JPH11296916A - Electronic beam device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic beam lens-barrel group, to improve throughput and also to minimize the drop of working efficiency even when a faulty electronic beam lens-barrel takes place about an electronic beam device that is used at the time of manufacturing a master disk of an optical disk. SOLUTION: This device is provided with an electronic beam lens-barrel group 6 which arranges plural electronic beam lens-barrels for information recording 21-1 to 21-4 to 24-1 to 24-4 in each different radius direction distance from the rotation center 14 of a disk 2 for master disk manufacturing in rotation symmetry and when it detects a faulty electronic beam lens-barrel for information recording, it performs electronic beam irradiation of an electronic beam irradiation place whose charge is taken by the faulty electronic beam lens-barrel for information recording by using another electronic beam lens- barrel for information recording that is located in the rotation symmetry.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention relates to an electron beam apparatus used for producing a master required for producing an optical disk.

[0002]

2. Description of the Related Art In an electronic information processing apparatus, an optical disk such as a CD-ROM or a magneto-optical disk (MO) among the disks used as an information recording medium is a portable large-capacity recording medium. , Widely used.

[0003] Since these optical disks have pits (recesses), for example, a master disk is prepared by forming a resist layer on a glass substrate, and the resist layer of the master disk is processed to form a master disk. Is manufactured, and a mold called a stamper is manufactured using the master, and then manufactured using the mold.

Conventionally, the master has been manufactured by irradiating a resist layer of the master manufacturing disk with a laser beam corresponding to digital information to be stored on the optical disk to form pits necessary for the master manufacturing disk.

However, in the production of a master using a laser beam, it is considered that it is difficult to further increase the recording density. Therefore, the production of a master using an electron beam has been studied. Various types of electron beam devices have been proposed (Japanese Patent Application Laid-Open Nos. 2-214046 and 4-335226, 44th Spring Applied Physics Society Proceedings (1997) 31a-NF-9).

[0006] In particular, JP-A-2-214046 and JP-A-4-335226 disclose low throughput, which is a drawback of an electron beam apparatus due to the inability to collectively irradiate an electron beam irradiation portion of a master disc. For the purpose of improvement, there is described an electron beam apparatus in which small electron beam barrels are two-dimensionally arranged so that a plurality of electron beams can be simultaneously applied to a master disc.

[0007]

However, Japanese Patent Application Laid-Open No. Hei 2-2
No. 14046, an electron beam apparatus,
The electron beam apparatus described in Japanese Patent Application Laid-Open No. 4-335226 cannot detect a malfunctioning electron beam column, and immediately responds to the occurrence of a malfunctioning electron beam column. And there is a problem that the work efficiency is greatly reduced.

In a conventional electron beam apparatus,
The positioning of the master disk and the electron beam lens group depends on the precision of the stage mechanism that holds the master disk. Since there was no means for matching, there was a problem that pits could not be formed with high accuracy in some cases.

In view of the above, the present invention provides an electron beam lens barrel group in which a plurality of electron beams are arranged, thereby improving the throughput, and also, when a defective electron beam lens barrel occurs. Another object of the present invention is to provide an electron beam apparatus capable of minimizing a reduction in work efficiency.

Further, the present invention includes an electron beam lens barrel group in which a plurality of electron beams are arranged, thereby improving the throughput and performing the operation even when a defective electron beam lens barrel occurs. The reduction in efficiency can be minimized, the disc for master fabrication can be aligned with the electron beam column group, and the information necessary for forming pits on the disc for master fabrication can be recorded with high precision. A second object is to provide an electron beam apparatus that can perform the operation.

[0011]

According to the present invention, there is provided an electron beam apparatus according to a first aspect of the present invention, comprising: a disk holding means for holding and rotating a disk for manufacturing a master; and a disk holding means for manufacturing the master. A group of information-recording electron beam columns consisting of a plurality of information-recording electron beam columns that are rotationally symmetrically arranged at different radial distances from the center of rotation of the held master disk, and a defective information-recording electron. An electron beam column detecting means for recording defect information for detecting a beam column.

In the present invention, according to the electron beam apparatus of the first invention, a plurality of information recording electron beams are provided at different radial distances from the center of rotation of the master disc which is held by the master disc holding means. Since it has an information recording electron beam lens barrel group in which lens barrels are arranged rotationally symmetrically,
The irradiation of the electron beam to the electron beam irradiation portion of the master disc can be performed by a plurality of rotationally symmetric electron beam columns for information recording and can be performed in parallel.

Further, since the apparatus includes the defect information recording electron beam column detecting means for detecting the defect information recording electron beam column, the defect information recording electron beam column can be automatically detected. A group of electron beam columns for information recording in which a plurality of electron beam column for information recording are rotationally symmetrically arranged at different radial distances of the disk for master production held by the disk holding means for disk production. Therefore, when a defective information recording electron beam column is detected, the electron beam irradiation to the electron beam irradiation position shared by the defective information recording electron beam column is performed in a rotationally symmetric other information recording mode. It can be performed using an electron beam lens barrel.

According to a second aspect of the present invention, the electron beam apparatus according to the first aspect is provided with a spare information recording electron beam column corresponding to each of the plurality of information recording electron beam columns. It is that there is.

In the present invention, according to the electron beam apparatus of the second invention, similarly to the electron beam apparatus of the first invention, the irradiation of the electron beam to the electron beam irradiation portion of the master disk is rotationally symmetric. A plurality of information recording electron beam columns can be shared and performed in parallel, and when a defective information recording electron beam column is detected, the defective information recording electron beam column The electron beam irradiation to the beam irradiation location can be performed using a spare information recording electron beam column.

According to a third aspect of the present invention, there is provided an electron beam apparatus according to the first or second aspect, wherein the defect information recording electron beam column detecting means is provided in a master holding disc holding means. It is configured to detect a defective information recording electron beam column based on the amount of reflected electrons or secondary electrons detected from the disk.

In the present invention, according to the electron beam apparatus of the third invention, it is possible to obtain the same operation as that of the electron beam apparatus of the first or second invention, and to record defective information with a simple configuration. The electron beam column for use can be detected.

According to a fourth aspect of the present invention, in the electron beam apparatus according to the first or second aspect, the defect information recording electron beam column detecting means detects an amount of leakage of the electron beam current. It is configured to detect a defective information recording electron beam column.

According to the present invention, according to the electron beam apparatus of the fourth invention, it is possible to obtain the same operation as that of the electron beam apparatus of the first or second invention, and to record defective information with a simple structure. The electron beam column for use can be detected.

In the present invention, the electron beam apparatus according to the fifth aspect of the present invention is the electron beam apparatus according to the first, second, third or fourth aspect, wherein the master disc is held at a constant angular velocity by the master disc holding means. An electron beam irradiation amount equalizing means for equalizing the electron beam irradiation amount per unit area at each point in the radial direction of the master disc when rotated is provided as much as possible.

According to the fifth aspect of the present invention, according to the electron beam apparatus of the fifth aspect, the same operation as that of the first, second, third, or fourth aspect can be obtained, and the disk for producing the master is fixed at a constant angular velocity. In the case of rotating the disk, the information necessary for forming pits on the master disk can be recorded with high accuracy.

According to a sixth aspect of the present invention, in the electron beam apparatus according to the sixth aspect of the present invention, in the fifth aspect, the electron beam irradiation amount equalizing means includes the step of forming one or more pits on one or more information recording electron-producing portions of the master disc. The electron beam irradiation is performed by a beam column, and the number of electron beam column for information recording, which irradiates one pit forming portion of the master disk, is equal to the inner circumference of the master disk. It is configured to include the arrangement of the electron beam column for information recording so as to increase from the section to the outer periphery.

According to the sixth aspect of the present invention, according to the electron beam apparatus of the sixth aspect, the same operation as that of the fifth aspect can be obtained, and the electron beam irradiation amount equalizing means can be simplified. .

According to a seventh aspect of the present invention, in the electron beam apparatus according to the fifth aspect of the present invention, in the fifth aspect, the electron beam irradiation amount equalizing means irradiates the original disc producing disc held by the original disc producing disc holding means. By controlling the amount of current of the electron beam, the disc per unit area at each point in the radial direction of the disc for producing the master when the disc for producing the master held by the disc holding means for master is rotated at a constant angular velocity is controlled. The configuration is such that the electron beam irradiation amount is made as uniform as possible.

According to the seventh aspect of the present invention, according to the electron beam apparatus of the seventh aspect, the same operation as that of the fifth aspect can be obtained, and the electron beam irradiation amount equalizing means can be simplified. .

In an eighth aspect of the present invention, in the electron beam apparatus according to the eighth aspect, in the fifth aspect, the electron beam irradiation amount equalizing means includes the number of times of irradiation of the one-pit formation portion of the master disc for irradiation with the electron beam. By controlling, the amount of electron beam irradiation per unit area at each point in the radial direction of the master disc can be obtained when the master disc held by the master disc holding means is rotated at a constant angular velocity. It is configured to equalize as far as possible.

According to the eighth aspect of the present invention, according to the electron beam apparatus of the eighth aspect, the same operation as in the fifth aspect can be obtained, and the electron beam irradiation amount equalizing means can be simplified. .

According to the ninth aspect of the present invention, there is provided an electron beam apparatus according to the first, second, third, fourth, fifth, sixth, seventh or eighth aspect of the present invention, Disc center of rotation detecting means for detecting the center of rotation of the disc for producing a master held on the disc, and a plurality of electron beam mirrors for recording the center of rotation of the disc for producing the master held on the disc holding means for producing the master. Aligning means for aligning the rotational symmetry center of the cylinder.

According to the ninth aspect of the present invention, according to the electron beam apparatus of the ninth aspect, the same operation as that of the first, second, third, fourth, fifth, sixth, seventh or eighth aspect is obtained. While being able to
Information required for forming pits on the master disc can be recorded with high accuracy.

According to a tenth aspect of the present invention, in the electron beam apparatus according to the ninth aspect, the means for detecting the center of rotation of the disk for producing the master is provided for detecting the rotation center of the disk for producing the master of the master holding disk. It is formed rotationally symmetric around the center of rotation of the master disc for rotation on the outer side of the disc mounting location, and the width along the rotation direction of the master disc differs depending on the distance from the center of rotation of the master disc. A plurality of master-recording disk rotation center detection marks of the same shape and a plurality of master-recording disk rotation center detection marks are irradiated with an electron beam to reflect electrons from the plurality of master-recording disk rotation center detection marks or It is configured to include an electron beam column for detecting the center of rotation of a disk for producing a master having a means for detecting secondary electrons. .

According to the tenth aspect of the present invention, according to the tenth aspect of the invention, the same operation as that of the ninth aspect can be obtained, and the rotation center position of the master disc can be simply configured. It can be detected with high accuracy.

In the eleventh aspect of the present invention, in the electron beam apparatus according to the ninth aspect, in the ninth aspect of the invention, the means for detecting the center of rotation of the master disc may include a rotation center of the master manufacturing disc. Formed rotationally symmetrically,
In addition, the width of the master disc is varied along the direction of rotation of the disc according to the distance from the center of rotation of the master disc. It is configured to include an electron beam column for detecting the center of rotation of a disk for producing a master having means for detecting reflected electrons or secondary electrons from the mark for detecting the center of rotation of the disk.

According to the eleventh aspect of the present invention, according to the electron beam apparatus of the eleventh aspect, the same operation as that of the ninth aspect can be obtained, and the center of rotation of the master disc is made simple with a high structure. It can be detected with high accuracy.

According to a twelfth aspect of the present invention, in the electron beam apparatus according to the tenth or eleventh aspect, an electron beam column for detecting the rotation center of the disk for producing the master is provided with a mark for detecting the rotation center of the disk for producing the master. The same number of electron beam barrels for detecting the center of rotation of the disk for producing a master disc are arranged rotationally symmetric with respect to the rotational symmetry centers of the plurality of electron beam barrels for information recording.

According to the twelfth aspect of the present invention, according to the twelfth aspect of the invention, it is possible to obtain the same operation as that of the tenth or eleventh aspect and to detect a plurality of marks for detecting the center of rotation of the disk for producing a master. Since the signals can be obtained at the same time, the rotation center of the master disc can be efficiently detected.

According to a thirteenth aspect of the present invention, in the tenth, eleventh, or twelfth aspect, the electron beam apparatus according to the tenth, eleventh, or twelfth aspect of the present invention provides a spare master for producing a master corresponding to an electron beam column for detecting the center of rotation of a master for producing a disc. An electron beam column for detecting the center of rotation of the disk is provided.

According to the electron beam apparatus of the thirteenth aspect of the present invention, if a defective electron beam column for detecting the rotation center of the disk for producing a master is generated, a spare disk for detecting the rotation center of the disk for producing the master is detected. An electron beam column can be used.

According to a fourteenth aspect of the present invention, there is provided an electron beam apparatus according to the ninth, tenth, eleventh, twelfth, or thirteenth aspect, wherein the matching means is a master disc held by a disc manufacturing disc holding means. Including the disk holding means for producing the master disk or the moving means for moving the electron beam column group for information recording so that the rotation center of the production disk coincides with the rotational symmetry center of the plurality of electron beam column for information recording. It is that it is constituted.

In the present invention, according to the electron beam apparatus of the fourteenth invention, the same operation as that of the ninth, tenth, eleventh, twelfth or thirteenth invention can be obtained, and with a simple configuration. In addition, it is possible to match the master disk and the electron beam column group.

According to a fifteenth aspect of the present invention, in the electron beam apparatus according to the ninth, tenth, eleventh, twelfth or thirteenth aspect, the matching means is such that the master is held by a master manufacturing disk holding means. In order to perform the same electron beam irradiation as when the center of rotation of the manufacturing disk and the center of rotation of the electron beam column for information recording coincide with each other, a plurality of electron beam columns for information recording are used. And a correcting means for correcting the deflection signal supplied to the deflector.

According to the fifteenth aspect of the present invention, according to the electron beam apparatus of the fifteenth aspect, the same operation as that of the ninth, tenth, eleventh, twelfth or thirteenth aspect can be obtained, and with a simple structure. In addition, it is possible to match the master disk and the electron beam column group.

[0042]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS.
A first embodiment and a second embodiment of the present invention will be described.

First Embodiment FIGS. 1 to 10 FIG. 1 is a conceptual diagram of a first embodiment of the present invention. In FIG.
Reference numeral 1 denotes a vacuum chamber, and reference numeral 2 denotes a master disk for manufacturing a master disk required for manufacturing an optical disk. The master disk 2 is formed, for example, by coating an electron beam resist on a glass substrate. .

Reference numeral 3 denotes a master holding disk holding means for holding and rotating the master holding disk 2 horizontally, 4 denotes a stage for rotating and moving the master holding disk 3, and 5 denotes a stage 4. This is a stage control unit for controlling the rotation and movement of the stage.

Incidentally, the original disc producing disk holding means 3 may be provided with a mechanism for rotating the original disc producing disc 2, and the stage 4 may be constituted so as to move only the original disc producing disc holding means 3. .

Reference numeral 6 denotes a plurality of information recording electron beam columns for recording information necessary for forming pits on the master disc 2, and the center of rotation of the master disc 2. Beam column group in which a plurality of master disk producing disk rotation center detecting electron beam columns are provided.

Numeral 7 denotes an electron beam column for recording information and an electron beam column for detecting the rotation center of the disk, which constitute the electron beam column group 6, and a disk 2 for producing the original disk.
Is an electron beam irradiation control unit that controls the electron beam irradiation on.

Reference numeral 8 denotes a defective electron beam column based on the amount of reflected electrons detected via the reflected electron detector provided in the electron beam column for information recording and the electron beam column for detecting the center of rotation of the disk for producing a master. This is a defective electron beam lens barrel detection unit to be detected.

Reference numeral 9 denotes a master disk manufacturing disk rotation for detecting the center of rotation of the master disk from a backscattered electron detection signal obtained through a reflected electron detector provided in the electron beam column for detecting the center of rotation of the master disk. It is a center detection unit.

A system controller 10 performs overall control of the apparatus, such as control of the stage control unit 5 and the electron beam irradiation control unit 7.

FIG. 2 is a schematic plan view of the disk holding means 3 for producing a master. In FIG. 2, reference numeral 12 denotes a master mounting disk mounting surface, 13 denotes a master mounting disk mounting position, and 14 denotes a rotation center of the master manufacturing disk mounting surface 12, that is, a rotation center of the master manufacturing disk 2. Indicates the rotation direction of the master disc manufacturing means 3, that is, the rotation direction of the master disc 2.

Reference numerals 15-1 to 15-4 rotate on the outer periphery of the master mounting disk mounting portion 13 on the master mounting disk mounting surface 12 at an interval of 90 ° with respect to the rotation center 14 of the master manufacturing disk 2. These marks are symmetrically formed marks for detecting the center of rotation of a disk for producing a master having the same shape.

FIG. 3 is a schematic sectional view taken along the line BB of FIG.
Reference numerals 5-1 to 15-4 denote a convex master having a constant height, a planar shape of an isosceles triangle, and a height direction of the isosceles triangle mounted on the master mounting disk mounting surface 12. It is formed so as to coincide with the radial direction of the use disk 2.

FIG. 4 is a schematic diagram showing a plan configuration of the electron beam column group 6. As shown in FIG. In FIG. 4, reference numeral 17 denotes an electron beam lens barrel-arranged disk, and reference numeral 18 denotes a center of the electron beam lens barrel group 6 in which the center of rotation 14 of the master disc 2 is to be matched.

Reference numerals 19-1 to 19-4 denote information recording electron beam column arrangement blocks in which the information recording electron beam column is disposed, and these information recording electron beam column arrangement blocks 19-1. Reference numerals 19 to 4 denote portions corresponding to the electron beam irradiation surface of the master disc 2, which are set to be rotationally symmetric about the center 18 of the electron beam column group 6 as the rotational symmetry center.

Reference numerals 20-1 to 20-4 denote an electron beam column arrangement block for detecting the center of rotation of the disk for producing the master in which the electron beam column for detecting the center of rotation of the disk for producing the master is arranged. Beam column arrangement block 20-1 to 20-4 for detecting disk rotation center
Are also set to be rotationally symmetric about the center 18 of the electron beam column group 6 as the rotational symmetry center.

Reference numerals 21-1 to 24-1 denote an electron beam column for information recording arranged in the information beam electron beam column arrangement block 19-1, and 25-1 denotes an electron for detecting the center of rotation of a master disk. This is an electron beam column for detecting the center of rotation of the disk for producing the master arranged in the beam column arrangement block 20-1.

Reference numerals 21-2 to 24-2 denote an electron beam column for information recording arranged in the information beam electron beam column arrangement block 19-2, and 25-2 denotes an electron for detecting the center of rotation of the disk for producing the master. This is an electron beam lens barrel for detecting the center of rotation of the disk for producing a master arranged in the beam lens barrel arrangement block 20-2.

Reference numerals 21-3 to 24-3 denote an information recording electron beam column arranged in the information recording electron beam column arrangement block 19-3, and 25-3 denotes an electron for detecting the center of rotation of a master disk. This is an electron beam column for detecting the center of rotation of the disk for producing a master arranged in the beam column arrangement block 20-3.

Reference numerals 21-4 to 24-4 denote an information recording electron beam column arranged in the information recording electron beam column arrangement block 19-4, and 25-4 denotes an electron for detecting the center of rotation of a master disk. This is an electron beam column for detecting the center of rotation of the disk for producing the master arranged in the beam column arrangement block 20-4.

The information recording electron beam column 21-1
21-4 are arranged so as to be able to share the electron beam irradiation of the same track group, and are rotationally symmetric with a 90 ° interval about the center 18 of the electron beam column group 6 as the rotational symmetry center.

The information recording electron beam column 22-1
22-4 are arranged so as to be able to share the electron beam irradiation of the same track group, and are rotationally symmetric with a 90 ° interval about the center 18 of the electron beam column group 6 as the rotational symmetry center.

The information recording electron beam column 23-1
23 to 4 are arranged so as to be able to share the electron beam irradiation of the same track group, and to be rotationally symmetric with a 90 ° interval about the center 18 of the electron beam column group 6 as the rotational symmetry center.

The information recording electron beam column 24-1
24-4 are arranged so as to be able to share the electron beam irradiation of the same track group, and to be rotationally symmetric with a 90 ° interval about the center 18 of the electron beam column group 6 as the rotational symmetry center.

The electron beam lens barrels 25-1 to 25-4 for detecting the center of rotation of the disk for producing the master disk correspond to the marks 15-1 to 15-4 for detecting the center of rotation of the disk for producing the master disk. The cylinders 6 are rotationally symmetrically arranged at 90 ° intervals about the center 18 of the cylinder group 6 as the rotational symmetry center.

That is, in the first embodiment of the present invention,
Four electron beam lens barrels for information recording at four different radial distances from the rotation center 14 of the master disk 2 held on the disk holder 17 on the disk 17 21-1 to 21-4, 22-1 to 2
2-4, 23-1 to 23-4, and 241-1 to 24-4 are arranged to be rotationally symmetric.

For example, as shown in FIG. 5, the electron beam barrels 21-1 to 21-4, 22-1 to 22-4 for information recording are provided.
22-4, 23-1 to 23-4, 241-1 to 24-4, and a spare information recording electron beam column 26-1.
~ 26-4, 27-1 ~ 27-4, 28-1 ~ 28-
4, 29-1 to 29-4 may be provided.

For example, as shown in FIG. 6, an electron beam lens barrel 25-1 for detecting the center of rotation of a disk for producing a master.
25-4, the electron beam barrels 30-1 to 30-4 for detecting the center of rotation of the disk for preparing the original master may be arranged.

The number of electron beam columns for detecting the center of rotation of the disk for producing the master disk is sufficient if one does not consider the working efficiency.

Although not shown, a spare electron beam barrel, such as spare electron beam barrels 26-1 to 26-4 and 27-1 to 27- shown in FIG.
4, 28-1 to 28-4, 29-1 to 29-4, and, for example, the electron beam lens barrels 30-1 to 30-4 for detecting the center of rotation of a spare master disk shown in FIG. It may be provided.

FIG. 7 shows an electron beam column 21-1 for recording information.
FIG. 14 is a conceptual diagram of another electron beam column 21-for recording information.
2-21-4, 22-1 to 22-4, 23-1 to 23-
4, 24-1 to 24-4 and the electron beam barrels 25-1 to 25-4 for detecting the rotation center of the master disc are also of the same structure.

Incidentally, a spare information recording electron beam column 2
6-1 to 26-4, 27-1 to 27-4, 28-1 to 2
8-4, 29-1 to 29-4, and an electron beam column 30-1 to 30-4 for detecting the center of rotation of a spare master disc
Are provided with the same structure.

In FIG. 7, 32 is an electron source, 33 is a gate electrode for extracting electrons for forming an electron beam from the electron source 32, and 34 is an electron beam 35 by accelerating the electrons extracted from the electron source 33. It is an anode electrode.

An electron beam diameter control lens 36 controls the diameter of the electron beam 35 to control the current amount of the electron beam applied to the master disc 2 in combination with an electron beam diameter limiting aperture, which will be described later. A blanker controls irradiation and non-irradiation of the beam 35 to the master disc 2, a blanking electrode 38, and an aperture plate 39.

Reference numeral 40 denotes an electron beam diameter limiting aperture for limiting the diameter of the electron beam 35, and reference numeral 41 denotes a converging lens for converging the electron beam 35 on the electron beam resist surface of the master disc 2.

Reference numeral 42 denotes a deflector for deflecting the electron beam 35 to control the irradiation position on the master disc 2, and 43 denotes a deflector for irradiating the electron beam 35 onto the master disc 2. Is a backscattered electron detector for detecting backscattered electrons.

In the first embodiment of the present invention having the above-described structure, before performing the electron beam irradiation for recording the information necessary for forming the pits on the master disc 2, the disc holding means for forming the master disc is used. 3, the rotation center 14 of the master disc 2 mounted on the master mounting disk mounting portion 13 of the master manufacturing disk mounting surface 12 is detected, and the rotation center 14 of the master manufacturing disc 2 and the electron beam column group 6 are detected. An alignment with the center 18 can be made.

When the center of rotation 14 of the master disc 2 is to be detected, the electron beam column for detecting the center of rotation of the master disc is rotated while the disc holding means 3 is rotated by 1/4. The electron beam is simultaneously applied to the master disk manufacturing disk mounting surface 12 of the master disk manufacturing disk holding means 3 using 25-1 to 25-4.

In this way, in the electron beam barrels 25-1 to 25-4 for detecting the center of rotation of the disk for producing the master, the marks 15 for detecting the center of rotation of the disk for producing the master are respectively received via the reflected electron detectors. Backscattered electron detection signals S1 to S4 obtained by detecting backscattered electrons from -1 to 15-4
Can be obtained.

In this case, if the center of rotation 14 of the master disc 2 and the center 18 of the electron beam column group 6 coincide with each other, the reflected electron detection signal S
As shown in FIG. 8, 1 to S4 are H level widths T1 to T4.
Are the same.

On the other hand, for example, as shown in FIG. 9, when the rotation center 14 of the master disc 2 is displaced in the direction of arrow C with respect to the center 18 of the electron beam column group 6. FIG. 1 shows the reflected electron detection signals S1 to S4.
As shown in FIG. 0, the H level widths T1 to T4 are defined as T1 <T2
<T3> A signal to be T4.

Therefore, in this case, the disc center-of-rotation detecting unit 9 determines the rotation center 14 of the disc 2 from the widths T1 to T4 of the backscattered electron detection signals S1 to S4.
Is calculated and transferred to the system controller 10.

Then, the system controller 10 sets the H level of the backscattered electron detection signals S1 to S4 based on the calculated value of the position of the rotation center 14 of the master disc 2 transferred from the master disc rotation center detector 9. Width T1-T
The stage is moved so that the original disc producing disk holding means 3 is moved so that the position 4 will be the same, that is, the center of rotation 14 of the original disc producing disc 2 coincides with the center 18 of the electron beam column group. The control unit 5 is controlled, and the stage control unit 5 moves the stage 4 so that the rotation center 14 of the master disc 2 and the center 18 of the electron beam column group coincide.

If the center of rotation 14 of the master disc 2 and the center 18 of the electron beam column group 6 coincide from the beginning, or the center of rotation 14 of the master disc 2 and the electron beam column After the center 18 of the group 6 is made to coincide with the center 18, the electron beam irradiation for recording information necessary for forming pits on the master disc 2 is performed.

Electron beam irradiation for recording information necessary for forming pits on the master disc 2 is performed as follows.
Electron beam column for information recording 21-1 to 21-4, 22-
1-22-4, 23-1-23-4, 241-1-24-
4 are used at the same time to share the electron beam irradiation location of the master disc 2 and are performed in parallel.

Here, when a defective information recording electron beam column occurs, the defective electron beam column detecting section 8 detects the defective information recording electron beam column and outputs the defective information recording electron beam column. The electron beam column is the system controller 1
0 will be notified.

In this case, the system controller 10
The stage control unit 5 and the electron beam irradiation control so as to irradiate with an electron beam using another information recording electron beam column that is rotationally symmetric with the electron beam irradiation position shared by the defective information recording electron beam column. The unit 7 will be controlled.

For example, the system controller 10
When the electron beam column 22-1 for information recording becomes defective, the electron beam column 22-1 for information recording is irradiated with the electron beam using the electron beam column 22-2 for information recording, for example. Is controlled so as to irradiate an electron beam to a portion sharing the power.

As described above, according to the first embodiment of the present invention, the electron beam columns 21-1 to 21-4, 2-4
2-1 to 22-4, 23-1 to 23-4, 24-1 to 2
4-4 can be used at the same time to irradiate the electron beam irradiating portions of the master disc 2 and irradiate them in parallel, so that the throughput can be improved.

According to the first embodiment of the present invention, the center of rotation of the master disc 2 is detected and the stage 4 is moved before the master disc 2 is irradiated with the electron beam. Since the center of rotation 14 of the master disc 2 can be aligned with the center 18 of the electron beam column group 6, information necessary for forming pits on the master disc 2 can be recorded with high accuracy. .
Note that, instead of moving the disk holding means 3 for producing a master, the electron beam barrel group 6 may be moved.

The rotation center 1 of the master disc 2
When the center 4 of the electron beam column group 6 does not coincide with the center 18 of the electron beam column group 6, it is the same as the case where the center of rotation 14 of the master disk 2 and the center 18 of the electron beam column group 6 coincide. The information recording electron beam column 21-1 to 21-4, 22-1 to 22 so that the electron beam irradiation can be performed.
-4, 23-1 to 23-4, correction means for correcting the deflection signal supplied to the deflectors in 241-1 to 24-4, the rotation center 14 of the master disc 2 and the electron beam mirror are provided. The alignment with the center 18 of the cylinder group 6 may be performed.

Further, according to the first embodiment of the present invention, the mark 15 for detecting the center of rotation of the disk for producing the master is provided on the mounting surface 12 for the disk for fabricating the master.
Since -1 to 15-4 are provided, and the electron beam barrels 25-1 to 25-4 for detecting the rotation center of the master disk are provided, the rotation center 14 of the master disk 2 is simple. And can be detected with high accuracy.

Further, according to the first embodiment of the present invention, since the defective electron beam column detecting section 8 is provided, the defective electron beam column for defective information recording and the defective disk center for detecting the master disk manufacturing disk rotational center are detected. The electron beam column can be automatically detected.

Then, the electron beam lens barrel arrangement disk 17 is
Four pieces of information are recorded at four different radial distances from the center of rotation 14 of the master disc 2 mounted on the master disc mounting portion 13 of the master disc mounting surface 12 of the master disc holding means 3. Electron beam column 2
1-1 to 21-4, 22-1 to 22-4, 23-1 to 2
3-4 and 24-1 to 24-4 are arranged rotationally symmetrically, and four electron beam barrels 25-1, 25-2, 25-3, and 25-4 for detecting the center of rotation of the disk for producing a master are arranged. It is said to be arranged rotationally symmetrically.

Therefore, when a defective information recording electron beam column is detected, the electron beam irradiation at the electron beam irradiation position shared by the defective information recording electron beam column is performed in another rotationally symmetric information recording system. Since it can be performed using an electron beam column, even when a defective information recording electron beam column occurs, a decrease in work efficiency can be minimized.

When the defective electron beam column for detecting the center of rotation of the disk for producing a defective master is detected, the electron beam irradiation at the electron beam irradiation position shared by the electron beam column for detecting the center of rotation of the defective disk for producing the original master is performed. Can be performed by using another information recording electron beam column that is rotationally symmetric, so that even if a defective information recording electron beam column occurs, the reduction in work efficiency is minimized. Can be.

According to the first embodiment of the present invention, the electron beam barrels 21-1 to 21-4, 22-1 for information recording are provided.
~ 22-4, 23-1 ~ 23-4, 241-1 ~ 24-4
In addition, the electron beam lens barrels 25-1 to 25-4 for detecting the rotation center of the master disc are provided with a backscattered electron detector for detecting the backscattered electrons from the master disc 2, and the defective electrons are detected from the amount of the backscattered electrons detected. Since the defective electron beam column detecting unit 8 for detecting the beam column is provided, a defective electron beam column can be detected with a simple configuration.

Incidentally, the electron beam column 21-1 for information recording.
21-4, 22-1 to 22-4, 23-1 to 23-
4, 24-1 to 24-4 and the electron beam barrels 25-1 to 25-4 for detecting the center of rotation of the master disk for producing a master are provided with secondary electron detectors for detecting secondary electrons from the disk 2 for manufacturing the master. In addition, a defective electron beam column detection unit that detects a defective electron beam column from the amount of detected secondary electrons is provided,
It may be configured to detect a defective electron beam column.

Further, for example, a leaking electron beam current detector for detecting an electron beam current leaking to the gate electrode 33, the anode electrode 34, the electron beam diameter limiting aperture 40 and the like provided in the electron beam column is provided. By detecting the amount of leakage of the electron beam current, a defective electron beam column may be detected.

Second Embodiment FIG. 11 FIG. 11 is a view showing a main part of a second embodiment of the present invention.
It is a schematic diagram which shows the planar structure of the electron beam lens-barrel group 45 with which 2nd Embodiment of this invention is provided. In FIG. 11,
Parts corresponding to those in FIG. 4 are denoted by the same reference numerals, and redundant description is omitted.

The second embodiment of the present invention is an electron beam apparatus suitable for rotating the master disc 2 at a constant angular velocity, and is provided with an electron beam column group 45 shown in FIG. Is generally similar to the first embodiment of the present invention shown in FIG.

In FIG. 11, reference numerals 46-1 to 55-1 denote an information recording electron beam column disposed in the information recording electron beam column arrangement block 19-1, and 46-2 to 55-2 denote information recording. An electron beam column for information recording arranged in the electron beam column arrangement block 19-2, and 46-3 to 55-3 are electron beams for information recording arranged in the electron beam column arrangement block 19-3 for information recording. The lens barrels 46-4 to 55-4 are information recording electron beam barrels arranged in the information recording electron beam barrel arrangement block 19-4.

The electron beam column 46-1 for recording information is
~ 55-1, 46-2 ~ 55-2, 46-3 ~ 55-
3, 46-4 to 55-4 are configured similarly to the information recording electron beam column included in the first embodiment of the present invention.

Here, the information recording electron beam column 46-
P (where P = 1, 2, 3, 4) is used to irradiate the electron beam to the one pit formation portion of the master disc 2 by one piece.
P and 48-P constitute an information recording electron beam column subgroup for performing electron beam irradiation on the one pit forming portion of the master disc 2 by these two pieces.

The information recording electron beam column 49-
P, 50-P, and 51-P constitute an information recording electron beam column sub-group for irradiating an electron beam to a portion where one pit is formed on the master disc 2 by these three pieces.

The information recording electron beam column 52-
P, 53-P, 54-P, and 55-P constitute an information recording electron beam lens barrel subgroup for irradiating an electron beam to a portion where one pit is formed on the master disc 2 using these four pieces.

The information recording electron beam column 46-1
46 to 46-4 are rotated at 90 ° intervals about the center 18 of the electron beam column group 45 as the rotational symmetry center so that the electron beam irradiation to the same track group of the master disk 2 can be performed by the electron beam irradiation. They are arranged symmetrically.

The information recording electron beam column 47-
An electron beam lens barrel subgroup for information recording consisting of 1, 48-1;
An information recording electron beam column subgroup consisting of information recording electron beam columns 47-2 and 48-2, and an information recording electron beam column subunit consisting of information recording electron beam columns 47-3 and 48-3. Group, and electron beam column 47-4 for recording information,
The information-recording electron beam column subgroup 48-4 includes the center 18 of the electron beam column group 45 so that the electron beam irradiation of the same track group of the master disc 2 can be shared by the electron beam irradiation. 90 as the center of rotational symmetry
It is arranged rotationally symmetrically with an interval of °.

The information recording electron beam column 49-
An information recording electron beam column sub-group consisting of 1, 50-1, 51-1 and an information recording electron beam column 49-2, 50-
2, 51-2, an electron beam lens barrel subgroup for information recording,
Information recording electron beam column 49-3, 50-3, 51-
The information recording electron beam lens barrel sub-group consisting of No. 3 and the information recording electron beam lens barrel sub-group consisting of the information recording electron beam lens barrels 49-4, 50-4, 51-4 are discs for producing master disks. The center 18 of the electron beam lens barrel group 45 is rotationally symmetric with respect to the center 18 of the electron beam column group 45 so as to be able to share the electron beam irradiation to the electron beam irradiation locations of the two same track groups.

The information recording electron beam column 52-
1, 53-1, 54-1 and 55-1, an electron beam lens barrel subgroup for information recording, and an electron beam lens barrel 52-
An information recording electron beam lens barrel subgroup consisting of 2, 53-2, 54-2, and 55-2;
The information recording electron beam lens barrel sub-group consisting of 3, 53-3, 54-3 and 55-3 and the information recording electron beam lens barrels 52-4, 53-4, 54-4 and 55-4 The information-recording electron beam column subgroup has the center 18 of the electron beam column group 45 as a rotationally symmetric center so that the electron beam irradiation of the same track group of the master disk 2 can be shared by the electron beam irradiation. They are arranged rotationally symmetrically at 90 ° intervals.

That is, in the second embodiment of the present invention, one pit forming portion of the master disc 2 is irradiated with an electron beam by one or more electron beam column for information recording. The information recording electron beam column is arranged so that the number of the electron recording column for irradiating one pit formation portion increases from the inner peripheral portion to the outer peripheral portion of the master disc manufacturing disk 2. It is.

According to the second embodiment of the present invention configured as described above, the electron beam barrels 46-1 to 55 for information recording are provided.
-1, 46-2 to 55-2, 46-3 to 55-3, 46
-4 to 55-4 at the same time, a master disc 2
Since the electron beam irradiation to the electron beam irradiation point can be shared and performed in parallel, the throughput can be improved.

When the master disc 2 is rotated at a constant angular velocity, the master disc 2 is
Although the outer peripheral portion has a higher linear velocity than the inner peripheral portion, according to the second embodiment of the present invention, an electron beam column for information recording that irradiates a portion where one pit is formed on the master disc 2 is formed. The information recording electron beam column is arranged so that the number of the laser beams increases from the inner periphery to the outer periphery. Therefore, even when the master disc 2 is rotated at a constant angular velocity, the radius of the master disc 2 is increased. The amount of electron beam irradiation per unit area at each point in the direction can be made as uniform as possible, and as a result, information necessary for forming pits on the master disc 2 can be recorded with high accuracy.

The electron beam column for information recording 46-1
~ 55-1, 46-2 ~ 55-2, 46-3 ~ 55-
3, by controlling an electron beam diameter control lens provided inside 46-4 to 55-4 to control a current amount of an electron beam to be applied to the master disc 2, thereby obtaining a radius of the master disc 2. The electron beam irradiation amount per unit area at each point in the direction may be configured to be as uniform as possible.

The information recording electron beam column 46-1
~ 55-1, 46-2 ~ 55-2, 46-3 ~ 55-
3, 46-4 to 55-4, by controlling a blanking electrode and controlling the number of times of irradiation of the electron beam with respect to one pit formation portion, at each point in the radial direction of the master disc 2 The electron beam irradiation amount per unit area may be configured to be as uniform as possible.

Further, according to the second embodiment of the present invention, similarly to the first embodiment of the present invention, before the electron beam irradiation on the master disc 2 is performed, the rotation center 14 of the master disc 2 is rotated. Can be detected, and the center of rotation 14 of the master disc 2 and the center 18 of the electron beam column group 6 can be aligned. From this point, it is necessary to form pits on the master disc 2. Information can be recorded with high accuracy.

Further, according to the second embodiment of the present invention, when a defective information recording electron beam column is detected, the defective information recording electron beam column is replaced with the information recording electron beam column subgroup. In the case of an information recording electron beam column that does not constitute the above, the electron beam irradiation to the electron beam irradiation position shared by the defective information recording electron beam column,
The electron beam column for information recording can be performed by using another electron beam column for information recording which is not symmetrical with the rotation and does not constitute a small group of electron beam columns for information recording. In the case of the electron beam column for information recording constituting the cylinder subgroup, since it can be performed using another electron beam column subgroup for information recording which is rotationally symmetric, the electron beam column for defective information recording can be performed. Even in the case where a beam barrel is generated, it is possible to minimize a decrease in work efficiency.

Note that in the second embodiment of the present invention,
A spare information recording electron beam column is provided corresponding to the information recording electron beam column which does not constitute the information recording electron beam column subgroup, and a spare is provided corresponding to the information recording electron beam column subgroup. The information recording electron beam lens barrel subgroup may be provided, or a spare master disk manufacturing disk rotation center detection electron beam lens barrel may be provided.

[0119]

As described above, according to the electron beam apparatus of the first aspect of the present invention, the irradiation of the electron beam to the electron beam irradiation position of the master disk is performed by a plurality of information recording devices having rotational symmetry. Since the electron beam can be shared by the electron beam column and can be performed in parallel, the throughput can be improved, and when a defective information recording electron beam column is detected, the defective information recording electron beam mirror is detected. Since the electron beam irradiation to the electron beam irradiation portion shared by the tube can be performed using another information recording electron beam column which is rotationally symmetric, when a defective information recording electron beam column occurs, In addition, it is possible to minimize a decrease in work efficiency.

In the present invention, according to the electron beam apparatus of the second invention, like the electron beam apparatus of the first invention,
Irradiation of the electron beam to the electron beam irradiation portion of the master disk can be shared by a plurality of rotationally symmetric electron beam columns for information recording and can be performed in parallel, so that throughput can be improved and When a defective information recording electron beam column is detected, the electron beam irradiation to the electron beam irradiation position shared by the defective information recording electron beam column is performed by using a spare information recording electron beam column. Therefore, even when a defective information-recording electron beam column occurs, a decrease in work efficiency can be minimized.

In the present invention, according to the electron beam apparatus of the third invention, the same effects as those of the electron beam apparatus of the first or second invention can be obtained, and the defect information recording electron beam mirror can be obtained. The tube detecting means is configured to detect a defective information recording electron beam column based on the amount of reflected electrons or secondary electrons detected from the master disc, so that the defect information can be detected with a simple configuration. A special effect that the recording electron beam column can be detected can be obtained.

Further, according to the present invention, according to the electron beam apparatus of the fourth invention, the same effects as those of the electron beam apparatus of the first or second invention can be obtained, and the electron beam mirror for recording defective information. The tube detecting means is configured to detect a defective information recording electron beam column by detecting the amount of leakage of the electron beam current, so that the defective information recording electron beam mirror has a simple configuration. A special effect that a cylinder can be detected can be obtained.

In the present invention, according to the electron beam apparatus of the fifth invention, the same effects as those of the electron beam apparatus of the first, second, third or fourth invention can be obtained, and the master disk can be obtained. Since it is provided with an electron beam irradiation amount equalizing means for equalizing the electron beam irradiation amount per unit area at each point in the radial direction of the master disc manufacturing disk when the manufacturing disk is rotated at a constant angular velocity as much as possible. Even when the master disc is rotated at a constant angular velocity, a special effect that information required for forming pits on the master disc can be recorded with high accuracy can be obtained.

In the present invention, according to the electron beam apparatus of the sixth invention, the same effect as that of the electron beam apparatus of the fifth invention can be obtained, and the electron beam irradiation amount equalizing means can be realized by the master disc. One or more pit-forming portions of the disc for production are irradiated with an electron beam by one or more electron beam column for information recording. Since the configuration includes the arrangement of the electron beam column for information recording so as to increase from the inner circumference to the outer circumference of the master disk, the electron beam irradiation amount equalizing means should be simple. It is possible to obtain a special effect that it can be performed.

In the present invention, according to the electron beam apparatus of the seventh invention, the same effects as those of the electron beam apparatus of the fifth invention can be obtained, and the electron beam irradiation amount equalizing means can be provided on the master disk. By controlling the amount of current of the electron beam applied to the production disk, each radial direction of the production disk for master when the production disk held by the production disk holding means is rotated at a constant angular velocity. Since the configuration is such that the electron beam irradiation amount per unit area at the point is equalized as much as possible, it is possible to obtain a special effect that the electron beam irradiation amount equalizing means can be simplified. .

In the present invention, according to the electron beam apparatus of the eighth invention, the same effects as those of the electron beam apparatus of the fifth invention can be obtained, and the electron beam irradiation amount equalizing means can be provided by the master disc. By controlling the number of times of electron beam irradiation to irradiate the one pit forming portion of the production disk, the master production disk held by the master production disk holding means is rotated at a constant angular velocity. Since the configuration is such that the electron beam irradiation amount per unit area at each point in the radial direction is made as equal as possible, there is a special effect that the electron beam irradiation amount equalizing means can be simplified. Obtainable.

In the present invention, according to the ninth aspect of the electron beam apparatus, the first, second, third, fourth, fifth, sixth,
An effect similar to that of the seventh or eighth invention can be obtained, and alignment means is provided for aligning the rotational center of the master disc and the rotational symmetry centers of the plurality of electron beam barrels for information recording. Therefore, it is possible to obtain a special effect that information necessary for forming pits on the master disc can be recorded with high accuracy.

In the present invention, according to the electron beam apparatus of the tenth aspect of the invention, the same effects as in the ninth aspect can be obtained, and the rotation center detecting means for the disk for producing the master can be formed by the disk for producing the master. An electron beam is applied to the plurality of marks for detecting the rotation center of the master disk and the plurality of marks for detecting the rotation center of the disk for forming the master disk formed on the surface of the holding means on which the disk for manufacturing the master disk is mounted. And the electron beam column for detecting the center of rotation of the master disk having means for detecting the original disk, so that the rotation center position of the master disk can be detected with a simple configuration and with high accuracy. It is possible to obtain a special effect that it can be performed.

According to the eleventh aspect of the present invention, according to the electron beam apparatus of the eleventh aspect, the same effect as that of the ninth aspect can be obtained, and the rotation center detecting means for the master production disk can be provided by the original production disc. A structure including an electron beam barrel for detecting the center of rotation of a master disk for producing a master having means for irradiating a plurality of marks for detecting the center of rotation of the disk for forming a master with an electron beam to detect reflected electrons or secondary electrons Therefore, it is possible to obtain a special effect that the rotation center position of the master disc can be detected with a simple configuration and with high accuracy.

According to the twelfth aspect of the present invention, the same effects as those of the tenth or eleventh aspects can be obtained, and the electron beam mirror for detecting the center of rotation of the disk for producing the master. As the cylinder, the same number of electron beam barrels for disc rotation center detection for master disc production as the number of marks for disc rotation center detection for master disc production are rotationally symmetric about the rotational symmetry center of the electron beam barrels for multiple information recording. Since it is arranged, the detection signals of a plurality of marks for detecting the rotation center of the master disc can be obtained at the same time, and the rotation center of the master disc can be efficiently detected.

According to the thirteenth aspect of the present invention, the same effects as those of the tenth, eleventh or twelfth aspect can be obtained.
Since the spare electron beam column for detecting the center of rotation of the disk for producing the original master is to be arranged corresponding to the electron beam column for detecting the center of rotation of the disk for producing the original master, the electron beam mirror for detecting the center of rotation of the disk for producing the defective master is defective. When a cylinder occurs, a spare electron beam barrel for detecting the center of rotation of the disk for producing the original master can be used, and from this point, a remarkable effect that the throughput can be improved can be obtained. it can.

According to the electron beam apparatus of the fourteenth aspect of the present invention, the same effect as that of the ninth, tenth, eleventh, twelfth or thirteenth aspect can be obtained, and the matching means can be obtained. Is a movement for moving the master disk manufacturing means or the information recording electron beam column group such that the rotation center of the master disk and the rotational symmetry center of the plurality of information recording electron beam barrels coincide with each other. Since it is configured to include the means, it is possible to obtain a special effect that alignment between the master disk and the electron beam column group can be achieved with a simple configuration.

According to the fifteenth aspect of the present invention, the same effects as those of the ninth, tenth, eleventh, twelfth, or thirteenth aspects can be obtained, and the matching means can be obtained. In order to perform the same electron beam irradiation as when the center of rotation of the master disc and the center of rotation of the electron beam column for information recording coincide with each other, a plurality of information recording electron beams are used. It is configured to include a correction unit that corrects the deflection signal supplied to the deflector in the lens barrel, so that it is possible to match the master disk and the electron beam lens barrel group with a simple configuration. The effect of can be obtained.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram of a first embodiment of the present invention.

FIG. 2 is a schematic plan view of a disc holding means for producing a master provided in the first embodiment of the present invention.

FIG. 3 is a schematic sectional view taken along the line BB of FIG. 2;

FIG. 4 is a schematic diagram illustrating a planar configuration of an electron beam column group provided in the first embodiment of the present invention.

FIG. 5 is a schematic view showing an example in which a spare information recording electron beam column is arranged on an electron beam column arrangement disk provided in the first embodiment of the present invention.

FIG. 6 is a schematic diagram showing an example in which an electron beam lens barrel for detecting a center of rotation of a disk for preparing a master disc is arranged on an electron beam lens barrel arrangement disk provided in the first embodiment of the present invention.

FIG. 7 is a conceptual diagram of an information recording electron beam column included in the first embodiment of the present invention.

FIG. 8 is a timing chart showing an example of a backscattered electron detection signal obtained via a backscattered electron detector of the electron beam column for detecting the center of rotation of the disk for producing a master provided in the first embodiment of the present invention.

FIG. 9 is a schematic diagram for explaining a method for detecting the center of rotation of the master disc in the first embodiment of the present invention.

FIG. 10 is a timing chart showing another example of a backscattered electron detection signal obtained via the backscattered electron detector of the electron beam column for detecting the center of rotation of the disk for producing the master provided in the first embodiment of the present invention.

FIG. 11 is a schematic diagram illustrating a main part of a second embodiment of the present invention (a schematic diagram illustrating a planar configuration of an electron beam column group included in the second embodiment of the present invention).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Master disk manufacturing disk 3 Master disk manufacturing disk holding means 4 Stage 5 Stage control part 6 Electron beam column group 7 Electron beam irradiation control part 8 Defective electron beam column detection part 9 Master disk manufacturing disk rotation center detection part 10 System controller

Claims (15)

[Claims] 1. A master disc manufacturing means for holding and rotating a master manufacturing disc, and different radial distances from a rotation center of the master manufacturing disc held by the master manufacturing disc holding means. A group of electron beam columns for information recording, in which a plurality of electron beam columns for information recording are arranged rotationally symmetrically, and an electron beam column detecting means for defective information recording for detecting a defective electron beam column for information recording An electron beam device comprising: 2. An electron beam apparatus according to claim 1, further comprising a spare electron beam column for information recording corresponding to each of said plurality of electron beam columns for information recording. 3. The defect information recording electron beam column detecting means detects defect information based on a detection amount of reflected electrons or secondary electrons from the master disc for disc production held by the disc production disc holding means. 3. The electron beam apparatus according to claim 1, wherein the apparatus is configured to detect a recording electron beam column. 4. The defect information recording electron beam column detecting means detects the amount of leakage of the electron beam current,
3. The electron beam apparatus according to claim 1, wherein the apparatus is configured to detect a defective information recording electron beam column. 5. An electron beam irradiation per unit area at each point in a radial direction of the master disc when the master disc is rotated at a constant angular velocity held by the master disc holding means. 5. An electron beam apparatus according to claim 1, further comprising an electron beam irradiation amount equalizing means for equalizing the amount as much as possible. 6. The master disc producing disk according to claim 1, wherein said electron beam irradiation amount equalizing means irradiates an electron beam to one pit forming portion of said master disc by one or more electron beam column for information recording. The number of electron beam electron beam columns for irradiating the one pit forming portion is increased from the inner peripheral portion to the outer peripheral portion of the master disc manufactured by the master disc holder. 6. The electron beam apparatus according to claim 5, wherein the apparatus is configured to include a beam column. 7. An electron beam irradiation amount equalizing means for controlling a current amount of an electron beam applied to the master disk for production held on the disk production means for holding a disk for producing the original disk. In order to equalize as much as possible the amount of electron beam irradiation per unit area at each point in the radial direction of the master disc when the master disc is rotated at a constant angular velocity held by the disc holding means. The electron beam device according to claim 5, wherein the electron beam device is configured. 8. An electron beam irradiation amount equalizing means controls the number of times of electron beam irradiation to irradiate one pit forming portion of the master disk to be held by the master disk manufacturing means. When the master disc is rotated at a constant angular velocity, the amount of electron beam irradiation per unit area at each point in the radial direction of the master disc is equalized as much as possible. The electron beam apparatus according to claim 5, wherein 9. A master disk manufacturing disk rotation center detecting means for detecting a rotation center of the master disk manufacturing disk held by the master disk manufacturing disk holding means, and the master disk held by the master disk manufacturing disk holding means. 5. An alignment means for aligning a center of rotation of a manufacturing disk with a center of rotation of the plurality of electron beam barrels for information recording.
The electron beam apparatus according to 5, 6, 7, or 8. 10. The master disc producing disk rotation center detecting means rotates the center of rotation of the master producing disc on the outer surface of the master producing disc mounting surface of the master producing disc holding means. A plurality of master disk manufacturing disk rotation centers of the same shape, which are formed rotationally symmetrically as a center of symmetry, and whose width along the rotation direction of the master manufacturing disk varies depending on the distance from the rotation center of the master manufacturing disk. An original disc having means for irradiating an electron beam on the mark and the plurality of original disc producing disc rotation center detecting marks to detect reflected electrons or secondary electrons from the plurality of original disc producing disc rotating center detecting marks; 10. The electron beam apparatus according to claim 9, further comprising an electron beam lens barrel for detecting a rotation center of the disc. 11. The master disc producing disk rotation center detecting means is formed on the master producing disc to be rotationally symmetric about the rotation center of the master producing disc as a rotationally symmetric center, and to rotate the master producing disc. An electron beam is applied to a plurality of marks for detecting the center of rotation of the master disc for producing the same master, the widths of which in the direction differ according to the distance from the rotation center of the disc for forming the master, and the marks for detecting the center of rotation of the disc for forming the master are irradiated. 10. The electron beam apparatus according to claim 9, further comprising: an electron beam column for detecting the center of rotation of the disk for producing a master having detection means for detecting reflected electrons or secondary electrons from the electron beam. 12. An electron beam column for detecting the center of rotation of a disk for producing a master, wherein the same number of electron beam barrels for detecting the center of rotation of the disk for producing a master as the number of marks for detecting the center of rotation of the disk for producing a master are provided. The electron beam apparatus according to claim 10 or 11, wherein the electron beam apparatus is arranged to be rotationally symmetric about a rotational symmetry center of the information recording electron beam column. 13. A spare electron beam column for detecting the center of rotation of a disk for producing a master disc is arranged corresponding to the electron beam column for detecting the center of rotation of a disc for producing a master disc. 13. The electron beam device according to 11 or 12. 14. The aligning means is arranged such that the center of rotation of the master disk manufactured by the master disk holding means coincides with the center of rotational symmetry of the plurality of electron beam barrels for information recording. 14. The electronic device according to claim 9, further comprising moving means for moving the master disc manufacturing disk holding means or the information recording electron beam column group. Beam device. 15. The alignment means, wherein the center of rotation of the disk for producing a master held by the disk holding means for producing a master and the center of rotation symmetry of the electron beam column for information recording coincide with each other. And a correcting means for correcting a deflection signal supplied to a deflector in the plurality of electron beam barrels for information recording so as to perform the same electron beam irradiation as described above. Claims 9 and 1
14. The electron beam apparatus according to 0, 11, 12 or 13.