JPH11306867A - Transparent conductive film and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transparent conductive film having high contact of a transparent high polymer substrate with a transparent conductive film layer, and good visibility, and where Newton's rings are not generated. SOLUTION: This transparent conductive film is composed of a transparent high polymer substrate 1 on one of the main surfaces of which an irregularities surface layer 2 is formed, and where an irregularities surface 2a of the uneven surface layer 2 is applied with corona discharge treatment and/or glow discharge treatment, a zinc oxide layer 3 laminated on the uneven surface 2a applied with the corona discharge treatment and/or the glow discharge treatment, and a transparent conductive film layer 4 laminated on the zinc oxide layer 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transparent conductive film and a method for producing the same, and more particularly, to a transparent conductive film suitably usable as a transparent electrode for a touch panel and a method for producing the same. More specifically, the adhesiveness between the transparent polymer substrate and the transparent conductive film layer laminated thereon is good, and when used as a transparent electrode of a touch panel, it has excellent durability and generates Newton rings. The present invention relates to a transparent conductive film that can be suppressed and a method for producing the same.

[0002]

2. Description of the Related Art In recent years, a transparent touch panel that allows input by simply touching a display screen with a finger or pressing with a pen has become widespread. The use of a touch panel makes it easier to handle devices that were conventionally complicated, such as ticket vending machines and bank cash dispensers, and a screen interactive method can be used, thus developing various new applications. Have been.

[0003] In a normal touch panel, two transparent electrodes facing each other are overlapped at a certain interval by a spacer or the like, and a predetermined position on the outer peripheral portion of each transparent electrode is used for connection to an external electric circuit. In particular, when an electrode mainly composed of a metal is provided, and the electrode used on the uppermost layer side of the liquid crystal display element, attention must be paid particularly to the transparency and the visibility and sharpness of an image.

[0004] In addition, since the touch panel is configured to contact the transparent electrodes from the outside with a finger or a pen or the like and obtain an input signal by a method of reading a contact location by a current change due to the contact, attention should be paid to the durability of the transparent electrode portion. I have to do it.
As the transparent electrode, a material obtained by laminating a transparent conductive film such as indium tin oxide (ITO) on a glass plate or a transparent polymer substrate is often used. Attention is focused on molecular substrates. However, there are various problems with a transparent conductor using a transparent polymer substrate, and these problems have been solved so far.

Conventionally known transparent conductive film layers include indium oxide and tin oxide doped with silicon oxide and aluminum oxide (JP-A-4-206403) and indium oxide and tin oxide doped with nitrogen. (JP-A-4-308612). However, simply laminating a transparent conductive film layer on a transparent polymer substrate has a significantly softer surface than a glass plate. There is a problem that the molecular substrate itself is broken.

Therefore, it is now common to use a transparent polymer substrate which has been subjected to a hard coat treatment. For example, Japanese Patent Application Laid-Open No. 8-14836 discloses a transparent conductive film obtained by bonding and laminating a polymer substrate having both surfaces hard-coated and another surface of a film provided with a transparent conductive film layer on one surface via an adhesive layer. A conductive film is shown. The polymer substrate subjected to the hard coating treatment has problems such as poor adhesion to the transparent conductive film layer and the transparent conductive film layer being peeled off from the polymer substrate by pen input or the like. Therefore,
Improvements have been made in that a layer for improving adhesion is provided between the transparent conductive film layer and the transparent polymer substrate. For example, JP
No. 4,972,729 discloses an example in which an aqueous polyester layer or a silicon oxide thin film layer is provided as a layer for improving adhesion.

However, when a transparent conductive laminate having no visible light interference fringes (Newton rings) and improved visibility is required as a next-generation touch panel material, a conventional hard coat treatment is performed. A polymer substrate is insufficient, and the following method has been proposed. By using a polymer substrate having a haze value (HAZE value) of 10% or more and subjected to a hard coat treatment, even if Newton rings occur, it is difficult for the naked eye to see. When using a polymer substrate having a haze value of 5% or less and subjected to a clear hard coat treatment, the distance between the upper electrode member and the lower electrode member in the touch panel is increased (0.1 mm or more) to eliminate a contact portion between the two. Prevent the generation of Newton rings. As described in JP-A-7-37466, the number of spacers is increased to eliminate a portion where the transparent conductive film layers are in contact with each other. However, when these methods are used, the sharpness of the surface image is reduced due to a large haze value, the image itself appears distant, and the input pressure must be increased due to the large distance, resulting in durability performance. And the input signal malfunctions.

[0008]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to comprehensively solve the problem relating to a transparent conductive film using a transparent polymer substrate, and to use a polymer substrate which has been subjected to unevenness treatment. In particular, it is an object of the present invention to provide a transparent conductive film which has high visibility, good adhesion to a transparent conductive film and does not generate Newton rings when used as a transparent electrode of a touch panel, and a method for producing the same.

[0009]

Means for Solving the Problems The inventors of the present invention have conducted intensive studies in order to solve the above-mentioned problems. As a result, the peak height of one of the transparent polymer substrates was 0.1 μm or more on one main surface.
μm or less and a peak of 20 to 200 peaks / cm
A corona discharge treatment and / or a glow discharge treatment are performed on the substrate on which the uneven surface layer is formed, and if necessary, a metal thin film layer mainly composed of nickel is laminated, and then a layer composed of zinc oxide is laminated, Finally, they have found that the above problem can be solved by a transparent conductive film in which a transparent conductive film layer is laminated. In addition, when the transparent conductive film layer is laminated on the uneven surface, the load applied to the transparent conductive film layer is reduced, and as a result, the durability is improved, and malfunction does not occur.
In a normal state where no load is applied, a point where the transparent conductive layers of the two transparent electrodes are in contact with each other is a point, and a resistance change that causes a voltage drop does not occur. The inventor has found that no malfunction such as operation occurs, and completed the present invention.

That is, the present invention relates to a transparent polymer substrate having an uneven surface layer formed on one main surface, and a corona discharge treatment and / or a glow discharge treatment applied to the uneven surface of the uneven surface layer; A transparent conductive layer comprising: a zinc oxide layer laminated on an uneven surface subjected to a discharge treatment and / or a glow discharge treatment; and a transparent conductive film layer laminated on the zinc oxide layer. Film.

The peak height of the irregularities on the irregular surface is 0.1
It is preferable that the number of peaks per unit length is 20 to 200 / cm. Also,
If necessary, between the corrugated surface subjected to corona discharge treatment and / or glow discharge treatment and the zinc oxide layer,
It is also possible to insert a metal thin film layer mainly made of nickel.

The present invention also provides a step of forming an uneven surface layer on one main surface of the transparent polymer substrate, and a step of performing corona discharge treatment and / or glow discharge treatment on the uneven surface of the uneven surface layer. Laminating a zinc oxide layer on the corrugated surface subjected to the corona discharge treatment and / or the glow discharge treatment, and laminating a transparent conductive film layer on the zinc oxide layer. This is a method for producing a transparent conductive film.

[0013] Also in this case, in the step of forming an uneven surface layer on one main surface of the transparent polymer substrate,
The peak height of the irregularities on the irregular surface is 0.1 μm or more and 100 μm
m or less, and it is preferable to form an uneven surface layer so that the number of peaks per unit length is 20 to 200 / cm, and if necessary, a corona discharge treatment and / or a glow discharge may be applied to the uneven surface. After performing the processing step and before laminating the zinc oxide layer, a step of laminating a metal thin film layer mainly composed of nickel may be included.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be specifically described with reference to the drawings. FIG. 1 is an enlarged schematic sectional view showing one embodiment of the transparent conductive film according to the present invention, and FIG. 2 is an enlarged schematic sectional view showing another embodiment.

In FIG. 1 showing one embodiment of the transparent conductive film according to the present invention, reference numeral 1 denotes a transparent polymer substrate in the form of a film. Corrugated discharge treatment and / or glow discharge treatment are applied to the uneven surface 2a. Reference numeral 3 denotes a zinc oxide layer laminated on the uneven surface 2a by a vacuum deposition method, a sputtering method, or other known film forming means. Reference numeral 4 denotes a transparent conductive film layer further laminated thereon. By using the transparent conductive film having such a configuration as a transparent electrode of a touch panel, and pressing the transparent polymer substrate 1 from below with a finger or a plastic pen, the transparent conductive film layer 4 is not shown. An input operation can be performed by making contact with the transparent conductive film layer of one transparent electrode.

FIG. 2 shows a metal thin film layer 5 mainly made of nickel between a corrugated surface 2 a on which a corona discharge treatment and / or a glow discharge treatment of the concavo-convex surface layer 2 is performed and a zinc oxide layer 3.
Are stacked and inserted.

As described above, in the transparent conductive film according to the present invention, the uneven surface layer 2 is formed on one main surface of the transparent polymer substrate 1, and the fine uneven surface 2a is subjected to corona discharge treatment and / or corona discharge treatment. Alternatively, after performing a glow discharge treatment, a zinc oxide layer 3 is laminated thereon, or a metal thin film layer 5 is laminated as necessary, and then a zinc oxide layer 3 is laminated, and a transparent conductive film layer is further laminated thereon. 4 are laminated. Such a transparent conductive film is used as at least the upper electrode member of the touch panel. In this case, if the uneven surface layer 2 is not provided on the surface of the transparent polymer substrate 1,
If this is combined with the lower transparent conductive film to form a touch panel, the upper transparent conductive film itself does not have sufficient strength, so the upper transparent conductive film is in contact with the lower transparent conductive film. Some parts are not in contact with the parts. Between the contacting portion and the non-contacting portion, there is a portion where the interval changes continuously, and a Newton ring occurs in this portion.

On the other hand, when the uneven surface layer 2 is formed on the surface of the transparent polymer substrate 1 as in the present invention, the surface of the zinc oxide layer 3 and the transparent conductive film layer 4 laminated thereon are formed. An uneven state is also formed, and therefore, even if a portion that partially contacts the transparent conductive film layer of the other transparent conductive film occurs, the contact portion is a peak portion on the uneven surface,
Since it is a point contact, the interval is generally constant as a whole, and the occurrence of Newton rings can be prevented.

The reason why the zinc oxide layer 3 is laminated after the corona discharge treatment and / or the glow discharge treatment is performed on the uneven surface 2a of the uneven surface layer 2 is that the transparent polymer substrate 1 and the transparent conductive film layer 4 This is because the metal thin film layer 5 is interposed as shown in FIG. 2 to further improve the adhesion and durability.

The material of the transparent polymer substrate 1 of the transparent conductive film according to the present invention is not particularly limited as long as it is highly transparent. For example, polyethylene terephthalate, polycarbonate, polyether Sulfone, polyarylate, poly (meth) acrylate,
Homopolymers such as polyester, polysulfone, and polyamide, and copolymers of monomers of these resins with copolymerizable monomers can be suitably used.
Further, in the transparent polymer substrate or on the surface opposite to the surface on which the conductive film is laminated, known additives, for example, a curing agent, a lubricant, an antistatic agent, a hard coating agent, a moisture-proof coating agent, a gas barrier coating agent, A corrosive or the like may be added or laminated. Further, the transparent polymer substrate may be subjected to a known surface treatment, for example, a surface roughening treatment, an anchor coat, or the like. The thickness of the transparent polymer substrate 1 is not particularly limited, but is preferably 10 to 250 μm from the viewpoint of the strength and workability of the film.

The method of forming the uneven surface layer 2 on one main surface of the transparent polymer substrate 1 in the present invention includes, for example, a method of applying a transparent resin in which a filler is dispersed, and a method of forming a resin layer on a film. For example, a method in which the surface is pressure-bonded to a roll whose surface has been subjected to unevenness treatment and then transferred is exemplified. The most preferable method is a method in which the above two methods are combined.

That is, first, the case of applying a transparent resin in which a filler is dispersed is examined. Since the filler causes surface defects, the particle size of the filler to be added is necessarily limited to a small one. However, if the diameter of the filler is too small, the filler is buried in the applied resin, and the number of fillers that effectively work as the uneven layer tends to decrease. For this reason, in order to prevent Newton's ring, it is necessary to add a large amount of filler, and as a result, the haze value becomes high, and the image may be blurred.
Considering these points, the particle size of the filler is 1 to 30.
μm is preferred.

Next, when forming a resin layer on a film, a method of pressing and transferring the film to a roll whose surface has been roughened is examined. In this case, the resin itself hardens even if the surface is roughened. There is a certain amount of fluidity time before it occurs, and it is inevitable that the whole will be leveled over time. Therefore, the number of peaks per unit decreases. In addition, because the leveling causes the peak shape of the surface irregularities to become gradual, Newton rings are not recognized under normal conditions where no force is applied, but Newton rings are recognized under force. There is.

Therefore, as a method for forming the uneven surface layer 2 on the surface of the transparent polymer substrate, it is preferable to combine the above two methods. That is, it is preferable that the transparent resin to which the filler is added is applied and transferred to one main surface of the transparent polymer substrate by a roll having an uneven pattern on the surface. In this case, the filler and the transparent resin are preferably dispersed in a weight ratio of 10 to 50% by weight. The transparent resin is not particularly limited, but a melamine-based, acrylic-based, silicon-based, or the like is suitably used.

With respect to specific means for forming the uneven surface layer,
Although a method such as a usual satin finish can be used, a case in which a transparent resin containing a filler is coated in a concavo-convex pattern by three reverse coating methods will be described. In the three-reverse coating method, a resin containing filler is scraped up with a roll called a coat roll, and a roll called a doctor roll is brought into contact with the coat roll to equalize the resin on the coat roll and adjust the distance between the two. To adjust the thickness to be applied. After a resin layer having a desired thickness is uniformly formed on the coat roll, the transparent polymer substrate is brought into contact with the coat roll with a roll called a backup roll, and the resin on the coat roll is transferred, and dried or ultraviolet light or the like. Thereby, the resin is cured. Here, a resin layer having a satin-like unevenness can be applied to the transparent polymer substrate by subjecting the surface of the coat roll to an uneven treatment such as a satin pattern.

In this case, the height of the peak of the unevenness is 0.1 μm or more and 100 μm or less;
The number of peaks per unit length must be about 20 to 200 / cm. When the peak height is smaller than 0.1 μm, or when the number of peaks is 20 /
If it is less than cm, the possibility that Newton's rings will occur is not preferable, as in the case where the unevenness is not processed. In consideration of workability and that a large peak may cause surface defects, it is preferable that the peak size does not exceed 100 μm. When the number of peaks exceeds 200 / cm, haze (haze value)
Is undesirably increased.

The corona discharge treatment applied to the uneven surface 2a of the uneven surface layer 2 is usually performed at 10 to 100 kV in the air, but is not particularly limited to this. Glow discharge treatment is
Usually performed under a reduced pressure of 20 Pa or less, but the gas used is oxygen,
There is no particular limitation on nitrogen, nitric oxide, argon, hydrogen, and the like. By such corona discharge treatment and / or glow discharge treatment, the uneven surface 2a of the uneven surface layer 2 is activated and cleaned, and high adhesion between the transparent polymer substrate 1 and the zinc oxide layer 3 is obtained. As a result, the adhesion between the transparent polymer substrate 1 and the transparent conductive film layer 4 is improved.

The thickness of the zinc oxide layer 3 is usually 3 to 50 nm.
Is common. Since this thickness affects the visible light transmittance, the thickness is determined by the required visible light transmittance. As a film forming method, any of conventionally known techniques such as a vacuum evaporation method, a sputtering method, and an ion plating method can be adopted. In the sputtering method, using zinc oxide as a target, usually 0.1 to 0.6 Pa
This is performed at 0.1 to ² W / cm ² · second in an atmosphere.

As the transparent conductive film layer 4, for example, indium tin oxide (ITO), tin oxide, indium zinc oxide and the like can be mentioned, but when the specific resistance and the visible light transmittance are considered, the tin content is 3%. ~ 50% by weight of ITO is good. The thickness of the transparent conductive film layer 4 is generally 10 to 150 nm, and the surface resistance is 100 to 1000 nm.
Ω / □ is common. Since this thickness affects surface resistance and visible light transmittance, the thickness is determined by required surface resistance and visible light transmittance. As a method for forming the transparent conductive film layer 4, any of conventionally known techniques such as a vacuum evaporation method, a sputtering method, and an ion plating method can be adopted. In the sputtering method, either indium-tin oxide or an indium-tin alloy may be used for the target. Usually, under an atmosphere of 0.1 to 0.6 Pa, 0.1 to ² W / cm ² · second Do with.

The nickel thin film layer 5 in the embodiment shown in FIG. 2 is mainly made of nickel, but may be an alloy with a metal such as chromium or iron. In addition, the effect may be the same even if a metal thin film or an oxide thin film is used. The calculated film thickness is usually 0.2
３3 nm is preferred. Thicknesses smaller than 0.2 nm are not preferred because they have little effect on adhesion and durability. Thicknesses greater than 3 nm are not preferred because transparency is impaired. That is, the thickness is preferably as thin as possible without impairing the durability, particularly in consideration of the visible light transmittance. As the film forming method, any of the conventionally known techniques such as a vacuum deposition method, a sputtering method, and an ion plating method can be adopted.
In the sputtering method, using a nickel alloy as a target, usually under an atmosphere of 0.1 to 0.6 Pa,
It is performed at 0.01 to 1 W / cm ² · second. As described above, the total thickness of the film laminated on the transparent polymer substrate is preferably from 10 to 200 nm.

[0031]

The present invention will be described below with reference to examples. The evaluation items and evaluation methods were as follows. (a) Evaluation of surface irregularities (detection of peak): The surface irregularities of the surface of the transparent polymer substrate on which the transparent conductive film layer was formed were evaluated based on JIS-B-0601. Specifically, the cut-off value is 0.8 mm using a stylus type surface roughness meter [ET-30K, manufactured by Kosaka Laboratory Co., Ltd., stylus diameter: 0.5 μm].
Scan 2.5 mm in any direction of the film under the conditions of
From the heights and the numbers of the peaks obtained at that time, the average height of the peaks and the number of peaks per 1 cm section were determined. (b) Light transmittance and haze: Performed based on JIS-K-7105. For details, NDH-100 manufactured by Nippon Denshoku Co., Ltd.
It evaluated using H. (c) Surface resistance: Under conditions of a temperature of 23 ° C. and a relative humidity of 50%,
This was performed by a four-terminal method. Specifically, the measurement was performed using Loresta SP manufactured by Mitsubishi Yuka Corporation. (d) Anti-Newton ring property (presence / absence of Newton ring): A pseudo touch panel element was prepared by laminating two transparent conductive films so that their transparent conductive layers faced each other. ) Pressed upward to visually determine the presence or absence of a Newton ring. (e) Adhesion: prepared transparent conductive film, In and S
After bonding an ITO film having a ratio of n of 80:20 and a thickness of 30 nm to each other with a transparent conductive film layer, it was measured with a tensile peeling tester based on JIS-K-6854. Specifically, using an autograph AGS-100A manufactured by Shimadzu Corporation, 90 ° peeling, peeling speed 5m
The evaluation was performed using m / min.

Example 1 A single-sided hard-coated polyethylene terephthalate (PET) film having a thickness of 188 μm (hard coat PET film B type, manufactured by Oike Kogyo Co., Ltd.) was coated on the non-hard-coated side with an average particle diameter of 2 μm. A melamine resin [SF-CC-329, manufactured by Dainippon Ink and Chemicals, Inc.] in which silica powder [XC99-501, manufactured by Toshiba Silicone Co., Ltd.] is dispersed at a weight ratio of 20%, is applied by a three-bar reverse method, and is heated to 80 ° For 3 minutes, the thickness of the peak is 5 μm, the average height of peaks on the uneven surface is 2 μm, and the number of peaks is 30
Was obtained. Specifically, the surface of the coat roll was subjected to a satin-like unevenness treatment so that the satin-like pattern was transferred when the PET film was coated with a resin. The transparent polymer substrate produced by the above method is referred to as “transparent polymer substrate P ₁ ”. This transparent polymer substrate P
First, an oxygen glow discharge treatment (1.3 Pa, 900 W, 1 minute) was performed on the satin-like uneven surface of the uneven surface layer of _{No. 1} and then a zinc oxide layer was formed to a thickness of 10 nm (the reaction gas was oxygen / argon = 0. 1 at a rate of 1
Film formation by magnetron sputtering method). Next, I
A transparent conductive film layer made of TO is formed with a surface resistance of 500Ω / □.
(The target is tin oxide at 20% by weight.
Containing indium-tin oxide, reaction gas is oxygen / argon =
Introduced at a rate of 0.03 and formed by a DC magnetron sputtering method in a 0.4 Pa atmosphere) to obtain a transparent conductive film. The film produced by the above method is referred to as “transparent conductive film A” (the same applies hereinafter). Light transmittance (%) and haze (haze value) of the transparent conductive film A
%), Surface resistance (Ω / □), anti-Newton ring property, and adhesion (g / 25 mm) were evaluated by the above-described methods.
The results are summarized in Table 1.

Example 2 A transparent conductive film B was produced in the same manner as in Example 1 except that a metal thin film layer of nickel chromium was provided with a thickness of 1 nm under the zinc oxide layer. The evaluation results are summarized in Table 1.

Example 3 A transparent conductive film C was produced in the same manner as in Example 1 except that the thickness of the zinc oxide layer was changed to 50 nm. The evaluation results are summarized in Table 1.

Example 4 A transparent conductive film D was produced in the same manner as in Example 1 except that the thickness of the zinc oxide layer was changed to 3 nm. The evaluation results are summarized in Table 1.

Example 5 Assuming that the average particle diameter of the silica powder to be dispersed is 10 μm [XC99-301 manufactured by Toshiba Silicone Co., Ltd.], the average height of peaks on the uneven surface is 7.5 μm and the number of peaks is 35 /
A transparent conductive film E was produced in the same manner as in Example 1 except that a coating film of cm was obtained. The evaluation results are summarized in Table 1.

Comparative Example 1 A transparent conductive film F was prepared in the same manner as in Example 1 except that the oxygen glow treatment and the lamination of zinc oxide were not performed. The evaluation results are summarized in Table 1.

Comparative Example 2 Assuming that the amount of silica powder to be added was 90% by weight, the average height of peaks on the uneven surface was 2 μm and the number of peaks was 250 / cm.
A transparent conductive film G was produced in the same manner as in Example 1 except that a coating film was obtained. The evaluation results are summarized in Table 1.

Comparative Example 3 Example 1 was repeated except that the amount of silica powder added was 0.1% by weight, and a coating film having an average height of peaks on the uneven surface of 2 μm and a peak number of 3 / cm was obtained. In the same manner as in the above, a transparent conductive film H was obtained.

[0040]

[Table 1]

[0041]

According to the present invention, after a corona discharge treatment and / or a glow discharge treatment is performed on the uneven surface of a transparent polymer substrate having an uneven surface layer provided on the surface, a zinc oxide layer is stacked, and a transparent conductive film layer is further stacked. When the transparent conductive film according to the present invention is used as a transparent electrode of a touch panel, the generation of Newton rings is suppressed, and the resolution and visibility of an image are not reduced. Is good.

[Brief description of the drawings]

FIG. 1 is an enlarged schematic sectional view showing one embodiment of a transparent conductive film according to the present invention.

FIG. 2 is an enlarged schematic sectional view showing another embodiment.

[Description of Signs] 1 transparent polymer substrate 2 uneven surface layer 2a uneven surface 3 zinc oxide layer 4 transparent conductive film layer 5 metal thin film layer

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akira Suzuki 2-1-1 Tango-dori, Minami-ku, Nagoya-shi, Aichi Prefecture Inside Mitsui Chemicals, Inc. (72) Inventor Akemi Nakajima 2-1-1, Tango-dori, Minami-ku, Nagoya-shi, Aichi Prefecture Mitsui Chemicals, Inc. (72) Inventor Yuichiro Harada 2-1-1, Tango-dori, Minami-ku, Nagoya-shi, Aichi

Claims (6)

[Claims] An uneven surface layer (2) is formed on one main surface,
The corrugated surface treatment and / or corona discharge treatment is performed on the uneven surface (2a) of the uneven surface layer.
Or a transparent polymer substrate subjected to glow discharge treatment (1)
And a zinc oxide layer (3) laminated on the corrugated surface (2a) subjected to the corona discharge treatment and / or the glow discharge treatment; and a transparent conductive film layer laminated on the zinc oxide layer (3). (4) A transparent conductive film, comprising: 2. The method according to claim 1, wherein the height of peaks of the irregularities on the irregular surface (2a) is 0.1 μm or more and 100 μm or less, and the number of peaks per unit length is 20 to 200 / cm. 2. The transparent conductive film according to 1. 3. A metal thin film layer (5) mainly made of nickel is inserted between the uneven surface (2a) subjected to the corona discharge treatment and / or the glow discharge treatment and the zinc oxide layer (3). The transparent conductive film according to claim 1, wherein: 4. A step of forming an uneven surface layer (2) on one main surface of a transparent polymer substrate (1), and said uneven surface layer (2).
Applying a corona discharge treatment and / or a glow discharge treatment to the uneven surface (2a), and laminating a zinc oxide layer (3) on the uneven surface (2a) subjected to the corona discharge treatment and / or the glow discharge treatment. And a step of laminating a transparent conductive film layer (4) on the zinc oxide layer (3). 5. The step of forming an uneven surface layer (2) on one main surface of the transparent polymer substrate (1), wherein the height of uneven peaks on the uneven surface (2a) is 0.1 μm or more and 100 μm or more.
μm or less, and the number of peaks per unit length is 20 to 200.
The method for producing a transparent conductive film according to claim 4, wherein the uneven surface layer is formed to have a number of pieces / cm. 6. A metal thin film layer (mainly made of nickel) after the step of performing corona discharge treatment and / or glow discharge treatment on the uneven surface (2a) and before laminating the zinc oxide layer (3). 5. The method for producing a transparent conductive film according to claim 4, comprising a step of laminating 5).