JPH11329801A - Electric resistor element and manufacture thereof - Google Patents

Electric resistor element and manufacture thereof

Info

Publication number
JPH11329801A
JPH11329801A JP10129309A JP12930998A JPH11329801A JP H11329801 A JPH11329801 A JP H11329801A JP 10129309 A JP10129309 A JP 10129309A JP 12930998 A JP12930998 A JP 12930998A JP H11329801 A JPH11329801 A JP H11329801A
Authority
JP
Japan
Prior art keywords
tungsten
inner conductor
silicon nitride
terminal electrode
lead wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10129309A
Other languages
Japanese (ja)
Inventor
Kentaro Sawamura
建太郎 澤村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP10129309A priority Critical patent/JPH11329801A/en
Publication of JPH11329801A publication Critical patent/JPH11329801A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Non-Adjustable Resistors (AREA)
  • Resistance Heating (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an electric resistor element, which can be manufactured by a simple method, stands the use under a rapid temperature rise and a high temperature and has excellent oxidation resistance. SOLUTION: This is an electric resistance element which is constituted of an insulating base material and whose main body is silicon nitride, a laminated sintered body with the inner conductor of tungsten-carbon composite system, the terminal electrode which is formed by simultaneous burning at the exposed part of the above described inner conductor, and the lead wire connected to the electrode. Here, the insulating base material, whose main body is silicon nitride and the inner conductor of the tungsten-carbon composite system are laminated and sintered. The plate-shaped or linear electrode comprising high melting point, low resistance metal, which is connected to the lead wire, is directly burned and attached to the exposed part of the above described inner conductor and manufactured.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ガスや石油のよう
な気体及び液体燃料の着火用発熱体として好適な電気抵
抗素子、さらに詳しくいえば、コンピューターのような
制御機器を使用することなく、短時間で1100℃以上
に急速昇温し、天然ガス、プロパンガス、灯油などの燃
料に点火することができ、しかも昇降温の繰り返しや高
温における酸化に耐え、長期間にわたって使用しうる通
電式の発熱体として好適な電気抵抗素子及びその製造方
法に関するものである。
The present invention relates to an electric resistance element suitable as a heating element for igniting gaseous and liquid fuels such as gas and petroleum, and more specifically, without using a control device such as a computer. The temperature rises rapidly to 1100 ° C or higher in a short time, and it can ignite fuels such as natural gas, propane gas, and kerosene. The present invention relates to an electric resistance element suitable as a heating element and a method for manufacturing the same.

【0002】[0002]

【従来の技術】ガスや石油などの気体及び液体燃料に着
火させる発熱体は、2〜3秒間という短時間内に100
0℃以上の温度まで急速昇温した上、この高温に耐えな
ければならないため、優れた耐熱衝撃性と耐酸化性が要
求される。
2. Description of the Related Art A heating element for igniting a gas or liquid fuel such as gas or petroleum requires 100 to 100 seconds within a short time of 2 to 3 seconds.
Since the temperature must be raised rapidly to a temperature of 0 ° C. or higher and withstand this high temperature, excellent thermal shock resistance and oxidation resistance are required.

【0003】このような要求にこたえるものとして、こ
れまで窒化ケイ素焼結体中又はその表面に窒化チタンを
主体とする発熱部を設け、その両端部に炭化タングステ
ンを主体とする導電材を被着して電極取出リード部とし
たセラミックスヒータ(特開昭63−136485号公
報)、セラミックス体内に発熱抵抗体を埋設して成るヒ
ータを先端部に備え、後端部にこのヒータの保持機構と
通電機構を備えたセラミックス発熱体において、ヒータ
を形成するセラミックス体と、保持機構を形成する金属
体の間をロウ材により気密シールしたもの(特開昭60
−30076号公報)、緻密質セラミックスからなる基
体内部に発熱体を埋設したセラミックスヒータにおい
て、前記発熱体の両端部分に平均粒径が0.1〜100
μmの金属粒子を焼結した金属端子を備えたもの(特開
平9−306642号公報)、セラミックス基体とその
中に埋設されたセラミックス発熱体とセラミックス発熱
体に一端が埋設された電極部を備え、この電極部のセラ
ミックス発熱体の埋設部に、セラミックス発熱体に対す
る埋設部の相対的な移動及び/又は自身の軸線周りの回
転を阻止ないし抑制するための干渉部を形成したもの
(特開平9−184621号公報)などが提案されてい
るが、これらは構造が複雑で、小型化を防げ、また高コ
ストになるのを免れないため、実用化の点で、多くの問
題が残されている。
[0003] In order to meet such a demand, a heating portion mainly composed of titanium nitride has been provided in or on a silicon nitride sintered body, and a conductive material mainly composed of tungsten carbide has been applied to both ends thereof. A ceramic heater (JP-A-63-136485) serving as an electrode extraction lead portion, a heater having a heating resistor embedded in a ceramic body is provided at a front end portion, and a holding mechanism of the heater is energized at a rear end portion. In a ceramic heating element having a mechanism, a ceramic material forming a heater and a metal body forming a holding mechanism are hermetically sealed with a brazing material (Japanese Patent Application Laid-Open No.
JP-A-30076), a ceramic heater in which a heating element is embedded inside a base made of dense ceramics, wherein both ends of the heating element have an average particle size of 0.1 to 100.
One having a metal terminal obtained by sintering metal particles of μm (Japanese Patent Application Laid-Open No. 9-306664), a ceramic base, a ceramic heating element embedded therein, and an electrode part having one end embedded in the ceramic heating element. An interference portion for preventing or suppressing relative movement of the embedded portion with respect to the ceramic heating element and / or rotation about its own axis is formed in the embedded portion of the electrode heating portion where the ceramic heating element is embedded (Japanese Patent Application Laid-Open No. Hei 9 (1998) -107). 184621) have been proposed, but these have a complicated structure, prevent miniaturization, and inevitably increase the cost. Therefore, many problems remain in practical use. .

【0004】[0004]

【発明が解決しようとする課題】本発明は、簡単な方法
で製造することができ、しかも急速昇温、高温下での使
用に耐える耐酸化性の良好な電気抵抗素子を提供するた
めになされたものである。
SUMMARY OF THE INVENTION It is an object of the present invention to provide an electric resistance element which can be manufactured by a simple method and has good oxidation resistance which can withstand rapid temperature rise and use under high temperature. It is a thing.

【0005】[0005]

【課題を解決するための手段】本発明者は、リード線付
き耐酸化性端子電極を備えた発熱体について鋭意研究を
重ねた結果、窒化ケイ素に接合性の良い活性金属を使用
し、耐酸化性のニッケルを主体とした金属を、内部導体
の露出している窒化ケイ素に密着させることで内部導体
が直接空気に接することをなくし、耐酸化性に優れた端
子電極を形成できるとともに、リード線の付いた一体型
の電極を使用することで、従来電極形成、リード線接続
と2つの工程を要していたが、製造工程を1工程に短縮
でき、さらには一体物の金属を使用するため、構造が簡
単で構造上強度に優れたものを作業効率よく、低コスト
で提供しうることを見出し、この知見に基づいて本発明
をなすに至った。
The inventor of the present invention has conducted intensive studies on a heating element having an oxidation-resistant terminal electrode with a lead wire. A metal mainly composed of nickel is adhered to the exposed silicon nitride of the inner conductor, so that the inner conductor does not come into direct contact with air, and a terminal electrode with excellent oxidation resistance can be formed, and the lead wire can be formed. Conventionally, two steps, electrode formation and lead wire connection, were required by using an integrated electrode with a mark, but the manufacturing process can be shortened to one step, and furthermore, since an integrated metal is used, The present inventors have found that a structure having a simple structure and excellent in structural strength can be provided with high work efficiency and low cost, and the present invention has been made based on this finding.

【0006】すなわち、本発明は、窒化ケイ素を主体と
する絶縁性基材と、タングステン−炭素複合系内部導体
との積層焼結体と、前記内部導体の露出部に同時焼き付
けにより形成された端子電極及びそれに接続したリード
線とから構成されたことを特徴とする電気抵抗素子及び
窒化ケイ素を主体とする絶縁性基材と、タングステン−
炭素複合系内部導体とを積層して焼結し、前記内部導体
の露出部に、リード線を連結した高融点低抵抗金属から
なる板状又は線状端子電極を活性金属により直接焼き付
けることを特徴とする電気抵抗素子の製造方法を提供す
るものである。ここで使用する活性金属はチタンを含む
もの、例えばTi−Ag−Cu系合金、Ti−Ag系合
金、Ti−Ag−Cu−Ni系合金が好ましいが、接着
性の点で特にTi−Ag−Cu系合金が好ましい。
That is, the present invention provides a laminated sintered body of an insulating base material mainly composed of silicon nitride, a tungsten-carbon composite internal conductor, and a terminal formed by simultaneous baking on an exposed portion of the internal conductor. An electrical resistance element comprising an electrode and a lead wire connected thereto; an insulating base mainly composed of silicon nitride;
A carbon composite internal conductor is laminated and sintered, and a plate or linear terminal electrode made of a high melting point low resistance metal connected to a lead wire is directly baked on an exposed portion of the internal conductor with an active metal. And a method for manufacturing an electric resistance element. The active metal used here is preferably one containing titanium, for example, a Ti-Ag-Cu-based alloy, a Ti-Ag-based alloy, or a Ti-Ag-Cu-Ni-based alloy, but particularly Ti-Ag- Cu-based alloys are preferred.

【0007】[0007]

【発明の実施の形態】次に本発明を添付図面により、さ
らに詳細に説明する。図1は本発明の電気抵抗素子の1
例を示す斜視図であって、窒化ケイ素を主体とする絶縁
性基材1,1の中間に、タングステン−炭素複合系内部
導体2が挟み込まれ、その導体2の端部が露出領域3を
有し、これらは、焼結により一体化されている。領域3
の導体露出部に活性金属5を塗布し、さらに端子電極4
で囲い込み、焼き付けてこの端子電極と一体化する。な
お、図1において端子電極4は、両側に設けたものの一
方のみを示してある。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail with reference to the accompanying drawings. FIG. 1 shows one of the electric resistance elements of the present invention.
FIG. 3 is a perspective view showing an example, in which a tungsten-carbon composite inner conductor 2 is sandwiched between insulating substrates 1 and 1 mainly composed of silicon nitride, and an end of the conductor 2 has an exposed region 3. These are integrated by sintering. Area 3
The active metal 5 is applied to the exposed portion of the conductor, and the terminal electrode 4
And integrated with this terminal electrode by baking. In FIG. 1, only one of the terminal electrodes 4 provided on both sides is shown.

【0008】本発明電気抵抗素子を構成する絶縁性基材
1,1は、窒化ケイ素を主体とし、これに酸化ケイ素、
酸化アルミニウムなどを配合した材料からなっている。
この材料の窒化ケイ素含有量は、50〜95重量%の範
囲内である。しかし、通常使用されている窒化ケイ素に
希土類酸化物−アルミナ又は希土類酸化物−シリカなど
を添加した系にも十分使用可能である。
The insulative bases 1 and 1 constituting the electric resistance element of the present invention are mainly composed of silicon nitride,
It is made of a material containing aluminum oxide or the like.
The silicon nitride content of this material is in the range of 50-95% by weight. However, it can also be used satisfactorily in a system in which rare earth oxide-alumina or rare earth oxide-silica is added to commonly used silicon nitride.

【0009】また、本発明電気抵抗素子の内部導体2と
しては、タングステン−炭素複合系材料が用いられる
が、この組成としては、タングステンと炭素の原子比
が、1:0.25ないし1:1.1、好ましくは1:
0.4ないし1:0.98の範囲内で選ばれる。このよ
うな組成のものは、通常、融点2000℃以上、熱膨張
率6.0×10-6/℃以下及び電気抵抗10-5Ω・cm
以下である。
Further, a tungsten-carbon composite material is used as the inner conductor 2 of the electric resistance element of the present invention, and the composition is such that the atomic ratio of tungsten to carbon is 1: 0.25 to 1: 1. .1, preferably 1:
It is selected in the range of 0.4 to 1: 0.98. Such a composition usually has a melting point of 2000 ° C. or higher, a coefficient of thermal expansion of 6.0 × 10 −6 / ° C. or lower, and an electric resistance of 10 −5 Ω · cm.
It is as follows.

【0010】絶縁性基材としてサイアロンを主成分とす
るものを用いた場合、導体のタングステンは、焼成時又
は通電発熱時に、一部がケイ化され、このタングステン
のケイ化物は、熱膨張係数が大きく、強度が脆弱になる
ことが知られている。このため、通電のオン・オフ繰り
返しを行うサイクル試験によって、抵抗値が増大する等
の特性低下が起こりやすい。
[0010] When a material containing sialon as a main component is used as the insulating base material, a part of the tungsten of the conductor is silicified at the time of sintering or at the time of heat generation, and the silicide of the tungsten has a thermal expansion coefficient. It is known that the strength is large and the strength becomes weak. For this reason, a characteristic test such as an increase in the resistance value is likely to occur in a cycle test in which energization is repeatedly turned on and off.

【0011】また、炭化タングステンは、通常タングス
テンと炭素との原子比1:1のものが、超硬材料として
使用されているが、炭素が過剰になると、固溶できなく
なり炭素が遊離し、強度低下の原因となることが知られ
ている。実際に、炭素をあまり多くすると、1500℃
でのサイクル試験では、40000回程度で抵抗値が急
増する。タングステンと炭素との原子比が前記範囲内で
あれば、タングステンと炭素との比によって、上記サイ
クル試験で特性にはあまり影響を受けない。
Also, tungsten carbide having a tungsten to carbon atomic ratio of 1: 1 is usually used as a super hard material. It is known to cause a decrease. In fact, if you add too much carbon,
In the cycle test, the resistance value increases rapidly after about 40,000 times. If the atomic ratio of tungsten to carbon is within the above range, the characteristics of the above cycle test are not significantly affected by the ratio of tungsten to carbon.

【0012】通常、導体2は、ペースト状の材料を印刷
して設けられるため、ペースト化のために用いられる有
機バインダーが焼成時に一部炭素として残留するので、
この分だけ炭素量は増大する。例えば、ホットプレス焼
成では、通常1原子%程度の炭素が残留する。したがっ
て、タングステン−炭素複合系内部導体の組成を選択す
る場合には、この点を考慮して定めることが必要であ
る。
Usually, since the conductor 2 is provided by printing a paste-like material, a part of the organic binder used for making the paste remains as carbon during firing.
The carbon content increases by this amount. For example, in hot press firing, usually about 1 atomic% of carbon remains. Therefore, when selecting the composition of the tungsten-carbon composite internal conductor, it is necessary to determine in consideration of this point.

【0013】次に本発明電気抵抗素子の端子電極4とし
ては、高融点、低抵抗金属からなるものが用いられる
が、特にニッケル又はニッケルを主体とした合金例えば
ニッケル−タングステンなどが好ましい。
Next, as the terminal electrode 4 of the electric resistance element of the present invention, one made of a metal having a high melting point and a low resistance is used, and nickel or an alloy mainly containing nickel, for example, nickel-tungsten is preferable.

【0014】この本発明電気抵抗素子は、例えば窒化ケ
イ素を主体とする絶縁性基材1,1の一方に、タングス
テン−炭素複合系内部導体を印刷し、その上に残りの印
刷を施さない絶縁性基材を重ね合わせて焼成したのち、
所要の形状に裁断し、その際に形成された内部導体露出
部3に、端子電極4を、活性金属例えば銀、銅及びチタ
ンからなるペーストにより接合し、焼き付けることによ
って製造される。
The electric resistance element according to the present invention has an insulating substrate in which a tungsten-carbon composite inner conductor is printed on one of the insulating substrates 1 and 1 mainly made of, for example, silicon nitride, and the rest is not printed thereon. After stacking and sintering conductive base materials,
It is manufactured by cutting into a required shape, bonding the terminal electrode 4 to the exposed inner conductor 3 formed at that time with a paste made of an active metal such as silver, copper and titanium, and baking.

【0015】このようにして得られる本発明電気抵抗素
子は、耐酸化性端子電極、リード線又は板は一体的に取
り付けられており、酸化しやすい内部導体を完全に空気
より遮断しているため、素子全体としての耐酸化性が向
上し、高信頼性を確保できるのみならず、従来よりも少
ない工程で製造でき、構造も単純であるため、従来リー
ド線と電極との接続部で発生していた抵抗値不良、強度
不足による断線、接続部での酸化等の使用上のトラブル
もなくなり、低コスト、高信頼性を確保できる。
In the electric resistance element of the present invention thus obtained, the oxidation-resistant terminal electrode, the lead wire or the plate is integrally attached, and the internal conductor which is easily oxidized is completely shielded from the air. Oxidation resistance of the entire device is improved, high reliability can be ensured, and it can be manufactured with fewer steps than before, and the structure is simple. The troubles in use, such as the defective resistance value, disconnection due to insufficient strength, and oxidation at the connection part, are eliminated, and low cost and high reliability can be secured.

【0016】[0016]

【実施例】次に実施例によって本発明をさらに詳細に説
明する。
Next, the present invention will be described in more detail by way of examples.

【0017】実施例 窒化ケイ素92重量%、酸化ケイ素3.5重量%及び酸
化アルミニウム4.5重量%からなる絶縁性組成物をシ
ート成形し、その片面にタングステンと炭素との原子比
1:0.5からなる導電性組成物をパターン印刷して、
内部導体を形成した。この印刷面に印刷していないシー
トを重ね合わせたのち、1700℃で焼成し、焼結体を
得た。次いでこの焼結体を短冊状に裁断し、縦4cm、
横4mm、厚さ1mmの板状セラミックスを作製した。
このものの切断面には、端部にのみ内部導体の露出部が
認められた。次に、この内部導体の露出面に、Ti−A
g−Cu系活性金属[東京ブレイズ社製,「アクティブ
・アロイ・ブレイジング(Active Alloy
Brazing)」]からなる活性金属のペーストを塗
布し、厚さ200μm、幅1mmのニッケル板をコの字
状に加工した部品のコの字部分を嵌合し、アルゴン雰囲
気中、930℃で焼き付けることにより電気抵抗素子を
製造した。
EXAMPLE An insulating composition comprising 92% by weight of silicon nitride, 3.5% by weight of silicon oxide and 4.5% by weight of aluminum oxide was formed into a sheet, and one surface thereof was provided with an atomic ratio of tungsten to carbon of 1: 0. .5 by pattern printing the conductive composition comprising
An inner conductor was formed. After unprinted sheets were overlaid on the printing surface, they were fired at 1700 ° C. to obtain a sintered body. Next, this sintered body was cut into strips, and the length was 4 cm.
A plate-like ceramic having a width of 4 mm and a thickness of 1 mm was produced.
An exposed portion of the internal conductor was observed only at the end of the cut surface. Next, a Ti-A
g-Cu based active metal [manufactured by Tokyo Blaze Co., Ltd., "Active Alloy Blazing (Active Alloy)
Brazing)]], and a U-shaped part of a 200 μm-thick and 1 mm-wide nickel plate processed into a U-shape is fitted and baked at 930 ° C. in an argon atmosphere. Thus, an electric resistance element was manufactured.

【0018】比較例 実施例と同様にして作製した板状セラミックスの内部導
体の露出部に、ニッケルとタングステンの重量比1:1
の粉末混合物から調製したペーストを塗布し、真空中1
300℃で焼き付けたのち、ニッケルめっきを施し、厚
さ200μm、幅1mm、長さ25mmのリン青銅リー
ド線を銀ろう付けにより接続して、電気抵抗素子を製造
した。
COMPARATIVE EXAMPLE A 1: 1 weight ratio of nickel and tungsten was applied to the exposed portion of the internal conductor of the plate-shaped ceramic produced in the same manner as in the example.
Paste prepared from the powder mixture of
After baking at 300 ° C., nickel plating was applied, and a phosphor bronze lead wire having a thickness of 200 μm, a width of 1 mm, and a length of 25 mm was connected by silver brazing to manufacture an electric resistance element.

【0019】参考例 実施例及び比較例で得た電気抵抗素子の接合部より10
mm上部のセラミックス部分を、プロパンガスの燃焼炎
で加熱した。この燃焼炎は、家庭で使用される口火程度
の強さに調節した。このように加熱した結果、燃焼炎が
当った部分は暗赤色に赤熱した。このようにして、20
00時間耐炎試験した後の抵抗値の変化率、及びリード
線に1kgの負荷を加えて引張試験を行った結果を表1
に示す。
Reference Example 10 minutes from the junction of the electric resistance elements obtained in Examples and Comparative Examples.
The upper ceramic part was heated by the combustion flame of propane gas. This combustion flame was adjusted to the intensity of the sparks used in homes. As a result of the heating in this manner, the part hit by the combustion flame glowed dark red. Thus, 20
Table 1 shows the rate of change of the resistance value after the 00-hour flame resistance test, and the results of a tensile test performed by applying a load of 1 kg to the lead wire.
Shown in

【0020】[0020]

【表1】 [Table 1]

【0021】[0021]

【発明の効果】気体燃料や液体燃料の着火用発熱体とし
て好適な、短時間で急速昇温し、昇降温の繰り返し、高
温における酸化性に対し、優れた抵抗性を有する電気抵
抗素子を与える。
The present invention provides an electric resistance element which is suitable as a heating element for igniting a gaseous fuel or a liquid fuel and has excellent resistance to oxidization at a high temperature by rapidly raising and lowering the temperature in a short period of time and oxidizing at a high temperature. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明電気抵抗素子の構造の1例を示す斜視
図。
FIG. 1 is a perspective view showing an example of the structure of an electric resistance element of the present invention.

【符号の説明】[Explanation of symbols]

1 絶縁性基材 2 内部導体 3 導体露出領域 4 端子電極 5 活性金属 DESCRIPTION OF SYMBOLS 1 Insulating base material 2 Internal conductor 3 Conductor exposed area 4 Terminal electrode 5 Active metal

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 窒化ケイ素を主体とする絶縁性基材と、
タングステン−炭素複合系内部導体との積層焼結体と、
前記内部導体の露出部に同時焼き付けにより形成された
端子電極及びそれに接続したリード線とから構成された
ことを特徴とする電気抵抗素子。
1. An insulating substrate mainly composed of silicon nitride,
A laminated sintered body with a tungsten-carbon composite inner conductor,
An electric resistance element comprising: a terminal electrode formed by simultaneous baking on an exposed portion of the internal conductor; and a lead wire connected to the terminal electrode.
【請求項2】 窒化ケイ素を主体とする絶縁性基材と、
タングステン−炭素複合系内部導体とを積層して焼結
し、前記内部導体の露出部に、リード線を連結した高融
点低抵抗金属からなる板状又は線状端子電極を活性金属
により直接焼き付けることを特徴とする電気抵抗素子の
製造方法。
2. An insulating substrate mainly composed of silicon nitride,
Laminating and sintering a tungsten-carbon composite-based internal conductor, and directly baking a plate-shaped or linear terminal electrode made of a high-melting-point low-resistance metal connected to a lead wire on an exposed portion of the internal conductor with an active metal A method for manufacturing an electric resistance element, comprising:
【請求項3】 端子電極がニッケルを主体とする合金で
ある請求項2記載の製造方法。
3. The method according to claim 2, wherein the terminal electrode is an alloy mainly composed of nickel.
JP10129309A 1998-05-12 1998-05-12 Electric resistor element and manufacture thereof Withdrawn JPH11329801A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10129309A JPH11329801A (en) 1998-05-12 1998-05-12 Electric resistor element and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10129309A JPH11329801A (en) 1998-05-12 1998-05-12 Electric resistor element and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH11329801A true JPH11329801A (en) 1999-11-30

Family

ID=15006392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10129309A Withdrawn JPH11329801A (en) 1998-05-12 1998-05-12 Electric resistor element and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH11329801A (en)

Similar Documents

Publication Publication Date Title
CN101228396B (en) Brazed structure, ceramic heater, and glow plug
JP3664757B2 (en) Manufacturing method of ceramic heating element
KR100915576B1 (en) Ceramic heater, and glow plug using the same
CN102165841B (en) Ceramic heater
CN109363247A (en) A kind of preparation method of electronic cigarette and its chip heater and chip heater
JP3550093B2 (en) New ceramic igniter with improved oxidation resistance and method of use thereof
JP3137264B2 (en) New ceramic igniter and its use
US6689990B2 (en) Glow plug with electric conductor connected to metal sleeve
JP2005315447A (en) Ceramic heater and glow plug
WO2001055645A1 (en) Ceramic igniters and methods for using and producing same
JP3078418B2 (en) Ceramic heating element
JPH11329801A (en) Electric resistor element and manufacture thereof
CN100541001C (en) Ignition system
JPH0658539A (en) Manufacture of resistance type igniter for gaseous fuel
JPH07106055A (en) Quick temperature raising heating element and manufacture thereof
JP3588227B2 (en) Ceramic heater
JP3886684B2 (en) Ceramic heater
JP4044244B2 (en) Silicon nitride ceramic heater
JP2001244053A (en) Resistive element for heating
JP3762103B2 (en) Ceramic heater
JP3466399B2 (en) Ceramic heating element
JPH07296953A (en) Method for formation of silicon oxide protection film on surface of silicide conductor and ceramic heater element
JPH08255678A (en) Quick temperature rise heating element and its manufacture
JP3016669B2 (en) Ceramic heater
JP4025641B2 (en) Ceramic heater

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20050802