CN108240471A - Pressure vessel and containment member - Google Patents
Pressure vessel and containment member Download PDFInfo
- Publication number
- CN108240471A CN108240471A CN201711379416.9A CN201711379416A CN108240471A CN 108240471 A CN108240471 A CN 108240471A CN 201711379416 A CN201711379416 A CN 201711379416A CN 108240471 A CN108240471 A CN 108240471A
- Authority
- CN
- China
- Prior art keywords
- pressure vessel
- ring
- tectosome
- containment member
- linking part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J12/00—Pressure vessels in general
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Sealing Devices (AREA)
- Packages (AREA)
Abstract
The present invention provide it is a kind of can by the gap between tectosome by be difficult to transmit between tectosome deformation influence structure come the pressure vessel closed.The pressure vessel has pairs of tectosome and the containment member for closing in the gap between the tectosome with sealing state (1), and the containment member (1) includes：One end side seals (2) are installed on the tectosome of a side；Another side sealing (3) is installed on the tectosome of the opposing party；And linking part 4, link one end side seals (2) and the another side sealing (3), surface is flat and with flexibility.
Description
Technical field
The present invention relates to pressure vessel and containment members.
Background technology
In the opening/closing portion of the pressure vessels such as vacuum chamber, such as pressure vessel disclosed in Fig. 2 in patent document 1 is opened
Between oral area and the cover for closing the opening portion, it is provided with the O-ring (O-ring seals) in both closed gap.
In addition, in order to apply preload to O-ring to improve leakproofness, usually cover (pressed component of O-ring) is passed through
Pressure vessel is anchored on by O-ring.
Existing technical literature
Patent document
1 Japanese Unexamined Patent Publication 2004-235538 bulletins of patent document
The subject that the invention solves
But the pressed component of O-ring is fastened onto the desired mounting surface of pressure vessel via O-ring, thus presses
Tight component becomes the construction substantially integrated with pressure vessel.
Therefore, when reaching high vacuum state from atmospheric condition inside pressure vessel, if leading to pressure due to pressure differential
Container is deformed, then pressed component of O-ring etc. is installed on the component of pressure vessel or its mounting surface is also possible to generate change
Shape or displacement.
Therefore it with following subject, i.e., in view of above-mentioned deformation, needs by thickening or chasing after the plate thickness of pressure vessel
Add for rib of reinforcement etc. to add rigidity more than necessity to pressure vessel, so the weight increase of pressure vessel.
Invention content
The present invention can utilize its purpose is to provide one kind for solving the above subject and be difficult to transmit change between tectosome
The structure of the influence of shape carrys out the pressure vessel and containment member in the gap between closed construction body.
Means for solving the problems
A kind of pressure vessel is had pairs of tectosome and is sealed in the gap between the tectosome with sealing state
The containment member closed, the pressure vessel be characterized in that,
The containment member includes：One end side seals are installed on the tectosome of a side；Another side seals
Portion is installed on the tectosome of the opposing party；And linking part, link one end side seals and the another side
Sealing, surface are flat and with flexibility.
Invention effect
Since the present invention is formed as described above, becoming can be by the gap between tectosome by being difficult between tectosome
The pressure vessel and containment member for transmitting the structure of the influence of deformation to close.
Description of the drawings
Fig. 1 is that the present embodiment outlines sectional view.
Fig. 2 is that the expansion of the major part of the present embodiment outlines sectional view.
Fig. 3 is that the expansion of the major part of the present embodiment outlines sectional view.
Fig. 4 is that the containment member of the present embodiment outlines stereogram.
Fig. 5 is that other examples 1 outline sectional view.
Fig. 6 is that other examples 2 outline stereogram.
Fig. 7 is that other examples 3 outline sectional view.
Fig. 8 is the expansion outline figure of the major part of other examples 3.
Fig. 9 is the outline figure of other examples 4.
Figure 10 is the outline figure for the cross sectional shape example for illustrating sealing.
Specific embodiment
Based on attached drawing show the present invention effect and to thinking that preferred embodiments of the present invention simply illustrate.
One end side seals 2 are installed in the tectosome of a side, in the tectosome installation another side sealing 3 of the opposing party
Gap between closed construction body.At this point, it even if reaches high vacuum state in pressure vessel and the tectosome of either side occurs
Deformation, due to linking part 4 follow the tectosome of a side deformation can movement and deformation, so the deformation of the tectosome of a side
Influence also to be difficult to be transmitted to the tectosome (cutting off relationship between tectosome) of the opposing party, with the tectosome of a side deformation it is another
The deformation of the tectosome of one side is inhibited.
It is therefore not necessary to the rigidity being capable of more than tectosome necessity of allowable strain is assigned such as thickening plate thickness, it is above-mentioned
Tectosome even if deform the influence to other components it is less, only do not deform to needing the imparting of rigid tectosome
The rigidity of degree, thereby, it is possible to the increases of restraining device weight.
[embodiment]
Based on attached drawing, the specific embodiment of the present invention is illustrated.
The present embodiment is that have pairs of tectosome and close in the mutual gap of above-mentioned tectosome with sealing state
The pressure vessel of containment member 1, above-mentioned containment member 1 include：One end side seals 2 are installed on the above-mentioned tectosome of a side；
Another side sealing 3 is installed on the above-mentioned tectosome of the opposing party；And linking part 4, link above-mentioned one end side seals
2 with above-mentioned another side sealing 3, surface it is flat and with flexibility.
Specifically, the present embodiment is the pressure vessel for each vacuum chamber for for example forming vacuum film formation apparatus, it is by Fig. 1
Gap, pressure vessel main body 11 and the bottom plate of rectangular plate-like between shown pressure vessel main body 11 and discoid cover 12
Gap between body 13 is utilized respectively the container that respective containment member 1 is closed with air-tight state, the above-mentioned closing of cover 12 setting
In the circular upper opening portion of pressure vessel main body 11, bottom-plate body 13 closes the rectangle for being set to uniform pressure container body 11
Lower openings portion.In Fig. 1, reference numeral 30 is to support the supporting leg of pressure vessel main body 11 and bottom-plate body 13, and 31 are
It is provided with the rack of supporting leg 31.
In addition, pairs of tectosome (pressure vessel main body 11 and cover 12 and pressure vessel main body 11 and bottom-plate body 13)
A side be set as the structure for being difficult to deform due to atmospheric pressure, the opposing party is set as easily due to atmospheric pressure becoming
The structure of shape.
The cover 12 and bottom-plate body 13 of the present embodiment are installation internal mechanism system (such as the substrates for keeping substrate
Maintaining part 14, for making mobile mechanism 15 that evaporation source moves relative to substrate etc.) component, need inside by pressure vessel
In the case of being set as the situation of atmospheric condition and being set as vacuum state, do not deform as possible or displacement.
On the other hand, though pressure vessel main body 11 in the case where inside is set as high vacuum state due to atmospheric pressure
Pressure differential and slightly deform, as long as the deformation is not delivered to cover 12 and bottom-plate body 13, just to internal mechanism system
Do not influence particularly.
Therefore, in the present embodiment, the rigidity of cover 12 and bottom-plate body 13 is increased to inside by pressure vessel and set
Degree not deform during high vacuum state is thus configured to be difficult to deform due to atmospheric pressure, on the other hand, right
Pressure vessel main body 11 does not assign rigidity more than necessity, is thus configured to hold when reaching high vacuum state inside pressure vessel
Easily deformed due to pressure differential.
First containment member 1 includes as shown in Figure 2：One end side seals 2 are installed on tectosome as a side
Around the upper opening of pressure vessel main body 11；Another side sealing 3 is opened along the top with pressure vessel main body 11
Mouthful the opposite tectosomes as the opposing party of inner peripheral surface 16a cover 12 peripheral surface 17 and be mounted；And band-like company
Knot 4, links above-mentioned one end side seals 2 and above-mentioned another side sealing 3, and surface is flat and with flexibility.First
Containment member 1 (containment member 1 of upside) is in integrally circular ring shape.
Second containment member 1 includes as shown in Figure 2：One end side seals 2 are installed on tectosome as a side
Around the lower openings of pressure vessel main body 11；Another side sealing 3 is opened along the lower part with pressure vessel main body 11
Mouthful the opposite tectosomes as the opposing party of inner peripheral surface 16b bottom-plate body 13 peripheral surface 18 and be mounted；It is and band-like
Linking part 4, links above-mentioned one end side seals 2 and above-mentioned another side sealing 3, and surface is flat and with flexibility.Second
A containment member 1 (containment member 1 of downside) is integrally in side's annular.
As shown in figure 4, one end side seals 2 and another side sealing 3 of containment member 1 are respectively section circle
O-ring 2,3 (the first O-ring 2 and the second O-ring 3).That is, the containment member 1 of the present embodiment has linking part 4, the linking part
4 link 2 and second O-ring of the first O-ring, 3 both sides fullly throughout O-ring 2,3, and the containment member 1 of the present embodiment is
The containment member of the different doublet type of the perimeter of above-mentioned first O-ring, 2 and second O-ring 3.It is covered using the containment member 1
The entirety in the gap between tectosome is so that the entirety in the gap between the tectosome is closed with air-tight state.In addition, O-ring 2,3
Thickness is set as thicker than linking part 4.
Linking part 4 is configured to allow above-mentioned pairs of tectosome that can carry out relative motion in desired range.Specifically
For, as shown in figure 3, the linking part 4 is configured to, when being set as vacuum state inside by pressure vessel, even if between tectosome
It generates and deviates the linking part 4 and also carry out flexible deformation well, and with not broken degree even if tectosome deforms
Defined flexibility.
The containment member 1 of the present embodiment is the integrated molding product of rubber system.
In addition it is also possible to make the hardness of the first O-ring 2 and the second O-ring 3 and linking part 4, elongation different.Such as
In the hardness of linking part 4, elongation smaller than the hardness of the first O-ring 2 and the second O-ring 3 and linking part 4 is than the first O-ring
2 and second O-ring 3 elongation it is big in the case of, the flexible deformation of linking part 4 carries out more well.
Fixing seal component 1 is pressed using cricoid installation component 5a, 5b, 6a, 6b for being respectively arranged in tectosome, so as to
The first O-ring 2 and the second O-ring 3 are squeezed respectively.Installation component 5a, 5b of the containment member 1 of upside are circular, downsides
Containment member 1 installation component 6a, 6b sides of being ring-type.Reference numeral 7 is for fastening installation component 5a, 5b, 6a, 6b in figure
Screw.
In the present embodiment, closed pressure container main body 11 and the first O of the containment member 1 of the upside in the gap of cover 12
2 and second O-ring 3 of shape circle is installed in the outside of pressure vessel, closed pressure container main body 11 and the gap of bottom-plate body 13
Downside containment member 1 the first O-ring 2 and the second O-ring 3 be installed in the inside of pressure vessel.
Therefore, by removing cover 12, the sealing structure of upper opening progress downside that can be Jing Guo pressure vessel main body 11
The replacement of part 1, even supporting pressure vessel main body 11 and the structure of bottom-plate body 13 by supporting leg 31, also can easily into
The replacement of the containment member 1 of row downside.
The inner surface week of installation component 5a, 5b, 6a, 6b be provided with pressing O-ring 2,3 inclined surface 20a,
Groove portion 22a, 22b, 23a, 23b of 20b, 21a, 21b.In addition, pressure vessel main body 11, cover 12 and bottom-plate body 13 with
Installation component 5a, 5b, 6a, 6b opposite forward surface is provided with inclined surface 20a, 20b, 21a, 21b phase with installation component
To inclined surface 24a, 24b, 25a, 25b groove portion 26a, 26b, 27a, 27b.To make each groove portion opposite and in substantially dovetail groove
Each groove portion is set as each inclined surface more by front end side more closely tilted to opposite tectosome or installation component by shape, by
The O-ring 2,3 of inclined surface clamping is more reliably compressed.
In addition, between installation component 5a, 5b, 6a, 6b and pressure vessel main body 11, cover 12 and bottom-plate body 13 respectively
Gap 28 is provided with, the O-ring 2,3 being held between opposite above-mentioned inclined surface is pressed using the air by gap 28
It is against the inclined surface.Therefore, the closed closing in the gap between 2,3 pairs of tectosomes of O-ring carries out more well.
In addition, the present embodiment is set as setting as described above the structure of two containment members in pressure vessel, but can also
The structure of the containment member of structure or setting three or more for one containment member of setting.
Such as other examples 1 shown in fig. 5 are such, can also be configured to only set in the lower part of pressure vessel main body 11 and justify
The opening of shape, and closed using containment member 1 by the discoid bottom-plate body 13 of the closure of openings and pressure vessel main body 11
Gap.In other examples 1, it is configured to set transport robot 29 in bottom-plate body 13, and by 32 bearing plate body of supporting station
13。
In this case, if when imparting bottom-plate body 13 and supporting mass 32 are set as vacuum state inside by pressure vessel not
The rigidity of the degree to deform deforms even if can then be configured to pressure vessel main body 11, and the deformation, vibration will not
It influences bottom-plate body 13 and transports with robot 29, no matter and be atmospheric condition or vacuum state inside pressure vessel, all
It is able to maintain that the transport height of the robot of transport robot 29.
In addition, other examples 2 as shown in Figure 6 are such, as containment member 1, the sealing structure of parallel type can also be used
Part 1, the containment member 1 of the parallel type have the first O-ring 2, the second O-ring 3 and linking part 4, which spreads the O
Shape circle 2,3 links above-mentioned first O-ring, 2 and second O-ring, 3 both sides, above-mentioned first O-ring, 2 and the 2nd O shapes fullly
Identical (remaining structure is identical with the containment member 1 of doublet type for the perimeter of circle 3.).
In this case, such as other examples shown in Fig. 73 are such, the box-like component 41,42 that a side can be open
Open end is linked each other with the state of docking.Specifically, work is fixed in the pressing of first O-ring 2 using installation component 43
Around the opening of the box-like component 41 of tectosome for a side, work is fixed in the pressing of second O-ring 3 using installation component 44
Around the opening of the box-like component 42 of tectosome for the opposing party.In the figure 7, reference numeral 45 is for fastening installation component
43rd, 44 screw.
The O-ring 2,3 of the containment member 1 of the parallel type of other examples 3 is side's annular that corner is set as to R shapes.In order to make
The installation component 43,44 of the O-ring 2,3 also presses O-ring 2,3 well in corner, and multiple dividing bodies are combined and form this
Installation component 43,44.Specifically, as shown in figure 8, the connection of the dividing body A in corner and dividing body B, C of its both sides are constructed
Be configured to, be pressed into from the inclined-plane D that dips down at the both ends of the dividing body A in corner dividing body B, C of both sides end to updip
Inclined-plane E.Therefore, by the way that dividing body A is anchored on box-like component 41,42 by screw 45, dividing body B, C are pressed into well, by O
The closed week for being enclosed in opening that shape circle 2,3 carries out reliably carries out.
In addition, by using the flexibility (linking part 4 extends) of linking part 4, other examples 4 that can also be as shown in Figure 9 that
Sample is used in the same manner the containment member 1 of parallel type when linking pressure vessel each other with welding bellows.In fig.9, attached drawing mark
It is vacuum chamber to remember X, Y, and 46 be gate valve, and 47 be the linking part of vacuum chamber X sides, and 48 be the linking part of vacuum chamber Y sides.
In addition, the sealing of the containment member 1 of the present embodiment is set as the O-ring of section circle, but can also be such as Figure 10
It is shown to be set as other shapes.(a) it is section rectangle, (b) is that section is trapezoidal, and (c) and (d) is the shape for swelling end.
The present invention is not limited to the present embodiment, the concrete structure of each constitutive requirements is obtained by appropriately designed.
Reference sign
1：Containment member；2：One end containment member (the first O-ring)；3：Another side containment member (the second O-ring)；
4：Linking part.
Claims (10)
1. a kind of pressure vessel is had pairs of tectosome and is closed in the gap between the tectosome with sealing state
Containment member, the pressure vessel is characterized in that,
The containment member includes：One end side seals are installed on the tectosome of a side；Another side sealing,
It is installed on the tectosome of the opposing party；And linking part, link one end side seals and sealed with the another side
Portion, surface are flat and with flexibility.
2. a kind of pressure vessel is had pairs of tectosome and is closed in the gap between the tectosome with sealing state
Containment member, the pressure vessel is characterized in that,
The containment member includes：One end side seals are installed on around the opening of the tectosome of a side；The other end
Side seals, around the opening for the tectosome for being installed on the opposing party or along the tectosome with the party
The peripheral surface of the tectosome of the opposite described the opposing party of the inner peripheral surface of opening and be mounted；And linking part, connection described one
End side sealing and the another side sealing, surface are flat and with flexibility.
3. pressure vessel according to claim 1, which is characterized in that
The linking part is configured to allow the pairs of tectosome being capable of relative motion in desired range.
4. pressure vessel according to claim 2, which is characterized in that
The linking part is configured to allow the pairs of tectosome being capable of relative motion in desired range.
5. pressure vessel according to any one of claims 1 to 4, which is characterized in that
The pressure vessel has multiple containment members, one end side seals of containment member and institute
State the outside that another side sealing is installed on pressure vessel, one end side seals of other containment members and
The another side sealing is installed on the inside of pressure vessel.
6. a kind of pressure vessel is had pairs of tectosome and is closed in the gap between the tectosome with sealing state
Containment member, the pressure vessel is characterized in that,
The containment member has：First O-ring；Second O-ring；And linking part, the linking part spread first O-ring
And second O-ring link fullly first O-ring and the second O-ring both sides and with flexibility,
First O-ring is pressed around the opening for the tectosome for being fixed on a side, and second O-ring is pressed
It is fixed on the inner peripheral surface of the opening around the opening of the tectosome of the opposing party or along the tectosome with the party
The peripheral surface of the tectosome of opposite described the opposing party and be pressed fixation.
7. pressure vessel according to claim 6, which is characterized in that
The linking part is configured to allow the pairs of tectosome being capable of relative motion in desired range.
8. pressure vessel according to claim 6, which is characterized in that
The pressure vessel has multiple containment members, first O-ring of containment member and described
Second O-ring is installed on the outside of pressure vessel, first O-ring and the 2nd O of other containment members
Shape circle is installed on the inside of pressure vessel.
9. pressure vessel according to claim 7, which is characterized in that
The pressure vessel has multiple containment members, first O-ring of containment member and described
Second O-ring is installed on the outside of pressure vessel, first O-ring and the 2nd O of other containment members
Shape circle is installed on the inside of pressure vessel.
10. a kind of containment member, which is characterized in that
The containment member has：First O-ring；Second O-ring；And linking part, spread first O-ring and second
O-ring links first O-ring and the second O-ring both sides fullly, first O-ring and the second O-ring
Perimeter is identical.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-251333 | 2016-12-26 | ||
| JP2016251333A JP6890968B2 (en) | 2016-12-26 | 2016-12-26 | Pressure vessel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108240471A true CN108240471A (en) | 2018-07-03 |
| CN108240471B CN108240471B (en) | 2021-11-16 |
Family
ID=62700630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711379416.9A Active CN108240471B (en) | 2016-12-26 | 2017-12-20 | Pressure vessel and sealing member |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6890968B2 (en) |
| KR (1) | KR102397291B1 (en) |
| CN (1) | CN108240471B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111609137A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Flexible sealing device |
| CN111609079A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7299725B2 (en) * | 2019-03-15 | 2023-06-28 | キヤノントッキ株式会社 | Deposition equipment, deposition system |
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| JPH11260891A (en) * | 1998-01-16 | 1999-09-24 | Brooks Autom Inc | Robot non-connection fixing technique |
| CN105408204A (en) * | 2013-09-11 | 2016-03-16 | 三菱重工业株式会社 | Dam for fuel tank and closing method |
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| JPS5552129Y2 (en) * | 1975-05-27 | 1980-12-03 | ||
| JPH11132336A (en) * | 1997-10-30 | 1999-05-21 | Uniden Corp | Seal structure of junction part of housing, seal member, and casing provided with seal structure |
| JPH11311334A (en) * | 1998-04-27 | 1999-11-09 | Mitsubishi Cable Ind Ltd | Seal |
| JP2000161495A (en) * | 1998-11-25 | 2000-06-16 | Japan Organo Co Ltd | Sealing method and member for position to be connected |
| JP2011202744A (en) * | 2010-03-25 | 2011-10-13 | Nissin Electric Co Ltd | Vacuum seal structure, vacuum seal method, and vacuum device |
| US20150176744A1 (en) * | 2013-12-20 | 2015-06-25 | Onesubsea Ip Uk Limited | Gasket |
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2016
- 2016-12-26 JP JP2016251333A patent/JP6890968B2/en active Active
-
2017
- 2017-12-14 KR KR1020170171967A patent/KR102397291B1/en active IP Right Grant
- 2017-12-20 CN CN201711379416.9A patent/CN108240471B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11260891A (en) * | 1998-01-16 | 1999-09-24 | Brooks Autom Inc | Robot non-connection fixing technique |
| CN105408204A (en) * | 2013-09-11 | 2016-03-16 | 三菱重工业株式会社 | Dam for fuel tank and closing method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111609137A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Flexible sealing device |
| CN111609079A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| CN111609137B (en) * | 2020-05-28 | 2022-07-12 | 中国电子工程设计院有限公司 | Flexible sealing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108240471B (en) | 2021-11-16 |
| KR20180075389A (en) | 2018-07-04 |
| KR102397291B1 (en) | 2022-05-11 |
| JP2018105389A (en) | 2018-07-05 |
| JP6890968B2 (en) | 2021-06-18 |
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