JPH117609A - Thin film magnetic head, and recording and reproducing separation type head, and magnetic storing and reproducing device using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thin film magnetic head with little blotting in writing and a high recording magnetic field by forming an upper end part magnetic film on an upper magnetic film and a lower end part magnetic film on a lower magnetic film on end parts forming a magnetic gap. SOLUTION: This magnetic head is provided with an upper magnetic film 11 and a lower magnetic film 15 via non-magnetic magnetic gap film 17, and the upper magnetic film 11 forms an upper end part magnetic film 16 on the end part forming a magnetic gap film 17 on a magnetic gap side. A magnetic pole end part of the recording head of the thin film magnetic head is made by frame plating namely, the three kinds of films of the upper end part magnetic film 16, the gap film 17, and the lower end part magnetic film 18 are plated by using a same frame. Manufacture of a magnetic head of such a structure does not use a frame of silicon dioxide, etc., that eliminates the need for a device forming abrasion-proofness and frame material. Moreover, since the upper magnetic film 11 does not appear on a floating surface, there is little leakage flux from the upper magnetic film onto the floating surface and this permits to reduce blotting in writing on a medium.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel thin film magnetic head, a read / write separated magnetic head using the same, and a magnetic storage / reproducing apparatus.

[0002]

2. Description of the Related Art A thin-film magnetic head for a magnetic disk drive is formed on a slider held on a disk which rotates at a high speed. The recording head has a pole layer which is a thin film of a ferromagnetic material, and has a lower pole layer and an upper pole layer above and below the gap layer on the air bearing surface (ABS surface). The top and bottom pole layers of the recording head contact at the rear gap. In order to increase the recording density, it is necessary to write a lot of data on the surface of the magnetic disk. For this purpose, there is a method of increasing the recording density by narrowing the track width. Japanese Patent Application Laid-Open No. 7-296328 describes a method of providing a thin-film magnetic head having a magnetic pole width of 2 μm or less. In this example, a silicon dioxide layer is used as a plating frame when a magnetic film is formed by a plating method. Further, in the above invention, the pole layer from the ABS to the rear zero throat level is wider and parallel than the pole tip layer, and provides a parallel path for exchanging magnetic flux with the pole tip region, thereby increasing the magnetic flux transmission capability. It is stated to increase. 24 and FIG.
5 shows an upper magnetic film (P2 in FIG. 24).
(T), which is indicated by P2 in FIG. ) Shape is clarified, the gap depth position (upper part of the frame)
Thus, the sectional area of the upper magnetic film viewed from the air bearing surface is constant.

[0003]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a thin-film magnetic head which has a low write bleeding and a high recording magnetic field, and a recording / reproducing separated magnetic head and a magnetic storage / reproducing apparatus using the same.

[0004]

According to the present invention, there is provided a thin-film magnetic head having an upper magnetic film and a lower magnetic film via a non-magnetic magnetic gap film, wherein at least one of the upper magnetic film and the lower magnetic film is provided. An upper end magnetic film is formed on the upper magnetic film and a lower end magnetic film is formed on the lower magnetic film at an end portion where the magnetic gap is formed via the magnetic gap on the magnetic gap side.

According to another aspect of the present invention, at least one of the upper end magnetic film and the lower end magnetic film has a cross section parallel to the air bearing surface at a portion of the upper magnetic film and the lower magnetic film having the magnetic gap. Area, at least one of the upper end magnetic film and the lower end magnetic film has a track width smaller than the track width of the upper magnetic film and the lower magnetic film, and the upper end magnetic film and the lower end magnetic film At least one of them is characterized by one or a combination of two or more protruding on the air bearing surface side on the air bearing surface from the upper magnetic film and the lower magnetic film.

According to the present invention, there is provided the above-described thin film magnetic head,
The upper magnetic film and the lower magnetic film have a saturation magnetic flux density of 1.
The upper magnetic film formed by plating or sputtering having a width greater than the frame width of the plating magnetic film and having a specific resistance of 50 μΩcm or more; The lower magnetic film and the lower magnetic film have the same track width, the upper shield film for magnetically shielding the upper magnetic film and the magnetoresistive film has a width wider than the track width, and the upper magnetic film is It is characterized in that it is composed of one or a combination of two composed of a multilayer magnetic film. According to the present invention, there is provided a recording / reproducing separation type magnetic head in which a recording head for writing information and a reproducing head for reading are integrally formed, wherein the recording head comprises the above-mentioned thin film magnetic head.

In the above-mentioned read / write separation type magnetic head according to the present invention, the read head is made of a ferromagnetic material having a magnetoresistive effect and is in intimate contact with the ferromagnetic material so that the ferromagnetic material has a unidirectional anisotropy. Wherein the antiferromagnetic material is made of a Cr-Mn alloy.

According to the present invention, there is provided a recording medium having a thin film magnetic disk for recording information, a rotating means for the thin film magnetic disk, a recording head provided on a floating type slider for writing information, and a reproducing head for reading information. A reproducing / separating magnetic head and moving means for supporting the floating slider and accessing the thin-film magnetic disk, wherein the magnetic disk rotates at 4000 rpm or more during recording / reproducing and has a recording frequency of 45 MHz or more. In the storage / reproducing apparatus, the recording / reproducing separation type magnetic head comprises the above-mentioned recording / reproducing separation type magnetic head.

The present invention is preferably used for a magnetic disk drive having a recording density of 4 Gb / in ² or more.

When the recording head is viewed from the air bearing surface, the magnetic film 1 above the gap is narrowed to the track width Tw near the gap as shown in FIG.
Are spread over both sides of the track by the overhang t. A two-layer film using photoresist and polydimethylglutarimide is combined with ultraviolet and far-ultraviolet irradiation and developed twice to produce a frame material with an undercut, and a gap film is formed between the photoresist layers. Then, a lower magnetic pole film is formed in the undercut portion.

When the magnetic head having the structure shown in FIG. 3 of the present invention is manufactured, since the frame material such as silicon dioxide is not used, the wear resistance and the apparatus for forming the frame material are not required. Since the upper magnetic film 11 does not protrude from the air bearing surface as shown in FIG. 3, the leakage of magnetic flux from the upper magnetic film to the air bearing surface is small, and writing on the medium can be reduced. Also, as shown in FIG. 6, when the shape of the upper magnetic film changes in the throat height, the cross-sectional area parallel to the air-bearing surface is reduced on the air-bearing surface side, and the cross-sectional area is increased from the middle of the throat height. The magnetic field leaking from the magnetic film 11 to the air bearing surface can be reduced, and the magnetic field leaking from the upper magnetic film 11 through the upper end magnetic film 17 can be increased, resulting in a high recording density of 4 Gb / in ² or more. It can be used for a magnetic recording device. Upper magnetic film 1
Reducing the overhang t in the vicinity of the air bearing surface 1 is an important problem for a narrow track head, and in the present invention, setting the thickness to 5 times or less the thickness of the gap film 17 leads to a reduction in writing bleeding. .

As an example, the track width (Tw) is 1.0.
μm, the thickness of the upper magnetic film (Pu) is 4 μm, and the thickness of the gap film is 0.2 μm, the relationship between the magnetic field H leaking from the end of the upper magnetic film 11 and the overhang t is as shown in FIG. become. The smaller the leakage magnetic field is, the smaller the overhang t is. When the thickness of the upper magnetic film is kept constant, the magnetic field intensity near the gap on the air bearing surface decreases.
In order to increase the magnetic field strength and reduce the leakage magnetic field, in this case, the range of t where H < 1000 Oe, that is, t <
It is 1 μm, and preferably 5 times or less the thickness of the gap film (0.2 μm). In order to increase the magnetic field strength by setting t < 1 μm, the thickness of the upper magnetic film 11 may be increased. When the thickness of the upper magnetic film 11 is increased, the shape and accuracy of the plating frame for forming the upper magnetic film 11 become problems. That is, when the thickness of the plating frame is increased, the shape control becomes difficult, and the alignment accuracy with the lower magnetic film (the upper end magnetic film 16) becomes a problem. Therefore, it is difficult to set t = 0 μm in terms of the shape and accuracy of the plating frame, and t = 0.05.
It is desirable that the thickness of the upper magnetic film 11 is increased to 0.1 μm. In the above example, the upper magnetic film 11 is 10n from the air bearing surface.
m. The upper magnetic film 11 has a thickness of 10 nm.
By separating from the air bearing surface, the magnetic field from the end of the upper magnetic film on the air bearing surface is reduced. Therefore, by changing the structure of FIG. 2 of the present invention from the structure of FIG. 2 which is the conventional recording head structure, the erasure of the recorded data and the influence on the adjacent track due to the leakage magnetic field from the end of the upper magnetic film are eliminated. The effect similar to the structure of FIG. 3 is that the cross-sectional area of the upper magnetic film 11 is increased at a position equal to or less than the gap depth (the width of the gap film from the air bearing surface in FIG. 3), It can be obtained by reducing the cross-sectional area of the air bearing surface.

In the present invention, the pole tip of the recording head of the thin film magnetic head is manufactured by frame plating. That is, the three types of films, the upper magnetic film 16, the gap film 17, and the lower magnetic film 18 shown in FIGS. 2 and 3 are plated using the same frame. The upper magnetic film 11 in FIGS. 2 and 3 is in contact with the upper magnetic film 16 on the air bearing surface side. In the conventional structure, the shape of the upper end magnetic film 16 is shown in FIG. 2 in a sectional view perpendicular to the air bearing surface and FIG. 4 as viewed from above the film surface, and as shown in FIG. And the shape of the upper end magnetic film 16 is equal from the air bearing surface to the gap depth (frame end),
The cross section parallel to the air bearing surface is the same during this period (the cross section where the gap film exists). When the cross-sectional area on the air bearing surface side of the upper end magnetic film 16 as shown in FIG. 5 or 6 is reduced with respect to the conventional shape, the leakage magnetic field from the upper end magnetic film 16 on the air bearing surface is reduced, The recording magnetic field becomes sharp, the magnetic field distribution at the track edge becomes sharp, and the background becomes small.

As the antiferromagnetic film, a nickel oxide, iron-manganese alloy thin film, chromium-manganese, chromium-manganese-platinum, chromium aluminum alloy film or the like may be used. Or ferromagnetic cobalt-platinum, cobalt-chromium-platinum, iron-
It can be used for a hard magnetic film such as a cobalt-terbium alloy film. A hard magnetic film is a magnetic film whose magnetization hardly changes with an external magnetic field, and has a coercive force of, for example, 10
Assuming that the magnetic field is equal to or more than 0 Oersted, even if a magnetic field of 50 Oersted is applied, the direction of the magnetization hardly changes.
It has the same effect as the antiferromagnetic film. In other words, it is not necessarily required to be antiferromagnetic as long as it has a characteristic that can apply unidirectional anisotropy due to exchange coupling bias when formed in close contact with another magnetic film. Is preferably used.

The magnetic film contains 70 to 95 atomic% of Ni, Fe
5-30 atomic% and Co 1-5 atomic% alloy or Co
30 to 85 atomic%, Ni 2 to 30 atomic%, and Fe 2 to 5
It is preferable to use an alloy of 0 atomic%, and in addition, a permalloy, a permender alloy, or the like may be used. That is,
It is preferable to use a material that is ferromagnetic and has good soft magnetic characteristics.

The non-magnetic conductive film includes Au, Ag, Cu
It is preferable to use Cr, Pt, Pd,
Ru, Rh, or an alloy thereof may be used. That is, it is preferable to use a material that does not have spontaneous magnetization at room temperature and has good electron transmission. Each of the above films preferably has a thickness of about 2 to 1000 °.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment 1) FIG. 3 is a sectional view showing a recording head portion of a read / write separated magnetic head according to the present invention.

As shown in FIG. 3, the present invention resides in a recording head, and includes an upper magnetic film 1 through a non-magnetic magnetic gap film 17.
1 and a lower magnetic film 15, the upper magnetic film 11 has an upper magnetic film 16 formed on the upper magnetic film 11 at an end where the magnetic gap 17 is formed on the magnetic gap side. ing.

The present invention relates to the above-mentioned upper end magnetic film 16.
Of the upper magnetic film 11 having the magnetic gap is smaller than the cross-sectional area thereof.

The track width Tw of the upper end magnetic film 16 is smaller than the track width Tw of the upper magnetic film 11.

Further, in the present invention, the upper end magnetic film 16 protrudes more toward the air bearing surface than the upper magnetic film 11 on the air bearing surface.

The thin-film magnetic head of the present invention comprises a plating magnetic film having a saturation magnetic flux density of 1.5 tesla or more at the upper end magnetic film, and has a specific resistance of 50 μΩcm or more at a width wider than the frame width of the plating magnetic film. The upper magnetic film is formed by plating or sputtering.

Further, according to the present invention, the upper end magnetic film 16 and the lower end magnetic film 18 have the same track width,
An upper shield film for magnetically shielding the upper magnetic film and the magnetoresistive effect film has a width wider than the track width,
The upper magnetic layer 11 may include a multilayer magnetic layer.

The present invention comprises a recording / reproducing separated magnetic head (not shown) in which a recording head for writing information and a reproducing head for reading are integrally formed.

Hereinafter, a process for manufacturing the recording head of the present invention will be described. Under the lower magnetic film 15 in FIG. 3, there is a giant magnetoresistive head via a gap film.
The lower magnetic film 15 functions as a shield for the giant magnetoresistive head. Alternatively, when a magnetic tunnel spin valve (giant magnetoresistive effect type using an oxide film) head is formed below, it has a role as a film serving as both a shield and an electrode. For these films, ferromagnetic films having a high magnetic permeability are used. The lower magnetic film 15 may be a multilayer film of a ferromagnetic film containing Co, Ni or Fe and an oxide film. A frame is formed thereon with a resist or a resist partially containing an oxide film, and a ferromagnetic film is electroplated between the frames to form a lower magnetic film 18. Throat height is 10
μm or less. CoNiFe alloy,
A CoFe alloy, a NiFe alloy, or an alloy obtained by adding a metalloid element to these alloys is suitable. The gap film 17 is plated on the lower magnetic film 18. For the gap film, a Cr alloy or an alloy such as Ta, W, Ti, or Mo is used. An upper end magnetic film 16 is plated on the gap film 17. The magnetic property required for the plating film in contact with the gap film is that the saturation magnetic flux density is high, and the saturation magnetic flux density is 1.5.
By using a film having a thickness of T 2 or more, recording of 4 Gb / in ² can be achieved. The upper end magnetic film 16 may be a magnetic film similar to the lower end magnetic film 18. In order to produce a recording head having the structure shown in FIG. 5, after removing the frame, a lower insulating film 14 is formed, a coil 13 is formed thereon, and an upper magnetic film is plated on the insulating film 12 by plating or sputtering. Make it. The magnetic properties required for the upper magnetic film are high resistance, a specific resistance of 50 μΩcm or more, and a saturation magnetic flux density of 1.0 T or more. By combining the characteristics of the plating film and the characteristics of the upper magnetic film (the lower magnetic film 15 preferably has the same characteristics as the upper magnetic film), the track width is 0.5 μm.
As a result, it was confirmed that a recording magnetic field of 2000 Oe or more was generated. In addition, it was confirmed that the recording head of the structure of FIG. 5 or 6 had less bleeding than the structure of FIG. Since the value of the magnetic field strength also depends on the saturation magnetic flux density of the upper magnetic film 11, it is desirable that the saturation magnetic flux density of the upper magnetic film be higher. Also, it has been confirmed that an effect can be obtained when the position of the upper magnetic film of the head having the structure shown in FIG. Also in the case of FIG. 6, the effect is confirmed when the position of the upper magnetic film is separated from the air bearing surface by 10 nm. The value of the implemented overhang t is from 10 nm to 100 μm
Range.

As shown in FIGS. 5 and 6, the upper magnetic film 11
In each of the Examples, the tip portion serving as the air bearing surface has a small width, and has a rounded shape as a whole, like an Erlenmeyer flask.

FIG. 8 is a perspective view showing the structure near the air bearing surface of the recording / reproducing magnetic head. Giant magnetoresistive film 104
Are arranged between the lower shield film 106 and the upper shield film 108 via an insulating film, and a sense current flows through the electrode 105. The recording head is composed of an upper shield film 1
08, a lower magnetic film 103, a gap film 102, an upper magnetic film 101, an upper magnetic film 107, and a coil 109.
The upper magnetic film 107 is located at a depth (10n
m or more). With such a configuration, the isomagnetic field curve near the air bearing surface of the gap film 102 is less affected by the edge of the upper magnetic film 107, and
A high magnetic field gradient is obtained, and good recording characteristics are obtained.

In this embodiment, the above-described high resistivity film is used for a recording head, and the recording head is combined with a reproducing head described below. A giant magnetoresistive film 104 is used as a reproducing head, and an electrode 10 for flowing a current is used.
5 is in electrical contact with the giant magnetoresistive film 104.
Under the electrode 105 and the giant magnetoresistive film 104, there is a lower shield film 106 via a lower gap film. On the giant magnetoresistive film 104, there is an upper shield film 108 serving as a high specific resistance lower magnetic film via an upper gap film.
This high specific resistance lower magnetic film is a part of the lower magnetic pole of the recording head. It is possible to improve the high frequency characteristics of the recording head by using a part of the high specific resistance lower magnetic film as a high specific resistance film. The gap film 102 of the recording head has the same width as the upper and lower magnetic films, and the upper magnetic film 101 and the lower magnetic film 103 made of the upper and lower high saturation magnetic flux density films are made of a material having a higher saturation magnetic flux density than other magnetic pole portions. Is desirable. On the upper end magnetic film 101, a wide high specific resistance upper magnetic film 107 is formed.
Is used. An electric current is applied to the coil 109 of the recording head, and recording is performed on the recording medium 110 by a magnetic field from the recording head. The reproducing head may be a head having a different structure using a ferromagnetic tunnel film.

FIG. 9 is a plan view of the recording head of FIG. 8 as viewed from above. The upper magnetic film 107 has a shape in which the above-described upper end magnetic film protrudes from the air bearing surface, and has a rounded planar shape as a whole, like a triangular flask having a reduced end portion. The coil 109 is wound in a spiral shape as shown in a plan view, and is connected to the external lead 32 at the connection portion 31.
The upper shield film 108 is to be a lower magnetic film. As described above, the lower shield magnetic film is formed at an end of the upper shield film 108 in contact with the gap film 102.

FIG. 10 is a perspective view, partly in section, of an element using a spin-valve magnetoresistive film used in a read / write separation type magnetic head of the present invention.

The MR sensor of the present invention comprises a first soft ferromagnetic material on a suitable substrate 43 such as glass or ceramic.
It has a structure in which a magnetic layer 45, a nonmagnetic metal layer 21, and a ferromagnetic second magnetic layer 22 are attached. Ferromagnetic layers 45 and 2
2 ensures that when no magnetic field is applied, the individual magnetization directions have an angular difference of about 90 degrees. Further, the magnetization direction of the second magnetic layer 22 is fixed in the same direction as the magnetic field direction of the magnetic medium. When no magnetic field is applied, the magnetization direction of the soft magnetic ferromagnetic first magnetic layer 45 is inclined by 90 degrees with respect to the magnetic field direction of the second magnetic layer. In response to the applied magnetic field, magnetization rotation occurs in the first magnetic layer 45 and changes.

In the present embodiment, the first magnetic layer 45, the nonmagnetic metal layer 21, the second magnetic layer 22, and the antiferromagnetic layer 23 may have a film configuration used in a laminated structure shown in FIG. The hard ferromagnetic layer 47 is made of Co ₈₂ Cr ₉ Pt.
₉ , Co ₈₀ Cr ₈ Pt ₉ (ZrO ₂ ) _{3 and the} like can be used.
The film configuration in FIG. 16 has a film configuration corresponding to the first magnetic layer 45 and the second magnetic layer 22 in the present embodiment, and their magnetic field directions are formed as described above.

In this embodiment, the first magnetic layer 4 made of a soft ferromagnetic material is used.
5 before deposition, for example, Ta, Ru, or CrV.
A suitable lower film 24 such as is deposited on the substrate 43. The purpose of attaching the lower film 24 is to optimize the structure, grain size, and morphology of the layer to be attached later. The morphology of the layers is very important for obtaining a large MR effect. This is because a very thin spacer layer of the nonmagnetic metal layer 21 can be used depending on the form of the layer. Further, in order to minimize the influence of the shunt, the lower layer has a high electric resistance. The lower layer can also be used as an inverted structure as described above. If the substrate 43 has a sufficiently high electric resistance, is sufficiently flat, and has an appropriate crystal structure, the lower film 24 is unnecessary.

For the first magnetic layer 45, means for generating a bias in the vertical direction for maintaining a single domain state in a direction parallel to the paper surface is used. As a means for generating a bias in the vertical direction, a hard ferromagnetic layer 47 having a high coercivity, a high squareness, and a high electric resistance is used. The hard ferromagnetic layer 47 is in contact with an end region of the soft magnetic ferromagnetic first magnetic layer 45. The magnetization direction of the hard ferromagnetic layer 47 is
It is parallel to the paper.

The antiferromagnetic layer can be deposited in contact with the end regions of the first magnetic layer 45, producing the necessary vertical bias. These antiferromagnetic layers preferably have a blocking temperature that is sufficiently different from that of the antiferromagnetic layer 23 used to fix the magnetization direction of the ferromagnetic second magnetic layer 22.

Next, a capping layer of, for example, a high resistance material such as Ta is preferably applied over the entire MR sensor. Electrodes 28 are provided to form a circuit between the MR sensor structure and the current source and sensing means.

FIG. 11 shows the nonmagnetic metal layer 21 of FIG.
A film constituting the magnetoresistive element of the present invention, which was formed in place of the films of the magnetic layer 22 and the antiferromagnetic layer 23, and was produced by a high-frequency magnetron sputtering apparatus as follows. The following materials were sequentially laminated on a ceramic substrate having a thickness of 1 mm and a diameter of 3 inches in an atmosphere of 3 mTorr of argon. Tantalum, nickel-20 at% iron alloy, copper, cobalt, chromium-50 at% manganese targets were used as sputtering targets. In the preparation of the chromium-manganese alloy film, a 1 cm square chip of the additive element was arranged on a chromium-manganese target, and the composition was adjusted by increasing or decreasing the number of chips. When a Co—Fe—Ni layer is formed as a ferromagnetic film, a nickel or iron layer is formed on a cobalt target.
The composition was adjusted by arranging a chip having a square centimeter.

In the laminated film, high frequency power is applied to each of the cathodes on which the respective targets are arranged to generate plasma in the apparatus, and shutters arranged for each cathode are opened and closed one by one to sequentially form each layer. did. At the time of film formation, a magnetic field of about 30 Oe was applied in parallel to the substrate using a permanent magnet to give uniaxial anisotropy, and the direction of the exchange coupling magnetic field of the chromium-manganese film was guided in the direction of the applied magnetic field.

FIG. 12 shows an example of a magnetic disk drive using the separate read / write magnetic head of the present invention. The recording / reproducing separation type magnetic head 40 is provided on a slider made of an Al ₂ O ₃ sintered body, levitates a thin film magnetic disk 51 having a recording medium rotated by a spindle 52, and performs high-precision position control by a head positioning mechanism 53. Have been. A reproduction signal read by the recording / reproduction separation type magnetic head 40,
The recording signal is signal-processed by a recording / reproducing signal processing system 55.

FIG. 13 is a principle diagram of a magnetic disk drive using the recording / reproducing separation type head shown in FIG. The recording / reproducing separation type magnetic head 201 is a recording medium rotated by a motor.
The head positioning mechanism 20 on the magnetic disk 203
The position on the recording medium 203 is controlled by 2, and the recording / reproducing separation type magnetic head 201 is connected to the reproducing signal processing system 204.

In this apparatus, a DC motor for rotating a magnetic disk, a magnetic head for writing and reading information, and a positioning device for supporting and changing the position with respect to the magnetic disk, that is, an actuator and a voice coil It consists of a motor and an air filter for keeping the inside of the device clean. The actuator comprises a carriage, a rail and a bearing, and the voice coil motor comprises a voice coil and a magnet. These figures show an example in which eight magnetic disks are mounted on the same rotating shaft to increase the total storage capacity.

The magnetic disk has a surface roughness R _MAX of 100 °.
Hereinafter, a medium having a good surface property of 50 ° or less is desirably used. The magnetic disk has a magnetic recording layer formed on the surface of a rigid substrate by a vacuum film forming method. A magnetic thin film is used for the magnetic recording layer. Since the thickness of the magnetic recording layer formed by the vacuum film forming method is 0.5 μm or less, the surface properties of the rigid substrate are directly reflected as the surface properties of the recording layer. Therefore, a rigid substrate having a surface roughness R _MAX of 100 ° or less is used. As such a rigid substrate, a rigid substrate mainly composed of glass, chemically strengthened soda-aluminosilicate glass or ceramic is suitable.

When the magnetic layer is made of a metal or an alloy, it is desirable to provide an oxide layer or a nitride layer on the surface or to make the surface an oxide film. It is also desirable to use a carbon protective film. By doing so, the durability of the magnetic recording layer is improved, and damage to the magnetic disk can be prevented even when recording / reproducing with an extremely low flying height or during contact, start, and stop.

As a result of measuring the performance (overwrite characteristics) of the recording head according to the present invention evaluated in such a configuration, excellent recording performance of about -50 dB was obtained even in a high frequency region of 40 MHz or more.

According to this embodiment, it is possible to sufficiently record even on a high coercive force medium even in a high frequency region, and a medium transfer speed of 15 MB / sec or more, a recording frequency of 45 MHz or more,
High sensitivity MR having high speed transfer of data of 4000 rpm or more, reduction of access time, increase of recording capacity, and excellent MR effect based on anisotropic magnetoresistance effect
Since a sensor is obtained, the surface recording density is 3 Gb / in
^Two or more magnetic disk devices can be obtained.

(Embodiment 2) FIG. 14 is a sectional view of a recording thin-film magnetic head having an upper magnetic film 11 and a lower magnetic film 15 via a non-magnetic magnetic gap film 17 instead of FIG. A lower end magnetic film 18 is formed at an end of the lower magnetic film 15 where the magnetic gap is formed on the magnetic gap side via the magnetic gap.

The lower magnetic film has a sectional area parallel to the air bearing surface smaller than the sectional area of the lower magnetic film at the portion having the magnetic gap.

The lower magnetic film has a track width smaller than the track width of the lower magnetic film.

The lower magnetic film protrudes more toward the air bearing surface on the air bearing surface than the lower magnetic film.

The lower end magnetic film of this embodiment is made of a plated magnetic film having a saturation magnetic flux density of 1.5 Tesla or more, and has a specific resistance of 50 μΩcm which is wider than the frame width of the plated magnetic film.
It is formed by the plating or sputtering method described above.

The upper magnetic film 16 and the lower magnetic film 18 have the same track width. An upper shield film for magnetically shielding the upper magnetic film and the magnetoresistive film has a width wider than the track width, and the upper magnetic film may be formed of a multilayer magnetic film.

(Embodiment 3) FIG. 15 is a sectional view of a thin-film magnetic head having an upper magnetic film 11 and a lower magnetic film 15 via a non-magnetic magnetic gap film 17 instead of FIG. The upper magnetic film 11 and the lower magnetic film 15 have an upper magnetic film on the upper magnetic film and a lower magnetic film on the lower magnetic film at an end where the magnetic gap is formed on the magnetic gap side through the magnetic gap. It is formed.

The upper magnetic film and the lower magnetic film each have a cross-sectional area parallel to the air bearing surface at a portion of the upper magnetic film and the lower magnetic film having the magnetic gap, which is smaller than the cross-sectional area. is there.

The track width of the upper magnetic film and the lower magnetic film is smaller than the track width of the upper magnetic film and the lower magnetic film.

The upper end magnetic film and the lower end magnetic film are projected more on the air bearing surface than on the upper magnetic film and the lower magnetic film. In this embodiment, the lower magnetic film 15 slightly protrudes from the tip of the upper magnetic film 11, but may have the same length.

Further, the upper end magnetic film and the lower end magnetic film are made of a plated magnetic film having a saturation magnetic flux density of 1.5 Tesla or more, and have a specific resistance of 50 μΩcm or more at a width wider than the frame width of the plated magnetic film. It was formed by plating or sputtering.

Further, the upper end magnetic film and the lower end magnetic film have the same track width. An upper shield film for magnetically shielding the upper magnetic film and the magnetoresistive film has a width wider than the track width, and the upper magnetic film may be formed of a multilayer magnetic film.

[0058]

According to the present invention, recording blur is small,
A recording thin-film magnetic head having a high recording magnetic field can be obtained, and a remarkable effect that a magnetic recording / reproducing apparatus having an areal recording density of 4 Gb / in ² or more can be achieved.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a shape of a magnetic film of a magnetic recording head having an overhang as viewed from a floating surface side.

FIG. 2 is a sectional view of the magnetic recording head viewed from a plane perpendicular to the air bearing surface.

FIG. 3 is a cross-sectional view of the magnetic recording head viewed from a plane perpendicular to the air bearing surface.

FIG. 4 is an explanatory diagram of the shapes of an upper magnetic film and an upper magnetic film as viewed from the upper surface of a magnetic recording head.

FIG. 5 is an explanatory diagram of the shapes of an upper magnetic film and an upper magnetic film as viewed from the upper surface of a magnetic recording head.

FIG. 6 is an explanatory diagram of the shapes of an upper magnetic film and an upper magnetic film as viewed from the top of the magnetic recording head.

FIG. 7 is a diagram showing a relationship between a magnetic field (H) and an overhang (t).

FIG. 8 is a partial cross-sectional perspective view of a read / write separated magnetic head.

FIG. 9 is a plan view of a recording thin-film magnetic head.

FIG. 10 is a perspective view showing a film configuration of a magneto-resistance effect type magnetic head.

FIG. 11 is a film configuration diagram of a magnetoresistive head.

FIG. 12 is a plan view and a cross-sectional view of a magnetic recording and reproducing device.

FIG. 13 is a principle diagram of a magnetic recording / reproducing apparatus.

FIG. 14 is a sectional view of a magnetic recording head.

FIG. 15 is a sectional view of a magnetic recording head.

[Explanation of symbols]

1, 11, 107: Upper magnetic film, 2, 15: Lower magnetic film, 3, 106: Lower shield film, 13, 109: Coil, 16, 101: Upper magnetic film, 17, 102: Gap film, 18, 103: lower end magnetic film, 40, 201 ...
Recording / reproducing separation type magnetic head, 104: giant magnetoresistive film, 108: upper shield film.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Tetsuo Ito 1-280 Higashi Koikekubo, Kokubunji-shi, Tokyo Inside the Central Research Laboratory of Hitachi, Ltd. (72) Inventor Hiroshi Fukui 1-280 Higashi Koikekubo, Kokubunji-shi, Tokyo Hitachi, Ltd. Central Research Laboratory (72) Inventor Yoji Maruyama 1-280 Higashi Koikekubo, Kokubunji-shi, Tokyo Inside Central Research Laboratory, Hitachi, Ltd. (72) Inventor Ryo Hiraga 4-6, Kanda Surugadai, Chiyoda-ku, Tokyo Hitachi, Ltd.

Claims (10)

[Claims] 1. A thin-film magnetic head having an upper magnetic film and a lower magnetic film via a non-magnetic magnetic gap film, wherein at least one of the upper magnetic film and the lower magnetic film has the magnetic gap on the side of the magnetic gap. A thin film magnetic head having an upper magnetic film formed on the upper magnetic film and a lower magnetic film formed on the lower magnetic film at an end where the magnetic gap is formed. 2. A thin-film magnetic head comprising an upper magnetic film and a lower magnetic film via a non-magnetic magnetic gap film, wherein at least one of the upper magnetic film and the lower magnetic film has the magnetic gap on the side of the magnetic gap. An upper end magnetic film is formed on the upper magnetic film and a lower end magnetic film is formed on the lower magnetic film at an end forming the magnetic gap through at least one of the upper end magnetic film and the lower end magnetic film. A thin-film magnetic head according to claim 1, wherein a cross-sectional area parallel to said air bearing surface is smaller than said cross-sectional area at a portion of said upper magnetic film and said lower magnetic film having said magnetic gap. 3. A thin-film magnetic head comprising an upper magnetic film and a lower magnetic film via a non-magnetic magnetic gap film, wherein at least one of the upper magnetic film and the lower magnetic film has the magnetic gap on the side of the magnetic gap. An upper end magnetic film is formed on the upper magnetic film and a lower end magnetic film is formed on the lower magnetic film at an end forming the magnetic gap through at least one of the upper end magnetic film and the lower end magnetic film. A thin film magnetic head having a track width smaller than the track width of the upper magnetic film and the lower magnetic film. 4. A thin-film magnetic head comprising an upper magnetic film and a lower magnetic film via a non-magnetic magnetic gap film, wherein at least one of the upper magnetic film and the lower magnetic film has the magnetic gap on the side of the magnetic gap. An upper end magnetic film is formed on the upper magnetic film and a lower end magnetic film is formed on the lower magnetic film at an end forming the magnetic gap through at least one of the upper end magnetic film and the lower end magnetic film. A thin-film magnetic head characterized in that it protrudes more toward the air bearing surface on the air bearing surface than the upper magnetic film and the lower magnetic film. 5. A thin-film magnetic head comprising an upper magnetic film and a lower magnetic film with a non-magnetic magnetic gap film interposed therebetween, wherein at least one of the upper magnetic film and the lower magnetic film has the magnetic gap on the side of the magnetic gap. An upper end magnetic film is formed on the upper magnetic film and a lower end magnetic film is formed on the lower magnetic film at an end forming the magnetic gap through at least one of the upper end magnetic film and the lower end magnetic film. A thin film magnetic head protruding toward the air bearing surface at the air bearing surface from the upper magnetic film and the lower magnetic film, and having a track width smaller than the track width of the upper magnetic film and the lower magnetic film. 6. The upper magnetic film and the lower magnetic film are made of a plated magnetic film having a saturation magnetic flux density of 1.5 Tesla or more, and have a specific resistance of 5 mm or more in width than the frame width of the plated magnetic film.
6. The thin-film magnetic head according to claim 1, comprising the upper magnetic film formed by plating or sputtering having a thickness of 0 [mu] [Omega] cm or more. 7. The upper magnetic film and the lower magnetic film have a track width equal to each other, and an upper shield film for magnetically shielding the upper magnetic film and the magnetoresistive film has a width wider than the track width. 7. The thin-film magnetic head according to claim 1, wherein said upper magnetic film comprises a multilayered magnetic film. 8. A recording / reproducing separation type magnetic head in which a recording head for writing information and a reproducing head for reading are integrally formed, wherein the recording head is one of claims 1 to 7.
A recording / reproducing separation type magnetic head comprising the thin film magnetic head according to any one of the above. 9. The reproducing head includes: a ferromagnetic material having a magnetoresistance effect; and an antiferromagnetic material that is in close contact with the ferromagnetic material and causes the ferromagnetic material to exhibit one-way anisotropy. 9. The read / write separated magnetic head according to claim 8, wherein the antiferromagnetic material is made of a Cr-Mn alloy. 10. A recording / reproducing separation comprising a thin-film magnetic disk for recording information, a rotating means for the thin-film magnetic disk, a recording head provided on the floating type slider for writing information, and a reproducing head for reading information. A magnetic head and moving means for supporting the floating slider and accessing the thin-film magnetic disk, wherein the magnetic disk rotates at 4000 rpm or more during recording / reproduction, and the recording frequency is 4
10. A magnetic storage / reproducing apparatus having a read / write separation type magnetic head according to claim 8 or 9 in a magnetic storage / reproduction apparatus of 5 MHz or higher.