JPH1167982A - Epoxy resin composition and semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an epoxy resin composition whose reliability in a soldering treatment is increased and whose fluidity in a molding operation is increased, by a method wherein the epoxy resin composition is composed of an epoxy resin in which a specific crystalline epoxy resin is contained in specific wt.% in the total epoxy resin, of a phenolic resin hardener in which a specific phenolic resin is contained in specific wt.% in the total phenolic resin, and of the like. SOLUTION: An epoxy resin composition for semiconductor sealing is composed of an epoxy resin in which at least one epoxy resin selected from a group of epoxy resins expressed by Formula I and Formula II is contained in 20 to 90 wt.% in the total epoxy resin, and in which a crystalline epoxy resin having a melting point of 50 to 150 deg.C is contained in 10 to 80 wt.% in the total epoxy resin; of a phenolic resin hardener in which a phenolic resin expressed by Formula III is contained in 20 wt.% of higher in the total phenolic resin; and of a hrdening promotor and of a molten silica powder. In the formulae, R's represent hydrogen atoms, halogen atoms or 1 to 12 C alkyl group in such a way that they may be identical to each other or different from each other, (l) represents a positive integer of 1 to 10, and (m) and (n) represent 0 or respectively specific positive integers.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin-encapsulated semiconductor device having excellent moldability, reliability, and mountability. More specifically, a semiconductor device is mounted on one side of a printed wiring board or a metal lead frame. In a so-called area mounting type semiconductor device in which substantially only one of its mounting surfaces is resin-sealed, the warpage after resin sealing and the warping in the soldering process at the time of board mounting are small, and in a temperature cycle test. Epoxy resin composition for semiconductor encapsulation which has excellent package crack resistance and package crack resistance and exfoliation resistance in a soldering process, and is excellent in moldability, and a semiconductor encapsulated with the epoxy resin composition for semiconductor encapsulation It concerns the device.

[0002]

2. Description of the Related Art In recent years, in the market trend of miniaturization, weight reduction, and high performance of electronic equipment, high integration of semiconductors has been progressing year by year, and surface mounting of semiconductor packages has been promoted. Packaging packages have been developed and are beginning to move away from packages with traditional structures. A typical example of an area mounting package is a BGA (ball grid array) or a CSP (chip scale package) pursuing further miniaturization.
The surface-mount package represented by is developed to meet the demand for higher pin count and higher speed, which is approaching the limit. The structure is as follows: a rigid circuit board represented by a BT resin / copper foil circuit board (bismaleimide / triazine / glass cloth board) or a flexible circuit board represented by a polyimide resin film / copper foil circuit board; An element is mounted, and only the element mounting surface, that is, one side of the substrate is molded and sealed with an epoxy resin composition or the like. In addition, a solder ball is formed two-dimensionally in parallel on the surface opposite to the element mounting surface of the substrate, and has a feature of joining with a circuit board on which a package is mounted. Furthermore,
As a substrate on which the element is mounted, a structure using a metal substrate such as a lead frame has been devised in addition to the organic circuit substrate.

[0003] The structure of these area mounting type semiconductor packages adopts a single-sided sealing form in which only the element mounting surface of the substrate is sealed with a resin composition and the solder ball forming surface is not sealed. Very rarely, on a metal substrate such as a lead frame, a sealing resin layer of about several tens of μm may exist even on the solder ball forming surface, but a sealing resin layer of several hundred μm to several mm on the element mounting surface. Since the layer is formed, one-sided sealing is substantially achieved. For this reason, these packages warp immediately after molding due to inconsistency in thermal expansion and thermal shrinkage between the organic or metal substrate and the resin composition, or due to cure shrinkage during molding and curing of the resin composition. Is easy to occur. In addition, when soldering is performed on a circuit board on which these packages are mounted, a heating step of 200 ° C. or more is performed. At this time, warpage of the package occurs, and a large number of solder balls do not become flat, and the package is mounted. There is also a problem that the semiconductor device floats from the circuit board to be mounted and lowers the reliability of electrical connection.

When soldering is performed by soldering by means such as infrared reflow, vapor phase soldering, and solder immersion, moisture existing inside the package is rapidly increased at high temperature due to moisture absorption from the resin composition and the organic substrate. Cracks may occur in the package due to the stress caused by vaporization, and peeling may occur at the interface between the element mounting surface of the substrate and the cured product of the resin composition.
In addition to low moisture absorption, adhesion to the substrate is also required. Furthermore, due to the mismatch between the thermal expansion coefficient of the substrate and the cured product, peeling of the substrate / cured product interface and package cracking occur even in a temperature cycle test, which is a typical example of a reliability test. In conventional surface mount packages such as QFP and SOP, in order to prevent cracks at the time of solder mounting and peeling at the interface of each material, a molding epoxy resin such as a biphenyl type epoxy resin is used. Attempts to reduce the viscosity and increase the amount of the inorganic filler added have been taken as countermeasures. However, at present, this method cannot solve the problem of warpage in a single-sided sealed package.

In a package in which substantially only one surface of a substrate is sealed with a resin composition, in order to reduce warpage, the linear expansion coefficient of the substrate and the linear expansion coefficient of a cured product of the resin composition are brought close to each other; Two methods for reducing the cure shrinkage of the resin composition are important. BT for organic substrate
High glass transition temperature resins such as resins and polyimide resins are widely used, and have a glass transition temperature higher than around 170 ° C., which is the molding temperature of the epoxy resin composition. Accordingly, in the cooling process from the molding temperature to room contracts only alpha ₁ region of the organic substrate. Therefore, the resin composition is also the same as high and alpha ₁ is a circuit board glass transition temperature, warpage is considered to be substantially zero when further curing shrinkage is zero. Therefore, the glass transition temperature higher by a combination of a polyfunctional epoxy resin and a polyfunctional phenol resin, methods to adjust the alpha ₁ in the amount of the inorganic filler has been proposed.

However, a combination system of a polyfunctional epoxy resin having three or more epoxy groups in one molecule and a polyfunctional phenol resin having three or more phenolic hydroxyl groups in one molecule has a large moisture absorption. That, because each resin viscosity is high, it is not possible to highly fill the inorganic filler and it is difficult to reduce moisture absorption, showing high elasticity even at solder processing temperature,
Due to the high generated stress and the like, the occurrence of package cracks and the occurrence of interface peeling during the soldering process has not been solved. In addition, the gold wire used for electrical connection between the element and the substrate is as thin as tens of μm, and the length of the area mount package is longer than that of the conventional structure package. Due to the high density, the gold wires are deformed unless sealed with a low-viscosity resin composition at the time of molding, and the gold wires come into contact with each other to cause electrical failure. Especially CSP
In such a thin package as described above, it is an essential condition to seal with a resin composition having good filling properties and little deformation of the gold wire.

[0007]

SUMMARY OF THE INVENTION The present invention has a small warpage after molding in an area mounting package or during soldering, and has excellent reliability in a temperature cycle test or soldering.
The object of the present invention is to develop an epoxy resin composition for semiconductor encapsulation having a good filling property and a small deformation of a gold wire, that is, a high fluidity characteristic at the time of molding, and a semiconductor device sealed thereby. .

[0008]

Means for Solving the Problems As a result of diligent studies, the present inventor has found that a combination of a specific polyfunctional epoxy resin and a polyfunctional phenol resin curing agent can be combined with a special crystalline epoxy resin. , while reducing the decrease in glass transition temperature that low moisture absorption can be achieved, it is possible to increase the filling amount of the inorganic filler for low viscosity can be achieved, be possible to adjust the low moisture absorption and alpha _1, In addition, it is clear that it is possible to improve the filling property during molding and reduce the amount of wire deformation, and it is possible to reduce the generated stress because the elastic modulus at the time of soldering processing can be reduced, thereby improving the adhesion with the circuit board. It was done.

That is, the present invention provides (A) a compound represented by the general formula (1):
A crystalline epoxy resin containing at least one epoxy resin selected from the group consisting of the epoxy resins represented by (2) in the total epoxy resin in an amount of 20 to 90% by weight and having a melting point of 50 to 150 ° C, particularly preferably a general epoxy resin. Equation (4)-
An epoxy resin containing 10 to 80% by weight of the crystalline epoxy resin represented by (8) in the total epoxy resin; and (B) a phenol containing 20% by weight or more of the phenol resin represented by the general formula (3) in the total phenolic resin. An epoxy resin composition for semiconductor encapsulation, comprising a resin curing agent, (C) a curing accelerator, and (D) a fused silica powder, and more preferably has a curing shrinkage of 0. than 15%, the linear expansion coefficient alpha ₁ after curing at 8~16ppm / ℃,
An epoxy resin composition for semiconductor encapsulation having a glass transition temperature of 140 ° C. or higher, and a semiconductor device encapsulated with the epoxy resin composition for semiconductor encapsulation.

[0010]

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[0011]

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[0012]

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[0013]

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[0014]

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[0015]

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R in the formulas (1) to (8) represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 12 carbon atoms, which may be the same or different. l is 1 to 10
M is a positive integer of 0 or 1 to 3, and n
Is 0 or a positive integer of 1 to 4.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.
The epoxy resin represented by the general formula (1) among the epoxy resins of the component (A) used in the present invention is a resin generally referred to as a triphenolmethane type epoxy resin, and specific examples thereof include the following. However, the present invention is not limited to these. In any case, a cured product of the resin composition using the same has characteristics of a high crosslinking density, a high glass transition temperature, and a small cure shrinkage.

[0018]

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The epoxy resin represented by the general formula (2) has a high cross-link density structure and a low curing shrinkage property of the cured product as in the case of the formula (1), but also has a feature of relatively low viscosity. I have. Specific examples include the following, but are not limited thereto.

[0020]

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The polyfunctional epoxy resin represented by the general formulas (1) and (2) needs to be contained in an amount of 20 to 90% by weight of the total epoxy resin from the viewpoint of glass transition temperature and curing shrinkage. When the content is less than 20% by weight, the crosslink density of the obtained crosslinked structure decreases, so that the glass transition temperature decreases,
Cure shrinkage also increases. On the other hand, if it exceeds 90% by weight, the fluidity at the time of molding is reduced, so that the gold wire is easily deformed, and the adhesion to the substrate is reduced.

The melting point used in the present invention is 50 to 150 ° C.
Examples of the crystalline epoxy resin include monoepoxy compounds having one epoxy group in one molecule, diepoxy compounds having two epoxy groups in one molecule, and oligomers and polymers thereof. Since all of these epoxy resins show crystallinity, they are solid at a temperature lower than the melting point, but become a low-viscosity liquid material at a temperature higher than the melting point.
Therefore, in a crystalline epoxy resin having a melting point of less than 50 ° C.,
In the manufacturing process of the epoxy resin composition, fusion is likely to occur, and workability is significantly reduced. Further, in the case of a crystalline epoxy resin having a melting point exceeding 150 ° C., since the epoxy resin composition is not sufficiently melted in a manufacturing process of heating and kneading,
There is a problem that the uniformity of the material is poor. The melting point can be measured by a differential scanning calorimeter [Seiko Electronics Co., Ltd. SSC5
20, a heating rate of 5 ° C./min] from the endothermic peak temperature. Examples of the crystalline epoxy resin having a melting point of 50 to 150 ° C. include a biphenyl type epoxy compound of the formula (4),
And the stilbene type epoxy compound of the formula (6), the bisphenol F type epoxy compound of the formula (7), and the aralkyl-modified biphenyl type epoxy resin of the formula (8). Specific examples of these crystalline epoxy resins are shown below, but the invention is not limited thereto.

[0023]

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[0024]

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[0025]

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In these crystalline epoxy resins, the number of epoxy groups in one molecule is as small as one to at most several, and only a cured product having a low crosslinking density and low heat resistance can be obtained by itself. However, it has a rigid planar or rod-like skeleton as a structure, and has the property of being crystallized, that is, the molecules are easily oriented. Therefore, the general formula (1),
When used in combination with the polyfunctional epoxy resin shown in (2), even if the crosslink density of the crosslinked structure by the cured polyfunctional epoxy resin is reduced, it is difficult to lower the heat resistance such as the glass transition temperature. On the other hand, when a normal bifunctional non-crystalline epoxy resin is used in combination with a polyfunctional epoxy resin, only the crosslinking density is reduced, and the glass transition temperature is significantly reduced. However, when a crystalline epoxy resin is used in combination, it exhibits a low modulus of elasticity characteristic of a resin having a low functional group in a temperature region once exceeding the glass transition temperature, which is effective in reducing stress at a soldering temperature. This has the effect of preventing the occurrence of package cracks during the soldering process and the occurrence of peeling at the interface between the substrate and the cured product of the resin composition. Further, since the resin composition has a low viscosity in a molten state, the fluidity of the resin composition at the time of molding is high, and the filling property into a thin package is excellent. Melting point 50-1
The crystalline epoxy resin at 50 ° C contains 10% of the total epoxy resin.
８０80% by weight is required. If the content is less than 10% by weight, it is difficult to obtain the effects of lowering the elasticity and lowering the viscosity during heating.
Exceeding the weight percentage is not preferable because the warpage of the molded package increases.

The epoxy resin of the present invention may be used in combination with another epoxy resin. The epoxy resin that can be used in combination refers to all monomers, oligomers, and polymers having an epoxy group, and includes, for example, bisphenol A type epoxy resin, orthocresol novolak type epoxy resin, and naphthalene type epoxy resin. or,
These epoxy resins may be used alone or in combination.

Among the phenolic resin curing agents of the component B used in the present invention, the phenolic resin curing agent represented by the formula (3) is a so-called triphenolmethane type phenolic resin, and specific examples are shown below.

[0029]

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When these phenolic resins are used, the crosslinked density of the cured product is increased, and a cured product having a high glass transition temperature can be obtained. The use amount of the phenol resin of the formula (3) is 20% in the total phenol resin in terms of the glass transition temperature.
It is necessary to be added in an amount of at least% by weight. If it is less than 20% by weight, the glass transition temperature decreases, the curing shrinkage increases, and the amount of warpage of the molded package increases. The phenolic resin of the formula (3) can be appropriately used in combination with other phenolic resins, and is not particularly limited, and examples thereof include a phenol novolak resin, a cresol novolak resin, and a naphthol novolak resin.

As the curing accelerator of the component (C) used in the present invention, those which can serve as a catalyst for a crosslinking reaction between the epoxy resin and the phenol resin curing agent, specifically, amine compounds such as tributylamine And organic phosphorus compounds such as triphenylphosphine and tetraphenylphosphonium / tetraphenylborate, and imidazole compounds such as 2-methylimidazole, but are not limited thereto. These curing accelerators may be used alone or as a mixture.

The fused silica powder of the component (D) used in the present invention can be used in any of a crushed form and a spherical form. However, the compounding amount of the fused silica powder is increased and the melt viscosity of the resin composition is increased. In order to suppress this, it is preferable to mainly use spherical silica. In order to further increase the content of the spherical silica, it is desirable to adjust the particle size distribution of the spherical silica to be wider.

The resin composition of the present invention may be, if necessary, a brominated epoxy resin, a flame retardant such as antimony trioxide, a coupling agent, or carbon black, in addition to the essential components (A) to (E). Coloring agents, release agents such as natural waxes and synthetic waxes, etc., can be appropriately compounded. In order to obtain a resin composition, the components are mixed, heated and kneaded with a heating kneader or a hot roll, and then cooled and pulverized to obtain a desired resin composition. Using the epoxy resin composition of the present invention to encapsulate electronic components such as semiconductors and manufacture semiconductor devices, transfer molding, compression molding, and injection molding can be performed by conventional molding methods such as injection molding. Good. When the semiconductor device of the present invention uses a BT resin substrate as the organic substrate,
The linear expansion coefficient (α ₁ ) of the epoxy resin composition after curing is 8
It is particularly preferable that the glass transition temperature measured by a thermomechanical analyzer (TMA) is 140 ° C. or more and the curing shrinkage is 0.15% or less. The linear expansion coefficient of the BT resin substrate is about 14 ppm / ° C., but in a composite substrate in which a metal such as a silicon chip or a copper foil circuit is combined, the linear expansion coefficient is determined by the area ratio of the chip and the area ratio of the copper foil circuit. The coefficient changes. By setting the linear expansion coefficient and the curing shrinkage ratio of the cured product of the resin composition in the above ranges together with the linear expansion coefficient of the substrate, the resin composition can be adjusted according to the heat shrinkage from the molding temperature of the BT resin substrate to room temperature. The heat shrinkage of the cured product becomes almost the same, and the warpage after molding can be reduced.
Here, the curing shrinkage ratio refers to the ratio between the size of the mold at the molding temperature and the size of the molded product at the molding temperature.

In the present invention, the glass transition temperature, the coefficient of linear expansion,
The curing shrinkage is measured by the following method. -Glass transition temperature (Tg) and coefficient of linear expansion (α ₁ ): 1
The test piece obtained by transfer molding at 75 ° C. for 2 minutes was further cured at 175 ° C. for 8 hours, and measured by a thermomechanical analyzer [TMA-120 manufactured by Seiko Denshi Co., Ltd., heating rate 5 ° C./min]. Curing shrinkage: 180 ° C mold temperature of test piece, 7
Transfer molding was performed at an injection pressure of 5 kg / cm ² for 2 minutes, and post-curing was further performed at 175 ° C. for 8 hours. The cavity dimensions of the mold heated to 180 ° C. and the dimensions of the molded article heated to 180 ° C. were measured with calipers, and the curing shrinkage was represented by the ratio of molded article dimension / mold cavity dimension.

[0035]

The present invention will be specifically described below with reference to examples. << Example 1 >> 4.6 parts by weight of an epoxy resin represented by the formula (9) [Epicoat 1032H, manufactured by Yuka Shell Epoxy Co., Ltd., softening point 60 ° C., epoxy equivalent 170] ・ In the formula (10) 4.6 parts by weight of biphenyl epoxy resin shown [YX-4000H, manufactured by Yuka Shell Epoxy Co., Ltd., melting point of 105 ° C., epoxy equivalent of 195] 4.8 parts by weight of phenol resin represented by formula (11) [MEH-7500, trade name, manufactured by Meiwa Kasei Co., Ltd., softening point 107 ° C, hydroxyl equivalent 97] ・ Triphenylphosphine 0.2 parts by weight ・ Spherical fused silica 85.0 parts by weight ・ Carnauba wax 0.5 parts by weight 0.3 parts by weight of carbon black After all the above components were mixed by a mixer, the mixture was kneaded 30 times using two rolls having a surface temperature of 90 ° C and 45 ° C, and the obtained kneaded material sheet was obtained. Followed by cooling then pulverizing, and a resin composition. The properties of the obtained resin composition were evaluated by the following methods. Table 1 shows the evaluation results.

[0036]

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[0037]

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The structures and properties of the epoxy resins of formulas (12) to (17) and the phenol resin of formula (18) used in the above Examples and Comparative Examples are shown below.

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[0039]

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[0040]

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[0041]

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Epoxy resin having a structure of formula (12) as a main component: melting point 144 ° C., epoxy equivalent 175. Epoxy resin having a structure of formula (13) as a main component: melting point 52 ° C., epoxy equivalent 225. 14) Epoxy resin having a structure as a main component: melting point 133 ° C., epoxy equivalent 182 ・ Epoxy resin having a structure of the formula (15) as a main component: melting point 82 ° C., epoxy equivalent 190 ・ Mainly a structure of the formula (16) Epoxy resin as a component: Softening point 65 ° C., epoxy equivalent 210 ・ Epoxy resin having a structure of formula (17) as a main component: liquid, viscosity (25 ° C.) 55 Poise, epoxy equivalent 168 ・ Phenolic resin of formula (18): Softening point 80 ° C, hydroxyl equivalent 104

<< Evaluation Method >> Spiral flow: Using a mold for measuring spiral flow according to EMMI-1-66, using a mold temperature of 175 ° C.
The measurement was performed at an injection pressure of 70 kg / cm ² and a curing time of 2 minutes. Glass transition temperature (Tg) and coefficient of linear expansion (α ₁ ): According to the method described above.・ Heat elastic modulus: Flexural elastic modulus at 240 ° C is JIS-K6
It was measured under the test conditions of 911. Curing shrinkage: According to the method described above. Package warpage: 225-pin BGA package (substrate is 0.36 mm thick BT resin substrate, package size is 24 × 24 mm, thickness 1.17 mm, silicon chip is 9 × 9 mm, thickness 0.35 mm, chip and circuit board The bonding pad is bonded with a 25 μm diameter gold wire) at a mold temperature of 180 ° C. and 75 kg / c.
Transfer molding was performed at an injection pressure of m ² for 2 minutes, and post-curing was further performed at 175 ° C. for 8 hours. After cooling to room temperature, the displacement in the height direction was measured diagonally from the gate of the package using a surface roughness meter, and the value with the largest variation difference was defined as the amount of warpage. Solder Resistance: The molded product package used for measuring the package warpage was left for 168 hours in an environment of 85 ° C. and 60% relative humidity, and then immersed in a 240 ° C. solder bath for 10 seconds.
The package was observed using an ultrasonic flaw detector, and the number of internal cracks and the number of peels at the interface between the substrate and the resin composition were represented by% of (number of generated packages) / (total number of packages). Gold wire deformation: 225 molded by evaluating package warpage
The pin BGA package was observed with a soft X-ray fluoroscope, and the deformation rate of the gold wire was represented by (flow amount) / (gold wire length) in%.

<< Examples 2 and 3 and Comparative Examples 1 and 2 >> Based on Example 1 as a basic compound, changing the compounding ratio of the formulas (9) and (10), and adding the phenolic resin curing agent accordingly. Other components were blended in the same proportions as the basic blending except for the amount, and mixed and kneaded in the same manner as in Example 1 to obtain a resin composition. Evaluation was performed in the same manner as in Example 1. Table 1 shows the formulation and evaluation results. << Examples 4 to 6 and Comparative Example 3 >> Example 1 was used as a basic formulation, and in Examples 4 to 6, the type of the formula (2) was changed, and in Comparative Example 3, the type of phenol resin curing agent and the amount thereof were also changed. The other components were blended in the same proportions as the basic blend, and mixed and kneaded in the same manner as in Example 1 to obtain a resin composition. Evaluation was performed in the same manner as in Example 1. Table 2 shows the formulation and evaluation results. << Examples 7, 8 and Comparative Examples 4, 5 >> Based on Example 1, the amount of the inorganic filler was changed, and accordingly, the type of the epoxy resin and the phenol resin curing agent and the amount thereof were also changed. Was. In Comparative Example 5, an amorphous bifunctional epoxy resin was used in combination with the epoxy resin of the formula (9) as the low molecular epoxy resin. Other than that, each component was blended in the same ratio as the basic blend, and mixed and kneaded in the same manner as in Example 1 to obtain a resin composition. Evaluation was performed in the same manner as in Example 1. Table 3 shows the formulation and evaluation results.

Table 1 Example Comparative example 1 2 3 12 << Type and amount of epoxy resin (parts by weight) >> Epoxy resin of formula (9) 4.6 7.8 2.0 8.9 Epoxy resin of formula (10) 4.6 1.2 7.2 9.4 << Kind and blending amount (parts by weight)> Phenolic resin of formula (11) 4.8 5.0 4.7 5.1 4.6 << Evaluation >> Spiral follow (cm) 98 85 115 75 111 Tg (° C) 182 187 176 195 138 138 α ₁ (ppm / ° C) 13 13 13 13 13 Thermal elasticity (N / mm ² ) 2400 2900 1850 3500 1300 Curing shrinkage (%) 0.07 0.05 0.08 0.05 0.24 Package warpage (μm) 32 30 35 30 130 Solder resistance: number of cracks (% 0 000 80 20 Number of peelings (%) 00 000 50 Change in gold line (%) 2 3 2 8 3

Table 2 Example Comparative Example 4 5 6 3 << Type and amount of epoxy resin (parts by weight) >> Epoxy resin of formula (9) 4.5 4.7 4.5 4.4 Epoxy resin of formula (10) 4.4 Epoxy resin of formula (12) 4.5 formula Epoxy resin of (13) 4.7 Epoxy resin of formula (14) 4.5 << Type and amount of blending agent (parts by weight) >> Phenolic resin of formula (11) 5.0 4.6 5.0 Phenolic resin of formula (18) 5.2 << Evaluation >> Spiral Follow (cm) 86 94 82 113 Tg (° C) 187 185 190 162 α ₁ (ppm / ° C) 13 13 13 13 Thermal elastic modulus (N / mm ² ) 2600 2500 2850 1800 Curing shrinkage (%) 0.06 0.07 0.05 0.18 Package warpage (μm) 30 35 35 95 Solder resistance: Number of cracks (%) 0 0 0 70 Number of peelings (%) 0 0 0 40 Change in gold wire (%) 4 3 3 3

Table 3 Example Comparative example 1 7 8 4 5 << Type and blending amount (parts by weight) of epoxy resin >> Epoxy resin of formula (9) 4.6 6.2 9.5 4.5 Epoxy resin of formula (12) 4.6 6.2 9.5 Formula (15) Epoxy resin 3.6 Epoxy resin of formula (16) 3.6 Epoxy resin of formula (17) 4.4 << Type and amount of curing agent (parts by weight) >> Phenolic resin of formula (11) 4.8 1.1 6.6 10.0 5.1 Phenol of formula (18) resin 2.7 "amount of the inorganic filler" fused silica (parts by weight) 85 88 80 70 85 "evaluation" spiral follow (cm) 98 132 146 160 106 Tg (℃) 182 173 180 179 145 α 1 (ppm / ℃) 13 9 15 17 13 Thermal elasticity (N / mm ² ) 2400 3100 1400 900 1450 Curing shrinkage (%) 0.07 0.03 0.12 0.16 0.11 Package warpage (μm) 32 40 40 55 90 Solder resistance: Number of cracks (% 0 0 0 0 0 0 Number of peelings (%) 0 0 0 0 0 0 Change in gold line (%) 2 2 2 2 3

[0048]

The epoxy resin composition for semiconductor encapsulation of the present invention is also excellent in moldability such as gold wire deformation, and the area mounting type semiconductor device sealed with the epoxy resin composition for semiconductor encapsulation can be used at room temperature. Also, the warpage in the soldering process is small, and the reliability such as solder resistance and temperature cycle resistance is high.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI C08L 63/00

Claims (4)

[Claims] (A) at least one epoxy resin selected from the group consisting of the epoxy resins represented by the general formulas (1) and (2) in an amount of 20 to 90% by weight in the total epoxy resin;
An epoxy resin containing 10 to 80% by weight of a crystalline epoxy resin having a melting point of 50 to 150 ° C. in the total epoxy resin, and (B) a phenol resin represented by the general formula (3) in an amount of 20% by weight in the total phenol resin % Of a phenolic resin curing agent, (C) a curing accelerator, and (D) fused silica powder. Embedded image Embedded image Embedded image R in the formulas (1) to (3) represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 12 carbon atoms, which may be the same or different. l is a positive integer from 1 to 10,
m is 0 or a positive integer of 1 to 3, and n is 0 or a positive integer of 1 to 4. 2. The crystalline epoxy resin having a melting point in the range of 50 to 150 ° C. is at least one epoxy resin selected from the group consisting of epoxy resins represented by formulas (4) to (8). Item 2. The epoxy resin composition for semiconductor encapsulation according to Item 1. Embedded image Embedded image Embedded image R in the formulas (4) to (8) represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 12 carbon atoms, which may be the same or different. l is a positive integer from 1 to 10,
m is 0 or a positive integer of 1 to 3, and n is 0 or a positive integer of 1 to 4. 3. A 0.15% curing shrinkage during molding curing hereinafter Claim linear expansion coefficient alpha ₁ after curing is in the range of 8~16ppm / ℃, and a glass transition temperature of 140 ° C. or higher 3. The epoxy resin composition for semiconductor encapsulation according to 1 or 2. 4. A semiconductor device is mounted on one surface of a substrate, and substantially only one surface on the substrate surface side on which the semiconductor device is mounted is sealed with the epoxy resin composition according to claim 1, 2 or 3. A semiconductor device.