JPH11304434A - Measuring method for liquid crystal layer thickness - Google Patents

Measuring method for liquid crystal layer thickness

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Publication number
JPH11304434A
JPH11304434A JP11201298A JP11201298A JPH11304434A JP H11304434 A JPH11304434 A JP H11304434A JP 11201298 A JP11201298 A JP 11201298A JP 11201298 A JP11201298 A JP 11201298A JP H11304434 A JPH11304434 A JP H11304434A
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal layer
transmitted light
crystal cell
spectral distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11201298A
Other languages
Japanese (ja)
Other versions
JP3704950B2 (en
Inventor
Hiroyuki Fujii
浩之 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP11201298A priority Critical patent/JP3704950B2/en
Publication of JPH11304434A publication Critical patent/JPH11304434A/en
Application granted granted Critical
Publication of JP3704950B2 publication Critical patent/JP3704950B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Liquid Crystal (AREA)

Abstract

PROBLEM TO BE SOLVED: To accurately measure the liquid crystal layer thickness of a liquid crystal cell. SOLUTION: A pair of light deflecting plates are arranged in both side of a liquid crystal cell in the predetermined condition and the spectral distribution of the transmitted light is measured in the condition of no voltage applied between electrodes of the liquid crystal cell, and chromaticity of the transmitted light is displayed on a CIE chromaticity graph, and the liquid crystal layer thickness is obtained on the basis of the angle θ of inclination against the x-axis of a straight line L passing through an achromatic color point WP on the chromaticity graph and a point CP for expressing the chromaticity of the transmitted light.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、液晶層厚測定方
法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal layer thickness measuring method.

【0002】[0002]

【従来の技術】従来、対向面に電極がそれぞれ形成され
た一対の基板の間に液晶分子が所定の配向状態で配向し
た液晶層を設けてなる液晶セルの前記液晶層の層厚の測
定は、次の(1),(2)のいずれかの方法によって行
なわれている。
2. Description of the Related Art Conventionally, the measurement of the thickness of the liquid crystal layer of a liquid crystal cell in which a liquid crystal layer in which liquid crystal molecules are aligned in a predetermined alignment state is provided between a pair of substrates having electrodes formed on opposing surfaces, respectively. This is performed by one of the following methods (1) and (2).

【0003】(1)液晶セルにその一方の面から光を入
射させ、一対の基板のそれぞれの内面と液晶層との2つ
の界面で反射した光の干渉光強度を測定して液晶層厚を
算出する方法。
(1) Light is incident on a liquid crystal cell from one surface thereof, and the interference light intensity of light reflected at two interfaces between the inner surfaces of the pair of substrates and the liquid crystal layer is measured to reduce the thickness of the liquid crystal layer. How to calculate.

【0004】(2)液晶セルをはさんで一対の偏光板を
所定の条件で配置し、前記液晶セルの電極間に電圧を印
加しない状態での透過光を測定して、透過率が極小とな
る波長を検出し、その波長からGooch and Tarry の理論
式により液晶層厚を算出する方法。
(2) A pair of polarizers are arranged under a predetermined condition with a liquid crystal cell interposed therebetween, and the transmitted light is measured without applying a voltage between the electrodes of the liquid crystal cell. A method of detecting the wavelength and calculating the liquid crystal layer thickness from that wavelength using Gooch and Tarry's theoretical formula.

【0005】[0005]

【発明が解決しようとする課題】しかし、上記(1)お
よび(2)の液晶層厚測定方法は、いずれも、液晶層厚
を精度良く測定することが難しいという問題をもってい
る。すなわち、上記(1)の方法では、液晶セルの一対
の基板のうちの光の入射方向から見て前方の基板と液晶
層との界面で反射した光と、背面側の基板の内面と液晶
層との界面で反射される光との光路長差による干渉を基
に液晶層厚を算出するものである。この光路長差は液晶
層の屈折率と長さに依存するが、基板間に封入された液
晶層の屈折率を正確に求めることは困難であり、特にツ
イスト配向された液晶層を透過した光の光路長を求める
ことは極めて困難である。また実際には、基板内面の配
向膜面と液晶層との界面だけでなく、基板面に形成され
た電極と基板との界面や、前記電極と配向膜との界面な
どでも光が反射するため、液晶層厚を精度良く測定する
ことが難しい。
However, each of the above methods (1) and (2) has a problem that it is difficult to accurately measure the thickness of the liquid crystal layer. That is, in the method (1), the light reflected at the interface between the liquid crystal layer and the front substrate of the pair of substrates of the liquid crystal cell when viewed from the incident direction of the light, and the inner surface of the rear substrate and the liquid crystal layer. The liquid crystal layer thickness is calculated based on interference caused by a difference in optical path length with light reflected at the interface with the liquid crystal layer. This difference in optical path length depends on the refractive index and length of the liquid crystal layer, but it is difficult to accurately determine the refractive index of the liquid crystal layer enclosed between the substrates, and in particular, the light transmitted through the twisted liquid crystal layer. It is extremely difficult to determine the optical path length of Further, actually, light is reflected not only at the interface between the alignment film surface on the inner surface of the substrate and the liquid crystal layer, but also at the interface between the electrode formed on the substrate surface and the substrate, or between the electrode and the alignment film. It is difficult to accurately measure the thickness of the liquid crystal layer.

【0006】また、上記(2)の方法は、理論上は精度
良く液晶層厚を測定できるが、実際には、液晶セルの基
板間に分散状態で挟持されているギャップ材部分(液晶
が存在しない部分)や液晶分子の配向が乱れた部分など
のような液晶層本来の屈折率とは異なる屈折率を示す部
分を透過したノイズ光の影響により、透過率が極小とな
る波長の検出に大きな誤差が生じるため、液晶層厚を精
度良く測定することが難しい。この発明は、液晶セルの
液晶層厚を高い精度で測定することができる液晶層厚測
定方法を提供することを目的としたものである。
In the method (2), the thickness of the liquid crystal layer can be measured with high accuracy in theory. However, in practice, the gap material portion (in which the liquid crystal exists) sandwiched between the substrates of the liquid crystal cell in a dispersed state. This is important for detecting wavelengths where the transmittance is minimal due to the influence of noise light transmitted through portions having a different refractive index from the original refractive index of the liquid crystal layer, such as portions where the alignment of liquid crystal molecules is disturbed. Since an error occurs, it is difficult to accurately measure the thickness of the liquid crystal layer. SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid crystal layer thickness measuring method capable of measuring a liquid crystal layer thickness of a liquid crystal cell with high accuracy.

【0007】[0007]

【課題を解決するための手段】この発明は、液晶セルの
少なくとも一方の面に偏光板を所定の条件で配置して前
記液晶セルの電極間に電圧を印加しない状態での透過光
の分光分布を測定し、その透過光の色度を表す点をCI
E色度図上に表わして、前記色度図上での無彩色点と前
記透過光の色度を表わす点とを通る直線のx,y軸のい
ずれかに対する傾き角から前記液晶セルの液晶層厚を求
めることを特徴とするものである。
According to the present invention, a spectral distribution of transmitted light in a state where a polarizing plate is arranged on at least one surface of a liquid crystal cell under predetermined conditions and no voltage is applied between electrodes of the liquid crystal cell. And the point representing the chromaticity of the transmitted light is referred to as CI
The liquid crystal of the liquid crystal cell is obtained from the inclination angle of a straight line passing through an achromatic point on the chromaticity diagram and a point representing the chromaticity of the transmitted light on the chromaticity diagram with respect to either the x or y axis. It is characterized in that a layer thickness is obtained.

【0008】すなわち、この発明は、液晶セルと所定の
条件で配置した偏光板とを透過した光の分光分布の液晶
層厚依存性に基づいて前記液晶セルの液晶層厚を求める
ものであり、液晶セルの透過光の分光分布は液晶層厚に
対応するため、透過光の分光分布から液晶層厚を求める
ことができる。
That is, the present invention obtains the liquid crystal layer thickness of the liquid crystal cell based on the liquid crystal layer thickness dependence of the spectral distribution of light transmitted through the liquid crystal cell and a polarizing plate arranged under predetermined conditions. Since the spectral distribution of the transmitted light of the liquid crystal cell corresponds to the thickness of the liquid crystal layer, the thickness of the liquid crystal layer can be obtained from the spectral distribution of the transmitted light.

【0009】液晶セルを透過する光はギャップ材部分や
液晶分子の配向が乱れた部分などを透過したノイズ光を
含んでいるため、実際の透過光の分光分布は、ノイズ光
を含んでいる。
Since the light transmitted through the liquid crystal cell includes noise light transmitted through the gap material portion and the portion where the alignment of the liquid crystal molecules is disturbed, the actual spectral distribution of the transmitted light includes noise light.

【0010】しかし、実際に測定される透過光がノイズ
光を含んでいても、その透過光の分光分布曲線の形、つ
まり可視光帯域の各波長光ごとの透過率の比はほとんど
変わらず、前記分光分布曲線が分光分布図上で上方へ平
行移動するだけであるので、CIE色度図上でのノイズ
光の影響による色度の変化は、液晶層厚が同じであれ
ば、無彩色点と前記理論上の透過光の色度を表わす点と
を通る直線に沿ったほぼ直線的な変化である。
However, even if the transmitted light actually measured contains noise light, the shape of the spectral distribution curve of the transmitted light, that is, the ratio of the transmittance for each wavelength light in the visible light band hardly changes. Since the spectral distribution curve only translates upward on the spectral distribution diagram, the change in chromaticity due to the influence of noise light on the CIE chromaticity diagram is caused by the achromatic point when the liquid crystal layer thickness is the same. And a substantially linear change along a straight line passing through the point representing the theoretical chromaticity of the transmitted light.

【0011】つまり、液晶セルの液晶層厚が同じであれ
ば、前記無彩色点と透過光の色度を表わす点とを通る直
線のx,y軸のいずれかに対する傾き角は、ノイズ光の
影響の有無にかかわらずほぼ一定である。
That is, if the thickness of the liquid crystal layer of the liquid crystal cell is the same, the inclination angle of the straight line passing through the achromatic point and the point representing the chromaticity of the transmitted light with respect to either the x or y axis becomes the noise light. It is almost constant with or without influence.

【0012】そこで、この発明は、前記CIE色度図上
での無彩色点と透過光の色度を表わす点とを通る直線の
傾き角から液晶層厚を求めるようにしたのであり、前記
直線の傾き角と液晶層厚との関係は予め求めることがで
き、また、前記直線の傾き角はノイズ光の影響の有無に
かかわらずほぼ一定であるため、透過光の分光分布を測
定してその透過光の色度をCIE色度図上に表わし、こ
の色度図上での無彩色点と前記透過光の色度を表わす点
とを通る直線の傾き角を求めれば、液晶層厚を、ノイズ
光の影響による誤差をほとんど生じることなく高い精度
で測定することができる。
Therefore, in the present invention, the liquid crystal layer thickness is determined from the inclination angle of a straight line passing through the achromatic point on the CIE chromaticity diagram and a point representing the chromaticity of transmitted light. The relationship between the tilt angle and the liquid crystal layer thickness can be obtained in advance, and the tilt angle of the straight line is almost constant regardless of the influence of noise light. The chromaticity of the transmitted light is represented on the CIE chromaticity diagram, and the inclination angle of a straight line passing through the achromatic point on the chromaticity diagram and the point representing the chromaticity of the transmitted light is determined. Measurement can be performed with high accuracy with almost no error due to the influence of noise light.

【0013】[0013]

【発明の実施の形態】この発明の液晶層厚測定方法は、
上記のように、液晶セルの少なくとも一方の面に偏光板
を所定の条件で配置して前記液晶セルの電極間に電圧を
印加しない状態での透過光の分光分布を測定し、その透
過光の色度を表す点をCIE色度図上に求め、前記色度
図上での無彩色点と前記透過光の色度を表わす点とを通
る直線のx,y軸のいずれかに対する傾き角から液晶層
厚を求めることにより、前記液晶層厚を高い精度で測定
するようにしたものである。
BEST MODE FOR CARRYING OUT THE INVENTION
As described above, a polarizing plate is arranged on at least one surface of the liquid crystal cell under a predetermined condition, and a spectral distribution of transmitted light in a state where no voltage is applied between the electrodes of the liquid crystal cell is measured. A point representing the chromaticity is obtained on the CIE chromaticity diagram, and a straight line passing through the achromatic point on the chromaticity diagram and the point representing the chromaticity of the transmitted light is calculated from the inclination angle with respect to either the x or y axis. The thickness of the liquid crystal layer is measured with high accuracy by determining the thickness of the liquid crystal layer.

【0014】この発明は、白黒表示を行なう液晶セルの
液晶層厚測定にも、複数の色のカラーフィルタを備えた
カラー画像を表示する液晶セルの液晶層厚測定にも適用
できるものであり、カラーフィルタを備えた液晶セルの
液晶層厚を測定する場合は、測定した透過光の分光分布
を、予め測定しておいた前記複数の色のカラーフィルタ
のみを透過した光の分光分布分に基づいて液晶セルのみ
の分光分布に補正し、その補正された分光分布に対応す
る色度をCIE色度図上に表わせばよい。
The present invention can be applied to the measurement of the thickness of a liquid crystal layer of a liquid crystal cell for displaying black and white and the thickness of a liquid crystal cell for displaying a color image provided with a plurality of color filters. When measuring the thickness of the liquid crystal layer of a liquid crystal cell having a color filter, the measured spectral distribution of transmitted light is determined based on the spectral distribution of light transmitted through only the color filters of the plurality of colors, which has been measured in advance. In this case, the spectral distribution of only the liquid crystal cell may be corrected by using the CIE chromaticity diagram, and the chromaticity corresponding to the corrected spectral distribution may be displayed on the CIE chromaticity diagram.

【0015】また、この発明において、前記透過光の分
光分布の測定は、前記偏光板を光の透過率が液晶セルの
電極間に電圧を印加しない状態において最小となる条件
で配置して行なうのが好ましく、前記分光分布の液晶層
厚依存性は、光の透過率が小さい方が大きく見えるた
め、このような条件で偏光板を配置して透過光の分光分
布を測定すれば、その透過光の色度をより正確に色度図
上に表わして、さらに精度よく液晶層厚を測定すること
ができる。
In the present invention, the measurement of the spectral distribution of the transmitted light is performed by arranging the polarizing plate under the condition that the light transmittance is minimized when no voltage is applied between the electrodes of the liquid crystal cell. It is preferable that the spectral distribution depends on the thickness of the liquid crystal layer. The smaller the transmittance of light, the larger it looks. Therefore, if the polarizing plate is arranged under such conditions and the spectral distribution of the transmitted light is measured, the transmitted light can be measured. Is more accurately represented on the chromaticity diagram, and the thickness of the liquid crystal layer can be measured more accurately.

【0016】[0016]

【実施例】以下、この発明の一実施例を図面を参照して
説明する。まず、液晶層厚を測定しようとする液晶セル
について説明すると、図6および図7はそれぞれ液晶セ
ルの断面図である。
An embodiment of the present invention will be described below with reference to the drawings. First, a liquid crystal cell whose thickness is to be measured will be described. FIGS. 6 and 7 are cross-sectional views of the liquid crystal cell.

【0017】図6に示した液晶セル1は、白黒表示を行
なうものであり、対向面に透明電極13,14がそれぞ
れ形成され、その電極形成面上に配向膜15,16がそ
れぞれ形成された一対の透明基板11,12を枠状のシ
ール材16を介して接合し、これらの基板11,12の
間の前記シール材16で囲まれた領域に、液晶分子が所
定の配向状態で配向した液晶層18を設けて構成されて
いる。
The liquid crystal cell 1 shown in FIG. 6 performs a black-and-white display. Transparent electrodes 13 and 14 are formed on opposing surfaces, and alignment films 15 and 16 are formed on the electrode forming surfaces. The pair of transparent substrates 11 and 12 are joined via a frame-shaped sealing material 16, and liquid crystal molecules are aligned in a predetermined alignment state in a region surrounded by the sealing material 16 between the substrates 11 and 12. A liquid crystal layer 18 is provided.

【0018】なお、図では省略したが、前記一対の基板
11,12の間隙は、これらの基板11,12間に分散
状態で挟持させたガラス粒子等からなる複数のギャップ
材により規制されている。
Although not shown in the drawing, the gap between the pair of substrates 11 and 12 is regulated by a plurality of gap members made of glass particles and the like sandwiched between the substrates 11 and 12 in a dispersed state. .

【0019】この液晶セル1は、アクティブマトリック
ス方式のものであり、その一方の基板、例えば背面側基
板11の内面に形成された電極13は、マトリックス状
に配列する複数の画素電極、他方の基板、例えば前面側
基板12の内面に形成された電極14は、前記複数の画
素電極13と対向する部分によりそれぞれ画素領域を形
成する一枚膜状の対向電極である。
The liquid crystal cell 1 is of an active matrix type. One of its substrates, for example, an electrode 13 formed on the inner surface of a rear substrate 11 is composed of a plurality of pixel electrodes arranged in a matrix and the other substrate. For example, the electrode 14 formed on the inner surface of the front substrate 12 is a single-film counter electrode that forms a pixel region by a portion facing the plurality of pixel electrodes 13.

【0020】また、図では省略したが、前記画素電極1
3を形成した基板11の内面には、これらの画素電極1
3にそれぞれ接続された複数のアクティブ素子と、これ
らのアクティブ素子に信号を供給するための信号供給配
線とが設けられている。なお、前記アクティブ素子は例
えばTFT(薄膜トランジスタ)であり、その場合は、
前記基板11の内面に、前記TFTにゲート信号を供給
するためのゲート信号供給配線と、前記TFTにデータ
信号を供給するためのデータ信号供給配線とが設けられ
る。
Although not shown in FIG.
The pixel electrodes 1 are formed on the inner surface of the substrate 11 on which the pixel electrodes 3 are formed.
3 are provided, and a plurality of active elements are connected to each other, and signal supply lines for supplying signals to these active elements are provided. The active element is, for example, a TFT (thin film transistor), in which case,
A gate signal supply line for supplying a gate signal to the TFT and a data signal supply line for supplying a data signal to the TFT are provided on the inner surface of the substrate 11.

【0021】また、この液晶セルは、TN(ツイステッ
ドネマティック)型の液晶表示素子に用いられるもので
あり、一対の基板11,12間に設けられた液晶層18
の液晶分子は、前記配向膜15,16によりそれぞれの
基板11,12の近傍における配向方向を規制され、両
基板11,12間においてほぼ90°のツイスト角でツ
イスト配向している。
This liquid crystal cell is used for a TN (twisted nematic) type liquid crystal display element, and has a liquid crystal layer 18 provided between a pair of substrates 11 and 12.
The orientation direction of the liquid crystal molecules in the vicinity of the respective substrates 11 and 12 is regulated by the alignment films 15 and 16, and the liquid crystal molecules are twist-aligned between the substrates 11 and 12 at a twist angle of approximately 90 °.

【0022】図7に示した液晶セル2は、フルカラー画
像等の多色カラー画像を表示するものであり、この液晶
セル2では、そのいずれかの基板、例えば前面側基板1
2の内面に、透過波長帯域が互いに異なる複数の色のカ
ラーフィルタ、例えば赤、緑、青の3色のカラーフィル
タ17R,17G,17Bを、各画素領域にそれぞれ対
応させて設け、その上に透明電極14を設けている。
The liquid crystal cell 2 shown in FIG. 7 displays a multicolor image such as a full-color image. In this liquid crystal cell 2, any one of the substrates, for example, the front substrate 1
2, color filters of a plurality of colors having different transmission wavelength bands, for example, color filters 17R, 17G, and 17B of three colors of red, green, and blue are provided in correspondence with the respective pixel regions. A transparent electrode 14 is provided.

【0023】なお、この液晶セル2は、カラーフィルタ
17R,17G,17Bを備えたものであるが、その他
の構成は図6に示した液晶セル1と同じであるから、重
複する説明は図に同符号を付して省略する。
The liquid crystal cell 2 is provided with color filters 17R, 17G and 17B, but the other structure is the same as that of the liquid crystal cell 1 shown in FIG. The same reference numerals are given and omitted.

【0024】次に、液晶層厚の測定方法を、図6に示し
た液晶セル1の液晶層厚の測定を例にとって説明する
と、この実施例では、次のような手順で前記液晶セル1
の液晶層厚dを測定する。
Next, the method of measuring the thickness of the liquid crystal layer will be described by taking the measurement of the thickness of the liquid crystal layer of the liquid crystal cell 1 shown in FIG. 6 as an example.
Is measured.

【0025】まず、図6に示したように、液晶セル1の
両方の面にそれぞれ対向させて一対の偏光板21,22
を所定の条件で配置し、前記液晶セル1の電極13,1
4間に電圧を印加しない状態で、一方の面から図に矢線
で示すように白色光を入射させ、一方の偏光板21と液
晶セル1と他方の偏光板22とを透過して他方の面に出
射する透過光の分光分布を図示しない測定器により測定
する。
First, as shown in FIG. 6, a pair of polarizing plates 21 and 22 are opposed to both surfaces of the liquid crystal cell 1, respectively.
Are arranged under predetermined conditions, and the electrodes 13 and 1 of the liquid crystal cell 1 are arranged.
In the state where no voltage is applied between the four, white light is made incident from one surface as shown by an arrow in the figure, and is transmitted through one polarizing plate 21, the liquid crystal cell 1 and the other polarizing plate 22, and The spectral distribution of the transmitted light emitted to the surface is measured by a measuring device (not shown).

【0026】この透過光の分光分布の測定は、前記一対
の偏光板21,22を、光の透過率が液晶セル1の電極
13,14間に電圧を印加しない状態において最小とな
る条件、つまり、ノーマリーブラックの表示を行なう条
件で配置して行なう。
In the measurement of the spectral distribution of the transmitted light, the pair of polarizing plates 21 and 22 are measured under the condition that the light transmittance is minimized when no voltage is applied between the electrodes 13 and 14 of the liquid crystal cell 1, that is, Are arranged under the condition of displaying normally black.

【0027】すなわち、前記液晶セル1の液晶層18の
液晶分子のツイスト角が上述したようにほぼ90°であ
る場合は、一対の偏光板21,22を、それぞれの光学
軸(例えば透過軸)を互いにほぼ平行にするとともに、
前記液晶セル1のそれぞれの基板11,12の近傍にお
ける液晶分子の配向方向と、その基板11,12に隣接
する偏光板21,22の光学軸とを互いにほぼ平行また
はほぼ直交させて配置して、透過光の分光分布を測定す
る。
That is, when the twist angle of the liquid crystal molecules of the liquid crystal layer 18 of the liquid crystal cell 1 is approximately 90 ° as described above, the pair of polarizing plates 21 and 22 are connected to the respective optical axes (for example, transmission axes). Are almost parallel to each other,
The alignment direction of the liquid crystal molecules in the vicinity of each of the substrates 11 and 12 of the liquid crystal cell 1 and the optical axes of the polarizing plates 21 and 22 adjacent to the substrates 11 and 12 are arranged so as to be substantially parallel or substantially orthogonal to each other. And measuring the spectral distribution of the transmitted light.

【0028】次に、測定した透過光の分光分布を基に、
色度座標(x,y値)を算出し、前記透過光の色度を前
記CIE色度図上に表わす。図1において、CPは前記
透過光の色度を表わす点(以下、色度点という)であ
り、WPは無彩色点(x=0.317,y=0.341
の点)を示している。
Next, based on the measured spectral distribution of the transmitted light,
The chromaticity coordinates (x, y values) are calculated, and the chromaticity of the transmitted light is represented on the CIE chromaticity diagram. In FIG. 1, CP is a point representing the chromaticity of the transmitted light (hereinafter referred to as a chromaticity point), and WP is an achromatic point (x = 0.317, y = 0.341).
Point).

【0029】なお、この実施例では上述したように、前
記透過光の分光分布の測定を、一対の偏光板21,22
を光の透過率が液晶セル1の電極13,14間に電圧を
印加しない状態において最小となる条件で配置して行な
っており、透過光の分光分布の液晶層厚依存性は、光の
透過率が小さい方が明確に観察できるため、透過光の色
度をより正確に色度図上に表わすことができる。
In this embodiment, as described above, the measurement of the spectral distribution of the transmitted light is performed by using a pair of polarizing plates 21 and 22.
Are arranged under the condition that the light transmittance is minimized in a state where no voltage is applied between the electrodes 13 and 14 of the liquid crystal cell 1. The dependency of the spectral distribution of the transmitted light on the thickness of the liquid crystal layer is determined by Since the smaller the ratio, the clearer the observation, the chromaticity of the transmitted light can be represented more accurately on the chromaticity diagram.

【0030】次に、前記色度図上での無彩色点WPと前
記透過光の色度点CPとを通る直線Lのx軸に対する傾
き角θを測定し、図2に示した傾き角θと液晶層厚dと
の関係に基づいて、前記液晶セル1の液晶層厚dを求め
る。
Next, the inclination angle θ of the straight line L passing through the achromatic color point WP on the chromaticity diagram and the chromaticity point CP of the transmitted light with respect to the x-axis was measured, and the inclination angle θ shown in FIG. The liquid crystal layer thickness d of the liquid crystal cell 1 is obtained based on the relationship between the liquid crystal layer thickness d.

【0031】すなわち、この液晶層厚測定方法は、液晶
セル1と所定の条件で配置した一対の偏光板21,22
とを透過した光の分光分布の液晶層厚依存性に基づいて
前記液晶セル1の液晶層厚dを求めるものであり、液晶
セル1のギャップ材部分や液晶分子の配向が乱れた部分
などを透過したノイズ光を考慮すること無く、透過光の
分光分布から液晶層厚dを求めることができる。
That is, in this liquid crystal layer thickness measuring method, a liquid crystal cell 1 and a pair of polarizing plates 21 and 22 arranged under predetermined conditions are used.
The liquid crystal layer thickness d of the liquid crystal cell 1 is obtained based on the dependence of the spectral distribution of light transmitted through the liquid crystal layer thickness on the liquid crystal layer 1. The liquid crystal layer thickness d can be obtained from the spectral distribution of the transmitted light without considering the transmitted noise light.

【0032】以下に上記測定方法の原理について説明す
る。液晶セルの透過光の分光分布の液晶層厚依存性は、
液晶の屈折率異方性Δn,液晶分子の配向状態,透過光
の波長,及びセルギャップが既知であれば、Gooch and
Tarry の理論式により算出することができる。
The principle of the above measuring method will be described below. The dependence of the spectral distribution of the transmitted light of the liquid crystal cell on the thickness of the liquid crystal layer is
If the refractive index anisotropy Δn of the liquid crystal, the alignment state of the liquid crystal molecules, the wavelength of transmitted light, and the cell gap are known, Gooch and
It can be calculated by Tarry's theoretical formula.

【0033】すなわち、液晶分子のツイスト角が90°
である90°ツイストTN液晶表示素子(TN−LC
D)のノーマリブラック状態における透過光強度Tは、
Goochand Tarry の理論式に基づいて下記の (1)式で表
される。
That is, the twist angle of the liquid crystal molecules is 90 °
90 ° twisted TN liquid crystal display device (TN-LC
The transmitted light intensity T in the normally black state of D) is
It is expressed by the following equation (1) based on Goochand Tarry's theoretical equation.

【0034】[0034]

【数1】 (Equation 1)

【0035】上記 (1)式により、液晶層厚dが4.5μ
m、4.6μm、4.7μm、4.8μm、4.9μ
m、5.0μm、5.1μm、5.2μmの8通りにつ
いて、可視光帯域の各波長それぞれの透過率を算出する
ことにより、前記TN−LCDのノーマリブラック状態
における透過光の分光分布を求めることができる。
According to the above equation (1), the liquid crystal layer thickness d is 4.5 μm.
m, 4.6 μm, 4.7 μm, 4.8 μm, 4.9 μm
m, 5.0 μm, 5.1 μm, and 5.2 μm, the spectral distribution of transmitted light in the normally black state of the TN-LCD is calculated by calculating the transmittance of each wavelength in the visible light band. You can ask.

【0036】求めた各液晶層厚における分光分布から液
晶層厚dに対するY値(透過光の明るさ)とCIE色度
図上での色度座標(xおよびyコーディネイトの値)を
算出すると、次の[表1]のようになる。
When the Y value (brightness of transmitted light) for the liquid crystal layer thickness d and the chromaticity coordinates (x and y coordinate values) on the CIE chromaticity diagram are calculated from the obtained spectral distribution at each liquid crystal layer thickness, The result is shown in the following [Table 1].

【0037】[0037]

【表1】 [Table 1]

【0038】この[表1]に示したY値とCIE色度図
上での色度座標を示すxおよびyコーディネイトに基づ
いて、各液晶層厚に対応する色度点を前記CIE色度図
上に表わすと、図3のようになる。この図3で示される
ように、透過光の色度を表わす点CP0 は、液晶層厚d
によって異なる。したがって、透過光の分光分布、つま
り透過光のCIE色度図上での色度点から、液晶層厚d
を求めることができる。
Based on the Y values shown in Table 1 and the x and y coordinates indicating the chromaticity coordinates on the CIE chromaticity diagram, the chromaticity points corresponding to the respective liquid crystal layer thicknesses are described in the CIE chromaticity diagram. Expressed above, it is as shown in FIG. As shown in FIG. 3, a point CP 0 representing the chromaticity of the transmitted light is represented by a liquid crystal layer thickness d.
Depends on Therefore, from the spectral distribution of the transmitted light, that is, the chromaticity point of the transmitted light on the CIE chromaticity diagram, the liquid crystal layer thickness d
Can be requested.

【0039】ところで、実際に測定される透過光は前記
ノイズ光を含んでいるため、実際の透過光の分光分布
は、上述した計算による透過光の分光分布とは異なる。
すなわち、図4は、液晶層厚dが4.6μmの前記TN
−LCDについて上記(1)式により求めたの透過光の分
光分布(算出値)と、液晶層厚dが同じ(d=4.6μ
m)でノイズ光量が異なる複数のTN−LCDについて
偏光板は上述したノーマリブラック配置の件で実際に測
定した透過光の分光分布(実測値)とを示している。
Since the actually measured transmitted light includes the noise light, the actual spectral distribution of the transmitted light is different from the spectral distribution of the transmitted light calculated as described above.
That is, FIG. 4 shows the TN having a liquid crystal layer thickness d of 4.6 μm.
-The liquid crystal layer thickness d is the same as the spectral distribution (calculated value) of transmitted light obtained by the above equation (1) for the LCD (d = 4.6 μm).
For the plurality of TN-LCDs with different amounts of noise in m), the polarizer shows the spectral distribution (measured value) of the transmitted light actually measured in the case of the above-described normally black arrangement.

【0040】このノイズ光は、液晶セル1のギャップ材
部分(液晶が存在しない部分)や液晶分子の配向が乱れ
た部分などのような液晶層本来の屈折率とは異なる屈折
率を示す部分からの漏れ光である。
The noise light is emitted from a portion having a refractive index different from the original refractive index of the liquid crystal layer, such as a gap material portion (a portion where no liquid crystal exists) of the liquid crystal cell 1 or a portion where the alignment of liquid crystal molecules is disturbed. Is the light leakage.

【0041】この図4のように、実際の透過光の分光分
布は、ノイズ光を考慮しない計算により求めた透過光の
分光分布とは異なり、ノイズ光(漏れ光)の量が多いほ
ど各波長光の透過率が高くなるが、その分光分布曲線の
形(可視光帯域の全ての波長光の透過率の比)は、前記
計算により求めた分光分布曲線上の透過光の分光分布と
ほとんど変わらず、前記分光分布曲線が透過率が高い方
向に平行移動した特性を示す。
As shown in FIG. 4, the actual spectral distribution of the transmitted light is different from the spectral distribution of the transmitted light obtained by calculation without considering the noise light. Although the light transmittance increases, the shape of the spectral distribution curve (the ratio of the transmittance of all wavelength light in the visible light band) is almost the same as the spectral distribution of the transmitted light on the spectral distribution curve obtained by the above calculation. In other words, the spectral distribution curve shows a characteristic shifted in the direction of higher transmittance.

【0042】図4に示した、ノイズ光を含んだ透過光の
分光分布に基づいて、ノイズ光が無い場合(Y値=7.
34)と、ノイズ光強度により透過光強度Y値が異なる
場合について、それぞれのCIE色度図上でのx,yコ
ーディネイトを[表2]示す。
Based on the spectral distribution of the transmitted light including the noise light shown in FIG. 4, when there is no noise light (Y value = 7.
34) and x and y coordinates on the respective CIE chromaticity diagrams when the transmitted light intensity Y value differs depending on the noise light intensity are shown in [Table 2].

【0043】[0043]

【表2】 [Table 2]

【0044】この[表2]の各色度座標により、各色度
点CPをCIE色度図上に表わすと、図5のようにな
る。この図5から分かるように、液晶層厚dが同じ場
合、ノイズ光の影響によるY値の変化は、無彩色点WP
と前記算出(ノイズ光が無いとき)された色度点CP0
とを通る直線に沿ったほぼ直線的な変化である。
FIG. 5 shows the chromaticity points CP on the CIE chromaticity diagram based on the chromaticity coordinates in Table 2. As can be seen from FIG. 5, when the liquid crystal layer thickness d is the same, the change in the Y value due to the influence of noise light is caused by the achromatic point WP
And the calculated chromaticity point CP 0 (when there is no noise light)
This is a substantially linear change along a straight line passing through.

【0045】つまり、液晶セル1の液晶層厚dが同じで
あれば、CIE色度図上での無彩色点WPと透過光の色
度を表わす点とを通る直線のx軸に対する傾き角θは、
ノイズ光の影響の有無にかかわらずほぼ一定である。
That is, if the liquid crystal layer thickness d of the liquid crystal cell 1 is the same, the inclination angle θ of the straight line passing through the achromatic point WP on the CIE chromaticity diagram and the point representing the chromaticity of the transmitted light with respect to the x-axis. Is
It is almost constant regardless of the influence of noise light.

【0046】そして、図3に示されているように、CI
E色度図上で各液晶層厚毎にそれぞれ対応した異なる色
度点CP0 をもっているから、それぞれの液晶層厚にお
けるノイズ光を含んだ透過光のCIE色度図上での色度
点CPは、その液晶層厚に対応する色度点CP0 と無彩
色点WPとを結んだ直線上にある。
Then, as shown in FIG.
Since the liquid crystal layer has different chromaticity points CP 0 corresponding to each liquid crystal layer thickness on the E chromaticity diagram, the chromaticity points CP on the CIE chromaticity diagram of the transmitted light including the noise light at each liquid crystal layer thickness. Is on a straight line connecting the chromaticity point CP 0 corresponding to the liquid crystal layer thickness and the achromatic color point WP.

【0047】よって、偏光板をノーマリブラック配置し
たTN−LCDの透過光をCIE色度図上に表した色度
点CP0 と無彩色点WPとを結んだ直線Lのx軸に対す
る傾き角θが、液晶層厚に対応する。
Accordingly, the inclination angle of the straight line L connecting the chromaticity point CP 0 and the achromatic point WP, which are shown on the CIE chromaticity diagram, with the transmitted light of the TN-LCD in which the polarizing plate is arranged in normally black, with respect to the x-axis. θ corresponds to the thickness of the liquid crystal layer.

【0048】前記直線Lのx軸に対する傾き角θと、液
晶層厚dとの関係は、[表1]に示した各液晶層厚dに
対応する色度点CP0 の色度座標と、無彩色点WPの色
度座標とにより求めることができる。このようにして、
求めた直線Lのx軸に対する傾き角θと、液晶層厚dと
の関係を図2に示した。
The relationship between the inclination angle θ of the straight line L with respect to the x-axis and the liquid crystal layer thickness d is represented by the chromaticity coordinates of the chromaticity point CP 0 corresponding to each liquid crystal layer thickness d shown in Table 1; It can be obtained from the chromaticity coordinates of the achromatic color point WP. In this way,
FIG. 2 shows the relationship between the obtained inclination angle θ of the straight line L with respect to the x-axis and the liquid crystal layer thickness d.

【0049】上述したように、前記直線Lの傾き角θ
は、ノイズ光の影響の有無にかかわらずほぼ一定である
ため、TN−LCDの透過光の分光分布を測定してその
透過光の色度点をCIE色度図上に表わし、この色度図
上での無彩色点WPと前記透過光の色度を表わす点CP
とを通る直線Lの傾き角θを求め、この傾き角θと液晶
層厚dとの関係を表した図2に基づいて液晶層厚dを求
めることにより、ノイズ光の影響による誤差をほとんど
生じることなく高い精度で測定することができる。
As described above, the inclination angle θ of the straight line L
Is almost constant irrespective of the presence or absence of the noise light, the spectral distribution of the transmitted light of the TN-LCD is measured, and the chromaticity point of the transmitted light is represented on the CIE chromaticity diagram. Achromatic point WP and a point CP representing the chromaticity of the transmitted light
And the liquid crystal layer thickness d is determined based on FIG. 2 showing the relationship between the tilt angle θ and the liquid crystal layer thickness d, thereby causing almost all errors due to the influence of noise light. It can be measured with high accuracy without any problems.

【0050】また、上記実施例では、前記透過光の分光
分布の測定を、一対の偏光板21,22を光の透過率が
液晶セルの電極間に電圧を印加しない状態において最小
となる条件で配置して行なっており、透過光の分光分布
の液晶層厚依存性は光の透過率が小さい方が明確に測定
できるため、このような条件で偏光板21,22 を配置
して透過光の分光分布を測定することにより、その透過
光の色度をより正確に色度図上に表わして、さらに精度
よく液晶層厚を測定することができる。
In the above embodiment, the measurement of the spectral distribution of the transmitted light is performed under the condition that the light transmittance of the pair of polarizing plates 21 and 22 is minimized in a state where no voltage is applied between the electrodes of the liquid crystal cell. Since the dependence of the spectral distribution of the transmitted light on the thickness of the liquid crystal layer can be clearly measured when the light transmittance is smaller, the polarizing plates 21 and 22 are disposed under such conditions to disperse the transmitted light. By measuring the spectral distribution, the chromaticity of the transmitted light can be more accurately represented on a chromaticity diagram, and the thickness of the liquid crystal layer can be measured more accurately.

【0051】このように、偏光板21,22を光の透過
率が液晶セルの電極間に電圧を印加しない状態において
最小となる条件で配置して透過光の分光分布を測定した
ときの液晶層厚dの測定誤差は、±0.01μmの範囲
であり、高い精度で液晶層厚dを測定することができ
る。
As described above, when the polarizers 21 and 22 are arranged under the condition that the light transmittance is minimized in the state where no voltage is applied between the electrodes of the liquid crystal cell, and the spectral distribution of the transmitted light is measured, The measurement error of the thickness d is in a range of ± 0.01 μm, and the liquid crystal layer thickness d can be measured with high accuracy.

【0052】なお、上記液晶層厚測定方法は、図7に示
したカラーフィルタ17R,17G,17Bを備えた液
晶セル2の液晶層厚dの測定にも適用できるものであ
り、その場合は、この液晶セル2を図7に示すように一
対の偏光板21,22ではさんで透過光の分光分布を測
定し、その測定した分光分布から、予め測定しておいた
前記複数の色のカラーフィルタ17R,17G,17B
のみを透過した光の分光分布分を差し引いてカラーフィ
ルタ無しの分光分布を求め、その分光分布に対応する色
度をCIE色度図上に表わして、前記色度図上での無彩
色点と前記透過光の色度を表わす点とを通る直線のx軸
に対する傾き角θを算出し、図2に示した傾き角θと液
晶層厚dとの関係に基づいて、前記液晶セル1の液晶層
厚dを求めるすればよい。
The liquid crystal layer thickness measuring method can be applied to the measurement of the liquid crystal layer thickness d of the liquid crystal cell 2 provided with the color filters 17R, 17G, 17B shown in FIG. As shown in FIG. 7, the liquid crystal cell 2 is sandwiched between a pair of polarizing plates 21 and 22 to measure the spectral distribution of the transmitted light, and from the measured spectral distribution, the color filters of the plurality of colors that have been measured in advance. 17R, 17G, 17B
A spectral distribution without a color filter is obtained by subtracting a spectral distribution component of light transmitted through only the chromaticity corresponding to the spectral distribution on a CIE chromaticity diagram. The tilt angle θ of the straight line passing through the point representing the chromaticity of the transmitted light with respect to the x-axis is calculated, and the liquid crystal of the liquid crystal cell 1 is determined based on the relationship between the tilt angle θ and the liquid crystal layer thickness d shown in FIG. What is necessary is just to obtain the layer thickness d.

【0053】また、上記実施例では、CIE色度図上で
の無彩色点WPと透過光の色度を表わす点CPとを通る
直線Lのx軸に対する傾き角θから液晶層厚dを判定し
たが、液晶層厚dは、前記直線Lのy軸に対する傾き角
から判定してもよい。
In the above embodiment, the liquid crystal layer thickness d is determined from the inclination angle θ of the straight line L passing through the achromatic point WP and the point CP representing the chromaticity of transmitted light on the CIE chromaticity diagram with respect to the x-axis. However, the liquid crystal layer thickness d may be determined from the inclination angle of the straight line L with respect to the y-axis.

【0054】さらに、上記実施例では、透過光の分光分
布の測定を、前記偏光板を光の透過率が液晶セル1の電
極13,14間に電圧を印加しない状態において最小と
なる条件(ノーマリーブラックの表示を行なう条件)で
配置して行なったが、透過光の分光分布の測定は、前記
偏光板を光の透過率が液晶セルの電極間に電圧を印加し
ない状態において最大となる条件(ノーマリーホワイト
の表示を行なう条件)で配置して行なってもよい。
Further, in the above embodiment, the measurement of the spectral distribution of the transmitted light was performed under the condition that the light transmittance of the polarizing plate was minimized when no voltage was applied between the electrodes 13 and 14 of the liquid crystal cell 1 (No. The display was measured under the condition that the light transmittance was maximized in a state where the light transmittance of the polarizing plate was maximized when no voltage was applied between the electrodes of the liquid crystal cell. (Conditions for displaying normally white).

【0055】また、この発明は、液晶分子がツイスト配
向した液晶セルに限らず、液晶分子がほぼ平行に配向し
た、いわゆるパラレル配向液晶セルの液晶層厚測定にも
適用できるものであり、その場合も、液晶セルをはさん
で一対の偏光板を所定の条件で配置して前記液晶セルの
電極間に電圧を印加しない状態での透過光の分光分布を
測定し、その透過光の色度をCIE色度図上に表わし
て、前記色度図上での無彩色点と前記透過光の色度を表
わす点とを通る直線のx,y軸のいずれかに対する傾き
角から前記液晶セルの液晶層厚を求めればよい。
The present invention is not limited to a liquid crystal cell in which liquid crystal molecules are twist-aligned, but can be applied to a liquid crystal layer thickness measurement in a so-called parallel alignment liquid crystal cell in which liquid crystal molecules are aligned substantially in parallel. Also, a pair of polarizing plates are arranged under predetermined conditions with the liquid crystal cell interposed therebetween, and the spectral distribution of transmitted light in a state where no voltage is applied between the electrodes of the liquid crystal cell is measured, and the chromaticity of the transmitted light is measured. The liquid crystal of the liquid crystal cell is determined from the inclination angle of a straight line passing through an achromatic point on the chromaticity diagram and a point representing the chromaticity of the transmitted light on the CIE chromaticity diagram with respect to either the x or y axis. What is necessary is just to obtain the layer thickness.

【0056】なお、前記パラレル配向液晶セルの液晶層
厚測定において、透過光の分光分布の測定を、偏光板を
光の透過率が液晶セルの電極間に電圧を印加しない状態
において最小となる条件で配置して行なう場合、前記パ
ラレル配向液晶セルの光透過強度T0 は、液晶の屈折率
異方性をΔn、液晶層厚をdとすると、下記の (2)式で
表される。
In the measurement of the thickness of the liquid crystal layer of the parallel alignment liquid crystal cell, the measurement of the spectral distribution of transmitted light was performed under the condition that the light transmittance of the polarizing plate was minimized in a state where no voltage was applied between the electrodes of the liquid crystal cell. In this case, the light transmission intensity T 0 of the parallel alignment liquid crystal cell is expressed by the following equation (2), where Δn is the refractive index anisotropy of the liquid crystal and d is the thickness of the liquid crystal layer.

【0057】[0057]

【数2】 (Equation 2)

【0058】したがって、上述した第1実施例と同様
に、上記 (2)式により、異なる複数の液晶層厚d毎に可
視光帯域の各波長それぞれの透過率を算出して透過光の
分光分布を求め、その分光分布から液晶層厚dに対する
CIE色度図上での色度座標(xおよびyコーディネイ
トの値)を算出して色度点を求め、この色度点と無彩色
点とを結ぶ線のx軸に対する傾き角を求める。そして、
予め前各液晶層厚に対する色度座標と無彩色点の色度座
標とから算出しておいた、前記各液晶層厚と前記傾き角
との関係に基づいて、液晶層厚を求めることができる。
Therefore, similarly to the first embodiment described above, the transmittance of each wavelength in the visible light band is calculated for each of a plurality of different liquid crystal layer thicknesses d using the above equation (2), and the spectral distribution of the transmitted light is calculated. Is calculated, and chromaticity coordinates (x and y coordinate values) on the CIE chromaticity diagram with respect to the liquid crystal layer thickness d are calculated from the spectral distribution to obtain a chromaticity point, and the chromaticity point and the achromatic color point are calculated. The inclination angle of the connecting line with respect to the x-axis is obtained. And
The liquid crystal layer thickness can be determined based on the relationship between each of the liquid crystal layer thicknesses and the tilt angle, which has been previously calculated from the chromaticity coordinates for each liquid crystal layer thickness and the chromaticity coordinates of the achromatic color point. .

【0059】さらに、上記実施例では、液晶セル1をは
さんで一対の偏光板21,22を配置し、一方の偏光板
21と液晶セル1と他方の偏光板22とを透過して出射
する透過光の分光分布を測定しているが、液晶セルの一
方の面に偏光板を所定の条件で配置し、前記液晶セルの
他方の面に反射板を配置して、前記偏光板と液晶セルを
透過して前記反射板で反射され前記液晶セルと前記偏光
板とを透過して出射する透過光の分光分布を測定し、そ
の透過光の色度をCIE色度図上に表わして、前記色度
図上での無彩色点と前記透過光の色度を表わす点とを通
る直線のx,y軸のいずれかに対する傾き角から前記液
晶セルの液晶層厚を求めるようにしてもよい。
Further, in the above embodiment, a pair of polarizing plates 21 and 22 are arranged with the liquid crystal cell 1 interposed therebetween, and the light is transmitted through one polarizing plate 21, the liquid crystal cell 1 and the other polarizing plate 22 and emitted. Although the spectral distribution of the transmitted light is measured, a polarizing plate is arranged on one surface of the liquid crystal cell under predetermined conditions, and a reflecting plate is arranged on the other surface of the liquid crystal cell. Is measured, the spectral distribution of transmitted light that is transmitted through the liquid crystal cell and the polarizing plate, is reflected by the reflection plate, and is transmitted and emitted, and the chromaticity of the transmitted light is represented on a CIE chromaticity diagram. The liquid crystal layer thickness of the liquid crystal cell may be obtained from the inclination angle of a straight line passing through the achromatic point on the chromaticity diagram and the point representing the chromaticity of the transmitted light with respect to either the x or y axis.

【0060】[0060]

【発明の効果】この発明の液晶層厚測定方法は、液晶セ
ルの少なくとも一方の面に偏光板を所定の条件で配置し
て前記液晶セルの電極間に電圧を印加しない状態での透
過光の分光分布を測定し、その透過光の色度をCIE色
度図上に表わして、前記色度図上での無彩色点と前記透
過光の色度を表わす点とを通る直線のx,y軸のいずれ
かに対する傾き角から液晶層厚を求めるものであるか
ら、前記液晶層厚を高い精度で測定することができる。
According to the method for measuring the thickness of a liquid crystal layer of the present invention, a polarizing plate is disposed on at least one surface of a liquid crystal cell under a predetermined condition, and transmitted light in a state where no voltage is applied between electrodes of the liquid crystal cell. The spectral distribution is measured, the chromaticity of the transmitted light is represented on a CIE chromaticity diagram, and x and y of a straight line passing through an achromatic point on the chromaticity diagram and a point representing the chromaticity of the transmitted light. Since the thickness of the liquid crystal layer is determined from the inclination angle with respect to any of the axes, the thickness of the liquid crystal layer can be measured with high accuracy.

【0061】この発明は、白黒表示を行なう液晶セルの
液晶層厚測定にも、複数の色のカラーフィルタを備えた
カラー画像を表示する液晶セルの液晶層厚測定にも適用
できるものであり、カラーフィルタを備えた液晶セルの
場合でも、測定した透過光の分光分布から、予め測定し
ておいた前記複数の色のカラーフィルタのみを透過した
光の分光分布分を差し引いてカラーフィルタ無しの分光
分布を求め、その分光分布に対応する色度をCIE色度
図上に表わすことにより、上述した液晶層厚の測定を行
なうことができる。
The present invention can be applied to the measurement of the thickness of a liquid crystal layer of a liquid crystal cell for displaying black and white and the thickness of a liquid crystal cell for displaying a color image having a plurality of color filters. Even in the case of a liquid crystal cell having a color filter, the spectral distribution of light transmitted through only the color filters of the plurality of colors, which has been measured in advance, is subtracted from the measured spectral distribution of transmitted light. By obtaining the distribution and expressing the chromaticity corresponding to the spectral distribution on the CIE chromaticity diagram, the above-described measurement of the liquid crystal layer thickness can be performed.

【0062】また、この発明において、前記透過光の分
光分布の測定は、前記偏光板を光の透過率が液晶セルの
電極間に電圧を印加しない状態において最小となる条件
で配置して行なうのが好ましく、前記分光分布の液晶層
厚依存性は、光の透過率が小さい方が大きく見えるた
め、このような条件で偏光板を配置して透過光の分光分
布を測定すれば、その透過光の色度をより正確に色度図
上に表わして、さらに精度よく液晶層厚を測定すること
ができる。
In the present invention, the measurement of the spectral distribution of the transmitted light is performed by arranging the polarizing plate under the condition that the light transmittance is minimized between the electrodes of the liquid crystal cell when no voltage is applied. It is preferable that the spectral distribution depends on the thickness of the liquid crystal layer. The smaller the transmittance of light, the larger it looks. Therefore, if the polarizing plate is arranged under such conditions and the spectral distribution of the transmitted light is measured, the transmitted light can be measured. Is more accurately represented on the chromaticity diagram, and the thickness of the liquid crystal layer can be measured more accurately.

【図面の簡単な説明】[Brief description of the drawings]

【図1】無彩色点と透過光の色度を表わす点とを通る直
線の傾き角の一例を示すCIE色度図。
FIG. 1 is a CIE chromaticity diagram showing an example of the inclination angle of a straight line passing through an achromatic color point and a point representing the chromaticity of transmitted light.

【図2】前記直線の傾き角と液晶層厚との関係を示す
図。
FIG. 2 is a diagram showing the relationship between the inclination angle of the straight line and the thickness of a liquid crystal layer.

【図3】液晶層厚が異なる液晶表示素子について求めた
透過光の分光分布から算出した、液晶層厚と透過光の色
度点との関係を示すCIE色度図。
FIG. 3 is a CIE chromaticity diagram showing a relationship between a liquid crystal layer thickness and a chromaticity point of transmitted light, calculated from a spectral distribution of transmitted light obtained for liquid crystal display elements having different liquid crystal layer thicknesses.

【図4】液晶層厚が4.6μmの液晶表示素子について
求めたノイズ光が無い場合の透過光の分光分布と、液晶
層厚dが同じ(d=4.6μm)でノイズ光強度が異な
る複数の液晶表示素子について実際に測定した透過光の
分光分布とを示す図。
FIG. 4 shows the spectral distribution of transmitted light in the absence of noise light obtained for a liquid crystal display element having a liquid crystal layer thickness of 4.6 μm, and the noise light intensity differs for the same liquid crystal layer thickness d (d = 4.6 μm). FIG. 9 is a diagram showing spectral distributions of transmitted light actually measured for a plurality of liquid crystal display elements.

【図5】液晶層厚が4.6μmの液晶表示素子について
求めた透過光の色度点と、液晶層厚dが同じ(d=4.
6μm)でノイズ光量が異なる複数の液晶表示素子につ
いて実際に測定した透過光の色度点とを示すCIE色度
図。
FIG. 5 is the same as the chromaticity point of transmitted light obtained for a liquid crystal display element having a liquid crystal layer thickness of 4.6 μm and the liquid crystal layer thickness d (d = 4.
FIG. 6 is a CIE chromaticity diagram showing chromaticity points of transmitted light actually measured for a plurality of liquid crystal display elements having different amounts of noise at 6 μm).

【図6】白黒表示を行なう液晶セルの断面図。FIG. 6 is a cross-sectional view of a liquid crystal cell that performs black and white display.

【図7】カラー表示を行なう液晶セルの断面図。FIG. 7 is a cross-sectional view of a liquid crystal cell which performs color display.

【符号の説明】[Explanation of symbols]

WP…無彩色点 CP…透過光の色度を表わす点 L…前記無彩色点と透過光の色度を表わす点とを通る直
線 θ…前記直線のx軸に対する傾き角
WP: achromatic point CP: point representing chromaticity of transmitted light L: straight line passing through the achromatic point and a point representing chromaticity of transmitted light θ: inclination angle of the straight line with respect to x-axis

【手続補正書】[Procedure amendment]

【提出日】平成10年7月9日[Submission date] July 9, 1998

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0034[Correction target item name] 0034

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0034】[0034]

【数1】 (Equation 1)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】対向面に電極がそれぞれ形成された一対の
基板の間に液晶分子が所定の配向状態で配向した液晶層
を設けてなる液晶セルの前記液晶層の層厚を測定する方
法であって、 前記液晶セルの少なくとも一方の面に偏光板を所定の条
件で配置して前記液晶セルの電極間に電圧を印加しない
状態での透過光の分光分布を測定し、その透過光の色度
を表す点をCIE色度図上に求め、前記色度図上での無
彩色点と前記透過光の色度を表わす点とを通る直線の
x,y軸のいずれかに対する傾き角から前記液晶セルの
液晶層厚を求めることを特徴とする液晶層厚測定方法。
1. A method for measuring the thickness of a liquid crystal layer of a liquid crystal cell comprising a liquid crystal layer in which liquid crystal molecules are aligned in a predetermined alignment state between a pair of substrates having electrodes formed on opposing surfaces. A polarizing plate is arranged on at least one surface of the liquid crystal cell under a predetermined condition, and a spectral distribution of transmitted light in a state where no voltage is applied between electrodes of the liquid crystal cell is measured, and a color of the transmitted light is measured. A point representing the chromaticity is obtained on the CIE chromaticity diagram, and a line passing through the achromatic point on the chromaticity diagram and the point representing the chromaticity of the transmitted light is obtained from the inclination angle with respect to either the x or y axis. A method for measuring the thickness of a liquid crystal layer, comprising determining the thickness of a liquid crystal layer of a liquid crystal cell.
【請求項2】前記液晶セルは、前記一対の基板の対向す
る内面のいずれか一方に複数の色のカラーフィルタを備
えており、前記透過光の分光分布は、測定した前記液晶
セルの透過光の分光分布を、予め測定しておいた前記複
数の色のカラーフィルタのみを透過した光の分光分布を
基に前記液晶セルのみの分光分布に補正して求めること
を特徴とする請求項1に記載の液晶層厚測定方法。
2. The liquid crystal cell includes a color filter of a plurality of colors on one of the opposing inner surfaces of the pair of substrates, and the spectral distribution of the transmitted light is determined by measuring the transmitted light of the liquid crystal cell. 2. The spectral distribution of the liquid crystal cell is corrected based on the spectral distribution of light transmitted through only the color filters of the plurality of colors which has been measured in advance. The liquid crystal layer thickness measurement method described in the above.
【請求項3】前記透過光の分光分布の測定は、前記偏光
板を、光の透過率が前記液晶セルの電極間に電圧を印加
しない状態において最小となる条件で配置して行なうこ
とを特徴とする請求項1または2に記載の液晶層厚測定
方法。
3. The measurement of the spectral distribution of the transmitted light is performed by arranging the polarizing plate under the condition that the light transmittance is minimized when no voltage is applied between the electrodes of the liquid crystal cell. The method for measuring the thickness of a liquid crystal layer according to claim 1.
JP11201298A 1998-04-22 1998-04-22 Liquid crystal layer thickness measurement method Expired - Fee Related JP3704950B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013222144A (en) * 2012-04-18 2013-10-28 Japan Display Inc Manufacturing method for liquid crystal display

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013222144A (en) * 2012-04-18 2013-10-28 Japan Display Inc Manufacturing method for liquid crystal display

Also Published As

Publication number Publication date
JP3704950B2 (en) 2005-10-12

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