JPH11314904A - Unvoiced discharge electrode for ozone generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably generate ozone of a prescribed concn. by uniformly forming a spacing between a discharge electrode and a dielectric electrode. SOLUTION: The first electrode 2 on an outer side and the second electrode 3 on an inner side are coaxially arranged. A flow space 5 of a cylindrical gaseous raw material is formed between the first electrode 2 and the second electrode 3. Both ends of the flow space 5 are provided with sealing members 4, 4 having a function to maintain the spacing between the first electrode 2 and the second electrode 3. An inflow side expanding part 8 is formed in the inflow part of the flow space 5 and an outflow side expanding part 9 is formed in the outflow side of the flow space 5 respectively along the circumferential direction of the flow space 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silent discharge electrode used for an ozone generator.

[0002]

2. Description of the Related Art There is a silent discharge type ozone generator. This silent discharge type ozone generator has a configuration in which a discharge electrode and an induction electrode are arranged at a predetermined gap to generate a discharge between both electrodes, and a raw material gas such as oxygen or air is provided in the gap. And ozone is generated by the energy of the discharge. This is called silent discharge because the discharge is almost inaudible.

[0003]

In the above-mentioned ozone generator, the gap between the discharge electrode and the induction electrode needs to be formed uniformly. If it is not uniform, discharge unevenness occurs and ozone at a predetermined concentration cannot be generated. SUMMARY OF THE INVENTION It is an object of the present invention to uniformly form a gap between a discharge electrode and an induction electrode to stably generate a predetermined concentration of ozone.

[0004]

According to the first aspect of the present invention, an outer first electrode and an inner second electrode are coaxially arranged, and a cylinder is provided between the first and second electrodes. A flow space for the raw material gas is formed, and seal members having a function of maintaining an interval between the first electrode and the second electrode are provided at both ends of the flow space. In the invention according to claim 2, an inflow-side enlarged portion is formed at an inflow portion of the circulation space, and an outflow-side enlarged portion is formed at an outflow portion of the circulation space along a circumferential direction of the circulation space. It is characterized by.

[0005]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A silent discharge electrode according to the present invention includes an outer first electrode and an inner second electrode, and these electrodes are coaxially arranged via a pair of seal members that also serve as an interval. . Between the first electrode and the second electrode, a cylindrical flow space through which a raw material gas such as oxygen or air flows is formed, and the seal members are provided at both ends of the flow space. The seal member has a function of maintaining an interval between the first electrode and the second electrode and a function of sealing both ends of the flow space. A voltage is applied to the first electrode and the second electrode to generate a discharge in the flow space, and ozone is generated from a raw material gas flowing in the flow space.

The shape of the first electrode and the second electrode is preferably a circular tube in order to enhance the dimensional accuracy of the flow space, but it may be a square tube (substantially polygonal in cross section). . Further, the outer first electrode may be a discharge electrode, and the inner second electrode may be an induction electrode, and conversely, the outer first electrode may be an induction electrode, and the inner second electrode may be an induction electrode. Can be used as a discharge electrode. For example, an O-ring is used as the seal member.

[0007] An inflow side enlarged portion is formed at the inflow portion of the flow space, and an outflow side enlarged portion is formed at the outflow portion of the flow space. These enlarged portions are formed over the entire circumferential direction along the circumferential direction of the flow space. The source gas flows into the circulation space after passing through the inflow-side enlarged portion. Ozone is generated from the raw material gas upon receiving the discharge energy in the circulation space, and the generated ozone gathers in the outflow side enlarged portion and then flows out. As described above, the flow of the fluid in the flow space does not generate a drift, and the flow of the fluid can be made uniform by the function of the inflow-side enlarged portion and the outflow-side enlarged portion.

According to the present invention, the first electrode and the second electrode are supported via the sealing member, and the first electrode and the second electrode may be eccentric. In addition, the gap between the first electrode and the second electrode, that is, the gap can be made uniform. Therefore,
It is possible to prevent discharge unevenness and stably generate a predetermined concentration of ozone. Further, the sealing member plays a role of a spacer and a seal, and the silent discharge electrode is basically
The first electrode, the second electrode, and the seal member can be configured as three parts, the number of parts can be reduced, and the structure can be simplified and inexpensive.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, FIG. 2 is a longitudinal sectional view taken along line II-II of FIG. 1, and FIG. 3 is a longitudinal sectional view taken along line III-III of FIG.

The silent discharge electrode 1 according to the present invention comprises a first electrode 2, a second electrode 3, and a sealing member 4.
The first electrode 2 and the second electrode 3 have a circular tubular shape, are arranged coaxially via a pair of the sealing members 4 and 4, and have a double-tube structure as a whole. In the illustrated embodiment, the outer first electrode 2 is a discharge electrode and the inner second electrode 3 is an induction electrode. Between the first electrode 2 and the second electrode 3, there is formed a cylindrical flow space 5 through which a source gas such as oxygen or air flows (the first electrode 2 and the second electrode 3). , The so-called gap is about 1 mm). The seal members 4 are disposed at both ends of the circulation space 5 and play a role of a spacer and a seal. As the seal member 4, for example, an O-ring is used.

An outer wall of the first electrode 2 is connected to an inflow pipe 6 through which a raw material gas flows and an outflow pipe 7 through which ozone flows out, in communication with the flow space 5. An inflow side enlarged portion 8 is formed at an inflow portion of the flow space 5, and an outflow side enlarged portion 9 is formed at an outflow portion of the flow space 5. The inflow-side enlarged portion 8 and the outflow-side enlarged portion 9 are formed over the entire circumferential direction along the circumferential direction of the flow space 5 (the height in the radial direction is about 8 mm, and the length in the axial direction is About 30
mm). The inflow-side enlarged portion 8 and the outflow-side enlarged portion 9
Serves as a so-called buffer and prevents the flow of the raw material gas from flowing from the inflow pipe 6 to the outflow pipe 7 in a short-circuit manner. On the inner wall of the first electrode 2, at positions outside the inflow-side enlarged portion 8 and the outflow-side enlarged portion 9,
Each has a groove 10 for fixing the seal member 4.

The material of the first electrode 2 which functions as a discharge electrode is stainless steel which is hardly corroded even when exposed to ozone. Alternatively, a configuration in which only the surface is covered with a material that is hardly corroded may be employed. For example, an aluminum drawn tube whose surface is anodized, a drawn clad material of stainless steel and aluminum (aluminum on the outside and stainless steel on the inside) can be used.
The length of the first electrode 2 is set to about four times the outer diameter.

The second electrode 3 serving as an induction electrode comprises a glass tube 11 as a derivative and a conductive coating 12 formed inside the glass tube 11. The conductive film 12 is formed by plating or applying a conductive paint or a conductive adhesive. In place of the glass tube 11, a ceramic tube can be used.

An AC power supply 13 is connected to the first electrode 2 and the second electrode 3. An AC voltage (about 10 kV) is applied to the first electrode 2 and the second electrode 3 to generate a discharge in the flow space 5.

The operation of the above configuration will be described. An AC voltage is applied to the first electrode 2 and the second electrode 3 by the AC power supply 13 to generate a discharge in the flow space 5. When the raw material gas is supplied from the inflow pipe 6, the raw material gas first flows into the inflow-side enlarged portion 8, and flows into the distribution space 5 via the inflow-side enlarged portion 8. The raw material gas receives discharge energy in the circulation space 5 to generate ozone. The generated ozone is collected in the outflow-side enlarged section 9 and flows out of the outflow pipe 7 through the outflow-side enlarged section 9 to the outside.

As described above, the raw material gas and ozone flow in and out via the inflow-side enlarged portion 8 and the outflow-side enlarged portion 9, so that the flows of the raw material gas and ozone in the flow space 5 are deflected. It does not occur, and the flow can be made uniform. As a raw material gas, dry air previously dehumidified is supplied by a compressor (not shown) at a pressure of about 0.5 kg / cm ² .

Further, by providing a structure in which the first electrode 2 and the second electrode 3 are supported via the seal member 4, the seal member 4 is uniformly elastically deformed and shrunk all around, so that the first electrode 2 and the second electrode 3 are compressed. One electrode 2 and the second electrode 3 are not eccentric. Therefore, the first electrode 2 and the second electrode 3
Can be made uniform, there is no uneven discharge, and ozone of a predetermined concentration is stably generated.

[0018]

According to the first aspect of the present invention, since the first electrode and the second electrode are disposed via the seal member which also serves as a gap, the first electrode and the second electrode are eccentric. Therefore, the gap between both electrodes can be made uniform. Therefore, it is possible to prevent discharge unevenness and stably generate ozone of a predetermined concentration. In addition, the sealing member plays the role of a spacer and a seal, and there is no need to provide a spacer as a separate component, so that the number of components can be reduced, and a simple and inexpensive configuration can be achieved. Furthermore, according to the second aspect of the present invention, the flow of the fluid in the flow space is not deviated and the flow of the fluid is made uniform by the function of the inflow-side enlarged portion and the outflow-side enlarged portion. it can.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention.

FIG. 2 is a vertical sectional view taken along line II-II of FIG.

FIG. 3 is a vertical sectional view taken along the line III-III in FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Silent discharge electrode 2 First electrode 3 Second electrode 4 Seal member 5 Flow space 8 Inflow side enlarged part 9 Outflow side enlarged part

Claims (2)

[Claims] An outer first electrode (2) and an inner second electrode (3) are coaxially arranged, and a cylindrical source gas flow space (5) is provided between the first electrode (2) and the second electrode (3). And a seal member (4, 4) having a function of maintaining a distance between the first electrode (2) and the second electrode (3) at both ends of the circulation space (5). electrode. 2. An inflow side enlarged portion 8 is formed at an inflow portion of the flow space 5 and an outflow side enlarged portion 9 is formed at an outflow portion of the flow space 5 along a circumferential direction of the flow space 5, respectively. The silent discharge electrode of the ozone generator according to claim 1.