JPH11284047A - Loading device, robot device and loading method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a loading device for satisfactorily loading a work inside a water tank and a robot device which is capable of satisfactorily carrying the work in a wet state. SOLUTION: This loading device 20 is provided with a vertical driving mechanism 23, performs the elevation drive of a cassette 40 housing a work 35 which is submerged in a water tank 21 by the vertical driving mechanism 23 and exposes the work 35 to a water surface one by one. In this case, a nozzle body 50 for supplying a load on the depth side on the housing direction of the work 35 by jetting water is positioned above the cassette 40, and the balance of the supporting state of the work 35 at the time of the elevation drive of the cassette 40 is adjusted by jetting the water from the nozzle body 50.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a loading apparatus for taking out a work housed in a cassette and immersed in a water tank, and a robot apparatus for supplying the work to the loading apparatus and other processing apparatuses.

[0002]

2. Description of the Related Art For example, in a manufacturing process of a semiconductor device or a liquid crystal display device, there are a film forming process and a photo process for forming a circuit pattern on a semiconductor wafer or a liquid crystal glass substrate as a work. In these processes,
The processing and cleaning of the work are repeatedly performed to remove particles adhering to the surface.

[0003] In this case, if the work is dried particularly in the cleaning process after polishing or using a polishing material of CMP, the abrasive adheres to the surface of the work and becomes difficult to peel off, so that the work is not dried in the water tank. A submerged loading device may be used.

[0004] The loading device is provided with a cassette capable of storing a plurality of works horizontally, and this is linked with a supporting member. This cassette has a substantially semicircular ring-shaped work storage portion, and is configured to be able to take out and store a work from an open portion on the opposite side of the semicircle.

When taking out a work, the hand of the robot device is inserted into the work storage section from the lower surface side of the work, the hand is driven up to contact the work, and then lifted upward and held by the hand. And take out the work.

That is, when the work is taken out by the hand of the robot apparatus, the lower surface of the work comes into contact with the hand, and the upper surface is not locked at all. In addition, the work can be lifted with a sufficient space provided between adjacent work storage portions.

The supporting member is mounted on an elevator mechanism having a motor and a ball screw, and is driven up and down by driving the supporting mechanism. When actually removing the workpieces, the submerged workpieces stored in the cassette are exposed one by one from the surface of the water tank, and the robot is driven for the exposed workpieces to remove the workpieces one by one. Is going.

[0008] The hand of the robot device for taking out the work is a vacuum backside suction method, a method of mounting on a ceramic material, or a mechanical chuck method of chucking the work by providing a chuck portion made of Teflon material. And so on.

[0009]

When a submerged cassette is driven upward to expose a work on the water surface, there is a problem that the work stored in the cassette is inclined and unstable due to water pressure or the like. there were. That is, as described above, the work is stored in the work storage portion only by contacting the lower surface, and the open side is not supported at all in the substantially semicircular work storage portion. Further, each work storage section has a predetermined interval. Under these conditions, for example, when the cassette is driven up, there is a problem that the cantilevered work is inclined by the water pressure applied to the work.

If such a work inclination occurs in the work storage section, the work cannot be taken out properly. Therefore, the work needs to be in a stable state without tilting.

Further, in the case of a back-side suction type hand or a top-up type hand using vacuum, there is a problem in that particles and the like are transferred due to surface contact with the back side of the work.

In addition, since the guide for preventing the work from being displaced is not provided in the overlaid system, when a water film is formed on the hand, the work slips due to the water film, whereby the work is positioned on the hand. There are problems such as misalignment and poor holding. For this reason, the work cannot be transported when wet.

Further, in the case of the mechanical chuck system, there is a problem that the thickness of the hand is increased due to the provision of the chucking mechanism, and it is difficult to take out the work from the work storage section having a narrow pitch.

SUMMARY OF THE INVENTION The present invention has been made based on the above circumstances, and it is an object of the present invention to provide a loading device capable of favorably loading a work in a water tank and a robot device capable of favorably transferring a work in a wet state. What you want to do.

[0015]

According to a first aspect of the present invention, there is provided an up-down drive mechanism for raising and lowering a cassette for storing a work submerged in a water tank by the up-down drive mechanism. In the loading device capable of exposing the work to the water surface one by one by performing the above, a nozzle body that applies a load to a depth side in a work storing direction by ejecting water is positioned above the cassette. A loading device characterized in that the balance of the support state of the work at the time of driving the cassette upward is adjusted by the ejection of water from the nozzle body.

According to a second aspect of the present invention, in a robot apparatus for supplying and unloading a work, an apparatus main body having a drive source therein and arm members connected to each other through a plurality of joints are provided. An arm body that is configured to freely expand, contract, and pivot, and has a hand that holds a work on a distal end side, and the hand includes:
A robot apparatus comprising: a tapered portion that abuts on an outer peripheral portion of a lower surface of a work; and a position restricting portion that prevents the work from being displaced.

According to a third aspect of the present invention, the hand includes:
3. The robot device according to claim 2, wherein a drain hole is formed in a portion located on the lower surface side when the work is held.

According to a fourth aspect of the present invention, there is provided a loading method for loading a workpiece contained in a cassette submerged in a water tank, wherein the cassette raising step of driving the cassette upward and synchronizing with the cassette raising step. A water ejecting step of applying a load by ejecting water to a depth side in a storage direction of the work accommodated in the cassette, and an ejection step of ejecting the work exposed on the water surface of the water tank. This is a characteristic loading method.

According to the first aspect of the present invention, the nozzle body for jetting water is positioned above the cassette, and the jet of water from the nozzle body applies a load to the depth side in the storage direction of the work stored in the cassette. As a result, the balance of the work supporting state at the time of driving the cassette upward is adjusted, so that the work stored in the cassette does not tilt, whereby the hand of the robot device can be inserted well. For this reason, it is possible to always maintain the work in good condition.

In particular, in a robot apparatus having a hand that holds the work in line contact with the work, the state of the work is stabilized, and the holding state by the hand can be improved. According to the second aspect of the present invention, since the hand of the arm body has the tapered portion that comes into contact with the outer peripheral portion of the lower surface of the work and the position restricting portion that prevents the work from being displaced, the position restricting portion allows the hand to move the work. Since the workpiece can be reliably held without causing displacement and can be transported with high accuracy, and the workpiece abuts on the tapered portion at the outer peripheral portion of the lower surface, line contact is performed instead of surface contact. Therefore, transfer of contaminants such as particles hardly occurs from the tapered portion.

According to the third aspect of the present invention, since a drain hole is formed in the portion of the hand which is located on the lower surface side when the work is held, a water film is formed between the hand and the work. The drainability is improved without any problem. Therefore, the work held by the hand does not slip.

According to the fourth aspect of the present invention, the cassette ascending step of ascending and driving the cassette, and in synchronization with the cassette ascending step, water is ejected to the depth side in the storage direction of the work stored in the cassette to reduce the load. Since the method includes an additional water jetting step and an extraction step for extracting the work exposed on the water surface of the water tank, the work stored in the cassette submerged in the water tank is stably and favorably loaded. be able to.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. The loading device 20 of the present invention shown in FIG. The water tank 21 is, for example, a bottomed cylindrical body having a square cross section, and a drain pipe for discharging water stored therein is provided at the bottom of the water tank 21.
A water supply conduit is provided at an appropriate height.

The water tank 21 is mounted on a base 22. The base 22 further includes a vertical drive mechanism 23.
Is attached. The vertical drive mechanism 23 is for performing vertical drive of a support mechanism 30 described later, and a motor 24 is attached to the base 22 as a drive source.
Further, a driving pulley 25 is attached to the motor 24, and a belt 26 is stretched over the driving pulley 25 to transmit a driving force to a driven pulley 27.

The driven pulley 27 is attached to the tip of a ball screw 28.
Is rotated, the ball screw 28 is rotated accordingly, and the holder 29 screwed to the ball screw 28 is rotated.
Can be driven up and down.

The holder 29 is mounted on a mounting plate 31 serving as a support mechanism 30. This mounting plate 31 includes:
A pair of side plates 32 are attached to both ends, and an upper surface plate 33 is attached to an appropriate portion at the upper end of the pair of side plates 32 so as to bridge between the side plates 32.

A guide mechanism 34 for guiding the support mechanism 30 in the vertical direction is provided at both ends of the mounting plate 31, so that a stable slide drive can be realized. ing. The arrangement and mounting position of the guide mechanism 34 are not particularly limited as long as the support mechanism 30 can stably slide in the vertical direction.

A cassette holder 36 for holding a cassette 40 for accommodating a work 35 is attached to the upper plate 33. The cassette holding portion 36 is provided with a hanging plate 3 which is provided to be hung downward from both ends of the upper surface plate 33.
7 are provided, and a cassette mounting plate 38 is provided at the lower end side of the hanging plate 37 so as to bridge between them in a bridging manner. That is, the pair of hanging plates 37 and the cassette mounting plate 38 form a swing shape.

A cassette 40 for accommodating the work 35 is mounted and fixed to the cassette mounting plate 38. The cassette 40 is formed in a substantially semicircular ring shape when viewed from above, and has a configuration in which one side is opened so that the work 35 can be taken out. Further, in order to stabilize the support condition of the work 35, the ring shape is slightly extended in parallel toward the open side from the substantially semicircular shape.

For this reason, the cassette 40 is in a state where substantially half of the cylindrical shape is open, and the upper and lower surfaces thereof are also open. The cassette 40 is provided with a plurality of work storage sections 41 corresponding to the number of stored work 35 in order to store a plurality of works 35 in a stacked manner with a predetermined gap in the vertical direction. .

Here, the work storage portion 41 is different from the conventional work storage portion 41 in that, for example, a plurality of locking portions 42 having a gentle cross section and a substantially waveform curve are arranged in tandem. At the same time, the size of the work storage section 41 is
The work 35 is formed slightly larger than the work 35 to be stored (however, the workability of the work 35 is not deteriorated).

Therefore, when the work 35 is stored, the work 35 is inserted and stored in a recessed portion of the locking portion 42 which is formed in a substantially waveform. The work 35 is held at an inclined portion having a substantially waveform. Therefore, the work storage unit 4
In FIG. 1, the workpiece 35 is held by line contact.

When the work 35 is taken out by the hand of the robot device 60 described later, the hand is inserted from below the work 35, the hand is brought into contact with the work 35, lifted, and the work 35 is lifted slightly. Pull out the hand in the state. As a result, there is a slight gap between the work 35 and the work storage portion 41, and the work 35 is brought into a non-contact state.
5 makes it possible to improve the extraction condition.

A nozzle body 50 is provided above the cassette 40. The nozzle body 50 jets water in order to balance the work 35 accommodated in the work accommodating portion 41 without tilting the work 35, and the nozzle body 50 is at a position opposite to the open side of the cassette 40 with respect to the work 35 (ie, ,
It is arranged so that water may be ejected to the depth side in the storage direction of the work 35).

The nozzle body is mounted on the upper plate 33 and connected to a supply source provided outside by piping or the like. Also, the cassette 40
The height of the nozzle body 50 from the ejection opening is adjusted so that only the work 35 located at the top of the nozzle body 50 is supplied with appropriate momentum water and the rest of the work 35 is not disturbed.

A robot device 60 is provided to take out the work 35 from the loading device 20 and transport it to another external device. As shown in FIG. 2, the robot device 60 is provided with a device main body 62 fixed to a base 61. This device body 62
Has a drive source 63 for rotating and driving a base arm 81 to be described later, and a cylindrical housing 64 containing the drive source 63 is provided inside the apparatus main body 62 together with the drive source 63. Have been. Further, on the lower surface side of the housing 64, a turning shaft 65 extending downward is provided. A driven pulley 66 is attached to the turning shaft 65. With respect to the driven pulley 66, a driving source 67 for rotating the housing 64 and a driving pulley 6 attached to the driving source 67 are provided.
8 are arranged. A belt 69 is stretched between the driven pulley 66 and the driving pulley 68 to enable the housing 64 to rotate.

The drive source 67 is attached to a plate member 70, and a predetermined portion of the plate member 70 is screwed to a ball screw 71. Thereby, when the ball screw 71 is rotationally driven, the plate member 70 and the housing 64 provided so that the height relative to the plate member 70 does not change can be driven in the vertical direction. It has become.

A driving source is provided at the lower end of the ball screw 71 to rotate the ball screw 71. A drive shaft 72 directly connected to a drive source 63 is provided to protrude upward from an upper opening of the apparatus main body 62. A cover 73 that is a cover that covers the apparatus main body 62 is integrally attached to the upper end of the drive shaft 72. The cover 73 is attached to the housing 64 of the apparatus main body 62.
It is formed to have a larger outer diameter, and a cylindrical skirt portion 73a is integrally formed downward at an outer peripheral end portion of the cover 73 so as to protrude downward. The upper part of the outer peripheral surface of the apparatus main body 62 is covered and hidden by the skirt portion 73a and the cover 73.

The housing 64 is provided with a drainage layer 74 made of a resin or the like having excellent chemical resistance. The drainage layer 74 forms an approximately labyrinth shape by combining the outer wall 74a provided on the outer peripheral side with respect to the skirt portion 73a and the inner peripheral side of the skirt portion 73a to form a treatment liquid on the inner side. It is configured to be surrounded by an inner wall 74b for preventing intrusion of water.

One or a plurality of drain holes 75 are provided at the bottom of the drain tank 21 so that the processing liquid or the like accumulated at the bottom of the drain layer 74 is discharged to the outside.
The drive shaft 72 corresponding to the rotation center of the cover 73 is connected to an arm 80 provided so as to cooperate therewith. That is, the base arm 81 is integrally connected to the drive shaft 72, and therefore, when the drive shaft 72 is driven to rotate, the base arm 81 is also driven to rotate by the same angle.

As shown in FIG. 3, the arm body 80 holds a base arm 81, an intermediate arm 82, a distal arm 83, and a work 35 attached to the distal arm 83. It is composed of a hand 84.

On the upper surface of the housing 64, there is a cylindrical shaft 85 formed integrally with the housing 64. A first pulley 86 is attached to the cylindrical shaft 85, and these are connected to each other. Both are configured to be provided inside the base arm 81. The cylindrical shaft 85 has a hollow center at the center, and the drive shaft 72 is inserted therein.

Inside the arm 81 at the base end, the second pulley 8 on which the belt 87 is stretched together with the first pulley 86 is provided.
8 is provided on the opposite side of the first pulley 86. Second
Of the drive shaft 8 integrated with the intermediate arm 82
9, when a driving force is transmitted to the second pulley 88, it is transmitted as a rotational driving force of the intermediate arm 82.

A cylindrical shaft 90 provided integrally with the base arm 81 is provided so as to cover the drive shaft 89, and a third pulley 91 is attached to the upper end thereof. The third pulley 91 is located inside the intermediate arm 82, and stretches the belt 93 with the fourth pulley 92.

The fourth pulley 92 is attached to the tip of a drive shaft 94 provided integrally with the arm 83 at the tip, and the driving force is transmitted to the fourth pulley 92 so that the arm at the tip is It is a mechanism that can rotate the 83.

With the structure of the arm 80 as described above,
When the drive source 63 is operated, the arm body 80 can be extended and contracted as shown by a two-dot chain line in FIG. The hand 84 attached to the arm 83 at the end has the configuration shown in FIG.

The hand 84 has a handle 100 attached to the arm 83 at the tip, and a holding portion 101 connected to the handle 100. The holding unit 101
It is formed so as to be thinner than the handle part 100,
Further, in order to stabilize the holding of the work 35, the work 35 is formed wider than the handle 100. The holding unit 10
1. Work locking members 102 made of PVC (vinyl chloride) or CTFE (fluororesin)
A pin member 103, which is also made of PVC or CTFE, is fixed by caulking to a hole 104 formed in the holding portion 101 while applying heat thereto.

As shown in FIG. 5, the work locking members 102 and 103 are position restricting portions 105 having a predetermined height for locking the outer periphery of the work 35 so that the work 35 is not displaced.
And the center portion of the holding portion 101 with respect to the position regulating portion 105 (the center side of the work 35 when the work 35 is locked).
And a tapered portion 106 that is formed so as to be inclined so that the height becomes lower. Thus, when the workpiece 35 is held by the workpiece locking members 102 and 103, the workpiece 35 is held in line contact with the outer peripheral edge on the lower surface side of the workpiece 35 and the tapered portion 106, and the outer circumference of the workpiece 35 is positioned. It is configured to be locked by the inner peripheral wall of the regulating portion 105.

The work locking members 102 and 103 are provided over the entire width of the hand 84. A drain hole 107 for improving drainage is formed at a predetermined position of the holding portion 101. The drain hole 107 is formed in order to improve the drainability of the holding unit 101, and when the work 35 is held thereby,
This is to prevent the displacement due to the water film.

The operation of taking out the work 35 stored in the cassette 40 submerged in the water tank 21 using the loading device 20 and the robot device 60 having the above-described configuration will be described below.

In order to take out the work 35 existing in the work storage portion 41 of the cassette 40, it is necessary to drive the cassette 40 upward to expose one by one above the water surface. Therefore, the cassette 40 is raised by operating the vertical drive mechanism 23, but the water pressure is applied to the work 35 stored in the submerged cassette 40 at the time of the upward drive and acts on the open side of the cassette 40. The work 35 may be inclined by the water pressure.

Therefore, water is ejected from the nozzle body 50, and a load due to water pressure is applied to the work 35 on the side opposite to the side where the cassette 40 is opened (ie, the depth side in the storage direction of the work 35), and this portion rises. To prevent

As a result, a load against the work 35 is applied to the work storage part 41, so that even if the cassette 40 is driven up, it is possible to prevent the work 35 from tilting due to water pressure.

In this case, the flow rate of the water is adjusted so that the work 35 held by the hand 84 is well balanced. The flow rate of the water is controlled, for example, by adjusting the flow rate of the water jetted from the nozzle body 50 so as to decrease the flow rate as the work 35 is exposed on the water surface. The jetting of water from the nozzle body 50 is completely stopped.

After that, the robot device 60 is driven to insert the hand 84 of the arm body 80 into the work storage section 41. Then, by raising the hand 84, the work 35 is lifted from below, thereby holding the work 35 to the work locking members 102, 10 of the hand 84.
3 can be held.

Thereafter, the arm body 80 is extended and retracted, and the work 35 is rotated by the turning movement of the arm body 80 and the like.
To an appropriate position. When the next work 35 is to be transported, the cassette 40 is driven upward by operating the vertical drive mechanism 23 while ejecting water from the nozzle body 50 in the same manner, so that the work 35 located at the highest position is placed on the water surface. Make it exposed. Hereafter, if this operation is repeated,
The loading of the work 35 stored in the cassette 40 can be performed one after another.

According to the loading device 20 having such a configuration, when the vertical drive mechanism 23 is operated to drive the support mechanism 30 up and down, the cassette 40 submerged in the water tank 21 is
The hydraulic pressure is applied to the work 35 stored in the work storage part 41 of the work
The force for tilting 5 acts.

However, water is ejected from the nozzle body 50, and the ejection of the water causes the work storage portion 4 of the work 35 to be ejected.
When a load is applied to the depth side of the work 1, the work 35 is pressed against the work storage portion 41, thereby preventing the work 35 from tilting due to water pressure.

For this reason, the hand 8 to the work storage section 41
The work 35 can be held by the hand 84 with high accuracy without preventing the insertion of the work 4. Such a nozzle body 50
As a result, the balance of the work 35 is maintained and the inclination of the work 35 can be prevented, so that the transfer state of the work 35 by the hand 84 can be improved.

According to the robot device 60 having the above-described configuration, the hand 84 of the arm body 80 is
02 and 103 are attached.
Since the position regulation portion 105 is formed in each of the members 2 and 103, even when the robot device 60 is operated to transfer the work 35 by the hand 84, the position regulation portion 105 can prevent the work 35 from being displaced. it can.

At the same time, a tapered portion 106 is formed,
Since the work 35 is held in contact with the tapered portion 106 at the outer peripheral portion on the lower surface side, the work 35 is held on the lower surface surface not by surface contact but by line contact.

Therefore, even when particles adhere to the tapered portion 106, transfer of the particles from the tapered portion 106 to the lower surface of the work 35 can be prevented. Thereby, it is possible to prevent the processing of the work 35 from being adversely affected.

Further, since the holding portion 101 of the hand 84 is formed with the drain hole 107, the drainage between the holding portion 101 and the lower surface of the work 35 is improved, so that a water film is formed between the holding portion 101 and the lower surface of the work 35. Formation can be prevented. For this reason, it is possible to prevent the occurrence of slip between the work 35 and the hand 84 and deterioration of the holding state of the work 35.

Although the embodiment of the present invention has been described above, the present invention can be variously modified in addition to this. This is described below. In the above-described embodiment, the configuration in which water is ejected from the nozzle body 50 to the work 35 stored in the cassette 40 submerged in the water tank 21 has been described, but water is ejected to the object of the present invention. The configuration for maintaining the balance is also applicable to devices other than the loading device 20.

The work locking members 102 and 103 are
Although it is provided over the entire width of the hand 84,
For example, the position regulating unit 105 may have a configuration in which pin-shaped members are arranged at appropriate intervals, thereby regulating the position of the work 35. In addition, various modifications can be made without departing from the scope of the present invention.

[0066]

As described above, according to the first aspect of the present invention, the nozzle body for jetting water is located above the cassette, and the jetting of water from the nozzle body causes the nozzle housed in the cassette to eject water. A load is applied to the depth side in the storage direction,
As a result, the balance of the state of supporting the work when the cassette is raised is adjusted, so that the work accommodated in the cassette does not tilt, thereby making it possible to insert the hand of the robot device satisfactorily. For this reason, it is possible to always maintain the work in good condition.

In particular, in a robot apparatus having a hand that holds a work in line contact with the work, the state of the work is stabilized, and the holding state by the hand can be improved. According to the second aspect of the present invention, since the hand of the arm body has the tapered portion that comes into contact with the outer peripheral portion of the lower surface of the work and the position restricting portion that prevents the work from being displaced, the position restricting portion prevents the work from being moved. Since the workpiece can be reliably held without causing a positional deviation and can be transported with high accuracy, and the workpiece comes into contact with the tapered portion at the outer peripheral portion of the lower surface, line contact is performed instead of surface contact. Therefore, transfer of contaminants such as particles hardly occurs from the tapered portion.

According to the third aspect of the present invention, since a drain hole is formed in the portion of the hand which is located on the lower surface side when the work is held, a water film is formed between the hand and the work. Drainability improves without draining. Therefore, the work held by the hand does not slip.

According to the fourth aspect of the present invention, the cassette ascending step of ascending and driving the cassette, and in synchronization with the cassette ascending step, water is ejected to a depth side in the storage direction of the work stored in the cassette to load the cassette. And a take-out step of taking out the work exposed on the water surface of the water tank, thereby stably and favorably loading the work stored in the cassette submerged in the water tank. It can be carried out.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration of a loading device according to an embodiment of the present invention.

FIG. 2 is a side sectional view showing the configuration of the robot apparatus according to the embodiment.

FIG. 3 is a plan view showing the configuration of the robot device according to the embodiment.

4A and 4B are diagrams showing a configuration of a hand of the robot device according to the embodiment, wherein FIG. 4A is a plan view and FIG. 4B is a side view.

FIG. 5 is a side sectional view showing a configuration of a work locking member of the hand according to the embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 20 ... Loading device 21 ... Water tank 23 ... Vertical drive mechanism 30 ... Support mechanism 31 ... Mounting plate 33 ... Top plate 34 ... Guide mechanism 35 ... Work 36 ... Cassette holding part 40 ... Cassette 41 ... Work storage part 50 ... Nozzle body 60 ... Robot device 62 ... Device body 64 ... Housing 72 ... Drive shaft 73 ... Cover body 80 ... Arm body 84 ... Hand 101 ... Holding part 102, 103 ... Work locking member 105 ... Position regulating part 106 ... Tapered part 107 ... Drain hole

Claims (4)

[Claims] 1. A loading device having an up-down drive mechanism capable of driving a cassette for storing a work submerged in a water tank by the up-down drive mechanism to expose the works one by one to a water surface. Above the cassette, a nozzle body that applies a load to the depth side in the work storage direction by ejecting water is positioned, and the ejection of water from the nozzle body balances the work support state during cassette ascent drive. A loading device for adjusting the load. 2. A robot apparatus for supplying and unloading a work, wherein a main body having a driving source therein and arm members are respectively connected through a plurality of joints, and the driving source can freely expand and contract and rotate. And an arm body provided with a hand for holding the work on the distal end side, wherein the hand has a tapered portion that contacts an outer peripheral portion of the lower surface of the work, and a position that prevents the work from being displaced. A robot device comprising: a regulating unit; 3. The robot apparatus according to claim 2, wherein a drain hole is formed in a portion of the hand that is located on a lower surface side when the work is held. 4. A loading method for loading a work stored in a cassette submerged in a water tank, wherein the cassette is lifted and driven, and the cassette is stored in the cassette in synchronization with the cassette raising step. A water ejection step of applying a load by ejecting water to a depth side in a storage direction of the work, and an extraction step of taking out the work exposed on the water surface of the water tank.