JPH1164177A - Transfer device for vacuum chamber - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transfer apparatus which can be used in a vacuum device and is economical and compact and has excellent operability. SOLUTION: A through hole provided with a latch mechanism comprising a ball 17 is formed in the center of a sample holder 1. While the flat face part of a carrier fixing pin 23 being positioned at an angular position opposite to the ball 17, the carrier fixing pin 23 is inserted to rotate the sample carrier 2. Consequently, the ball 17 and the fixing pin mutually interfere and the sample carrier 2 is prevented from coming out of the sample holder 1. To take out the holder, such processes are carried out in reverse order. The sample carrier 2 is rotated by a transferring holder 3 installed at the tip end of a transfer rod. Attachment and detachment of the sample carrier 2 and the transferring holder 3 are also carried out by rotation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to transfer (manipulation) of a sample in a vacuum chamber.
Related to the device.

[0002]

2. Description of the Related Art When conducting experimental production or the like using a vacuum chamber, a transfer device for handling a sample in the vacuum chamber is required. A sample transfer device in such a vacuum chamber is
Various types have been developed so far.

For example, there is a device for transferring a stub by a wobble stick to which a dedicated fork is attached. This system is characterized by a simple structure. Also,
There is also an apparatus that mounts a sample holder on a sample carrier by a bayonet method. As a transfer device for a vacuum chamber, various other types of devices have been proposed.

[0004]

However, the above-mentioned prior art has advantages and disadvantages, and there is no technology that can be said to be a definitive version. For example, in a certain type of apparatus, there is a problem that if the transfer distance is long, the system configuration becomes complicated and the operation involved in the transfer becomes complicated (the more complicated the operation, the more the sample is dropped. Etc.). In another type of device, the sample carrier becomes large, and it is difficult to reduce the size of the device. Further, still another device has an excellent function but is expensive.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a transfer device for a vacuum device which has features such as being inexpensive, versatile, and excellent in operability, and which can be supported by many researchers.

[0006]

SUMMARY OF THE INVENTION The present invention has been made to achieve the above-mentioned object, and has a transfer rod configured to be able to at least directly move in the axial direction and rotate about the shaft. In a transfer apparatus for moving and setting a sample to a vacuum chamber, a sample carrier to which the sample is fixed, a sample holder to which the sample carrier is mounted, and which is installed in the vacuum chamber; Supporting a sample carrier on the transfer rod, a transfer holder installed on the transfer rod,
The transfer holder and the sample carrier are configured to rotate each other by rotating at least one of them in a state of facing each other at a specific angular position to change the relative angular position of each other. The engagement is reversed, and the relative angular position is returned to the specific angular position to release the engagement, and the rotation in a state where the two are close to each other is allowed only within a predetermined angular range. A first engagement mechanism, wherein the sample carrier and the sample holder have a second engagement mechanism for engaging each other. The second engagement mechanism includes an engagement hole provided on the sample holder, the inner wall surface having a protrusion in a part of a circumferential direction thereof, and the engagement hole provided on the sample carrier. In the hole And an engagement pin provided coaxially with the center of rotation, wherein the engagement pin is provided in a partial area in a circumferential direction of the engagement pin. A non-interfering portion that does not interfere with the convex portion at the time of insertion into the mating hole and pulling out from the engaging hole, and a sample carrier inserted into the engaging hole provided in a partial area in the axial direction thereof, An interfering portion that prevents the engaging pin from coming out of the engaging hole by interfering with the convex portion in a state rotated by a predetermined angle.

The sample carrier has a sample fixing surface on which the sample is fixed, on a surface which is close to and opposed to the transfer holder when engaging with the transfer holder, and the transfer holder has an engagement with the sample carrier. In the part facing the sample fixing surface when combining,
It is preferable to have a space that can accommodate the sample fixed to the sample fixing surface.

The first engagement mechanism includes a plurality of engagement claws arranged on a circumference and an engaged portion engaged by the engagement claws. Preferably, the sample fixing surface and the space are located within the circumference.

The sample holder has a branch hole opened on the inner wall surface of the engagement hole, and a movable member accommodated in the branch hole and a movable member attached to the center of the engagement hole. And a biasing member for biasing,
It is preferable that the convex portion is configured such that a part of the movable member enters the engagement hole.

[0010]

Embodiments of the present invention will be described with reference to the drawings.

This embodiment is a transfer device (mechanism)
Is a measurement and processing apparatus configured to include a vacuum chamber provided with

First, an outline of the measuring and processing apparatus will be described with reference to FIG.

The measuring and processing apparatus comprises a measuring chamber 100
And a sample preparation chamber 110.

The measuring chamber 100 has XY inside.
A stage 102 is provided. The XY stage 102 is provided with a sample holder for supporting a sample carrier on which a sample (sample) is fixed. The position of the XY stage 102 can be independently changed in the X direction and the Y direction by operating the micrometer 103. The XY stage 102 is configured such that its height can be changed by an elevating mechanism (not shown).

To move the sample (sample) from the sample preparation chamber 110 to the measurement chamber 100, the sample is fixed on a sample carrier in advance, and the sample carrier is moved by a transfer rod 101 operated by a drive mechanism (not shown). This is done by supporting and moving.

The transfer device in the present embodiment is based on the premise that the transfer rod 101 can at least directly move and rotate. In the present embodiment, a sample carrier (that is, a sample carrier (ie,
(Transfer device) for transferring the sample). Therefore, hereinafter, the transfer apparatus will be mainly described.

FIG. 2 shows a transfer apparatus according to this embodiment.
As shown in the figure, the sample carrier 2 on which the sample is fixed
And the sample carrier 2 is transferred to the transfer rod 101.
And a sample holder 1 to which the sample carrier 2 can be attached. (1) Sample holder 1 (see FIG. 4) The sample holder 1 is for holding the sample carrier 2.

The sample holder 1 includes a plate-shaped sample holder main body 10 having a predetermined thickness, and a spring 16, a ball 17, and a female screw 18 installed in the main body 10. .

The sample holder main body 10 has a through hole 11 (5Φ) at the center of the plane portion. A latch mechanism is provided in the through hole 11. That is, a branch hole 12 opened in the inner wall surface of the through hole 11 is provided inside the sample holder main body 10. And
A ball 17 and a spring 16 are housed in the branch hole 12. The ball 17 is urged by the spring 16, and a part of the ball 17 enters the through hole 11. However, since the opening of the branch hole 12 is narrowed, the ball 17 does not fall into the through hole 11. The other opening of the branch hole 12 is closed by a stop screw 18.
Can adjust the pressing force of the ball 17.

The sample holder 1 is mainly made of a non-magnetic material in consideration of the influence on low energy electrons at the time of measurement. More specifically, the sample holder body 10 and the stop screw 18 are made of molybdenum (Mo), and the spring 16 is made of tungsten (W). However, alumina is adopted as the material of the ball 17 in order to prevent galling with the metal sample carrier 2. (2) Sample carrier 2 (see FIG. 5) The sample carrier 2 is for directly fixing a sample.

The sample carrier 2 includes a sample carrier main body 20, carrier fixing pins 23, and screws 26.

The sample carrier body 20 has a plane 21 on which a sample is fixed (hereinafter referred to as a “sample fixing surface”) 21.
It is a disk-shaped member provided with. Sample carrier body 2
A screw 26 is provided on the side surface of the zero. In addition, the sample carrier body 20 has 9
R cuts 22 are provided on both sides in the 0 ° direction. The sample fixing surface 21 is provided with two screw holes, and the measurement sample is held and fixed using the screw holes.

The carrier fixing pin 23 is for fixing the sample carrier 2 to the sample holder 1, and is provided on the back side of the sample fixing surface 21 of the sample carrier main body 20. The carrier fixing pin 23 is
The middle is narrowed down to a tapered shape (tapered portion 24). A part of the circumferential direction (a region including the same angular position as the screw 26) is cut off to form a plane parallel to the axial direction of the carrier fixing pin 23 (a flat surface 25). In the sample carrier 2, the carrier fixing pin 23 is inserted into the through hole 11 of the sample holder 1, and the ball 17 and the tapered portion 2 of the carrier fixing pin 23 are
4 are fixed to the sample holder 1 when they interfere with each other. However, at the angular position where the flat portion 25 is opposed to the ball 17, the carrier fixing pin 23 (that is, the sample carrier 2) can be easily inserted and removed without interfering with the ball 17.

The carrier fixing pin 23 and the screw 2
6. The shape and position of the R notch 22 are important for the transfer operation as described later.

In consideration of the effect on low-energy electrons during measurement, a nonmagnetic material (molybdenum (Mo) in this embodiment) is used for the sample carriers 2 and the screws 26. (3) Delivery Holder 3 (see FIG. 6) The delivery holder 3 is for holding the sample carrier 2 and is used by being attached to the tip of the transfer rod 101. The delivery holder 3 includes a delivery holder main body 30, a carrier pressing spring 33 installed in the delivery holder main body 30, and a bellows 34.

The transfer holder main body 30 has a cylindrical shape, and has an R cut 2
2, two claws 31 are provided. A part of the tip of the delivery holder main body 30 is cut out (side cutout 32). The side cutout 32
Are compatible with the screws 26 of the sample carrier 2. The positional relationship between the two claws 31 and the side cutouts 32 is the key to the transfer operation.

The holding spring 8 is for preventing the sample carrier 2 held in the transfer holder 3 from falling off. The holding spring 8 is installed in the delivery holder main body 30 and urges the sample carrier 2 held by the delivery holder 3 toward its tip (to the left in FIG. 6) to fix the sample on the sample carrier 2. Face 2
1 is pressed against the inner surface of the nail 31. In a state where the sample carrier 2 is held, the sample fixed to the sample carrier 2 is located inside the holding spring 8 and is protected by the transfer holder body 30.

The bellows 34 is used to effectively absorb the force applied to each element when a beginner performs an unreasonable transfer operation, and to allow the sample carrier to be securely fixed and detached. 30 (the right side in FIG. 6). The bellows 3
At the rear part of 4, there is provided a mounting part 35 for mounting the transfer holder 3 to the transfer rod. As described above, the transfer rod is configured to be able to rotate the transfer holder 3 about the axis of the transfer holder main body 30.

The transfer holder body 30 and the bellows 34 are made of SUS304, and the carrier holding spring 33 is made of tungsten (W).

The "certain specific angular position" in the present invention indicates a positional relationship as shown in FIG. The “projection” and the “movable member” correspond to the ball 17. The “engagement hole” corresponds to the through hole 11. The “engagement pin” corresponds to the carrier fixing pin 23. The “non-interference part” corresponds to the flat part 25. The “interference part” corresponds to the tapered part 24. The “engaging claw”
It corresponds to the nail 31. The “engaged portion” corresponds to an outer peripheral portion of the sample carrier main body 20. The “branch hole” corresponds to the branch hole 12. The “biasing member” corresponds to the spring 16. The “space” corresponds to a space in the delivery holder main body 30. The “first engagement mechanism” includes the claw 31, the side notch 32, the notch side wall 32a,
b, screw 26 of sample carrier 2, R cut 22,
It is constituted by the outer peripheral portion of the sample carrier main body 20 and the like. The “second engagement mechanism” refers to the carrier fixing pin 2
3, constituted by the through hole 11 of the sample holder 1, the ball 17, and the like.

Next, the operation of the transfer device of the present embodiment will be described.

Here, the description will be made separately in the following (1), (2) and (3).

(1) Attachment of sample carrier 2 to delivery holder 3 (2) Attachment of sample carrier 2 to sample holder 1 (3) Removal of sample carrier 2 from sample holder 1 In order to make the positional relationship between the transfer holder 2 and the transfer holder 3 easy to understand, the description will be made with reference to drawings (FIGS. 7, 8, 9, and 10) schematically showing these components. FIG. 7A schematically illustrates the sample carrier 2 so that its angular position is easily understood. Similarly, FIG. 7B schematically illustrates the transfer holder 3 and FIG. 7C schematically illustrates the sample holder 1 so that the angular position thereof is easily understood. 7, FIG. 8, FIG. 9, and FIG. 10 show states viewed from the direction corresponding to the right side in FIG.

The rotation and linear movement of the transfer holder 3 described below are performed by the rotation and linear movement of the transfer rod 101 to which the transfer holder is attached. (1) Attachment of sample carrier 2 to delivery holder 3 (see FIG. 8) Operation 1-1. The transfer holder 3 is transferred to the sample carrier 2 (or vice versa) at an angular position such that the claws 31 pass through the R cuts 22 of the sample carrier 2 and the screws 26 are located in the side cutouts 32.
8) (FIG. 8A). Operation 1-2. After insertion, the transfer holder 3 is rotated clockwise (or the sample carrier 2 is rotated counterclockwise) (FIG. 8).
(B)). Finally, until the notch side wall 32b of the side notch 32 is sufficiently close to the screw 26 (about 90 °).
The transfer holder 3 is rotated (FIG. 8C). In this state, the claws 31 are engaged with the sample carrier main body 20. Further, the sample carrier 2 is urged toward the claw 31 by the carrier pressing spring 33. Therefore, in this state, the sample carrier 2 is securely held at the tip of the transfer holder 3. In this state, the sample previously fixed to the sample carrier 2 is protected by the transfer holder 3. (2) Attachment of sample carrier 2 to sample holder 1 (see FIG. 9) Operation 2-1. The sample carrier 2 held in the transfer holder 3 is
Insert into sample holder 1. In this case, the relative angle between the sample holder 1 and the sample carrier 2 is such that the sample carrier 2 has an angle position such that the plane portion 25 thereof faces the ball 17 of the sample holder 1 (FIG. 9).
(A)). Since the carrier fixing pin 23 does not interfere with the insertion, the insertion can be performed without resistance. Operation 2-2. After the insertion is completed, the transfer holder 3 is rotated by about 90 ° in the semi-total direction (FIG. 9B). At this time, the position of the sample carrier 2 with respect to the sample holder 1 does not change. Only the transfer holder 3 rotates. At the time when the sample carrier 2 is rotated by about 90 °, the screws 26 of the sample carrier 2 are notched
(a) (FIG. 9 (c)). Operation 2-3. Further, when the rotation of the transfer holder 3 is continued, the screws 26
Is pushed by the cutout side wall 32a of the transfer holder 3, and the sample carrier 2 starts to rotate together with the sample carrier 2 in the counterclockwise direction (FIG. 9D). The sample carrier 2
The rotation causes the carrier fixing pin 23 to interfere with the ball 17. The sample carrier 2 is about 90 °
At the time of rotation, the sample carrier 2 is fixed to the sample holder 1 (FIG. 9E). Moreover, in this state, the tapered portion 25 of the carrier fixing pin 23 is
7, the sample carrier 2 is pressed against the sample holder 1 and is firmly fixed. Operation 2-4. In the state of FIG. 9E, the claw 31 of the delivery holder 3 is at the position of the R notch 23. Therefore, the delivery holder 3 can be pulled out of the sample carrier 2 in this state. In this case, the sample carrier 2 is firmly fixed to the sample holder 1. Thus, the attachment of the sample carrier 2 to the sample holder 1 is completed (FIG. 9F). (3) Removal of sample carrier 2 from sample holder 1 (FIG. 10) Operation 3-1. The transfer holder 3 is moved linearly and inserted into the sample carrier 2. At this time, the angular position of the transfer holder 3 with respect to the sample carrier 2 is set such that the claw 31 passes through the R cutout 23 and the screw 26 is positioned in the side cutout 32 (FIG. 10A). Operation 3-2. After the insertion, the delivery holder 3 is rotated clockwise (FIG. 10B). At this time, the position of the sample carrier 2 with respect to the sample holder 1 does not change. Only the transfer holder 3 rotates. Finally, the transfer holder 3 is rotated until the notch side wall 32b of the side notch 32 is sufficiently close to the screw 26 (FIG. 10C). In this state, the claws 31 are engaged with the sample carrier main body 20. Further, the sample carrier 2 is urged toward the claw 31 by the carrier pressing spring 33. Therefore, in this state, the sample carrier 2 is securely held at the tip of the transfer holder 3. Operation 3-3. Further, when the rotation of the transfer holder 3 is continued, the screws 26
Is pushed by the cutout side wall 32b of the transfer holder 3, and the sample carrier 2 also starts to rotate clockwise (FIG. 10D). And this sample carrier 2
With the rotation of, the ball 17 does not interfere with the carrier fixing pin 23. The sample carrier 2 is about 90
At this point, the carrier fixing pin 23 is in a state where the flat portion 25 thereof faces the ball 17 (FIG. 10).
(E)). On the other hand, in this state, the sample carrier 2 is firmly held by the transfer holder 3. Operation 3-4 When the delivery holder 3 is pulled in this state (FIG. 10E), the sample carrier 2 is removed from the sample holder 1 together with the delivery holder 3 (FIG. 10F).
In this state (FIG. 10E), since the ball 17 and the carrier fixing pin 23 do not interfere with each other, there is no resistance in pulling out.

The transfer device described above (particularly,
The sample holder, the sample carrier and the transfer holder) can be very compact because of their simple structure. Therefore, the present invention can be applied to an apparatus having only a small flange port. It can also be attached to a commercially available transfer rod tip with a limited size. Furthermore, a simple structure leads to high reliability.
In addition, attaching and detaching operation of sample carrier,
It can be performed only by a simple operation (linear motion and rotation around the axis) by an inexpensive transfer rod. Moreover,
The operation can be performed safely even by a beginner who is not used to the transfer device. With the above features, the device price can be kept low.

In addition, since the sample is protected by the transfer holder 3 during transfer, there is no danger of damaging the sample surface.

Furthermore, because of good heat conduction to the sample holder, Liq. The sample can be effectively cooled and cooled to a low temperature by N ₂ .

The apparatus of the present invention is applicable to all solid sample measuring apparatuses including a vacuum chamber. Specific examples of such a measuring device include, for example, U
PS (vacuum ultraviolet photoelectron spectrum), ESCA (XP
S) (X-ray photoelectron spectrum), LEED (slow electron beam diffraction), AES (Auger electron spectrum), EELS
(Electron energy loss spectrum), RHEED (reflection high-speed electron beam diffraction), SIMS (secondary ion mass spectrometry),
And so on. Further, the transfer device of the present invention can be used in many applications, from a measurement device at a laboratory level to a device operating in a synchrotron radiation facility.

[0039]

As described above, the transfer apparatus of the present invention is excellent in the following points.

(1) The structure is simple and inexpensive.

(2) The operation can be performed only by operation with an inexpensive magnetic transfer rod (linear motion and rotation around its axis).

(3) Even beginners who are not used to the transfer device can operate safely and reliably. (4) It is robust and hard to break even with unreasonable operation.

(5) The sample carrier and the transfer holder are compact. Therefore, it can be attached to a small flange port.

(6) The sample holder is also very compact. Therefore, it can be attached to a commercially available transfer rod tip having a limited size.

(7) The sample surface is protected during transfer.

(8) Good heat conduction to the sample holder. Therefore, Liq. The sample can be effectively cooled and cooled to a low temperature by N ₂ .

[Brief description of the drawings]

FIG. 1 is a diagram showing an outline of a measuring and processing apparatus including a vacuum chamber and having a transfer apparatus of the present invention.

FIG. 2 is a diagram showing an outline of a transfer device of the present invention.

3A is a side view showing a state where the sample carrier is attached to the sample holder, and FIG. 3B is a front view showing a state where the sample carrier is attached to the sample holder.

FIG. 4A is a side sectional view showing a sample holder;
FIG. 2B is a front view, and FIG.

5A is a front view showing a sample carrier, FIG.
(B) Top view, (c) Side view.

FIG. 6A is a front view showing the transfer holder, and FIG.
It is a side perspective view, (c) bottom view.

FIG. 7 is a diagram when viewed from the right side in FIG. 2;
(A) is a schematic diagram of a sample carrier, (b) is a schematic diagram of a delivery holder, and (c) is a schematic diagram of a sample holder.

FIG. 8 is a diagram showing a procedure for attaching a sample carrier to a delivery holder.

FIG. 9 is a diagram showing a procedure for attaching a sample carrier to a sample holder.

FIG. 10 is a diagram showing a procedure for removing a sample carrier from a sample holder.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Sample holder 2 Sample carrier 3 Delivery holder 10 Sample holder main body 11 Through hole 12 Branch hole 16 Spring 17 Ball 18 Retaining screw 20 Carrier main body 21 Sample fixing surface 22 R notch 23 Carrier fixing pin 24 Tapered part 25 Flat part 26 Screw 30 Delivery Holder body 31 Claw 32 Side notch 32a, b Notch side wall 33 Carrier holding spring 34 Bellows 35 Mounting part

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Masashi Hasegawa 2-2-1 Tatsumi Minami, Okazaki City, Aichi Prefecture

Claims (4)

[Claims] 1. A transfer device for moving a sample to a vacuum chamber and setting it by a transfer rod configured to be capable of at least direct movement in the axial direction and rotation about the axis, A sample carrier to which a sample is fixed, a sample holder installed in the vacuum chamber to which the sample carrier is mounted, and a transfer holder installed to the transfer rod, which supports the sample carrier to the transfer rod. The transfer holder and the sample carrier are rotated by rotating at least one of them in a state where they are in close proximity to each other at a specific angular position to change their relative angular positions. And reversely adjust the relative angular position. By returning to a specific angular position, the engagement is released, and rotation in a state where they are close to each other is allowed only within a predetermined angular range, and a change in relative angular position beyond this is allowed. A first engagement mechanism that is blocked; the sample carrier and the sample holder have a second engagement mechanism that engages with each other; An engaging hole provided with a convex portion on a part of the inner wall surface in a circumferential direction, provided at a position coaxial with the center of rotation, inserted into the engaging hole, provided in the sample carrier. And an insertion pin provided in a partial area in a circumferential direction of the engagement pin, and inserted into the engagement hole and pulled out from the engagement hole. Non-interference that does not interfere with the convex part The sample carrier is inserted into the engagement hole provided in a partial area in the axial direction thereof, and then the sample carrier is rotated by a predetermined angle. And an interference part for preventing the hole from coming out of the hole. 2. The sample carrier has a sample fixing surface on which the sample is fixed, on a surface which is close to and opposed to the transfer holder when engaging with the transfer holder. 2. The transfer device according to claim 1, further comprising a space that can accommodate a sample fixed to the sample fixing surface, at a portion facing the sample fixing surface when engaging. 3. The first engagement mechanism includes a plurality of engagement claws arranged on a circumference and an engaged portion engaged by the engagement claws. The transfer device according to claim 2, wherein the sample fixing surface and the space are located within the circumference. 4. The sample holder has a branch hole opened in an inner wall surface of the engagement hole, and has a movable member housed in the branch hole and directs the movable member toward the center of the engagement hole. And a biasing member that biases the movable member, wherein the convex portion is configured by a part of the movable member entering the engagement hole. The transfer device according to claim 3.