JPH11320380A - Mounting and demounting method for wire saw and its processing roller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw to smoothly move in an axial direction without the occurrence of a twist to a bearing unit when a processing roller is mounted and demounted between a pair of bearing units. SOLUTION: Processing rollers 15-17 are rotatably supported at two ends by a pair of bearing units 25 and 26. A moving device to exert a force of movement in an axial direction on the vicinity of the axis of the bearing unit 25 is provided. This moving device axially moves the bearing unit 25 toward a direction in which the bearing unit contacts and parts from the processing rollers 15-17 and the processing rollers 15-17 are mounted and demounted between the two bearing units 25 and 26.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a workpiece made of a hard and brittle material such as a semiconductor material, a magnetic material, and a ceramic using a wire, and a roller for processing the workpiece. And a method of attaching and detaching.

[0002]

2. Description of the Related Art As a conventional wire saw of this type, for example, a wire saw having a configuration as shown in FIG. 10 is known. That is, in this conventional configuration, the processing roller 81 is rotatably supported at both ends by the support frame 84 via the pair of bearing units 82 and 83. One bearing unit 82 is axially movably fitted into a shaft support tube 84 a of a support frame 84, and includes a bearing housing 85 and a shaft 86 rotatably supported in the bearing housing 85. I have.

[0003] Tapered recesses 81a and 81b are formed at both end surfaces of the processing roller 81, and the tapered recesses 8a and 81b are formed.
1a and 81b are shafts 8 of the dual bearing units 82 and 83.
6 and 87, the tapered protrusions 86a formed at the opposite ends.
87a. A bolt 90 is screwed from a shaft end of one bearing unit 82 to a screw hole 89 of a shaft 87 of the other bearing unit 83 via an insertion hole 88 at the center of the shaft 86 and the processing roller 81. . As a result, the processing roller 81 is moved to the dual bearing unit 8.
It is fixed between the shafts 86 and 87 of the 2,83.

[0004] An annular end plate 91 is fixed to the end surface of the bearing housing 85, and a lid 92 covering the head of the through bolt 90 is detachably attached to the outer end thereof.
A pair of guide holes 93 are formed in the outer peripheral edge of the end face plate 91. A guide bolt 94 is screwed to the end surface of the shaft support tube 84a so as to engage with one of the guide holes 93.
A moving bolt 95 is rotatably screwed to the end surface of the shaft support tube 84a so as to be engaged with the other guide hole 93,
A spring 96 is interposed between the head and the end face plate 91.

When the groove 81c for wire mounting formed on the outer periphery of the processing roller 81 is worn out and it is necessary to replace the processing roller 81 with a new one, the lid 92 is removed. Remove the through bolt 90. When the moving bolt 95 is rotated in this state, the intermediate large-diameter portion 95a is engaged with the end face plate 91, and the entire bearing unit 82 is moved in a direction away from the processing roller 81.

As a result, the tapered convex portion 86a of one shaft 86 is separated from the tapered concave portion 81a of the processing roller 81. Thereafter, when the processing roller 81 is moved in the axial direction in a direction away from the other bearing unit 83, the other tapered concave portion 81b is separated from the tapered convex portion 87a of the other shaft 87.
Thereby, the processing roller 81 is connected to the dual bearing unit 82,
83 can be removed. When a new processing roller 81 is mounted between the two bearing units 82 and 83, the operation may be performed in substantially the reverse order of the above-described removal.

[0007]

However, in this conventional wire saw, the moving bolt 95 is connected to the bearing unit 82.
Is screwed to the end face of the shaft support cylinder 84a via the guide hole 93 of the end face plate 91 at a position on one side separated from the axis of the shaft. By rotating the moving bolt 95, the entire bearing unit 82 is moved via the end face plate 91 in a direction in which the bearing unit 82 comes into contact with or separates from the processing roller 81.

For this reason, when the moving bolt 95 is rotated, a moving force is applied to one side of the bearing unit 82 away from the axis, and the other side is free. There is a problem that the unit 82 cannot be smoothly moved in the axial direction.

The present invention has been made by paying attention to such problems existing in the prior art. An object of the present invention is to provide a wire saw capable of smoothly moving a bearing unit in the axial direction of a bearing unit without causing unsteadiness when a processing roller is attached to and detached from a pair of bearing units, and a processing roller for the wire saw. It is an object of the present invention to provide a method of attaching and detaching a device.

[0010]

In order to achieve the above object, in the invention of the wire saw according to the first aspect, a processing roller is rotatably supported by a bearing unit, and a shaft end of the bearing unit is provided at a shaft end of the bearing unit. A moving device for applying a moving force in the axial direction of the bearing unit on the axis of the bearing unit is provided, and the moving device moves the bearing unit in a direction of coming into contact with and separating from the processing roller, thereby moving the processing roller. It is designed to be attached and detached between both bearing units.

According to a second aspect of the present invention, in the wire saw according to the first aspect, the moving device is configured to be detachable from a shaft end of a bearing unit. According to a third aspect of the present invention, in the wire saw according to the first or second aspect, the moving device is screwed with a screw disposed on an axis of the bearing unit so as to be relatively rotatable with the screw. And a rotating member for rotating the nut or screw.

According to a fourth aspect of the present invention, in the wire saw in which the processing roller is rotatably supported by the bearing unit, the moving force in the axial direction of the bearing unit on the axis of the bearing unit is provided. By providing, the bearing unit is moved in a direction of coming and going with the processing roller, and the processing roller is attached to and detached from the bearing unit.

According to a fifth aspect of the present invention, in the method of attaching and detaching the processing roller according to the fourth aspect, the bearing units are provided at both ends of the processing roller, and both bearing units are moved together in the axial direction. The processing roller is attached and detached between the two bearing units.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described below with reference to FIGS.

As shown in FIGS. 1 and 2, a cutting mechanism 13 is mounted on a base 11 of the wire saw of this embodiment via a pair of support frames 14. The cutting mechanism 13 includes three processing rollers 15, 16, 1 extending in parallel.
7 and a plurality of annular grooves 15a, 16a, 17a for wire mounting are formed on the outer periphery thereof.

A single wire 18 is wound around the annular grooves 15a, 16a, 17a of the processing rollers 15, 16, 17 in order. A wire guide mechanism 19 including a plurality of guide rollers 20 is provided at a front portion of the support frame 14. When the processing rollers 15, 16, 17 are rotated by a wire running motor (not shown), the wire 18 is fed onto the processing rollers 15, 16, 17 via a wire guide mechanism 19. Be run.
A work support mechanism 23 is disposed above the cutting mechanism 13 so as to be able to move up and down, and a work 24 made of a hard and brittle material is detachably set below the work support mechanism 23.

During operation of the wire saw, the wire 18 is driven by the processing rollers 15, 16, 1 of the cutting mechanism 13.
7, the work supporting mechanism 23 is lowered toward the cutting mechanism 13 by a lifting motor (not shown). At this time, a slurry containing loose abrasive grains is supplied from the slurry supply mechanism 21 onto the wire 18, and the work 24 is pressed against the wire 18 to make contact with the wire 18, and the work 24 is cut into a wafer by a lapping action.

Next, the processing rollers 15, 16, 17
The bearing configuration will be described. As shown in FIG. 3, the processing rollers 15 to 17 have a pair of bearing units 2 at both ends.
It is rotatably supported by the support frame 14 via the members 5 and 26. One bearing unit 25 is mounted on the support frame 14.
Is fitted in the shaft support cylinder 27 so as to be movable in the axial direction. The bearing unit 25 includes a cylindrical bearing housing 28 and a shaft 30 rotatably supported in the bearing housing 28 via a plurality of bearings 29.
It is composed of

A tapered projection 31 is formed at the inner end of the shaft 30 in the one bearing unit 25, and a tapered projection 33 is also formed at the inner end of the shaft 32 in the other bearing unit 26 to correspond to this. Are formed. Tapered recesses 34, 35 are formed on both end surfaces of the processing rollers 15 to 17, and these tapered recesses 34, 3 are formed.
5, the tapered projections 31, 33 of both shafts 30, 32 are engaged.

The shaft 3 of the one bearing unit 25
0 and the insertion holes 36 at the centers of the processing rollers 15 to 17,
37 are formed, and a screw hole 38 is formed at the inner end of the shaft 32 of the other bearing unit 26 so as to correspond to these. Then, a bolt 39 is screwed from a shaft end of one bearing unit 25 into a screw hole 38 through insertion holes 36 and 37, whereby the processing rollers 15 to 1 are screwed.
7 is fastened and fixed between the shafts 30 and 32 of the dual bearing units 25 and 26.

An annular end plate 40 is fixed to the end surface of the bearing housing 28 in the one bearing unit 25. At the outer end of the end plate 40, a cover 41 is provided with a plurality of screws 4.
2, the cover 41 covers the head of the through bolt 39. A pair of guide holes 43 are formed on the outer peripheral edge of the end face plate 40, and a pair of guide bolts 44 are screwed to the end surface of the shaft support tube 27 so as to engage with the guide holes 43.

Next, a moving device for moving one bearing unit 25 in the axial direction will be described. As shown in FIGS. 4 and 5, the moving device 45 includes the end face plate 40.
With the lid 41 removed from above and the through bolt 39 removed, it is detachably attached to the shaft end of the bearing unit 25.

That is, the moving device 45 has a mounting plate 46, a pair of substantially polished engaging holes 47 formed in the outer peripheral edge thereof, and a feed screw 48 protrudingly provided in the center of the outer surface. I have. After the head of each screw 42 on the end face plate 40 is inserted into the large diameter portion 47a of each engagement hole 47, the mounting plate 46 is rotated clockwise in FIG. By engaging with the small diameter portion 47b of the hole 47, the mounting plate 4
6 is attached to the outer end of the end face plate 40. As a result, the screw 48 is arranged so as to extend on the same axis as the bearing unit 25.

The moving device 45 is provided with a substantially gate-shaped mounting frame 49, and at both ends of the mounting frame 49 are formed engagement recesses 50 which open laterally. The engagement recesses 50 are engaged with the guide bolts 44 so that the attachment frame 49 is attached to the end of the shaft support tube 27. A feeding nut 51 is provided at the center of the mounting frame 49.
Are rotatably supported and screwed to the screw 48.

A rotating disk 52 as a rotating member is attached to the outer surface of the nut 51, and an operating handle 53 is protruded from the outer surface. When the nut 51 is rotated by the operation handle 53 via the rotary disk 52, a moving force in the axial direction of the bearing unit 25 is applied to the axis of the bearing unit 25 via the screw 48. As a result, the entire bearing unit 25 is moved in a direction of coming into contact with and separating from the processing rollers 15 to 17, and the processing rollers 15 to 17 are attached and detached between the two bearing units 25 and 26.

Next, the operation of the wire saw configured as described above will be described. When the annular grooves 15a to 17a on the processing rollers 15 to 17 are worn by the cutting of the work 24, the processing rollers 15 to 17 need to be replaced with new ones. In such a case, the cover 41 is first removed from the end face plate 40 and the through bolt 3
9 is removed to release the tightening and fixing between the shafts 30 and 32 of the dual bearing units 25 and 26 and the processing rollers 15 to 17.

Thereafter, as shown in FIGS. 4 and 5, the mounting plate 46 of the moving device 45 is fixed to the screw 42 on the end face plate 40, and the mounting frame 49 is fixed to the guide bolt 44 on the shaft support cylinder 27. Then, the moving device 45 is attached to the shaft end of the bearing unit 25. When the rotating disk 52 is rotated by the operation handle 53 in this state, the nut 51 and the screw 4 are rotated.
Through the engagement of 8, a tensile force is applied to the axis of the bearing unit 25 in the axial direction of the bearing unit 25, and the entire bearing unit 25 is moved in a direction away from the processing rollers 15 to 17.

As a result, the tapered convex portion 31 of one shaft 30 is separated from the tapered concave portion 34 of the processing rollers 15 to 17. Then, processing rollers 15 to
17 is moved in the axial direction in a direction away from the other bearing unit 26, the other tapered recess 35 is moved.
Is separated from the tapered projection 33 of the other shaft 32. Thus, the processing rollers 15 to 17 can be removed from between the two bearing units 25 and 26.

When the new processing rollers 15 to 17 are mounted between the two bearing units 25 and 26, the processing rollers 15 to 17 are connected to the shaft 32 of the other bearing unit 26 in substantially the reverse order of the removal. After that, the rotating disk 52 is rotated in the opposite direction by the operation handle 53. Then, a pressing force is applied to the axis of the bearing unit 25 in the axial direction, and the entire bearing unit 25 is moved in a direction approaching the processing rollers 15 to 17.

As a result, the tapered convex portion 31 of the shaft 30 is engaged with the tapered concave portion 34 of the processing rollers 15 to 17, and the processing rollers 15 to 17
It is sandwiched between the shafts 30 and 32 of the 5, 26 shafts. Thereafter, as shown in FIG. 3, when the moving device 45 is removed from the shaft end of the bearing unit 25 and the bolt 39 is screwed into the screw hole 38 through the insertion holes 36 and 37, the processing rollers 15 to 17 is fastened and fixed between the shafts 30 and 32. In this state, if the lid 41 is attached to the outer surface of the end face plate 40, the work of replacing the processing rollers 15 to 17 is completed.

The effects that can be expected from the above embodiment will be described below. In the wire saw of this embodiment, the processing rollers 15 to 17 are rotatably supported at both ends by a pair of bearing units 25 and 26. A moving device 45 for applying a moving force in the axial direction on the axis of the bearing unit 25 is provided at the shaft end of one bearing unit 25. The moving unit 45 moves the bearing unit 25 in the axial direction toward and away from the processing rollers 15 to 17 so that the processing rollers 15 to 17 are attached to and detached from the two bearing units 25 and 26. It has become.

For this reason, when the processing rollers 15 to 17 are attached to and detached from the pair of bearing units 25 and 26, the bearing unit 25 can be smoothly moved in the axial direction of the bearing unit 25 without becoming unsteady. it can. Therefore, the work of attaching and detaching the processing rollers 15 to 17 can be easily performed.

In the wire saw of this embodiment, the moving device 45 is configured to be detachable from the shaft end of the bearing unit 25. For this reason, the wire saw can be reduced in size, and when the processing rollers 15 to 17 are attached to and detached from the bearing units 25 and 26, the moving device 45 is used.
Is mounted on the shaft end of the bearing unit 25, and the bearing unit 25 can be easily and smoothly moved.

In the wire saw of this embodiment, the moving device 45 includes a screw 48 disposed on the axis of the bearing unit 25, a nut 51 screwed relatively to the screw 48, and a nut 51. Alternatively, it is constituted by a rotating disk 52 as a rotating member for rotating the screw 48. For this reason, the bearing unit 25 can be easily and smoothly moved despite the simple structure of the moving device 45.

In the method of attaching and detaching the processing rollers in the wire saw of this embodiment, the processing rollers 15 to 17 are moved by applying a moving force in the axial direction on the axis of one of the bearing units 25. 15 ~
17 to move in the direction of contact and separation with the dual bearing unit 25,
26. For this reason, when attaching and detaching the processing rollers 15 to 17 between the pair of bearing units 25 and 26, the bearing unit 25 can be smoothly moved in the axial direction of the bearing unit 25 without causing unsteadiness.

(Second Embodiment) Next, a second embodiment of the present invention will be described.
This embodiment will be described focusing on the differences from the first embodiment.

In the second embodiment, as shown in FIGS. 6 to 8, a locking groove 56 is formed on the inner peripheral surface of the end plate 40 of one of the bearing units 25. A pair of insertion notches 57 are formed on the outer side.
In the moving device 45 of this embodiment, a feed screw 48 is rotatably supported at the center of the mounting frame 49. When the mounting frame 49 is mounted on the end surface of the shaft support 27, the screw 48 Are extended on the same axis as the bearing unit 25.

A feed nut 51 is screwed into the screw 48, and a detent pin 5 protruding from the inner surface of the mounting frame 49.
8 is prevented from rotating. A pair of locking projections 59 are protruded from the outer peripheral edge of the nut 51, and the locking projections 59 are inserted and locked into the locking grooves 56 from the insertion notches 57, so that the nut 51 is attached to the end face plate 40. To be locked.

A connecting shaft 60 is protruded from an outer end of the screw 48, and the operating lever 6 as a rotating member is connected to the connecting shaft 60.
1 are detachably connected. And
When the screw 48 is rotated by the operation lever 61, a moving force in the axial direction is applied to the axis of the bearing unit 25 via the nut 51. As a result, the entire bearing unit 25 is moved in a direction of coming into contact with and separating from the processing rollers 15 to 17, and the processing rollers 15 to 17 are attached and detached between the two bearing units 25 and 26. Therefore, the second embodiment also provides substantially the same effects as the first embodiment.

(Third Embodiment) Next, a third embodiment of the present invention will be described.
This embodiment will be described focusing on the differences from the first embodiment.

In the third embodiment, as shown in FIG. 9, each bearing unit 25, 26 supporting both ends of the processing rollers 15, 16, 17 is provided inside a shaft support cylinder 27 of the support frame 14. Are fitted so as to be movable in the axial direction.
Also, the shafts 30, 32 of the bearing units 25, 26
Is rotatably supported via a plurality of bearings 64 in a bearing housing 28 fitted inside the shaft support 27. Flanges 30a and 32a are protrudingly provided on the outer periphery of the inner ends of the shafts 30 and 32.
One ends of the a and 32a are opposed to the inner end surface of the bearing housing. Further, annular engagement grooves 67 are formed at the outer ends of the shafts 30 and 32, respectively.

A pair of moving devices 69 are arranged at the shaft ends of the bearing units 25 and 26 to face each other. Each moving device 69 includes an engaging member 70 detachably engaged with the engaging groove 67 of the shaft 30, 32, and a cylinder 71 for moving the engaging member 70 in the axial direction of the shaft 30, 32. ing. Each moving device 69 can be moved in a direction perpendicular to the plane of FIG. 9 by a transport device (not shown). That is, the movement device 69 moves between the engagement position where the engagement member 70 is engaged with the engagement groove 67 and the standby position where the engagement of the engagement member 70 with the engagement groove 67 is released. It has become.

When the two moving devices 69 are always in the standby position at the standby position, and it is necessary to replace or maintain the processing rollers 15 to 17 with new ones, first, the through bolt 39 is removed. Thereafter, the moving members 69 are moved from the standby position to the engaging position, so that the engaging member 70 is engaged with the engaging groove 67. In this state, when the rod 71a of the cylinder 71 is retracted, a moving force in the axial direction is applied to the shafts 30, 32 of the two bearing units 25, 26, and the bearing housing 28 is moved through the bearing 64 and the flange portions 30a, 32a. Are also integrally pulled out from the shaft support cylinder 27, and the bearing units 25 and 26 are simultaneously moved in the directions away from each other.

Therefore, also in the third embodiment,
It has substantially the same effects as the first embodiment. In the third embodiment, the dual bearing unit 2
5 and 26 are moved in the axial direction, and the processing rollers 15 to 17 are moved to the dual bearing units 25 and
26. For this reason, at the time of attaching and detaching the processing rollers 15 to 17 between the bearing units 25 and 26, the respective bearing units 25 and 26 are respectively moved to the processing rollers 15 to 17 without moving the processing rollers 15 to 17 in the axial direction. By simply moving the processing rollers 15 to 17 in the axial direction by the engagement distance of, the processing rollers 15 to 17 can be attached and detached, and the attaching and detaching work can be simplified.

This embodiment can be embodied with the following modifications. In the first and second embodiments, the moving device 45 is configured to be opposed to a fixed position without being attached to or detached from the shaft end of the bearing unit 25.

In the first and second embodiments, the moving device 45 is provided only on the other bearing unit 26 or on both bearing units 25 and 26.

[0047]

The present invention is configured as described above, and has the following effects. According to the first and fourth aspects of the present invention, when the processing roller is attached to and detached from the pair of bearing units, the bearing unit is smoothly moved in the axial direction of the bearing unit without causing unsteadiness. be able to.

According to the second aspect of the present invention, the size of the wire saw can be reduced, and at the time of attaching and detaching the processing roller between the bearing units, the moving device is mounted on the shaft end of the bearing unit. The bearing unit can be easily and smoothly moved.

According to the third aspect of the present invention, the bearing unit can be easily and smoothly moved despite the simple structure of the moving device. According to the invention as set forth in claim 5, when the processing roller is attached to and detached from the bearing units, the processing roller is moved only in the axial direction without moving the processing roller in the axial direction. Can be attached and detached, and the attaching and detaching work can be simplified.

[Brief description of the drawings]

FIG. 1 is a side sectional view of a main part showing a first embodiment of a wire saw of the present invention.

FIG. 2 is a perspective view showing a cutting mechanism of the wire saw.

FIG. 3 is a cross-sectional view illustrating a main part of a bearing of a processing roller in an enlarged manner.

FIG. 4 is an enlarged sectional view of a main part of the processing roller moving device.

FIG. 5 is a sectional view taken along line 5-5 in FIG. 4;

FIG. 6 is an essential part cross-sectional view showing a second embodiment of the bearing configuration of the processing roller.

FIG. 7 is a sectional view of an essential part showing a moving device of the processing roller.

FIG. 8 is a sectional view taken along line 8-8 in FIG. 7;

FIG. 9 is a sectional view of an essential part showing a third embodiment of a moving device for a processing roller.

FIG. 10 is a sectional view of a main part showing a conventional device for moving a processing roller.

[Explanation of symbols]

13: cutting mechanism, 15, 16, 17 ... processing roller, 1
5a, 16a, 17a: annular groove, 18: wire, 24 ...
Work, 25, 26: Bearing unit, 27: Shaft support, 2
8 ... bearing housing, 30, 32 ... shaft, 40 ... end face plate, 44 ... guide bolt, 45 ... moving device, 46 ... mounting disk, 48 ... screw, 49 ... mounting frame, 51 ... nut, 5
2 ... a rotating disk as a rotating member, 61 ... an operating lever as a rotating member, 69 ... another moving device.

Claims (5)

[Claims] A moving device for rotatably supporting a processing roller by a bearing unit and applying a moving force to the shaft end of the bearing unit on the axis of the bearing unit in the axial direction of the bearing unit. A wire saw in which a bearing unit is moved by a moving device in a direction of coming into contact with and separating from the processing roller, and the processing roller is attached to and detached from both bearing units. 2. The wire saw according to claim 1, wherein the moving device is configured to be detachable from a shaft end of a bearing unit. 3. The moving device comprises a screw disposed on an axis of the bearing unit, a nut screwed to the screw so as to be relatively rotatable, and a rotating member for rotating the nut or screw. A wire saw according to claim 1 or claim 2. 4. A wire saw in which a processing roller is rotatably supported by a bearing unit, by applying a moving force in the axial direction of the bearing unit on the axis of the bearing unit, thereby bringing the bearing unit into and out of contact with the processing roller. A method of attaching / detaching a processing roller in a wire saw in which the processing roller is moved to / from the bearing unit by being moved in a direction in which the roller is moved. 5. The processing unit according to claim 4, wherein the bearing units are provided at both ends of the working roller, and the two bearing units are moved together in the axial direction so that the working roller is attached and detached between the two bearing units. How to attach / detach a processing roller in a wire saw.