JPH11286693A - Cutting fluid for wire saw - Google Patents
Cutting fluid for wire sawInfo
- Publication number
- JPH11286693A JPH11286693A JP9208098A JP9208098A JPH11286693A JP H11286693 A JPH11286693 A JP H11286693A JP 9208098 A JP9208098 A JP 9208098A JP 9208098 A JP9208098 A JP 9208098A JP H11286693 A JPH11286693 A JP H11286693A
- Authority
- JP
- Japan
- Prior art keywords
- working fluid
- cutting
- wire saw
- viscosity
- cutting fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/025—Use, recovery or regeneration of abrasive mediums
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、遊離砥粒を利用し
てワイヤソーで被加工物を切断するときに用いるワイヤ
ソー用加工液、加工液組成物及び該加工液組成物を用い
たインゴットの切断方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a working fluid for a wire saw used for cutting a workpiece with a wire saw using free abrasive grains, a working fluid composition, and a cutting of an ingot using the working fluid composition. About the method.
【０００２】[0002]
【従来の技術】従来、遊離砥粒を利用してワイヤソーで
シリコンインゴット等を切断するときに用いる加工液と
しては、主に鉱物油を主成分とする非水溶性加工液が用
いられているため、切断後に得られるスライス品には、
前記非水溶性加工液が付着しており、前記非水溶性加工
液が付着したスライス品の洗浄には、有機溶剤や特殊な
洗浄剤を用いざるを得なかった。2. Description of the Related Art Conventionally, as a working fluid used for cutting a silicon ingot or the like with a wire saw using free abrasive grains, a water-insoluble working fluid mainly composed of mineral oil is mainly used. , The sliced product obtained after cutting,
An organic solvent or a special cleaning agent has to be used for cleaning the sliced product to which the water-insoluble processing liquid has adhered and to which the water-insoluble processing liquid has adhered.
【０００３】前記スライス品の洗浄を簡便にするため
に、水溶性加工液が開発されてきた（特開平３−１８１
５９８号公報等）。しかし、加工液に含有された水分の
揮発、温度変化、ワイヤソーのシェア速度変化等による
粘度変化が大きく、切断性能が劣るという問題があっ
た。In order to simplify the washing of the sliced product, a water-soluble processing liquid has been developed (Japanese Patent Laid-Open No. 3-181).
598, etc.). However, there is a problem that the change in viscosity due to volatilization of water contained in the processing liquid, a change in temperature, a change in the shearing speed of the wire saw, and the like is large, resulting in poor cutting performance.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、前記従来技
術に鑑みてなされたものであり、ワイヤソーでの切断後
に得られる加工液が付着したスライス品の洗浄が容易で
あり、加工液の粘度変化が少なく、切断性能を向上させ
うるワイヤソー用加工液、該加工液を用いたワイヤソー
用加工液組成物及びインゴットの切断方法を提供するこ
とを目的とする。DISCLOSURE OF THE INVENTION The present invention has been made in view of the above prior art, and it is easy to clean a sliced product to which a processing liquid obtained after cutting with a wire saw is attached, and to obtain a viscosity of the processing liquid. An object of the present invention is to provide a working fluid for a wire saw, which has little change and can improve the cutting performance, a working fluid composition for a wire saw using the working fluid, and a method for cutting an ingot.
【０００５】[0005]
【課題を解決するための手段】本発明者らは、特定の構
造を有する水溶性ポリエーテル化合物を配合した加工液
により、前記目的が達成されることを見出した。Means for Solving the Problems The present inventors have found that the above-mentioned object is achieved by a working fluid containing a water-soluble polyether compound having a specific structure.
【０００６】即ち、本発明の要旨は、（１） 一般式
（Ｉ）： Ｒ1 Ｏ（ＥＯ）m （ＡＯ）n Ｒ2 （Ｉ） （式中、Ｒ1 及びＲ2 は、それぞれ同一でも異なってい
てもよい水素原子又は炭素数１〜２４の炭化水素基を示
し、少なくとも１つは炭化水素基であり、ＥＯはオキシ
エチレン基、ＡＯは炭素数３若しくは４のオキシアルキ
レン基、（ＥＯ） m （ＡＯ）n はｍ個のＥＯ、ｎ個のＡ
Ｏからなるランダム体又はブロック体を示し、ｍ及びｎ
はそれぞれ１〜５０の整数、ｍとｎとの和は４〜１００
の整数、ｎが２以上のときｎ個のＡＯは同一でも異なっ
ていてもよい）で表わされるポリエーテル化合物を含有
してなるワイヤソー用加工液、（２） 前記（１）記載
の加工液及び砥粒を含有してなるワイヤソー用加工液組
成物、（３） 前記（１）又は（２）記載のワイヤソー
用加工液組成物を用いてインゴットを切断することを特
徴とするインゴットの切断方法、に関する。That is, the gist of the present invention is as follows:
(I): R1O (EO)m(AO)nRTwo (I) (wherein, R1And RTwoAre the same or different
A hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms
And at least one is a hydrocarbon group and EO is an oxy
An ethylene group and AO are oxyalkyl having 3 or 4 carbon atoms.
Len group, (EO) m(AO)nIs m EOs, n A
A random body or a block body consisting of O, m and n
Is an integer of 1 to 50, and the sum of m and n is 4 to 100
Where n is 2 or more, n AOs are the same or different
May be included)
(2) The above-mentioned (1).
Fluid set for wire saws containing a working fluid and abrasive grains
(3) The wire saw according to (1) or (2) above.
Cutting an ingot using a working fluid composition
And a method for cutting an ingot.
【０００７】[0007]
【発明の実施の形態】本発明のワイヤソー用加工液にお
いては、一般式（Ｉ）で表わされるポリエーテル化合物
を用いることによって、切断後に得られたスライス品に
付着した加工液を容易に洗浄することができ、ワイヤソ
ー中のウレタン等の部材への適合性が高く、加工液の粘
度変化が小さく、切断性能に優れるという優れた性質を
発揮する。BEST MODE FOR CARRYING OUT THE INVENTION In the working fluid for a wire saw according to the present invention, by using the polyether compound represented by the general formula (I), the working fluid attached to the sliced product obtained after cutting is easily washed. It exhibits excellent properties such as high compatibility with members such as urethane in a wire saw, a small change in the viscosity of the working fluid, and excellent cutting performance.
【０００８】前記一般式（Ｉ）において、Ｒ1 及びＲ2
は、それぞれ水素原子又は炭素数１〜２４の炭化水素基
を表わす。また、前記Ｒ1 及びＲ2 はそれぞれ同一でも
異なっていてもよいが、砥粒を含有した加工液組成物の
粘度変化を低減する観点から、少なくとも一方は炭化水
素基であることが望ましい。In the general formula (I), R 1 and R 2
Represents a hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms, respectively. Further, R 1 and R 2 may be the same or different, but from the viewpoint of reducing the change in viscosity of the working fluid composition containing abrasive grains, at least one of them is preferably a hydrocarbon group.
【０００９】前記炭化水素基の炭素数は、切断性能を十
分に発揮させる観点から、１以上であり、切断後に得ら
れたスライス品の洗浄を容易にする観点から、２４以
下、好ましくは２２以下、さらに好ましくは１８以下で
あることが望ましい。前記炭化水素基は、脂肪族及び芳
香族のいずれの基であってもよい。また、脂肪族におい
ては、飽和及び不飽和のいずれの基であってもよく、直
鎖及び分岐鎖のいずれの基であってもよい。The number of carbon atoms of the hydrocarbon group is 1 or more from the viewpoint of sufficiently exhibiting cutting performance, and is 24 or less, preferably 22 or less from the viewpoint of facilitating washing of the sliced product obtained after cutting. And more preferably 18 or less. The hydrocarbon group may be any of an aliphatic group and an aromatic group. In the case of aliphatic, it may be any of a saturated and unsaturated group, and may be any of a linear or branched group.
【００１０】前記一般式（Ｉ）において、ＥＯは、オキ
シエチレン基を示し、ＡＯは、炭素数３若しくは４のオ
キシアルキレン基を示す。前記オキシアルキレン基とし
ては、オキシプロピレン基又はオキシブチレン基があげ
られる。また、前記一般式（Ｉ）において、（ＥＯ）m
（ＡＯ）n は、ｍ個のオキシエチレン基、ｎ個のオキシ
アルキレン基からなるランダム体又はブロック体を示
す。In the general formula (I), EO represents an oxyethylene group, and AO represents an oxyalkylene group having 3 or 4 carbon atoms. Examples of the oxyalkylene group include an oxypropylene group and an oxybutylene group. In the general formula (I), (EO) m
(AO) n represents a random body or a block body composed of m oxyethylene groups and n oxyalkylene groups.
【００１１】前記ｍ及びｎはそれぞれ１〜５０の整数で
ある。切断した後のスライス品の洗浄の容易さの観点か
ら、ｍは１以上であり、加工液の低温流動性の観点か
ら、ｎは１以上であることが望ましく、加工液組成物の
流動性の観点から、ｍ及びｎはそれぞれ５０以下である
ことが望ましい。The above m and n are each an integer of 1 to 50. From the viewpoint of easy cleaning of the sliced product after cutting, m is 1 or more, and from the viewpoint of low-temperature fluidity of the working fluid, n is preferably 1 or more, and the fluidity of the working fluid composition is From the viewpoint, m and n are each preferably 50 or less.
【００１２】ｍとｎとの和は、加工液とウレタン等の部
材との適合性の観点から、４以上であり、砥粒を含有し
た加工液組成物の粘度変化を低減させる観点から、及
び、加工液組成物の流動性の観点から１００以下であ
る。The sum of m and n is 4 or more from the viewpoint of compatibility between the working fluid and members such as urethane, and from the viewpoint of reducing the change in viscosity of the working fluid composition containing abrasive grains, and , From the viewpoint of fluidity of the working liquid composition.
【００１３】ｎが２以上の整数である場合、ｎ個のオキ
シアルキレン基は同一でも異なっていてもよい。異なる
場合は、ランダム体であってもブロック体であってもよ
い。When n is an integer of 2 or more, the n oxyalkylene groups may be the same or different. If different, it may be a random body or a block body.
【００１４】前記一般式（Ｉ）で表わされるポリエーテ
ル化合物は、例えば、ＫＯＨ等を触媒として用い、１価
アルコールやフェノールにアルキレンオキサイド化合物
を付加することによって得ることができる。The polyether compound represented by the general formula (I) can be obtained, for example, by adding an alkylene oxide compound to a monohydric alcohol or phenol using KOH or the like as a catalyst.
【００１５】本発明の加工液においては、前記ポリエー
テル化合物を単独で又は２種以上を混合して用いてもよ
い。前記ポリエーテル化合物を上記の方法で製造した場
合、得られたポリエーテル化合物中のオキシエチレン基
及びオキシプロピレン基の付加モル数は分布を有する。
その場合、前記ポリエーテル化合物が５０重量％以上、
さらに好ましくは７０重量％以上含まれることが望まし
い。In the working fluid of the present invention, the above polyether compounds may be used alone or in combination of two or more. When the polyether compound is produced by the above method, the number of moles of oxyethylene groups and oxypropylene groups in the obtained polyether compound has a distribution.
In that case, the polyether compound is 50% by weight or more,
More preferably, the content is desirably 70% by weight or more.
【００１６】また、本発明の加工液は、前記ポリエーテ
ル化合物を主成分とするものであり、前記化合物の含有
量は、５０重量％以上、好ましくは７０重量％以上、さ
らに好ましくは９０重量％以上であることが望ましい。The working fluid of the present invention contains the above polyether compound as a main component, and the content of the compound is 50% by weight or more, preferably 70% by weight or more, more preferably 90% by weight. It is desirable that this is the case.
【００１７】本発明の加工液においては、前記一般式
（Ｉ）で表わされる化合物に加えて、必要に応じて、例
えば、増粘剤、分散剤、防錆剤、キレート剤、塩基性物
質、界面活性剤等の添加剤を配合することができる。前
記添加剤においては、前記ポリエーテル化合物と反応す
るものであっても、反応により生じた化合物が本発明の
目的を妨げないものであれば配合してもよい。In the working fluid of the present invention, in addition to the compound represented by the general formula (I), if necessary, for example, a thickener, a dispersant, a rust inhibitor, a chelating agent, a basic substance, An additive such as a surfactant can be blended. The additive may be added as long as it reacts with the polyether compound as long as the compound produced by the reaction does not disturb the object of the present invention.
【００１８】また、本発明の加工液に砥粒を含有させて
ワイヤソー用加工液組成物として用いる場合において
は、前記添加剤は、砥粒と反応するものであっても、反
応により生じた化合物が本発明の目的を妨げないもので
あれば配合してもよい。In the case where the working fluid of the present invention contains abrasive grains and is used as a working fluid composition for a wire saw, the additive may react with the abrasive grains, but the compound formed by the reaction may be used. May be added as long as the object of the present invention is not hindered.
【００１９】本発明の加工液においては、前記ポリエー
テル化合物及び必要に応じて配合される前記添加剤の媒
体として、水溶性の有機化合物を任意に使用してもよ
い。In the working fluid of the present invention, a water-soluble organic compound may be arbitrarily used as a medium for the polyether compound and the optional additives.
【００２０】任意に使用される前記媒体の配合量は、加
工液中の前記ポリエーテル化合物及び必要に応じて配合
される前記添加剤の残部であればよい。The amount of the medium optionally used may be the amount of the polyether compound in the working fluid and the balance of the additives to be added as required.
【００２１】本発明のワイヤソー用加工液組成物は、本
発明のワイヤソー用加工液及び砥粒を含有したものであ
る。本発明のワイヤソー用加工液組成物においては、本
発明のワイヤソー用加工液を用いるため、切断後に得ら
れたスライス品に付着した加工液組成物を容易に洗浄す
ることができ、ワイヤソー中のウレタン等の部材への適
合性が高く、加工液組成物の粘度変化が小さく、切断性
能に優れるという優れた性質を発揮する。The working fluid composition for wire saws of the present invention contains the working fluid for wire saws of the present invention and abrasive grains. In the working fluid composition for a wire saw of the present invention, since the working fluid for a wire saw of the present invention is used, the working fluid composition attached to the sliced product obtained after cutting can be easily washed, and urethane in the wire saw can be used. It exhibits excellent properties such as high compatibility with components such as the above, a small change in viscosity of the working fluid composition, and excellent cutting performance.
【００２２】本発明の加工液組成物における本発明の加
工液の配合量は、切断速度、切断面の形状等の要求品質
等に応じて種々選択することができるが、好ましくは３
０重量％以上、さらに好ましくは４０重量％以上であ
り、また、好ましくは７０重量％以下、さらに好ましく
は６０重量％以下であることが望ましい。The amount of the working fluid of the present invention in the working fluid composition of the present invention can be variously selected according to the required quality such as the cutting speed and the shape of the cut surface.
It is preferably at least 0% by weight, more preferably at least 40% by weight, and preferably at most 70% by weight, more preferably at most 60% by weight.
【００２３】前記砥粒としては、研磨用に一般に使用さ
れる砥粒を用いることができる。前記砥粒としては、例
えば、金属、金属又は半金属の炭化物、金属又は半金属
の窒化物、金属又は半金属の酸化物、金属又は半金属の
ホウ化物、ダイヤモンド等の研磨用に一般に使用される
砥粒があげられる。前記金属又は半金属としては、周期
律表の３Ａ、４Ａ、５Ａ、３Ｂ、４Ｂ、５Ｂ、６Ｂ、７
Ｂ又は８Ｂ族由来のものである。具体的には、アルミナ
粒子、ＳｉＣ粒子、ダイヤモンド粒子、ＭｇＯ粒子、酸
化セリウム粒子、酸化ジルコニウム粒子、コロイダルシ
リカ粒子、ヒュームドシリカ粒子等があげられ、切断速
度を向上させる観点からＳｉＣ粒子が好ましく、具体的
にはフジミインコーポレーテッド社製ＧＣ＃６００及び
ＧＣ＃８００が好ましい。As the above-mentioned abrasive grains, abrasive grains generally used for polishing can be used. As the abrasive, for example, metal, metal or metalloid carbide, metal or metalloid nitride, metal or metalloid oxide, metal or metalloid boride, generally used for polishing of diamond or the like Abrasive grains. Examples of the metal or metalloid include 3A, 4A, 5A, 3B, 4B, 5B, 6B, 7 in the periodic table.
It is derived from group B or 8B. Specific examples include alumina particles, SiC particles, diamond particles, MgO particles, cerium oxide particles, zirconium oxide particles, colloidal silica particles, fumed silica particles, and the like.SiC particles are preferable from the viewpoint of improving the cutting speed, Specifically, GC # 600 and GC # 800 manufactured by Fujimi Incorporated are preferred.
【００２４】また、本発明の加工液組成物における砥粒
の配合量は、切断速度、切断面の形状等の要求品質等に
応じて種々選択することができるが、好ましくは３０重
量％以上、さらに好ましくは４０重量％以上であり、ま
た、好ましくは８０重量％以下、さらに７０重量％以下
であることが望ましい。The amount of the abrasive grains in the working fluid composition of the present invention can be variously selected according to the required quality such as the cutting speed and the shape of the cut surface, but is preferably 30% by weight or more. It is more preferably at least 40% by weight, and preferably at most 80% by weight, more preferably at most 70% by weight.
【００２５】本発明の加工液組成物においては、前記加
工液に加えて、必要に応じて、例えば、増粘剤、分散
剤、防錆剤、キレート剤、塩基性物質、界面活性剤等の
添加剤を配合することができる。前記添加剤において
は、前記加工液に配合される一般式（Ｉ）で表わされる
ポリエーテル化合物又は砥粒と反応するものであって
も、反応により生じた化合物が本発明の目的を妨げない
ものであれば配合してもよい。In the working fluid composition of the present invention, in addition to the working fluid, if necessary, for example, a thickening agent, a dispersing agent, a rust preventive, a chelating agent, a basic substance, a surfactant, etc. Additives can be included. In the above-mentioned additive, even if it reacts with the polyether compound represented by the general formula (I) or the abrasive grains mixed in the working fluid, the compound produced by the reaction does not disturb the object of the present invention. If so, it may be blended.
【００２６】本発明の加工液組成物においては、前記加
工液、砥粒、並びに必要に応じて配合される前記添加剤
の媒体として、水溶性有機物を任意に使用してもよい。In the working fluid composition of the present invention, a water-soluble organic substance may optionally be used as a medium for the working fluid, abrasive grains, and the additives to be added as required.
【００２７】任意に使用される前記媒体の配合量は、加
工液組成物中の前記加工液、砥粒、並びに必要に応じて
配合される前記添加剤の残部であればよい。The amount of the medium optionally used may be the amount of the working fluid, abrasive grains in the working fluid composition and the balance of the additives to be blended as required.
【００２８】本発明の加工液組成物は、例えば、シリコ
ン単結晶や多結晶、ＧａＡｓ、その他化合物半導体やセ
ラミックス等材質を有するインゴットの切断に用いるこ
とができる。The working fluid composition of the present invention can be used, for example, for cutting an ingot having a material such as silicon single crystal or polycrystal, GaAs, other compound semiconductors or ceramics.
【００２９】本発明のインゴットの切断方法によれば、
本発明のワイヤソー用加工液組成物を用いるため、通常
使用されるワイヤソーによりシリコン単結晶等のインゴ
ットを効率よく切断することができる。According to the method for cutting an ingot of the present invention,
Since the working fluid composition for a wire saw of the present invention is used, an ingot such as a silicon single crystal can be efficiently cut by a wire saw that is usually used.
【００３０】[0030]
【実施例】加工液に用いた化合物を下記に示す。なお、
ＥＯはオキシエチレン基、ＰＯはオキシプロピレン基を
示す。 Ａ：ｎ−Ｃ4 Ｈ9 （ＥＯ）5.3 （ＰＯ）4.0 Ｈ ランダ
ム体、付加モル数は平均値、加工液中の化合物の含有
量：１００重量％ Ｂ：ｎ−Ｃ4 Ｈ9 （ＥＯ）9.2 （ＰＯ）6.9 Ｈ ランダ
ム体、付加モル数は平均値、加工液中の化合物の含有
量：１００重量％ Ｃ：ｎ−Ｃ12Ｈ25Ｏ（ＥＯ）2.5 （ＰＯ）2.5 （ＥＯ）
2.5 Ｈ ブロック体、付加モル数は平均値、加工液中の
化合物の含有量：１００重量％ ａ：ＨＯ（ＥＯ）m Ｈ 平均分子量４００、加工液中の
化合物の含有量：１００重量％ ｂ：ＨＯ（ＰＯ）2 Ｈ、加工液中の化合物の含有量：１
００重量％ ｃ：ｎ−Ｃ4 Ｈ9 （ＥＯ）2 Ｈ、加工液中の化合物の含
有量：１００重量％ ｄ：鉱物油系加工液（商品名：パレス化学製ＬＷ−１）The compounds used in the working fluid are shown below. In addition,
EO represents an oxyethylene group, and PO represents an oxypropylene group. A: nC 4 H 9 (EO) 5.3 (PO) 4.0 H random form, average number of moles added, content of compound in working fluid: 100% by weight B: nC 4 H 9 (EO) 9.2 (PO) 6.9 H Random form, average number of moles added, content of compound in working fluid: 100% by weight C: n-C 12 H 25 O (EO) 2.5 (PO) 2.5 (EO)
2.5 H block, average number of moles added, content of compound in working fluid: 100% by weight a: HO (EO) m H average molecular weight 400, content of compound in working fluid: 100% by weight b: HO (PO) 2 H, content of compound in working fluid: 1
00 wt% c: n-C 4 H 9 (EO) content of 2 H, compounds in working solution: 100 wt% d: mineral oil-based dielectric fluid (trade name: Palace Chemical Ltd. LW-1)
【００３１】実施例１ ステンレス製のビーカーに前記加工液Ａを２重量部、砥
粒（（株）フジミインコーポレーテッド社製：ＧＣ＃８
００）３重量部を取り、ホモミキサー（特殊化工（株）
製、Ｔ．Ｋ．オートホモミキサー：型式Ｍ型、攪拌羽：
ディスパー羽根）で室温、３０００ｒｐｍで攪拌するこ
とによって、加工液と砥粒が均一になったスラリー状の
ワイヤソー用加工液組成物を調製した。Example 1 Into a stainless steel beaker, 2 parts by weight of the working fluid A, abrasive grains (GC # 8, manufactured by Fujimi Incorporated):
00) Take 3 parts by weight and use a homomixer (Specialized Chemical Industry Co., Ltd.)
T. K. Auto homomixer: Model M, stirring blade:
By stirring at room temperature and 3000 rpm with a disperser blade), a slurry-like working fluid composition for wire saws in which the working fluid and abrasive grains were uniform was prepared.
【００３２】実施例２及び３ 実施例１における加工液Ａのかわりに、前記加工液Ｂ及
びＣを用い、実施例１と同様にワイヤソー用加工液組成
物を調製した。Examples 2 and 3 A working fluid composition for a wire saw was prepared in the same manner as in Example 1, except that the working fluids B and C were used instead of the working fluid A in Example 1.
【００３３】比較例１〜４ 実施例１における加工液Ａのかわりに、前記加工液ａ〜
ｄを用い、実施例１と同様にワイヤソー用加工液組成物
を調製した。Comparative Examples 1 to 4 Instead of the working fluid A in Example 1, the working fluids a to
Using d, a working fluid composition for a wire saw was prepared in the same manner as in Example 1.
【００３４】試験例 １．高速攪拌による粘度変化率 前記実施例及び比較例で得られたワイヤソー用加工液組
成物を用い、先のホモミキサーを用いて、３０００ｒｐ
ｍで攪拌を行ない、試験前後の粘度を測定することによ
り粘度の経時変化を調べた。粘度の測定は、試料：加工
液組成物５００ｇ、試料温度：５０℃、攪拌時間：１０
時間の条件下で、Ｂ型粘度計（東京計器（株）製）を用
いて２５℃で行なった。その結果を表１に示す。なお、
表１中、粘度変化率は、〔試験後（１０時間攪拌後）の
粘度／試験前の粘度〕×１００により算出したものであ
り、粘度変化率の値が１００に近い程、粘度変化が小さ
いことを示す。Test Example 1. Viscosity change rate by high-speed stirring Using the working fluid composition for a wire saw obtained in the above Examples and Comparative Examples, using the above homomixer, 3000 rpm
Stirring was performed at m, and the viscosity over time was measured by measuring the viscosity before and after the test. The viscosity was measured by measuring the sample: 500 g of the working fluid composition, the sample temperature: 50 ° C., and the stirring time: 10
It carried out at 25 degreeC using the Brookfield viscometer (Tokyo Keiki Co., Ltd.) on time conditions. Table 1 shows the results. In addition,
In Table 1, the viscosity change rate is calculated by [viscosity after test (after stirring for 10 hours) / viscosity before test] × 100. The closer the value of the viscosity change rate is to 100, the smaller the viscosity change. Indicates that
【００３５】[0035]
【表１】 [Table 1]
【００３６】表１に示すように、比較例１及び４の加工
液組成物を用いた場合に比べて、実施例１〜３の加工液
組成物を用いた場合には、粘度変化率の値がより１００
％に近く、高速攪拌による粘度変化が小さいことが示さ
れた。As shown in Table 1, when the working fluid compositions of Examples 1 to 3 were used, the value of the rate of change in viscosity was higher than when the working fluid compositions of Comparative Examples 1 and 4 were used. Is more than 100
%, Indicating that the change in viscosity due to high-speed stirring was small.
【００３７】２．シェア速度変化による粘度変化率 前記実施例及び比較例で得られたワイヤソー用加工液組
成物を用い、回転粘度計（ＨＡＡＫＥ社製、型式ＰＯＴ
ＯＶＩＳＣＯ ＲＶ１２）により、シェア速度を変えた
ときの粘度変化を調べた。粘度変化は、測定頭：Ｍ５０
０、ローター：ＭＶ２、測定温度：２５℃、最高シェア
速度：５００Ｓ-1（３分保持）、シェア速度変化率：０
〜５００Ｓ-1／３分の条件下で測定した。結果を表２に
示す。なお、表２中、粘度変化率は、シェア速度５００
Ｓ-1の粘度及びシェア速度１００Ｓ-1の粘度を測定した
のち、〔シェア速度５００Ｓ-1の粘度／シェア速度１０
０Ｓ-1の粘度〕×１００により算出したものであり、粘
度変化率の値が１００に近い程、粘度変化が小さいこと
を示す。2. Rate of change in viscosity due to change in shear speed Using a working fluid composition for wire saws obtained in the above Examples and Comparative Examples, a rotational viscometer (model POT, manufactured by HAAKE)
OVISCO RV12) was used to examine the change in viscosity when the shear rate was changed. Change in viscosity was measured using a measuring head:
0, rotor: MV2, measurement temperature: 25 ° C., maximum shear speed: 500 S −1 (holding for 3 minutes), shear speed change rate: 0
It was measured under the condition of 〜500 S −1 / 3 min. Table 2 shows the results. In Table 2, the rate of change in the viscosity was 500 shear rates.
After measuring the viscosity of viscosity and shear rate 100S -1 of S -1, Viscosimetry / share rate 10 share rate 500S -1
[Viscosity of 0S -1 ] × 100. The closer the value of the rate of change of viscosity is to 100, the smaller the change in viscosity is.
【００３８】[0038]
【表２】 [Table 2]
【００３９】表２に示すように、比較例１及び２の加工
液組成物を用いた場合に比べて、実施例１〜３の加工液
組成物を用いた場合には、粘度変化率の値がより１００
％に近く、シェア速度変化による粘度変化が小さいこと
が示された。As shown in Table 2, when the working fluid compositions of Examples 1 to 3 were used, the value of the rate of change in viscosity was higher than when the working fluid compositions of Comparative Examples 1 and 2 were used. Is more than 100
%, Indicating that the change in viscosity due to the change in shear rate is small.
【００４０】３．重量変化率及び体積変化率 前記実施例及び比較例で得られたワイヤソー用加工液組
成物を用い、２００ｃｃのビーカーに加工液１００ｃｃ
をとり、中空孔を有さないウレタン片（日本テストパネ
ル大阪（株）製、Ｗ２０ｍｍ×Ｄ５０ｍｍ×Ｈ２ｍｍ）
を浸漬し、６０℃で１日放置した後、試験前後のウレタ
ン片の重量変化、体積変化を測定し、ワイヤのガイドロ
ーラーに用いられるウレタン部材への加工液組成物の適
合性を調べた。結果を表３に示す。表３中、＋は試験前
の重量、体積各々に対する増加を示す。なお、表３中、
重量変化率及び体積変化率の値が小さいほど、加工液組
成物のウレタン部材への影響が少なく、ウレタン部材へ
の適合性が高いことを示す。3. Weight change rate and volume change rate Using the working fluid composition for wire saws obtained in the above Examples and Comparative Examples, working fluid 100 cc in a 200 cc beaker.
And urethane pieces without hollow holes (W20mm x D50mm x H2mm, manufactured by Japan Test Panel Osaka Co., Ltd.)
Was immersed and left at 60 ° C. for 1 day, and the weight change and volume change of the urethane pieces before and after the test were measured, and the suitability of the working liquid composition to the urethane member used for the wire guide roller was examined. Table 3 shows the results. In Table 3, + indicates an increase in each of the weight and the volume before the test. In Table 3,
The smaller the values of the weight change rate and the volume change rate, the smaller the influence of the working liquid composition on the urethane member, and the higher the compatibility with the urethane member.
【００４１】[0041]
【表３】 [Table 3]
【００４２】表３に示すように、比較例３の加工液組成
物を用いた場合、重量変化率及び体積変化率が約５０％
であるのに対し、実施例１〜３の加工液組成物を用いた
場合には、重量変化率及び体積変化率がほぼ２０％以下
であることから、実施例１〜３の加工液組成物を用いた
場合、ウレタン部材への影響が少なく、ウレタン部材へ
の適合性が高いことが示された。As shown in Table 3, when the working fluid composition of Comparative Example 3 was used, the weight change rate and the volume change rate were about 50%.
On the other hand, when the working fluid compositions of Examples 1 to 3 are used, since the weight change rate and the volume change rate are almost 20% or less, the working fluid compositions of Examples 1 to 3 are used. In the case of using, it was shown that the influence on the urethane member was small and the compatibility with the urethane member was high.
【００４３】４．洗浄性 前記実施例及び比較例で得られたワイヤソー用加工液組
成物を用い、ワイヤソーによりインゴットを切断したと
きに得られたスライス品を水で洗浄することを想定し
て、本発明の加工液組成物の水への溶解状態を洗浄性の
指標として目視により観察した。その結果を表４に示
す。4. Detergency Using the working fluid composition for wire saws obtained in the above Examples and Comparative Examples, assuming that the sliced product obtained when cutting an ingot with a wire saw is washed with water, the working fluid of the present invention. The state of dissolution of the composition in water was visually observed as an index of detergency. Table 4 shows the results.
【００４４】[0044]
【表４】 [Table 4]
【００４５】表４に示すように、比較例４の従来の鉱物
油系加工液を用いた場合、加工液が白濁したことと比較
して、本発明の実施例１〜３の加工液を用いた場合、加
工液が均一透明になったことから、実施例１〜３の加工
液を用いた場合、切断した後のスライス品の洗浄が容易
であることが示された。As shown in Table 4, when the conventional mineral oil-based processing liquid of Comparative Example 4 was used, the processing liquids of Examples 1 to 3 of the present invention were used in comparison with the fact that the processing liquid became cloudy. In this case, since the working fluid became uniformly transparent, it was shown that when the working fluids of Examples 1 to 3 were used, washing of the sliced product after cutting was easy.
【００４６】[0046]
【発明の効果】本発明のワイヤソー用加工液、加工液組
成物及びインゴットの切断方法によれば、ワイヤソーを
用いてインゴットを切断した場合、切断した後のスライ
ス品の水洗浄が可能で、ワイヤソー中のウレタン等の部
材への適合性が高く、粘度変化が小さく、切断性能に優
れるという優れた効果を奏する。According to the working fluid for a wire saw, the working fluid composition and the method for cutting an ingot of the present invention, when the ingot is cut using the wire saw, the sliced product after the cutting can be washed with water. It has excellent effects such as high compatibility with members such as urethane in the inside, small change in viscosity, and excellent cutting performance.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｃ０９Ｋ 3/14 ５５０ Ｃ０９Ｋ 3/14 ５５０Ｆ Ｃ１０Ｍ 107/34 Ｃ１０Ｍ 107/34 // Ｃ１０Ｎ 10:04 10:06 10:08 30:02 40:22 ────────────────────────────────────────────────── ─── Continued on the front page (51) Int.Cl. 6 Identification code FI C09K 3/14 550 C09K 3/14 550F C10M 107/34 C10M 107/34 // C10N 10:04 10:06 10:08 30: 02 40:22
Claims (3)
てもよい水素原子又は炭素数１〜２４の炭化水素基を示
し、少なくとも１つは炭化水素基であり、ＥＯはオキシ
エチレン基、ＡＯは炭素数３若しくは４のオキシアルキ
レン基、（ＥＯ） m （ＡＯ）n はｍ個のＥＯ、ｎ個のＡ
Ｏからなるランダム体又はブロック体を示し、ｍ及びｎ
はそれぞれ１〜５０の整数、ｍとｎとの和は４〜１００
の整数、ｎが２以上のときｎ個のＡＯは同一でも異なっ
ていてもよい）で表わされるポリエーテル化合物を含有
してなるワイヤソー用加工液。1. Formula (I): R1O (EO)m(AO)nRTwo (I) (wherein, R1And RTwoAre the same or different
A hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms
And at least one is a hydrocarbon group and EO is an oxy
An ethylene group and AO are oxyalkyl having 3 or 4 carbon atoms.
Len group, (EO) m(AO)nIs m EOs, n A
A random body or a block body consisting of O, m and n
Is an integer of 1 to 50, and the sum of m and n is 4 to 100
Where n is 2 or more, n AOs are the same or different
May be included)
Processing fluid for wire saws.
てなるワイヤソー用加工液組成物。2. A working fluid composition for a wire saw, comprising the working fluid according to claim 1 and abrasive grains.
液組成物を用いてインゴットを切断することを特徴とす
るインゴットの切断方法。3. A method for cutting an ingot, comprising using the working fluid composition for a wire saw according to claim 1 or 2 to cut the ingot.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9208098A JP4237291B2 (en) | 1998-04-03 | 1998-04-03 | Cutting fluid for wire saw |
| GB0024411A GB2351294B (en) | 1998-04-03 | 1999-04-02 | Cutting oil composition |
| US09/647,592 US6383991B1 (en) | 1998-04-03 | 1999-04-02 | Cutting oil composition |
| DE19983092T DE19983092B4 (en) | 1998-04-03 | 1999-04-02 | Cutting oil, cutting oil composition and their use |
| PCT/JP1999/001737 WO1999051711A1 (en) | 1998-04-03 | 1999-04-02 | Cutting oil composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9208098A JP4237291B2 (en) | 1998-04-03 | 1998-04-03 | Cutting fluid for wire saw |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11286693A true JPH11286693A (en) | 1999-10-19 |
| JP4237291B2 JP4237291B2 (en) | 2009-03-11 |
Family
ID=14044478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9208098A Expired - Lifetime JP4237291B2 (en) | 1998-04-03 | 1998-04-03 | Cutting fluid for wire saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4237291B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100135225A (en) | 2008-04-30 | 2010-12-24 | 팰리스 카가쿠 가부시기가이샤 | Water-soluble cutting fluid composition, water-soluble cutting fluid, and method of cutting with the water-soluble cutting fluid |
| JP2013023662A (en) * | 2011-07-25 | 2013-02-04 | Nof Corp | Aqueous cutting liquid and aqueous cutting agent |
| JP2013534262A (en) * | 2010-08-03 | 2013-09-02 | ビーエーエスエフ ソシエタス・ヨーロピア | Processing fluid for abrasives |
| JP2015505574A (en) * | 2012-02-01 | 2015-02-23 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | Cooling and / or lubricating liquid for wafer manufacture |
| CN112048358A (en) * | 2020-09-30 | 2020-12-08 | 武汉市华中特种油有限公司 | Formula of fully-synthesized magnesium alloy cutting fluid |
-
1998
- 1998-04-03 JP JP9208098A patent/JP4237291B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100135225A (en) | 2008-04-30 | 2010-12-24 | 팰리스 카가쿠 가부시기가이샤 | Water-soluble cutting fluid composition, water-soluble cutting fluid, and method of cutting with the water-soluble cutting fluid |
| JP2013534262A (en) * | 2010-08-03 | 2013-09-02 | ビーエーエスエフ ソシエタス・ヨーロピア | Processing fluid for abrasives |
| JP2013023662A (en) * | 2011-07-25 | 2013-02-04 | Nof Corp | Aqueous cutting liquid and aqueous cutting agent |
| JP2015505574A (en) * | 2012-02-01 | 2015-02-23 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | Cooling and / or lubricating liquid for wafer manufacture |
| CN112048358A (en) * | 2020-09-30 | 2020-12-08 | 武汉市华中特种油有限公司 | Formula of fully-synthesized magnesium alloy cutting fluid |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4237291B2 (en) | 2009-03-11 |
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