JPH11311334A - Seal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the seal with the small squeezing force capable of being applied for a large sealed container having a large seal peripheral length by connecting a first swelling head part of the back of a seal groove and a second swelling head part of an opening part side of the seal groove through an inclined connecting film to be elastically deformed into the S-shape and the Z-shape in the condition that both the flat surfaces come close to each other. SOLUTION: One of a first flat surface part 1 and a second flat surface part 2 opposite to each other is provided with a seal groove 5 having a rectangular cross section. The second flat surface part 2 is provided with a shallow groove 6. A seal S has a rectangular cross section, and integrally formed of a first swelling head part 8 arranged in a corner 7 of the back of the seal groove 5, a second swelling head part 8 projected from an opening part 5a in the condition that the first flat surface 1 and the second flat surface 2 are separated from each other, and a connecting film part 10 formed of a thin film T for connecting both the first and the second swelling head parts 8, 9. In the condition that the flat surfaces 1, 2 are separated from each other, the connecting thin film 10 integrally connects the first and the second swelling head parts 8, 9 with each other in the inclined condition, and the connecting thin film 10 is elastically deformed into the Z-shape and the S-shape in the condition that they come close to each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a fixing seal.

[0002]

2. Description of the Related Art Conventionally, for example, seals used between a container body and a lid of a sealed container include an O-ring type seal 41 shown in FIG. 5, a dumbbell type seal 42 shown in FIG. Alternatively, a U-packing type seal 43 shown in FIG. 7 is known.

[0003]

When the sealed container is small, the squeeze type (compression type) seals 41 and 42 shown in FIGS. 5 and 6 have no problem. When used for sealing a sealed container for transportation (seal circumference is about 1400 mm), the force to close the lid of the container body becomes excessive (for example, 100 kgf or more).

On the other hand, a U-packing type seal shown in FIG.
In 43, the crushing force is small and the force for closing the lid of a large container is small, but it cannot be used under the use condition where pressure is applied from both inside and outside of the container. That is, in the case of FIG. 7, it can be used when the pressure acts from the outside of the container (the inside of the container is in a vacuum state), but it cannot be used when the pressure acts from the inside.

In order to cope with this, it is necessary to use two seals 43 inward and outward in FIG. 7 and to provide a double recessed seal groove. And the width (wall thickness) of the upper opening end face of the container body must be significantly increased.

The first object of the present invention is to solve such a problem and to provide a seal having a sufficiently small crushing force (compression force) applicable to a large sealed container having a large seal circumference.
The purpose of. It is another object of the present invention to provide a seal (having no sealing direction) capable of coping with pressures from both inside and outside directions.

[0007]

SUMMARY OF THE INVENTION According to the present invention, there is provided a seal groove having a rectangular cross section formed in at least one of a first flat portion and a second flat portion facing each other so as to be close to and separated from each other. First
A seal for sealing between the plane portion and the second plane portion,
In the cross-sectional shape, a first bulging head disposed at one corner of the inner part of the seal groove, and disposed on the opening side of the seal groove so as to protrude from the opening in the separated state and close the approach. In the state, the second bulging head which is unevenly distributed near the corner of the rectangular seal groove and the diagonal position is connected to the first and second bulging heads, and the S-shape is in the approaching state. Or an inclined connecting film portion elastically deformed into a Z-shape.

In addition, at the joint portion between the connecting film portion and the second bulging head, the second portion is slid in contact with the corner of the opening of the seal groove.
A sloping surface portion is formed in which the bulging head is guided and guided into the seal groove from the protruding state.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on the illustrated embodiments of the present invention.

FIG. 1 specifically shows an example of a place where the seal S according to the present invention is used, which is interposed between a lid 3 and a container body 3 made of synthetic resin or metal. The seal S is suitable for a large container having a long seal circumference, such as a 12-inch (300 mm) wafer container.

A seal groove 5 is formed in the opening edge surface of the container body 3 and / or the corresponding peripheral edge of the lid 4, and a seal S is fitted in the groove 5. An article such as a wafer is put in, and the lid 4 is closed to maintain a sealed state.

FIG. 2 shows an embodiment of the seal S, and FIGS. 3 and 4 are enlarged sectional views of essential parts for explaining a use state.
2 to 4, a seal groove 5 having a rectangular cross section is formed in one of the first flat portion 1 and the second flat portion 2 which face each other so that they can be separated from each other. In the example shown in FIG.
Is shown, and FIG.

A shallow groove 6 having a width W ₂ slightly larger than the width W ₁ of the seal groove 5 is formed in the second plane portion 2. The seal S has a seal groove 5 in the cross-sectional shape.
FIG. 3 shows a first bulging head 8 arranged at one corner 7 at the back of the seal groove 5 and an opening 5 a side of the seal groove 5.
In the state of separation of the flat portion 1 and the second flat portion 2, the opening 5 a
Are formed integrally with a second bulging head 9 protruding from the first bulging portion and a thin-walled connecting film portion 10 connecting the first and second bulging heads 8 and 9 to each other.

In a state where the first flat portion 1 and the second flat portion 2 are close to each other {seal state}, as shown in FIG. It is unevenly distributed near the corner 11 opposite to the corner 7.

In other words, the first bulging head 8 is located at one corner 7 on the inner peripheral side 12 of the sealing groove 5 having a rectangular cross section, and the second bulging head 9 is located on the outer peripheral side of the sealing groove 5. It is located on the 13 side (corner 11).

The connecting film portion 10 connects the first and second bulging heads 8 and 9 to each other in an inclined manner in the separated state shown in FIG. 3, and in the approaching state shown in FIG. In order to be elastically deformed into a Z-shape, the thickness T and the hardness are set such that the elastic deformation is easy, and the slightly bent portions 14 and 15 in the state of FIG. 3 are formed. Note that the connection film portion 10 may be elastically deformed into a shape symmetrical to FIG.

In the approaching state (sealed state) of FIG. 4, the vectors F, F are the members of the first plane portion 1 (the container body etc.),
The external force in the direction of closing the member (such as the lid) of the second flat portion 2 is shown. In the seal S according to the present invention, the vector F ₁ acts on the first bulging head 8, The vector F ₂ acts on the bulging head 9, and the action line of the two vectors F ₁ and F ₂ is eccentric by an eccentric amount ε slightly smaller than the width W _{1 of the} rectangular seal groove 5. .

By providing the amount of eccentricity ε, the first and second flat portions 1 and 2 can be approached with a smaller force F as compared with the conventional squeeze type (compression type) seal 42 shown in FIG. it can. Further, the connecting film portion 10 is smoothly elastically deformed into a Z-shape (or S-shape) as shown in FIGS.

Further, the second bulging head 9 has a basic circular cross-sectional shape indicated by a two-dot chain line, and is joined to the connecting film portion 10 while gradually reducing its thickness. At the joint portion between the connecting film portion 10 and the second bulging head 9, the second bulging head 9 protrudes while sliding on the corner 16 of the opening 5 a of the seal groove 5 (FIG. 3). Is guided into the seal groove 5. A slope surface portion 17 is formed.

The provision of the sloping surface portion 17 allows the first surface portion 1 and the second surface portion 2 to be gradually approached from FIG. Is effectively prevented.

The shallow groove 6 can be omitted if desired (the second plane portion 2 remains flat). Also,
The thickness T of the connecting film portion 10 can be freely increased or decreased according to the use conditions, and the squeezing force can be adjusted. The seal S is made of an elastic material such as rubber or soft plastic. Further, a concave groove (seal groove 5) may be provided in both the first flat portion 1 and the second flat portion 2 (not shown).

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIGS. 1, 3 and 4, a sealing groove 5 is formed with an opening edge surface of a container body 3 as a first plane portion 1 and a corresponding surface of a lid 4 is formed as a second plane portion. As No. 2, a seal S shown in FIGS. 3 and 4 of the present invention was mounted on a 12-inch wafer transfer container (seal circumference 1400 mm).

The seal S was made of rubber and had a rubber hardness of 60. The height H of FIG. 4 6.0 mm, a width W ₁ and 4.2 mm, and 8.6mm sealing height of the free state of FIG. 3, first and
The diameter of the basic circle of the two-dot chain line of the second bulging heads 8 and 9 was 1.6 mm, and the thickness T of the connecting film portion 10 was about 1.0 mm.

The force F required to close the lid is about 30 kgf, and it has been found that the lid can be easily closed by ordinary human power. Then, the container pressure (gauge pressure) is reduced to 0.02MPa (0.
2kgf / cm ² ) and -0.02MPa (−0.
When the pressure was reduced at ² kgf / cm ² ), it was confirmed that there was no leakage and good sealing performance was exhibited for a long period of time in any case.

[0025]

According to the present invention, the following significant effects can be obtained by the above-described structure.

(According to claim 1) Suitable for sealing between a lid of a large sealed container and the container body, etc., the crushing force per unit length is small, and the lid can be closed with a small force. . Further, even if pressure is applied from any of the internal pressure and the external pressure, good sealing performance is exhibited. Further, since the seal groove may be single, processing of the seal groove is easy.

When the first flat part 1 and the second flat part 2 are gradually approached (closed),
Being bitten between both sides 1 and 2 and being damaged,
Can be prevented.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a use location of the present invention.

FIG. 2 is a sectional front view showing an embodiment of the present invention.

FIG. 3 is an enlarged sectional view of a main part showing a separated state.

FIG. 4 is an enlarged sectional view of a main part showing a sealed state.

FIG. 5 is a sectional view showing a conventional example.

FIG. 6 is a sectional view showing another conventional example.

FIG. 7 is a sectional view showing another conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st flat part 2 2nd flat part 5 Seal groove 5a opening 7 One corner part 8 First bulging head 9 Second bulging head 10 Connecting film part 11 Corner part 16 Corner part 17 Slope surface part

Claims (2)

[Claims] 1. A first flat portion and a second flat surface which are mounted in at least one of a first flat portion and a second flat portion facing each other so that they can be approached and separated from each other. A seal that seals between the parts, a first bulging head disposed at one corner of the back of the seal groove in a cross-sectional shape;
The second seal groove is disposed on the opening side of the seal groove, protrudes from the opening in the separated state, and is unevenly distributed near the corner at the diagonal position with the one corner of the rectangular seal groove in the approached state. A seal comprising: a bulging head; and an inclined connecting film portion that connects the first and second bulging heads and elastically deforms into an S or Z shape in the approaching state. 2. In the joint portion between the connecting film portion and the second bulging head, the second bulging head is guided and guided into the seal groove from a state in which the second bulging head protrudes while slidingly contacting a corner of the opening of the seal groove. 2. The seal according to claim 1, wherein a slope portion is formed.