JPH11342415A - Wire manufacturing method and equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a wire with proof load. SOLUTION: A proof tension control mechanism 30 is provided in a wire passage between a wire-drawing mill 20 and a winding bobbin 50. The proof tension control mechanism 30 includes dancer mechanism 15 and a tension detector 16. On the wire w, tensile load (e.g. 120% or higher) larger than an estimated load expected applied by the wire saw is applied by the proof tension control mechanism 30 before the wire is taken up by the winding bobbin 50. It is guaranteed that the wire w wound on the winding bobbin 50 is not cut under the estimated load along its overall length. Reliability is further enhanced if the test is conducted while applying bending stress in addition to the tensile stress.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a wire, and more particularly to a method and an apparatus for manufacturing a saw wire suitable for cutting a so-called brittle material such as a semiconductor material, a magnetic material, and a ceramic into a wafer.

[0002]

2. Description of the Related Art In a wire cutting apparatus (wire saw), cutting wires are stretched in parallel at regular intervals in grooves of a plurality of rolls provided at regular intervals. In a wire saw, a material to be cut is pressed into a running wire while the wire is traveling in one direction and a processing liquid containing abrasive grains is sprayed by a nozzle, thereby cutting the material to be cut.

[0003] Since the material to be cut is pressed against the wire, a constant tension (load) is applied to the traveling wire. If the wire is cut during cutting of the material to be cut, the cut wire may damage the material to be cut, and the material to be cut can no longer be used for products. Also, once the wire breaks, it takes a lot of time and effort to mount the wire on the wire saw again. For this reason,
Cutting wires used in wire saws are required to have strength (load strength) that can withstand a certain tension.

[0004]

DISCLOSURE OF THE INVENTION The present invention provides a method and an apparatus for manufacturing a wire capable of guaranteeing that it can withstand a load assumed in a wire saw or the like.

In the method of manufacturing a wire according to the present invention, a predetermined tensile load is applied to a running wire between a wire drawing machine and a winding device for winding the wire drawn from the wire drawing machine, and then the wire is wound. Things.

An apparatus for manufacturing a wire according to the present invention is provided with a wire drawing machine, a winding device for winding a wire drawn from the wire drawing machine, and between the wire drawing machine and the winding device,
A load means for applying a load to the traveling wire, and means for controlling the load applied to the wire by the load means to a predetermined value are provided.

According to the present invention, it is guaranteed that the manufactured wire can withstand a predetermined tension (load) over its entire length. For example, a load equal to or higher than the load expected to be applied to the wire by the wire saw is set as the predetermined tension. Even if an assumed load is applied to the running wire in the wire saw, there is little possibility that the wire will break or the like. Since the strength against a predetermined load is guaranteed, the manufactured wire can be used for cutting a semiconductor wafer or the like with security.

A further developed wire manufacturing method and apparatus according to the present invention is to apply a bending stress to a traveling wire in addition to a tensile stress. By applying a tensile load to the wire with the wire bent,
Higher accuracy checks are possible. If the wire has very small scratches, it is highly likely that the wire will break during the course of this test, preventing the failure of providing such a wire as a product beforehand and ensuring quality over the entire length of the wire. It is possible to do. The tensile load shall be equal to or higher than the load expected to be applied to the wire by the wire saw.

If an excessively large bending stress is applied to the wire, the wire may be plastically deformed in a bent state. It is necessary to prevent such bending distortion from occurring.

[0010] The condition under which bending does not occur is the elasticity of the wire.
Limit σ_eAnd the bending stress applied to the wire is
σ_b, The tensile stress applied to the wire is σ_tAnd when
σ_e> Σ _b+ Σ_tIs represented by This condition applies to the wire
It can be realized by adjusting the applied tension T. Like
In other words, the tension T applied to the wire is given by σ_b+ Σ_tIs σ_e
Within the range of 50% to 90%. Less than 50%
Then, the tension T is actually applied to the wire with a wire saw.
The load may be less than the expected load, 90%
If it exceeds, the wire may be plastically deformed.

Therefore, a method of manufacturing a wire according to the present invention
The method consists of a wire drawing machine and a winding wire for winding a wire drawn therefrom.
Bending stress on the running wire between the
And tensile stress, and then wind the wire.
And the elastic limit of the wire is σ _eWhen represented by
Bending stress σ_bAnd tensile stress σ_tAnd σ_e> Σ_b+ Σ
_tIt can be characterized by setting to satisfy.

A wire manufacturing apparatus according to the present invention comprises a wire drawing machine, a winding device for winding a wire drawn from the wire drawing machine, and a bending stress disposed between the wire drawing machine and the winding device. The bending stress applying means and the tensile stress applying means, wherein the sum of the bending stress and the tensile stress applied to the traveling wire by these applying means exceeds the elastic limit of the wire. The stress is applied within a range that does not exist.

Preferably, the tensile stress applying means applies tension to the wire such that the sum of the bending stress and the tensile stress falls within the range of 50% to 90% of the elastic limit.

The present invention can be positioned from the viewpoint of a wire test apparatus. A wire testing apparatus according to the present invention includes a bending stress applying means and a tensile stress applying means disposed between a wire drawing machine and a winding device for winding a wire drawn from the wire drawing machine. Is to apply tension to the wire within a range where the sum of the bending stress and the tensile stress applied to the traveling wire does not exceed the elastic limit of the wire.

As described above, according to the present invention, a wire with higher reliability can be supplied.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment FIG. 1 shows the overall configuration of a wire manufacturing apparatus according to a first embodiment.

The wire manufacturing apparatus includes a wire drawing machine 20. The wire drawing machine 20 includes a multi-stage die (not shown), and the wire supplied from the supply bobbin 10 to the wire drawing machine 20 is drawn through the die in multiple stages, and has a diameter suitable for cutting a semiconductor wafer or the like (for example, a diameter). A wire of 1 mm is formed into a wire of 0.18 mm in diameter) and drawn out through the last capstan mechanism 21.

The wire w drawn from the wire drawing machine 20 reaches the guaranteed tension control mechanism 30 via the sheaves 12 and 13, and further has a capstan mechanism 17, a winding tension control mechanism 40, and a length measuring roll.
It passes through 63 and is sent to the winding bobbin 50 by the traverse mechanism 70.

An electromagnetic flaw detector 61 is provided between the sheaves 12 and 13. The electromagnetic flaw detector 61 uses the eddy current flaw detection method.
The presence / absence and size of the surface of the traveling wire w are detected. An outer diameter measuring device 62 is disposed between the sheave 13 and the guaranteed tension control mechanism 30. The outer diameter measuring device 62 measures the outer diameter (wire diameter) of the traveling wire w. Electromagnetic flaw detector 61
If the wire w is found to be damaged by
If the outer diameter measuring device 62 detects a portion where the outer diameter of the wire w is abnormal, the wire manufacturing apparatus stops.

The guaranteed tension control mechanism 30 comprises a dancer mechanism 15 and a tension detector 16 provided on its output side.

The dancer mechanism 15 includes a fixed roll 15A and a dancer roll 15B. A plurality of V grooves are formed in the fixed roll 15A and the dancer roll 15B. The wire w reciprocates between the fixed roll 15A and the dancer roll 15B sequentially from the V groove of the fixed roll 15A to the V groove of the dancer roll 15B, from the V groove of the dancer roll 15B to the V groove of the fixed roll 15A. It is hung. The tension detector 16 includes, for example, a load cell.

The dancer roll 15B is supported movably in the vertical direction, and forms a part of a tension applying device. The speed of the wire w is controlled by the position of the dancer roll 15B, and the tension applied to the wire w by the tension applying device is controlled.

The tension applying device has, for example, the following configuration. The dancer roll 15B is rotatably supported by the tip of an arm (not shown) that swings about a rotation axis. The arm is driven by an air cylinder (not shown), and tension is applied to the wire w via the dancer roll 15B. The height position of the dancer roll 15B is detected by a synchro transmitter (not shown) or the like. The air cylinder is controlled by a static electricity converter (not shown).

A tension detector (load cell) 16 detects the tension of the wire w sent from the dancer mechanism 15. An externally provided computer (not shown) or the like compares the tension detected by the tension detector 16 with a set tension (preliminarily input to the computer or the like), and issues a command corresponding to the deviation to the above-described static electricity converter. Given. The static converter controls the air pressure applied to the air cylinder. The air pressure to the air cylinder is controlled so that the deviation between the detected tension and the set value approaches zero. A tensile load corresponding to the set tension is applied to the wire w over its entire length before being wound on the winding bobbin 50. The set tension can be changed continuously (steplessly). The set tension can be changed even while the wire w is running.

When the wire w to be manufactured is used for a wire saw, the set tension is set to be slightly higher (for example, about 10% to 40% higher) than the tension applied to the wire w when cutting a semiconductor wafer or the like in the wire saw. Good to do.
It is ensured that the wire w wound on the winding bobbin 50 has a quality that can withstand the tension applied to the wire w in the wire saw over its entire length. Guaranteed tension control mechanism
The tension (set tension) applied to the wire w at 30 is
It is larger than the tension applied to the wire w in the winding tension control mechanism 40. In the guaranteed tension control mechanism 30, a tension detector
Although the tension applied to the wire w is controlled by feeding back the detected tension by the feedback control 16, the feedback control is not always required. The tension to be applied to the wire w can be determined based only on the set tension.

If the wire w breaks in the guaranteed tension control mechanism 30, the wire winding device stops.

The guaranteed tension control mechanism 30 may be arranged at a stage preceding the electromagnetic flaw detector 61 and the outer diameter inspection device 62 (on the wire drawing machine 20 side). In this case, after a tension is applied to the wire w by the guaranteed tension control mechanism 30, a damage inspection of the surface of the wire w by the electromagnetic flaw detector 61 and an outer diameter inspection of the wire w by the outer diameter measuring device 62 are performed.

The capstan mechanism 17 separates the wire tension on the input side and the wire side on the output side.
At a lower value than the tension acting on the wire w. Thus, the load applied to the winding bobbin 50 can be reduced.

The capstan mechanism 17 includes two rotatable rolls 17A and 17B. The wire w is hung on these rolls 17A and 17B several times.
The rotation of at least one of the rolls 17A and 17B is controlled by a servo motor (not shown).

The winding tension control mechanism 40, like the guaranteed tension control mechanism 30, includes a dancer mechanism 18, a tension detector 19, and a tension applying device. The dancer mechanism 18 includes a fixed roll 18A and a dancer roll 18B. The tension detector 19 includes a load cell.

Based on the tension detected by the tension detector 19, the tension applying device is controlled via the dancer roll 18B so that the tension of the wire w on the winding side is kept constant.

The length measuring roll 63 measures the length of the wire w wound on the winding bobbin 50.

In the traverse mechanism 70, the wire w is a movable shaft (not shown) that reciprocates in the axial direction of the winding bobbin 50.
It is hung on the traverse sheave 70A provided in. Traverse sheave according to reciprocating drive of movable shaft
The wire 70A moves in the axial direction of the winding bobbin 50, and the wire w is wound on the winding bobbin 50 while being aligned. The winding bobbin 50 is rotated in the winding direction by a rotary drive.

The traveling speed (wire speed) of the wire traveling through the wire manufacturing apparatus is basically determined by a motor (servo motor) provided in the wire drawing machine 20. Further, the rotation of the motor in the capstan mechanism 17 is controlled so that the height of the dancer roll 15B of the dancer mechanism 15 is kept constant, and the winding is performed so that the height of the dancer roll 18B of the dancer mechanism 18 is kept constant. The rotation of the motor that rotates the take-up bobbin 50 is controlled.

The wire w wound on the winding bobbin 50 in this manner is provided with a guaranteed tension control mechanism over its entire length.
30 guarantees the tension (load guarantee).

Second Embodiment FIG. 2 shows the configuration of a wire manufacturing apparatus according to a second embodiment. The wire drawing machine 20 is basically the same as that shown in FIG.

The wire w drawn from the wire drawing machine 20 by the capstan mechanism 21 is bent by the bending applying device 100 and the tension applying device.
After passing through 110, and further through the dancer roll section 120, the winding section
It reaches 130, and is wound up on the winding bobbin 50. It goes without saying that the wire manufacturing apparatus is stopped when a disconnection or other abnormality occurs.

The bending applying device 100 includes three sheaves 101, 102 and 103 held rotatably. Sheave 102 is between sheaves 101 and 103, and
It is located away from the line connecting 103. Sheave 101-103
Are equal in diameter. The wire w is wrapped in the order of sheaves 101, 102, and 103, turns around 90 ° at the sheave 101, turns around 180 ° at the sheave 102, and
It turns around 90 ° at 103. A bending stress is applied to the wire w by these sheaves 101, 102, 103.

The tension is applied to the wire w by the tension applying device 110. The tension applying device 110 is a capstan mechanism 1
The capstan mechanism 111 includes two rolls 111A and 111B rotatably provided. The wire w is hung on the rolls 111A and 111B several times sequentially. Of the rolls 111A and 111B,
At least one of them is rotationally driven by a servo motor or the like (not shown) in a direction in which the wire w is pulled.

A tension applied to at least one of the sheaves 101 to 103 of the bending applying apparatus 100 is detected by a load cell (not shown), and the capstan mechanism is moved so that the detected tension becomes a set value described later. The drive motor of the 111 roll 111A or 111B is controlled. Instead of controlling based on the difference between the detected tension and the set tension, the tension applied to the wire w can be controlled based only on the set value.

The wire w advances to the dancer mechanism 121 via the sheave 123, the outer diameter measuring device 122, and the sheave 124 in the dancer roll section 120. Dancer mechanism 121 is a fixed roll
Includes 121A and dancer roll 121B. The structure and operation of this dancer mechanism 121 are the same as those of the dancer mechanism according to the first embodiment.
Same as those of 18. By adopting a slip-type capstan mechanism as the capstan mechanism 111, the wire tension on the inlet side and the outlet side can be separated,
The tension on the exit side, that is, on the dancer mechanism 121 side can be reduced.

The wire w is further connected to sheaves 125, 126, 131
Is sent to the traverse mechanism 70 in the winding unit 130. The sheave 131 is a length measuring roll. The wire w is wound on the winding bobbin 50 via sheaves 132 and 133 which are reciprocated in the axial direction of the winding bobbin 50 by the traverse mechanism 70.

The tension T to be applied to the wire w in the tension applying device 110 is determined according to the following concept so that the wire w is not bent by the bending by the bending application device 100 (to the extent that it does not deform plastically). I just need. This tension T is preferably slightly larger than the tension actually applied to the saw wire.

Let the elastic limit of the wire w be σ _e (kgf / m
m ² ), the bending stress applied to the wire w by the bending applying device 100 is σ _b (kgf / mm ² ), and the tensile stress applied to the wire w by the tension applying device 110 is σ _t (kgf / mm ² ).
² )

The condition under which the wire w cannot be bent is given by the following equation.

Σ _e > σ _b + σ _t Equation 1

The bending stress σ _b and the tension stress σ _t are represented by the following equations.

Σ _b = E _r · (d / D) Equation 2 σ _t = T / A Equation 3 _Er : Elastic modulus of wire w (kgf / mm ² ) d: Diameter of wire w (mm) D : Diameter of sheave 102 (mm) T: Tension (kgf) A: Cross-sectional area of wire w (mm ² )

The tension T represented by the equation (3) is determined so as to satisfy the equation (1). More specifically, desirably σ _b + σ
_t ranges between 0.5Shiguma _e and 0.9Shiguma _e (i.e., elastic checked at 50% to 90% load limit) habit bending If the determination may be (90% or less to be in the It will not be used, and if it is less than 50%, it will be less than the actual use range in wire saws.)

Calculation will be made for the case where σ _e = 216.5 kgf / mm ² (measured value) and the diameter d of the wire w is 0.18 (mm). _Er = 21,000 (kgf / mm ² ) and D = 70 (mm). In order to satisfy σ _b + σ _t = σ _e × 0.9, T
= 3.6kgf. Tension T to be applied by tensioning device 110
It can be understood that it is sufficient to set the pressure to 3.6 kgf or less.

Table 1 shows a more detailed calculation example.

[0052]

(Equation 1)

In a wire saw, the wire is wound on a plurality of rolls. Bending stress and tensile stress are actually applied to the wire. In this embodiment, since a load equal to or greater than that applied to the wire in the wire saw is applied in a state where the wire is bent, the condition is closer to the condition in actual use. It is considered that the wire that has undergone such a check has a very low possibility of disconnection when used in an actual wire saw.
In this way, the wire to be manufactured can be checked over the entire length of the manufacturing line with higher accuracy than simply applying a tensile load, and the strength against a predetermined load and bending can be guaranteed.

[Brief description of the drawings]

FIG. 1 shows a schematic diagram of a wire manufacturing apparatus according to a first embodiment.

FIG. 2 shows a schematic diagram of a wire manufacturing apparatus according to a second embodiment.

[Description of Signs] 10 Supply bobbin 20 Wire drawing machine 30 Guaranteed tension control mechanism 40 Winding tension control mechanism 50 Winding bobbin 70 Traverse mechanism 100 Bending device 110 Tension applying device

Claims (7)

[Claims] A predetermined load is applied to a traveling wire between a wire drawing machine and a winding device for winding a wire drawn from the wire drawing machine, and then the wire is wound.
Wire manufacturing method. 2. A wire drawing machine, a winding device for winding a wire drawn from the wire drawing machine, and a load provided between the wire drawing machine and the winding device for applying a load to a traveling wire. And a means for controlling a load applied to the wire by the load means to a predetermined value. 3. A traveling wire between a wire drawing machine and a winding device for winding a wire drawn from the wire drawing machine.
When the bending stress and the tensile stress are added, and then the wire is wound, and the elastic limit of the wire is represented by σ _e , the added bending stress σ _b and the tensile stress σ _t become σ _e > σ It is set to satisfy the _b + sigma _t, wire manufacturing method. 4. The method for manufacturing a wire according to claim 3, wherein the tension applied to the wire is adjusted so that σ _b + σ _t falls within a range of 50% to 90% of σ _e . 5. A wire drawing machine, a winding device for winding a wire drawn from the wire drawing machine, and a bending stress applying means and a tensile stress applying means disposed between the wire drawing machine and the winding device. Wherein the bending stress applying means and the tensile stress applying means apply stress within a range in which the sum of the bending stress and the tensile stress applied to the traveling wire by these applying means does not exceed the elastic limit of the wire. A wire manufacturing device. 6. The tensile stress applying means for applying tension to a wire so that the sum of bending stress and tensile stress falls within a range of 50% to 90% of an elastic limit. An apparatus for manufacturing the wire according to the above. 7. A bending stress applying means and a tensile stress applying means disposed between a wire drawing machine and a winding device for winding a wire drawn from the wire drawing machine, wherein the tensile stress applying means comprises a traveling machine. A wire testing device for applying tension to a wire within a range where the sum of bending stress and tensile stress applied to the wire does not exceed the elastic limit of the wire.