JPH11316914A - Manufacture of magnetoresistive effect magnetic head and magnetoresistive effect magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of the maganetoresisting effect magnetic head which can obtain sufficient life and stable output even in the case of a fast slide on a magnetic tape and a the magnetoresistive effect magnetic head which is manufactured by the manufacturing method. SOLUTION: A yoke MR head 1 is manufactured by carrying out a process for stacking a nonmagnetic material constituting a magnetic gap 12 and a magnetic material constituting an upper-layer core 13 on a magnetic material constituting a lower-layer core 11 in order, a process for removing the magnetic material constituting at least the upper-layer core 11 except the parts corresponding to a front-end core part 14 and a rear-end core part 15, a process for forming a 1st protection layer 4 constituting a plane whose top surface is almost is level with the tow surfaces of the front-end core part 14 and rear-end core layer 15, and a process for forming an MR element 3 on the 1st protection layer 4 between the front-end fore part 14 and rear-end core part 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method of manufacturing a magnetoresistive head using a magnetoresistive element for detecting a magnetic field, and a magnetoresistive head manufactured by the method.

[0002]

2. Description of the Related Art In a recording / reproducing apparatus for recording / reproducing a signal on / from a magnetic tape such as a video tape recorder (VTR) or a data recorder used for data backup, a magnetic head made of ferrite has conventionally been used as a magnetic head. A so-called metal-in-gap magnetic head in which a metal magnetic film is formed on the magnetic gap forming surface of the core, and a so-called laminated magnetic head in which a metal magnetic film is sandwiched between a pair of non-magnetic materials Inductive heads are used.

However, in the recording / reproducing apparatus, it is required to use a magnetic head capable of obtaining a sufficient reproducing output with a narrower track in order to cope with digitalization and multimedia in the future.

In order to meet such a demand, a magnetoresistive head (hereinafter, referred to as an MR head) using a magnetoresistive effect, which is used as a reproducing magnetic head in a hard disk device or the like, is used in the recording / reproducing apparatus. Techniques for use as a reproducing magnetic head have been proposed.

For example, in a digital compact cassette (DCC) apparatus using a magnetic tape as a recording medium, a so-called yoke type M is used as a reproducing magnetic head.
A high reproduction output is obtained by using an R head.

In the yoke type MR head, a gap is provided in a part of one of a pair of cores made of a soft magnetic material, and an element exhibiting a magnetoresistive effect (hereinafter referred to as an MR element) is arranged in the gap. It is generally manufactured by a thin film process. In this yoke type MR head, the MR element is not exposed from the medium sliding surface, and the magnetic field generated from the magnetic tape is
The magnetic flux is guided to one of the cores from a magnetic gap which is an interval on the medium sliding surface side between the pair of cores and is transmitted to the MR element.

In this yoke type MR head, as the material of the magnetic core, a permalloy alloy or an amorphous alloy which does not require high-temperature heat treatment is used. Also, this yoke type M
In the R head, the depth (gap depth) of the magnetic gap is about 2 μm.

[0008]

When the above-described yoke type MR head is used as a magnetic head for reproducing a magnetic tape running at a low speed like a digital compact cassette device, the above-described yoke type MR head is used. As described above, if the magnetic core is made of permalloy or the like and the gap depth is about 2 μm, sufficient life and output can be obtained by taking appropriate measures.

However, a helical scan type recording apparatus in which a magnetic head slides at a high speed with respect to a magnetic tape, such as a digital VTR, is used in the above-described yoke type M.
When an R head is used, it is necessary to use a soft magnetic material having more excellent wear resistance and to secure a sufficient gap depth.

The present invention has been proposed to solve the above-mentioned drawbacks of the yoke type MR head.
Provided is a method of manufacturing a magnetoresistive head capable of obtaining a sufficient life and a stable output even when sliding at high speed with respect to a magnetic tape, and a magnetoresistive head manufactured by this method. The purpose is to do.

[0011]

The present inventors have made intensive studies to achieve the above-mentioned object, and as a result, have found that a yoke type MR
It was concluded that it was necessary to use a material with excellent wear resistance for the magnetic core of the head. To use a material having excellent wear resistance for the magnetic core, a laminated body is formed by laminating a magnetic material forming the lower core, a non-magnetic material forming the magnetic gap, and a magnetic material forming the upper core. After doing
The laminated body is processed to form a magnetic core having a desired shape,
It has been found that it is effective to form a magnetoresistance effect element after forming a nonmagnetic layer and flattening the surface.

The method of manufacturing a magneto-resistance effect type magnetic head according to the present invention has been completed on the basis of such findings, and the lower core and the upper core have a magnetic gap on the medium facing surface side via a magnetic gap. The upper core is separated into a front core portion on the medium facing surface side and a rear core portion separated from the medium facing surface by the gap,
When manufacturing a magneto-resistance effect type magnetic head in which a magneto-resistance effect element is erected between a front core portion and a rear end core portion, a non-magnetic material forming a magnetic gap on a magnetic material forming a lower layer core and A step of sequentially laminating a magnetic material constituting the upper core, a step of removing at least the magnetic material constituting the upper core except for portions corresponding to the leading core portion and the trailing core portion, and Forming a nonmagnetic layer substantially coplanar with the upper surface of the rear end core portion, and a magnetoresistive element on the nonmagnetic layer so as to extend between the front end core portion and the rear end core portion. And a step of forming

According to the method of manufacturing a magneto-resistance effect type magnetic head, as the magnetic material forming the upper core and the magnetic material forming the lower core, it is possible to use a material having high wear resistance that cannot be formed in the plating step. At the same time, the formation of the magnetoresistive element becomes easy, and a magnetoresistive head having good wear characteristics can be easily manufactured.

In the method of manufacturing a magneto-resistance effect type magnetic head, it is desirable to use an insulating material for electrically insulating the lower core and the upper core as the nonmagnetic material forming the magnetic gap.

As described above, if the insulating material that electrically insulates the lower core and the upper core is used as the nonmagnetic material that forms the magnetic gap, the lower core and the upper core are electrically insulated. It is not necessary to separately form an insulating film for the purpose, the number of steps can be reduced, and a decrease in the efficiency of the magnetic core due to the formation of the insulating film in addition to the non-magnetic material constituting the magnetic gap is suppressed. can do.

In this method of manufacturing a magneto-resistance effect type magnetic head, of the pair of electrodes for supplying a sense current to the magneto-resistance effect element, the first electrode at the ground potential is connected to the tip core portion by the magnetic field. A second electrode serving as a power supply potential is connected to at least one of the rear end core and the rear end core of the magnetoresistive element, while being connected to at least one of the front end cores of the resistance effect element. It is desirable.

As described above, by connecting the first electrode having the ground potential to at least one of the tip core and the tip core of the magnetoresistive element, the manufactured magnetoresistive head can be manufactured. Fluctuations in potential caused by sliding with respect to the magnetic recording medium can be suppressed, and generation of noise and the like can be prevented.

In this method of manufacturing a magneto-resistance effect type magnetic head, it is desirable to use a magnetic ferrite substrate as a magnetic material constituting the lower core.

As described above, by using the magnetic ferrite substrate as the magnetic material constituting the lower core, the number of steps can be reduced and a magnetoresistive head can be manufactured more easily.

In this method of manufacturing a magneto-resistance effect type magnetic head, the magnetic material forming the lower core, the non-magnetic material forming the magnetic gap, and the magnetic material forming the upper core have a thickness of 400. It is desirable to perform a heat treatment at a temperature of not less than ° C.

As described above, the heat treatment at 400 ° C. or more is performed on the laminate of the magnetic material forming the lower core, the non-magnetic material forming the magnetic gap, and the magnetic material forming the upper core. Fe—Al—Si alloy, F
When e-Ru-Ga-Si alloy, Fe-Ta-N alloy, etc. are used, the crystal regularity of these magnetic materials is increased to improve the wear resistance and soft magnetic properties of the lower and upper cores. Can be done.

In this method of manufacturing a magneto-resistance effect type magnetic head, it is desirable to form a plurality of sets of the front and rear core portions and the magneto-resistance effect element in parallel.

As described above, by forming a plurality of sets of the front and rear core portions and the magnetoresistive element in parallel, a magnetoresistive head having a plurality of magnetosensitive portions can be manufactured. Can be.

In the method of manufacturing a magneto-resistance effect type magnetic head, a pair of substrates on which a front-end core portion, a rear-end core portion and a magneto-resistance effect element are formed are separated from each other. It is desirable that the surfaces on which the magnetoresistive effect elements are formed are butted together via an insulating layer to be joined and integrated.

As described above, the pair of substrates on which the front and rear core portions and the magnetoresistive element are formed are joined and integrated via the insulating layer, thereby providing a magnetic field having a plurality of magnetically sensitive portions. A resistance effect type magnetic head can be easily manufactured.

The magnetoresistive head according to the present invention has been completed based on the above-mentioned findings, and the lower core and the upper core protrude from the medium facing surface side through a magnetic gap. The upper core is separated by a gap into a leading core on the medium facing surface side and a trailing core separated from the medium facing surface, and the upper core is separated between the leading core and the trailing core. In the magnetoresistive head having a magnetoresistive element mounted thereon, a front core portion and a rear end core portion comprise a nonmagnetic material constituting a magnetic gap on a magnetic material constituting a lower core and an upper core. The magnetic material constituting at least the upper layer core of the laminate obtained by sequentially laminating the magnetic materials to be formed is formed by removing the magnetic core material except for the portions corresponding to the front-end core portion and the rear-end core portion. Usually The effect element is formed on a non-magnetic layer whose upper surface is substantially flush with the upper surfaces of the front-end core section and the rear-end core section so as to be installed between the front-end core section and the rear-end core section. It is characterized by:

In this magnetoresistive head, a front core portion and a rear end core portion are sequentially formed of a non-magnetic material forming a magnetic gap and a magnetic material forming an upper layer on a magnetic material forming a lower layer core. Since the magnetic material constituting at least the upper layer core of the laminated body is formed by being removed except for the portions corresponding to the leading core portion and the trailing core portion, the magnetic material constituting the upper layer core is removed. Good wear characteristics can be exhibited by using a material having high wear resistance, which cannot be produced in the plating step, as the material and the magnetic material constituting the lower core. Also, in this magnetoresistive head, the upper surface is substantially the same as the upper surfaces of the front core portion and the rear core portion so that the magnetoresistive element is provided between the front core portion and the rear core portion. Since it is formed on the non-magnetic layer constituting the plane, manufacturing is easy.

In the magnetoresistive head according to the present invention, it is preferable that the lower core and the upper core are electrically insulated by a non-magnetic material constituting a magnetic gap.

In this magneto-resistance effect type magnetic head, the lower core and the upper core are electrically insulated by the non-magnetic material constituting the magnetic gap, thereby electrically insulating the lower core and the upper core. It is not necessary to separately provide an insulating film, and a decrease in the efficiency of the magnetic core can be suppressed.

The magneto-resistance effect type magnetic head according to the present invention includes first and second electrodes for supplying a sense current to the magneto-resistance effect element. The second electrode, which is connected to at least one of the tip core portion and the tip core portion side of the magnetoresistive effect element and is set to a power supply potential, is connected to the rear end core portion and the rear end core of the magnetoresistive effect element. It is desirable to be connected to at least one of the unit sides.

In this magnetoresistive head, the first electrode, which is set to the ground potential, is connected to at least one of the tip core and the tip core of the magnetoresistive element. Fluctuations in potential caused by sliding with respect to the medium can be suppressed, and generation of noise and the like can be prevented.

In the magnetoresistive head according to the present invention, it is preferable that the lower core is made of a magnetic ferrite substrate.

In this magnetoresistive head, the configuration can be simplified by forming the lower core from a magnetic ferrite substrate.

In the magnetoresistive head according to the present invention, the lower core and the upper core are desirably formed through a heat treatment at 400 ° C. or more.

In this magnetoresistive head, the lower core and the upper core are formed through a heat treatment at 400 ° C. or more, so that the magnetic material forming the lower core and the magnetic material forming the upper core are formed. When an Fe-Al-Si alloy, Fe-Ru-Ga-Si alloy, Fe-Ta-N alloy, or the like is used as the material, the crystal regularity of these magnetic materials is increased, and the wear resistance of the lower and upper cores is increased. Properties and soft magnetic characteristics can be improved.

Further, in the magnetoresistive head according to the present invention, it is preferable that a plurality of sets of the front and rear core portions and the magnetoresistive element are formed in parallel.

In this magnetoresistive head, a plurality of sets of the front and rear cores and the magnetoresistive element are arranged in parallel to form a plurality of magneto-sensitive sections.
Signals recorded on a plurality of recording tracks can be reproduced simultaneously.

Further, the magnetoresistive head according to the present invention is characterized in that the front and rear cores of a pair of substrates on which the front and rear cores and the magnetoresistive element are formed are magnetically coupled to each other. Desirably, a plurality of magneto-sensitive portions are formed by abutting surfaces on which the resistance effect element is formed.

The magneto-resistance effect type magnetic head can be easily manufactured by forming a plurality of magneto-sensitive portions as described above.

[0040]

Embodiments of the present invention will be described below with reference to the drawings.

In the magnetoresistive head according to the present invention (hereinafter referred to as MR head 1), a magnetic core 10 is formed on a first substrate 2 as shown in FIG. A magnetoresistive effect element (hereinafter referred to as MR element 3) that exhibits a magnetoresistive effect is formed.

As the first substrate 2, for example, Al ₂ O ₃
-TiC based non-magnetic substrate, CaO-TiO ₂ -NiO
A non-magnetic substrate or the like having excellent sliding characteristics and wear characteristics is used.

The magnetic core 10 includes a lower core 11 formed on the first substrate 2 and an upper core 13 formed on the lower core 11 with a gap film 12 interposed therebetween. A part on the side of the surface 1a and a part on the side separated from the medium sliding surface 1a protrude. And
The protruding portion on the side of the medium sliding surface 1a constitutes a magnetic sensing portion. In this specification, the protruding portion of the magnetic core 10 on the side of the medium sliding surface 1a is referred to as a front end core portion 14, and the protruding portion on the side away from the medium sliding surface 1a is referred to as a rear end core portion 15. Call.

The material of the lower core 11 is, for example, F
e-Al-Si alloy, Fe-Ru-Ga-Si alloy, F
A magnetic material such as an e-Ta-N alloy is used. In these magnetic materials, the degree of crystal regularity is increased by performing a heat treatment, and the wear resistance and soft magnetic properties are improved. Therefore, when these magnetic materials are used as the material of the lower core 11, it is preferable to perform a heat treatment at 400 ° C. or more.

Further, in the MR head 1 according to the present invention, a soft magnetic ferrite substrate may be used as the lower core 11, and the lower core 11 may also serve as the first substrate 2. By making the lower core 11 also serve as the first substrate 2 in this manner, the configuration of the MR head 1 can be simplified, and a decrease in the efficiency of the magnetic core 10 can be suppressed.

As a material of the gap film 12, for example,
_{SiO 2, Al 2 O 3,} MgO 2 and AlN, a non-magnetic material such as BN is used. If a non-magnetic non-conductive material is used as the material of the gap film 12, there is no need to separately provide an insulating film for electrically insulating the lower core 11 and the upper core 13. Therefore, the gap film 1
As the second material, it is preferable to use a non-magnetic non-conductive material.

The material of the upper core 13 is, for example, the Fe—Al—Si alloy or Fe—Ru used for the lower core 11.
-A magnetic material such as a Ga-Si alloy or an Fe-Ta-N alloy is used. Even when these magnetic materials are used as the material of the upper layer core 13, it is preferable to perform a heat treatment at 400 ° C. or higher in order to improve wear resistance and soft magnetic characteristics.

The magnetic core 10 of the MR head 1 according to the present invention
The laminated body formed by sequentially laminating the material of the lower core 11, the material of the gap film 12, and the material of the upper core 13 leaves a front core portion 14 and a rear core portion 15,
The lower core 11 is formed by being removed from an intermediate portion in the thickness direction.

In the MR head 1, the gap film 12 of the tip core portion 14 forms a magnetic gap G. Therefore, the length L of the tip core portion 14 is the gap depth. The length L of the tip core portion 14, that is, the gap depth, is M due to wear of the magnetic gap.
The length is set to an optimum length, for example, about 3 μm in consideration of the life of the R head 1 and the efficiency of the magnetic core 10.

In the MR head 1, the width W of the tip core portion 14 is set to a size corresponding to the width of the recording track of the magnetic recording medium.

Around the front end core portion 14 and the rear end core portion 15,
That is, an insulating material is filled in a removed portion of a laminated body in which the material of the lower core 11, the material of the gap film 12, and the material of the upper core 13 are sequentially laminated, and the upper surface is formed by the tip core portion 14 and A first protective layer 4 which is substantially flush with the upper surface of the rear end core portion 15 is formed.

As the insulating material constituting the first protective layer 4, an oxide or an organic material may be used. However, SiO ₂ , Al ₂ O ₃ , Mg
It is preferable to use a material having good body wear such as O ₂ .

The MR element 3 is formed by laminating, for example, a soft magnetic film having a magnetoresistance effect and an SAL film for applying a bias magnetic field by the SAL bias method to the soft magnetic film. The SAL film functions to improve the linearity of the detection signal by applying a bias magnetic field to the soft magnetic film having a magnetoresistive effect. The MR element 3 of the MR head 1 according to the present invention is not limited to the SAL bias type as described above. For example, an MR element using the spin valve effect or a ferromagnetic tunnel effect is used. It may be an MR element.

The MR element 3 is formed on the first protective layer 4 between the front core section 14 and the rear core section 15. In the MR element 3, one end in the longitudinal direction is connected to the front core 14, and the other end in the longitudinal direction is connected to the rear core 15.

The MR element 3 has a first electrode 5a and a second electrode 5 for supplying a sense current to the MR element 3.
b is connected. First electrode 5a and second electrode 5
b is formed by forming a conductive material such as Cu by sputtering or the like. One end of the first electrode 5 a is connected to one end of the MR element 3 connected to the distal end core 14. One end of the second electrode 5 b is connected to the other end of the MR element 3 connected to the rear end core 15.

Incidentally, the MR head 1 has the same configuration, even if one end of the first electrode 5a is connected to the front end core portion 14 and one end of the second electrode 5b is connected to the rear end core portion 15. M
It is possible to supply a sense current to the R element 3. Further, in the MR head 1, it is desirable that the potential of the first electrode 5a is set to the ground potential and the potential of the second electrode 5b is set to the power supply potential. As described above, the MR head 1 sets the potential of the first electrode 5a to the ground potential,
By setting the potential of the electrode 5b as the power supply potential, it is possible to suppress the fluctuation of the potential caused by sliding with respect to the magnetic recording medium, and effectively prevent the occurrence of noise and the like.

Also, the second electrode on the other end of the first electrode 5a and the second
On the other end of the electrode 5b, external connection terminals 6a and 6b made of a conductive material are provided, respectively. In the MR head 1, the first electrode 5a and the second electrode 5b are connected to these external connection terminals. It is connected to a sense current supply source via 6a and 6b.

The front end core section 14 and the rear end core section 15 on which the MR element 3 and the electrodes 5a and 5b are formed, and the first protective layer 4
On the top, so as to cover the MR element 3 and the electrodes 5a and 5b,
The insulating material is filled, and the second protective layer 7 is formed. The upper surface of the second protective layer 7 has external connection terminals 6a,
6b is substantially coplanar with the upper surface.

As the insulating material constituting the second protective layer 7, similarly to the first protective layer 4, an oxide or an organic substance may be used.
It is preferable to use a material having good body wear properties such as SiO ₂ , Al ₂ O ₃ , and MgO ₂ .

On the second protective layer 7, a second substrate 8 is provided on the medium sliding surface 1a side. The MR head 1 has an upper surface on the side of the second protective layer 7 that is separated from the medium sliding surface 1a by providing the second substrate 8 on the medium sliding surface 1a side on the second protective layer 7. And external connection terminal 6
The upper surfaces of a and 6b are exposed to the outside.

The MR head 1 configured as described above has
By sliding on the magnetic recording medium, a magnetic field from the magnetic recording medium is applied to the MR element 3 via the tip core section 14. The MR element 3 changes its resistance value according to the applied magnetic field. The MR head 1 reads a magnetic signal recorded on a magnetic recording medium by detecting a change in the resistance value of the MR element 3.

In the MR head 1, the leading core 14 and the trailing core 15 are formed by sequentially laminating the material of the lower core 11, the material of the gap film 12, and the material of the upper core 13. Since the body is formed by removing the body from the middle part in the thickness direction of the lower core 11 except for the parts to be the front core part 14 and the rear core part 15, the material of the upper core 11 and the lower core 13 are formed. As the material, a material having high wear resistance, which cannot be produced in the plating step, can be used, and good wear characteristics can be exhibited.

The MR head 1 has an MR element 3
Is formed on the first protective layer 4 so as to be bridged between the front end core section 14 and the rear end core section 15, so that manufacturing is easy.

Next, a method of manufacturing the MR head 1 configured as described above will be described.

When manufacturing the MR head 1, first, FIG.
As shown in FIG. 3, a magnetic material 22 to be the lower core 11, a non-magnetic material 23 to be the gap film 12, and an upper layer The magnetic material 24 to be the core 13 is sequentially formed into a film by sputtering or the like, and a laminated body is formed. Here, on the first substrate material 21 and the non-magnetic material 23, the magnetic material 22,
A base film serving as a base of the base film 24 may be formed.
When the underlayer is formed in this manner, the magnetic materials 22 and 2
4 can have better soft magnetic properties.
However, when the base film serving as the base of the magnetic film 24 is formed using a non-magnetic material, each thickness is adjusted so that the total thickness of the non-magnetic material 23 and the base film becomes the gap length. There is a need.

Here, as the magnetic material 22 to be the lower core 11 or the magnetic material 24 to be the upper core 13, for example, Fe—Al—Si alloy or Fe—Ru—Ga—Si
When a magnetic material such as an alloy or an Fe—Ta—N alloy is used, it is desirable to perform a heat treatment at 400 ° C. or higher on the laminate. Thereby, the regularity of the crystal of the magnetic material can be increased, and the wear resistance and the soft magnetic properties can be further improved.

Next, as shown in FIG. 4 and FIG. 5, for example, the above-mentioned laminated body is subjected to ion milling or the like, so that the leading end core portion 14 and the trailing end core portion 15 are formed. At this time, the tip core portion 14 is formed such that its length L is a desired gap depth and its width W is a dimension corresponding to the track width of the recording track.

Next, as shown in FIGS. 6 and 7, an insulating material is formed or filled on the laminated body subjected to the ion milling process, the surface is flattened, and the first protective layer is formed. 4 are formed. In this case, the first protective layer 4 may be formed by depositing an oxide such as Al ₂ O ₃ or SiO ₂ by sputtering or the like, or by filling the glass at an increased temperature. Good. In addition, the flattening is performed, for example, by using a polishing device using diamond, the upper surface of the insulating material formed or filled on the stacked body is approximately equal to the upper surface of the front core portion 14 and the upper surface of the rear core portion 15. Polishing is performed until the same plane is formed. Thereby, the tip core portion 1
4 and the upper surface of the rear end core portion 15 are formed on the first protective layer 4.
Is exposed from the upper surface of the camera.

Next, as shown in FIG. 8 and FIG.
The MR element 3 is formed on the first protective layer 4. The MR element 3 is formed, for example, by sequentially forming a soft magnetic film having a magnetoresistive effect and a SAL film for applying a bias magnetic field by the SAL bias method to the soft magnetic film. Here, the outer shape of the MR element 3 may be formed, for example, by forming the above-described films over the entire surface and then performing ion milling or the like.
The R element 3 may be formed by a so-called lift-off method using a mask corresponding to the outer shape.

Next, as shown in FIG. 10 and FIG.
a conductive material such as u is formed by sputtering or the like,
First electrode 5 for supplying sense current to MR element 3
a and the second electrode 5b are formed. Here, one end of the first electrode 5a which is set to the ground potential is connected to the tip core 14 side of the MR element 3. In addition, the second power supply potential
One end of the electrode 5 b is connected to the rear end core 15 of the MR element 3.

The other end of the first electrode 5a and the second electrode 5b
Are formed so as to be located on the sides of the first protective layer 4 separated from the medium sliding surface. The first protective layer 4 has a first electrode 5a on the other end and a second electrode 5b on the other end 5b of the second electrode. External connection terminal 6a for connecting the electrode 5a and the second electrode 5b to the sense current supply source,
6b is formed. These external connection terminals 6a, 6b
For example, it is formed by growing a conductive material such as Cu by plating.

Next, as shown in FIG. 12 and FIG.
Tip core 1 on which R element 3 and electrodes 5a and 5b are formed
4 and the rear end core portion 15 and the first protective layer 4 are filled with an insulating material so as to cover the MR element 3 and the electrodes 5a and 5b, the surface is flattened, and the second protective layer is formed. 7 is formed. In this case, similarly to the first protective layer 4, the second protective layer 7 may be formed by depositing an oxide such as Al ₂ O ₃ or SiO ₂ by sputtering or by increasing the temperature. Alternatively, glass filling may be performed. In addition, flattening, for example, using a polishing device using diamond,
The insulating material is polished until its upper surface becomes substantially flush with the upper surfaces of the external connection terminals 6a and 6b.
As a result, the upper surfaces of the external connection terminals 6a and 6b are exposed from the upper surface of the second protective layer 7.

Next, as shown in FIGS. 14 and 15, on the second protective layer 7 on the medium sliding surface side, a second substrate material 25 which will eventually become the second substrate 8 is bonded. The magnetic head block 26 is manufactured. An organic adhesive such as an epoxy resin may be used for joining the second substrate member 25, or a molten glass or the like may be used. In addition, the second substrate 25
Alternatively, a metal film such as Au may be formed in advance, and this metal film may be used as an adhesive layer for bonding while applying pressure at a low temperature, that is, so-called low-temperature metal diffusion bonding.

Next, as shown in FIG. 16, the magnetic head block 26 is cut. Then, the medium sliding surface of the separated head chip is subjected to cylindrical polishing, whereby the MR head 1 shown in FIG. 17 is completed.

The above description is directed to the MR head 1 provided with one leading core 14, one trailing core 15, and one MR element 3.
However, the MR head according to the present invention is not limited to this example. For example, as shown in FIG. 18, a plurality of sets of the front core 14, the rear core 15, and the MR element 3 are provided, and May be configured to have the magnetic sensing part.

The MR head 30 shown in FIG. 18 is provided with four magnetic sensitive portions in parallel in a direction orthogonal to the direction in which the MR head slides on the magnetic recording medium. , A second core section 14b, a second core section 14b,
The third tip core portion 14c and the fourth tip core portion 14d are each exposed to the outside. Therefore, the MR head 30 can simultaneously read signals recorded on a plurality of tracks of a magnetic recording medium, and can be applied as a reproducing head of a so-called multi-track recording / reproducing apparatus.

The MR head 30 has the same configuration as that of the above-described MR head 1 except that a plurality of magneto-sensitive sections are provided, and therefore detailed description is omitted.

When the MR head 30 is manufactured, first, as shown in FIGS. 19 and 20, a magnetic material serving as a lower core is placed on a flat plate-shaped first substrate material 21 serving as a first substrate. A material 22, a non-magnetic material 23 to be a gap film, and a magnetic material 24 to be an upper core are sequentially formed by sputtering or the like to form a laminate.

Next, as shown in FIGS. 21 and 22, for example, ion milling is performed on the laminate, and the laminate is arranged in parallel in a direction perpendicular to a direction in which the laminate slides. Plural tip core portions 14a, 14b, 14
c, 14d and a plurality of rear end core portions 15a, 15b, 15
c, 15d are formed.

Next, as shown in FIGS. 23 and 24, an insulating material is deposited or filled on the laminated body subjected to the ion milling process, the surface is flattened, and the first protective layer is formed. 4 are formed. At this time, the tip core portions 14a, 14
b, 14c, 14d and upper and lower core portions 15a, 15
The upper surfaces of b, 15c, and 15d are exposed from the upper surface of the first protective layer 4.

Next, as shown in FIGS. 25 and 26, the first cores 14a, 14b, 14c and 14d and the first cores 15a, 15b, 15c and 15d The MR elements 3a, 3b, 3c,
3d is formed.

Next, as shown in FIG. 27 and FIG.
a conductive material such as u is formed by sputtering or the like,
A first electrode 5a and a second electrode 5b for supplying a sense current to the MR elements 3a, 3b, 3c, 3d are formed. Here, the first electrode 5a which is set to the ground potential is connected to each MR.
One end is formed as an electrode common to the elements 3a, 3b, 3c, 3d, and one end is connected to the tip cores 14a, 14b, 14c, 14d of the MR elements 3a, 3b, 3c, 3d.
A plurality of second electrodes 5b which are set to the power supply potential are formed for each of the MR elements 3a, 3b, 3c, 3d, and one end of each of the second electrodes 5b is a rear end core part 15a of the MR element 3a, 3b, 3c, 3d. , 15b, 15c, and 15d.

The other end of the first electrode 5a and the second electrode 5b
Are formed so as to be located on the sides of the first protective layer 4 separated from the medium sliding surface. The first protective layer 4 has a first electrode 5a on the other end and a second electrode 5b on the other end 5b of the second electrode. External connection terminal 6a for connecting the electrode 5a and the second electrode 5b to the sense current supply source,
6b is formed. These external connection terminals 6a, 6b
For example, it is formed by growing a conductive material such as Cu by plating.

Next, as shown in FIGS. 29 and 30, M
Tip core 1 on which R element 3 and electrodes 5a and 5b are formed
4 and the rear end core portion 15 and the first protective layer 4 are filled with an insulating material so as to cover the MR elements 3a, 3b, 3c, 3d and the electrodes 5a, 5b, and the surface is flattened. , A second protective layer 7 is formed. At this time, the external connection terminal 6
The upper surfaces of a and 6b are exposed from the upper surface of the second protective layer 7 to the outside.

Next, as shown in FIGS. 31 and 32, a second substrate material 25 which will eventually become the second substrate 8 is bonded on the second protective layer 7 on the medium sliding surface side. The magnetic head block 26 is manufactured.

Next, as shown in FIG. 33, the magnetic head block 26 is cut. Then, the medium sliding surface of the separated head chip is subjected to cylindrical polishing, whereby the MR head 30 having a plurality of magnetically sensitive portions shown in FIG. 34 is completed.

As an MR head having a plurality of magnetic sensing parts, as shown in FIG. 35, a pair of magnetic head halves in each of which a plurality of sets of a front end core, a rear end core, and an MR element are formed as an insulating layer. It may be configured to be joined through the intermediary.

The MR head 40 shown in FIG. 35 has a pair of magnetic head halves 4 provided with four magnetic sensing portions in parallel in a direction perpendicular to the direction in which the MR head slides on the magnetic recording medium.
1, 42 are joined to have a total of eight magneto-sensitive sections,
, The second tip core 14b, the third tip core 14c, the fourth tip core 14d, the fifth tip core 14e, the sixth tip core 14f, and the seventh tip. The core portion 14g and the eighth tip core portion 14h are exposed to the outside from the medium sliding surface 40a.

At the time of manufacturing this MR head 40, the same process as the above-described manufacturing process of the MR head 30 is performed, and as shown in FIG. On the layer 4, the MR elements 3a, 3b, 3c, 3
d are formed, and MR elements 3e, 3f, 3g, 3h are formed on the second protective layer 4 of the substrate to be the other magnetic head half 42.

Next, as shown in FIG. 37, a conductive material such as Cu is formed on a substrate to be one magnetic head half 41 by sputtering or the like, and the MR elements 3a, 3b, 3 are formed.
a first electrode 5a for supplying a sense current to c and 3d
And a second electrode 5b. Similarly, a conductive material such as Cu is formed on the substrate to be the other magnetic head half 42 by sputtering or the like, and the MR elements 3e, 3f,
First electrode 5 for supplying sense current to 3g, 3h
a and the second electrode 5b are formed.

Here, the first electrode 5a which is set to the ground potential
Are the respective MR elements 3a, 3b, 3c, 3d and 3e, 3
f, 3g, 3h are formed in an L shape as a common electrode,
One end of each of the MR elements 3a, 3b, 3c, 3d and 3e, 3
f, 3g, 3h tip cores 14a, 14b, 14c,
14d, 14e, 14f, 14g, and 14h are connected. Further, the second electrode 5b that is set to the power supply potential is
R elements 3a, 3b, 3c, 3d and 3e, 3f, 3g,
Each of the MR elements 3a, 3b, 3c, 3d and 3e, 3f, 3
g, 3h rear end core portions 15a, 15b, 15c, 15d
And 15e, 15f, 15g, and 15h.

The other end of the first electrode 5a and the second electrode 5b
Are formed so as to be located on both sides of the first protective layer 4 on the side away from the medium sliding surface. And
On the other end of the first electrode 5a and the other end 5b of the second electrode formed so as to be located on the side of the first protective layer 4 that is separated from the medium sliding surface, The first electrode 5a and the second
External connection terminals 6a and 6b for connecting the electrode 5b to the sense current supply source are formed. These external connection terminals 6
a and 6b are formed by plating and growing a conductive material such as Cu.

Next, as shown in FIG. 38, the electrodes 5a, 5
b and a pair of substrates on which the external connection terminals 6a and 6b are formed, MR elements 3a, 3b, 3c, 3d and 3e, 3
An insulating material is filled so as to cover f, 3g, 3h and the electrodes 5a, 5b, and the surface is flattened to form the second protective layer 7. At this time, the upper surfaces of the external connection terminals 6a and 6b are exposed from the upper surface of the second protective layer 7 to the outside.

Next, as shown in FIG. 39, the other magnetic head half 42
Groove 4 for externally connecting external connection terminals 6a and 6b of the other magnetic head half 42 to the outside when bonded and integrated.
3 are formed, and one magnetic head half 41 is obtained.
Similarly, the external connection terminals 6a and 6b of one of the magnetic head halves 41 are desirably provided to the outside when the substrate to be the other magnetic head half 42 is joined and integrated with the one of the magnetic head halves 41. Is formed, and the other magnetic head half 42 is obtained.

Next, as shown in FIG. 40, one magnetic head half 41 and the other magnetic head half 42 are abutted with the upper surface of each second protective layer 7 as a bonding surface, and are joined together. Then, the magnetic head block 44 is manufactured. At this time, the groove portion 43 of the other magnetic head half 42 abuts on the portion where the upper surfaces of the external connection terminals 6a and 6b of the one magnetic head half 41 are exposed, and the outside of the other magnetic head half 42. A groove 43 of one of the magnetic head halves 41 abuts on a portion where the upper surfaces of the connection terminals 6a and 6b are exposed. As a result, the external connection terminals 6a and 6b of the one magnetic head half 41 and the external connection terminals 6a and 6b of the other magnetic head half 42 are exposed to the outside.

Next, as shown in FIG. 41, the magnetic head block 44 is cut. Then, a cylindrical polishing process is performed on the medium sliding surface of the separated head chip.
The MR head 40 having a plurality of magnetically sensitive portions indicated by 5 is completed.

By manufacturing the MR head 40 through the above-described steps, it is possible to easily manufacture the MR head 40 having a plurality of magnetic sensing parts applicable as a reproducing head of a multi-track recording / reproducing apparatus. Can be.

[0098]

EXAMPLES In order to confirm the effects of the present invention, an MR head according to the present invention was actually manufactured and its recording characteristics were evaluated.

<Manufacture of MR Head> First, an MR head (Example) according to the present invention was manufactured as follows.

On a first substrate material of NiO—TiCaO, a lower layer core FeRuGaSi alloy, a gap film Al ₂ O ₃ , and an upper layer core FeRuGaSi alloy are sequentially formed by sputtering to form a laminate. did. At this time, the thickness of Al ₂ O _{3 serving} as a gap film is set to 0.1.
The gap length was set to 2 μm so that the gap length was 0.2 μm when the MR head was finally formed.

Next, the laminated body was subjected to ion milling to form a leading core portion and a trailing core portion serving as magnetically sensitive portions. At this time, the length of the tip core portion was set to 3 μm so that the gap depth was 3 μm when the MR head was finally formed. In addition, the width of the tip core is 5
The track width was set to 5 μm when the MR head was finally formed.

Next, a first protective layer, an MR element, an electrode, an external connection terminal, and a second protective layer were formed on the first substrate material on which the front core portion and the rear core portion were formed. .
The material of the first protective layer and the second protective layer is Al ₂
O ₃ was used.

Next, a second substrate material made of NiO—TiCaO is joined to the first substrate material on which the above-described parts are formed, and cut into individual magnetically sensitive portions to form one magnetically sensitive portion. M with
An R head was obtained.

For comparison, a conventional yoke type MR head having a gap depth of about 2 μm (comparative example) was manufactured using a plated permalloy material as a material for the magnetic core. The gap length of this conventional yoke type MR head was set to 0.2 μm similarly to the MR head of the embodiment, and the track width was set to 5 μm similarly to the MR head of the embodiment.

<Evaluation of Characteristics> The MR head of the embodiment and the MR head of the comparative example manufactured as described above are mounted on a helical scan type recording / reproducing apparatus, and are a recording medium at a relative speed of 3.8 m / s. By sliding on a metal vapor-deposited tape, a time change of a reproduction signal having a wavelength of 0.5 μm was measured.
The results are shown in FIG. As can be seen from FIG. 42, the reproduction output of the comparative MR head sharply decreases with the passage of time, whereas the MR head of the embodiment provides a stable reproduction output.

[0106]

According to the method of manufacturing a magneto-resistance effect type magnetic head according to the present invention, as the magnetic material forming the upper core and the magnetic material forming the lower core, a material having high wear resistance that cannot be formed in the plating step. Can be used, and the formation of the magnetoresistive element can be facilitated, and a magnetoresistive magnetic head having good wear characteristics can be easily manufactured.

Further, in the magnetoresistive head according to the present invention, the front core portion and the rear core portion constitute a nonmagnetic material constituting a magnetic gap on the magnetic material constituting the lower core and an upper core. Since the magnetic material constituting at least the upper layer core of the laminate formed by sequentially laminating the magnetic material and the magnetic layer is formed by removing the portions other than the portions corresponding to the front core portion and the rear core portion, the upper layer is formed. As the magnetic material forming the core and the magnetic material forming the lower core, a material having high wear resistance that cannot be formed in the plating step can be used to exhibit good wear characteristics. Also, in this magnetoresistive head, the upper surface is substantially the same as the upper surfaces of the front core portion and the rear core portion so that the magnetoresistive element is provided between the front core portion and the rear core portion. Since it is formed on the non-magnetic layer constituting the plane, manufacturing is easy.

[Brief description of the drawings]

FIG. 1 is a perspective view of an MR head according to the present invention, showing a main part in a see-through manner.

FIG. 2 is a diagram illustrating a process of manufacturing the MR head, and is a perspective view illustrating a state where a laminate is formed on a first substrate material.

FIG. 3 is a diagram illustrating a process of manufacturing the MR head, and is a cross-sectional view taken along line A1-A2 in FIG.

FIG. 4 is a diagram for explaining a process of manufacturing the MR head, and is a perspective view showing a state in which a front end core portion and a rear end core portion are formed.

5 is a view for explaining a step of manufacturing the MR head, and is a cross-sectional view taken along line A3-A4 in FIG. 4;

FIG. 6 is a diagram illustrating a process of manufacturing the MR head, and is a perspective view illustrating a state where a first protective film is formed.

FIG. 7 is a diagram illustrating a process of manufacturing the MR head, and is a cross-sectional view taken along line A5-A6 in FIG.

FIG. 8 is a diagram for explaining a step of manufacturing the MR head, and is a perspective view showing a state where an MR element is formed.

FIG. 9 is a diagram for explaining a step of manufacturing the MR head, and is a cross-sectional view taken along line A7-A8 in FIG.

FIG. 10 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where a pair of electrodes and external connection terminals are formed.

11 is a view for explaining a step of manufacturing the MR head, and is a cross-sectional view taken along line A9-A10 in FIG. 10;

FIG. 12 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where a second protective film is formed.

FIG. 13 is a diagram for explaining a step of manufacturing the MR head, and is a cross-sectional view taken along line A11-A12 in FIG.

FIG. 14 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a magnetic head block.

FIG. 15 is a diagram illustrating a process of manufacturing the MR head, and is a cross-sectional view taken along line A13-A14 in FIG.

FIG. 16 is a view for explaining a step of manufacturing the MR head, and is a perspective view showing a state where a magnetic head block is cut.

FIG. 17 is a diagram illustrating a process of manufacturing the MR head, and is a perspective view of the manufactured MR head.

FIG. 18 is a perspective view of another MR head according to the present invention.

FIG. 19 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where a laminate is formed on a first substrate material.

20 is a view illustrating a step of manufacturing the MR head, and is a cross-sectional view taken along line A15-A16 in FIG. 19;

FIG. 21 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state in which a front end core portion and a rear end core portion are formed.

FIG. 22 is a diagram illustrating a step of manufacturing the MR head, and is a cross-sectional view taken along line A17-A18 in FIG. 21;

FIG. 23 is a view illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where a first protective film is formed.

24 is a view illustrating a step of manufacturing the MR head, and is a cross-sectional view taken along line A19-A20 in FIG. 23;

FIG. 25 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where the MR element is formed.

FIG. 26 is a diagram illustrating a process of manufacturing the MR head, and is a cross-sectional view taken along line A21-A22 in FIG. 25;

FIG. 27 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where a pair of electrodes and external connection terminals are formed.

FIG. 28 is a view illustrating a step of manufacturing the MR head, and is a cross-sectional view taken along line A23-A24 in FIG. 27;

FIG. 29 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where a second protective film is formed.

30 is a view illustrating a step of manufacturing the MR head, and is a cross-sectional view taken along line A25-A26 in FIG. 29;

FIG. 31 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a magnetic head block.

32 is a view illustrating a step of manufacturing the MR head, and is a cross-sectional view taken along line A27-A28 in FIG. 31;

FIG. 33 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where the magnetic head block is cut.

FIG. 34 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view of the manufactured MR head.

FIG. 35 is a perspective view of still another MR head according to the present invention.

FIG. 36 is a diagram for explaining a step of manufacturing the MR head.
It is a perspective view showing the state where R element was formed.

FIG. 37 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state in which electrodes and external connection terminals are formed on substrates serving as a pair of magnetic head halves, respectively.

FIG. 38 is a diagram for explaining a step of manufacturing the MR head, and is a perspective view showing a state where a second protective film is formed on each of the substrates to be a pair of magnetic head halves.

FIG. 39 is a view for explaining a step of manufacturing the MR head, and is a perspective view showing a state in which grooves are formed in the substrates to be a pair of magnetic head halves.

FIG. 40 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a magnetic head block.

FIG. 41 is a diagram illustrating a step of manufacturing the MR head, and is a perspective view illustrating a state where the magnetic head block is cut.

FIG. 42 is a diagram illustrating the reproduction characteristics of the MR head according to the present invention.

[Explanation of symbols]

1, 30, 40 MR head, 3 MR element, 4 first
Protective layer, 5a, first electrode, 5b second electrode, 7
Second protective layer, 10 magnetic core, 11 lower core, 12
Gap film, 13 upper core, 14 tip core, 1
5 Back end core

Claims (14)

[Claims] 1. A magnetic core comprising a lower core and an upper core facing each other via a magnetic gap on a medium facing surface side, wherein the upper core is formed by a gap between the tip core portion on the medium facing surface side and a medium. In manufacturing a magnetoresistive effect type magnetic head in which a magnetoresistive element is installed between the front end core portion and the rear end core portion, being separated into a rear end core portion separated from the opposing surface, A step of sequentially laminating a non-magnetic material constituting the magnetic gap and a magnetic material constituting the upper core on a magnetic material constituting the lower core, and at least a tip material and a magnetic material constituting the upper core; Removing a portion other than a portion corresponding to the rear end core portion; forming a nonmagnetic layer whose upper surface is substantially flush with the upper surfaces of the front end core portion and the rear end core portion; the above As installed between the end core portion, the method for manufacturing a magneto-resistance effect type magnetic head which is characterized in that the step of forming a magnetoresistive element on the non-magnetic layer. 2. The magnetoresistive head according to claim 1, wherein an insulating material for electrically insulating the lower core and the upper core is used as the nonmagnetic material constituting the magnetic gap. Production method. 3. A pair of electrodes for supplying a sense current to the magnetoresistive element, wherein a first electrode at a ground potential is connected to at least the tip core and the tip core of the magnetoresistive element. 2. The semiconductor device according to claim 1, wherein the second electrode is connected to any one of the first and second electrodes, and a second electrode serving as a power supply potential is connected to at least one of the rear end core and the rear end core of the magnetoresistive element. A manufacturing method of the magnetoresistive effect type magnetic head described in the above. 4. The method according to claim 1, wherein a magnetic ferrite substrate is used as a magnetic material forming the lower core. 5. A heat treatment at 400 ° C. or higher is performed on a laminate of the magnetic material forming the lower core, the nonmagnetic material forming the magnetic gap, and the magnetic material forming the upper core. A method for manufacturing a magnetoresistive head according to claim 1. 6. The method of manufacturing a magnetoresistive head according to claim 1, wherein a plurality of sets of the front and rear core portions and the magnetoresistive element are formed in parallel. 7. A pair of substrates on which said front and rear core portions and a magnetoresistive element are formed, and a pair of surfaces on which said front and rear core portions and a magnetoresistive element are formed. 2. The method of manufacturing a magnetoresistive magnetic head according to claim 1, wherein the magnetic heads are joined and integrated with each other via an insulating layer. 8. A lower core and an upper core facing each other via a magnetic gap on the medium facing surface side to form a magnetic core, and the upper core is separated from the tip core portion on the medium facing surface side by a gap. A magnetoresistive effect type magnetic head having a magnetoresistive element spanned between the distal end core and the rear end core, separated into a rear end core separated from the opposing surface; And the rear end core portion, at least the upper layer core of a laminated body in which a non-magnetic material forming the magnetic gap and a magnetic material forming the upper layer core are sequentially laminated on a magnetic material forming the lower layer core The constituent magnetic material is formed by being removed except for a portion corresponding to the front-end core portion and the rear-end core portion, and the magnetoresistive element includes the front-end core portion and the rear-end core portion. Between As bridged, the magnetoresistive head, characterized in that the upper surface is formed on the non-magnetic layer constituting the upper surface substantially flush with the distal core portion and a rear core portion. 9. The magnetoresistive head according to claim 8, wherein the lower core and the upper core are electrically insulated by a nonmagnetic material constituting the magnetic gap. 10. A magnetoresistive element comprising a first electrode and a second electrode for supplying a sense current to the magnetoresistive element, wherein the first electrode, which is set to a ground potential, includes the tip core and the magnetoresistive element. The second electrode, which is connected to at least one of the front end cores and has a power supply potential, is at least one of the rear end core and the rear end core of the magnetoresistive element. 9. The magnetoresistive head according to claim 8, wherein the magnetic head is connected to one side. 11. The magnetoresistive head according to claim 8, wherein said lower core is made of a magnetic ferrite substrate. 12. The lower core and the upper core are at 400 ° C.
9. The magnetic head of claim 8, wherein the magnetic head is formed through the above-described heat treatment. 13. The magnetoresistive head according to claim 8, wherein a plurality of sets of the front and rear core portions and the magnetoresistive element are formed in parallel. 14. A pair of substrates on which the front and rear core portions and the magnetoresistive element are formed, and the surfaces of the pair of substrates on which the front and rear core portions and the magnetoresistive effect device are formed are made to face each other. 9. The magneto-resistance effect type magnetic head according to claim 8, wherein a plurality of magneto-sensitive portions are formed by abutting each other with an insulating layer interposed therebetween.