JPH11338152A5 - - Google Patents

Info

Publication number
JPH11338152A5
JPH11338152A5 JP1998147689A JP14768998A JPH11338152A5 JP H11338152 A5 JPH11338152 A5 JP H11338152A5 JP 1998147689 A JP1998147689 A JP 1998147689A JP 14768998 A JP14768998 A JP 14768998A JP H11338152 A5 JPH11338152 A5 JP H11338152A5
Authority
JP
Japan
Prior art keywords
acid
resin composition
photosensitive resin
positive photosensitive
action
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998147689A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11338152A (ja
JP3925882B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP14768998A priority Critical patent/JP3925882B2/ja
Priority claimed from JP14768998A external-priority patent/JP3925882B2/ja
Publication of JPH11338152A publication Critical patent/JPH11338152A/ja
Publication of JPH11338152A5 publication Critical patent/JPH11338152A5/ja
Application granted granted Critical
Publication of JP3925882B2 publication Critical patent/JP3925882B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP14768998A 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物 Expired - Fee Related JP3925882B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14768998A JP3925882B2 (ja) 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14768998A JP3925882B2 (ja) 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物

Publications (3)

Publication Number Publication Date
JPH11338152A JPH11338152A (ja) 1999-12-10
JPH11338152A5 true JPH11338152A5 (cg-RX-API-DMAC7.html) 2005-02-24
JP3925882B2 JP3925882B2 (ja) 2007-06-06

Family

ID=15436061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14768998A Expired - Fee Related JP3925882B2 (ja) 1998-05-28 1998-05-28 ポジ型感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JP3925882B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002006483A (ja) * 2000-06-20 2002-01-09 Sumitomo Chem Co Ltd フォトレジスト組成物
KR100642416B1 (ko) * 2004-08-31 2006-11-03 주식회사 하이닉스반도체 상부 반사방지막 조성물 및 이를 이용한 반도체 소자의패턴 형성 방법
KR100745064B1 (ko) * 2004-09-17 2007-08-01 주식회사 하이닉스반도체 상부 반사방지막 조성물 및 이를 이용한 반도체 소자의패턴 형성 방법

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