JPH11304837A - Probe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a probe device capable of controlling pressure force to an element to be constant. SOLUTION: This probe device for mechanically pressing the surface of an element 1 by a tip for obtaining electric contact with the element 1 to take out a signal to the external is provided with a probe 2, of which tip part is pressed to the element surface, a distortion sensor 4 installed on the probe 2, a position control means for position-controlling the probe 2, a drive means 6 provided between the probe 2 and the position control means 5 for moving the probe 2 vertically, and a control circuit 7 to control the drive means 6 based on a detection signal from the distortion sensor 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device for detecting a signal used in an LSI test device or the like, and more particularly to a probe device capable of controlling a pressing force.

[0002]

2. Description of the Related Art A signal detection probe device used in a conventional LSI test apparatus or the like mechanically presses the tip of a probe against the surface of an element such as an LSI, thereby obtaining electrical contact with the element and transmitting a signal. It is taken out.

FIG. 2 is a sectional view showing an example of such a conventional probe device. In FIG. 2, 1 is an element such as an LSI, 2 is a probe, 3 is position control means such as an actuator, and 100 is an electric signal taken out.

The probe 2 is attached to the position control means 3, and the position of the probe 2 is controlled by the position control means 3. The tip of the probe 2 comes into contact with the element 1 by the pressing force generated by the spring property of the probe 2 itself. Electrical contact is obtained. The probe 2 outputs an electric signal 100 detected from the element 1 to the outside.

[0005]

However, in the conventional example shown in FIG. 2, since the pressing force against the element 1 is generated by the spring property of the probe 2 itself, the pressing force is not constant. Therefore, the element 1
There has been a problem that damage may occur, or insufficient contact may not be obtained due to the weak pressing force, resulting in poor contact.

[0006] In particular, when a plurality of probes are arrayed and the position is controlled by one position control means, there is a problem that individual pressing forces to the elements vary due to variations in spring characteristics of the individual probes. there were. Therefore, an object to be solved by the present invention is to realize a probe device capable of controlling a pressing force to an element to a constant value.

[0007]

In order to achieve the above object, according to the first aspect of the present invention, an electric contact with the element is made by mechanically pressing a tip against the surface of the element. A probe for pressing a tip portion against the element surface, a strain sensor attached to the probe, position control means for controlling the position of the probe, the probe and the position Control means for controlling the driving means based on a detection signal from the strain sensor is provided, the driving force being provided between the control means and the drive means for raising and lowering the probe, thereby controlling the pressing force to the element to be constant. It becomes possible to do.

According to a second aspect of the present invention, in the probe device according to the first aspect of the present invention, the probe and the strain sensor are integrally formed, so that the size can be reduced.

According to a third aspect of the present invention, in the probe device according to the first aspect, the strain sensor is a piezo element or a vibration type strain gauge.
It is possible to control the pressing force on the element to be constant.

According to a fourth aspect of the present invention, in the probe device according to the first aspect of the present invention, the driving means is a piezo element or a magnetic motor, so that the pressing force on the element is controlled to be constant. It becomes possible to do.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a sectional view showing the configuration of an embodiment of the probe device according to the present invention. 1 and 2 correspond to FIG.
4 is a strain sensor such as a piezo element, 5 is a position control means, 6 is a driving means such as a piezo element,
7 is a control circuit, 100a is an electric signal, 101 is a distortion signal,
102 is a control signal.

The probe 2 is attached to the position control means 5 via the driving means 6, and the strain sensor 4 is fixed to the probe 2, and the tip of the probe 2 is brought into contact with the element 1. The distortion signal 101 from the distortion sensor 4 is connected to the control circuit 7, and the control signal 102 from the control circuit 7 is connected to the driving means. The probe 2 outputs an electric signal 100a detected from the element 1 to the outside.

The operation of the embodiment shown in FIG. 1 will now be described. The position of the probe 2 is controlled by the position control means 5, and the tip of the probe 2 comes into contact with the element 1 by the pressing force generated by the spring property of the probe 2 itself.

At this time, the distortion generated in the probe 2 is detected by the distortion sensor 4 and the output of the distortion signal 101 is output to the control circuit 7.
Output to For example, when the pressing force generated by the spring property of the probe 2 is large, the strain detected by the strain sensor 4 increases, and when the pressing force is weak, the strain detected by the strain sensor 4 decreases.

That is, when the distortion signal 101 from the distortion sensor 4 is large, the control circuit 7 controls the driving means 6 by the control signal 102 to move the probe 2 upward to reduce the pressing force, and the distortion signal 101 Is smaller, the driving means 6 is controlled by the control signal 102 to move the probe 2 downward to increase the pressing force. Then, when the distortion signal 101 from the distortion sensor 4 reaches a constant value, the electric signal 100a is extracted to the outside.

As a result, the strain of the probe 2 is detected by the strain sensor 4 and the driving means 6 is controlled based on the detected signal to move the probe 2 up and down, whereby the pressing force on the element 1 can be controlled to be constant. Will be possible.

When a plurality of probes are arrayed and the position is controlled by one position control means, the above-described strain sensor, piezo element, and control circuit are provided for each probe to keep the pressing force at a constant value. It may be controlled.

When a plurality of probes are arrayed and the position is controlled by one position control means, the aforementioned strain sensor and piezo element are provided for each probe, and the pressing force is kept constant by one control circuit. The value may be controlled.

Further, the strain sensor 4 is exemplified by a piezo element, but may be a vibrating strain gauge or the like. Also,
The position control means 6 is exemplified by a piezo element, but may be a magnetic motor or the like.

Further, by integrally forming the probe 2 and the strain sensor 4, the size can be reduced.

[0021]

As is apparent from the above description,
According to the present invention, the following effects can be obtained. According to the first, third and fourth aspects of the present invention, the strain sensor detects the strain of the probe and controls the driving means based on the detection signal to move the probe up and down, thereby controlling the pressing force against the element to be constant. And a probe device capable of performing such operations.

According to the second aspect of the present invention, the size of the probe can be reduced by integrally forming the probe and the strain sensor.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of an embodiment of a probe device according to the present invention.

FIG. 2 is a configuration sectional view showing an example of a conventional probe device.

[Explanation of symbols]

 Reference Signs List 1 element 2 probe 3, 5 position control means 4 distortion sensor 6 driving means 7 control circuit 100, 100a electric signal 101 distortion signal 102 control signal

Claims (4)

[Claims] 1. A probe device for mechanically pressing a tip against a surface of an element to obtain electrical contact with the element and take out a signal to the outside, comprising: a probe for pressing a tip portion to the surface of the element; An attached strain sensor, position control means for controlling the position of the probe, driving means provided between the probe and the position control means for moving the probe up and down, based on a detection signal from the strain sensor. And a control circuit for controlling the driving means. 2. The probe device according to claim 1, wherein said probe and said strain sensor are integrally formed. 3. The probe device according to claim 1, wherein the strain sensor is a piezo element or a vibrating strain gauge. 4. The probe device according to claim 1, wherein said driving means is a piezo element or a magnetic motor.