JPH116961A - Confocal microscope - Google Patents

Confocal microscope

Info

Publication number
JPH116961A
JPH116961A JP15846797A JP15846797A JPH116961A JP H116961 A JPH116961 A JP H116961A JP 15846797 A JP15846797 A JP 15846797A JP 15846797 A JP15846797 A JP 15846797A JP H116961 A JPH116961 A JP H116961A
Authority
JP
Japan
Prior art keywords
light
sample
confocal
stage
gray level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15846797A
Other languages
Japanese (ja)
Other versions
JP3661353B2 (en
Inventor
Shinichiro Kawamura
信一郎 河村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP15846797A priority Critical patent/JP3661353B2/en
Publication of JPH116961A publication Critical patent/JPH116961A/en
Application granted granted Critical
Publication of JP3661353B2 publication Critical patent/JP3661353B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To realize a confocal microscope capable of automatically detecting the upper and the lower end faces of a sample. SOLUTION: In this confocal microscope, a confocal image is obtained by rotating a disk having plural apertures and condensing light passing through the apertures so that a sample may be scanned with the light. The microscope is equipped with a light source 1, an objective lens 4 condensing the input light on the sample and emitting the returning light from the sample, a confocal scanner 2 making the output light from the light source 1 and passing through the apperture incident on the lens 4 and outputting the returning light from the lens 4 so that the light may pass through the aperture again, a stage on which the sample 5 is placed, a driving means 9 moving the position of the stage 6, a photographing means 7 photographing the output light from the scanner 2, and a control means 8a controlling the driving means 9 to move the stage 6 and fetching the confocal image from the photographing means 7. The upper and the lower end faces of the sample 5 are automatically detected by detecting the fluctuation part of the differential signal of a gray level signal from a gray level detecting area set at a part of the light receiving surface of the photographing means 7.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、共焦点顕微鏡に関
し、特に試料の上下端面を自動的に検出することが可能
な共焦点顕微鏡に関する。
The present invention relates to a confocal microscope, and more particularly to a confocal microscope capable of automatically detecting upper and lower end surfaces of a sample.

【0002】[0002]

【従来の技術】従来の共焦点顕微鏡は複数の開口を有す
る円板を回転させ開口を通過した光を集光して試料を走
査することにより共焦点画像を得るものである。
2. Description of the Related Art A conventional confocal microscope obtains a confocal image by rotating a disk having a plurality of openings, condensing light passing through the openings, and scanning a sample.

【0003】図5はこのような従来の共焦点顕微鏡の一
例を示す構成ブロック図である。図5において1はレー
ザ光源等の光源、2は共焦点スキャナ、3は光学顕微
鏡、4は対物レンズ、5は試料、6はステージ、7はC
CD(Charge Coupled Device)カメラ等の撮影手段、
8は制御手段、9はステージ6を上下に移動させる駆動
手段である。
FIG. 5 is a block diagram showing an example of such a conventional confocal microscope. In FIG. 5, 1 is a light source such as a laser light source, 2 is a confocal scanner, 3 is an optical microscope, 4 is an objective lens, 5 is a sample, 6 is a stage, and 7 is C
Shooting means such as a CD (Charge Coupled Device) camera,
Reference numeral 8 denotes control means, and 9 denotes drive means for moving the stage 6 up and down.

【0004】光源1からの出力光は光ファイバ等を介し
て共焦点スキャナ2に入射され、共焦点スキャナ2から
の出力光は光学顕微鏡の対物レンズ4を介して試料5に
照射される。
[0004] Output light from a light source 1 is incident on a confocal scanner 2 via an optical fiber or the like, and output light from the confocal scanner 2 is applied to a sample 5 via an objective lens 4 of an optical microscope.

【0005】試料5からの反射光や蛍光等の戻り光は再
び対物レンズ4を介して共焦点スキャナ2を介して撮影
手段7に入射され、撮影手段7の出力信号は制御手段8
に接続される。
[0005] Return light such as reflected light and fluorescence from the sample 5 is again incident on the photographing means 7 via the confocal scanner 2 via the objective lens 4, and the output signal of the photographing means 7 is controlled by the control means 8
Connected to.

【0006】また、制御手段8の制御信号は駆動手段9
に接続され、駆動手段9は試料5が設置されたステージ
6を上下に駆動する。
The control signal from the control means 8 is
The driving means 9 drives the stage 6 on which the sample 5 is set up and down.

【0007】ここで、図5に示す従来例を説明する。共
焦点スキャナ2内部には複数の開口を有する円板が回転
しており、光源1からの出力光は前記複数の開口を通過
して対物レンズ4により試料5上に集光される。
Here, a conventional example shown in FIG. 5 will be described. A disk having a plurality of openings is rotating inside the confocal scanner 2, and the output light from the light source 1 passes through the plurality of openings and is condensed on the sample 5 by the objective lens 4.

【0008】試料5からの反射光や蛍光等は戻り光とし
て対物レンズ4を介して共焦点スキャナ2に入射され先
に通過した前記複数の開口のうち同一の開口を通過して
撮影手段7に入射される。
The reflected light and fluorescent light from the sample 5 are incident on the confocal scanner 2 via the objective lens 4 as return light, and pass through the same one of the plurality of apertures previously passed to the photographing means 7. Incident.

【0009】即ち、同一開口を通過した光を撮影するの
で撮影手段7で得られる画像は光軸方向に分解能を持っ
た画像となり、さらに、前記開口を回転させて試料5全
体を走査しているので試料5のスライス画像である共焦
点画像を得ることができる。
That is, since the light passing through the same aperture is photographed, the image obtained by the photographing means 7 is an image having a resolution in the optical axis direction, and the whole specimen 5 is scanned by rotating the aperture. Therefore, a confocal image which is a slice image of the sample 5 can be obtained.

【0010】そこで、制御手段8は駆動手段9を制御し
て試料5が設置されたステージ6を図6中”イ”に示す
光軸方向(上下方向)に移動させ複数枚の共焦点画像を
得て、これらの複数枚の共焦点画像を画像処理して試料
5の3次元画像を得る。
Then, the control means 8 controls the driving means 9 to move the stage 6 on which the sample 5 is set in the optical axis direction (up and down direction) shown by "a" in FIG. Then, the plurality of confocal images are subjected to image processing to obtain a three-dimensional image of the sample 5.

【0011】図6は上述の光軸方向の走査を説明する説
明図である。図6において5は図5と同一符号を付して
ある。
FIG. 6 is an explanatory diagram for explaining the scanning in the optical axis direction described above. 6, reference numeral 5 is the same as that in FIG.

【0012】制御手段8は駆動手段9を制御して共焦点
画像の走査面を図6中”イ”に示す試料5の上端面に移
動させると共に撮影手段7からの出力信号を取り込み、
図6中”イ”に示す試料5の上端面の共焦点画像を得
る。
The control means 8 controls the driving means 9 to move the scanning plane of the confocal image to the upper end face of the sample 5 shown by "a" in FIG.
A confocal image of the upper end surface of the sample 5 indicated by “a” in FIG. 6 is obtained.

【0013】次に、制御手段8は駆動手段9を制御して
共焦点画像の走査面を図6中”ロ”に示す面に移動させ
ると共に撮影手段7からの出力信号を取り込み、図6
中”ロ”に示す面の共焦点画像を得る。
Next, the control means 8 controls the drive means 9 to move the scanning plane of the confocal image to the plane indicated by "b" in FIG.
A confocal image of the surface shown in the middle "b" is obtained.

【0014】同様にして、制御手段8は駆動手段9を制
御して共焦点画像の走査面が図6中”ハ”に示す試料5
の下端面に移動してくるまで走査面を順次移動させると
共に撮影手段7からの出力信号を順次取り込みそれぞれ
の面の共焦点画像を得て行く。
Similarly, the control means 8 controls the driving means 9 so that the scanning surface of the confocal image has the scanning surface of the sample 5 indicated by "c" in FIG.
The scanning surface is sequentially moved until it moves to the lower end surface of, and the output signal from the photographing means 7 is sequentially taken in to obtain a confocal image of each surface.

【0015】そして、全ての共焦点画像の取り込みを終
了すると制御手段8は得られた複数枚の共焦点画像を画
像処理して試料5の3次元画像を得る。
When the acquisition of all the confocal images is completed, the control means 8 processes the obtained plural confocal images to obtain a three-dimensional image of the sample 5.

【0016】この結果、光学顕微鏡3に共焦点スキャナ
2を取り付けると共に試料5が設置されたステージ6を
光軸方向に移動させ、得られた複数の共焦点画像を画像
処理することにより、試料5の3次元画像を得ることが
可能になる。
As a result, the confocal scanner 2 is attached to the optical microscope 3 and the stage 6 on which the sample 5 is placed is moved in the direction of the optical axis, and a plurality of confocal images obtained are image-processed. Can be obtained.

【0017】[0017]

【発明が解決しようとする課題】しかし、図5に示す共
焦点顕微鏡では図6中”イ”及び”ハ”に示す試料5の
上下端面は操作者が目視によりステージ6を動かして決
定していた。
However, in the confocal microscope shown in FIG. 5, the upper and lower end surfaces of the sample 5 indicated by "a" and "c" in FIG. 6 are determined by the operator by visually moving the stage 6. Was.

【0018】一方、共焦点顕微鏡は光軸方向の焦点深度
が浅い、言い換えれば、焦点面以外の部分の像は見えな
いので前記焦点面が試料5の位置からずれている場合に
は試料5の上下端面を決定する以前に試料5自体を見つ
けることが困難であると言った問題点があった。
On the other hand, the confocal microscope has a shallow depth of focus in the direction of the optical axis. In other words, since the image of the portion other than the focal plane cannot be seen, when the focal plane is displaced from the position of the specimen 5, There was a problem that it was difficult to find the sample 5 itself before determining the upper and lower end surfaces.

【0019】さらに、画像処理をしないと肉眼では確認
できないような暗い試料の場合も試料自体を見つけるこ
とが困難であると言った問題点があった。従って本発明
が解決しようとする課題は、試料の上下端面を自動的に
検出することが可能な共焦点顕微鏡を実現することにあ
る。
Further, there is another problem that it is difficult to find the sample itself even in the case of a dark sample which cannot be visually recognized without image processing. Therefore, an object of the present invention is to realize a confocal microscope capable of automatically detecting upper and lower end surfaces of a sample.

【0020】[0020]

【課題を解決するための手段】このような課題を達成す
るために、本発明の第1では、複数の開口を有する円板
を回転させ前記開口を通過した光を集光して試料を走査
することにより共焦点画像を得る共焦点顕微鏡におい
て、光源と、入力光を前記試料に集光し前記試料からの
戻り光を出射する対物レンズと、前記開口を通過した前
記光源の出力光を前記対物レンズに入射し、前記対物レ
ンズからの戻り光を再び前記開口に通過させ出力する共
焦点スキャナと、前記試料が設置されるステージと、こ
のステージの位置を移動させる駆動手段と、前記共焦点
スキャナの出力光を撮影する撮影手段と、前記駆動手段
を制御して前記ステージを移動させると共に前記撮影手
段からの共焦点画像を取り込む制御手段とを備え前記撮
影手段の受光面の一部に設定されたグレーレベル検出用
領域からのグレーレベル信号の微分信号の変動部分を検
知することにより前記試料の上下端面を自動的に検出す
ることを特徴とするものである。
According to a first aspect of the present invention, a disk having a plurality of openings is rotated to collect light passing through the openings and scan a sample. In a confocal microscope that obtains a confocal image by performing, a light source, an objective lens that focuses input light on the sample and emits return light from the sample, and outputs light of the light source that has passed through the opening. A confocal scanner for entering the objective lens and passing the return light from the objective lens through the aperture again for output, a stage on which the sample is placed, a driving unit for moving the position of the stage, and the confocal A photographing means for photographing the output light of the scanner; and a control means for controlling the driving means to move the stage and take in a confocal image from the photographing means. It is characterized in that the automatic detection of the upper and lower end surfaces of the sample by detecting the variable portion of the differential signal of the gray level signal from the gray-level-detection area set in.

【0021】このような課題を達成するために、本発明
の第2では、本発明の第1において、前記撮影手段の受
光面の一部に設定されたグレーレベル検出用領域からの
グレーレベル信号の微分信号の変動部分を検知すること
により前記試料側面端を自動的に検出することを特徴と
するものである。
According to a second aspect of the present invention, there is provided a gray level signal from a gray level detecting area set on a part of a light receiving surface of the photographing means. Detecting a variation portion of the differential signal of the above automatically detects the side edge of the sample.

【0022】このような課題を達成するために、本発明
の第3では、本発明の第1において、前記試料からの戻
り光が反射光であることを特徴とするものである。
In order to achieve the above object, a third aspect of the present invention is characterized in that, in the first aspect of the present invention, return light from the sample is reflected light.

【0023】このような課題を達成するために、本発明
の第4では、本発明の第1において、前記試料からの戻
り光が蛍光であることを特徴とするものである。
According to a fourth aspect of the present invention, there is provided the first aspect of the present invention, wherein the return light from the sample is fluorescence.

【0024】[0024]

【発明の実施の形態】以下本発明を図面を用いて詳細に
説明する。図1は本発明に係る共焦点顕微鏡の一実施例
を示す構成ブロック図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a configuration block diagram showing one embodiment of a confocal microscope according to the present invention.

【0025】図1において1〜7及び9は図5と同一符
号を付してあり、8aは制御手段である。また、接続関
係についても図5と同様である。
In FIG. 1, reference numerals 1 to 7 and 9 denote the same reference numerals as in FIG. 5, and reference numeral 8a denotes control means. The connection relation is the same as in FIG.

【0026】ここで、図1に示す実施例の動作を図2、
図3及び図4を用いて説明する。図2は撮影手段7の受
光面の詳細を示す平面図、図3は検出信号及びその微分
信号を示す特性曲線図、図4は制御手段8aの動作を説
明するフロー図である。
The operation of the embodiment shown in FIG. 1 will now be described with reference to FIG.
This will be described with reference to FIGS. FIG. 2 is a plan view showing details of the light receiving surface of the photographing unit 7, FIG. 3 is a characteristic curve diagram showing a detection signal and its differential signal, and FIG. 4 is a flowchart for explaining the operation of the control unit 8a.

【0027】図2中”イ”は撮影手段7の受光面全体で
あり、制御手段8aは受光面の任意の一部分に図2中”
ロ”に示すようなグレーレベル検出用領域を設定する。
"A" in FIG. 2 is the entire light receiving surface of the photographing means 7, and the control means 8a is provided on an arbitrary part of the light receiving surface in FIG.
A region for gray level detection as shown in "b" is set.

【0028】試料5の上限端面を自動的に検出する場
合、制御手段8aは前記グレーレベル検出用領域内の複
数の画素の平均値、最大値や中央値等をグレーレベル信
号”I(z)”として適宜求める。
When automatically detecting the upper end face of the sample 5, the control means 8a determines the average value, the maximum value, the median value, etc. of a plurality of pixels in the gray level detection area by using the gray level signal "I (z)". ".

【0029】例えば、図3(A)は前記グレーレベル信
号”I(z)”の一例を示す特性曲線図であり、図3
中”イ”及び”ロ”の位置は試料5の上端面及”Zs”
び下端面”Ze”を示している。また、図3中”ハ”及
び”ニ”はステージ6の機械的な上側移動限界”Zu”
及び下側移動限界”Zb”である。
For example, FIG. 3A is a characteristic curve diagram showing an example of the gray level signal "I (z)".
The positions of “a” and “b” are the upper end face of sample 5 and “Zs”.
And the lower end surface “Ze”. In FIG. 3, "C" and "D" are mechanical upper movement limits of the stage 6 "Zu".
And the lower movement limit “Zb”.

【0030】図3(A)から分かるようにグレーレベル
信号”I(z)”は試料5が存在しない部分では図3
中”ホ”に示すようなバックグラウンド信号レベルであ
り、図3中”イ”に示す試料5の上端面”Zs”になる
と急激に信号レベルが上昇し、一方、図3中”ロ”に示
す試料5の下端面”Ze”になると信号レベルが急激に
下降する。
As can be seen from FIG. 3 (A), the gray level signal "I (z)" is the same as that shown in FIG.
The background signal level is as shown in the middle "e", and the signal level rises sharply when it reaches the upper end surface "Zs" of the sample 5 shown in the "a" in FIG. When the lower end surface of the sample 5 shown is "Ze", the signal level sharply drops.

【0031】また、グレーレベル信号”I(z)”の微
分信号”ΔI/Δz”は図3(B)に示すようになり、
図3中”イ”及び”ロ”に示す試料5の上端面”Zs”
及び下端面”Ze”において信号レベルが急激に変動す
る。
The differential signal "ΔI / Δz" of the gray level signal "I (z)" is as shown in FIG.
The upper end surface "Zs" of the sample 5 shown in "a" and "b" in FIG.
And the signal level fluctuates rapidly at the lower end surface “Ze”.

【0032】従って、制御手段8aは図3(B)に示す
信号レベルの変動を検知することにより試料5の上下端
面位置を以下に示す手順で決定する。
Therefore, the control means 8a determines the positions of the upper and lower end surfaces of the sample 5 by detecting the fluctuation of the signal level shown in FIG.

【0033】先ず第1に、図4(a)に示すように制御
手段8aは試料の上下端面での変動を識別するしきい
値”T”を設定し、図4(b)に示すように駆動手段9
を制御してステージ6の位置を上側移動限界”Zu”に
移動させる。
First, as shown in FIG. 4 (a), the control means 8a sets a threshold "T" for discriminating the fluctuation at the upper and lower end surfaces of the sample, and as shown in FIG. 4 (b). Drive means 9
To move the position of the stage 6 to the upper movement limit “Zu”.

【0034】図4(c)に示すように制御手段8aはグ
レーレベル信号”I(z)”を取り込み、図4(d)に
示すように制御手段8aは駆動手段9を制御してステー
ジ6の位置をスライス間隔分”Δz”だけ移動させる。
As shown in FIG. 4C, the control means 8a receives the gray level signal "I (z)", and as shown in FIG. Is moved by “Δz” by the slice interval.

【0035】そして、図4(e)に示すように制御手段
8aは前記移動後の位置が下限である”Zb”に達した
かどうかを判断し、もし、前記移動後の位置が既に”Z
b”に達していれば図4(f)に示すように必要なエラ
ー処理を行う。
Then, as shown in FIG. 4E, the control means 8a determines whether or not the position after the movement has reached the lower limit "Zb", and if the position after the movement is already "Zb".
If it has reached b ", necessary error processing is performed as shown in FIG.

【0036】もし、前記移動後の位置が”Zb”に達し
ていなければ図4(g)に示すように制御手段8aはグ
レーレベル信号”I(z)”を取り込むと共に先に取り
込んだグレーレベル信号との差分”ΔI”を演算する。
If the position after the movement has not reached "Zb", the control means 8a fetches the gray level signal "I (z)" as shown in FIG. The difference “ΔI” from the signal is calculated.

【0037】次に、図4(h)に示すように制御手段8
aは”ΔI/Δz”を演算して、先に設定されたしきい
値”T”以上かどうかを判断する。
Next, as shown in FIG.
“a” calculates “ΔI / Δz” and determines whether or not it is equal to or larger than the previously set threshold value “T”.

【0038】もし、”ΔI/Δz<T”であれば制御手
段8aは図4(c)の処理に戻り、”ΔI/Δz≧T”
であれば制御手段8aは図4(i)に示すように現在位
置を上端面”Zs”と決定して現在位置を記憶する。
If ".DELTA.I / .DELTA.z <T", the control means 8a returns to the processing of FIG. 4C and ".DELTA.I / .DELTA.z.gtoreq.T".
If so, the control means 8a determines the current position as the upper end face "Zs" as shown in FIG. 4 (i) and stores the current position.

【0039】同様にして、図4(j)に示すように制御
手段8aはグレーレベル信号”I(z)”を取り込み、
図4(k)に示すように制御手段8aは駆動手段9を制
御してステージ6の位置をスライス間隔分”Δz”だけ
移動させる。
Similarly, as shown in FIG. 4 (j), the control means 8a takes in the gray level signal "I (z)",
As shown in FIG. 4K, the control means 8a controls the driving means 9 to move the position of the stage 6 by "Δz" by the slice interval.

【0040】そして、図4(l)に示すように制御手段
8aは前記移動後の位置が下限である”Zb”に達して
いるかどうかを判断し、もし、前記移動後の位置が既
に”Zb”に達していれば図4(f)に示すように必要
なエラー処理を行う。
Then, as shown in FIG. 4 (l), the control means 8a determines whether the position after the movement has reached the lower limit "Zb", and if the position after the movement is already "Zb". ", The necessary error processing is performed as shown in FIG.

【0041】もし、前記移動後の位置が”Zb”に達し
ていなければ図4(m)に示すように制御手段8aはグ
レーレベル信号”I(z)”を取り込むと共に先に取り
込んだグレーレベル信号との差分”ΔI”を演算する。
If the position after the movement has not reached "Zb", the control means 8a takes in the gray level signal "I (z)" as shown in FIG. The difference “ΔI” from the signal is calculated.

【0042】次に、図4(n)に示すように制御手段8
aは”−ΔI/Δz”を演算して、先に設定されたしき
い値”T”以上かどうかを判断する。
Next, as shown in FIG.
“a” calculates “−ΔI / Δz” to determine whether or not it is equal to or larger than the previously set threshold “T”.

【0043】もし、”−ΔI/Δz<T”であれば制御
手段8aは図4(j)の処理に戻り、”−ΔI/Δz≧
T”であれば制御手段8aは図4(o)に示すように現
在位置を下端面”Ze”と決定して現在位置を記憶す
る。
If "-.DELTA.I / .DELTA.z <T", the control means 8a returns to the processing of FIG.
If it is T ", the control means 8a determines the current position as the lower end surface" Ze "as shown in FIG. 4 (o) and stores the current position.

【0044】この結果、受光面の一部に設定されたグレ
ーレベル検出用領域からのグレーレベル信号の微分信号
の変動部分を検知することにより、試料5の上端面”Z
s”及び下端面”Ze”を自動的に検出することが可能
になる。
As a result, by detecting a fluctuation portion of the differential signal of the gray level signal from the gray level detection area set in a part of the light receiving surface, the upper end surface “Z” of the sample 5 is detected.
s "and the lower end surface" Ze "can be automatically detected.

【0045】また、画像処理をしないと肉眼では確認で
きないような暗い試料であっても試料の上下端面を自動
的に検出することができる。
Further, even in the case of a dark sample which cannot be visually recognized without image processing, the upper and lower end surfaces of the sample can be automatically detected.

【0046】なお、図2におけるグレーレベル検出用領
域は撮影手段7の受光面の任意の一部分に設定される
が、あくまでも制御手段8aの処理上の設定であり、撮
影手段7に特殊な設定がなされる訳ではない。
Note that the gray level detecting area in FIG. 2 is set on an arbitrary part of the light receiving surface of the photographing means 7, but it is only a setting in the processing of the control means 8 a, and special setting is performed on the photographing means 7. It is not done.

【0047】また、図4に示すフロー図ではステージ6
を図3中”ハ”に示す上側移動限界”Zu”から図3
中”ニ”に示す下側移動限界”Zb”に向かって移動さ
せたが、逆方向に移動させても勿論構わない。
In the flow chart shown in FIG.
From the upper movement limit “Zu” shown in FIG.
Although it is moved toward the lower movement limit "Zb" shown in the middle "d", it is of course possible to move it in the opposite direction.

【0048】また、図1に示す実施例ではステージ6を
光軸方向にのみ移動させているが、さらに、光軸に垂直
な平面上を移動させることにより試料の中心位置等の決
定をすることも可能である。
Although the stage 6 is moved only in the direction of the optical axis in the embodiment shown in FIG. 1, the center position and the like of the sample are determined by moving the stage 6 on a plane perpendicular to the optical axis. Is also possible.

【0049】即ち、光軸方向にステージ6を移動させる
と共にその時点で光軸に垂直な平面上を移動させて、そ
の時のグレーレベル信号の微分信号の変動部分を検知す
れば、試料の上下端面のみならず試料の側面の端が検出
できるので、試料の光軸に垂直な平面上での位置関係も
得ることができる。
That is, by moving the stage 6 in the direction of the optical axis and moving the stage 6 on a plane perpendicular to the optical axis at that time, and detecting a change in the differential signal of the gray level signal at that time, the upper and lower end surfaces of the sample are obtained. In addition, since the end of the side surface of the sample can be detected, a positional relationship on a plane perpendicular to the optical axis of the sample can be obtained.

【0050】また、光源1としてはレーザ光源を例示し
たが白色光源、LED、輝線スペクトルや連続スペクト
ルを有するランプ光源等であっても構わない。
The light source 1 is exemplified by a laser light source, but may be a white light source, an LED, a lamp light source having a bright line spectrum or a continuous spectrum, or the like.

【0051】また、撮影手段7としてはCCDカメラを
例示したがSIT(Silicom Intensified Target)カメ
ラやPCD(Plasma Charge-couped Device)カメラ等
であっても構わない。
Although the CCD means is exemplified as the photographing means 7, a SIT (Silicom Intensified Target) camera, a PCD (Plasma Charge-couped Device) camera or the like may be used.

【0052】[0052]

【発明の効果】以上説明したことから明らかなように、
本発明によれば次のような効果がある。受光面の一部に
設定されたグレーレベル検出用領域からのグレーレベル
信号の微分信号の変動部分を検知することにより、試料
の上端面及び下端面を自動的に検出することが可能な共
焦点顕微鏡が実現できる。
As is apparent from the above description,
According to the present invention, the following effects can be obtained. Confocal that can automatically detect the top and bottom surfaces of the sample by detecting the variation of the differential signal of the gray level signal from the gray level detection area set on a part of the light receiving surface A microscope can be realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る共焦点顕微鏡の一実施例を示す構
成ブロック図である。
FIG. 1 is a configuration block diagram showing an embodiment of a confocal microscope according to the present invention.

【図2】撮影手段の受光面の詳細を示す平面図である。FIG. 2 is a plan view showing details of a light receiving surface of a photographing unit.

【図3】検出信号及びその微分信号を示す特性曲線図で
ある。
FIG. 3 is a characteristic curve diagram showing a detection signal and its differential signal.

【図4】制御手段の動作を説明するフロー図である。FIG. 4 is a flowchart illustrating an operation of a control unit.

【図5】このような従来の共焦点顕微鏡の一例を示す構
成ブロック図である。
FIG. 5 is a configuration block diagram showing an example of such a conventional confocal microscope.

【図6】光軸方向の走査を説明する説明図である。FIG. 6 is an explanatory diagram illustrating scanning in the optical axis direction.

【符号の説明】[Explanation of symbols]

1 光源 2 共焦点スキャナ 3 光学顕微鏡 4 対物レンズ 5 試料 6 ステージ 7 撮影手段 8,8a 制御手段 9 駆動手段 DESCRIPTION OF SYMBOLS 1 Light source 2 Confocal scanner 3 Optical microscope 4 Objective lens 5 Sample 6 Stage 7 Imaging means 8, 8a Control means 9 Driving means

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】複数の開口を有する円板を回転させ前記開
口を通過した光を集光して試料を走査することにより共
焦点画像を得る共焦点顕微鏡において、 光源と、 入力光を前記試料に集光し前記試料からの戻り光を出射
する対物レンズと、 前記開口を通過した前記光源の出力光を前記対物レンズ
に入射し、前記対物レンズからの戻り光を再び前記開口
に通過させ出力する共焦点スキャナと、 前記試料が設置されるステージと、 このステージの位置を移動させる駆動手段と、 前記共焦点スキャナの出力光を撮影する撮影手段と、 前記駆動手段を制御して前記ステージを移動させると共
に前記撮影手段からの共焦点画像を取り込む制御手段と
を備え前記撮影手段の受光面の一部に設定されたグレー
レベル検出用領域からのグレーレベル信号の微分信号の
変動部分を検知することにより前記試料の上下端面を自
動的に検出することを特徴とする共焦点顕微鏡。
1. A confocal microscope for obtaining a confocal image by rotating a disk having a plurality of apertures, condensing light passing through the apertures, and scanning a specimen, wherein a light source and input light are supplied to the specimen. An objective lens that condenses the light and emits return light from the sample; an output light of the light source that has passed through the opening is incident on the objective lens; and a return light from the objective lens passes through the opening again and is output. A confocal scanner, a stage on which the sample is placed, a driving unit for moving the position of the stage, a photographing unit for photographing output light of the confocal scanner, and controlling the driving unit to control the stage. Control means for moving and taking in the confocal image from the photographing means, the control means comprising: a fine level detector for detecting a gray level signal from a gray level detection area set on a part of the light receiving surface of the photographing means. A confocal microscope characterized in that upper and lower end surfaces of the sample are automatically detected by detecting a change portion of the minute signal.
【請求項2】前記撮影手段の受光面の一部に設定された
グレーレベル検出用領域からのグレーレベル信号の微分
信号の変動部分を検知することにより前記試料側面端を
自動的に検出することを特徴とする特許請求の範囲請求
項1記載の共焦点顕微鏡。
2. The method according to claim 1, wherein the edge of the sample is automatically detected by detecting a change in a differential signal of a gray level signal from a gray level detection area set on a part of a light receiving surface of the photographing means. The confocal microscope according to claim 1, wherein:
【請求項3】前記試料からの戻り光が反射光であること
を特徴とする特許請求の範囲請求項1記載の共焦点顕微
鏡。
3. The confocal microscope according to claim 1, wherein the return light from the sample is reflected light.
【請求項4】前記試料からの戻り光が蛍光であることを
特徴とする特許請求の範囲請求項1記載の共焦点顕微
鏡。
4. The confocal microscope according to claim 1, wherein the return light from the sample is fluorescence.
JP15846797A 1997-06-16 1997-06-16 Confocal microscope Expired - Fee Related JP3661353B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15846797A JP3661353B2 (en) 1997-06-16 1997-06-16 Confocal microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15846797A JP3661353B2 (en) 1997-06-16 1997-06-16 Confocal microscope

Publications (2)

Publication Number Publication Date
JPH116961A true JPH116961A (en) 1999-01-12
JP3661353B2 JP3661353B2 (en) 2005-06-15

Family

ID=15672386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15846797A Expired - Fee Related JP3661353B2 (en) 1997-06-16 1997-06-16 Confocal microscope

Country Status (1)

Country Link
JP (1) JP3661353B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002670A (en) * 2010-06-17 2012-01-05 Toshiba Corp Height detection device
US8275226B2 (en) 2008-12-09 2012-09-25 Spectral Applied Research Ltd. Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope
US8670178B2 (en) 2009-12-08 2014-03-11 Spectral Applied Research Inc. Imaging distal end of multimode fiber

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8275226B2 (en) 2008-12-09 2012-09-25 Spectral Applied Research Ltd. Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope
US9134519B2 (en) 2008-12-09 2015-09-15 Spectral Applied Reseach Inc. Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope
US8670178B2 (en) 2009-12-08 2014-03-11 Spectral Applied Research Inc. Imaging distal end of multimode fiber
US8922887B2 (en) 2009-12-08 2014-12-30 Spectral Applied Research Inc. Imaging distal end of multimode fiber
JP2012002670A (en) * 2010-06-17 2012-01-05 Toshiba Corp Height detection device

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