JPH1130703A - Plastic optical parts having antireflection film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain plastic optical parts having antireflection films which are manufactured by utilizing a sputtering method and have the high evaluation of film performance by using specific multilayered films deposited by laminating high-refractive index materials and low-refractive index materials as the antireflection films. SOLUTION: The optical parts are formed by applying the antireflection films 13 on at least one surface of a plastic base material 11. The antireflection films 13 are the multilayered films 131 to 140 deposited by substantially consisting the first layer 131 on the plastic base material 11 side of a high refractive index material and consisting the next layer 132 thereof of the low- refractive index material and alternately laminating the high-refractive index materials and the low-refractive index materials. The main wavelength range thereof is 480 to 550 nm, the stimulus purity range thereof is 10 to 30% and the visual reflectivity thereof is 0.7 to 1.8%. The multilayered films are so formed as to exhibit interference colors of a green system. Since the antireflection films are designed to induce the interference colors of the green system, a lens having excellent aesthetic feel and high commercial value is obtd. if the spectacle plastic lens is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plastic optical component having an antireflection film, and more particularly to a plastic optical component such as a spectacle plastic lens in which an antireflection film having a high evaluation of film performance is formed by a sputtering method. .

[0002]

2. Description of the Related Art In recent years, plastics have been frequently used in eyeglass lenses from the viewpoint of light weight and excellent impact resistance. In this spectacle plastic lens, antireflection films are provided on both surfaces. The antireflection film has a function of preventing surface reflection from the spectacle plastic lens. This is because surface reflection lowers the transmittance of the optical system, increases the amount of light that does not contribute to imaging, and lowers the contrast of the image. Conventionally, the antireflection film of the spectacle plastic lens has been formed as a single layer film or a multilayer film mainly by a vacuum evaporation method.

[0003]

At present, an antireflection film is formed on a plastic lens or the like of a spectacle with a simple structure using a sputtering method (or a sputtering method), and a method and apparatus for forming a film with improved productivity. Is being proposed. This film forming apparatus is equipped with a sputter film forming chamber in which a different thin film can be produced by exchanging a target in a vacuum vessel, and a multilayer film is formed on the lens surface in the sputter film forming chamber without exposing the spectacle plastic lens to the atmosphere. An anti-reflection film can be formed, and both surfaces of the lens can be simultaneously formed. According to this film forming apparatus, since film formation can be performed simultaneously on both surfaces of the spectacle plastic lens, film forming conditions on both surfaces of the lens are the same, and there is an advantage that a film of the same quality can be formed on both surfaces of the lens. Further, in the case where a multilayer film is deposited on the lens surface, for example, when two types of films having different properties (high-refractive-index material and low-refractive-index material) are alternately and repeatedly laminated to form a film, Since two targets according to the material of each film are equipped in the film formation chamber and the targets are exchanged, it is only necessary to alternately repeat the sputter film formation. There is an advantage that the film can be easily formed and the thickness of each layer can be accurately controlled.

Therefore, a new multilayer film structure is used for an antireflection film of a plastic optical component such as an eyeglass plastic lens manufactured by using the above-described new film forming method using a sputtering method and a film forming apparatus. It is possible to propose an antireflection film having high performance evaluation.

In the evaluation of the film performance of an eyeglass lens, the interference color is an important evaluation item. The interference color is a color generated by the interference of white light, and if replaced with a spectacle plastic lens on which a multilayer antireflection film is formed, the interference exhibited by the reflected light when a transparent thin film having a different refractive index is formed on the lens surface. Color. Generally, interference colors of commercially available lenses with an anti-reflection film are of three types: blue, purple, and green.
Are roughly divided into Among them, green interference colors are excellent in ocular physiology and aesthetics, and are particularly excellent in commercial value, but there are various technical problems such as selection of film raw materials, setting of film thickness, film forming conditions and the like. However, a technique for stably giving the interference color has not been established yet.

SUMMARY OF THE INVENTION An object of the present invention is to meet the above-mentioned demands. An anti-reflection film having a new multilayer structure, which has a high evaluation of film performance, is manufactured mainly by utilizing a sputtering method. An object of the present invention is to provide a plastic optical component.

Another object of the present invention is to provide an antireflection film of high commercial value which is used for a spectacle plastic lens and which can stably impart a green interference color with the lens and is excellent in ocular physiology and aesthetics. An object of the present invention is to provide a plastic optical component having:

[0008]

A plastic optical component having an antireflection film according to the present invention is configured as follows in order to achieve the above objects.

First plastic optical component (corresponding to claim 1): A plastic optical component in which an antireflection film is applied to at least one surface of a plastic substrate, and the antireflection film is provided on the plastic substrate side. A multilayer film formed by alternately stacking these high-refractive-index substances and low-refractive-index substances, wherein the first layer is substantially a high-refractive-index substance and the next layer is a low-refractive-index substance, Furthermore, the main wavelength range is 480 to 550 nm, the stimulus purity range is 10 to 30%,
It is formed to have a luminous reflectance of 0.7 to 1.8% and exhibit a green-based interference color.

In the above plastic optical component, a multilayer antireflection film is designed and manufactured so as to generate a green interference color. Therefore, when the plastic optical component is used as a spectacle plastic lens, a commercial product having excellent aesthetic feeling is obtained. High value lens can be realized.

A second plastic optical component (corresponding to claim 2): a plastic optical component obtained by applying an antireflection film to at least one surface of a plastic substrate, wherein the antireflection film is provided on the plastic substrate side. The first layer is formed of a high refractive index material and the next layer is formed of a low refractive index material, and the high refractive index material and the low refractive index material are alternately laminated to form a multilayer film. Further, the thickness of the low-refractive index substance located in the intermediate region in the antireflection film having the multilayer structure is relatively increased so as to obtain the hardness and durability required for the antireflection film. ing.

In the above-mentioned plastic optical component, a high refractive index film is used as a first layer and a low refractive index film is used as a second layer, and a high refractive index film and a low refractive index film are alternately formed. An anti-reflection film is formed. The thin film of each layer forming the anti-reflection film is appropriately controlled so that its thickness and film quality satisfy desired conditions, and as a result, an anti-reflection film having high film performance is realized. In addition, a desired antireflection film can be easily produced from the viewpoint of film design. The film performance such as hardness and durability is enhanced by increasing the thickness of a low refractive index film located in an intermediate region as an antireflection film applied to a plastic substrate.

Third plastic optical component (corresponding to claim 3): In the first or second plastic optical component, preferably, the high refractive index material is zirconium (Zr), titanium (Ti), tantalum ( Ta), or a metal oxide formed by a sputtering method using a target made of an alloy of two or more of them, and the low refractive index material is a silicon (Si) target. This is a metal oxide formed by a sputtering method.

Fourth plastic optical component (corresponding to claim 4): In the third plastic optical component, preferably, the target of the high-refractive index substance is configured to include Si. Thereby, the high refractive index film is formed containing Si, and the hardness, durability, and the like of the film are improved.

Fifth plastic optical component (corresponding to claim 5): In the third plastic optical component, preferably, a Si target is provided separately from the high refractive index material target when the high refractive index material is formed. The two types of targets are simultaneously sputtered to form a high refractive index substance as a mixed film. Also in this case, the high refractive index film contains Si to improve the film hardness and the like.

Sixth plastic optical component (corresponding to claim 6): In each of the above plastic optical components, the total thickness of the antireflection film is preferably 4800 to 580.
0 angstrom, and the total thickness of the low refractive index material is 3500 angstrom or more.

Seventh plastic optical component (corresponding to claim 7): In each of the above plastic optical components, when the plastic substrate has a curvature, an antireflection film is formed as a broadband film. This makes it possible to reduce interference color unevenness caused by a difference in film thickness distribution due to curvature dependency during film formation by sputtering, and interference color change caused by oblique incidence.

Eighth plastic optical component (corresponding to claim 8): In each of the above plastic optical components, preferably, the plastic substrate is a plastic lens substrate for spectacles, and both sides of the plastic substrate. The antireflection film having a multilayer structure is formed on the substrate.

Ninth plastic optical component (corresponding to claim 9): In the plastic optical component described above, the antireflection film is preferably composed of 10 layers, and is formed of a low refractive index material of a sixth layer located in the middle. The film thickness was increased.

[0020]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

In the present embodiment, an example of an eyeglass plastic lens will be described as an example of a plastic optical component, and an antireflection film formed on both surfaces of the eyeglass plastic lens will be described. The optical component to which the antireflection film according to the present invention is applied is optimally a plastic lens for spectacles, but is not limited thereto.

FIG. 1 is a schematic sectional view showing a typical example of a film structure of an antireflection film, and FIG. 2 is a structural diagram showing an example of a sputter film forming apparatus. Although the anti-reflection film is applied to both surfaces of the lens, FIG. 1 shows a cross-sectional structure of only one surface of the anti-reflection film for convenience of explanation. The other surface of the lens is also provided with an antireflection film having a similar structure.

The plastic substrate 11 shown in FIG. 1 is a substrate of a spectacle plastic lens. Plastic substrate 1
Examples of the material 1 include CR-39 (diethylene glycol bisallyl carbonate polymer, nd = 1.499)
Is used. On the surface of the plastic substrate 11,
The hard film 12 is coated for the purpose of increasing the hardness of the surface. For the hard film 12, for example, an organosilicon resin containing colloidal silica is used, and details of the composition are described in, for example, Japanese Patent Publication No. 4-55615.

The plastic substrate of the spectacle plastic lens usually has a curvature and a curved shape. However, in FIG. 1, it is shown in a flat plate form for convenience of explanation. When a plastic substrate is curved, the film deposited thereon generally curves along the substrate surface.

The antireflection film 13 applied to the plastic substrate 11 is formed on the hard film since the hard film 12 is coated in this embodiment. As shown in FIG. 1, the antireflection film 13 according to the present embodiment is configured as, for example, a multilayer film having 10 layers. In this antireflection film 13, the lowermost film 131 located on the side of the plastic substrate 11 is a high refractive index film. High refractive index film 131
Next, a low refractive index film 132 is formed. Thereafter, these films 133 to 140 are sequentially and alternately and repeatedly formed in the order of the high refractive index film and the low refractive index film. As a result, the first layer, the third layer, the fifth layer, the seventh layer, the ninth layer
The layers 131, 133, 135, 137, and 139 are high-refractive-index films, and include the second, fourth, sixth, eighth, and first layers.
The zero-layer films 132, 134, 136, 138, and 140 are stacked as low-refractive-index films to form the antireflection film 13 having a multilayer structure.

In the case of this embodiment, the high refractive index material forming the high refractive index film is, for example, a metal oxide ZrO ₂ of zirconium (Zr), and the low refractive index material forming the low refractive index film is For example, metal oxide S of silicon (Si)
iO ₂ . As the high refractive index substance, any one of metal oxides of titanium (Ti) and tantalum (Ta) can be used. Further, zirconium (Zr), titanium (Ti), and tantalum (Ta) are used as high refractive index substances.
Of these, metal oxides composed of two or more alloys can also be used. The high-refractive-index film and the low-refractive-index film described above are produced by using a sputtering method as described later. Therefore, a target of a high refractive index substance and a target of a low refractive index substance are prepared.

The above high refractive index film can be formed as a mixed film containing the above high refractive index substance and Si. By including Si in the high refractive index film, it is possible to improve performance such as hardness and durability of the film. As a method of forming such a mixed film, for example, two methods can be used. A first method is to include Si in the high refractive index material target.
By performing sputter film formation using such a target, a high-refractive-index film containing Si can be deposited. A second method is to provide a Si target separately from the high refractive index material target. The target of the high refractive index material and the target of Si are sputtered simultaneously to form a mixed film. As the Si target, a low refractive index material target can be used in combination.

In the antireflection film 13 having a multilayer structure formed as described above, the thickness of the high refractive index film and the low refractive index film of each layer is as follows when λ is 500 nm (nanometer).
Preferably, it is set as follows.

The thickness of the high refractive index film of the first layer is 0.075λ.
To 0.085λ, the thickness of the low refractive index film of the second layer is included in the range of 0.115λ to 0.130λ, and the thickness of the high refractive index film of the third layer is 0.177λ. ~ 0.199λ
And the thickness of the low refractive index film of the fourth layer is 0.10
The thickness of the high refractive index film of the fifth layer is included in the range of 0.102λ to 0.115λ, and the thickness of the low refractive index film of the sixth layer is 0.1 nm. 471λ ~ 0.5
The thickness of the high refractive index film of the seventh layer is included in the range of 0.102λ to 0.115λ, and the thickness of the low refractive index film of the eighth layer is included in the range of 0.045λ to 0. 060λ, and the thickness of the ninth high refractive index film is 0.270λ to
The thickness of the low refractive index film of the tenth layer is set so as to be included in the range of 0.244λ to 0.275λ. In the above, the most preferable value of the film thickness of each layer is the center value in each range.

The total thickness of the anti-reflection film 13 is preferably in the range of 4800 to 5800 angstroms, and more preferably, the total thickness of the low refractive index film is 3500 angstroms or more. This is to ensure the required hardness of the antireflection film, durability such as abrasion resistance, adhesion of the film, and the like. In the case of the present embodiment, in particular, the thickness of the low refractive index film 136 of the sixth layer located in the intermediate region is made relatively thicker than the other films, whereby the antireflection film 13 is formed. The required film thickness is achieved, and the required conditions such as hardness and durability are satisfied. The reason why the middle film among the plurality of low refractive index films is relatively thick is based on the reason that such a structure is suitable from the viewpoint of the stress or the like of the film.

The number of layers of the anti-reflection film 13 is not limited to the above-mentioned 10 layers. The number of layers of the antireflection film having a multilayer film structure is preferably small from the viewpoint of film productivity, but is arbitrarily determined in relation to required film performance.

As described above, the plastic base material of the ordinary spectacle plastic lens has a curvature and a curved shape. When the antireflection film 13 having the multilayer structure shown in FIG. 1 is formed on a curved plastic substrate by using a sputtering method as described later, depending on the curvature of each part of the plastic substrate. A difference in film thickness distribution occurs, causing interference color unevenness and interference color change due to oblique incidence. Therefore, in order to reduce such a problem, it is preferable that the above-described antireflection film 13 is designed as a film having broadband characteristics.

Next, with reference to FIG. 2, an example of an apparatus for manufacturing the anti-reflection film 13 using a sputtering method and a manufacturing process will be outlined. FIG. 2 shows a longitudinal section of a main part of the sputtering film forming apparatus. According to this sputtering film forming apparatus, it is possible to simultaneously form the antireflection film 13 having the above-mentioned multilayer film structure on both surfaces of the plastic substrate 11.

This sputtering film forming apparatus can be roughly divided into an introduction chamber 21 for carrying an object to be processed, and a vacuum for alternately forming a high refractive index film and a low refractive index film on both surfaces of the plastic substrate 11. A processing chamber (sputter film forming chamber) 22 and a preliminary processing chamber 23 are provided. Introducing chamber 21 and vacuum processing chamber 2
2 and each of the pretreatment chambers 23 have gate valves 24, 2
It is divided by five. The gate valves 24 and 25 are opened and closed at appropriate timing when an object is taken in and out.

The substrate holder 26 carried into the sputtering film forming apparatus via the introduction chamber 21 is
And set inside the vacuum processing chamber 22. In FIG. 2, the illustration of the loading / unloading mechanism for transferring the substrate holder 26 is omitted. The substrate holder 26 has, for example, a disk shape. The substrate holder 26 has a large number of substrate holding holes 26a. The plastic substrate 11 for the spectacle plastic lens is disposed in these holes 26a. Since the base material holding holes 26a are opened upward and downward, the plastic base material 11 held in the base material holding holes 26a faces the spaces above and below the substrate holder 26. As a result, the antireflection film 13 is formed on both surfaces of the plastic substrate 11 by the sputtering method.

More specifically, the step of sputtering film formation in the vacuum processing chamber 22 comprises a sputtering step of forming a metal-based thin film and a conversion step of converting the metal-based thin film deposited in this sputtering step into an oxide thin film. Is done. Therefore, in the vacuum processing chamber 22, the sputtering process area 22
A and a conversion process area 22B are provided.

In the vacuum processing chamber 22, the substrate holder 26
Are connected to the upper support member 27 and the lower support member 28.
And is arranged horizontally. The upper support member 27 and the lower support member 28 are driven vertically by a hydraulic cylinder (not shown) or the like, and are rotatable by a built-in motor rotation mechanism. When the anti-reflection film 13 is formed on the plastic substrate 11, the substrate holder 26 is kept in a rotating state at a required rotation speed by the rotation of the upper support member 27 and the lower support member 28. Therefore, the substrate holder 2
6 pass through the sputter process area 22A and the conversion process area 22B, during which the plastic base material 11
A receives the sputter film forming process, and receives the conversion process in the conversion process area 22B.

In the sputtering process area 22A, a sputtering device is provided above and below the substrate holder 26. Each sputtering apparatus includes a target 31 and a sputter electrode 32.
A sputtering power supply 33, a sputtering gas cylinder 34,
It is composed of a mass flow 35. When the substrate holder 26 rotates and the plastic substrate 11 comes between the upper and lower targets 31, the target material emitted from the target 31 in a sputtered state is deposited on both surfaces of the plastic substrate 11, and both surfaces of the plastic substrate 11 are deposited. Then, a thin film of the target material is formed. At this time, a sputtering gas such as an argon gas is introduced from the sputtering gas cylinder 34 through the mass flow 35, and the sputtering atmosphere is adjusted.

In the sputtering film formation in the vacuum processing chamber 22, the first layer is formed of a metal oxide film having a high refractive index on the basis of the above-mentioned sputtering process and a conversion process to be described later in order to form the anti-reflection film 13 described above. The material ZrO ₂ is deposited, and the second
A metal oxide SiO ₂ that is a low refractive index film is formed on the layer,
Thereafter, high refractive index films ZrO ₂ and low refractive index films SiO ₂ are alternately formed up to the tenth layer. Sputter process area 22A
In, a metal that is a source of each metal oxide is deposited. First
In the first sputtering step for forming the high-refractive-index film 131, a target made of zirconium Zr is prepared as the target 31, and Zr is formed on both surfaces of the plastic substrate 11. Next, in the sputtering process for forming the low refractive index film 132 of the second layer, silicon S
The target is replaced with another target made of i, sputtering is performed, and Si is formed on both surfaces of the plastic substrate 11. By alternately replacing the target with a substance for a high-refractive-index film or a substance for a low-refractive-index film in this manner, the high-refractive-index film and the low-refractive-index film are alternately laminated to produce the antireflection film 13. Can be. In FIG. 2, a mechanism for exchanging the target is not shown.

In the conversion process area 22B, the substrate holder 26
An inductively-coupled plasma generator is provided above and below. The inductively coupled plasma generator includes a high-frequency discharge chamber 41, a high-frequency coil 42, a matching box 43.
, A high-frequency power supply 44, a reactive gas cylinder 45, and a mass flow 46. The substrate holder 26 rotates,
When the plastic substrate 11 to be treated comes between the upper and lower inductively coupled plasma generators, the plastic substrate 11 is exposed to the plasma of oxygen introduced from the reactive gas cylinder 45 via the mass flow 46, and is subjected to a sputtering process. The formed metal (Zr or Si) is oxidized to form an oxide (Zr
O ₂ or SiO ₂ ).

As described above, in the vacuum processing chamber 22, the sputtering process and the conversion process are repeated while exchanging the targets on both surfaces of the large number of plastic substrates 11 on the substrate holder 26 rotatably set therein. By doing
The ZrO ₂ shown in FIG.
An antireflection film 13 having a multilayer structure composed of a (high-refractive-index film) and SiO ₂ (low-refractive-index film) is formed.

A shielding member 47 is provided inside the vacuum processing chamber 22 to separate the above-mentioned sputtering process area 22A from the conversion process area 22B.

In the above-mentioned sputtering film forming apparatus, an example of a film forming condition of ZrO ₂ which is a high refractive index film in the sputtering step is as follows.

(1) Sputter gas: Argon gas (A
r) is used to provide a flow rate in the range of 380-580 cc / min. (2) Oxidizing gas: Oxygen gas (O ₂ ) is 46 to 60 cc /
It is supplied at a flow rate in the range of minutes. (3) Degree of vacuum during film formation: 8.7 × 10 ⁻³ Torr. (4) Sputter output: DC power is supplied within a range of 3.3 to 3.7 kW. (5) Oxidation gun output: RF power is 0.4 kW
Supplied. (6) Film formation rate: 320 to 360 angstroms /
Minutes.

In a sputtering film forming apparatus, one example of a film forming condition of SiO ₂ which is a low refractive index film in a sputtering step is as follows.
It is as follows.

(1) Sputter gas: Argon gas (A
r) is used and a flow rate in the range of 110-190 cc / min is provided. (2) Oxidizing gas: Oxygen gas (O ₂ ) is 64 to 70 cc /
It is supplied at a flow rate in the range of minutes. (3) The degree of vacuum during film formation: 2.4 × 10 ⁻³ Torr. (4) Sputter output: DC power is supplied within the range of 5.1 to 5.3 kW (5) Oxidation gun output: High frequency (RF) power is 0.4 kW
Supplied. (6) Film formation rate: 340 to 380 angstroms /
Minutes.

The antireflection film 13 obtained as described above
Regarding the antireflection film in the spectacle plastic lens having the following, the film performance at the initial stage after film formation and the film performance after one month of constant temperature and humidity are shown below.

In the above film performance, abrasion resistance, adhesion, alkali resistance, heat resistance, acid resistance, artificial sweat resistance, and interference color were evaluated and measured in the following manner.

(1) Abrasion resistance: A steel wool test was performed. In this test, steel wool # 0000
And the extent to which the antireflection film was scratched was visually judged. (2) Adhesion: The surface of the plastic lens having the anti-reflection film was cross-cut at 100 mm intervals at 1 mm intervals, and cellophane tape was strongly adhered. Examined. (3) Alkali resistance: A plastic lens having an antireflection film was immersed in a 10 wt% aqueous NaOH solution for 1 hour, and the erosion state of the surface of the multilayer antireflection film was observed. (4) Heat resistance: A plastic lens having an anti-reflection film was placed in an oven for 1 hour and heated to check for cracks. The heating temperature was started from 70 ° C. and increased in 5 ° C. increments. (5) Acid resistance: 10 wt% HCl solution and 10 wt% H ₂
A plastic lens provided with an antireflection film was immersed in an aqueous solution of SO ₄ for 1 hour, and the erosion state of the surface of the multilayer antireflection film was observed. (6) Anti-artificial sweat: A plastic lens with an anti-reflective coating is immersed in artificially made sweat containing NaCl, Na ₂ S, NH ₄ , and lactic acid at a temperature of 20 ° C. for 24 hours to form a multilayer anti-reflection. The erosion state of the film surface was observed. (7) Interference color: Light reflected by a fluorescent lamp was visually observed.

The initial film performance after the formation of the antireflection film 13 based on the above evaluation and measurement is as follows. (1) The abrasion resistance was hardly scratched and had no problem. (2) Regarding the adhesion, no peeling was observed at all of the 100 stitches. (3) Alkali resistance showed almost no damage and no problem. (4) Regarding heat resistance, cracks occurred at 75 ° C. (5) No change was observed in acid resistance, and there was no problem. (6) As for the artificial sweat resistance, no change was observed and there was no problem. (7) The interference color was green.

Further, the film performance of the antireflection film 13 after one month of constant temperature and constant humidity based on the above evaluation and measurement is as follows. (1) The abrasion resistance was hardly scratched and had no problem. (2) Regarding the adhesion, no peeling was observed at all of the 100 stitches. (3) Alkali resistance showed almost no damage and no problem. (4) As for heat resistance, cracks occurred at 60 ° C. (5) No change was observed in acid resistance, and there was no problem. (6) As for the artificial sweat resistance, no change was observed and there was no problem. (7) No change was observed in the green interference color, and there was no problem.

FIG. 3 shows a measurement example of a spectral reflectance curve of the antireflection film 13. As is apparent from this spectral reflectance curve, a low reflectance is achieved in a wide wavelength range of about 420 to 740 nm, and a broadband antireflection film is realized. In particular, the reflectance is relatively high in a wavelength range of about 480 to 550 nm.

Further, in the antireflection film according to the present invention, the dominant wavelength range is 480 to 550 nm and the stimulus purity range is 10 nm.
By setting the luminous reflectance to 0.7 to 1.8%, the interference color is made green. Here, the “dominant wavelength” is an element representing chromaticity by monochromatic display, and a wavelength corresponding to a point where a line connecting a point represented by chromaticity coordinates and a light source on a chromaticity diagram intersects a spectrum locus. In other words, the "stimulus purity" indicates how close the point of the dominant wavelength is from the light source to a light point on the spectrum locus from 0, and the closer the point, the brighter the color. When displaying the color of a reflective object, luminous reflectance and chromaticity are generally used.
Further, when the chromaticity is displayed in a single color, the above dominant wavelength and stimulus purity are used. The luminous reflectance is represented by a ratio of a light beam reflected from the object to a light beam incident on the object.

In the antireflection film according to the present embodiment having the spectral reflectance curve shown in FIG. 3, the main wavelength is 508 nm, the stimulus purity is 22%, the luminous reflectance is 0.963%, and the green interference It had a color.

In the above description, a method of forming an anti-reflection film by using a sputtering method has been described. However, an anti-reflection film having a similar multilayer structure can be formed by another method, for example, a vacuum deposition method or a C method.
It can also be manufactured by a VD method or the like.

In the above embodiment, the antireflection film having a multilayer structure is applied to both surfaces of the spectacle plastic lens substrate. In the case of other plastic optical parts, the antireflection film is applied only to one surface. It is also possible.

Further, in the above embodiment, the anti-reflection film 1
Although the first layer of No. 3 was the high refractive index film 131, it need not be strictly the first layer. For example, another film may be present between the hard film 12 and the high-refractive-index film 131. Therefore, the high-refractive-index film 131 may be substantially the first layer in the antireflection film 13.

[0058]

As is apparent from the above description, according to the present invention, the first layer is made of a high-refractive-index material on, for example, both surfaces of a plastic substrate such as an eyeglass plastic lens by mainly utilizing a sputtering method. The second layer is made of a low refractive index material, and an antireflection film having a multilayer structure in which a high refractive index material and a low refractive index material are alternately laminated is formed. Is relatively large, an antireflection film having a highly evaluated film performance can be realized. Further, since the antireflection film is formed as a film having a wide band, when the plastic substrate has a curvature, interference color unevenness caused by a difference in film thickness distribution due to curvature dependence during film formation by a sputtering method,
Interference color change due to oblique incidence can be reduced.
Further, a green interference color can be stably obtained, and a commercially valuable antireflection film having excellent ocular physiology and aesthetic feeling can be produced.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a structure of an antireflection film according to the present invention.

FIG. 2 is a configuration diagram of a sputtering film forming apparatus for producing an antireflection film according to the present invention.

FIG. 3 is a graph showing a spectral reflectance curve of the antireflection film according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Plastic base material 13 Anti-reflection film 22 Vacuum processing chamber (sputter deposition chamber) 26 Substrate holder 31 Target

Claims (9)

[Claims] 1. A plastic optical component in which an antireflection film is applied to at least one surface of a plastic substrate, wherein the antireflection film substantially changes the first layer on the plastic substrate side to a high refractive index material. And a multilayer film formed by alternately laminating these high-refractive-index substances and low-refractive-index substances with the next layer as a low-refractive-index substance, and further, the main wavelength range is 480 to 550 nm, Stimulation purity range 10-3
A plastic optical component having an antireflection film, wherein the plastic optical component has a luminous reflectance of 0.7% to 1.8% and exhibits a green interference color. 2. A plastic optical component comprising at least one surface of a plastic substrate provided with an anti-reflection film, wherein the anti-reflection film substantially changes the first layer on the plastic substrate side to a high refractive index substance. And the next layer as a low refractive index material, a multilayer film formed by alternately laminating these high refractive index material and low refractive index material, wherein the multilayer film is located in an intermediate region on the multilayer film A plastic optical component having an antireflection film, characterized in that the thickness of the low refractive index material is relatively increased so as to obtain required hardness and durability. 3. The high-refractive-index substance is a metal oxide formed by a sputtering method using a target made of any one of Zr, Ti, and Ta, or an alloy of two or more thereof. 3. The plastic optical component having an antireflection film according to claim 1, wherein the refractive index material is a metal oxide formed by a sputtering method using a Si target. 4. The method according to claim 1, wherein the target of the high refractive index material is S
The plastic optical component having an antireflection film according to claim 3, wherein i is included. 5. When forming the high-refractive-index substance, a Si target is provided separately from the target of the high-refractive-index substance, and two kinds of the targets are simultaneously sputtered to form the high-refractive-index substance as a mixed film. 4. A plastic optical component having an antireflection film according to claim 3, wherein the plastic optical component is formed. 6. The total thickness of the antireflection film is 4800 to 5
The plastic optical component having an anti-reflection coating according to any one of claims 1 to 3, wherein the plastic optical component is included in a range of 800 angstroms, wherein the total thickness of the low refractive index material is 3500 angstroms or more. . 7. When the plastic substrate has a curvature, the anti-reflection film is formed as a film having a wide band, and interference color unevenness caused by a difference in film thickness distribution due to curvature dependence during film formation by sputtering is oblique. The plastic optical component having an anti-reflection film according to claim 1, wherein a change in interference color due to incidence is reduced. 8. The plastic substrate is an eyeglass plastic lens substrate, and the antireflection film is formed on both surfaces of the plastic substrate.
A plastic optical component having the antireflection film according to any one of claims 3 and 7. 9. The anti-reflection film according to claim 1, wherein the anti-reflection film is composed of ten layers, and the thickness of the low-refractive-index substance of the sixth layer located in the middle is increased. A plastic optical component having the anti-reflection film according to claim 1.