera 13
6A and 6B, the position of the face plate 1 set on the upper heating plate 9 is read, and the lower heating plate 1 is adjusted accordingly.
The position of the rear plate 3 set to 0 is adjusted by the x, y, θ table 128. After the position adjustment, the upper heating plate 9 is lowered, heated (420 ° C.), and the frit glass 5
a is melted, and the temperature is lowered and the sealing is completed. After the sealing is completed, the vacuum of 9a is stopped, the upper heating plate 9 rises, and the flat display is taken out. The take-out was performed by applying a positive pressure from 10a, floating with air, placing a table with rollers at the same height position as the upper surface of the lower heating plate 10, and moving horizontally. Thus, a flat display was formed.

In the fourth embodiment, the flat panel display is formed by the face plate, the rear plate, and the outer frame. However, in the case of a display that requires a high vacuum inside, the flat panel display is referred to as a spacer. Is arranged.

[0077]

As described above, according to the present invention,
The following effects can be obtained.

1. The large-sized glass plate is supported at the periphery to remove the deflection at the center, and can be supported and held by suction.

2. 0.75g / cm to support the weight of glass
^An air line, without using a precise and expensive pressure regulator, to obtain a minute pressure of ² or -0.75 g / cm ²
Alternatively, it can be easily realized at low cost by providing an escape hole in the box.

3. By measuring the position of the glass surface with a distance sensor and performing feedback control on the pressure regulator,
Even if there is an error in the thickness of the glass or an error in the pressure adjustment, the glass surface can be leveled.

4. A configuration in which both the positive pressure and the negative pressure are applied to the box body allows the glass to be kept horizontal even in the 180 ° rotation in which the direction of gravity is reversed.

[0082]

[Brief description of the drawings]

FIG. 1 is a diagram for explaining the principle of a hand according to an embodiment.

FIG. 2 is a side sectional view of FIG.

FIG. 3 is a diagram showing a state where a glass plate is supported.

FIG. 4 is a diagram showing another example of an air hole.

FIG. 5 is a diagram illustrating an example in which air pressure is feedback-controlled.

FIG. 6 is a flowchart illustrating an operation of performing feedback control of air pressure.

FIG. 7 is a view showing a modified example of the hand.

FIG. 8 is a view showing a modified example of the hand.

FIG. 9 is a view showing a modification of the hand.

FIG. 10 is a view showing a modification of the hand.

FIG. 11 is a diagram showing a state where a glass plate is gripped.

FIG. 12 is a diagram showing a configuration for canceling the deflection of the glass plate.

FIG. 13 is a view showing a modified example of the hand shown in FIG.

FIG. 14 is a diagram showing a configuration of a hand used in a manufacturing process of a flat display.

FIG. 15 is a view showing a state in which the hand shown in FIG. 14 is rotated by 90 °.

FIG. 16 is a view showing a state in which the hand shown in FIG. 14 is rotated by 180 °.

FIG. 17 is a diagram showing a pressure change when the hand is rotated.

FIG. 18 is a cross-sectional view of a finished product of a flat display.

FIG. 19 is a diagram showing a front glass plate of a flat display.

FIG. 20 is a sectional view of a front glass plate of the flat display.

FIG. 21 is a diagram showing a configuration of an apparatus for manufacturing a flat display.

FIG. 22 is a diagram showing a configuration of a bonding device for a flat display.

FIG. 23 is a flowchart showing a flat display manufacturing process.

FIG. 24 is a view showing a Bernoulli chuck.

FIG. 25 is a diagram showing air support.

FIG. 26 is a view showing a conventional adsorption method.

FIG. 27 is a view showing a conventional supporting method.

[Explanation of symbols]

 Reference Signs List 1 face plate 2 light emitter 3 rear plate 4 light emitting element 5 outer frame 5a frit glass 6,7,13 belt conveyor 8 robot 9 upper heating plate 10 lower heating plate 11 hand 12 joining device 14 pressure regulator 15 support 16 air hole Reference Signs List 17 air hole 18 electropneumatic pressure regulator 19 distance sensor 20 feedback controller 21 vacuum pad 22 negative pressure regulator 23 electropneumatic negative pressure regulator 24 support claw 128 x, y, θ table 136A, B CCD camera 250 Bernoulli chuck 251 air Support

Claims (21)

[Claims] 1. A plate-like member handling device for supporting a plate-like member, comprising: a box-like main body for supporting a peripheral portion of the plate-like member; and a positive pressure in the main body. A pressure generating means for adjusting the magnitude of the positive pressure generated by the pressure generating means. 2. The apparatus according to claim 1, wherein said pressure generating means has an ejection hole for ejecting gas into said main body, and said pressure adjusting means adjusts the pressure of gas ejected from said ejection hole. Item 2. A device for handling a plate-like member according to Item 1. 3. The pressure adjusting device according to claim 2, wherein the pressure adjusting unit adjusts the magnitude of the positive pressure such that the pressure in the main body is a pressure that cancels the deformation of the plate-shaped member due to its own weight. Item 2. A device for handling a plate-like member according to Item 1. 4. The method according to claim 1, wherein a weight per unit area of the plate member is calculated in advance, and the pressure adjusting unit adjusts the magnitude of the positive pressure to a value corresponding to the weight per unit area. The device for handling a plate-shaped member according to claim 3. 5. A sensor for detecting an amount of deformation of the plate-like member due to its own weight, and control means for controlling the operation of the pressure adjusting means so as to cancel the amount of deformation in accordance with an output signal of the sensor. The apparatus for handling a plate-shaped member according to claim 3, wherein the apparatus is provided. 6. The apparatus according to claim 1, wherein the main body has a communication hole communicating with outside air. 7. A plate-like member handling apparatus for gripping a plate-like member, comprising: a box-like main body provided with suction means for sucking a peripheral portion of the plate-like member; and a negative pressure in the main body. And a pressure adjusting means for adjusting the magnitude of the negative pressure generated by the pressure generating means. 8. The apparatus according to claim 1, wherein said pressure generating means has a negative pressure generating source for sucking gas from inside said main body, and said pressure adjusting means adjusts a suction pressure of said negative pressure generating source. Item 8. A device for handling a plate-shaped member according to Item 7. 9. The pressure adjusting means adjusts the magnitude of the negative pressure such that the pressure in the main body portion becomes a pressure that offsets the deformation of the plate-shaped member due to its own weight. Item 8. A device for handling a plate-shaped member according to Item 7. 10. A method in which a weight per unit area of the plate-like member is calculated in advance, and the pressure adjusting unit adjusts the magnitude of the negative pressure to a value corresponding to the weight per unit area. The apparatus for handling a plate-shaped member according to claim 9. 11. A sensor for detecting an amount of deformation of the plate-shaped member due to its own weight, and control means for controlling the operation of the pressure adjusting means so as to cancel the amount of deformation in accordance with an output signal of the sensor. The apparatus for handling a plate-shaped member according to claim 9, further comprising: 12. The plate-like member handling apparatus according to claim 7, wherein the main body has a communication hole communicating with outside air. 13. A plate-like member handling device for supporting or gripping a plate-like member, comprising: a box-like main body provided with suction means for sucking a peripheral portion of the plate-like member; First pressure generating means for generating a positive pressure, second pressure generating means for generating a negative pressure in the main body, and the magnitude of the positive pressure generated by the first pressure generating means A first pressure adjusting means for adjusting the pressure, and a second pressure adjusting means for adjusting the magnitude of the negative pressure generated by the second pressure generating means. apparatus. 14. The first pressure generating means has an ejection hole for ejecting a gas into the main body, and the first pressure adjusting means adjusts the pressure of the gas ejected from the ejection hole. The plate-like member handling apparatus according to claim 13, wherein: 15. The second pressure generating means has a negative pressure generating source for sucking gas from inside the main body, and the second pressure adjusting means adjusts a suction pressure of the negative pressure generating source. The plate-like member handling apparatus according to claim 13, wherein: 16. The first and second pressure adjusting means,
The plate according to claim 13, wherein the magnitude of the positive pressure or the negative pressure is adjusted so that the pressure inside the main body portion is a pressure that offsets the deformation of the plate-shaped member due to its own weight. -Like member handling device. 17. The weight per unit area of the plate-like member is calculated in advance, and the first and second pressure adjusting units determine the magnitude of the positive pressure or the negative pressure by the weight per unit area. 17. The apparatus according to claim 16, wherein the value is adjusted to a value corresponding to: 18. A sensor for detecting an amount of deformation of the plate-like member due to its own weight, and an operation of the first and second pressure adjusting means so as to cancel the amount of deformation in accordance with an output signal of the sensor. The apparatus for handling a plate-shaped member according to claim 16, further comprising control means for controlling. 19. The apparatus according to claim 13, wherein the main body has a communication hole communicating with the outside air. 20. The apparatus according to claim 1, further comprising: a rotating unit configured to rotate the main unit, wherein the first and second pressure adjusting units are configured to control a pressure in the main unit with respect to a rotation angle of the main unit by the rotating unit. 14. The apparatus for handling a plate-shaped member according to claim 13, wherein the pressure is adjusted so that the pressure changes in a cosine curve. 21. A rotation unit for rotating the main body, a sensor for detecting an amount of deformation of the plate-like member due to its own weight, and a sensor according to an output signal of the sensor when the main body is rotated by the rotation unit. 14. The apparatus according to claim 13, further comprising control means for controlling operations of said first and second pressure adjusting means so as to cancel said deformation amount.
4. The device for handling a plate-shaped member according to claim 1.