JPH11292211A - Storage apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To dispense with assembling at a job site in each rack structural unit by providing a storage rack formed by a storage unit which is formed by a monocoque structure, includes at least an air purifier and each storage part inside of an enclosure and forms a rack structural unit. SOLUTION: A first storage unit 18 includes an enclosure 20 having a monocoque structure. The inside of the enclosure 20 is provided with three storage parts 14 arranged on the upper and lower sides. Further, the inside of the enclosure 20 is provided with an air introducing part 22 opened to the passage side below the respective storing parts 14. Further, the inside of the enclosure 20 is provided with a communicating part 23 for communicating the air introducing part 22 with the opposite side to an opening part 14a of each storing part 14. Further, the inside of the enclosure 20 is provided with a fan filter unit 16 for each storing part 14. The first storage units 18 and second units constructed similarly to the first units are arranged alternately to form a storage rack.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage device installed in a clean factory where, for example, a semiconductor manufacturing process is provided, for storing silicon wafers, liquid crystal panels, and the like in an environment with a higher degree of cleanliness than in the factory. is there.

[0002]

2. Description of the Related Art FIGS. 8A, 8B and 9 show an example of a storage device installed in a clean factory. The storage device 50 includes a storage shelf 5 having a large number of storage units 51 for storing storage items in a room that is substantially closed to the outside.
2 are provided. The storage shelves 52 are provided on both sides of the movement path of the stacker crane 53 that transfers the storage items carried in from the outside of the room to the respective storage units 51. The stacker crane 53 receives storage items carried in from outside by a conveyor 54 provided at one end of the movement path of the crane 53. Then, the stacker crane 53 transfers the received storage items to the storage unit 51 of the storage destination and stores them. Similarly, the storage items stored in the storage unit 51 of the storage source are transferred to the outside of the storage device 50 by the stacker crane 53 and the conveyor 54.

The inside of the storage device 50 is designed to have a higher degree of cleanliness than in a factory where the storage device 50 is installed. The cleanliness is represented by the number of dust particles having a size equal to or larger than a predetermined particle size contained in air per unit volume, and the smaller the number, the higher the value. The air in the storage device 50 is constantly filtered by an air cleaning device provided in the storage device 50. The air purifier removes dust brought in from the outside of the storage device 50 by the operation of the conveyor 54 or the like and dust generated from a sliding portion thereof due to the operation of the stacker crane 53, and removes air inside the storage device 50. Is maintained at or above a predetermined cleanliness level.

The storage rack 52 is formed by sequentially arranging storage units 56 each having a predetermined number of storage units 51 arranged vertically and an air purifying unit for supplying filtered air to each storage unit 51. This is because the common storage unit 56 can be used to create a storage device 50 having storage shelves having different numbers of storage units 51.

[0005] As shown in FIGS.
6 is a shelf unit 57 provided with a predetermined number of storage units 51.
A blower unit 59 accommodating a blower 58 for circulating air, a guide unit 60 for guiding air pressure-fed from the blower unit 59 to the back side of each storage unit 51 of the shelf unit 57, And a duct unit 62 provided with a filter 61 for filtering air supplied to the air conditioner. The storage unit 56 is assembled in a state where the units are sealed so that air before being filtered does not leak from the gaps between the units 57, 59, and 62.

The storage device 50 includes a stacker crane 53
A transfer chamber 64 having a wall formed by the end panel unit 63 is provided at one end of the moving path of the transfer path 64.
Contains a conveyor 54. On the other hand, the other end has a wall closed by an end panel unit 65. A closed room is formed by covering both ends of the panel units 63 and 65 and the upper part of each storage unit 56 with a ceiling panel 66. Both sides of the room parallel to the moving path are formed by the back surfaces of the storage units 56 forming the storage shelves 52. Storage shelf 52
The storage space between adjacent storage units 56 is sealed so that air containing dust in the room, which becomes a positive pressure, is prevented from being discharged into the clean factory through a gap between the two storage units 56.

The ceiling panel 66 is supported by a plurality of support members (not shown), and the support members are connected to each other by horizontal connecting members. Each storage unit 56 is fixed at a predetermined position by each strut member and horizontal connecting member.

The storage device 50 includes a storage unit 56 and a stacker crane 5 at an installation site where the storage device 50 is installed.
3. The conveyor 54, the ceiling panel 66, the end panel units 63 and 65, etc. are transported and assembled by assembling the respective components at the installation site. The storage unit 56 includes a shelf unit 57, a blower unit 59, and a duct unit 62.
It is transported to the installation site in the state of, and each unit is assembled and formed at the installation site.

[0009]

By the way, when assembling the storage unit 56 on site, the shelf unit 57, the blower unit 59, and the duct unit 62 are accurately positioned so that the seal between them can be ensured. Must be assembled. For this reason, there has been a problem that the assembling work of each storage unit 56 is not easy, and the sealing work itself takes time, so that the working time becomes longer.

In addition, the storage units 56 which are not directly connected to each other are reliably sealed between the adjacent storage units 56, and the position of each storage unit 51 in the height direction is determined by the transfer of the stacker crane 53. It had to be set up to match the height position. Therefore, the installation work of the storage unit 56 is not easy, and
Since the sealing operation itself takes time, there has been a problem that the operation time becomes longer.

Further, since the storage shelves 52 are formed by arranging storage units 56 formed separately,
Each storage unit 51 arranged horizontally in the formed storage shelf 52
Are the respective units 5 constituting the adjacent storage unit 56.
7, 59, 62 are divided by two right and left side plates. Therefore, the present invention has a problem that the total length of the storage shelf 52 including the predetermined number of storage units 56 becomes extra long by one side plate between the storage units 56, and the installation area becomes large. An object of the present invention is to solve the above-mentioned problems, and an object thereof is to provide a shelf provided with a predetermined number of storage units arranged vertically and provided with an air purifying device for supplying filtered air to each storage unit. An object of the present invention is to provide a storage device having a storage shelf formed by arranging a plurality of constituent units, which does not require on-site assembly of each shelf constituent unit, and which can be easily installed.

Another object of the present invention is to provide a storage device capable of reducing the installation area of the storage device for a predetermined number of storage units.

[0013]

In order to solve the above-mentioned problems, the invention according to claim 1 is provided with an opening formed so as to be able to store a storage item and for putting the storage item in and out of a predetermined side. Is provided, a storage section provided with a predetermined number arranged vertically in a state where the opening is directed to a predetermined side, and the air introduced from the opening side below each of the storage sections is filtered. And a plurality of shelf constituent units each including an air purifying device for supplying the storage unit from the side opposite to the opening thereof, are formed by arranging a plurality of units such that the opening of each storage unit is oriented in a predetermined direction. Storage shelves, and transfer means for transferring stored items between the outside of a room provided so that the opening of each of the storage sections is opened to a substantially sealed interior and each of the storage sections. In the storage device, the storage shelf is formed in a monocoque structure. Comprising at least the air cleaning device and the respective storage portions to the inside of the housing, which is formed by the storage unit body constituting the shelf configuration unit.

According to a second aspect of the present invention, in the first aspect of the present invention, the storage unit includes the storage unit provided inside the housing, and the storage unit is provided on an outer surface of left and right side plates of the housing. A first unit provided with a support portion for supporting one end of an object, and a depth shorter than the first unit by a depth of each storage unit, and each storage unit is provided inside the housing. The first unit and the second unit are arranged alternately, and the housings of the first units adjacent to the left and right of the second unit are arranged in an alternately arranged state. Side plate, and each of the support portions provided on each side plate is formed so as to form each of the storage units on the front side of the second unit body, the storage shelf,
It was formed by the shelf constituent units respectively formed by the first unit bodies and the second unit bodies arranged alternately.

According to a third aspect of the present invention, in the second aspect of the present invention, the storage unit is provided below each of the storage sections, and air is opened into the room on the transfer means side. An introduction section and a communication section that communicates the air introduction section to the opposite side of the opening of each storage section are provided, and the air cleaning device is provided for each of the storage sections on the side opposite to the opening. A fan filter unit that introduces air on the transfer means side through the communication section and the air introduction section, filters the introduced air, and supplies the filtered air to each storage section.

According to a fourth aspect of the present invention, in the third aspect of the present invention, the communication unit communicates with each of the storage units adjacent to each other in the state of the storage shelf. The communication holes were provided in the left and right side plates of each of the storage unit bodies.

(Operation) According to the first aspect of the present invention,
Each shelf constituent unit of the storage shelf is formed of a storage unit having a monocoque housing. Therefore, it is not necessary to assemble each shelf constituent unit.

According to the invention of claim 2, according to claim 1,
In addition to the operation of the invention described in the above, one first unit forms one shelf constituent unit, and the left and right side plates of each of the first unit bodies adjacent to both the left and right sides and the support portions provided on the left and right side plates The second unit body in which each storage unit is formed on the front side at 1
Form one shelf unit. Therefore, the width of the opening of each storage unit of the shelf constituent unit formed by the first unit is equal to the width of the opening of each storage unit of the shelf constituent unit formed by the second unit. In this case, the entire width of the second unit is smaller than the entire width of the first unit by the left and right side plates.

According to the invention of claim 3, according to claim 1,
Or, in addition to the operation of the invention described in claim 2, when the fan filter unit provided for each storage unit is operated,
The communication section and the air introduction section become negative pressure, and the air on the transfer means side in the room is introduced into the fan filter unit, filtered, and supplied to each storage section. The air supplied into each storage unit becomes a positive pressure and is discharged again from the storage unit to the transfer means side. Therefore, clean air is supplied to each of the storage units arranged vertically so as to have a substantially equal positive pressure, and stagnation hardly occurs in any one of the storage units due to the mutual influence between the upper and lower storage units.

According to the fourth aspect of the present invention, the third aspect is provided.
In addition to the effect of the invention described in the above, air before being filtered is exchanged between adjacent storage units on the storage shelf. Therefore, when the temperature of the air taken in from the transfer means side by the air purifying device of a certain shelf constituent unit is higher than the temperature of the air taken in by each of the other air purifying devices, the temperature of the air is exchanged between the shelf constituent units. Is quickly diffused into the space in the direction in which the shelf constituent units are arranged.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 1 (a),
As shown in (b), the storage device 10 includes a room 11 formed in an elongated shape and sealed from the outside. A passage 12 extending in the longitudinal direction of the room 11 is provided inside the room 11, and a stacker crane 13 is provided in the passage 12. On both sides of the passage 12, storage shelves 15 are provided, each of which has a plurality of storage units 14 for storing storage items provided in a shelf shape. The storage unit 14 provided in each storage shelf 15 is provided with its opening 14a facing the passage 12 so that the stacker crane 13 can transfer the storage items.

As shown in FIG. 3, the storage shelves 15 include a predetermined number (three in this embodiment) of storage units 14 arranged vertically and
A shelf filter unit provided with a fan filter unit 16 as an air purifier that filters air introduced from the passage 12 side below each storage unit 14 and supplies the air to each storage unit 14 from the side opposite to the opening 14a. It is formed by arranging a plurality of units 17.

The storage shelf 15 is formed by arranging a plurality of storage units as storage units. The storage unit includes a first storage unit 18 as a first unit and a second storage unit.
The second storage unit 19 as a unit body. As shown in FIG. 3, the storage shelves 15 include first storage units 18 and second storage units 19 that are alternately arranged.
And is formed by.

The first storage unit 18 is shown in FIG.
As shown in (b), a housing 2 having a monocoque structure
0 is provided. The housing 20 includes a bottom plate 20a and a top plate 20.
b, a left side plate 20c, a right side plate 20d, and a rear plate 20e, and only the front side is opened. In the present embodiment, each of the plates 20a, 20b, 20c, 20d, and 20e is formed of a metal plate and has the same thickness t.

Inside the housing 20, three storage sections 14 are provided so as to be vertically arranged. Each storage unit 14
The inner dimensions are all the same. Each storage unit 14 is provided on each inner side surface of the left side plate 20c and the right side plate 20d, and includes a pair of left and right support pieces 21 that support the lower surface of the storage object.

An air inlet 22 is provided inside the housing 20 below the storage sections 14 and opens toward the passage 12. In addition, inside the housing 20, an air introduction unit 2 is provided.
There is provided a communication part 23 for communicating the storage unit 2 with the storage part 14 on the side opposite to the opening part 14a. A pre-filter 24 for filtering dust having a relatively large particle diameter from air introduced from the passage 12 side is provided in the air introduction unit 22.

In the inside of the housing 20, the air introduced from the stacker crane 13 side through the communication part 23 and the air introduction part 22 is filtered on the opposite side of the opening part 14a for each storage part 14. A fan filter unit 16 is provided to supply each storage unit 14 with the fan filter unit 16.

The fan filter unit 16 includes a filter 25 for finally filtering dust from air to be introduced, and a motor fan 2 for forcing air to one side of the filter 25.
6 is provided. The filter 25 is provided on the opposite side of the opening 14 a of each storage unit 14, and the motor fan 26 is provided on the opposite side of the storage unit 14 with the filter 25 interposed therebetween so as to face the communication unit 23.

In the left and right plates 20c and 20d of the first storage unit 18, a communication hole 23 for communicating the communication portion 23 to the outside of the storage unit 18 is formed in a portion where the communication portion 23 is formed inside. Are provided for each position corresponding to each fan filter unit 16.

Further, on the outer surfaces of the left and right plates 20c, 20d of the first storage unit 18, support pieces 28 as support portions are provided at positions corresponding to the positions where the support pieces 21 are provided. ing. The support piece 28 is provided so as to support one end of the lower surface of the storage object.

On the other hand, the second storage unit 19
As shown in (a) and (b), a housing 29 constituting a monocoque structure is provided. The housing 29 includes a bottom plate 29a, a top plate 29b, a right plate 29c, a left plate 29d, and a rear plate 29e.
And only the front side is open. In the present embodiment, the bottom plate 29a, the top plate 29b, the right plate 29c, the left plate 29d, and the rear plate 29e are formed of a metal plate and have the same thickness t.

The second storage unit 19 has a height h,
The width w1 is formed equal to the height h of the first storage unit 18, and the width w1 is formed smaller than the width w2 of the first storage unit 18 by the thickness t of the left and right plates 20c and 20d, that is, 2t. I have. The thickness t of each of the plates 29a to 29e
Is equal to the thickness of each of the plates 20a to 20e. Further, the second storage unit 19 has a depth d1 of the first storage unit 19.
The depth is formed equal to the depth of the storage unit 18 excluding the depth d3 of the storage unit 14 from the depth d2.

At the lowermost part of the inside of the housing 29, there is provided an air introduction part 30 which opens to the passage 12 side.
A communication part 31 for guiding the air introduction part 30 upward is provided inside the housing 29. A pre-filter 24 that filters dust having a relatively large particle diameter from air introduced from the passage 12 side is provided at an opening of the air introduction unit 30. The pre-filter 24 is provided in the first storage unit 1
8 is the same as the pre-filter 24 used in FIG.

Also, the stacker crane 13 is provided inside the housing 29 so as to be arranged vertically, and the air is introduced from the stacker crane 13 side through the communication portion 31 and the air introduction portion 30 to be filtered and discharged in the front direction. A fan filter unit 16 is provided. This fan filter unit 16 is the same as the fan filter unit 16 used for the first storage unit 18. The filter 25 is provided on the front side, and the motor fan 26 is provided on the rear side of the filter 25 so as to face the communication portion 31.

In the left and right plates 29c and 29d of the second storage unit 19, a communication hole 32 for communicating the communication portion 31 to the outside of the storage unit 19 is formed in a portion where the communication portion 31 is formed inside. Are provided for each position corresponding to each fan filter unit 16.

The storage shelf 15 is formed by first storage units 18 and second storage units 19 which are alternately arranged. At this time, the first storage unit 18 and the second storage unit 19 are arranged such that the back surfaces thereof coincide. In the storage shelf 15 thus formed, one shelf constituent unit 17 is formed by one first storage unit 18. Further, the storage unit 14 is provided at a position deeper than the first storage unit 18 by the depth of the storage unit 14,
A second storage unit 19 in which each storage unit 14 is formed on the front side by the left and right side plates 20c and 20d of each first storage unit 18 adjacent to the left and right sides and the support pieces 28 provided on the left and right side plates 20c and 20d. , One shelf constituent unit 17 is formed.

More specifically, the right side plate 20d of the first storage unit 18 adjacent to the left side of the second storage unit 19 and the support piece 28 provided on the right side plate 20d, and the first storage unit 18 adjacent to the right side Left side plate 29c and left side plate 2
With the support pieces 28 provided in 9c, the storage units 14 arranged vertically on the front side of the second storage unit 19 are formed.

The storage device 10 includes the stacker crane 1
3 are formed by the rear plates of the housings 20, 29 of the storage units 18, 19 forming the storage shelves 15, respectively. The storage device 10 is provided at one end in the longitudinal direction with a work space 34 in which a distribution board 33 and the like are accommodated. Similarly, at the other end, a conveyor 35 for transferring stored items between the stacker crane 13 and an unillustrated unmanned carrier outside the storage device 10.
The transfer chamber 36 provided with is provided. In the present embodiment, the transfer means is constituted by the stacker crane 13 and the conveyor 35.

The work space 34 has a wall portion formed by an end panel unit 37, and the transfer chamber 36 has a wall portion formed by an end panel unit 38. On the upper side of the storage device 10, the passage 12, the working space 34, the transfer room 3
6 and each first storage unit 18
And a ceiling panel 39 which is in contact with the upper surface of the second storage unit 19. The ceiling panel 39 is provided so as to form the ceiling of the uppermost storage unit 14 of the shelf unit 17 formed by each second storage unit 19 of each storage shelf 15. On the lower surface corresponding to the passage 12 of the ceiling panel 39, the upper rail 40 of the stacker crane 13 is provided.
Has been fixed.

Next, the operation of the storage device configured as described above will be described. The storage device 10 includes a first storage unit 18, a second storage unit 19, end panel units 37 and 38, a ceiling panel 39, a stacker crane 13,
After being disassembled into a conveyor 35 and the like, the product is carried into an installation site on the customer side and assembled at the installation site. At this time,
The first storage unit 18 includes storage units 14, a fan filter unit 16, an air introduction unit 22, and a communication unit 23 in a housing 20, and the second storage unit 19 includes a housing 2.
9, a fan filter unit 16, an air introduction unit 30, and a communication unit 31 are provided.
No assembly for every 19 is required. Further, when assembling the storage shelves 14 by alternately arranging the first storage units 18 and the second storage units 19, there is no need to perform an operation of sealing between the two storage units 18 and 19. This is because the communication portions 23 and 31 in which the air before being filtered in the storage units 18 and 19 are in a negative pressure state are opened in the gaps between the storage units 18 and 19 through the communication holes 27 and 32. Therefore, dust-containing air in the storage device 10 is sucked from the communication holes 27 and 32 into the communication portions 23 and 31 and is not released into the clean factory.

When a plurality of first storage units 18 and second storage units 19 are alternately arranged, one shelf unit 17 is formed by one first storage unit 18. The first storage unit 18 is provided at a position deeper than the first storage unit 18 by the depth of the storage unit 14, and is provided on the left and right side plates 20 c and 20 d and the left and right side plates 20 c and 20 d of each of the first storage units 18 adjacent to both left and right sides. In the second storage unit 19 in which each storage part 14 is formed on the front side by each support piece 28,
One shelf constituent unit 17 is formed.

Since the storage shelf 15 is formed by arranging the first storage unit 18 and the second storage unit 19 each having a monocoque structure, a structural material such as a support member for supporting the ceiling panel 39 is provided. Can be reduced or replaced with a smaller cross-sectional area having a smaller load-bearing strength than conventional ones.

In the assembled storage device 10, the stored items conveyed by the automatic guided vehicle to the conveyor 35 at the entrance / exit port at the time of entry into the warehouse are stored by the conveyor 35 in the storage device 1.
It is carried into 0. The items stored in the storage device 10 are transferred from the conveyor 35 to the storage unit 14 at the storage destination by the stacker crane 13. Similarly, at the time of unloading, the storage items stored in the storage unit 20 at the storage source of the storage shelf 15 are transported onto the conveyor 35 by the stacker crane 13 and are carried out of the storage device 10 by the conveyor 35. At this time, dust is generated from the sliding portion and the like as the stacker crane 13 operates.

The dust generated from the stacker crane 13 is converted into clean air by an air filtration process centered on each fan filter unit 16 of the storage units 18 and 19 facing the position on the moving route of the crane 13. It is supplied to the storage unit 14 from the back side. Therefore, each storage item is stored in a clean environment without being exposed to air containing dust generated by the operation of the stacker crane 13.

Also, with the operation of the stacker crane 13,
Heat is generated from a crane traveling motor and a carriage elevating motor (not shown). And the stacker crane 13
The air heated by the heat from the storage unit 18 (19) corresponding to a position on the movement route of the crane 13
In the air filtering process of each fan filter unit 16, the air introduction part 22 (30), the communication part 23 (31), each fan filter unit 16, each storage part 14, and the passage 12
Circulates in the circulation path formed by

On the other hand, with the air cleaning process of the fan filter unit 16 in each storage unit, the air before being filtered in the communication portions 23 and 31 is communicated between the storage units 18 and 19 arranged adjacent to each other. AC is exchanged through the holes 27 and 32. Then, the heated air is quickly diffused into the space in the direction in which the shelf constituent units 17 are arranged by the exchange of air between the respective shelf constituent units 17.

As described in detail above, according to the storage device of the present embodiment, the following effects can be obtained. (1) Each shelf constituent unit 17 of the storage shelf 15 is a storage unit body (first unit) including at least an air cleaning device (fan filter unit 16) and a predetermined number of storage units 14 inside a casing 20 having a monocoque structure. The storage unit 18) is formed. Therefore, the on-site assembly of each shelf constituent unit 17 is not required, and the installation can be easily performed. Further, it is possible to eliminate the need for supporting members or the like for supporting the ceiling panel 39 or to replace the supporting members with thin ones having a small sectional area.

(2) The storage units 14 lined up and down
The first unit (first storage unit 18), which is provided on the inside of the housing 20 and has a support portion for supporting one end of the storage object on each of the left and right side plates of the housing 20, forms one shelf constituent unit 17. In addition, the depth is smaller than the first unit by the storage unit 14, and the storage unit 14 is not provided inside the housing 29. The left and right side plates of the first storage unit adjacent to the left and right sides and the left and right side plates are provided. The second unit body (second storage unit 19), in which the storage unit is formed on the front side by the support unit, forms one shelf constituent unit 17.

Therefore, the width of the opening 14a of each storage unit 14 of the shelf constituent unit formed by the first unit body and the opening of each storage unit 14 of the shelf constituent unit 17 formed by the second unit body. When the width of the portion 14a is made equal, the entire width of the second unit is smaller than the entire width of the first unit by the left and right side plates 20c and 20d. As a result, the total length of the storage shelves 15 relative to the total number of shelf constituent units can be made shorter than before, and the installation area can be reduced.

(3) The storage units are provided with air inlets 22 and 30 which open to the transfer means side below the storages 15.
And the air introduction sections 22 and 30 are connected to the opening 1 of each storage section 14.
Communication portions 23 and 31 communicating with the side surface opposite to 4a are provided. Then, at the position opposite to the opening 14a of each storage section 14, air on the transfer means side is introduced through the communication sections 23 and 31 and the air introduction sections 22 and 30, and the introduced air is filtered and filtered. Fan filter unit 1 to be supplied to storage unit 15
6 were provided.

Accordingly, clean air is supplied to each of the storage units 14 arranged vertically so as to have a substantially equal positive pressure, and stagnation occurs in one of the storage units 14 due to a pressure difference between the upper and lower storage units 1. Never do. As a result, the degree of cleanliness in each storage unit 14 can be substantially equalized regardless of the upper and lower positions.

(4) Each storage unit is provided with a communication hole 27 (32) for communicating the communication portion 23 (31) between adjacent storage units in the state of the storage shelf 15, and a left and right side plate of each storage unit. 20c, 20d (29c, 29d). Therefore, since the air in the communicating portions 23 and 31 exchanges between the adjacent storage units, when the air purifying device (fan filter unit 16) of the specific storage unit takes in the high-temperature air, the high-temperature air is removed. However, it quickly diffuses into the space in the direction in which the shelf constituent units are arranged. As a result, heat generated by the transfer means such as the stacker crane 13 can be prevented from being concentrated on a specific storage unit.

(5) The stacker crane 13 provided so as to move along the storage shelf 15 transports the stored items to the respective storage units 14 of the storage shelf 15. Therefore, the storage items can be transferred to and from the storage unit 14 located at a higher position by using the stacker crane 13 having a general specification. Thus, the storage shelf 15 having a small installation area can be easily formed.

The embodiment is not limited to the above embodiment, but may be modified as follows. ○ In the above embodiment, each of the storage units 18 and 19 is
The storage holes 15 may not be provided with the communication holes 27 and 32 for connecting the communication portions 23 and 31 between the adjacent storage units 18 and 19 in the state of the storage shelf 15.

The support portion provided on the first storage unit 18 is not limited to the support piece 28 that supports only the end of the storage object from below. For example, each of the first storage units 18 adjacent to the left and right sides of the second storage unit 19 may be used. The support unit of the storage unit 18 may be provided so that the tips of the support units contact each other to form a shelf plate.

As shown in FIG. 6, a storage unit 41 as a storage unit is provided inside a housing 42 and has a storage section 14 formed by a single shelf 43 on the lower side. I do. Then, the storage shelf 15 may be formed only by the storage unit 41. In this case, various storage items having different dimensions can be stored in the storage unit 14.

The storage units 14 of the shelf constituent units formed by the first storage unit 18 are formed by the shelf 43 instead of the support pieces 21, and are formed by the second storage unit 19. Each of the storage units 14 may be formed by left and right plates 20c and 20d of the first storage unit 18 on the left and right sides, and support pieces 28 provided on the both side plates 20c and 20d.

In the above-mentioned embodiment, a storage unit is formed in which the support portions (support pieces 28) provided on the left and right side plates 20c and 20d of the first storage unit 18 are eliminated, and only this storage unit is arranged. It may be a storage device in which the storage shelf 15 is formed. In this case, a storage shelf can be constituted by only one type of storage unit, and inventory management at a manufacturer or a store or assembly work at an installation site becomes easy.

In the first embodiment, a storage unit is formed by omitting only the portion forming each storage unit 14 of, for example, the right side plate 20d of the first storage unit 18, and only the storage units are arranged and stored. It is good also as a storage device in which shelf 15 was formed. That is, each storage unit is a left side plate 20d of the storage unit and a support piece 21 provided on the left side plate 20d.
And a shelf unit 17 including the storage unit 14 formed by the left side plate 20d of the storage unit adjacent to the right side and the support piece 28 provided on the left side plate 20d. In this case, a storage shelf can be constituted by only one type of storage unit, and inventory management at a manufacturer or a store or assembly work at an installation site becomes easy.

As shown in FIG. 7, an air purifying device provided in each storage unit is provided below each storage unit 14 inside the housing 44 so that air is introduced from the stacker crane 13 side. Blower unit 45 provided
And the air blown by the blower unit 45 is stored in each storage unit 1.
4 and a filter 47 that is provided on the back side of each storage unit 14 and filters air supplied from the guide unit 46 into each storage unit 14. .

The housings 20 of the storage units 18 and 19
The material of 29 is not limited to metal, for example, synthetic resin,
It may be a fiber-reinforced synthetic resin, or a composite material in which a metal plate and a synthetic resin plate are laminated.

The housings 20 of the storage units 18 and 19,
In the case where 29 is formed of metal, the entire case 20, 29 is formed by pressing a single metal plate without being limited to a metal plate forming each plate of the case 20, 29. It may be formed integrally by molding.

Further, the housings 20 of the storage units 18 and 19,
When the housing 29 is formed of a synthetic resin,
The housings 20 and 29 may be integrally formed by molding a synthetic resin.

The number of storage units 15 provided in one storage unit 18, 19 may be two or four or more. ○ The transfer means is not limited to the stacker crane 13 and may be, for example, a monorail type crane suspended from a ceiling, in which a carriage for transporting stored items can be moved up and down, or an unmanned transport cart for transferring stored items. The stage to be moved may be movable up and down.

The present invention is not limited to a storage device installed in a clean factory for manufacturing semiconductor devices, but may be applied to a storage device used in a factory or the like under a normal environment. Hereinafter, technical ideas other than the claims that can be grasped from the embodiment will be described together with their effects.

(1) In the storage device according to any one of claims 1 to 4, the transfer means moves along the storage shelf, and stores a storage item in each storage section of the storage shelf. Equipped with a stacker crane to transfer. According to such a configuration, it is possible to transfer stored items to and from a storage unit located at a higher position using a stacker crane having a general specification. A storage shelf with a small installation area can be easily formed by using the above.

[0067]

According to the invention as set forth in claims 1 to 4, there are provided a predetermined number of storage units each arranged vertically and an air cleaning device for supplying filtered air to each of the storage units. The on-site assembly of the shelf constituent units constituting the storage shelves arranged and arranged is unnecessary, and the installation can be easily performed.

According to the second aspect of the present invention, the total length of the storage shelves with respect to the total number of shelf constituent units can be made shorter than before, and the installation area can be made smaller. According to the third aspect of the present invention, it is possible to make the degree of cleanliness in each storage unit substantially uniform regardless of the position of the storage unit above and below each storage unit.

According to the fourth aspect of the present invention, it is possible to prevent the heat generated by the transfer means such as the stacker crane moving between the shelf units from being concentrated on a specific shelf unit.

[Brief description of the drawings]

FIG. 1A is a schematic plan sectional view of a storage device, and FIG. 1B is a schematic side sectional view thereof.

FIG. 2 is an enlarged sectional view taken along line AA in FIG.

FIG. 3 is a schematic perspective view showing first and second unit bodies.

FIG. 4A is a front view of a first unit body, and FIG. 4B is a side sectional view of the same.

5A is a front view of a second unit body, and FIG. 5B is a side sectional view of the same.

FIG. 6 is a schematic perspective view showing another example of a storage unit.

FIG. 7 is a schematic side sectional view showing another example of a storage unit.

FIG. 8A is a schematic plan sectional view of a conventional storage device,
(B) is a schematic side sectional view similarly.

FIG. 9 is an enlarged sectional view taken along line BB in FIG. 8;

FIG. 10 is a schematic perspective view showing a storage filter unit.

[Explanation of symbols]

13: Stacker crane constituting transfer means, 14: Storage unit, 14a: Opening, 15: Storage shelf, 16: Fan filter unit as air cleaning device, 17: Shelf constituent unit, 18: Storage unit body 1st storage unit as a 1st unit, 19 ... 2nd storage unit as a 2nd unit which comprises a storage unit, 20 ... housing | casing, 22 ... air introduction part, 23 ... communication part, 27 ... communication hole .., 28... Support pieces as support parts, 29... Housings, 30.
Communication part, 32 ... Communication hole, 35 ... Conveyor constituting transfer means, 41 ... Storage unit as storage unit, 42 ...
Housing, 45 ... a blower unit constituting an air purifying device,
46: a guide part; 47: a filter;

Claims (4)

[Claims] 1. A storage device is formed so as to be able to store a storage object, and an opening is provided on a predetermined side for putting the storage object in and out, and a predetermined number of the storage units are vertically arranged with the opening facing the predetermined side. A storage unit provided so as to be lined up, and an air purifying device that filters air introduced from each opening side below each storage unit and supplies the air to each storage unit from the side opposite to the opening. Storage shelves formed by arranging a plurality of the shelf constituent units in such a manner that the openings of the respective storage units are oriented in a predetermined direction, and the openings of the respective storage units are opened to a substantially sealed interior. Storage device provided with a transfer means for transferring storage items between the outside of the room provided and the respective storage units, wherein the storage shelf is at least inside a housing formed in a monocoque structure. Comprising the air purifying device and the respective storage units,
A storage device formed by a storage unit that forms the shelf constituent unit. 2. The first unit, wherein the storage unit is provided with the storage unit inside the housing, and a support unit for supporting one end of a storage object is provided on an outer surface of left and right side plates of the housing. And a second unit body having a depth shorter than the first unit body by the depth of each storage unit, and not having each storage unit inside the housing. With the second unit, the side plates of the housing of the first unit adjacent to the left and right of the second unit in a state where they are alternately arranged, and the support portions provided on the respective side plates are provided. The storage unit is formed on the front side of the second unit body so as to form the storage units, and the storage shelf is formed by shelf constituent units formed by the first unit unit and the second unit unit arranged alternately. The storage device according to claim 1 formed. 3. The storage unit body is provided below each of the storage units, and an air introduction unit that opens into the room on the side of the transfer means, and the air introduction unit is connected to the opening of each of the storage units. And a communicating portion communicating with the opposite side, the air purifying device is provided on the opposite side to the opening for each of the storage units, and the air purifying device is provided on the transfer unit side via the communicating unit and the air introducing unit. The storage device according to claim 1 or 2, wherein the storage device is a fan filter unit that introduces air, filters the introduced air, and supplies the filtered air to each storage unit. 4. The storage units are provided with communication holes in the left and right side plates of the storage units, the communication holes communicating the communication portions between the storage units adjacent in the state of the storage shelf. Item 4. The storage device according to Item 3.