JPH11349386A - Bonding of aluminum nitride sintered compact - Google Patents
Bonding of aluminum nitride sintered compactInfo
- Publication number
- JPH11349386A JPH11349386A JP17212398A JP17212398A JPH11349386A JP H11349386 A JPH11349386 A JP H11349386A JP 17212398 A JP17212398 A JP 17212398A JP 17212398 A JP17212398 A JP 17212398A JP H11349386 A JPH11349386 A JP H11349386A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- joining
- nitride sintered
- bonding
- mol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5045—Rare-earth oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、窒化アルミニウム
焼結体の接合方法に関し、特に窒化アルミニウム焼結体
同士の接合方法に関する。The present invention relates to a method for joining aluminum nitride sintered bodies, and more particularly to a method for joining aluminum nitride sintered bodies.
【０００２】[0002]
【従来の技術】窒化アルミニウム部品は、耐熱性に優
れ、高い熱伝導率を有することから、半導体製造分野な
どで広く使用されている。この窒化アルミニウム部品の
うち、複雑形状を有する部品は、複雑形状部分をいくつ
かに分割し、それを接合することで作製されている。2. Description of the Related Art Aluminum nitride parts are widely used in the field of semiconductor manufacturing and the like because of their excellent heat resistance and high thermal conductivity. Among these aluminum nitride components, a component having a complicated shape is manufactured by dividing a complicated shape portion into several parts and joining them.
【０００３】その接合方法としては、以下の様な方法が
ある。それは、 （１）窒化アルミニウム焼結体間に鉛ガラス等のガラス
材から成る接合材料をはさみ込み、それを加熱処理して
接合する方法（特開平２−８８４７１号公報など）。 （２）窒化アルミニウム焼結体間にチタニウムを含有す
る銀ロウ等のロウ材から成る接合材料をはさみ込み、そ
れを加熱処理して接合する方法。 （３）窒化アルミニウム焼結体の接合面同士を密着させ
て加熱し、窒化アルミニウム焼結体中の粒界相成分を相
手の焼結体中に拡散させる、いわゆる拡散接合により接
合する方法（特開平２−１２４７７８号公報など）。 （４）窒化アルミニウム焼結体間にその焼結体中の粒界
相成分を有する窒化アルミニウム粉末から成る接合材料
をはさみ込み、それを加熱処理して接合する方法（特開
平２−１２４７７８号公報など）などの方法である。[0003] As the joining method, there is the following method. (1) A method in which a bonding material made of a glass material such as lead glass is sandwiched between aluminum nitride sintered bodies and heated to be bonded (Japanese Patent Application Laid-Open No. 2-88471). (2) A method in which a bonding material made of a brazing material such as silver brazing containing titanium is sandwiched between aluminum nitride sintered bodies, and the resultant is heated to be bonded. (3) A method in which the bonding surfaces of the aluminum nitride sintered body are brought into close contact with each other and heated to diffuse the grain boundary phase component in the aluminum nitride sintered body into the other sintered body. JP-A-2-124778, etc.). (4) A method in which a bonding material made of an aluminum nitride powder having a grain boundary phase component in the sintered body is interposed between the aluminum nitride sintered bodies, and heated to be joined (Japanese Patent Laid-Open No. 2-124778). Etc.).
【０００４】その接合した部品の一例として、例えば、
窒化アルミニウム焼結体から成る平板内にヒータを内蔵
する窒化アルミニウム製ヒータの表面に、熱電対を収納
した窒化アルミニウム焼結体から成る絶縁性の保護管を
接合した部品があるが、その部品の接合部分では、１０
００℃程度の耐熱性が必要で、しかも真空容器中で使用
されるため、気密性も必要とされている。As an example of the joined parts, for example,
There is a component in which an insulating protective tube made of an aluminum nitride sintered body containing a thermocouple is joined to the surface of an aluminum nitride heater in which a heater is built in a flat plate made of an aluminum nitride sintered body. At the joint, 10
A heat resistance of about 00 ° C. is required, and since it is used in a vacuum vessel, airtightness is also required.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、この部
品を前記した接合方法で接合すると、以下の問題があっ
た。それは、 （１）窒化アルミニウム焼結体間に鉛ガラス等のガラス
材から成る接合材料をはさんで接合する方法では、ヒー
タが１０００℃程度まで加熱された場合、ガラス材が軟
化してしまう。 （２）窒化アルミニウム焼結体間にチタニウムを含有す
る銀ロウ等のロウ材から成る接合材料をはさんで接合す
る方法では、ロウ材が導電性のため、使用できない。 （３）窒化アルミニウム焼結体の接合面同士を密着させ
て加熱し、窒化アルミニウム焼結体中の粒界相成分を相
手の焼結体中に拡散させる、拡散接合により接合する方
法では、窒化アルミニウム焼結体の接合面同士の密着性
を確保するため、接合前に接合面を高精度で加工しなけ
ればならない。 （４）窒化アルミニウム焼結体間にその焼結体中の粒界
相成分を有する窒化アルミニウム粉末から成る接合材料
をはさんで接合する方法では、窒化アルミニウム粉末が
径方向に収縮し、接合界面に亀裂が発生して気密性を保
てないなどの問題である。However, when this component is joined by the above-described joining method, there are the following problems. (1) In a method in which a bonding material made of a glass material such as lead glass is sandwiched between aluminum nitride sintered bodies, when the heater is heated to about 1000 ° C., the glass material is softened. (2) In a method of joining a joining material made of a brazing material such as silver brazing containing titanium between aluminum nitride sintered bodies, the brazing material cannot be used because it is conductive. (3) In the method of joining by diffusion bonding, the bonding surfaces of the aluminum nitride sintered body are brought into close contact with each other and heated to diffuse the grain boundary phase component in the aluminum nitride sintered body into the other sintered body. In order to ensure the adhesion between the joining surfaces of the aluminum sintered body, the joining surfaces must be processed with high precision before joining. (4) In the method of joining between aluminum nitride sintered bodies by joining a joining material composed of aluminum nitride powder having a grain boundary phase component in the sintered bodies, the aluminum nitride powder shrinks in the radial direction and the joining interface Cracks occur and airtightness cannot be maintained.
【０００６】本発明は、上述した従来の窒化アルミニウ
ム焼結体の接合方法が有する課題に鑑みなされたもので
あって、その目的は、耐熱性に優れ、しかも気密性にも
優れる窒化アルミニウム焼結体の接合方法を提供するこ
とにある。SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the above-described conventional method for bonding an aluminum nitride sintered body, and has as its object to provide an aluminum nitride sintered body which is excellent in heat resistance and airtightness. An object of the present invention is to provide a method for joining a body.
【０００７】[0007]
【課題を解決するための手段】本発明者等は、上記目的
を達成するため鋭意研究した結果、接合材料に酸化アル
ミニウム粉末と酸化イットリウム粉末の混合粉末を用い
て接合すれば、窒化アルミニウム焼結体同士の接合が、
耐熱性に優れ、気密性にも優れた接合になるとの知見を
得て本発明を完成するに至った。Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above-mentioned object, and as a result, if aluminum oxide powder and yttrium oxide powder were used as a bonding material for bonding, aluminum nitride sintered The joint between the bodies,
The inventor has found that a joint having excellent heat resistance and excellent airtightness is obtained, and has completed the present invention.
【０００８】即ち本発明は、（１）窒化アルミニウム焼
結体間に、接合材料をはさみ込み、それを加熱処理して
接合する窒化アルミニウム焼結体の接合方法において、
該接合材料が、２５〜８０ｍｏｌ％の酸化アルミニウム
粉末と２０〜７５ｍｏｌ％の酸化イットリウム粉末から
成る混合粉末であり、該接合材料のはさみ込む量が、接
合面１ｃｍ2当たり０．１ｇ以上であり、該接合材料の
加熱処理する方法が、１５ｇ／ｃｍ2以上の荷重をかけ
ながら２０００℃以下の温度で熱処理する方法であるこ
とを特徴とする窒化アルミニウム焼結体の接合方法（請
求項１）とし、また、（２）接合材料が、２５〜８０ｍ
ｏｌ％の酸化アルミニウム粉末と酸化イットリウム換算
で２０〜７５ｍｏｌ％のイットリウムアルミネート粉末
から成る混合粉末であることを特徴とする請求項１記載
の窒化アルミニウム焼結体の接合方法（請求項２）と
し、さらに、（３）接合材料が、４０〜６０ｍｏｌ％の
酸化アルミニウム粉末と４０〜６０ｍｏｌ％の酸化イッ
トリウム粉末から成る混合粉末であることを特徴とする
請求項１記載の窒化アルミニウム焼結体の接合方法（請
求項３）とし、さらにまた、（４）接合材料が、４０〜
６０ｍｏｌ％の酸化アルミニウム粉末と酸化イットリウ
ム換算で４０〜６０ｍｏｌ％のイットリウムアルミネー
ト粉末から成る混合粉末であることを特徴とする請求項
２記載の窒化アルミニウム焼結体の接合方法（請求項
４）とすることを要旨とする。以下にさらに詳細に述べ
る。That is, the present invention provides (1) a method of joining aluminum nitride sintered bodies in which a joining material is sandwiched between aluminum nitride sintered bodies and is heated and joined.
The bonding material is a mixed powder composed of 25 to 80 mol% of aluminum oxide powder and 20 to 75 mol% of yttrium oxide powder, and the amount of the bonding material to be inserted is 0.1 g or more per 1 cm 2 of the bonding surface; The method for bonding aluminum nitride sintered body is characterized in that the bonding material is heat-treated at a temperature of 2000 ° C. or less while applying a load of 15 g / cm 2 or more (claim 1). And (2) the bonding material is 25 to 80 m
2. A method for joining aluminum nitride sintered bodies according to claim 1, wherein the mixed powder is a mixed powder composed of aluminum oxide powder of 20% to 75% by mol in terms of yttrium oxide and 20 to 75 mol% of yttrium oxide in terms of yttrium oxide. 2. The joining of the aluminum nitride sintered body according to claim 1, wherein (3) the joining material is a mixed powder composed of 40 to 60 mol% of aluminum oxide powder and 40 to 60 mol% of yttrium oxide powder. Method (Claim 3), and (4) the bonding material is 40 to
3. The method for bonding an aluminum nitride sintered body according to claim 2, wherein the mixed powder is a mixed powder comprising 60 mol% of aluminum oxide powder and 40 to 60 mol% of yttrium aluminate powder in terms of yttrium oxide. The point is to do. This will be described in more detail below.
【０００９】上記で述べたように窒化アルミニウム焼結
体の接合方法としては、接合材料を、２５〜８０ｍｏｌ
％の酸化アルミニウム粉末と２０〜７５ｍｏｌ％の酸化
イットリウム粉末から成る混合粉末とし、その接合材料
のはさみ込む量を、接合面１ｃｍ2当たり０．１ｇ以上
とし、その接合材料の加熱処理する方法を、１５ｇ／ｃ
ｍ2以上の荷重をかけながら２０００℃以下の温度で熱
処理する方法とする接合方法とした（請求項１）。接合
材料を高い耐熱性を有する酸化アルミニウム粉末と酸化
イットリウム粉末の混合粉末とすることにより、耐熱性
に優れた接合となり、また、接合材料が溶融してその一
部が窒化アルミニウム焼結体中の粒界に拡散して接合さ
れるので、気密性にも優れた接合となる。さらに、酸化
アルミニウム及び酸化イットリウムとも絶縁物質である
ので、導電することはなく、また、接合面を密着させる
必要がないので、接合面の高精度の加工も必要ない。As described above, as a method of joining the aluminum nitride sintered body, the joining material is 25 to 80 mol.
% Of aluminum oxide powder and 20 to 75 mol% of yttrium oxide powder, and the bonding material is inserted in an amount of 0.1 g or more per 1 cm 2 of the bonding surface. 15g / c
A method of performing heat treatment at a temperature of 2000 ° C. or less while applying a load of m 2 or more (claim 1). By making the joining material a mixed powder of aluminum oxide powder and yttrium oxide powder having high heat resistance, the joining becomes excellent in heat resistance, and the joining material is melted and a part of it is contained in the aluminum nitride sintered body. Since the bonding is performed by diffusing into the grain boundaries, the bonding is excellent in airtightness. Further, since aluminum oxide and yttrium oxide are both insulating materials, they do not conduct, and there is no need to make the bonding surfaces adhere to each other, so that high-precision processing of the bonding surfaces is not required.
【００１０】その配合割合としては、酸化アルミニウム
粉末の割合が２５〜８０ｍｏｌ％、酸化イットリウム粉
末の割合が２０〜７５ｍｏｌ％が好ましく、この範囲を
外れると、混合粉末の溶融温度が２０００℃を超えるの
で、窒化アルミニウム焼結体が軟化してしまい、気密性
が低下し、接合材料として好ましくない。The proportion of the aluminum oxide powder is preferably 25 to 80 mol%, and the proportion of the yttrium oxide powder is preferably 20 to 75 mol%. If the ratio is out of this range, the melting temperature of the mixed powder exceeds 2000 ° C. However, the aluminum nitride sintered body is softened, and the airtightness is reduced, which is not preferable as a joining material.
【００１１】その接合材料のはさみ込む量としては、接
合面１ｃｍ2当たり０．１ｇ以上が好ましく、０．１ｇ
より少ないと、その一部が窒化アルミニウム焼結体中に
拡散するため、接合界面に残る接合材料が不足してしま
い、十分な接合ができない。The amount of the joining material to be inserted is preferably 0.1 g or more per 1 cm 2 of the joining surface, more preferably 0.1 g / cm 2.
If the amount is smaller, a part thereof diffuses into the aluminum nitride sintered body, so that the bonding material remaining at the bonding interface becomes insufficient, and sufficient bonding cannot be performed.
【００１２】その接合材料を所定の荷重をかけながら所
定の温度に保ち熱処理して接合するが、その荷重として
は、１５ｇ／ｃｍ2以上が好ましく、その温度として
は、２０００℃以下が好ましい。荷重が１５ｇ／ｃｍ2
より低いと、接合界面に接合材料が行き渡らない部分が
生じることがあり好ましくなく、、加熱処理温度が２０
００℃より高いと、前記したように窒化アルミニウム焼
結体が軟化してしまい好ましくない。The joining material is heated at a predetermined temperature while applying a predetermined load, and is joined by heat treatment. The load is preferably 15 g / cm 2 or more, and the temperature is preferably 2000 ° C. or less. Load is 15g / cm 2
If the temperature is lower, a portion where the bonding material does not spread may be formed at the bonding interface, which is not preferable.
If the temperature is higher than 00 ° C., the aluminum nitride sintered body is unfavorably softened as described above.
【００１３】上記以外の別の接合材料としては、２５〜
８０ｍｏｌ％の酸化アルミニウム粉末と酸化イットリウ
ム換算で２０〜７５ｍｏｌ％のイットリウムアルミネー
ト粉末から成る混合粉末とした（請求項２）。酸化イッ
トリウム粉末の代わりにこの粉末にしたのは、酸化イッ
トリウム粉末とほぼ変わらない働きをもたらすことによ
る。As another joining material other than the above, 25 to 25
A mixed powder composed of 80 mol% of aluminum oxide powder and 20 to 75 mol% of yttrium aluminate powder in terms of yttrium oxide (claim 2). The reason for using this powder instead of the yttrium oxide powder is that it has a function almost the same as that of yttrium oxide powder.
【００１４】また、酸化アルミニウム粉末と酸化イット
リウム粉末との割合が上記以外の別の接合材料として
は、４０〜６０ｍｏｌ％の酸化アルミニウム粉末と４０
〜６０ｍｏｌ％の酸化イットリウム粉末から成る混合粉
末（請求項３）、あるいは４０〜６０ｍｏｌ％の酸化ア
ルミニウム粉末と酸化イットリウム換算で４０〜６０ｍ
ｏｌ％のイットリウムアルミネート粉末から成る混合粉
末（請求項４）とした。この割合にすることにより、接
合材料の溶融温度が１８００℃以下となり、加熱処理温
度をさらに低くすることができる。Further, as another joining material in which the ratio of the aluminum oxide powder and the yttrium oxide powder is other than the above, 40 to 60 mol% of aluminum oxide powder and 40
A mixed powder of yttrium oxide powder of up to 60 mol% (claim 3), or 40 to 60 mol% of aluminum oxide powder and yttrium oxide of 40 to 60 mol%
ol% of yttrium aluminate powder (claim 4). With this ratio, the melting temperature of the bonding material becomes 1800 ° C. or lower, and the heat treatment temperature can be further reduced.
【００１５】[0015]
【発明の実施の形態】上記窒化アルミニウム焼結体の接
合方法をさらに詳しく述べると、先ず接合すべき窒化ア
ルミニウム焼結体を用意し、それの接合面を必要があれ
ば研削する。別に酸化アルミニウム粉末と酸化イットリ
ウム粉末またはイットリウムアルミネート粉末を用意
し、その粉末を酸化アルミニウム粉末が２５〜８０ｍｏ
ｌ％、酸化イットリウム粉末またはイットリウムアルミ
ネート粉末が酸化イットリウム換算で２０〜７５ｍｏｌ
％となるような割合で配合し、それを混合して接合材料
とする。BEST MODE FOR CARRYING OUT THE INVENTION The joining method of the aluminum nitride sintered body will be described in more detail. First, an aluminum nitride sintered body to be joined is prepared, and the joint surface thereof is ground if necessary. Separately, aluminum oxide powder and yttrium oxide powder or yttrium aluminate powder are prepared, and the aluminum oxide powder is 25 to 80 mo.
1%, yttrium oxide powder or yttrium aluminate powder is 20 to 75 mol in terms of yttrium oxide
% And mixed to form a bonding material.
【００１６】得られた接合材料を先の窒化アルミニウム
焼結体の接合面間に１ｃｍ2当たり０．１ｇ以上となる
量をはさみ込む。はさみ込む方法は、特に限定するもの
ではないが、例えば、接合材料から成るペーストを印刷
法で各々の接合面に塗布し、その接合面を突き合わせる
ことでもよいし、あるいはドクターブレード法で作製さ
れた接合材料から成るグリーンシートを接合面間にはさ
み込むことでもよい。The obtained bonding material is inserted between the bonding surfaces of the aluminum nitride sintered body in an amount of 0.1 g or more per 1 cm 2 . The method of sandwiching is not particularly limited, but, for example, a paste made of a bonding material may be applied to each bonding surface by a printing method, and the bonding surfaces may be abutted, or may be manufactured by a doctor blade method. Alternatively, a green sheet made of a bonding material may be inserted between the bonding surfaces.
【００１７】それを１５ｇ／ｃｍ2以上の荷重をかけな
がら２０００℃以下の温度で加熱処理し、冷却して固着
させ接合する。It is heat-treated at a temperature of 2000 ° C. or less while applying a load of 15 g / cm 2 or more, cooled, fixed and bonded.
【００１８】以上の方法で接合すれば、耐熱性に優れ、
しかも気密性にも優れた窒化アルミニウム焼結体同士の
接合となる。[0018] By joining by the above method, excellent heat resistance is obtained.
Moreover, aluminum nitride sintered bodies having excellent airtightness are joined together.
【００１９】[0019]
【実施例】以下、本発明の実施例を比較例と共に具体的
に挙げ、本発明をより詳細に説明する。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples of the present invention and Comparative Examples.
【００２０】（実施例１〜３） （１）窒化アルミニウム焼結体の接合 自社で作製した発熱体を内蔵する窒化アルミニウム焼結
体から成るヒータ（φ２００×ｔ１０ｍｍ、平面度１０
〜２０μｍ）と市販の窒化アルミニウム焼結体から成る
保護管とを接合するため、接合面であるヒータの表面と
保護管を輪切りした面とに表１に示す接合材料を表１に
示す量だけペーストにして印刷し、それを電気炉内で表
１に示す荷重をかけながら表１に示す温度で加熱処理し
て接合した。(Examples 1 to 3) (1) Joining of aluminum nitride sintered body A heater (φ200 × t10 mm, flatness 10) made of an aluminum nitride sintered body incorporating a heating element manufactured in-house.
２０20 μm) and a protective tube made of a commercially available aluminum nitride sintered body, so that the bonding material shown in Table 1 was applied to the surface of the heater, which is the joining surface, and the surface obtained by cutting the protective tube in the amount shown in Table 1. The paste was printed and heated in an electric furnace at a temperature shown in Table 1 while applying a load shown in Table 1 and joined.
【００２１】（２）評価 得られた接合物を真空中で１０００℃まで加熱し、接合
面の状態を目視で観察し、接合面に異状が認められない
ものを耐熱性良とし、異状が認められたものを耐熱性不
良とした。また、同時に保護管内部を減圧にし、その保
護管内部へのリークをヘリウムディテクタでチェック
し、リークが無いものを気密性良とし、リークがあるも
のを気密性不良とした。その結果を表１に示す。(2) Evaluation The obtained joint was heated to 1000 ° C. in a vacuum, and the condition of the joined surface was visually observed. The sample was evaluated as having poor heat resistance. At the same time, the inside of the protection tube was depressurized, and a leak into the inside of the protection tube was checked with a helium detector. Those having no leak were determined to have good airtightness, and those having a leak were determined to have poor airtightness. Table 1 shows the results.
【００２２】（比較例１〜６）比較のために、比較例
１、２では、酸化アルミニウムと酸化イットリウムとの
配合割合を本発明の範囲外にした他は、比較例３では、
接合材料のはさみ込む量を本発明の範囲外にした他は、
比較例４では、荷重の大きさを本発明の範囲外にした他
は実施例２と同様に接合し、評価した。また、比較例
５、６では、接合材料に従来のガラス材とロウ材を用
い、その材料に適した条件で加熱処理して接合し、評価
した。それらの結果を表１に示す。(Comparative Examples 1 to 6) For comparison, in Comparative Examples 1 and 2, except that the mixing ratio of aluminum oxide and yttrium oxide was out of the range of the present invention, Comparative Example 3
Except that the amount of sandwiching of the bonding material is out of the scope of the present invention,
In Comparative Example 4, bonding was performed and evaluated in the same manner as in Example 2 except that the magnitude of the load was out of the range of the present invention. Further, in Comparative Examples 5 and 6, a conventional glass material and a brazing material were used as the joining materials, and they were subjected to a heat treatment under conditions suitable for the materials to perform joining and evaluation. Table 1 shows the results.
【００２３】[0023]
【表１】 [Table 1]
【００２４】表１から明らかなように、実施例の接合は
いずれも耐熱性に優れ、気密性にも優れていた。このこ
とは、本発明の接合方法が、従来の接合方法の問題点を
解決することができることを示している。As is evident from Table 1, the joints of the examples were all excellent in heat resistance and airtightness. This indicates that the joining method of the present invention can solve the problems of the conventional joining method.
【００２５】これに対して比較例１、２では、酸化アル
ミニウムと酸化イットリウムとの配合割合が本発明の範
囲外であるため、比較例３では、接合材料のはさみ込む
量が本発明の範囲外であるため、比較例４では、荷重の
大きさが本発明の範囲外であるため、いずれも耐熱性は
優れるが、気密性には劣っていた。また、比較例５、６
では、従来の接合材料であるため、耐熱性に劣り、また
接合面が剥離してリークのチェックもできなかった。On the other hand, in Comparative Examples 1 and 2, the mixing ratio of aluminum oxide and yttrium oxide is out of the range of the present invention. Therefore, in Comparative Example 4, since the magnitude of the load was out of the range of the present invention, the heat resistance was excellent in each case, but the airtightness was poor. Comparative Examples 5 and 6
However, since it is a conventional bonding material, it was inferior in heat resistance, and the bonded surface was peeled off, so that leak could not be checked.
【００２６】[0026]
【発明の効果】以上の通り、本発明にかかる窒化アルミ
ニウム焼結体の接合方法であれば、耐熱性に優れ、しか
も気密性にも優れた接合方法とすることができるように
なった。このことにより、耐熱性に優れ、しかも気密性
にも優れる窒化アルミニウム焼結体の接合方法を提供で
きるようになった。As described above, according to the method for joining aluminum nitride sintered bodies according to the present invention, a joining method having excellent heat resistance and excellent airtightness can be obtained. As a result, it has become possible to provide a method for joining an aluminum nitride sintered body that is excellent in heat resistance and airtightness.
Claims (4)
をはさみ込み、それを加熱処理して接合する窒化アルミ
ニウム焼結体の接合方法において、該接合材料が、２５
〜８０ｍｏｌ％の酸化アルミニウム粉末と２０〜７５ｍ
ｏｌ％の酸化イットリウム粉末から成る混合粉末であ
り、該接合材料のはさみ込む量が、接合面１ｃｍ2当た
り０．１ｇ以上であり、該接合材料の加熱処理する方法
が、１５ｇ／ｃｍ2以上の荷重をかけながら２０００℃
以下の温度で熱処理する方法であることを特徴とする窒
化アルミニウム焼結体の接合方法。1. A method for joining aluminum nitride sintered bodies, comprising joining a joining material between aluminum nitride sintered bodies and subjecting the same to heat treatment for joining.
~ 80mol% aluminum oxide powder and 20 ~ 75m
ol% of yttrium oxide powder, wherein the amount of the bonding material to be inserted is 0.1 g or more per 1 cm 2 of the bonding surface, and the method of heat-treating the bonding material is 15 g / cm 2 or more. 2000 ° C while applying load
A method for bonding an aluminum nitride sintered body, wherein the method is a heat treatment at the following temperature.
アルミニウム粉末と酸化イットリウム換算で２０〜７５
ｍｏｌ％のイットリウムアルミネート粉末から成る混合
粉末であることを特徴とする請求項１記載の窒化アルミ
ニウム焼結体の接合方法。2. A bonding material comprising 25 to 80 mol% of aluminum oxide powder and 20 to 75 in terms of yttrium oxide.
2. The method for joining aluminum nitride sintered bodies according to claim 1, wherein the mixed powder is a mixed powder composed of mol% yttrium aluminate powder.
アルミニウム粉末と４０〜６０ｍｏｌ％の酸化イットリ
ウム粉末から成る混合粉末であることを特徴とする請求
項１記載の窒化アルミニウム焼結体の接合方法。3. The joining method for an aluminum nitride sintered body according to claim 1, wherein the joining material is a mixed powder composed of 40 to 60 mol% of aluminum oxide powder and 40 to 60 mol% of yttrium oxide powder. .
アルミニウム粉末と酸化イットリウム換算で４０〜６０
ｍｏｌ％のイットリウムアルミネート粉末から成る混合
粉末であることを特徴とする請求項２記載の窒化アルミ
ニウム焼結体の接合方法。4. A bonding material comprising 40 to 60 mol% of aluminum oxide powder and 40 to 60 mol of yttrium oxide.
3. The method for joining aluminum nitride sintered bodies according to claim 2, wherein the powder is a mixed powder composed of mol% yttrium aluminate powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17212398A JPH11349386A (en) | 1998-06-05 | 1998-06-05 | Bonding of aluminum nitride sintered compact |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17212398A JPH11349386A (en) | 1998-06-05 | 1998-06-05 | Bonding of aluminum nitride sintered compact |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11349386A true JPH11349386A (en) | 1999-12-21 |
Family
ID=15935990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17212398A Pending JPH11349386A (en) | 1998-06-05 | 1998-06-05 | Bonding of aluminum nitride sintered compact |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11349386A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002083596A1 (en) * | 2001-04-13 | 2002-10-24 | Sumitomo Electric Industries, Ltd. | Joined ceramic article, substrate holding structure and apparatus for treating substrate |
| JP2011057488A (en) * | 2009-09-08 | 2011-03-24 | Taiheiyo Cement Corp | Ceramic joined body and production method for the same |
| WO2018016418A1 (en) * | 2016-07-20 | 2018-01-25 | 日本特殊陶業株式会社 | Component for semiconductor production device |
-
1998
- 1998-06-05 JP JP17212398A patent/JPH11349386A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002083596A1 (en) * | 2001-04-13 | 2002-10-24 | Sumitomo Electric Industries, Ltd. | Joined ceramic article, substrate holding structure and apparatus for treating substrate |
| US7211153B2 (en) | 2001-04-13 | 2007-05-01 | Sumitomo Electric Industries, Ltd. | Ceramic joined body, substrate holding structure and substrate processing apparatus |
| JP2011057488A (en) * | 2009-09-08 | 2011-03-24 | Taiheiyo Cement Corp | Ceramic joined body and production method for the same |
| WO2018016418A1 (en) * | 2016-07-20 | 2018-01-25 | 日本特殊陶業株式会社 | Component for semiconductor production device |
| JPWO2018016418A1 (en) * | 2016-07-20 | 2018-07-19 | 日本特殊陶業株式会社 | Parts for semiconductor manufacturing equipment |
| CN109476553A (en) * | 2016-07-20 | 2019-03-15 | 日本特殊陶业株式会社 | Member for use in semiconductor |
| CN109476553B (en) * | 2016-07-20 | 2021-09-10 | 日本特殊陶业株式会社 | Component for semiconductor manufacturing apparatus |
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