JP2018105389A - Pressure container and seal member - Google Patents

Pressure container and seal member Download PDF

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JP2018105389A
JP2018105389A JP2016251333A JP2016251333A JP2018105389A JP 2018105389 A JP2018105389 A JP 2018105389A JP 2016251333 A JP2016251333 A JP 2016251333A JP 2016251333 A JP2016251333 A JP 2016251333A JP 2018105389 A JP2018105389 A JP 2018105389A
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pressure vessel
ring
structures
end side
side seal
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JP2016251333A
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JP6890968B2 (en
Inventor
悌二 ▲高▼橋
悌二 ▲高▼橋
Teiji Takahashi
由季 菅原
Yuki Sugawara
由季 菅原
良秋 風間
Yoshiaki Kazama
良秋 風間
啓太 三澤
Keita Misawa
啓太 三澤
浩一 七五三木
Kouichi Shimeki
浩一 七五三木
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Canon Tokki Corp
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Canon Tokki Corp
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Priority to JP2016251333A priority Critical patent/JP6890968B2/en
Priority to KR1020170171967A priority patent/KR102397291B1/en
Priority to CN201711379416.9A priority patent/CN108240471B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J12/00—Pressure vessels in general
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Sealing Devices (AREA)
  • Packages (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a pressure container that can close a gap between structures in a configuration that hardly propagates an influence from deformation between the structures.SOLUTION: A pressure container includes: paired structures; and a seal member 1 for closing a gap between the structures in a sealed state. The seal member 1 is constituted of: one end-side seal part 2 attached to one of the structures; the other end-side seal part 3 attached to the other structure; and a connection part 4 connecting the one end-side seal part 2 to the other end-side seal part 3 and having flexible flat surface.SELECTED DRAWING: Figure 1

Description

本発明は、圧力容器及びシール部材に関するものである。   The present invention relates to a pressure vessel and a seal member.

真空チャンバ等の圧力容器の開閉部、例えば特許文献１の図２に開示されるような圧力容器の開口部と該開口部を閉塞する蓋体との間には、両者の隙間を密閉するＯリング（オーリング）が設けられる。   An opening / closing part of a pressure vessel such as a vacuum chamber, for example, between the opening of a pressure vessel as disclosed in FIG. 2 of Patent Document 1 and a lid that closes the opening, seals the gap between the two. A ring (O-ring) is provided.

また、通常、Ｏリングに予圧を与えてシール性を高めるため、蓋体（Ｏリングの押え部材）は圧力容器にＯリングを介して締結される。   Usually, in order to increase the sealing performance by applying a preload to the O-ring, the lid (O-ring pressing member) is fastened to the pressure vessel via the O-ring.

特開２００４−２３５５３８号公報JP 2004-235538 A

しかしながら、Ｏリングの押え部材が、圧力容器の所望の取付面にＯリングを介して締結されることで、押え部材は圧力容器とほぼ一体的な構造になってしまう。   However, the pressing member of the O-ring is fastened to the desired mounting surface of the pressure vessel via the O-ring, so that the pressing member has a substantially integrated structure with the pressure vessel.

従って、圧力容器内部が大気状態から高真空状態に至る際に、差圧によって圧力容器に変形が生じると、Ｏリングの押え部材など、圧力容器に取り付けた部品や、その取付面にも変形や変位が生じるおそれがあった。   Therefore, if the pressure vessel is deformed by the differential pressure when the pressure vessel interior changes from the atmospheric state to the high vacuum state, the parts attached to the pressure vessel, such as the O-ring holding member, and the mounting surface thereof are also deformed. There was a risk of displacement.

そのため、上記の変形を考慮して圧力容器の板厚を厚くしたり、補強のためのリブを追加するなどして、圧力容器に必要以上の剛性を付加する必要が生じ、圧力容器の重量が増大するという課題があった。   Therefore, it is necessary to add more rigidity than necessary by increasing the plate thickness of the pressure vessel in consideration of the above-mentioned deformation or adding ribs for reinforcement, and the weight of the pressure vessel is increased. There was a problem of increasing.

本発明は、上記課題を解決したもので、構造体間の間隙を、構造体間で変形の影響が伝わり難い構成で閉塞可能な圧力容器及びシール部材を提供するものである。   The present invention solves the above-described problems, and provides a pressure vessel and a seal member that can close a gap between structures with a configuration in which the influence of deformation is not easily transmitted between the structures.

対を成す構造体と、前記構造体同士の間隙を密封状態で閉塞するシール部材とを備える圧力容器であって、
前記シール部材は、一方の前記構造体に取り付けられる一端側シール部と、他方の前記構造体に取り付けられる他端側シール部と、前記一端側シール部と前記他端側シール部とを連結し表面が平坦な可撓性を有する連結部とから成る構成であることを特徴とする圧力容器に係るものである。 A pressure vessel comprising a pair of structures and a seal member that seals a gap between the structures in a sealed state,
The seal member connects one end side seal portion attached to one of the structures, the other end side seal portion attached to the other structure, and the one end side seal portion and the other end side seal portion. The present invention relates to a pressure vessel characterized in that the surface comprises a flexible connecting portion having a flat surface.

本発明は上述のように構成したから、構造体間の間隙を、構造体間で変形の影響が伝わり難い構成で閉塞可能な圧力容器及びシール部材となる。   Since the present invention is configured as described above, a pressure vessel and a seal member that can close a gap between structures with a configuration in which the influence of deformation is not easily transmitted between the structures are provided.

本実施例の概略説明断面図である。It is a schematic explanatory sectional drawing of a present Example. 本実施例の要部の拡大概略説明断面図である。It is an expansion outline explanatory sectional view of the important section of this example. 本実施例の要部の拡大概略説明断面図である。It is an expansion outline explanatory sectional view of the important section of this example. 本実施例のシール部材の概略説明斜視図である。It is a schematic explanatory perspective view of the sealing member of a present Example. 別例１の概略説明断面図である。10 is a schematic explanatory sectional view of another example 1. FIG. 別例２の概略説明斜視図である。12 is a schematic explanatory perspective view of another example 2. FIG. 別例３の概略説明断面図である。10 is a schematic cross-sectional view of another example 3. FIG. 別例３の要部の拡大概略説明図である。10 is an enlarged schematic explanatory diagram of a main part of another example 3. FIG. 別例４の概略説明図である。10 is a schematic explanatory diagram of another example 4. FIG. シール部の断面形状例を説明する概略説明図である。It is a schematic explanatory drawing explaining the cross-sectional shape example of a seal part.

好適と考える本発明の実施形態を、図面に基づいて本発明の作用を示して簡単に説明する。   An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

一方の構造体に一端側シール部２を取り付け、他方の構造体に他端側シール部３を取り付けて構造体間の間隙を閉塞する。この際、圧力容器内が高真空状態に至り、いずれか一方の構造体が変形しても、この一方の構造体の変形に追従して連結部４が可動変形することで、一方の構造体の変形の影響が他方の構造体に伝わり難くなり（構造体同士が縁切りされ）、一方の構造体の変形に伴う他方の構造体の変形が抑制される。   One end side seal portion 2 is attached to one structure, and the other end side seal portion 3 is attached to the other structure to close the gap between the structures. At this time, even if the inside of the pressure vessel reaches a high vacuum state and any one of the structural bodies is deformed, the connecting portion 4 is movably deformed following the deformation of the one structural body, so that the one structural body The influence of the deformation is not easily transmitted to the other structure (the structures are separated from each other), and the deformation of the other structure accompanying the deformation of one structure is suppressed.

従って、例えば、変形しても他の部材への影響が少ない変形を許容できる構造体には、板厚を厚くする等して必要以上の剛性を付与する必要がなくなり、剛性が必要な構造体にのみ変形しない程度の剛性を付与すればよく、よって、装置重量の増加を抑制可能となる。   Therefore, for example, a structure that can be deformed with little influence on other members even if deformed does not need to be given more rigidity than necessary by increasing the plate thickness, etc. It is only necessary to provide rigidity that does not deform only to the surface, and thus it is possible to suppress an increase in the weight of the apparatus.

本発明の具体的な実施例について図面に基づいて説明する。   Specific embodiments of the present invention will be described with reference to the drawings.

本実施例は、対を成す構造体と、前記構造体同士の間隙を密封状態で閉塞するシール部材１とを備える圧力容器であって、前記シール部材１は、一方の前記構造体に取り付けられる一端側シール部２と、他方の前記構造体に取り付けられる他端側シール部３と、前記一端側シール部２と前記他端側シール部３とを連結し表面が平坦な可撓性を有する連結部４とから成る構成である。   A present Example is a pressure vessel provided with the structure which makes a pair, and the sealing member 1 which obstruct | occludes the gap | interval of the said structures in a sealing state, Comprising: The said sealing member 1 is attached to one said structure. The one-end-side seal portion 2, the other-end-side seal portion 3 attached to the other structure, and the one-end-side seal portion 2 and the other-end-side seal portion 3 are connected so that the surface has flexibility. The connecting portion 4 is configured.

具体的には本実施例は、例えば真空成膜装置の各真空室を構成する圧力容器であり、図１に図示したような圧力容器本体11と、圧力容器本体11に設けた円形状の上部開口部を閉塞する円板状の蓋体12、同じく圧力容器本体11に設けた矩形状の下部開口部を閉塞する矩形板状の底板体13との間の間隙を夫々別々のシール部材１により密閉状態で閉塞するものである。図１中、符号30は圧力容器本体11及び底板体13を支持する支持脚、31は支持脚31が設置される架台である。   Specifically, this embodiment is a pressure vessel constituting each vacuum chamber of a vacuum film forming apparatus, for example, and includes a pressure vessel main body 11 as shown in FIG. 1 and a circular upper portion provided on the pressure vessel main body 11. The gap between the disc-shaped lid 12 that closes the opening and the rectangular bottom plate 13 that closes the rectangular lower opening provided in the pressure vessel main body 11 is separated by a separate sealing member 1. It closes in a sealed state. In FIG. 1, reference numeral 30 denotes a support leg that supports the pressure vessel main body 11 and the bottom plate body 13, and 31 denotes a frame on which the support leg 31 is installed.

また、対を成す構造体（圧力容器本体11と蓋体12及び圧力容器本体11と底板体13）は、一方を大気圧によって変形し難い構成とし、他方を大気圧によって変形し易い構成としている。   Further, the structure (the pressure vessel main body 11 and the lid body 12 and the pressure vessel main body 11 and the bottom plate body 13) forming a pair has a configuration in which one is not easily deformed by the atmospheric pressure and the other is easily deformed by the atmospheric pressure. .

本実施例の蓋体12及び底板体13は、内部機構系、例えば基板を保持するための基板保持部14や蒸発源を基板に対して移動させるための移動機構15等が取り付けられる部材であり、圧力容器内部を大気状態とした場合と真空状態とした場合とで、変形や変位が可及的に生じないものである必要がある。   The lid 12 and the bottom plate 13 of the present embodiment are members to which an internal mechanism system, for example, a substrate holding unit 14 for holding the substrate, a moving mechanism 15 for moving the evaporation source with respect to the substrate, and the like are attached. It is necessary that deformation and displacement do not occur as much as possible when the pressure vessel is in an atmospheric state and in a vacuum state.

一方、圧力容器本体11は、内部を高真空状態とした場合に大気圧との差圧により多少変形しても、この変形が蓋体12及び底板体13に伝わらないのであれば、内部機構系には特に影響はない。   On the other hand, if the pressure vessel main body 11 is slightly deformed due to the differential pressure from the atmospheric pressure when the inside is in a high vacuum state, the internal mechanism system will not be transmitted to the lid body 12 and the bottom plate body 13. Has no particular effect.

従って、本実施例においては、圧力容器内部を高真空状態とした際に変形しない程度に蓋体12及び底板体13の剛性を高くして大気圧によって変形し難い構成とする一方、圧力容器本体11には必要以上の剛性を付与せず、圧力容器内部が高真空状態に至った際に差圧により変形し易い構成としている。   Therefore, in this embodiment, the lid 12 and the bottom plate 13 are so rigid that they are not deformed when the inside of the pressure vessel is in a high vacuum state, and the pressure vessel body is not easily deformed by atmospheric pressure. 11 does not have an unnecessarily high rigidity, and is easily deformed by a differential pressure when the inside of the pressure vessel reaches a high vacuum state.

１つ目のシール部材１は、図２に図示したように、一方の構造体である圧力容器本体11の上部開口の周囲に取り付けられる一端側シール部２と、圧力容器本体11の上部開口の内周面16ａと対向する他方の構造体である蓋体12の外周面17に沿って取り付けられる他端側シール部３と、前記一端側シール部２と前記他端側シール部３とを連結し表面が平坦な可撓性を有する帯状の連結部４とから成る構成である。１つ目のシール部材１（上側のシール部材１）は全体として円環状である。   As shown in FIG. 2, the first seal member 1 includes one end side seal portion 2 attached to the periphery of the upper opening of the pressure vessel main body 11 as one structure, and the upper opening of the pressure vessel main body 11. The other end side seal portion 3 attached along the outer peripheral surface 17 of the lid 12 which is the other structure facing the inner peripheral surface 16a, and the one end side seal portion 2 and the other end side seal portion 3 are connected. In this configuration, the surface is formed of a belt-like connecting portion 4 having a flat surface and flexibility. The first seal member 1 (upper seal member 1) has an annular shape as a whole.

２つ目のシール部材１は、図２に図示したように、一方の構造体である圧力容器本体11の下部開口の周囲に取り付けられる一端側シール部２と、圧力容器本体11の下部開口の内周面16ｂと対向する他方の構造体である底板体13の外周面18に沿って取り付けられる他端側シール部３と、前記一端側シール部２と前記他端側シール部３とを連結し表面が平坦な可撓性を有する帯状の連結部４とから成る構成である。２つ目のシール部材１（下側のシール部材１）は全体として角環状である。   As shown in FIG. 2, the second seal member 1 includes one end side seal portion 2 attached around the lower opening of the pressure vessel main body 11 which is one structure, and the lower opening of the pressure vessel main body 11. The other end side seal portion 3 attached along the outer peripheral surface 18 of the bottom plate body 13 which is the other structure facing the inner peripheral surface 16b, and the one end side seal portion 2 and the other end side seal portion 3 are connected. In this configuration, the surface is formed of a belt-like connecting portion 4 having a flat surface and flexibility. The second seal member 1 (the lower seal member 1) has an annular shape as a whole.

図４に図示したように、シール部材１の一端側シール部２及び他端側シール部３は夫々断面円形のＯリング２，３である（第一のＯリング２及び第二のＯリング３）。即ち、本実施例のシール部材１は、第一及び第二のＯリング２，３の双方を当該Ｏリング２，３の全周に渡って連結する連結部４を有し、前記第一及び第二のＯリング２，３の周長が異なる二重型のシール部材である。このシール部材１により構造体間の間隙の全体が覆われて密閉状態で閉塞される。また、Ｏリング２，３の厚さは連結部４より厚く設定されている。   As shown in FIG. 4, the one end side seal portion 2 and the other end side seal portion 3 of the seal member 1 are O-rings 2 and 3 having a circular cross section (the first O ring 2 and the second O ring 3). ). That is, the seal member 1 of the present embodiment has a connecting portion 4 that connects both the first and second O-rings 2 and 3 over the entire circumference of the O-rings 2 and 3. The second O-rings 2 and 3 are double-type seal members having different peripheral lengths. The entire gap between the structures is covered with the seal member 1 and closed in a sealed state. The thickness of the O-rings 2 and 3 is set to be thicker than that of the connecting portion 4.

連結部４は前記対を成す構造体の相対的な可動を所望の範囲内で許容するように構成されている。具体的には、図３に図示したように、圧力容器内部を真空状態とした際に、構造体間にズレが生じても良好に弾性変形し、構造体が変形しても断裂しない程度の所定の可撓性を有する構成としている。   The connecting portion 4 is configured to allow relative movement of the paired structures within a desired range. Specifically, as shown in FIG. 3, when the inside of the pressure vessel is in a vacuum state, it is elastically deformed well even if there is a gap between the structures, and it does not rupture even if the structure is deformed. It is set as the structure which has predetermined | prescribed flexibility.

本実施例のシール部材１はゴム製の一体成型品である。   The seal member 1 of this embodiment is an integrally molded product made of rubber.

なお、第一及び第二のＯリング２，３と連結部４とで硬度や伸び率を異ならせても良い。例えば連結部４の硬度を第一及び第二のＯリング２，３より低く、連結部４の伸び率を第一及び第二のＯリング２，３より高くした場合には、連結部４の弾性変形が一層良好に行われる。   The first and second O-rings 2 and 3 and the connecting portion 4 may have different hardness and elongation. For example, when the hardness of the connecting portion 4 is lower than that of the first and second O-rings 2 and 3 and the elongation percentage of the connecting portion 4 is higher than that of the first and second O-rings 2 and 3, Elastic deformation is performed better.

シール部材１は第一及び第二のＯリング２，３を夫々押しつぶすようにして夫々構造体に取り付けられる環状の取付部材５ａ，５ｂ，６ａ，６ｂにより押圧固定される。上側のシール部材１の取付部材５ａ，５ｂは円環状、下側のシール部材１の取付部材６ａ，６ｂは角環状である。図中符号７は、取付部材５ａ，５ｂ，６ａ，６ｂを締結するためのネジである。   The seal member 1 is pressed and fixed by annular mounting members 5a, 5b, 6a, and 6b that are respectively attached to the structure so as to crush the first and second O-rings 2 and 3, respectively. The attachment members 5a and 5b of the upper seal member 1 are annular, and the attachment members 6a and 6b of the lower seal member 1 are rectangular. Reference numeral 7 in the drawing denotes a screw for fastening the attachment members 5a, 5b, 6a, 6b.

本実施例においては、圧力容器本体11と蓋体12との間隙を閉塞する上側のシール部材１の第一のＯリング２及び第二のＯリング３は圧力容器の外側に取り付けられ、圧力容器本体11と底板体13との間隙を閉塞する下側のシール部材１の第一のＯリング２及び第二のＯリング３は圧力容器の内側に取り付けられている。   In the present embodiment, the first O-ring 2 and the second O-ring 3 of the upper seal member 1 that closes the gap between the pressure vessel main body 11 and the lid 12 are attached to the outside of the pressure vessel. The first O-ring 2 and the second O-ring 3 of the lower seal member 1 that closes the gap between the main body 11 and the bottom plate body 13 are attached to the inside of the pressure vessel.

従って、蓋体12を取り外すことで、圧力容器本体11の上部開口を通じて下側のシール部材１の交換を行うことが可能となり、支持脚31により圧力容器本体11及び底板体13が支持される構成であっても下側のシール部材１の交換を容易に行えることになる。   Therefore, by removing the lid 12, the lower seal member 1 can be replaced through the upper opening of the pressure vessel body 11, and the pressure vessel body 11 and the bottom plate body 13 are supported by the support legs 31. Even so, the lower seal member 1 can be easily replaced.

取付部材５ａ，５ｂ，６ａ，６ｂの内面全周にはＯリング２，３を押圧する傾斜面20ａ，20ｂ，21ａ，21ｂを有する溝部22ａ，22ｂ，23ａ，23ｂが設けられている。また、圧力容器本体11、蓋体12及び底板体13の取付部材５ａ，５ｂ，６ａ，６ｂとの対向面には取付部材の傾斜面20ａ，20ｂ，21ａ，21ｂと対向する傾斜面24ａ，24ｂ，25ａ，25ｂを有する溝部26ａ，26ｂ，27ａ，27ｂが設けられている。各溝部は対向して略アリ溝状を呈するように、各傾斜面が先端側ほど、対向する構造体若しくは取付部材に近接するように傾斜するように設定されており、この傾斜面で挟まれたＯリング２，３がより確実に圧縮されるように構成されている。   Grooves 22a, 22b, 23a, and 23b having inclined surfaces 20a, 20b, 21a, and 21b that press the O-rings 2 and 3 are provided on the entire inner surface of the mounting members 5a, 5b, 6a, and 6b. The pressure vessel main body 11, the cover 12 and the bottom plate 13 are opposed to the attachment members 5a, 5b, 6a, 6b on the inclined surfaces 24a, 24b opposed to the inclined surfaces 20a, 20b, 21a, 21b of the attachment members. , 25a, 25b are provided with grooves 26a, 26b, 27a, 27b. Each groove is set so that each inclined surface is inclined so as to be closer to the opposing structure or mounting member toward the tip side so that each groove portion faces and has a substantially dovetail shape, and is sandwiched between the inclined surfaces. Further, the O-rings 2 and 3 are configured to be more reliably compressed.

また、取付部材５ａ，５ｂ，６ａ，６ｂと圧力容器本体11、蓋体12及び底板体13との間には夫々間隙28が設けられ、この間隙28を通過する大気により対向する前記傾斜面同士に挟まれるＯリング２，３が該傾斜面に押し付けられるように構成されている。従って、Ｏリング２，３による構造体同士の間隙の密閉閉塞が一層良好に行われる。   Further, gaps 28 are respectively provided between the mounting members 5a, 5b, 6a, 6b and the pressure vessel main body 11, the lid body 12 and the bottom plate body 13, and the inclined surfaces facing each other by the air passing through the gap 28 are provided. The O-rings 2 and 3 sandwiched between the two are configured to be pressed against the inclined surface. Therefore, the sealing and closing of the gap between the structures by the O-rings 2 and 3 is performed more satisfactorily.

なお、本実施例は上述のように圧力容器に２つのシール部材を設けた構成としているが、１つのシール部材を設ける構成でも、３つ以上のシール部材を設ける構成としても良い。   In addition, although the present Example is set as the structure which provided the two sealing members in the pressure vessel as mentioned above, it is good also as a structure which provides one sealing member or a structure which provides three or more sealing members.

例えば図５に図示した別例１のように、圧力容器本体11の下部にのみ円形状の開口を設け、この開口を閉塞する円板状の底板体13と圧力容器本体11との隙間をシール部材１により閉塞する構成としても良い。別例１では、底板体13に搬送用ロボット29を設け、底板体13を支持台32で支持する構成としている。   For example, as in Example 1 shown in FIG. 5, a circular opening is provided only at the lower portion of the pressure vessel body 11, and the gap between the disk-shaped bottom plate body 13 and the pressure vessel body 11 that closes the opening is sealed. It is good also as a structure obstruct | occluded by the member 1. FIG. In another example, the bottom plate 13 is provided with a transfer robot 29 and the bottom plate 13 is supported by a support base 32.

この場合、底板体13及び支持体32が圧力容器内部を真空状態とした際に変形しない程度の剛性を付与しておけば、圧力容器本体11が変形してもこの変形や振動は底板体13及び搬送用ロボット29に影響しない構成とすることができ、圧力容器内部の大気状態・真空状態を問わず搬送用ロボット29のロボットハンドの搬送高さを維持できる。   In this case, if the bottom plate 13 and the support 32 are provided with such rigidity that they do not deform when the inside of the pressure vessel is in a vacuum state, even if the pressure vessel main body 11 is deformed, this deformation and vibration will not occur. In addition, the height of the robot hand of the transfer robot 29 can be maintained regardless of the atmospheric state or vacuum state inside the pressure vessel.

また、図６に図示した別例２のように、シール部材１として、第一のＯリング２と、第二のＯリング３と、前記第一及び第二のＯリング２，３の双方を当該Ｏリング２，３の全周に渡って連結する連結部４とを有し、前記第一及び第二のＯリング２，３の周長が同一である並列型のシール部材１を用いても良い（その余の構成は二重型のシール部材１と同様。）。   Further, as another example 2 illustrated in FIG. 6, the first O-ring 2, the second O-ring 3, and both the first and second O-rings 2 and 3 are used as the sealing member 1. A connecting portion 4 that is connected over the entire circumference of the O-rings 2 and 3, and the first and second O-rings 2 and 3 have the same peripheral length, and the parallel seal member 1 is used. (The rest of the configuration is the same as that of the double seal member 1).

この場合、例えば、図７に図示した別例３のように、一方が開口した箱状部材41，42の開口端部同士を突き合せ状態で連結することができる。具体的には、一方の構造体である箱状部材41の開口の周囲に第一のＯリング２を取付部材43により押圧固定し、他方の構造体である箱状部材42の開口の周囲に第二のＯリング３を取付部材44により押圧固定する。図７中、符号45は取付部材43，44を締結するためのネジである。   In this case, for example, as in another example 3 illustrated in FIG. 7, the open end portions of the box-shaped members 41 and 42 opened on one side can be connected to each other in a butted state. Specifically, the first O-ring 2 is pressed and fixed by the mounting member 43 around the opening of the box-shaped member 41 which is one structure, and around the opening of the box-shaped member 42 which is the other structure. The second O-ring 3 is pressed and fixed by the mounting member 44. In FIG. 7, reference numeral 45 denotes a screw for fastening the attachment members 43 and 44.

別例３の並列型のシール部材１のＯリング２，３は角部をＲ形状とした角環状である。このＯリング２，３の取付部材43，44は、角部においても良好にＯリング２，３を押圧するため、複数の分割体を組み合わせて構成されている。具体的には、図８に図示したように角部の分割体Ａとその両側の分割体Ｂ，Ｃとの連結構造を、角部の分割体Ａの両端部の下向き傾斜面Ｄにより、両側の分割体Ｂ，Ｃの端部の上向き傾斜面Ｅを押さえ込む構造としている。従って、分割体Ａをネジ45で箱状部材41，42に締結することで、分割体Ｂ，Ｃが良好に押さえ込まれ、Ｏリング２，３による密閉閉塞が開口の全周で確実に行われる。   The O-rings 2 and 3 of the parallel-type seal member 1 of another example 3 have a rectangular shape with corners having an R shape. The mounting members 43 and 44 of the O-rings 2 and 3 are configured by combining a plurality of divided bodies in order to press the O-rings 2 and 3 well even at the corners. Specifically, as shown in FIG. 8, the connecting structure of the corner divided body A and the divided bodies B and C on both sides thereof is formed on both sides by the downward inclined surfaces D on both ends of the corner divided body A. It is set as the structure which presses down the upward inclined surface E of the edge part of these division bodies B and C. As shown in FIG. Therefore, by fastening the divided body A to the box-shaped members 41, 42 with the screws 45, the divided bodies B, C are satisfactorily pressed, and hermetic closure by the O-rings 2, 3 is reliably performed all around the opening. .

また、並列型のシール部材１は、連結部４の可撓性を（連結部４が伸長することを）利用して、図９に図示した別例４のように、圧力容器同士を連結する際に溶接ベローズと同様に用いることも可能である。図９中、符号Ｘ，Ｙは真空室、46は仕切弁、47は真空室Ｘ側の連結部、48は真空室Ｙ側の連結部である。   Moreover, the parallel-type seal member 1 uses the flexibility of the connecting portion 4 (that the connecting portion 4 extends) to connect the pressure vessels to each other as in Example 4 illustrated in FIG. In this case, it can be used in the same manner as the welding bellows. In FIG. 9, reference numerals X and Y are vacuum chambers, 46 is a gate valve, 47 is a connecting portion on the vacuum chamber X side, and 48 is a connecting portion on the vacuum chamber Y side.

なお、本実施例のシール部材１のシール部は断面円形のＯリングとしているが、図１０に図示したように他の形状としても良い。（ａ）は断面矩形状、（ｂ）は断面台形状、（ｃ）及び（ｄ）は端部を膨出させた形状である。   In addition, although the sealing part of the sealing member 1 of the present embodiment is an O-ring having a circular cross section, it may have another shape as illustrated in FIG. (A) is a rectangular cross section, (b) is a trapezoidal cross section, and (c) and (d) are shapes in which the ends are bulged.

本発明は、本実施例に限られるものではなく、各構成要件の具体的構成は適宜設計し得るものである。   The present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

１ シール部材
２ 一端側シール部材（第一のＯリング）
３ 他端側シール部材（第二のＯリング）
４ 連結部 1 Seal member 2 One end side seal member (first O-ring)
3 Seal member on the other end (second O-ring)
4 connecting parts

Claims (8)

対を成す構造体と、前記構造体同士の間隙を密封状態で閉塞するシール部材とを備える圧力容器であって、
前記シール部材は、一方の前記構造体に取り付けられる一端側シール部と、他方の前記構造体に取り付けられる他端側シール部と、前記一端側シール部と前記他端側シール部とを連結し表面が平坦な可撓性を有する連結部とから成る構成であることを特徴とする圧力容器。 A pressure vessel comprising a pair of structures and a seal member that seals a gap between the structures in a sealed state,
The seal member connects one end side seal portion attached to one of the structures, the other end side seal portion attached to the other structure, and the one end side seal portion and the other end side seal portion. A pressure vessel comprising a connecting portion having a flat and flexible surface. 対を成す構造体と、前記構造体同士の間隙を密封状態で閉塞するシール部材とを備える圧力容器であって、
前記シール部材は、一方の前記構造体の開口の周囲に取り付けられる一端側シール部と、他方の前記構造体の開口の周囲に取り付けられるか、若しくは、前記一方の構造体の開口の内周面と対向する前記他方の構造体の外周面に沿って取り付けられる他端側シール部と、前記一端側シール部と前記他端側シール部とを連結し表面が平坦な可撓性を有する連結部とから成る構成であることを特徴とする圧力容器。 A pressure vessel comprising a pair of structures and a seal member that seals a gap between the structures in a sealed state,
The seal member is attached to one end side seal portion attached around the opening of one of the structures and the periphery of the opening of the other structure, or the inner peripheral surface of the opening of the one structure The other end side seal part attached along the outer peripheral surface of the other structure facing the other, and the one end side seal part and the other end side seal part are connected to each other and have a flexible surface. A pressure vessel characterized by comprising: 前記連結部は前記対を成す構造体の相対的な可動を所望の範囲内で許容するように構成されていることを特徴とする請求項１，２のいずれか１項に記載の圧力容器。   The pressure vessel according to any one of claims 1 and 2, wherein the connecting portion is configured to allow relative movement of the paired structures within a desired range. 前記シール部材を複数有し、一の前記シール部材の前記一端側シール部及び前記他端側シール部は圧力容器の外側に取り付けられ、他の前記シール部材の前記一端側シール部及び前記他端側シール部は圧力容器の内側に取り付けられていることを特徴とする請求項１〜３のいずれか１項に記載の圧力容器。   A plurality of the seal members, the one end side seal portion and the other end side seal portion of one of the seal members are attached to the outside of the pressure vessel, and the one end side seal portion and the other end of the other seal member The pressure vessel according to any one of claims 1 to 3, wherein the side seal portion is attached to the inside of the pressure vessel. 対を成す構造体と、前記構造体同士の間隙を密封状態で閉塞するシール部材とを備える圧力容器であって、
前記シール部材は、第一のＯリングと、第二のＯリングと、前記第一及び第二のＯリングの双方を当該Ｏリングの全周に渡って連結する可撓性を有する連結部とを有し、
一方の前記構造体の開口の周囲に前記第一のＯリングが押圧固定され、他方の前記構造体の開口の周囲、若しくは、前記一方の構造体の開口の内周面と対向する前記他方の構造体の外周面に沿って前記第二のＯリングが押圧固定されていることを特徴とする圧力容器。 A pressure vessel comprising a pair of structures and a seal member that seals a gap between the structures in a sealed state,
The seal member includes a first O-ring, a second O-ring, and a flexible connecting portion that connects both the first and second O-rings over the entire circumference of the O-ring. Have
The first O-ring is pressed and fixed around the opening of one of the structures, and the other O-ring is opposed to the periphery of the opening of the other structure or the inner peripheral surface of the opening of the one structure. The pressure vessel, wherein the second O-ring is pressed and fixed along the outer peripheral surface of the structure. 前記連結部は前記対を成す構造体の相対的な可動を所望の範囲内で許容するように構成されていることを特徴とする請求項５に記載の圧力容器。   The pressure vessel according to claim 5, wherein the connecting portion is configured to allow relative movement of the paired structures within a desired range. 前記シール部材を複数有し、一の前記シール部材の前記第一のＯリング及び前記第二のＯリングは圧力容器の外側に取り付けられ、他の前記シール部材の前記第一のＯリング及び前記第二のＯリングは圧力容器の内側に取り付けられていることを特徴とする請求項５，６のいずれか１項に記載の圧力容器。   A plurality of the seal members, wherein the first O-ring and the second O-ring of one of the seal members are attached to the outside of the pressure vessel, and the first O-ring of the other seal member and the The pressure vessel according to any one of claims 5 and 6, wherein the second O-ring is attached to the inside of the pressure vessel. 第一のＯリングと、第二のＯリングと、前記第一及び第二のＯリングの双方を当該Ｏリングの全周に渡って連結する連結部とを有し、前記第一及び第二のＯリングの周長が同一であることを特徴とするシール部材。   A first O-ring; a second O-ring; and a connecting portion that connects both the first and second O-rings over the entire circumference of the O-ring. A sealing member characterized in that the circumference of the O-ring is the same.
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