JPH11352187A - Semiconductor test equipment and test method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To dispense with the operation from the compile to down loading when correcting and to quicken the test by executing the test items according to a test program including a determination part for every test item and a specification data part. SOLUTION: An execution control unit 13 of a semiconductor test equipment body 3A reads the data on the sequence during the test program, the spac. data on the data of the test conditions and the data obtained by method librarizing the standardized test items, from a sequence data part 10, a speck data part 11 and a method library part 12 to form the test program of an element to be measured 8, converts the same into the concrete test command, and gives the command for execution to CPU 7A. A measurement module 4 sets the test conditions on the basis of the command from the CPU 7A, outputs a measurement signal to the element 8 to take the measurement data, and sends the data on the result of test to the CPU 7A, so that the data is compared with the standard to judge the quality of the element 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor test apparatus and a test method suitable for use in a semiconductor test process.

[0002]

2. Description of the Related Art FIG. 3 is a block diagram showing a conventional semiconductor test apparatus. In the figure, reference numeral 1 denotes an element to be measured (D
UT) 8 is a software program storage unit for storing a source program in which a program for executing a test is described, 2 is an object file generated by compiling the source program from the software program storage unit 1, and 3 is an object file. A semiconductor test apparatus main body for testing the measurement element 8, a measurement module 4 for inputting / outputting a signal for the test to the device under test 8, and a control unit 5 for the measurement module 4 according to the contents of the object file 2. For the controller. The controller 5 has a memory 6 for storing the contents of the object file 2,
It has a CPU 7 for controlling the measurement module 4 according to the contents of the memory 6.

Next, the operation will be described with reference to FIG. To execute a test of the device under test 8 with a semiconductor test device (tester), it is necessary to create a program for each device under test 8. For this purpose, in step S1, a source program describing settings to the tester for each test item is created. Next, in step S2,
Compile the created source program to generate an object file. In step S3, it is checked whether or not a compile error has occurred. If a compile error has occurred, the process returns to step S1 to correct the source program.

If no compile error has occurred in step S3, the process proceeds to step S4, where the object file is downloaded to the tester. This download operation is executed by giving an external instruction to the controller 5 in FIG. 3 and transferring the externally existing object file 2, for example, a file existing on the host computer, to the memory 6 by the CPU 7.

Next, in step S5, the downloaded object file is executed to check whether the measurement state (tester setting state) for each test item is correct.
In the operation at the time of this test execution, in FIG. 3, the CPU 7 sequentially sets the measurement module 4 according to the contents of the object file existing in the memory 6. The measurement module 4 supplies a signal for measurement to the device under test 8, receives a signal from the device under test 8, and returns it to the CPU 7 as a test result. The CPU 7 determines the test result data from the measurement module 4 and makes a test determination. Next, in step S6, it is determined whether or not the obtained tester setting and the tester result have no problem. If there is a problem, the process returns to step S1 to correct the source program.
Steps S5 to S5 are repeated, and if there is no problem, a series of operations ends.

[0006]

By the way, in the case of the conventional semiconductor test apparatus as described above, the compilation at the time of correction is performed.
Since the download operation is required, it takes time from compilation to download, which hinders the creation (debugging) work.

The present invention has been made to solve such a problem, and aims at improving the efficiency of the creation (debugging) work and the quality of the test by eliminating the operation of compiling and downloading at the time of correction. It is an object of the present invention to obtain a semiconductor test apparatus and a test method that can perform the test.

[0008]

According to a first aspect of the present invention, there is provided a semiconductor test apparatus, comprising: a storage unit for a test program including a setting part for each test item and a specification data part describing test specifications; Processing means for executing a test item according to the test program.

According to a second aspect of the present invention, in the semiconductor test apparatus according to the first aspect, the test program includes a setting section for each test item, a specification data section described in a test specification, and a test item execution section. And are separated into

According to a third aspect of the present invention, in the semiconductor test apparatus according to the first or second aspect, the processing means reads data of each part of the test program, creates execution data based on the data, and executes And has an execution control unit for issuing an instruction.

According to a fourth aspect of the present invention, there is provided a semiconductor test apparatus according to the first or second aspect, wherein each part of the test program is a simple data description, and each part can be created independently. It is.

According to a fifth aspect of the present invention, in the semiconductor test method, a step of creating a method library, a step of creating a test program according to the contents of the method library, and executing a test in accordance with the test program. It includes a step of checking each setting state and a test result.

According to a sixth aspect of the present invention, in the semiconductor test method according to the fifth aspect, the test program includes a setting part for each test item, a specification data part described in a test specification, and an execution part of the test item. And is created separately.

According to a seventh aspect of the present invention, in the semiconductor test method according to the fifth or sixth aspect, a step of reading data of each part of the test program, creating execution data based on the data, and issuing an external instruction. And issuing the same.

According to an eighth aspect of the present invention, in the semiconductor test method according to the seventh aspect of the present invention, each part of the test program is described by simple data, and each part is created independently.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. Embodiment 1 FIG. FIG. 1 is a configuration diagram showing Embodiment 1 of the present invention. In FIG. 1, the same reference numerals are given to portions corresponding to FIG. 3, and detailed description thereof will be omitted. In the figure, 3A is a semiconductor test apparatus main body as a processing means for testing the device under test 8, 7A is a CPU for setting the measurement module 4 in accordance with an instruction of an execution control unit 13 described later, and 9 is a device for testing the device 8 under test. A test program storage unit as storage means for storing a test program for performing the test. The test program storage unit 9 has a sequence data unit 10, a specification data unit 11, and a method library unit 12, which will be described later.

The sequence data of the sequence data section 10 describes the execution order in the test program. The specification data of the specification data section 11 describes the data of each test condition. The method library is a library of standardized test items. The execution control unit 13 reads each data of the sequence data unit 10, the specification data unit 11, and the method library unit 12 described above, and executes an instruction (+ data) executable by the CPU 7A.
Generate

Next, the operation will be described with reference to FIG. This standardized test method is used (standardized) regardless of the type of the device under test 8. What is changed for each product type is the specification data and the sequence data. First, in step S11, as a preparation before creation, a method library in which a standardized test method is made into a library is created in advance.
In FIG. 1, as a specific example, a test method called a test type ICC is used to set a power supply (a setting instruction to a tester is issued by a U
PS) and a test (a setting instruction test to the tester).

Next, in step S12, a test program for the device under test 8 is created. This test program is created in the specification data section 11 for each test item.
The test condition data for each test item is input to the. In FIG. 1, as a specific example, in the test item No. 1, for example, a power supply voltage of 5 V, 1, 2, and 3 pins are pins to be measured, and the standard is a test condition of 1 to 3 mA. The specification data section 11 stores the above-described N for each test item.
As in the example of O.1, there are a plurality of pages.

Further, sequence data describing the execution order of the test items is defined. In FIG. 1, as a specific example, in the test item of No. 1, the specification used is N
The page of O.1, the method is ICC, and the next item to be executed is test No.2. Next, in step S13, a test is executed, and a tester setting for each test item and a test result are confirmed. In operation, the execution control unit 13 reads the data of the first test item in the sequence data section 10. When the read data is shown as a specific example, when the test No. 1 is read, it is converted into a tester instruction of “test No. 1” and the execution is instructed to the CPU 7A.

Next, "Spec No. 1" and "Method I"
CC ”is read. Method I is
The data to be applied to the blank portion of the CC is read from the specification No. 1 and converted into a specific tester instruction by the execution control unit 13. The converted instruction is “VSP5V” “te
st 1,2,3 pin Lo1mA, Hi3mA ". This command is instructed to the CPU 7A to execute a test of one item. The test condition is set in the measuring module 4 by a tester command from the CPU 7A. A measurement signal is sent to the device under test 8 to read the measurement data from the device under test 8. The measurement module 4 sends the test result data to the CPU 7A, and compares the data with the standard to make a determination.

The above operation of step S13 is repeated,
Execute up to the last test item of the sequence data. The setting state and test result for each test item are displayed externally by the CPU 7A. Next, in step S14, looking at the display data in step S13, if the test result is not good, the process returns to step S11 to change the data (specification data, sequence data) of the corresponding portion of the test program, and to set each test item. If the state and the test result are good, the series of operations ends.

As described above, in the present embodiment, the compile → download operation at the time of correction becomes unnecessary, and
Since the standardized method library is used, the test method (execution instruction in the test item) is fixed, and the quality of the test is improved (it cannot be programmed as desired).

[0024]

As described above, according to the first aspect of the present invention, a storage means for a test program including a setting part for each test item and a specification data part describing test specifications, and a test program for the storage means And a processing means for executing a test item in accordance with the above, there is no need to perform a compile-to-download operation at the time of correction, and there is an effect that a rapid semiconductor test becomes possible.

According to the second aspect of the present invention, since the test program is divided into a setting portion for each test item, a specification data portion described in a test specification, and a test item execution portion, the test program is substantially provided. Thus, there is an effect that the test method (execution instruction in the test item) is fixed and the quality of the test is improved.

According to the third aspect of the present invention, the processing means has an execution control unit that reads data of each part of the test program, creates execution data based on the data, and issues an external instruction. Is performed reliably.

According to the fourth aspect of the present invention, since the data of each part of the test program is a simple data description and each part can be created independently, it is possible to easily cope with a change for each product type. effective.

According to the present invention, a step of creating a method library, a step of creating a test program according to the contents of the method library,
Includes a step of executing a test in accordance with the test program and confirming a setting state and a test result for each test item, thereby improving the efficiency of the creation (debugging) work by eliminating the compile-to-download operation at the time of modification. There is an effect that can be.

According to the sixth aspect of the present invention, the test program is created separately from a setting portion for each test item, a specification data portion described in a test specification, and a test item execution portion. A standardized method library can be used, the test method (execution instruction in the test item) is fixed, and the quality of the test is improved.

According to the seventh aspect of the present invention, since the method includes the steps of reading the data of each part of the test program and creating execution data based on the data and issuing an instruction to the outside, the execution of the test is ensured. There is an effect that can be performed.

According to the eighth aspect of the present invention, since the data of each part of the test program is described by simple data and each part is created independently, there is an effect that it is possible to easily cope with a change for each product type. .

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of the present invention.

FIG. 2 is a flowchart for explaining the operation of the first embodiment of the present invention;

FIG. 3 is a configuration diagram showing a conventional semiconductor test apparatus.

FIG. 4 is a flowchart for explaining the operation of a conventional semiconductor test apparatus.

[Explanation of symbols]

3A semiconductor test equipment main body, 4 measurement modules,
7A CPU, 9 test program storage, 10
Sequence data section, 11 Spec data section, 12
Method Library, 13 Execution Control Unit.

Claims (8)

[Claims] 1. A storage device for storing a test program including a setting portion for each test item and a specification data portion describing test specifications, and a processing device for executing the test item in accordance with the test program in the storage device. A semiconductor test apparatus characterized by the above-mentioned. 2. The semiconductor according to claim 1, wherein the test program is separated into a setting part for each test item, a specification data part described in a test specification, and a test item execution part. Testing equipment. 3. The execution means according to claim 1, wherein said processing means has an execution control unit which reads data of each part of said test program, creates execution data based on said data, and issues an instruction to the outside. The semiconductor test apparatus according to the above. 4. The data of each part of the test program is:
3. The semiconductor test apparatus according to claim 1, wherein the data is a simple data description, and each part can be created independently. 5. A step of creating a method library, a step of creating a test program according to the contents of the method library, executing a test according to the test program, and confirming a setting state and a test result for each test item. And a semiconductor testing method. 6. The test program according to claim 5, wherein the test program is created separately from a setting section for each test item, a specification data section described in a test specification, and a test item execution section. Semiconductor test method. 7. The semiconductor test according to claim 5, further comprising a step of reading data of each part of the test program, a step of creating execution data based on the data, and issuing an instruction to the outside. Method. 8. The semiconductor test method according to claim 7, wherein each part of the test program is described by simple data, and each part is created independently.