JPH1164124A - Measuring device, load measuring device, measuring method, and load measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To precisely detect the temperature under an environment to which a resistance bridge circuit is exposed by outputting a temperature detection signal corresponding to the ambient temperature of the resistance bridge circuit on the basis of the composed resistance value change of a plurality of resistors of the resistance bridge circuit. SOLUTION: A load sensor part 101F1 has a resistance bridge circuit 105 having an input terminal TI1 connected to a high potential side power source VH through a resistor R1 and an input terminal TI2 connected to a low voltage side power source. The bridge circuit 105 has strain gauges SG1-SG4. A differential amplifier 106 differentially amplifies the output of the bridge circuit 105, and outputs a load detection signal SP. An amplifier 107 detects and amplifies the voltage divided by the composed resistance of the strain gauges SG1-SG4, and outputs a temperature detection signal ST. An arithmetic processing part 110 A/D converts the load output signal SP and the temperature detection signal ST by an A/D converter part 108, to perform various arithmetic processings, and outputs a temperature compensating load detection data P.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring device, a load measuring device, a measuring method and a load measuring method, and more particularly to detecting an axial load (thrust load) generated in a bearing of a rotary machine such as a jet engine. Measuring device, load measuring device, measuring method, and load measuring method.

[0002]

2. Description of the Related Art A strain gauge type load sensor using a strain gauge for measuring an unknown load generated on an object to be measured has been known. For example, in a strain gauge type load sensor for detecting a real thrust load of a bearing portion in real time, a resistance bridge circuit including a strain gauge is formed on the surface of the strain generating portion.

[0003] Then, the electric resistance value of the strain gauge (hereinafter referred to as
It is simply called resistance value. ), The differential output voltage of the resistance bridge circuit, which is output when the equilibrium state of the resistance bridge circuit is lost based on the change, is detected, and the temperature is compensated by hardware in parallel. Assuming that the change hardly affects the differential output voltage, signal processing was performed to calculate the thrust load.

FIG. 14 shows a schematic configuration diagram of a conventional strain gauge type load sensor. The strain gauge type load sensor 200
When roughly classified, one end is connected to the high-potential-side power supply VH, and a first resistor R11 for dividing a power supply voltage to apply a predetermined measurement voltage to a resistor bridge circuit 201, which will be described later, and a first resistor R11. A resistor bridge circuit 201 having a first input terminal TIN11 connected to the first input terminal TIN12 and a second input terminal TIN12 connected to the low potential side power supply VL;
A non-inverting input terminal is connected to OT11, and a resistor bridge circuit 2
01 is connected to the second output terminal TOT12,
And a differential amplifier 202 for differentially amplifying the output of the resistance bridge circuit 201.

[0005] The resistance bridge circuit 201 includes a first strain gauge SG11 having one end connected to the first input terminal TIN11 and the other end connected to the first output terminal TOT11, and a first output terminal TOT.
A second strain gauge SG12 having one end connected to the first input terminal 11 and the other end connected to the second input terminal TIN12, and a third strain gauge having one end connected to the second input terminal TIN12 and the other end connected to the second output terminal TOT12. A fourth terminal having one end connected to the strain gauge SG13 and the second output terminal TOT12 and the other end connected to the first input terminal TIN11.
It comprises a strain gauge SG14 and a temperature compensation resistor RTH connected in parallel to the fourth strain gauge SG4.

Next, the general operation will be described. The first input terminal TIN11 is connected to the resistor bridge circuit 201 via the first resistor R11.
In a state where the measuring voltage is applied via the second input terminal TIN12 and no load is applied, the resistance bridge circuit 201 is in a balanced state, and the first output terminal TOT11 of the resistance bridge circuit 201 is in a balanced state. The differential output voltage output via the second output terminal TOT12 is ideally 0 [V].

When a load is applied, the equilibrium state is broken, and a differential output voltage having a voltage corresponding to the applied load is applied via the first output terminal TOT11 and the second output terminal TOT12 of the resistance bridge circuit 201. Output to the differential amplifier 20
Numeral 2 amplifies the differential output voltage and outputs it from the output terminal.

[0008]

In the above-described conventional strain gauge type load sensor, the temperature characteristics at the first output terminal TOT11 and the second output terminal TOT12 are made identical by the temperature compensation resistor RTH, and the differential voltage of the resistance bridge circuit 201 is changed. As the output, the temperature characteristic is compensated, and the accuracy of the differential output is improved.

However, the temperature compensation performed by the temperature compensation resistor RTH in the above-described conventional strain gauge type load sensor is the temperature characteristic of the offset, and the temperature cannot be compensated over the entire measurement load range (span). There was no problem. Further, when the temperature range to which the resistance bridge circuit 201 is exposed in a measurement environment is wide, the temperature characteristics of the respective strain gauges cannot be considered to be linear, and the error increases. there were.

More specifically, as shown in FIG. 15, assuming that a load / load sensor output at a reference temperature (= 25 [° C.]) is a reference strain gauge type load sensor output, when the temperature is changed ( 75 [° C], 125 [° C], 175
[° C.]), the error increases as the temperature increases.

As shown in FIG. 13, the nonlinearity at 25 ° C. according to the prior art is 0.64 [% FS].
Met. Therefore, an object of the present invention is to provide a measuring device, a load measuring device, a measuring method, and a load measuring method capable of performing, in real time, highly accurate temperature compensation in the entire range of offset and measured load ranges under a wide range of temperature conditions. Is to provide.

[0012]

According to a first aspect of the present invention, there is provided a measuring apparatus having a resistance bridge circuit, wherein a resistance of a combined resistance of a plurality of resistors constituting the resistance bridge circuit is provided. The apparatus is provided with temperature detecting means for outputting a temperature detection signal corresponding to the temperature around the resistance bridge circuit based on the value change.

According to the first aspect of the present invention, the temperature detecting means detects the temperature detection signal corresponding to the temperature around the resistance bridge circuit based on a change in the resistance value of the combined resistance of the plurality of resistors constituting the resistance bridge circuit. Is output. According to a second aspect of the present invention, in the first aspect of the present invention, a temperature compensating means for compensating the temperature of the resistance bridge circuit based on the temperature detection signal is provided.

According to the second aspect of the invention, in addition to the operation of the first aspect, the temperature compensating means performs temperature compensation of the resistance bridge circuit based on the temperature detection signal. The invention according to claim 3 has a resistance bridge circuit including a strain gauge, a load detection means for outputting a load detection signal corresponding to the applied load, and a combined resistance of a plurality of resistors constituting the resistance bridge circuit. Temperature detection means for outputting a temperature detection signal corresponding to the temperature around the resistance bridge circuit based on a change in the resistance value of the resistance bridge circuit; and temperature compensation load detection data for performing temperature compensation of the load detection signal based on the temperature detection signal. And a temperature compensating means for outputting the same.

According to the third aspect of the present invention, the load detecting means outputs a load detecting signal corresponding to the applied load to the temperature compensating means. On the other hand, the temperature detection means outputs a temperature detection signal corresponding to the temperature around the resistance bridge circuit to the temperature compensation means based on a change in the resistance value of the combined resistance of the plurality of resistors constituting the resistance bridge circuit.

The temperature compensating means performs temperature compensation of the load detection signal based on the temperature detection signal, and outputs temperature compensation load detection data. According to a fourth aspect of the present invention, in the third aspect of the present invention, the temperature compensating means stores in advance reference temperature data corresponding to the temperature detection signal obtained at a plurality of predetermined reference temperatures. And reference load storage means for storing in advance reference load data corresponding to the load detection signal obtained when a reference load is applied at the plurality of reference temperatures, and corresponding to the temperature detection signal based on the reference temperature data. Correction temperature data generation means for generating correction temperature detection data to be performed, load detection determination data generation means for generating load detection determination data based on the reference load data, the reference load, the load detection determination data, and the load detection. Temperature compensation data generating means for generating and outputting the temperature compensation load detection data based on the signal.

According to the fourth aspect of the present invention, in addition to the operation of the third aspect, the reference temperature storage means of the temperature compensating means corresponds to a temperature detection signal obtained at a plurality of predetermined reference temperatures. The reference load storage means stores reference load data corresponding to a load detection signal obtained when a reference load is applied at a plurality of reference temperatures.

The corrected temperature data generating means generates corrected temperature detection data corresponding to the temperature detection signal based on the reference temperature data stored in the reference temperature storage means. The load detection determination data generation means generates load detection determination data based on the reference load data stored in the reference load storage means.

Thus, the temperature compensation data generating means
Based on the load detection discrimination data generating means, the reference load, the load detection discrimination data, and the load detection signal, temperature compensation load detection data is generated and output. According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the corrected temperature data generating means is configured to determine that the reference temperature which is lower than the temperature corresponding to the temperature detection signal and which corresponds to the temperature corresponding to the temperature detection signal. A first reference temperature that is close to the reference temperature, a second reference temperature that is the reference temperature that is higher than the temperature corresponding to the temperature detection signal, and that is the closest to the temperature corresponding to the temperature detection signal, A correction temperature detection data generating unit configured to generate the correction temperature detection data based on the reference temperature data corresponding to one reference temperature, the reference temperature data corresponding to the second reference temperature, and the temperature detection signal. .

According to the fifth aspect of the present invention, in addition to the operation of the fourth aspect of the present invention, the corrected temperature detection data generating means of the corrected temperature data generating means includes a first reference temperature, a second reference temperature, Correction temperature detection data is generated based on reference temperature data corresponding to one reference temperature, reference temperature data corresponding to a second reference temperature, and a temperature detection signal.

According to a sixth aspect of the present invention, in the fourth or fifth aspect of the invention, the load detection discrimination data generating means includes the reference temperature lower than the temperature corresponding to the temperature detection signal, and The reference load data at the first reference temperature, which is the reference temperature closest to the temperature corresponding to the detection signal, and the reference temperature higher than the temperature corresponding to the temperature detection signal and the temperature corresponding to the temperature corresponding to the temperature detection signal. A load detection discrimination data calculating means for calculating the load detection discrimination data at a temperature corresponding to the corrected temperature detection data based on the reference load data at a second reference temperature that is the close reference temperature.

According to the invention described in claim 6, in addition to the function of the invention described in claim 4 or 5, the load detection discrimination data calculating means of the load detection discrimination data generating means includes the first detection means.
Based on the reference load data at the reference temperature and the reference load data at the second reference temperature, load detection discrimination data at the temperature corresponding to the corrected temperature detection data is calculated.

According to a seventh aspect of the present invention, in the sixth aspect of the present invention, the discrimination data calculating means is provided when the same reference load corresponding to the first reference temperature and the second reference temperature is applied. The load detection discrimination data is calculated by an interpolation method based on the obtained two reference load data.

According to the seventh aspect of the present invention, in addition to the operation of the sixth aspect, the discrimination data calculating means includes a first
Since load detection discrimination data is calculated by interpolation based on two reference load data obtained when the same reference load corresponding to the reference temperature and the second reference temperature is applied, the load detection discrimination data can be calculated at high speed. .

According to an eighth aspect of the present invention, in the invention according to any one of the fourth to seventh aspects, the temperature compensation data generating means is configured to respond to a load smaller than a load corresponding to the load detection signal. A first reference load that is a reference load and is the reference load closest to the load corresponding to the load detection signal, the reference load corresponding to a load larger than the load corresponding to the load detection signal, and the load detection signal A second reference load that is the reference load closest to the load corresponding to the load detection discrimination data corresponding to a load less than the load corresponding to the load detection signal, and is closest to the load corresponding to the load detection signal. A first load corresponding to the load detection determination data corresponding to the load, and the load detection determination data corresponding to a load larger than the load corresponding to the load detection signal; Second corresponding to the load detecting discrimination data corresponding to the closest load on the load corresponding to the load detection signal
A temperature compensating operation means for generating and outputting the temperature compensation load detection data based on the load and the load detection signal is provided.

According to the eighth aspect of the present invention, in addition to the operation of the fourth aspect of the present invention, the temperature compensation calculating means of the temperature compensation data generating means includes the first reference load, Temperature compensation load detection data is generated and output based on the second reference load, the first load, the second load, and the load detection signal.

According to a ninth aspect of the present invention, in the invention of the eighth aspect, the temperature compensation signal generating means includes the first reference load, the second reference load, the first load, and the second load.
The temperature compensation load detection data is generated by an interpolation method based on the load.

According to the ninth aspect of the present invention, in addition to the operation of the eighth aspect, the temperature compensation signal generating means includes a first reference load, a second reference load, a first load, and a second load. Since the temperature compensation load detection data is generated by the interpolation method based on the above, the temperature compensation load detection data can be generated and output at high speed.

According to a tenth aspect of the present invention, there is provided a measuring method for a measuring device having a resistance bridge circuit, wherein the resistance bridge circuit is provided based on a change in a resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. A temperature detecting step for detecting a temperature corresponding to an ambient temperature is provided.

According to the tenth aspect, in the temperature detecting step, a temperature corresponding to a temperature around the resistance bridge circuit is detected based on a change in resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. I do. An eleventh aspect of the present invention is the invention according to the tenth aspect, further comprising a temperature compensating step for compensating the temperature of the resistance bridge circuit based on the detected temperature.

According to the eleventh aspect of the present invention, the first aspect
In addition to the operation of the invention described in Item 0, the temperature compensation step performs temperature compensation of the resistance bridge circuit based on the detected temperature.
The invention according to claim 12 is a load measuring method of a load measuring device having a resistance bridge circuit, wherein a load detection step of detecting a load applied to the resistance bridge circuit, and a plurality of the plurality of resistance bridge circuits constituting the resistance bridge circuit A temperature detecting step of detecting a temperature around the resistance bridge circuit based on a change in resistance value of a combined resistance of the resistors, and a temperature for calculating a temperature compensation load by performing temperature compensation of the detected load based on the detected temperature. And a compensation step.

According to the twelfth aspect, the load detecting step detects a load applied to the resistance bridge circuit,
The temperature detecting step detects a temperature around the resistance bridge circuit based on a change in resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. Based on these, the temperature compensation step performs temperature compensation of the detected load based on the detected temperature to calculate a temperature compensation load.

According to a thirteenth aspect of the present invention, in the twelfth aspect of the present invention, the temperature compensating step includes a step of preliminarily storing reference temperature data corresponding to actual detected temperatures obtained at a plurality of predetermined reference temperatures. A temperature storage step, a reference load storage step of previously storing reference load data corresponding to the load actually obtained when a reference load is applied at the plurality of reference temperatures, and the detection based on the reference temperature data. A correction temperature data generation step of generating correction temperature detection data corresponding to a temperature, a load detection determination data generation step of generating load detection determination data based on the reference load data, the reference load, the load detection determination data and A temperature compensation data generation step of generating the temperature compensation load detection data based on the detected load. .

According to the thirteenth aspect, according to the first aspect,
In addition to the operation of the invention described in 2, the reference temperature storage step of the temperature compensation step stores, in advance, reference temperature data corresponding to actual detected temperatures obtained at a plurality of predetermined reference temperatures. In addition, reference load data corresponding to a load actually obtained when a reference load is applied at a plurality of reference temperatures is stored in advance.

The correction temperature data generation step generates correction temperature detection data corresponding to the temperature detected based on the reference temperature data stored in the reference temperature storage step. The load detection determination data generating step generates load detection determination data based on the reference load data.

Thus, the temperature compensation data generation step is as follows:
Temperature compensation load detection data is generated based on the reference load, the load detection determination data, and the detected load. Claim 14
According to the invention described in claim 13, in the invention according to claim 13, the corrected temperature data generation step is a first reference temperature that is the reference temperature that is less than the detected temperature and that is closest to the detected temperature; A second reference temperature that is the reference temperature higher than the detected temperature and is the reference temperature closest to the detected temperature, the reference temperature data corresponding to the first reference temperature, and a reference temperature corresponding to the second reference temperature. A correction temperature detection data generating step of generating the correction temperature detection data based on the reference temperature data and the detected temperature.

According to the fourteenth aspect of the present invention, the first aspect is provided.
In addition to the operation of the invention described in the third aspect, the corrected temperature detection data generating step in the corrected temperature data generating step includes the first reference temperature and the second reference temperature.
Correction temperature detection data is generated based on the reference temperature, reference temperature data corresponding to the first reference temperature, reference temperature data corresponding to the second reference temperature, and the detected temperature.

According to a fifteenth aspect of the present invention, in the thirteenth aspect or the fourteenth aspect, the load detection discrimination data generating step is performed by setting the reference temperature lower than the detected temperature to the most The reference load data at a first reference temperature that is close to the reference temperature and the reference load data at a second reference temperature that is higher than the detected temperature and is the reference temperature closest to the detected temperature. A load detection discrimination data calculation step of calculating the load detection discrimination data at a temperature corresponding to the corrected temperature detection data.

According to the invention of claim 15, claim 1 is
In addition to the operation of the third or fourteenth aspect, the load detection discrimination data calculation step of the load detection discrimination data generation step includes the steps of: The load detection discrimination data at the temperature corresponding to the corrected temperature detection data is calculated.

According to a sixteenth aspect of the present invention, in the invention according to the fifteenth aspect, the discrimination data calculating step includes the step of:
The load detection discrimination data is calculated by an interpolation method based on two pieces of the reference load data obtained when the same reference load corresponding to the reference temperature and the second reference temperature is applied.

According to the invention of claim 16, claim 1 is
In addition to the operation of the invention described in 5, the discrimination data calculation step includes:
Load detection discrimination data is calculated by interpolation based on two reference load data obtained when the same reference load corresponding to the first reference temperature and the second reference temperature is applied. Can be calculated.

According to a seventeenth aspect of the present invention, in the invention according to any one of the thirteenth to sixteenth aspects, the temperature compensation data generating step includes detecting the reference load that is less than the detected load. A first reference load that is the reference load closest to the load, a second reference load that is the reference load larger than the load corresponding to the detected load and that is the reference load closest to the detected load, A first load corresponding to the load detection determination data corresponding to a load less than the load, the first load corresponding to the load detection determination data corresponding to a load closest to the detected load, and the load corresponding to a load larger than the detected load; Based on the second load corresponding to the load detection determination data corresponding to the load closest to the detected load and the detected load, Configuring includes a temperature compensation operation step of generating a temperature compensated load detection data output.

According to the seventeenth aspect of the present invention, the first aspect
In addition to the operation of the invention according to any one of claims 3 to 16, in the temperature compensation calculation step of the temperature compensation data generation step, the first reference load, the second reference load, the first load, the second load, and the detected Generate and output temperature compensation load detection data based on the load.

According to an eighteenth aspect of the present invention, in the invention according to the seventeenth aspect, the temperature compensation signal generating step is based on the first reference load, the second reference load, the first load, and the second load. And the temperature compensation load detection data is generated by an interpolation method.

According to the eighteenth aspect, the first aspect is provided.
In addition to the operation of the invention described in 7, the temperature compensation signal generation step generates temperature compensation load detection data by interpolation based on the first reference load, the second reference load, the first load, and the second load. Generate temperature compensation load detection data at high speed,
Can output.

[0046]

Preferred embodiments of the present invention will now be described with reference to the drawings. First, an outline of the embodiment will be described. FIG. 1 shows a sectional view of a part of the jet engine.

On the intake side of the jet engine 10, there is provided a bearing / thrust load detecting mechanism 12 in which a bearing and a load sensor are integrated in order to support a high pressure side rotating shaft 11 directly connected to the high pressure compressor. As shown in FIG. 2, the bearing / thrust load detecting mechanism 12 includes a ball bearing 15 and an outer ring 16 of the ball bearing 15.
A front-side load sensor unit 101F provided in contact with a front-side end surface 16F of the outer ring 16; a front-side holding member 17 of the front-side load sensor unit 101F;
6 and a rear-side load sensor 101R provided in contact with the rear-side end face 16R of the rear-side load sensor 101R, and the rear-side holding member 18 of the rear-side load sensor 101R. In addition, a predetermined initial load is applied to the rear-side load sensor unit 101R.

FIG. 3 shows a schematic block diagram of a thrust load measuring system. In the following description, for the sake of simplicity, a case will be described where three sets of front-side load sensor units and three rear-side load sensor units are provided. The thrust load measurement system 20 corresponds to three front-side load sensor units 101F1 to 101F3, a rear-side load sensor unit 101R1 disposed at a position corresponding to the load sensor unit 101F1, and a load sensor unit 101F2. Load sensor 1 on the rear side
01R2, the rear-side load sensor 101R3 disposed at a position corresponding to the load sensor 101F3, the load sensors 101F1-F3, and the load sensor 101R1-
A preamplifier section 21 for amplifying the output signal of R3 in a preceding stage;
A temperature sensor 22 for detecting a bearing front temperature and outputting a bearing front temperature signal STF, a temperature sensor 23 for detecting a bearing rear temperature and outputting a bearing rear temperature signal STR, and detecting a rotation speed of the rotating shaft 11; A rotation speed sensor 24 that outputs a rotation speed detection signal SROT, and a direct current (DC) power supply 25 that supplies DC power to the preamplifier unit 21
And a preamplifier section 21, a temperature sensor 22, and a temperature sensor 2
3 and an interface unit 26 for performing an interface operation between an XY recorder 27 and a control monitor unit 28, which will be described later, and a preamplifier unit 21, a temperature sensor 22, a temperature sensor 23, and a rotation speed sensor 24. , An XY recorder 27 that performs analog display of measurement data based on measurement data input via the interface unit 26, various calculation processes, and a thrust load. The control system includes a control monitor unit 28 that controls the entire measurement system 20 and displays measurement results, and a printer 29 that prints out various measurement data, measurement condition data, and the like.

In this case, the front-side load sensor units 101F1 to 101F3 and the rear-side load sensor unit 101R
1 to 101R3, preamplifier section 21 and arithmetic processing section 110
Constitutes a strain gauge type load measuring device.
Hereinafter, the strain gauge type load measuring device will be described in detail. In this case, for simplification of description, only the system of the load sensor unit 101F1 will be described.

FIG. 4 shows a schematic configuration diagram of the strain gauge type load measuring device of the embodiment. Strain gauge type load measuring device 10
0 roughly includes a load sensor unit 101F1 for detecting an applied load, and a data processing / power supply unit 102 for performing data processing of an output signal of the load sensor unit 101F1 to calculate an applied load. It is configured.

The load sensor unit 101F1 has a resistance bridge in which a first input terminal TI1 is connected to a high-potential power supply VH via a first resistor R1 to be described later, and a second input terminal TI2 is connected to a low-potential power supply VL. A circuit 105 is provided.
The resistance bridge circuit 105 includes a first strain gauge SG1 having one end connected to the first input terminal TI1 and the other end connected to the first output terminal TO1, and a second input terminal having one end connected to the first output terminal TO1. Second strain gauge S having the other end connected to TI2
G2, a third strain gauge SG3 having one end connected to the second input terminal TI2 and the other end connected to the second output terminal TO2,
One end is connected to the second output terminal TO2, and the first input terminal TI1
And a fourth strain gauge SG4, the other end of which is connected to the second strain gauge SG4.

The data processing / power supply section 102 is connected to the high-potential power supply VH and the low-potential power supply VL for supplying the measuring power in cooperation, and one end is connected to the high-potential power supply VH. A first resistor R1 for dividing a power supply voltage to apply a predetermined measurement voltage, and a resistor bridge circuit 1
A non-inverting input terminal is connected to the second output terminal TO2
The inverting input terminal is connected to the first output terminal TO1 of the resistance bridge circuit 105, and the differential amplifier 10 performs differential amplification of the output of the resistance bridge circuit 105 and outputs the load detection signal SP.
6, an input terminal is connected to an intermediate connection point between the first input terminal TI1 and the first resistor R1 of the resistor bridge circuit 105, and a combined resistance RSYN of the strain gauges SG1 to SG4 constituting the first resistor R1 and the resistance bridge circuit 105. The amplifier 107 outputs a temperature detection signal ST by detecting and amplifying the voltage divided by the A / D converter, an A / D converter 108 for performing analog / digital conversion of the load detection signal SP and the temperature detection signal ST, and various data. It has a memory 109 for storing,
And an arithmetic processing unit 110 that performs various arithmetic processing and outputs temperature compensation load detection data P.
Here, the resistance bridge circuit 105 and the amplifier 107 are
The arithmetic processing unit 110 functions as a temperature detecting unit, and functions as a temperature compensating unit. Further, the differential amplifier 106 and the amplifier 107 function as the preamplifier unit 21.

In this case, as viewed from the amplifier 107, the strain gauge SG1 constituting the resistance bridge circuit 105
To SG4, as shown in FIG.
It is equivalent to SYN. That is, the resistance value of the first strain gauge SG1 is RSG1, the resistance value of the second strain gauge SG2 is RSG2,
Assuming that the resistance value of the third strain gauge SG3 is RSG3 and the resistance value of the fourth strain gauge SG4 is RSG4, the combined resistance RSYN is R
SYN = (RSG1 + RSG2) ・ (RSG3 + RSG4) / (RSG1 +
RSG2 + RSG3 + RSG4).

Therefore, the amplifier 107 has the first resistor R1
The power supply voltage divided by the combined resistor RSYN is output. In this case, the combined resistor RSYN includes information on the temperature to which the resistor bridge circuit 105 is exposed. Next, the operation of the strain gauge type load measuring device of the embodiment will be described with reference to the processing flowchart of FIG. Preparation operation Prior to the measurement operation of the strain gauge type load measuring device 100,
As shown in FIG. 7, the arithmetic processing unit 110 generates (n + 1) reference temperature data Dt (0), Dt corresponding to (n + 1) [n is a natural number] reference temperatures T0, T1,..., Tn.
(1),..., Dt (n) are stored in the memory 109 (step S1).

Further, as shown in FIG. 8, the arithmetic processing unit 110 performs the operation when the reference loads P0, P1,..., Pm (m is a natural number) are applied to each of the reference temperatures T0, T1,. The load detection signal SP is A / D converted by the A / D converter 108.
Reference load data D00 to D obtained by conversion
nm is stored in advance in the memory 109 (step S
2). Load Measurement Operation First, the arithmetic processing unit 110 performs A / D conversion of the temperature detection signal ST and the load detection signal SP by the A / D conversion unit 108 to obtain temperature detection data DT and load detection data DP (step S3).

Next, the arithmetic processing unit 110 determines which temperature range the temperature TDT corresponding to the temperature detection data DT belongs to based on the reference temperatures T0, T1,..., Tn. T is interpolated (interpolated),
It is calculated by the following equation (step S4).

T = ((Tk−Tk−1) / (Dt (k) −D
t (k-1))) * DT + (Tk-((Tk-Tk-1) / (D
t (k) −Dt (k−1)) × Dt (K)) Here, Tk−1 is a reference temperature lower than the temperature TDT corresponding to the temperature detection data DT and the temperature TDT corresponding to the temperature detection data. The first reference temperature, TK, which is the reference temperature closest to
Is a second reference temperature which is a reference temperature higher than the temperature TDT corresponding to the temperature detection data DT and which is closest to the temperature TDT corresponding to the temperature detection data. More specifically, for example, when the temperature range to which the temperature TDT belongs is T1 <TDT <T2, the corrected temperature detection data T becomes T = ((T2−T1) / (Dt (2) − Dt (1)))
× DT + (T2-((T2-T1) / (Dt (2) -D
t (1)) × Dt (2)).

Next, the arithmetic processing section 110 determines the temperature range to which the temperature TDT belongs and the corrected temperature detection data T
As shown in FIG. 9, a ratio Rate represented by the following equation is obtained (step S5). Is obtained (step S5).

Next, this ratio Rate, the first reference temperature Tk-1
The reference load data D (k-1) 0 to D (k-1) m and the second
From the reference load data Dk0 to Dkm at the reference temperature Tk, the load detection determination data Xp0 when the reference loads P0 to Pm are applied in the corrected temperature detection data T as shown in FIG.
To Xpn are calculated by the following formula group (step S6).

Xp0 = (Dk0 × y + D (k−1) 0 × z) / (y + z) Xp1 = (Dk1 × y + D (k−1) 1 × z) / (y + z) Xpn = (Dkn × y + D ( k-1) n × z) / (y + z) Subsequently, by comparing the load detection data DP with the reference loads P0 to Pm, it is determined which load range the load PDP corresponding to the load detection data DP belongs to. Then, the temperature compensation load detection data P is calculated by the following equation using an interpolation method (interpolation method) (step S7).

P = ((Pk−Pk−1) / (Xp (k) −Xp)
(K-1))) × DP + (Pk − ((Pk−Pk−1) / (Xp
(K) −Xp (k−1)) × Xp (K)) Here, Pk−1 is a reference load smaller than the load PDT corresponding to the load detection data DP, and the load PDP corresponding to the load detection data DP. The first reference load, which is the reference load closest to
PK is a second reference load that is a reference load larger than the load PDP corresponding to the load detection data DP and is a reference load closest to the load PDP corresponding to the load detection data DP;
The load corresponding to the load detection determination data Xp (k) corresponds to the first load, and the load corresponding to the load detection determination data Xp (k-1) corresponds to the second load.

More specifically, for example, when the temperature range to which the load PDP belongs is P1 <PDP <P2, the temperature compensation load detection data P is expressed as P = ((P2−P1) / (Xp (2) -Xp (1))) ×
DP + (P2-((P2-P1) / (Xp (2) -Xp
(1)) × Xp (2)).

The temperature-compensated load detection data P corresponds to a load value obtained by performing accurate temperature compensation in the entire range of the offset of the load sensor and the measured load range. More specifically, as shown in FIGS. 11 and 12, the reference temperature (= 25
[° C]), when the load / load sensor output at a load of 200 [kgf] and a load of 1000 (full scale) [kgf] is assumed to be a standard strain gauge load sensor output, when the temperature is changed (125 [° C]) However, unlike the conventional example, the error does not increase.

More specifically, the sensor output coefficient corresponding to FIG. 11 is as shown in FIG.
Is, as calculated by an equation described later, 0.002 [% FS / [° C.]], which is significantly larger than 0.017 [% FS / [° C.]] of the conventional example. Has been improved.

In the case of the embodiment {(202−200) / 1000} · 100/100 = 0.002 [% FS / [° C.]] • In the case of the conventional example {(217−200) / 1000} · 100 / 100 = 0.017 [% FS / [° C.]] Further, the temperature characteristic in the entire range (span) of the measured load range is also 0.002 [% FS, as calculated by a formula described later.
S / [° C.]], which is 0.085 [% FS /
[° C.]].

In the case of the embodiment [{(1004-202)-(1000-200)} / 1000] .100 / 100 = 0.002 [% FS / [. Degree. C.]]. In the case of the conventional example. −217) − (1000−200)｝ / 1000] · 100/100 = 0.085 [% FS / [° C.]] Further, as shown in FIG. 13, the nonlinearity of the load characteristics of the embodiment is 0. .11 [% FS], which is 0.6% of the conventional example.
This is greatly improved compared to 4 [% FS].

As described above, according to the present embodiment, accurate temperature compensation can be performed over the entire range of offset and measured load ranges under a wide range of temperature conditions, and the calculation for temperature compensation is simple. Therefore, it is possible to perform the calculation for the temperature compensation in real time.

Further, since the linearity compensation is performed by dividing the load range, the linearity of the load characteristics is also improved. Also,
Since the temperature compensation can be performed more accurately as the division numbers n and m are set to larger values, it is preferable to set the largest possible value according to the arithmetic processing capability and the required accuracy. In this case, it is necessary to consider the data capacity to be stored in advance because the data capacity increases in advance.

Further, based on a change in resistance value of a combined resistance of a plurality of strain gauges constituting a resistance bridge circuit,
Since the temperature around the resistance bridge circuit is detected, the temperature under the environment where the strain gauge is actually exposed can be accurately detected, and more accurate temperature compensation can be performed.

In this case, since the resistance bridge circuit is also used as a temperature detection sensor, the number of components can be reduced and the circuit configuration can be simplified.

[0071]

According to the first aspect of the present invention, the temperature detecting means detects the temperature corresponding to the temperature around the resistance bridge circuit based on the change in the resistance value of the combined resistance of the plurality of resistors constituting the resistance bridge circuit. A detection signal is output, so that the temperature in the environment where the resistance bridge circuit is exposed can be accurately detected, and the number of components for temperature detection can be reduced because the resistance bridge circuit is used for temperature detection. Also, the circuit configuration can be simplified.

According to the second aspect of the invention, in addition to the effect of the first aspect, the temperature compensating means performs temperature compensation of the resistance bridge circuit based on the temperature detection signal.
The temperature under the environment to which the strain gauge is actually exposed can be accurately detected, and more accurate temperature compensation can be performed.

According to the third aspect of the present invention, the load detecting means outputs a load detecting signal corresponding to the applied load to the temperature compensating means, and the temperature detecting means comprises a plurality of resistors constituting a resistance bridge circuit. A temperature detection signal corresponding to the temperature around the resistance bridge circuit is output to the temperature compensating means based on the change in the resistance value of the combined resistance of the resistance bridge circuit, and the temperature compensating means performs temperature compensation of the load detection signal based on the temperature detection signal. Since the temperature compensation load detection data is output, accurate temperature compensation can be performed over the entire range of offset and measurement load ranges under a wide range of temperature conditions.

According to the fourth aspect of the invention, in addition to the effect of the third aspect of the invention, the correction temperature data generating means of the temperature compensating means is based on the reference temperature data stored in the reference temperature storing means. The corrected temperature detection data corresponding to the temperature detection signal is generated, the load detection determination data generation means generates load detection determination data based on the reference load data stored in the reference load storage means, and the temperature compensation data generation means Based on the reference load, the load detection discrimination data and the load detection signal, the temperature detection load detection data is generated and output based on the load detection discrimination data generating means. It is possible to perform accurate temperature compensation in real time, and since the calculation for temperature compensation is simple, it is necessary to perform the calculation for temperature compensation in real time. It is possible.

According to the fifth aspect of the present invention, in addition to the effect of the fourth aspect, the corrected temperature detection data generating means of the corrected temperature data generating means includes a first reference temperature, a second reference temperature, Since the corrected temperature detection data is generated based on the reference temperature data corresponding to the first reference temperature, the reference temperature data corresponding to the second reference temperature, and the temperature detection signal, the calculation of the corrected temperature detection data is easy and faster. It can be performed.

According to the sixth aspect of the present invention, in addition to the effects of the fourth or fifth aspect, the load detection discrimination data calculation means of the load detection discrimination data generation means may include the first detection means.
Based on the reference load data at the reference temperature and the reference load data at the second reference temperature, the load detection discrimination data at the temperature corresponding to the corrected temperature detection data is calculated, so that accurate temperature compensation can be performed under a wide range of loads. As a result, the linearity of the compensation load detection data can be improved.

According to the seventh aspect of the present invention, in addition to the effect of the sixth aspect, the discrimination data calculating means includes a first
Since load detection discrimination data is calculated by interpolation based on two reference load data obtained when the same reference load corresponding to the reference temperature and the second reference temperature is applied, the load detection discrimination data can be calculated at high speed. Therefore, higher-speed processing can be performed.

According to the eighth aspect of the present invention, in addition to the effects of the fourth aspect of the present invention, the temperature compensation calculating means of the temperature compensation data generating means includes a first reference load, Since the temperature compensation load detection data is generated and output based on the second reference load, the first load, the second load, and the load detection signal, accurate temperature compensation can be performed under a wide range of loads by a simple process. The linearity of the compensation load detection data can be improved.

According to the ninth aspect of the present invention, in addition to the effect of the eighth aspect, the temperature compensation signal generating means includes a first reference load, a second reference load, a first load, and a second load. Since the temperature compensation load detection data is generated based on the interpolation method based on this, the temperature compensation load detection data can be generated and output at a high speed, so that higher-speed processing can be performed.

According to the tenth aspect, in the temperature detecting step, a temperature corresponding to a temperature around the resistance bridge circuit is detected based on a change in resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. Therefore, the temperature in the environment where the resistance bridge circuit is exposed can be accurately detected with a simple configuration.

According to the eleventh aspect, according to the first aspect,
In addition to the effects of the invention described in paragraph 0, in the temperature compensation step, the temperature of the resistance bridge circuit is compensated based on the detected temperature, so that the temperature in the environment where the strain gauge is actually exposed can be accurately detected. And more accurate temperature compensation can be performed.

According to the twelfth aspect of the invention, the load detecting step detects a load applied to the resistance bridge circuit,
The temperature detecting step detects a temperature around the resistance bridge circuit based on a change in resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. Thus, the temperature compensation step performs the temperature compensation of the detected load based on the detected temperature and calculates the temperature compensation load, so that accurate temperature compensation is performed over the entire range of the offset and the measurement load range under a wide range of temperature conditions. be able to.

According to the thirteenth aspect, according to the first aspect,
In addition to the effects of the invention described in 2 above, in the corrected temperature data generation step of the temperature compensation step, corrected temperature detection data corresponding to the temperature detected based on the reference temperature data stored in the reference temperature storage step is generated, and load detection is performed. The discrimination data generation step generates load detection discrimination data based on the reference load data stored in the reference load storage step, and the temperature compensation data generation step generates a temperature based on the reference load, the load detection discrimination data, and the detected load. Since compensation load detection data is generated, accurate temperature compensation can be performed over the entire range of offset and measurement load ranges under a wide range of temperature conditions, and the calculation for temperature compensation is simple. Calculation can be performed in real time.

According to the invention of claim 14, according to claim 1,
In addition to the effects of the invention described in the third aspect, the corrected temperature detection data generation step in the corrected temperature data generation step includes the first reference temperature and the second
Since the corrected temperature detection data is generated based on the reference temperature, the reference temperature data corresponding to the first reference temperature, the reference temperature data corresponding to the second reference temperature, and the detected temperature, the calculation of the corrected temperature detection data is easy. Processing can be performed at higher speed.

According to the fifteenth aspect, according to the first aspect,
In addition to the effect of the third or the fourteenth aspect of the present invention, the load detection discrimination data calculation step of the load detection discrimination data generation step includes the steps of: Since the load detection determination data at the temperature corresponding to the corrected temperature detection data is calculated, accurate temperature compensation can be performed under a wide range of load, and the linearity of the compensation load detection data can be improved.

According to the sixteenth aspect of the present invention, the first aspect
In addition to the effects of the invention described in 5, the discrimination data calculation step includes:
Load detection discrimination data is calculated by interpolation based on two reference load data obtained when the same reference load corresponding to the first reference temperature and the second reference temperature is applied. Since the calculation can be performed, the load detection determination data can be calculated at a high speed, so that a higher-speed processing can be performed.

According to the seventeenth aspect of the present invention, the first aspect
In addition to the effects of the invention according to any one of claims 3 to 16, in the temperature compensation calculation step of the temperature compensation data generation step, the first reference load, the second reference load, the first load, the second load, and the detected Since the temperature compensation load detection data is generated and output based on the load, accurate temperature compensation can be performed under a wide range of loads by simple processing, and the linearity of the compensation load detection data can be improved.

According to the eighteenth aspect of the present invention, the first aspect is provided.
In addition to the effect of the invention described in 7, the temperature compensation signal generation step generates temperature compensation load detection data by interpolation based on the first reference load, the second reference load, the first load, and the second load. Generate temperature compensation load detection data at high speed,
Since output can be performed, higher-speed processing can be performed.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a part of a jet engine.

FIG. 2 is an explanatory diagram of a configuration of a thrust load detecting device according to the embodiment.

FIG. 3 is a schematic configuration block diagram of a thrust load measurement system according to the embodiment.

FIG. 4 is a schematic configuration diagram of a strain gauge type load measuring device of the embodiment.

FIG. 5 is an explanatory diagram of an equivalent circuit of the resistance bridge circuit according to the embodiment.

FIG. 6 is a processing flowchart of the embodiment.

FIG. 7 is an explanatory diagram of a storage state of reference temperature data.

FIG. 8 is a diagram illustrating a calculation state of load data.

FIG. 9 is an explanatory diagram of a calculation by an interpolation method.

FIG. 10 is an explanatory diagram of a calculation method of load detection determination data.

FIG. 11 is a diagram illustrating the effect of temperature compensation of the embodiment.

FIG. 12 is a diagram illustrating a sensor output coefficient.

FIG. 13 is an explanatory diagram of an improved state of non-linearity of load characteristics according to the embodiment.

FIG. 14 is a schematic configuration diagram of a conventional strain gauge type load sensor.

FIG. 15 is a diagram illustrating the effect of temperature compensation in a conventional example.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 strain gauge type load measuring device 101 load sensor unit 102 data processing / power supply unit 105 resistance bridge circuit 106 differential amplifier 107 amplifier 108 A / D conversion unit 109 memory 110 arithmetic processing unit SG1 to SG4 strain gauge TI1 first input terminal TI2 Second input terminal TO1 First output terminal TO2 Second output terminal P Temperature compensation load detection data SP Load detection signal ST Temperature detection signal T Correction temperature detection data

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Futada Tadashi, 229 Mizuho-cho, Mizuho-cho, Nishitama-gun, Tokyo Ishikawashima-Harima Heavy Industries, Ltd. Mizuho Plant (72) Inventor Takao Tsutaya 2-55, Wakamiya, Nakano-ku, Tokyo 5. Inside Sagimiya Works, Ltd. (72) Inventor Hiroshi Otsuki 2-55-5, Wakamiya, Nakano-ku, Tokyo Inside Sagimiya Works, Ltd.

Claims (18)

[Claims] 1. A measuring device having a resistance bridge circuit, wherein a temperature detection signal corresponding to a temperature around the resistance bridge circuit based on a change in a resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. A measuring device comprising a temperature detecting means for outputting a temperature. 2. The measuring device according to claim 1, further comprising a temperature compensating unit that performs temperature compensation of the resistance bridge circuit based on the temperature detection signal. 3. A load detecting means having a resistance bridge circuit including a strain gauge and outputting a load detection signal corresponding to an applied load; and a resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. Temperature detection means for outputting a temperature detection signal corresponding to the temperature around the resistance bridge circuit based on the change; and temperature compensation of the load detection signal based on the temperature detection signal to output temperature compensated load detection data. A load measuring device comprising: a temperature compensation unit. 4. The load measuring device according to claim 3, wherein the temperature compensating means includes a reference temperature storing means for preliminarily storing reference temperature data corresponding to the temperature detection signal obtained at a plurality of predetermined reference temperatures. A reference load storage unit that stores in advance reference load data corresponding to the load detection signal obtained when a reference load is applied at the plurality of reference temperatures; and a reference load data corresponding to the temperature detection signal based on the reference temperature data. Correction temperature data generating means for generating corrected temperature detection data, load detection determination data generating means for generating load detection determination data based on the reference load data, the reference load, the load detection determination data, and the load detection signal. Temperature compensation data generation means for generating and outputting the temperature compensation load detection data based on Load measuring device. 5. The load measuring device according to claim 4, wherein the corrected temperature data generating means is the reference temperature lower than the temperature corresponding to the temperature detection signal and is closest to the temperature corresponding to the temperature detection signal. A first reference temperature that is the reference temperature, a second reference temperature that is the reference temperature that is higher than the temperature corresponding to the temperature detection signal, and that is the closest to the temperature corresponding to the temperature detection signal, A correction temperature detection data generating unit configured to generate the correction temperature detection data based on the reference temperature data corresponding to the reference temperature, the reference temperature data corresponding to the second reference temperature, and the temperature detection signal. Load measuring device. 6. The load measuring device according to claim 4, wherein the load detection discrimination data generating means is a reference temperature lower than a temperature corresponding to the temperature detection signal and corresponds to the temperature detection signal. The reference temperature, which is higher than the temperature corresponding to the reference load data and the temperature detection signal at the first reference temperature, which is the reference temperature closest to the reference temperature, and which is closest to the temperature corresponding to the temperature detection signal. A load detection discrimination data calculating means for calculating the load detection discrimination data at a temperature corresponding to the corrected temperature detection data, based on the reference load data at the second reference temperature. . 7. The load measuring device according to claim 6, wherein the discrimination data calculation means is configured to apply two identical reference loads corresponding to the first reference temperature and the second reference temperature. A load measuring device for calculating the load detection discrimination data by an interpolation method based on reference load data. 8. The load measuring device according to claim 4, wherein the temperature compensation data generating unit is configured to generate the reference load corresponding to a load less than a load corresponding to the load detection signal. A first reference load that is the reference load closest to the load corresponding to the load detection signal, and the reference load corresponding to a load larger than the load corresponding to the load detection signal, and a load corresponding to the load detection signal. The second reference load that is the reference load closest to the load detection determination data corresponding to a load less than the load corresponding to the load detection signal, and corresponds to the load closest to the load corresponding to the load detection signal. A first load corresponding to the load detection determination data; and the load detection determination data corresponding to a load larger than a load corresponding to the load detection signal; Temperature compensation calculation means for generating and outputting the temperature compensation load detection data based on the second load corresponding to the load detection discrimination data corresponding to the load closest to the load and the load detection signal. Load measuring device. 9. The load measuring device according to claim 8, wherein the temperature compensation signal generating unit performs an interpolation method based on the first reference load, the second reference load, the first load, and the second load. A load measuring device for generating the temperature compensation load detection data. 10. A measuring method for a measuring apparatus having a resistance bridge circuit, wherein the measurement device corresponds to a temperature around the resistance bridge circuit based on a change in a resistance value of a combined resistance of a plurality of resistors constituting the resistance bridge circuit. A measuring method comprising a temperature detecting step of detecting a temperature. 11. The measuring method according to claim 10, further comprising a temperature compensating step of compensating a temperature of the resistance bridge circuit based on the detected temperature. 12. A load measuring method for a load measuring device having a resistance bridge circuit, comprising: a load detection step of detecting a load applied to the resistance bridge circuit; and a synthesis of a plurality of resistors constituting the resistance bridge circuit. A temperature detection step of detecting a temperature around the resistance bridge circuit based on a change in resistance value of a resistor; and a temperature compensation step of calculating a temperature compensation load by performing temperature compensation of the detected load based on the detected temperature. A load measuring method, comprising: 13. The load measuring method according to claim 12, wherein the temperature compensating step includes: a reference temperature storing step of previously storing reference temperature data corresponding to actual detected temperatures obtained at a plurality of predetermined reference temperatures. A reference load storage step of previously storing reference load data corresponding to the load actually obtained when a reference load is applied at the plurality of reference temperatures; and a reference load data corresponding to the detected temperature based on the reference temperature data. A correction temperature data generation step of generating correction temperature detection data; a load detection determination data generation step of generating load detection determination data based on the reference load data; and the reference load, the load detection determination data, and the detected load. A temperature compensation data generation step of generating the temperature compensation load detection data based on Load measurement method. 14. The load measurement method according to claim 13, wherein the correction temperature data generating step is the first reference which is the reference temperature lower than the detected temperature and the reference temperature closest to the detected temperature. Temperature, the reference temperature higher than the detected temperature, the second reference temperature that is the reference temperature closest to the detected temperature, the reference temperature data corresponding to the first reference temperature, the second reference temperature A load measuring method, comprising: a corrected temperature detection data generating step of generating the corrected temperature detection data based on the corresponding reference temperature data and the detected temperature. 15. The load measuring method according to claim 13, wherein the load detection discrimination data generating step includes the step of generating the reference temperature which is the reference temperature lower than the detected temperature and which is closest to the detected temperature. Based on the reference load data at the first reference temperature and the reference load data at the second reference temperature is the reference temperature higher than the detected temperature and the reference temperature closest to the detected temperature, A load measurement method comprising: a load detection determination data calculation step of calculating the load detection determination data at a temperature corresponding to the corrected temperature detection data. 16. The load measurement method according to claim 15, wherein the discriminating data calculating step is performed when two identical reference loads corresponding to the first reference temperature and the second reference temperature are applied. A load measuring method, wherein the load detection determination data is calculated by an interpolation method based on reference load data. 17. The load measuring method according to claim 13, wherein the temperature compensation data generating step is the reference load that is less than the detected load and is closest to the detected load. A first reference load that is the reference load, a second reference load that is the reference load that is larger than the load corresponding to the detected load and that is closest to the detected load, a load that is less than the detected load The first load corresponding to the load detection determination data corresponding to the load closest to the detected load, and the load detection determination data corresponding to a load larger than the detected load. The temperature compensation load based on the second load corresponding to the load detection determination data corresponding to the load closest to the detected load and the detected load. Load measuring method characterized by comprising a temperature compensation calculating step for generating and outputting a detection data. 18. The load measuring method according to claim 17, wherein the temperature compensation signal generating step is performed by an interpolation method based on the first reference load, the second reference load, the first load, and the second load. A load measuring method, wherein the temperature compensation load detection data is generated.