JPH11341841A - Drive circuit for vibrating actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the occupying space of a drive circuit for vibrating actuator by constituting pulse generating means or the rotating speed control means of a vibrating actuator, and a power amplifying means on a single heat radiating means made of a metal, etc. SOLUTION: A plurality of pulse generating means 2, the half-bridge circuit 3 of a power amplifying means, and a control circuit 34 of rotation control means for vibrating type actuator are constituted of a single silicon IC chip. The pulse generating means 2 and half-bridge circuit 3 are connected electrically to the electrodes 4 of the control circuit 34 through bonding wires of aluminum, etc. The circuit on the metal or ceramic plate of a heat radiating means is coated with a resin member except for a part of a ceramic. The pulse generating means 2 supply 5 V power from the electrode 4-2 of the control circuit 34, and signals for setting two-phase pulse frequency outputted from the means 2 are supplied to an electrode 4-8 of the circuit 34. The two-phase pulse signals from the pulse generating means 2 are connected to the half-bridge circuit 3, which works as an amplifier circuit via the bonding wires and are outputted from the electrodes 4-6 and 4-7 of the control circuit 34, after power amplification.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a driving circuit for a vibration type actuator.

[0002]

2. Description of the Related Art Conventionally, a drive circuit of a vibration-type actuator has a configuration in which individual electronic components are combined, and a power amplifying means and a CP for controlling the operation of the vibration-type actuator
U and oscillating means are used by connecting different parts.
Further, as an oscillating means constituting a driving circuit, a means using a VCO or a means for dividing a high-frequency pulse signal and outputting the divided signal has been used.

[0003]

In the above-mentioned conventional apparatus, since it is divided into a plurality of parts, the mounting area on the circuit board is increased, and it takes a long time to mount the parts. There was a problem. In addition, since the analog oscillating means has a high temperature dependency of frequency, when integrated with the power amplifying means, the frequency accuracy is deteriorated, and the VCO using a crystal oscillator has a problem that the frequency setting range is narrow. Further, when digitally dividing the frequency of the crystal oscillator to set the frequency, there is a problem that the resolution of the frequency is low and it is not suitable for controlling the speed of the vibration type actuator. In addition, although the method of increasing the frequency resolution in a pseudo manner is a digital pulse generator such as a rate multiplier, it has relatively good performance, but the audible sound due to the beat is generated because the frequency is changed in small increments. There is. When a plurality of actuators are controlled by a drive circuit provided for each actuator,
It is necessary to communicate with an external circuit. However, if the configuration in the communication becomes complicated, there is a problem that the connection configuration when disposing these drive circuits on the heat radiating means becomes complicated.

[0004]

In order to achieve the above object,
The invention according to claims 1, 2 and 3 according to the present application is a vibration type actuator driving circuit, wherein a pulse generating means,
The power amplifying means is formed on a heat dissipating means such as a single metal plate, or a pulse generating means, a control means for controlling the rotation speed and the like of the vibration type actuator, and the power amplifying means are provided on a single metal plate or the like. It is intended to provide a drive circuit configured on the heat radiating means. Claims 38, 39, and 40 provide a drive circuit with a reduced mounting area by using one resin-molded IC as the configuration of the drive circuit of claims 1 to 3. Claims 7 to 12 of the present application
According to the invention, the frequency accuracy and resolution can be improved by combining a high-precision oscillating means including a crystal oscillator and a frequency dividing means and a delay means such as a programmable delay means as an oscillating means having little influence on heat generation of the power amplifying means. It is an object of the present invention to provide a drive circuit in which the oscillating means and the power amplifying means can be integrally formed by using the increased oscillating means.
According to the invention of claims 21, 22, and 23, in the drive circuit of claim 3, the operation of the power amplification means is controlled by detecting the temperature so as not to malfunction when the temperature rises. The invention according to claim 29 is the driving circuit according to any one of claims 1 to 3, wherein the output of the power amplification means is inhibited until the power supply to the pulse generation means is started, thereby preventing the occurrence of malfunction. The invention according to claim 30 to claim 37, wherein when a plurality of drive circuits are provided, the respective circuits are connected in series, and a reception signal corresponding to a command transmitted to each drive circuit is transmitted to the outside in the order of connection. A circuit system is provided. According to the present invention, a command including an ID is transmitted at the time of communication, and the command is transmitted to a drive circuit specified by each ID, or all the drive circuits are enabled.
By providing communication with D, a drive circuit system with simplified communication is provided.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 1 is a block diagram showing a first embodiment of the present invention.
May be a metal plate such as copper as a heat radiating means, and the heat radiating plate may be a ceramic plate. 2 is a pulse generating means for generating two-phase pulse signals having different phases at a desired frequency, and 3 is a half-bridge circuit for power-amplifying the plurality of pulse signals. Pulse generation means 2 and half bridge circuit 3 are each a single IC
Is a silicon chip. 4 is an electrode for transmitting an external command and taking out the output of the half bridge circuit 3, and 5 is made of gold or aluminum or the like for electrically connecting the pulse generating means 2, the half bridge circuit 3 and the electrode 4 to each other. Bonding wire, 6 is a vibration type actuator, 7 is a resin member configured to cover the electrode 4 and the metal plate 1 and all the circuits on the metal plate 1, and the circuit on the metal plate 1 is the electrode 4 and the metal plate All but a part of 1 are covered with the resin member 7. Here, reference numeral 4-1 denotes a ground electrode, which is connected to ground terminals of two power supplies (not shown) described later, and grounds the metal plate 1. The pulse generating means 2 operates with a 5 V power supply,
2 to 5V power is supplied. The signal for setting the frequency of the two-phase pulse output from the pulse generation means 2 is connected to the electrode 4-3. The electrode 4-4 is connected to the output O of the pulse generation means 2.
A signal to control N / OFF is connected. The two-phase pulse signal of the pulse generating means 2 is connected to a half-bridge circuit 3 as an amplifier circuit via a bonding wire 5-2, is power-amplified, and is output from the electrodes 4-6 and 4-7. The electrode 4-5 is supplied with a 24V power supply, and the half bridge circuit 3 converts the pulse signal having an amplitude of 5V supplied via the bonding wire 5-2 into a pulse signal having an amplitude of 24V and converts the pulse signal to the electrode 4-5. Output from -6 and 4-7. The AC voltage output from the electrodes 4-6 and 4-7 is
Applied to each B phase. FIG. 2 is a circuit diagram showing a circuit example of the pulse generation means. 8 is a known voltage controlled oscillator (VCO) for generating a reference pulse signal, 62 is a VCO8
And a frequency dividing means for dividing the output pulse signal at the set dividing ratio to generate a pulse signal having two different phases at a frequency for driving the vibration type actuator. VC
O8 is controlled to output a desired frequency by a frequency control signal input from the electrode 4-3. The output of the VCO 8 is input to the frequency dividing and phase shifting means 62, frequency-divided at a predetermined frequency dividing rate, divided into two pulse signals having phases different from each other by 90 degrees, and outputted. Fig. 3 is a circuit diagram showing an example of the half-bridge circuit 3. 12, 13, 17, and 18 are N-channel MOSFETs with DMOS structure.
Constitutes a half-bridge circuit for two phases. MOSFET
Is preferably at least 1.2 Ω or less due to power restrictions. Considering the restrictions on the chip area and the desire to increase the output power, about 0.2 to 0.3 Ω is appropriate. MOSF
The withstand voltage of the ET can be selected from 40V, 60V, 80V, etc. In the case of a 24V power supply, 40V may be used. A power supply (not shown) of 24 V is connected to the power input via the external electrode 4. 11, 16 are MOSFETs 12, 17
High-side driver for driving MOSFET1
Connected to gates 2 and 17. 9 and 14 are inverters,
Reference numerals 10 and 15 are delay means for delaying a pulse so that the MOSFET 12 or 17 and the MOSFET 13 or 18 are not simultaneously turned on. Figure
FIG. 4 is a configuration diagram showing an example of an annular actuator which is one of the vibration type actuators. In FIG. 4, reference numeral 100 denotes a vibrating body composed of one or more elastic members, and 101 denotes a vibrating body 100.
A rotor pressurized by pressure means (not shown), 102 is bonded to the vibrating body 100, a friction material sandwiched between the rotor 101, 103 is a rotating shaft connected to the center of the rotor 101, 104
Is a piezoelectric body bonded to the vibrating body 100. Figure 104 shows the piezoelectric body
The surface is divided into a plurality of electrodes in the shape shown in FIG. This electrode has two drive electrode groups (104-a, 104-
b) and one sensor electrode (104-c)
Hereinafter, 104-a is referred to as A phase, 104-b is referred to as B phase, and 104-c is referred to as S phase. The vibration type actuator shown in FIG.
By applying an AC voltage having a temporal phase difference of 90 degrees to the B phase, a progressive vibration wave is generated in the vibrating body 100, and the force of this vibration is brought into press contact with the vibrating body 100 via the friction material 102. Is transmitted to the rotor 101 via a frictional force to rotate the rotor 101. As described above, in the vibration type actuator, the rotor 101 and the vibrating body 100 rotate relatively by applying the two-phase AC voltage output from the half bridge circuit 3. Here, FIG. 6 shows a circuit example in the case where it is desired to increase the amplitude of the voltage applied to the vibration type actuator 6. In FIG. 6, reference numerals 19 and 20 denote step-up inductors. By inserting the inductors 19 and 20 between the vibration type actuator 6 and the half bridge circuit 3, the equivalent capacitance of the piezoelectric body 104 and the inductors 19 and 20 are increased. The output voltage of the half bridge circuit 3 is amplified by the resonance phenomenon and applied to the piezoelectric body 104. The values of the inductors 19 and 20 match the equivalent capacitance, but the matching frequency is set in a region higher than the resonance frequency of the vibrating body 100. It is set in a range higher than the resonance frequency within the entire use temperature range in consideration of the change in the frequency. Further, by matching to a region higher than the anti-resonance frequency of the operation mode, the influence of a change in the matching characteristic due to a temperature change is reduced, and the voltage amplitude applied to the piezoelectric body 104 can always be supplied stably. FIG. 7 is a timing chart showing waveforms of the half bridge circuit 3. Delay means 15 causes a delay of Td to each pulse,
The delay time Td is set so that the MOSFETs 17 and 18 are not turned on at the same time. Usually, Td is set to about 20 to 100 nSec. Next, FIG. 8 shows an example of a circuit when a larger voltage is to be applied to the piezoelectric body 104. A half-bridge circuit as an amplifier circuit is changed to a full-bridge circuit, and peripheral circuits are additionally changed accordingly. In FIG. 8, 12, 13, 17, 18, 24, 25, 28, and 29 are N-channel MOSFETs having a DMOS structure to constitute a full-bridge circuit for two phases. A power supply (not shown) of 24 V is connected to the power input via the external electrode 4. 11, 16, 23, 27 are MOSFETs 12, 17,
High side driver for driving 24, 28, MO
Connected to the gates of SFETs 12, 17, 24, 28. 9, 14
Is an inverter, 21 and 22 are MOSFETs 12, 17, 24, 28 and MOSFETs
This is a delay means for delaying a pulse so that 13, 18, 25, and 29 are not simultaneously turned on. In this way, a full bridge circuit is used instead of the half bridge circuit 3, and the inductor 1
By using the transformers 26 and 30 instead of the transformers 9 and 20, the amplitude of the AC voltage applied to the piezoelectric body 104 can be arbitrarily set by changing the winding ratio of the transformers 26 and 30. At this time, by adjusting the characteristics of the transformers 26 and 30 and reducing the coupling coefficient to about 0.6 to 0.9, the pulse waveform output from the full bridge circuit is smoothed, and the harmonic component of the voltage waveform applied to the piezoelectric body 104 is reduced. Can be reduced. Also, lowering the coupling coefficient
This is equivalent to inserting an appropriate inductor element between the outputs of the transformers 26 and 30 and the piezoelectric body 104. FIG. 9 shows an example in which inductors are connected to the outputs of the transformers 26 and 30. 31,
32 is an inductor. This is equivalent to reducing the coupling coefficient of the transformers 26 and 30. FIG. 10 is a timing chart showing waveforms of the full bridge circuit. As with the waveform of the half-bridge circuit 3, the delay of Td is B1 so that the high side and low side of the MOSFET are not turned on at the same time.
It is provided in B2, B3, B4.

(Second Embodiment) FIG. 11 shows a second embodiment of the present invention.
FIG. 11 shows the silicon chip described in the above embodiment. 33 is a ceramic plate as a heat radiating means, and the heat radiating means may be a metal plate. Reference numeral 34 denotes control means for receiving and analyzing a command from an external command means (not shown) and instructing the pulse generation means 2 to issue a pulse signal frequency command and ON / OFF of the pulse signal. A plurality of ICs and various circuit components are mounted on a small ceramic plate 33 to constitute a hybrid IC. These may be covered with a resin. ID0, ID1, ID2 are the hybrid I
This is for setting an ID number for identification when a plurality of Cs are connected, and a number from 0 to 6 is set. ID0 is L
SB has a 3-bit configuration. Rxd and Sck are communication signals, and PE is a signal for turning on / off the output of the half bridge circuit 3 as an amplifier circuit. FIG. 12 is a block diagram showing the configuration of the control means. In FIG. 12, 35 is communication means for communicating with an external command means (not shown), 36 is analysis means for analyzing communication information, and 37 stores control parameters. It is storage means. The control parameter is stored as a control signal in a storage unit.
37 is directly connected to the pulse generation means 2, and controls the frequency of the pulse signal and ON / OFF of the pulse signal. Synchronous serial communication is used for communication with an external command means (not shown), but known RS232C, USB, or various types of parallel communication may be used. FIG. 13 shows a signal waveform of the synchronous serial communication. The command from the external command means is transmitted by Rxd, and Sck
The signal is transmitted in synchronization with the rising edge of the signal. High-speed serial transfer is possible because of synchronous communication. The command is divided into an ID number and a control command, and the control command is executed when the IDs match. FIG. 14 is a connection diagram when a plurality of the vibration-type actuator drive circuits are connected. Reference numerals 38 to 44 denote drive circuits for the vibration type actuator, and reference numerals 45 to 51 denote vibration type actuators. The drive circuit of each vibration actuator has a unique ID number set through an external electrode, and Rxd and Sck are connected in parallel to all vibration actuator drive circuits. FIG. 15 is a timing chart showing the communication waveform of FIG. External command means
A command is transmitted following the ID number, and the drive circuits of all the vibration type actuators receive the command, compare with the individual ID numbers, and if they match, determine that the command is directed to themselves, and execute the command. Here, ID number 7 is a command to the drive circuit of the full vibration type actuator. Therefore, the drive circuits of all the vibration type actuators execute the command. In the example of FIG. 15, all the vibration type actuators are instructed to turn on the pulse signal.
(ID = 0) is instructed to turn off the pulse signal, and then the frequency of the pulse signal is instructed to the vibration type actuator 41 (ID = 3). In the present embodiment, each drive circuit of the vibration type actuator is configured on a separate ceramic plate. However, a plurality of drive circuits may be collectively configured on a single ceramic plate.

(Third Embodiment) FIG. 16 shows a third embodiment of the present invention.
FIG. 52 is a diagram showing an embodiment of the present invention, and 52 is a silicon chip in which the drive circuit of the vibration type actuator is integrated to constitute an IC
Molded with resin 7. Metal plate 1 as heat dissipation means
A silicon chip 52 is provided on the top, the metal plate 1 is molded with resin 7 except for the back surface of the mounting surface of the silicon chip 52, and the back surface of the metal plate 1 not molded with resin 7 is FR4
Or the like, or soldered to a widely-dissipated ground pattern on a glass epoxy substrate, or pressed against a larger heat-dissipating metal. The metal plate may be a ceramic plate. FIG. 17 is a layout diagram showing a circuit layout on the silicon chip 52. In FIG. 17, each circuit block forms one section on a silicon chip 52, and the size of the silicon chip 52 is about 4 mm × 6 mm and is manufactured according to a rule having a line width of 0.6 μm or less. FIG. 18 shows the connection of each circuit block in FIG. FIG. 19 is a structural diagram showing a configuration example of a vibration type actuator. Hereinafter, the structure of the vibration-type actuator will be described first with reference to FIG. 19, and then the operation of each block in FIG. 17 will be described with reference to FIG. In FIG. 19, reference numeral 53 denotes a known optical rotary encoder for detecting rotation of a vibration type actuator. When a predetermined AC voltage is applied to the A phase and the B phase, the rotor 101 (not shown) of the vibration type actuator 6
Rotates, and the rotation is transmitted to the optical rotary encoder 53 via the rotation shaft 103 connected to the rotor 101, and outputs a pulse signal having a frequency corresponding to the rotation speed of the vibration type actuator. In FIG. 18, reference numeral 54 denotes external electrodes 4-11 and 4-12.
Oscillating means connected to a vibrator to form an oscillator,
Reference numeral 55 denotes a crystal or ceramic vibrator, and reference numeral 56 denotes a phase compensation circuit using a resistor and a capacitor. 57 is a counter for measuring the period of the pulse signal output from the rotary encoder 53, and 58 is a silicon chip 52 according to the reset signal.
A reset circuit for resetting each part in the memory, 59 is a storage means such as a flash ROM for storing initialization information, 60 is a communication means, 61 is a speed of an output pulse cycle of the rotary encoder 53 from an external command means (not shown). Control means for controlling the cycle according to the command, 62 outputs from the oscillation means 54
Frequency dividing phase shift means for outputting a four-phase pulse signal based on a frequency command from the control means 61 in synchronization with a 10 MHz clock, 63 is a full bridge circuit for power amplification, 64 is a charge pump circuit, and 68 is This is a temperature sensor for detecting the temperature of the silicon chip. In FIG. 18, when an external 5V power supply (power supply other than the full bridge circuit 63) (not shown) is supplied via the electrode 4, the reset circuit 58 causes the frequency dividing phase shift means 62, the control means 61, A reset signal is sent to the communication means 60, the storage means 59, and the counter 57. Next, the communication means 60 reads the initialization information and set values from the storage means 59, writes the initial data of the frequency dividing phase shift means 62 and the control means 61 to the operation setting address of the storage means 9, and performs the initial setting of each section. The reset circuit 58 also performs the same operation according to a reset signal input via the external electrode 4. By setting the reset signal to low level for a predetermined time or more, the reset circuit 58
Operates, so that occurrence of malfunction of the reset circuit 58 due to noise is suppressed. Although the full-bridge circuit 63 operates with a 24V power supply, the output remains off until a 5V power supply (not shown) is supplied, and the full-bridge circuit 63 does not malfunction even if these two power supplies are connected in any order. It is configured as follows. A command from an external command means (not shown) is transmitted via the communication means 60. The command is transmitted at the timing shown in FIGS. 13 and 15 by Rxd (received data signal) and Sck (synchronous signal) by synchronous serial communication. Is transmitted. The command is sent together with ID numbers 0 to 7 indicated by ID0, ID1, and ID2, and is executed when the ID number matches the ID number specified from ID0, ID1, and ID2 of the electrode 4. Txd of the electrode 4 is a signal for transmitting the rotation speed detected by the counter 57 to an external command means (not shown). FIG. 22 is a timing chart of Txd. As in the case of Rxd in FIG. 13, data is output one bit at a time at the falling edge of Sck in synchronization with the Sck signal, and the external command means is configured to receive the Txd signal at the rising edge of Sck. FIG. 23 is a block diagram showing a configuration in a case where drive circuits for a plurality of vibration type actuators are connected. The Txd signal is connected to the drive circuits of all the vibration type actuators in series, and the Txd output is input to the Txi input of the drive circuit of the higher order vibration type actuator. Only the drive circuit of the vibration type actuator whose ID number included in the command from the Rxd signal matches is transmitted to the external command means via the Txd signal, and each operates to relay data from the drive circuit with the larger ID number I do. If the ID numbers do not match, the data from the drive circuit with the higher ID number is output as it is. That is, data is read out in the order of the drive circuit with the smallest number among the ID numbers that match. FIG. 24 is a timing chart showing an actual command flow. When the speed read command is transmitted from the external command means to the drive circuits of all the vibration type actuators as ID = 7 in synchronization with the Sck signal, Txd
The speed data of the drive circuit 38 of the vibration type actuator at the timing ID = 0 of the next Sck signal is transmitted to the external command means using the signal line, and subsequently the data of ID = 1 and ID = 2 are transmitted. In Rxd and Txd, the last transferred data is output during the time period when there is no synchronous clock in Sck. Rxd, Sck, Tx
A digital filter is inserted in the i input, and a pulse noise of 1 μSec or less such as switching noise is removed, and a countermeasure against noise generated by the full bridge circuit 63 is taken. Next, a circuit example of the full bridge circuit 63 is shown in FIG. Here, 200 and 201 are inverters, and 202 and 203 are delay means for preventing the MOSFETs 24 and 25 or the MOSFETs 28 and 29 from being simultaneously turned on. The full bridge circuit 63 requires a power supply of 29 V in addition to the power supply of 24 V. This is the high-side N-channel MOSFETs 12, 17, 24, 2
8 to make it work. Because, even when the output of the full bridge circuit 63 is 24V, the N channel of the high side
24V minimum to keep MOSFETs 12, 17, 24, 28 ON
This is because + 4V = 28V or more is required. Figure of waveform of each part
See 43. A delay time of Td is set for each pulse, and the pulse width is set to a duty of 37.5%. Charge pump circuit 64 is 29V to full bridge circuit 63
Circuit for supplying the electrode 4-1 to the silicon chip 52
Connected via 3, 4-14. A 500 KHz pulse signal having an amplitude of 6 to 8 V is output from the frequency dividing phase shifter 62, and 29 V
The above voltage is supplied to the full bridge circuit 63. And the voltage of 29V or more is applied to the high-side drivers 11, 16, 23, 2
Supplied to 7. Here, when both power of 24 V and 5 V are supplied, and the command to rotate at a certain speed is given by the target speed command of the vibration type actuator from the external command means (not shown), the setting initialized by the reset circuit 58 is performed. The drive frequency, pulse width, phase difference, and the like are set according to the values, and a plurality of pulses having different phases are output from the full bridge circuit 63. The plurality of pulses are applied to the vibration type actuator 6 via transformers 26 and 30, as shown in FIG. Then, the vibration type actuator 6 starts rotating, the rotation speed is detected by the counter 57, and the detected rotation speed is compared with the target speed by the control means, and the drive frequency is adjusted so that the rotation speed approaches the target speed. Controlled.
Here, during operation, if the temperature of the silicon chip 52 rises and approaches the limit temperature, the temperature sensor 68 operates,
The operation of the full bridge circuit 63 is stopped. To resume the operation, the full bridge circuit starts operating when the temperature sensor 68 reaches a predetermined temperature equal to or lower than the limit temperature. The limit temperature is set between approximately 120 ° C. and 150 ° C., for example, it is configured to stop at 135 ° C. or higher and return at 125 ° C. A diode element is used for the temperature sensor, and is integrally formed near the center on the silicon chip 52. In addition, the full bridge circuit 63 can directly turn off the pulse from the outside by the PE signal. Using this, the output current can be detected externally and turned off when a large current flows. Used. Next, a block diagram of the control means 61 is shown in FIG. 65 is a subtraction means for detecting the difference between the rotation speed from the counter 57 and the target speed from the storage means 59, 66 is an integration means for integrating the output of the subtraction means 65, and 67 is an integration of the starting frequency command value from the storage means 59. Adding means for adding to the output of the means 66;
Is an comparing means for comparing the absolute value of the output of the control signal with a predetermined value and outputting the result as an interrupt signal. When the rotation speed is low, the integration means 66 increases the period of the EA signal.
57 counts more than the count value corresponding to the target speed. The output of the subtraction means 65 becomes a negative value, and the integration result gradually decreases. Therefore, the driving frequency also decreases, the driving frequency approaches the resonance frequency, and the rotation speed increases. Thus, the rotation speed of the vibration type actuator is controlled to the target speed. Also, the input signal E of the count 57
Digital filters similar to those of the Rxd, Sck, and Txi signals are inserted into A and EB to reduce the effects of noise. When the deviation between the target speed and the actual speed is large, the deviation is notified to the external command means by an interrupt signal. In the present embodiment, the drive circuit of the vibration type actuator formed on the metal plate 1 is integrally formed of silicon, the full bridge circuit 63 is manufactured by a DMOS structure, and the other circuits are manufactured by a CMOS or bipolar process. . In this embodiment, the oscillation means
Although the oscillator 54 connects the oscillator 55 and the phase compensation circuit 56 via the electrode 4, the oscillator 55 may be formed on a metal plate together with other components, or the phase compensation circuit 56 may be formed on a silicon chip. good. Further, as the oscillating means 54, an oscillating means used for an external command means (not shown) used together with the vibration type actuator drive circuit may be used, or an external independent oscillating means may be used. When the full-bridge circuit 63 and the oscillating means 54 are integrally formed, heat generation of the full-bridge circuit 63 accompanies. Therefore, it is effective to use an oscillating means with a low temperature dependency using a crystal oscillator in order to stabilize the frequency. is there. In the present embodiment, the charge pump circuit 64 is not provided on the silicon chip 52, but may be provided on the silicon chip.

(Fourth Embodiment) FIG. 25 is a block diagram showing a fourth embodiment, in which the inside of the electrode 4 is all integrally formed on a silicon chip. Reference numeral 69 denotes a step-down DC-DC converter which receives a 24V power supply and generates a 5V power supply. The step-down type DC-DC converter has an external filter formed by an inductor and a capacitor via an electrode 4. Reference numeral 70 denotes an external 5V power supply for supplying power for a speed sensor such as a rotary encoder (not shown), which is controlled by a power supply signal set in the storage means 59. This is when you do not need the power supply of the sensor (not shown)
This is to save power by turning it off, and since the vibration type actuator 6 has a large holding force when stopped,
Since it does not move due to a slight disturbance, there is a feature that even if the power of the position detecting means is turned off, if the power is supplied before restarting, no positional deviation occurs, which is made possible by this. The counter 57 detects the position and the rotational speed using the three output signals of the rotary encoder 53,
The position is counted from the pulse signals of A and EB shifted by 90 degrees, and the speed is calculated by detecting the average of the output pulse period based on the independent speed information of EA and EC. Figure 26
Shows the configuration of the rotary encoder 53. 71 is the rotating shaft 10
72 and 73 are chart boards attached to 3
This is an optical sensor that detects the scales recorded on the sensor and outputs a two-phase 90-degree pulse signal. Optical sensor 72,
Reference numerals 73 are provided at positions opposing the chart plate 71, respectively, so as to cancel the influence of the eccentricity of the chart plate 71 attached to the rotating shaft 103. Optical sensor
72 outputs EA and EB, and the optical sensor 73 outputs EC and ED. By using EA and EC for speed detection, chart board
Even if the mounting accuracy of the 71 to the rotating shaft 103 is somewhat poor, it is possible to perform speed control with little rotation fluctuation. The communication means 60 communicates with an external command means (not shown) by asynchronous serial communication. Asynchronous serial communication includes various communication modes such as RS232C start-stop synchronous communication, USB that has recently attracted attention, and Ethernet used in LAN. In this embodiment,
Although an example of RS232C is shown, other systems can communicate similarly. FIG. 27 shows an example of the control means 61. Reference numeral 75 denotes a value obtained by integrating a difference between the pulse cycle command set in the storage means 59 and the pulse cycle detected by the counter 57 at a predetermined timing and a value obtained by multiplying the difference by a predetermined gain and outputting the result. This is proportional integration means. The integration timing and gain used here are set in the storage means 59. Also, counter
57 counts the number of EA and EC pulses within a predetermined time, calculates the average, and calculates the rotation speed. If the rotation speed is faster than the target speed, the output of the subtraction means 65 becomes a negative value. Since the value obtained by multiplying the value and the value obtained by multiplying the value by the gain are negative values, the output of the proportional integration means 75 obtained by adding these values is also a negative value. Therefore, the pulse period of the driving frequency is reduced, the driving frequency of the vibration type actuator 6 is increased, and the vibration frequency is deviated from the resonance frequency of the vibration type actuator.
The rotation speed is gradually reduced and approaches the target speed. The communication means 60 analyzes the command from the external command means, performs various settings to the storage means 59 according to the command, and outputs the value set in the storage means 59, the rotational position information detected by the counter 57, the rotation speed, and the like to Txd. Transmitting via signal. FIG. 28 is a block diagram showing a connection example in a case where drive circuits of a plurality of vibration type actuators are connected. No ID numbers are set in the drive circuits 38 to 44 of the vibration type actuator, and the ID numbers are automatically set by a command. Rxd
Is a signal for receiving a command from external command means, RS
Commands and data are sent in the form of 232C communication. Txd
Are connected in series with each other, and are configured such that data of a drive circuit having an ID number selected in order from information of the drive circuit 38 is transmitted to the external command means. FIG. 29 is a timing chart showing how ID numbers are automatically set. In the initial state, Txd of each drive circuit outputs 5V. Only drive circuit 44 is Txi
Is 0V. Here, when the initialization command is transmitted with ID = 7 (indicating a command to all the driving circuits), the driving circuit 44 having a Txi input of 0 V becomes ID = 0 and transmits data 01 to the driving circuit 43. Then, the drive circuit 43 becomes ID = 1 and the data is sent to the drive circuit 42.
Send 02. In this way, the last drive circuit 38
= 6 and all the drive circuits are set in order from ID = 0. The drive circuit 38 adds 1 to its own ID number to Txd and
To the external command means, and the external command means receives data indicating the number of drive circuits to be connected. Here is the ID
Although the number is set to 3 bits, the number may be set to 8 bits and ID = 255 may be used as a command to all drive circuits. FIG. 30 shows the frequency dividing and phase shifting means 62.
An example of the configuration will be described. A 500 KHz pulse generating means for the charge pump circuit 64 is omitted. The operation principle of FIG. 30 will be described.
If a very accurate and stable 10MHz pulse signal generated using a crystal oscillator or the like is used, the accuracy of the pulse signal generated by dividing this by the frequency division ratio according to the frequency command will be the same as that of the crystal oscillator. It is also very accurate and stable. However, digital frequency division has the disadvantage that the resolution of the set frequency cannot be increased, and the limit is several tens of Hz near 30 KHz, which is the standard driving frequency of the vibration type actuator.
However, when the drive frequency changes by several tens of Hz, the rotational speed of the vibration type actuator greatly changes, which is not suitable for high-accuracy speed control. Further, when an analog oscillator such as a VCO is used, the absolute frequency accuracy is limited due to the accuracy of elements and the influence of temperature characteristics, and there is a drawback that it is weak against noise. In the present embodiment, a desired pulse edge is generated by delaying a rising edge of a pulse obtained by frequency division by an arbitrary time by a programmable delay unit, thereby forming a high-precision oscillation circuit with low temperature dependency. doing. Since the frequency dependence is small and the frequency is set digitally, the effects of temperature and noise can be reduced even if the circuit is configured on the same chip as the full bridge circuit 63. More specifically, when the time of one cycle of the required pulse is, for example, 2,005 nSec, if the number of frequency divisions of the 10 MHz pulse by the frequency dividing means 77 is counted as 20, the pulse of the 100 nSec cycle is obtained. Two
By counting 0 times, the output P0 is output from the frequency dividing means 77. Accordingly, by setting the number of times of frequency division by the frequency dividing means to 20, the frequency dividing means outputs P0 every 2000 nSec. When the delay means 78 outputs P1 with the delay time of 5 nSec, the first frequency dividing means 7
The first P1 is output 5 nSec after the pulse P0 from the point 7 is output.
2005 from the start of counting the 0 MHz pulse
Output after nSec. Also, the frequency dividing means will be 10 MH
Since the pulse of z is continued to be counted, the second pulse P0 is output at the time of counting 20 more. This second P0 is 40 after the frequency divider starts counting pulses.
Output after 00nSec. If the delay time in the delay means 78 is set to 5 nSec with respect to the second pulse P0, the second P1 will be output 4005 nSec after the frequency divider starts counting pulses. The pulse P1 in the 2005 nSec cycle cannot be formed. Therefore, in the present embodiment, the delay time in the second delay means is increased by 5 nSec and set to 10 nSec. Therefore, in the second P1, a pulse having a period of 100 nSec is counted as 40 pulses after the dividing means starts counting pulses.
After counting 10 times, delay time is 10nSec, that is, 4010nS
A second pulse P1 is formed after ec, and control is performed such that the time difference between the edges of P1 is always 2,005 nSec. In this manner, by setting the delay time to be accumulated by 5 nSec every time the pulse P0 is output from the frequency dividing means, the frequency can be set with a resolution finer than the resolution of the clock of 10 MHz. Further, when the accumulated value exceeds the period 100 nSec of the pulse inputted to the frequency dividing means, 100 nSec is subtracted from the accumulated value and the number of frequency divisions is increased by 1 to continuously generate a pulse signal. . Fig. 30
In the above, 76 is a calculating means for calculating the frequency dividing ratio and the delay time based on the frequency command (in the above case, the count number of the frequency dividing means is set to 20 and the delay time is set to 5 in accordance with the set frequency command)
nsec is accumulated), 77 is frequency dividing means for dividing and outputting a 10 MHz clock in accordance with the frequency dividing ratio calculated by the arithmetic means 76, and 78 is a calculating means 76 for calculating the rising edge of the pulse signal from the frequency dividing means 77. The calculating means 76 outputs a pulse delayed based on a delay time command from the CPU, and calculates the next frequency division ratio and delay time every time the output pulse of the delay means 78 is output. Reference numeral 79 denotes a ring counter which counts in synchronization with the output pulse of the delay means 78, and is configured so that the counting direction is reversed by a direction command. FIG. 31 shows the operation waveform of the ring counter 79. The phase relationship between R1, R2, R3, and R4 is reversed by the direction command.
Thereby, the rotation direction of the vibration type actuator is changed. Numeral 80 is a pulse width setting means for setting the pulse width of the input signal output from the ring counter, the phases of which are shifted by 90 degrees each of the four phases. For the input 4-phase pulse signal, a pulse width proportional to the pulse width command is set. If the duty exceeds 25%, 37.5%, or 50% of one cycle set in advance, the pulse width is changed. The pulse width is limited so as not to be above. If the ON / OFF command is OFF, all output signals of A1, A2, B1, and B2 are turned off. Next, FIG. 32 shows a circuit example of the delay means. 81 is a frequency dividing means for inputting a 10 MHz clock and outputting a 5 MHz pulse signal, and 82 is a frequency dividing means.
Phase comparison means for comparing the phase of the 5 MHz pulse signal and the S0 signal; 83, a low-pass filter to which the output of the phase comparison means 82 is input to remove noise; 84, 255 inverting elements connected in a ring form; Is a ring oscillator whose oscillation frequency is determined by the output signal. Ring oscillator
In the configuration of 84, as shown in FIG. 33, 255 inverting means are connected in a ring shape, and all the inverting means control the individual delay times by changing the power supply.
The reciprocal of the time of 510 times becomes the oscillation frequency. The ring oscillator 84 mentioned here is one of the well-known VCOs (voltage controlled oscillators), and together with the phase comparing means 82 and the low-pass filter 83.
Constructs a PLL oscillation circuit. 5MH output from frequency divider 81
The frequency of the ring oscillator 84 is controlled so that the phase difference between the pulse signal of z and the S0 signal becomes 0 degrees. Therefore, S0 to S2
Numeral 54 denotes pulse signals of 5 MHz, and the edges of the respective pulses are shifted by the delay time of one inversion element.
Therefore, the unit delay time is controlled by the PLL,
Is set to exactly 1 / 255th of However, the signals of adjacent numbers are inverted in logic by the inversion element, and S1
The phase difference between the rising edge of S2 and the falling edge of S2 is the unit delay amount. Here, the output signal of the ring oscillator 84 is up to 255, but any number of odd numbers equal to or more than 3 can be used. A selector 85 outputs one of the signals S0 to S254 selected by the delay command to Sout. Reference numeral 86 denotes a logic switching means, which outputs a signal according to the least significant bit of the delay command and a 5 MHz signal.
Switching whether to invert the ut signal. The reason for switching with the least significant bit of the delay command is that, as described above, the output of the ring oscillator 84 is inverted every other direction because adjacent ones are inverted, and is used to cope with this. Reference numeral 87 denotes a toggle control circuit that inverts the output P1 every time Tck is input, and controls whether or not the output is inverted by an enable signal generated from the P0 signal. FIG. 34 shows a circuit example of the logic switching means 86 and the toggle control circuit 87.
5 and 36 show timing charts showing the operation. Figure 3
In FIG. 4, reference numerals 88 and 89 denote D flip-flops with an enable. When the EN input is at a high level, the signal level of the D input is set to an internal register at the rising edge of the clock input, and the value of the register is output to the Q output. 90, 91, 92 are known
93 is an exclusive OR element (X
OR), 94 is exclusive NOR element (XNOR), 95 is AND
The element 96 is a NOT element. P0 signal is 100 from frequency divider 77
The purpose of this circuit is to select and output a pulse which is a pulse signal of nSec and which is delayed by a predetermined time from the plurality of pulses of the ring oscillator 84. Selector 85
The Sout signal output from the device includes a case where the logic is inverted and includes unnecessary signal components, and is configured to output only a necessary portion with correct logic. The operation of each unit will be described with reference to FIGS. The P1 output is configured to invert between 200 and 300 nSec from the rising edge of the P0 pulse. The portion surrounded by the dotted line corresponds to this period. When the P0 pulse having the width of 100 nSec is output, the operation differs depending on whether the 5 MHz pulse is at the low level or the high level. Here, it is assumed that the least significant bit of the delay command is fixed at a low level. FIG. 35 shows a case where the 5 MHz signal is at a high level. The CK5 signal goes low at the falling edge of the P0 pulse.
Therefore, Sout is output as it is as the Tck signal. The Oen signal is 150nSec from the rising edge of the P0 pulse.
Turns on later, a pulse with a pulse width of 200 nSec is output, and O
The P1 signal is inverted at the rising edge of the Tck signal during the period when en is high. FIG. 36 shows the operation when the 5 MHz signal goes low while the P0 pulse is high. The CK5 signal goes high at the falling edge of the P0 pulse. Therefore, the Tck signal is Sou
It becomes the inverted signal of t. Hereinafter, the P1 signal is inverted in the same manner as described with reference to FIG. Such a PLL circuit having a fixed frequency is stable, and the delay time is stable, so that the frequency can be set digitally and a highly reliable driving circuit can be supplied because no special adjustment is required. In short, the delay means of FIG. 32 selects pulses from S0 to S254, which are formed by the ring oscillator and are shifted by a unit delay time, according to the delay time (delay command) from the arithmetic means 76.
Form one. FIG. 42 is a layout diagram showing the layout of each block on a silicon chip. The full bridge circuit 63 occupies half, and the temperature sensor is disposed substantially at the center of the chip.
A ring oscillator 84 is disposed in a small section of the chip. Most of the rest consists of digital circuits, and all functions are contained in one silicon chip. Pads for connection to external electrodes are provided on the outer periphery of the chip.

(Fifth Embodiment) FIG. 37 shows a fifth embodiment of the present invention.
The fourth embodiment differs from the fourth embodiment in that the communication means 60 performs parallel communication, that the charge pump circuit is included in the full bridge circuit 63, and that the control means 61 Control the pulse width instead of the drive frequency. At least speed control is performed by changing the pulse width of one of the four-phase pulse signals. FIG. 38 shows a block diagram of the control means 61. 97
Is an integrating means for further integrating the output of the integrating means 66. Here, when the rotation speed of the vibration type actuator increases,
The output of the subtraction means 65 has a negative value. Therefore, the output of the integration means 66 starts integration in the negative direction, so that the integration means 97
The result obtained by adding the integral pulse width and the initial pulse width to the integration means 66 and the initial pulse width gradually decreases, the pulse width command decreases, and the rotational speed of the vibration actuator decreases. Thus, the rotation speed is controlled. Comparison means 74
If the absolute value of the output of the integrating means 66 exceeds a predetermined value,
Generate an interrupt signal. FIG. 39 is a block diagram showing a configuration in which a drive circuit of a plurality of vibration-type actuators is connected.A parallel data bus is connected to all the vibration-type actuators in parallel, and the write signal WR and the read signal RD are also the same. They are connected in parallel. FIG. 40 shows a communication time chart. The data bus is bidirectional, WR or
Switching by RD signal. The first command sent to the data bus instructs to stop only with the command for ID = 3. The next command is ID = 7, which is a command for the drive circuits of all the vibration type actuators, and is a command for calling the current position. The position data is called in the order of the ID number, and the number of pulses of the RD signal is counted to detect the timing at which each drive circuit outputs data. By using the parallel communication, the communication speed can be increased as compared with the serial communication.

(Sixth Embodiment) FIG. 41 is a block diagram showing a sixth embodiment. Reference numeral 98 denotes a CPU having a counter, a serial communication function, a ROM, a RAM, and a reset circuit.
Recent CPUs are equipped with various functions, including a full bridge circuit 63 as power amplifying means and frequency dividing and phase shifting means 62.
By integrally configuring other peripheral circuits, it is possible to flexibly cope with complicated control. In addition, if the digital circuit portion including the frequency dividing and phase shifting means 62 is formed of an FPGA or the like and the chip is integrally formed, a small and highly versatile drive circuit of a vibration type actuator can be realized. FIG. 44 shows the configuration of the frequency dividing / phase shifting means 62. Reference numeral 99 denotes a rate multiplier, which is configured to generate a frequency that cannot be obtained only by frequency division by changing the frequency division rate in small steps. As a result, the pulse generation section can be constituted completely digitally, so that more stable oscillation means can be provided. Rate multiplier
A pulse signal having a frequency four times or eight times the driving frequency of the vibration type actuator is generated by 99, and a ring counter 7 is generated.
The phase differs by 90 degrees depending on 9 and the pulse width setting means,
It is converted to a four-phase pulse signal with a pulse width determined by the pulse width command.

[0011]

As described above, according to the first to third and thirty-eighth to forty aspects of the present invention, the oscillating means, the speed detecting circuit, the communication means, the power amplifying means, the control means and the like are integrated into one. Space saving has been achieved by combining them on a silicon chip. According to the seventh to twelfth aspects of the present invention, the oscillating means has a structure in which the frequency accuracy is not deteriorated even if there is a temperature change and a structure in which the frequency resolution and accuracy are high, so that the oscillating means is integrated with the power amplifying means However, the accuracy of the driving frequency of the vibration type actuator can be increased, and the resolution can be increased. Claims 21, 22, 23 according to the present application
According to the invention, since the operation can be stopped before the temperature rises and the chip is destroyed, the chip can be protected. According to the inventions of claims 30 to 37, a plurality of drive circuits can be controlled for communication by an external circuit with a simple configuration, and the connection configuration when the plurality of drive circuits are formed into a chip can be simplified.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of the present invention.

FIG. 2 is a block diagram illustrating a configuration of a pulse generation unit illustrated in FIG. 1;

FIG. 3 is a block diagram illustrating an example of a half-bridge circuit as an amplification unit illustrated in FIG. 2;

FIG. 4 is a configuration diagram illustrating a configuration of a vibration type actuator.

5 is a diagram showing an electrode structure of a piezoelectric body of the vibration type actuator shown in FIG.

FIG. 6 is a block diagram illustrating another example of a half-bridge circuit as the amplifying unit illustrated in FIG. 2;

FIG. 7 is a timing chart showing an operation of the half bridge circuit.

FIG. 8 is a block diagram showing a full bridge circuit as an amplifying unit shown in FIG.

FIG. 9 is a block diagram showing another example of the full bridge circuit.

FIG. 10 is a timing chart showing an operation of the full bridge circuit.

FIG. 11 is a configuration diagram showing a second embodiment of the present invention.

FIG. 12 is a block diagram illustrating a configuration of a control unit in FIG. 11;

FIG. 13 is a timing chart showing an input signal of the communication means of FIG. 12;

FIG. 14 is a block diagram showing connection when a plurality of drive circuits of a vibration type actuator are connected.

FIG. 15 is a timing chart showing the timing of communication with the drive circuits of the plurality of vibration actuators of FIG.

FIG. 16 is a configuration diagram showing a third embodiment of the present invention.

FIG. 17 is a layout view showing the layout on the silicon chip of FIG. 16;

FIG. 18 is a block diagram illustrating a circuit configuration of the chip in FIG. 17;

FIG. 19 is a configuration diagram showing a configuration of a vibration type actuator with a rotation sensor.

20 is a block diagram showing an example of a full bridge circuit as an amplifying unit in FIG.

FIG. 21 is a block diagram illustrating an example of a control unit in FIG. 18;

FIG. 22 is a timing chart showing a transmission waveform of the communication means of FIG. 18;

FIG. 23 is a block diagram showing connection when a plurality of drive circuits of a vibration type actuator are connected.

FIG. 24 is a timing chart showing the timing of communication with the drive circuits of the plurality of vibration actuators of FIG. 23;

FIG. 25 is a block diagram showing another embodiment of the present invention.

26 is a configuration diagram showing a configuration of an optical encoder used together with the circuit of FIG. 25.

FIG. 27 is a block diagram showing another example of the control means of FIG. 25;

FIG. 28 is a block diagram showing connection when a plurality of drive circuits of a vibration type actuator are connected.

FIG. 29 is a timing chart showing an operation of automatically determining a drive circuit ID of a plurality of vibration-type actuators in FIG. 28.

FIG. 30 is a block diagram illustrating an example of a frequency division phase shift unit of FIG. 25;

FIG. 31 is a timing chart showing an output waveform of the ring counter of FIG. 30;

FIG. 32 is a block diagram illustrating an example of a delay unit in FIG. 25;

FIG. 33 is a circuit diagram showing a configuration of the ring oscillator of FIG. 32.

FIG. 34 is a circuit diagram showing a circuit example of a logic switching unit and a toggle control circuit of FIG. 32;

FIG. 35 is a timing chart showing waveforms for explaining the operation of FIG. 32;

FIG. 36 is a timing chart showing waveforms for explaining the operation of FIG. 32;

FIG. 37 is a block diagram showing a fifth embodiment of the present invention.

FIG. 38 is a block diagram illustrating an example of a control unit in FIG. 37.

FIG. 39 is a block diagram showing connection when a plurality of drive circuits of a vibration type actuator are connected.

40 is a timing chart showing the timing of communication with the drive circuits of the plurality of vibration-type actuators shown in FIG. 39.

FIG. 41 is a block diagram showing a sixth embodiment of the present invention.

42 is a configuration diagram showing an arrangement of the circuit of FIG. 41 on a silicon chip.

FIG. 43 is a timing chart showing an operation of the full bridge circuit of FIG. 41.

FIG. 44 is a block diagram illustrating an example of a frequency division phase shift unit of FIG. 41;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Metal plate 2 Pulse generating means 3 Half bridge circuit 4 Electrode 5 Bonding wire 6, 45, 46, 47, 48, 49, 50, 51 Vibration type actuator 7 Resin package 8 VCO 12, 13, 17, 18, 24, 25 , 28, 29 M
OSFET 11, 16 High-side driver 33 Ceramic plate 34, 61 Control means 35, 60 Communication means 36 Command analysis means 37, 59 Storage means 38, 39, 40, 41, 42, 43, 44 Drive circuit for vibration-type actuator 52 Silicon Chip 53 Rotary encoder 54 Oscillator 55 Crystal oscillator 56 Phase compensation circuit 57 Counter 58 Reset circuit 62 Frequency dividing phase shifter 64 Charge pump circuit 65 Subtractor 66, 97 Integrator 67 Adder 68 Temperature sensor 69 DC-DC converter 70 External 5V power supply 71 Chart plate 72, 73 Optical sensor 74 Comparison means 75 Proportional integration means 76 Calculation means 77, 81 Dividing means 78 Delay means 79 Ring counter 80 Pulse width setting means 82 Phase comparator 83 Low-pass filter 8 Reference Signs List 4 ring oscillator 85 selector 86 logic switching means 87 toggle control circuit 98 CPU 99 rate multiplier 100 vibrator 101 rotor 102 friction member 103 rotation axis 104 piezoelectric body

Claims (41)

[Claims] 1. A driving circuit for a vibration type actuator for applying a driving signal to an electromechanical energy converting means of said vibration body in order to excite vibration in a vibration body of said vibration type actuator, wherein said driving circuit has a phase different at a desired frequency. Pulse generating means for generating a plurality of pulse signals; and power amplifying means for supplying an AC voltage obtained by power-amplifying the plurality of pulse signals to the electro-mechanical energy converting means, wherein the pulse generating means and the power amplifying means are provided. A driving circuit for a vibration-type actuator, characterized in that the constituent circuit elements are formed on a single metal or ceramic plate or case-shaped heat radiating means. 2. A driving circuit for a vibration-type actuator for applying a driving signal to an electromechanical energy conversion means of said vibration body in order to excite the vibration body of the vibration-type actuator, the phase of which differs at a desired frequency. Pulse generating means for generating a plurality of pulse signals, control means for controlling the pulse generating means based on an external command or a pre-stored command, and an electro-mechanical conversion of an AC voltage obtained by power-amplifying the plurality of pulse signals. The pulse generating means, the control means, and the circuit element constituting the power amplifying means are configured on a single metal or ceramic plate or case-shaped heat radiating means. A driving circuit for a vibration-type actuator, characterized in that: 3. A driving circuit for a vibration type actuator for applying a driving signal to an electromechanical energy conversion means of the vibration type actuator in order to excite a vibration body of the vibration type actuator, wherein a phase is different at a desired frequency. Pulse generating means for generating a plurality of pulse signals; detecting means for detecting at least one of a driving state of the vibration type actuator or an operating state of the driving circuit itself; an external command or a command stored in advance and an output of the detecting means Control means for controlling the pulse generation means on the basis of the pulse generation means, and power amplification means for supplying an AC voltage obtained by power-amplifying the plurality of pulse signals to the electro-mechanical energy conversion means, wherein the pulse generation means and the detection means And a metal or ceramic plate or case-shaped heat radiator having a circuit element constituting the control means. Driving circuit of the vibration-type actuator, characterized in that it is constructed on the. 4. The pulse generating means includes: an oscillating means for generating a pulse signal having a desired frequency; and a frequency dividing and phase shifting means for performing frequency division and phase shift on the pulse signal to generate a plurality of pulse signals having different phases. 4. The driving circuit for a vibration-type actuator according to claim 1, wherein the driving circuit is constituted by means. 5. The oscillating means has a configuration using a vibrator such as crystal or ceramic, and a circuit part other than the vibrator and a phase compensation passive element among the circuit elements constituting the oscillating means. The driving circuit for a vibration-type actuator according to claim 4, wherein the driving circuit is configured on a heat radiating unit. 6. The pulse generating means performs frequency division and phase shift on a pulse signal from an oscillating means for generating a pulse signal of a desired frequency which is not provided on the heat radiating means, and a plurality of pulses having different phases are provided. 4. A driving circuit for a vibration-type actuator according to claim 1, wherein said driving circuit is constituted by frequency-dividing phase shift means for generating said pulse signal. 7. The oscillating means includes: a reference pulse generating means for generating a reference pulse signal; and a frequency dividing means for dividing the reference pulse signal based on a desired frequency division ratio, wherein the period is an integral multiple of a pulse signal of the oscillating means. Frequency dividing means for outputting a pulse signal; calculating means for calculating the frequency division ratio of the frequency dividing means and delay data for the pulse signal of the frequency dividing means based on a frequency command; and Delay means for changing the shift amount of the edge of the pulse signal of the frequency dividing means based on the delay data each time a pulse signal is output from the frequency dividing means, and the pulse signal delayed by the delay means The driving circuit for a vibration-type actuator according to claim 4, wherein the driving circuit is a frequency signal generating circuit that generates the frequency signal. 8. An odd number of delay units configured to oscillate at a predetermined frequency in synchronization with a reference pulse signal of the reference pulse generation unit, each of which is controlled to have a predetermined unit delay time. A ring oscillator in which the logic inversion means are connected in a ring, and selecting one of the output signals of the plurality of logic inversion means based on the delay data to set a delay time that is an integral multiple of an arbitrary unit delay time. 8. A driving circuit for a vibration-type actuator according to claim 7, further comprising: a selection unit for outputting a delay pulse having the driving signal. 9. The oscillation frequency of the ring oscillator is:
9. The driving circuit for a vibration-type actuator according to claim 8, wherein the frequency of the reference pulse signal is a half of the reference pulse signal. 10. The driving of the vibration type actuator according to claim 8, wherein the number of serially connected logic inversion means of the ring oscillator is 2 N −1 (N is an integer of 2 or more). circuit. 11. The selection means comprises: an exclusive-OR means for aligning the outputs of the even-numbered and odd-numbered logic inversion means; a pulse edge selection means for extracting necessary signal edges; Gate pulse generating means for generating a gate pulse to be permitted, a signal having a delay time designated by the pulse edge selecting means is selected, and the signal is determined by whether or not the selected signal is an output signal of the odd-numbered logic inverting means. 9. The driving of the vibration type actuator according to claim 8, wherein the exclusive OR means switches between inversion and non-inversion and outputs the signal, and the rising or falling edge is selected and output by the gate pulse. circuit. 12. The reference pulse generating means has a configuration using a vibrator such as quartz or ceramic, and at least a circuit portion other than the vibrator and the passive element for phase compensation is formed on the heat radiating means. The driving circuit for a vibration-type actuator according to claim 7, wherein: 13. The driving circuit according to claim 7, wherein said reference pulse generating means is not provided on said heat radiating means. 14. The driving circuit according to claim 2, wherein the control unit includes a serial or parallel communication unit that receives an external command and transmits internal information. 15. The apparatus according to claim 2, wherein the control unit stops outputting at least one of the plurality of pulse signals output from the pulse generation unit based on an external command or a command stored in advance. Or a drive circuit for a vibration-type actuator according to item 3. 16. The apparatus according to claim 1, wherein the control means sets a phase difference between the plurality of pulse signals output from the pulse generation means to a desired value based on an external command or a command stored in advance. 4. The driving circuit for a vibration-type actuator according to 2 or 3. 17. The control unit according to claim 2, wherein the frequency of the plurality of pulse signals output from the pulse generation unit is set to a desired value based on an external command or a command stored in advance. 4. The driving circuit for a vibration-type actuator according to 3. 18. The control unit sets at least one pulse width of a plurality of pulse signals output from the pulse generation unit to a desired value based on an external command or a command stored in advance. Claim 2 or 3
4. A driving circuit for a vibration type actuator according to claim 1. 19. The pulse generating means sets at least one pulse width of a plurality of pulse signals output from the pulse generating means to a desired value based on an external command or a command stored in advance, and 19. The driving circuit for a vibration-type actuator according to claim 18, wherein the pulse width is limited so that the pulse width does not exceed a set upper limit pulse width. 20. The driving circuit according to claim 19, wherein the upper limit pulse width is any one of 25%, 37.5%, and 50% of a cycle of the pulse width. 21. The apparatus according to claim 21, wherein said detecting means detects a temperature, and when it is detected that said temperature exceeds a predetermined temperature, said control means stops output of said power amplifying means. 4. The driving circuit for a vibration-type actuator according to 3. 22. The detecting means detects a temperature, and when it is detected that the temperature exceeds a predetermined first temperature, the control means turns off the output of the power amplifying means, and 4. The driving circuit according to claim 3, wherein the output of the power amplifying means is turned on by the control means when it is detected that the temperature has become lower than the second temperature which is lower than the first temperature. . 23. The apparatus according to claim 21, wherein said detecting means is one or more temperature detecting means for detecting a temperature of said heat radiating means or a drive circuit of a vibration type actuator provided on said heat radiating means. 23. A driving circuit of the vibration-type actuator according to 22. 24. The detecting means detects a rotation or a moving speed of the vibration type actuator, and controls the pulse generating means by the control means so as to approach an external command speed or a command speed stored in advance. The driving circuit for a vibration-type actuator according to claim 3. 25. The detecting means is a rotary encoder, and detects an average value of speeds detected from signals from a plurality of scale detection sensors for detecting scales at least at opposing positions of the scaled chart plate. 25. The driving circuit for a vibration-type actuator according to claim 24, wherein: 26. The power amplifying means is a driver circuit composed of a full bridge or a half bridge, and the driver circuit is provided on a high side of the bridge circuit.
3. A charge pump circuit for supplying power for driving an N-channel switching element, wherein at least a diode element and a capacitor element of the charge pump circuit are not formed on the heat radiating means. 4. The driving circuit for a vibration-type actuator according to 3. 27. The driving circuit for a vibration-type actuator according to claim 3, wherein a power supply of said detection means is turned on / off by said control means. 28. The power supply of the detecting means is supplied from a power supply unit provided on the heat radiating means via a switch means provided on the heat radiating means.
8. A driving circuit for the vibration-type actuator according to 7. 29. The pulse generator is supplied with power from a first power supply and the power amplifier is supplied with power from a second power supply, and at least until power is supplied from at least the first power supply to the pulse generator. 3. The output of the power amplifying means is inhibited until a predetermined time has elapsed from the start of power supply to the pulse generating means.
Or a drive circuit for a vibration-type actuator according to item 3. 30. A drive circuit of a vibration type actuator for applying a drive signal to an electro-mechanical energy conversion means of the vibration type actuator in order to excite a vibration body of the vibration type actuator. A vibration-type actuator driving system for driving each vibration-type actuator, wherein, as a configuration of each driving circuit, a pulse generating means for generating a plurality of pulse signals having different phases at a desired frequency and control for communicating with an external circuit Means, and a power amplifying means for supplying an AC voltage obtained by power-amplifying the plurality of pulse signals to the electro-mechanical energy converting means. When configured on one metal plate or ceramic plate or case-like heat dissipation means for each circuit In addition, a command transmission signal is transmitted in parallel to each drive circuit by serial communication for communication between the control means and the external circuit, and a status confirmation reception signal from each drive circuit is transmitted to the external circuit. Is a vibration type actuator drive system, wherein each drive circuit is connected in series and a reception signal is transmitted to the external circuit in the order of connection. 31. The vibration type actuator drive system according to claim 30, wherein the serial communication is performed by synchronous serial communication, and a synchronous clock is applied to each drive circuit in parallel. 32. A drive circuit of a vibration-type actuator for applying a drive signal to an electric-mechanical energy conversion means of the vibration body in order to excite vibration to the vibration body of the vibration-type actuator. A vibration-type actuator driving system for driving each vibration-type actuator, wherein, as a configuration of each driving circuit, a pulse generating means for generating a plurality of pulse signals having different phases at a desired frequency and control for communicating with an external circuit Means, and a power amplifying means for supplying an AC voltage obtained by power-amplifying the plurality of pulse signals to the electro-mechanical energy converting means. Each circuit is configured on one metal plate or ceramic plate or case-like heat radiating means. The communication between the control means and the external circuit is performed by parallel communication, the transmission signal for command and the reception signal for status confirmation are connected in parallel to each drive circuit sharing the same signal line, and the external circuit A vibration type actuator drive system characterized in that transmission and reception are switched by a communication direction switching signal to be output. 33. Each drive circuit is identified by a unique ID number, and a command is transmitted to a drive circuit of a vibration-type actuator corresponding to the ID number by a command sequence including an ID number of a transmission signal transmitted from an external circuit. 31. The vibration type actuator driving system according to claim 30, wherein a flow of information to an external circuit is transmitted to the external circuit according to an order in which the driving circuits are connected in series. 34. A special mode which is effective for all the driving circuits.
The vibration type actuator drive system according to claim 33, wherein an ID is provided for the ID number. 35. An automatic setting configuration in which an ID is automatically set in order from the drive circuit connected last in the series connection.
4. The vibration type actuator drive system according to 4. 36. Each drive circuit is identified by a preset unique ID number, and a command is transmitted to a drive circuit corresponding to the ID number by a command sequence including an ID number of a transmission signal transmitted from an external circuit. 32. The method of claim 32, wherein
4. The vibration type actuator drive system according to 4. 37. A special mode which is effective for all driving circuits.
37. The vibration type actuator drive system according to claim 36, wherein an ID is provided for the ID number. 38. A component constituting the drive circuit,
4. The driving circuit for a vibration-type actuator according to claim 1, wherein the driving circuit is configured on a single silicon chip. 39. A component constituting the drive circuit,
4. The driving circuit for a vibration-type actuator according to claim 1, wherein the driving circuit is configured on a plurality of silicon chips. 40. The driving circuit for a vibration-type actuator according to claim 38, wherein the silicon chip is sealed with a resin, and an external electrode extends outside from the resin. 41. The driving circuit for a vibration type actuator according to claim 1, wherein the heat radiating means formed of the metal plate is connected to or grounded to a ground potential.