JPH11339710A - Electrostatic deflector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize the reduction in the number of part items and the size and a highly precise assembling in a short time by fixing a plurality of electrode elements divided at a specified angle to holding members for separately insulating, aligning and supporting them along the axial direction so as to form a divided electrode surface of a specified angle in plane by an insulating member. SOLUTION: Potentially independent electrode elements 3-6 divided at 360/n deg. (n=4) form a divided electrode surface of 360 deg. in plane, and the electrode surface forming part of the other electrode element is inserted to a central through- hole to form a four-divided electron beam axially fitted electrode. The electrode elements 3-6, the electrode elements 9-13 of a blanking electrode, earth electrodes 7, 8, a holder 13, a diaphragm 14 and a base 15 are fitted to prescribed slits of holding members 1, 2. The electrode elements 3-9, 9-12 are precisely positioned by inserting an assembling jig to a positioning hole P, and the fitting parts with the holding members 1, 2 are fixed by a glass softened at a high temperature. The number of parts is reduced because screwing is not adapted, and this device is suitably usable even in super vacuum.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an electrostatic deflecting device, and more particularly to an improvement in an electrostatic deflecting device used for an electron beam application device such as an electron microscope and an electron beam exposure device.

[0002]

2. Description of the Related Art Electron beam deflecting devices used in electron beam application devices such as electron microscopes and electron beam exposure devices can be broadly classified into electromagnetic deflecting devices and electrostatic deflecting devices.

Here, the electromagnetic deflection device has a problem that the response time is slowed down to about several hundreds of microseconds due to the influence of coil inductance, eddy current and the like, although the deflection efficiency is excellent.

On the other hand, the electrostatic deflecting device has an advantage that the response time is as fast as several microseconds, although the deflection efficiency is not as high as that of the electromagnetic deflecting device. Widely used as a deflecting device for the device.

The electrostatic deflecting device is driven by, for example, dividing a cylindrical member to form a plurality of electrodes, and applying a predetermined voltage to each electrode in accordance with the amount of deflection.
In an electron beam application apparatus, a plurality of electrostatic deflecting devices having such a configuration are combined, but if the deflection center of the electron beam of each electrostatic deflecting device is shifted, the distortion at the time of electron beam deflection increases. Become a factor.

FIG. 7 is a partial structural view of an example of such a conventional electrostatic deflecting device, wherein (a) is a top view of a main part,
FIG. 2B is a cross-sectional view taken along line II-II in FIG. In the figure, divided electrodes d1 and d2 constituting a deflector, an astigmatism corrector, an axis corrector and the like are individually incorporated into holding stands h1 and h2 maintained at respective ground potentials, and are provided as divided electrode units u1 and u2. Be integrated.

The divided electrode units u1, u
2 mutually rotate each holding table h1 and h2 so that the not-shown positioning scribe lines drawn in advance on the side surfaces of each holding table including these holding tables h1 and h2, While observing the image obtained by actually performing electron beam scanning, the respective holders h1 and h2 are mutually rotated to the position where the best image is obtained, and the adjacent holders are screwed with the screws s1, s2 and s3. Fix it.

[0008]

However, the alignment accuracy in such a conventional configuration depends on the processing accuracy of the scribing line for positioning previously drawn on the side surface of the holding table and the accuracy at the time of assembly work. As a result, considerable skill is required for scribe line processing and assembly, and these operations also require considerable man-hours.

Further, in such a conventional configuration, since each divided electrode is unitized in combination with a holding table, the number of components is increased, and it is difficult to reduce the size of the apparatus. Furthermore, in a state where each divided electrode is combined with a holding table to form a unit, it is impossible to readjust the position of each electrode.

The present invention has been made in order to solve such a problem, and an object of the present invention is to provide an electrostatic deflecting device which can reduce the number of parts, can be reduced in size, and can be assembled in a short time with high accuracy. Aim.

[0011]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a plurality of n electrode elements each of which is divided into 360 / n degrees, and these electrode elements are divided into 360-degree divided electrode planes. It is characterized by comprising a holding member which is insulated and spaced apart and arranged and supported along the axial direction so as to form a surface, and an insulating member which fixes these electrode elements and the holding member.

The electrostatic deflecting device constructed as described above does not have the conventional screw fixing structure, so that the number of parts can be reduced and the device can be assembled with high accuracy. It is also advantageous for operation under environmental conditions.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 and FIG. 2 are configuration explanatory diagrams showing an embodiment of an electrostatic deflection device according to the present invention. Here, FIG. 1A is a top view, and FIG. 1B is a cross-sectional view taken along a cutting line II in FIG. 1A. FIG. 2A is a sectional view taken along line AA of a main part in FIG. 1B, and FIG.
FIG. 2 is a sectional view taken along the line BB of the main part in FIG.
(C) is a CC cross-sectional view of a main part in FIG. 1 (b).

In these figures, the holding members 1 and 2 are formed in a plate shape with an insulator. The holding members 1 and 2
Notches (slits) are formed at predetermined intervals along the longitudinal direction for attaching each electrode electrode and the like described below. That is, a plurality of cuts in the horizontal direction are formed on the opposing surfaces of the holding members 1 and 2 so as to be arranged in the height direction at a predetermined interval. The position (height) of each cut in the holding members 1 and 2 is the same for both holding members 1 and 2.

The electrode elements 3 to 6 constitute a four-divided electron beam axis-aligning electrode (quadrupole).
To 6 are mutually electrically independent. Electrode elements 3-6
Is equivalent to a plurality of n electrode elements divided into 360 / n degrees, where n = 4. The electrode elements 3 to 6 are arranged and supported by the holding members 1 and 2 so as to be insulated and separated from each other in the axial direction so as to form a 360-degree divided electrode surface in plan view.

The shapes of the electrode elements 3 to 6 are shown in FIGS.
It is as shown in FIG. 3 to 6,
(A) shows a planar shape, and (b) shows a cross section. As is clear from FIGS. 3 to 6, through holes 3 a to 6 a are formed at the centers of the electrode elements 3 to 6, and the through holes 3 a to 6 a have electrode surface forming portions 3 b of other electrode elements. ~ 6
By inserting b, the quadrupoles are arranged in the positional relationship shown in FIG. These electrode elements 3 to 6
Disc-shaped earth electrodes 7 and 8 are arranged above and below the electrodes to prevent disturbance of the potential of the alignment electrodes.

The electrode elements 9 to 12 constitute a blanking electrode, and these electrode elements 9 to 12 are electrically independent from each other. The pair of electrode elements 9 and 10 and the pair of electrode elements 11 and 12 are the same as those of the above-mentioned electrode elements 3 to
6 has a through hole and an electrode surface forming portion similarly to the electrode elements 3 to 6, but has a similar combination structure, although the shape of the electrode surface forming portion is greatly different from that of the electrode element 6. Further, between the electrode elements 10 and 11, a holder 13, a diaphragm 14 housed in the holder 13, and a diaphragm holder 17 for holding the diaphragm 14 are provided. In addition, 15 is a base, 1
6 is a lid.

A manufacturing and assembling process of such an electrostatic deflection device will be described. First, each of the electrode elements 3 to 6, 9 to 12, the ground electrode 7,
8. Fit the holder 13, the aperture 14, and the base 15 respectively.

Then, in order to obtain the division accuracy of each electrode,
An assembly jig (not shown) is inserted and penetrated into a positioning hole P provided in each of the electrode elements 3 to 6, 9 to 12, to perform high-precision positioning. Thereby, each of the electrode elements 3 to 6, 9
12 to the central part and the electrode elements 3 to 6, 9 to 1
The symmetry with respect to the two axes can be adjusted simultaneously.

In fixing the electrode elements 3 to 6, 9 to 12 to the holding members 1 and 2, the holding members 1 and 2 perpendicular to the assembling jig are inserted with the assembling jig inserted therethrough. The glass softened at a high temperature is pressed against the fitting portion of the electrode element 2 with each of the electrode elements 3 to 6, 9 to 12. When the temperature of the glass cools, the glass solidifies and the electrode elements 3 to 6, 9
12 are fixed to the holding members 1 and 2.

After fixing the electrode elements 3 to 6, 9 to 12 to the holding members 1 and 2, the assembly jig is removed. In addition, lid 1
6 is also bonded with glass during the above operation. The electrostatic deflector configured as described above does not use screw fixing as in the past when fixing each electrode element, so the number of parts can be reduced, the electrode can be downsized, and it can be used in ultra-high vacuum. It is suitable.

Also, by using in an ultra-high vacuum,
The baking does not cause loosening of the screw or deformation of the fixed part. Further, since a plurality of electrode elements are integrated as a unit by fixing glass on an assembly jig, stable quality is obtained as an electrode unit, and compatibility of the electrode unit is improved.

Although each electrode element is fixed using glass, any other insulating member having adhesive strength may be used.

[0024]

As described above, according to the present invention, a plurality of n electrode elements each of which is divided into 360 / n degrees,
A holding member for insulating and separating these electrode elements along the axial direction so as to form a 360-degree divided electrode surface in a plane, and an insulating member for fixing the electrode elements and the holding member. Therefore, according to the present invention, it is possible to provide an electrostatic deflecting device that can reduce the number of parts, reduce the size, and assemble in a short time and with high accuracy, such as an electron microscope and an electron beam exposure device. It is suitable as an electrostatic deflection device for an electron beam application device.

[Brief description of the drawings]

FIG. 1 is a configuration explanatory view showing an embodiment of an electrostatic deflection device according to the present invention.

FIG. 2 is a configuration explanatory view showing a cross section of the embodiment of FIG. 1;

FIG. 3 is a configuration explanatory view showing one of the electrode elements in the embodiment of FIG. 1;

FIG. 4 is a structural explanatory view showing another electrode element in the embodiment of FIG. 1;

FIG. 5 is a configuration explanatory view showing another electrode element in the embodiment of FIG. 1;

FIG. 6 is a structural explanatory view showing another electrode element in the embodiment of FIG. 1;

FIG. 7 is a configuration explanatory view showing an example of a conventional electrostatic deflection device.

[Explanation of symbols]

 1, 2 Holding member 3 to 6 Electrode element (electron beam alignment electrode) 7, 8 Earth electrode 9 to 12 Electrode element (blanking electrode) 13 Holder 14 Aperture

Claims (1)

[Claims] 1. A plurality of n electrode elements each of which is divided at 360 / n degrees, and these electrode elements are
A static member comprising: a holding member that insulates and separates and supports the electrode element and the holding member along an axial direction so as to form a 0-degree split electrode surface; and an insulating member that fixes the electrode element and the holding member. Electro-deflection device.