JPH11283228A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
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- JPH11283228A JPH11283228A JP7984698A JP7984698A JPH11283228A JP H11283228 A JPH11283228 A JP H11283228A JP 7984698 A JP7984698 A JP 7984698A JP 7984698 A JP7984698 A JP 7984698A JP H11283228 A JPH11283228 A JP H11283228A
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- film
- magnetic
- recording medium
- magnetic film
- plane
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁気記録媒体に関
するものであり、特に、ノイズ特性に優れた磁気記録媒
体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium, and more particularly to a magnetic recording medium having excellent noise characteristics.
【０００２】[0002]
【従来の技術】現在市販されている磁気記録媒体は、磁
性膜内の磁化容易軸が主に基板に対し水平に配向した面
内磁気記録媒体がほとんどである。このような面内磁気
記録媒体では、高記録密度化するとビット体積が小さく
なりすぎ、熱揺らぎ効果等により再生特性が悪化する可
能性がある。また、高記録密度化した際に、磁化反転遷
移領域の増大等により媒体ノイズが増加することがある
ことも知られている。これに対し、磁性膜内の磁化容易
軸が基板に対し垂直に配向した、いわゆる垂直磁気記録
媒体は、高記録密度化した場合でも、急峻な磁化転移が
形成され、記録密度が増大していくにつれ減磁界が小さ
くなり安定化するため低ノイズ化が可能であり、しかも
比較的ビット体積が大きくても高記録密度化が可能であ
ることから、近年大きな注目を集めている。しかしなが
ら垂直磁気記録媒体は、再生波形が面内磁気記録媒体と
異なる、すなわち孤立波形が単峰型とならずダイパルス
波形を含むものとなるため、面内磁気記録媒体を使用す
る際に一般的に用いられている信号処理方法をそのまま
適用するのは難しい。このため、面内磁性膜と垂直磁性
膜の２つの膜を備え、面内磁気記録媒体に用いられるも
のと同じ信号処理法の使用を可能とした垂直面内複合型
磁気記録媒体が提案されている。2. Description of the Related Art Most magnetic recording media currently on the market are in-plane magnetic recording media in which the axis of easy magnetization in a magnetic film is mainly oriented horizontally to a substrate. In such an in-plane magnetic recording medium, when the recording density is increased, the bit volume becomes too small, and the reproduction characteristics may be deteriorated due to a thermal fluctuation effect or the like. It is also known that when the recording density is increased, medium noise may increase due to an increase in the magnetization reversal transition region and the like. On the other hand, in a so-called perpendicular magnetic recording medium in which the easy axis of magnetization in the magnetic film is oriented perpendicular to the substrate, a steep magnetization transition is formed and the recording density increases even when the recording density is increased. As the demagnetizing field becomes smaller and more stable, noise can be reduced, and high recording density can be achieved even with a relatively large bit volume. However, a perpendicular magnetic recording medium is different from an in-plane magnetic recording medium in that the reproduced waveform is different from the in-plane magnetic recording medium, that is, the isolated waveform is not a single-peak type but includes a dipulse waveform. It is difficult to apply the used signal processing method as it is. For this reason, a perpendicular in-plane composite magnetic recording medium has been proposed which has two films, an in-plane magnetic film and a perpendicular magnetic film, and enables the use of the same signal processing method as that used for the in-plane magnetic recording medium. I have.
【０００３】[0003]
【発明が解決しようとする課題】近年では、磁気記録媒
体の更なる高記録密度化が要望されており、これに伴い
ノイズ特性の向上が要求されてきている。しかしながら
従来の磁気記録媒体では、そのノイズ特性が決して満足
できるものでなく、よりノイズ特性に優れた磁気記録媒
体が要望されていた。本発明は、上記事情に鑑みてなさ
れたもので、面内磁気記録媒体を使用する際に一般的に
用いられている信号処理方法をそのまま適用可能であ
り、しかもノイズ特性に優れた磁気記録媒体を提供する
ことを目的とする。In recent years, there has been a demand for a higher recording density of a magnetic recording medium, and accordingly, an improvement in noise characteristics has been demanded. However, the noise characteristics of conventional magnetic recording media have never been satisfactory, and there has been a demand for magnetic recording media having better noise characteristics. The present invention has been made in view of the above circumstances, and a signal processing method generally used when using a longitudinal magnetic recording medium can be applied as it is, and a magnetic recording medium having excellent noise characteristics. The purpose is to provide.
【０００４】[0004]
【課題を解決するための手段】上記課題は、基板上に、
磁化容易軸が基板に対し面内方向に配向した面内磁性膜
と、磁化容易軸が基板に対し垂直に配向した垂直磁性膜
を備え、面内磁性膜が垂直磁性膜よりも基板側に設けら
れ、面内磁性膜と垂直磁性膜の間に、分離膜が設けら
れ、この分離膜が、Ｔａ、Ｒｅ、ＣｕＴｉ、ＳｉＣ、
Ｗ、ＮｉＰ、Ｚｒ、Ｔｉ、およびＣのうち１種または２
種以上を主成分とするものである磁気記録媒体によって
解決される。分離膜の膜厚は５〜２００Åとするのが好
ましい。また、分離膜と垂直磁性膜の間には、ｈｃｐ構
造を有する非磁性中間層を設けるのが好ましい。また、
面内磁性膜の基板側には、面内磁性膜下地膜を設け、こ
の面内磁性膜下地膜を、Ｃｒ、またはＣｒにＴｉ、Ｍ
ｏ、Ｗ、Ｖのうち１種以上を添加した合金を主成分とす
るものとするのが好ましい。面内磁性膜は、Ｃｒの含有
率が１２〜２５ａｔ％、Ｐｔの含有率が０〜１５ａｔ
％、Ｔａの含有率が１〜１０ａｔ％、Ｚｒ、Ｒｅ、Ｃ
ｕ、およびＶのうち１種以上の含有率が０〜１０ａｔ
％、残部がＣｏからなるＣｏ合金を主成分とするものと
するのが好ましい。Means for Solving the Problems The above object is achieved on a substrate by:
Equipped with an in-plane magnetic film in which the easy axis is oriented in the in-plane direction to the substrate and a perpendicular magnetic film in which the easy axis is oriented perpendicular to the substrate, and the in-plane magnetic film is provided closer to the substrate than the perpendicular magnetic film. A separation film is provided between the in-plane magnetic film and the perpendicular magnetic film, and this separation film is made of Ta, Re, CuTi, SiC,
One or two of W, NiP, Zr, Ti, and C
The problem is solved by a magnetic recording medium having at least one species as a main component. The thickness of the separation membrane is preferably 5 to 200 °. Preferably, a non-magnetic intermediate layer having an hcp structure is provided between the separation film and the perpendicular magnetic film. Also,
An in-plane magnetic film base film is provided on the substrate side of the in-plane magnetic film, and the in-plane magnetic film base film is formed of Cr or Cr on Ti, M
It is preferable to use an alloy containing at least one of o, W, and V as a main component. The in-plane magnetic film has a Cr content of 12 to 25 at% and a Pt content of 0 to 15 at%.
%, Ta content is 1 to 10 at%, Zr, Re, C
The content of at least one of u and V is 0 to 10 at.
%, The balance being preferably a Co alloy composed of Co as the main component.
【０００５】[0005]
【発明の実施の形態】図１は、本発明の磁気記録媒体の
一実施形態を示すもので、ここに示す磁気記録媒体は、
基板１上に、面内磁性膜下地膜２、面内磁性膜３、分離
膜４、非磁性中間層５、垂直磁性膜６、および保護膜７
を順次形成してなるものである。基板１としては、Ｎｉ
Ｐめっき膜を有するアルミニウム合金に加え、ガラス、
セラミックなどからなるものを用いることができる。ま
た、基板１は、その表面にメカニカルテクスチャ処理な
どのテクスチャ処理を施したものとしてもよい。FIG. 1 shows an embodiment of a magnetic recording medium according to the present invention. The magnetic recording medium shown in FIG.
On a substrate 1, an in-plane magnetic film base film 2, an in-plane magnetic film 3, a separation film 4, a non-magnetic intermediate layer 5, a perpendicular magnetic film 6, and a protective film 7
Are sequentially formed. As the substrate 1, Ni
In addition to an aluminum alloy having a P plating film, glass,
A material made of ceramic or the like can be used. Further, the substrate 1 may have a surface that has been subjected to texture processing such as mechanical texture processing.
【０００６】面内磁性膜下地膜２は、面内磁性膜３内の
結晶のｃ軸を面内方向に向けるためのもので、Ｃｒ、ま
たはＣｒにＴｉ、Ｍｏ、Ｗ、Ｖのうち１種以上を添加し
た合金を主成分とするものとするのが、面内磁性膜３の
結晶配向性向上の観点から好ましい。特に、Ｃｒ、Ｃｒ
／Ｔｉ系合金、Ｃｒ／Ｍｏ系合金、Ｃｒ／Ｗ系合金、ま
たはＣｒ／Ｖ系合金を用いるのが好適である。具体例と
しては、Ｔｉ、Ｍｏ、Ｗ、またはＶの含有率が１〜４０
ａｔ％であり、残部がＣｒからなるＣｒ合金を挙げるこ
とができる。面内磁性膜下地膜２の厚さは、１０〜１０
００Åとするのが好ましい。なお本明細書において、主
成分とは当該成分を５０ａｔ％を越えて含むことを指
す。The in-plane magnetic film base film 2 is for orienting the c-axis of the crystal in the in-plane magnetic film 3 in the in-plane direction. Cr or Cr is one of Ti, Mo, W and V. It is preferable to use an alloy to which the above is added as a main component from the viewpoint of improving the crystal orientation of the in-plane magnetic film 3. In particular, Cr, Cr
It is preferable to use a / Ti alloy, a Cr / Mo alloy, a Cr / W alloy, or a Cr / V alloy. As a specific example, the content of Ti, Mo, W, or V is 1 to 40.
at%, with the balance being Cr. The thickness of the in-plane magnetic film base film 2 is 10 to 10
It is preferably set to 00 °. In this specification, the term “main component” indicates that the content of the component exceeds 50 at%.
【０００７】面内磁性膜３は、その磁化容易軸が主に面
内方向を向いたものである。面内磁性膜３の材料の好適
な具体例としては、Ｃｏ／Ｃｒ系、Ｃｏ／Ｃｒ／Ｔａ
系、Ｃｏ／Ｃｒ／Ｐｔ／Ｔａ系、Ｃｏ／Ｃｒ／Ｎｉ／Ｐ
ｔ／Ｔａ系、Ｃｏ／Ｃｒ／Ｐｔ／Ｔａ／Ｚｒ系合金を挙
げることができる。中でも特に、Ｃｒの含有率が１２〜
２５ａｔ％、Ｐｔの含有率が０〜１５ａｔ％、Ｔａの含
有率が１〜１０ａｔ％、Ｚｒ、Ｒｅ、Ｃｕ、およびＶの
うち１種以上の含有率が０〜１０ａｔ％、残部がＣｏか
らなるＣｏ合金を主成分とするものを用いるのが、この
膜内の結晶配向性向上の観点から好ましい。面内磁性膜
３の保磁力Ｈｃは、１５００〜４０００Ｏｅの範囲に設
定するのが好ましい。また面内磁性膜３の残留磁化膜厚
積ＢｒＴは１０〜１００Ｇμｍとするのが好ましい。The in-plane magnetic film 3 has its easy axis of magnetization mainly oriented in the in-plane direction. Preferred specific examples of the material of the in-plane magnetic film 3 include Co / Cr-based and Co / Cr / Ta.
System, Co / Cr / Pt / Ta system, Co / Cr / Ni / P
t / Ta-based and Co / Cr / Pt / Ta / Zr-based alloys. In particular, the content of Cr is 12 to
25 at%, the Pt content is 0 to 15 at%, the Ta content is 1 to 10 at%, the content of at least one of Zr, Re, Cu, and V is 0 to 10 at%, and the balance is Co. It is preferable to use an alloy mainly containing a Co alloy from the viewpoint of improving the crystal orientation in the film. The coercive force Hc of the in-plane magnetic film 3 is preferably set in the range of 1500 to 4000 Oe. Further, the product BrT of the residual magnetization thickness of the in-plane magnetic film 3 is preferably set to 10 to 100 Gm.
【０００８】分離膜４は、垂直磁性膜６の結晶のｃ軸を
基板に対し垂直方向に向け配向性を良好なものとするた
めのもので、分離膜４の材料としては、Ｔａ、Ｒｅ、Ｃ
ｕＴｉ、ＳｉＣ、Ｗ、ＮｉＰ、Ｚｒ、Ｔｉ、およびＣの
うち１種または２種以上を主成分とするものが用いられ
る。なお、ここでいうＣｕＴｉとはＣｕおよびＴｉから
なる合金を指す。またＳｉＣとはＳｉおよびＣからなる
材料を指す。またＮｉＰとはＮｉおよびＰからなる合金
を指す。[0008] The separation film 4 is for orienting the c-axis of the crystal of the perpendicular magnetic film 6 in a direction perpendicular to the substrate to improve the orientation, and the material of the separation film 4 is Ta, Re, C
A material mainly containing one or more of uTi, SiC, W, NiP, Zr, Ti and C is used. Here, CuTi refers to an alloy composed of Cu and Ti. SiC refers to a material composed of Si and C. NiP refers to an alloy composed of Ni and P.
【０００９】分離膜４の厚さは、５〜２００Åとするの
が好ましい。この厚さが５Å未満であると、分離膜４上
に形成される非磁性中間層５が、その成膜時において、
面内方向の結晶配向性をもつ面内磁性膜３の影響を受け
やすくなり、その結晶配向性が乱れ、非磁性中間層５上
に形成される垂直磁性膜６の結晶配向性が乱れ、得られ
る磁気記録媒体の媒体ノイズが増加するおそれがある。
また、分離膜４の厚さが２００Åを越えると、面内磁性
膜３と垂直磁性膜６の離間距離が大きくなり、短記録波
長時における面内磁性膜３の記録特性が低下する。The thickness of the separation membrane 4 is preferably 5 to 200 °. If the thickness is less than 5 °, the non-magnetic intermediate layer 5 formed on the separation film 4
It is easily affected by the in-plane magnetic film 3 having the in-plane crystal orientation, the crystal orientation is disturbed, and the crystal orientation of the perpendicular magnetic film 6 formed on the non-magnetic intermediate layer 5 is disturbed. There is a possibility that the medium noise of the magnetic recording medium is increased.
On the other hand, if the thickness of the separation film 4 exceeds 200 °, the distance between the in-plane magnetic film 3 and the perpendicular magnetic film 6 increases, and the recording characteristics of the in-plane magnetic film 3 at short recording wavelengths deteriorate.
【００１０】非磁性中間層５は、垂直磁性膜６の結晶配
向性をさらに良好なものとするためのもので、ｈｃｐ構
造を有する非磁性材料が用いられ、Ｃｏ／Ｃｒ系、Ｃｏ
／Ｃｒ／Ｔａ系、Ｃｏ／Ｃｒ／Ｐｔ／Ｘ系（Ｘ：Ｔａ、
Ｚｒ、Ｃｕ、Ｒｅのうち１種または２種以上）の合金を
用いるのが好適である。特に、Ｃｒの含有率が２５〜５
０ａｔ％、Ｐｔの含有率が０〜１５ａｔ％、Ｘの含有率
が０〜１０ａｔ％、残部がＣｏからなるＣｏ合金を主成
分とするものを用いるのが好ましい。非磁性中間層５
は、単層構造としてもよいし、上記材料からなる複数の
層が積層した多層構造としてもよい。The non-magnetic intermediate layer 5 is used to further improve the crystal orientation of the perpendicular magnetic film 6, and is made of a non-magnetic material having an hcp structure.
/ Cr / Ta system, Co / Cr / Pt / X system (X: Ta,
It is preferable to use an alloy of one or more of Zr, Cu, and Re). In particular, the content of Cr is 25 to 5
It is preferable to use a material whose main component is a Co alloy having 0 at%, a Pt content of 0 to 15 at%, an X content of 0 to 10 at%, and a balance of Co. Non-magnetic intermediate layer 5
May have a single-layer structure or a multilayer structure in which a plurality of layers made of the above materials are stacked.
【００１１】非磁性中間層５の厚さは、２０〜４００Å
とするのが好ましい。この厚さが２０Å未満であると、
非磁性中間層５上に垂直磁性膜６を形成する際、垂直磁
性膜６の初期成長時においてその結晶配向性が乱れやす
くなり、得られる磁気記録媒体の媒体ノイズが増加する
おそれがある。また、この厚さが４００Åを越えると、
面内磁性膜３と垂直磁性膜６の離間距離が大きくなり、
短記録波長時における面内磁性膜３の記録特性が低下す
る。The thickness of the nonmagnetic intermediate layer 5 is 20 to 400 °
It is preferred that If this thickness is less than 20 mm,
When the perpendicular magnetic film 6 is formed on the nonmagnetic intermediate layer 5, the crystal orientation of the perpendicular magnetic film 6 tends to be disturbed during the initial growth of the perpendicular magnetic film 6, and the medium noise of the obtained magnetic recording medium may increase. Also, if this thickness exceeds 400 mm,
The distance between the in-plane magnetic film 3 and the perpendicular magnetic film 6 increases,
The recording characteristics of the in-plane magnetic film 3 at the short recording wavelength deteriorate.
【００１２】分離膜４と非磁性中間層５の合計膜厚、す
なわち面内磁性膜３と垂直磁性膜６の離間距離は、１０
〜５００Åとするのが好ましい。この厚さが１０Å未満
であると、垂直磁性膜６の結晶配向性が乱れやすくな
り、十分な保磁力が得られなくなるおそれがある。また
この厚さが５００Åを越えると、面内磁性膜３と垂直磁
性膜６の離間距離が大きくなり、短記録波長時における
面内磁性膜３の記録特性が低下する。The total thickness of the separation film 4 and the non-magnetic intermediate layer 5, that is, the distance between the in-plane magnetic film 3 and the perpendicular magnetic film 6, is 10
It is preferable to set it to 500 °. When the thickness is less than 10 °, the crystal orientation of the perpendicular magnetic film 6 tends to be disordered, and a sufficient coercive force may not be obtained. If the thickness exceeds 500 °, the distance between the in-plane magnetic film 3 and the perpendicular magnetic film 6 increases, and the recording characteristics of the in-plane magnetic film 3 at the short recording wavelength deteriorate.
【００１３】垂直磁性膜６は、その磁化容易軸が基板に
対し主に垂直方向に向いたものである。垂直磁性膜６の
材料としては、Ｃｏ／Ｃｒ系、Ｃｏ／Ｃｒ／Ｔａ系、Ｃ
ｏ／Ｃｒ／Ｐｔ／Ｔａ系、Ｃｏ／Ｃｒ／Ｎｉ／Ｐｔ／Ｔ
ａ系、Ｃｏ／Ｃｒ／Ｐｔ／Ｔａ／Ｚｒ系合金を用いるこ
とができる。中でも特に、Ｃｒの含有率が１６〜３０ａ
ｔ％、Ｐｔの含有率が０〜１５ａｔ％、Ｔａの含有率が
２〜１０ａｔ％、Ｚｒの含有率が０〜５ａｔ％、残部が
ＣｏからなるＣｏ合金を主成分とするものを用いるのが
好ましい。垂直磁性膜６の保磁力Ｈｃは、１５００〜４
０００Ｏｅの範囲に設定するのが好ましい。また垂直磁
性膜６の厚さは、１００〜１０００Åとするのが好まし
い。The perpendicular magnetic film 6 has an axis of easy magnetization oriented mainly in a direction perpendicular to the substrate. As the material of the perpendicular magnetic film 6, Co / Cr-based, Co / Cr / Ta-based, C
o / Cr / Pt / Ta system, Co / Cr / Ni / Pt / T
An a-based or Co / Cr / Pt / Ta / Zr-based alloy can be used. In particular, the content of Cr is 16 to 30a.
t%, Pt content is 0 to 15 at%, Ta content is 2 to 10 at%, Zr content is 0 to 5 at%, and the balance is mainly composed of Co alloy. preferable. The coercive force Hc of the perpendicular magnetic film 6 is 1500 to 4
It is preferably set in the range of 000 Oe. Further, the thickness of the perpendicular magnetic film 6 is preferably set to 100 to 1000 °.
【００１４】保護膜７は、カーボンからなるものとする
のが好ましい。保護膜７の厚さは、２０〜１００Åとす
るのが好ましい。また、保護膜７上には、パーフルオロ
ポリエーテル（ＰＦＰＥ）などからなる潤滑膜を形成す
ることも可能である。The protective film 7 is preferably made of carbon. The thickness of the protective film 7 is preferably set to 20 to 100 °. Further, a lubricating film made of perfluoropolyether (PFPE) or the like can be formed on the protective film 7.
【００１５】上記構成の磁気記録媒体を製造するには、
まず、基板１上に、上記非磁性下地膜２ないし垂直磁性
膜６をスパッタリング、真空蒸着、イオンプレーティン
グ、めっきなどの手法により形成する。続いて保護膜７
を、スパッタリング、プラズマＣＶＤ法、イオンビーム
法等により形成する。また、保護膜７上に潤滑膜を形成
するには、ディッピング法などを採用することができ
る。To manufacture the magnetic recording medium having the above structure,
First, the nonmagnetic base film 2 or the perpendicular magnetic film 6 is formed on the substrate 1 by a technique such as sputtering, vacuum deposition, ion plating, and plating. Subsequently, the protective film 7
Is formed by sputtering, a plasma CVD method, an ion beam method, or the like. To form a lubricating film on the protective film 7, a dipping method or the like can be adopted.
【００１６】上記構成の磁気記録媒体にあっては、面内
磁性膜３と垂直磁性膜６の間に分離膜４を設け、この分
離膜４を、Ｔａ、Ｒｅ、ＣｕＴｉ、ＳｉＣ、Ｗ、Ｎｉ
Ｐ、Ｚｒ、Ｔｉ、およびＣのうち１種または２種以上を
主成分とするものとしたので、分離膜４上に形成される
非磁性中間層５および垂直磁性膜６の垂直方向の配向性
を向上させ、垂直磁性膜６の磁気異方性を高め、媒体ノ
イズを低下させることができる。In the magnetic recording medium having the above structure, a separation film 4 is provided between the in-plane magnetic film 3 and the perpendicular magnetic film 6, and this separation film 4 is made of Ta, Re, CuTi, SiC, W, Ni.
Since one or more of P, Zr, Ti, and C are used as main components, the vertical orientation of the nonmagnetic intermediate layer 5 and the perpendicular magnetic film 6 formed on the separation film 4 , The magnetic anisotropy of the perpendicular magnetic film 6 can be increased, and the medium noise can be reduced.
【００１７】分離膜４を、上記材料からなるものとする
ことによって垂直磁性膜６の磁気異方性を向上させるこ
とができる理由は明らかでないが、これには次のような
メカニズムが関与していると考えることができる。すな
わち、分離膜４の材料としてＳｉＣ、ＮｉＰ、Ｃを用い
た場合には、ダングリングボンド、すなわち分離膜４の
表面または内部の格子欠陥の周囲の原子群が担う不飽和
結合が、分離膜４と、その上に形成される非磁性中間層
５の間の結合力を高め、これによって非磁性中間層５の
初期成長時における結晶配向性が向上し、非磁性中間層
５が垂直方向の結晶配向性に優れたものとなり、その結
果、非磁性中間層５上に形成される垂直磁性膜６の磁気
異方性が向上する。また、これらの材料は面内磁性膜３
に対し非エピタキシャル的に成長することが可能な材料
であるため、面内異方性を有する面内磁性膜３の影響に
よる非磁性中間層５および垂直磁性膜６の配向性の乱れ
が起こりにくい。The reason why the magnetic anisotropy of the perpendicular magnetic film 6 can be improved by forming the separation film 4 from the above-mentioned material is not clear, but this involves the following mechanism. Can be considered. That is, when SiC, NiP, and C are used as the material of the separation film 4, dangling bonds, that is, the unsaturated bonds carried by the atoms around the lattice defects on the surface or inside of the separation film 4 become the separation films 4. And the bonding force between the non-magnetic intermediate layer 5 formed thereon is enhanced, whereby the crystal orientation during the initial growth of the non-magnetic intermediate layer 5 is improved. The orientation is excellent, and as a result, the magnetic anisotropy of the perpendicular magnetic film 6 formed on the nonmagnetic intermediate layer 5 is improved. These materials are used for the in-plane magnetic film 3.
Is a material that can be grown non-epitaxially, so that the orientation of the nonmagnetic intermediate layer 5 and the perpendicular magnetic film 6 due to the influence of the in-plane magnetic film 3 having in-plane anisotropy does not easily occur. .
【００１８】また、分離膜４の材料としてＴａ、Ｒｅ、
Ｗ、ＣｕＴｉ、Ｔｉ、Ｚｒを用いた場合には、これら材
料の表面自由エネルギーが非磁性中間層５の構成材料
（例えばＣｏ合金）の表面自由エネルギーより高いた
め、非磁性中間層５がその成膜時において（００２）配
向しやすくなる。これは、分離膜４に接する非磁性中間
層５が（００２）配向した場合に、分離膜４と非磁性中
間層５の界面におけるトータルの表面エネルギーが最小
となるためである。非磁性中間層５の配向性が向上する
ことにより、これに対しエピタキシャル成長する垂直磁
性膜６の配向性も向上する。また、これらの材料は面内
磁性膜３に対し非エピタキシャル的に成長することが可
能な材料であるため、面内異方性を有する面内磁性膜３
の影響による非磁性中間層５および垂直磁性膜６の配向
性の乱れが起こりにくい。以上のようなメカニズムによ
って垂直磁性膜６の磁気異方性が高められていると考え
ることができる。As the material of the separation membrane 4, Ta, Re,
When W, CuTi, Ti, or Zr is used, the surface free energy of these materials is higher than the surface free energy of the constituent material of the nonmagnetic intermediate layer 5 (for example, a Co alloy). The (002) orientation is easy during film formation. This is because the total surface energy at the interface between the separation film 4 and the non-magnetic intermediate layer 5 is minimized when the non-magnetic intermediate layer 5 in contact with the separation film 4 is oriented (002). As the orientation of the non-magnetic intermediate layer 5 is improved, the orientation of the perpendicular magnetic film 6 epitaxially grown is also improved. Since these materials can be grown non-epitaxially on the in-plane magnetic film 3, the in-plane magnetic film 3 having in-plane anisotropy can be used.
Of the non-magnetic intermediate layer 5 and the perpendicular magnetic film 6 is less likely to be disturbed. It can be considered that the magnetic anisotropy of the perpendicular magnetic film 6 is enhanced by the above mechanism.
【００１９】また、面内磁性膜下地膜２を、Ｃｒ、また
はＣｒにＴｉ、Ｍｏ、Ｗ、Ｖのうち１種以上を添加した
合金からなるものとし、面内磁性膜３を、Ｃｒの含有率
が１２〜２５ａｔ％、Ｐｔの含有率が０〜１５ａｔ％、
Ｔａの含有率が１〜１０ａｔ％、Ｚｒ、Ｒｅ、Ｃｕ、お
よびＶのうち１種以上の含有率が０〜１０ａｔ％、残部
がＣｏからなるＣｏ合金を主成分とするものとすること
によって、面内磁性膜３の結晶配向性を良好なものと
し、得られる磁気記録媒体の媒体ノイズを低下させるこ
とができる。The in-plane magnetic film base film 2 is made of Cr or an alloy obtained by adding at least one of Ti, Mo, W, and V to Cr, and the in-plane magnetic film 3 is made of a material containing Cr. Rate is 12 to 25 at%, Pt content is 0 to 15 at%,
The content of Ta is 1 to 10 at%, the content of at least one of Zr, Re, Cu, and V is 0 to 10 at%, and the balance is mainly made of a Co alloy composed of Co. The crystal orientation of the in-plane magnetic film 3 can be improved, and the medium noise of the obtained magnetic recording medium can be reduced.
【００２０】また、この分離膜４と垂直磁性膜６の間
に、ｈｃｐ構造を有する非磁性中間層５を設けることに
よって、同じくｈｃｐ構造を有するＣｏ合金等からなる
垂直磁性膜６の初期成長時の配向性の乱れを防ぎ、その
磁気異方性を高め、媒体ノイズを低下させることができ
る。By providing the nonmagnetic intermediate layer 5 having the hcp structure between the separation film 4 and the perpendicular magnetic film 6, the initial growth of the perpendicular magnetic film 6 also made of a Co alloy or the like having the hcp structure can be performed. Can be prevented, the magnetic anisotropy can be increased, and the medium noise can be reduced.
【００２１】[0021]
【実施例】（試験例１〜１７）表面にＮｉＰめっき膜
（厚さ１５μｍ）を形成したアルミニウム合金基板（直
径８４ｍｍ、厚さ０．８ｍｍ）の表面に、表面平均粗さ
Ｒａが１５Åとなるようにメカニカルテクスチャ加工を
施した後、この基板１をＤＣマグネトロンスパッタ装置
（アネルバ社製３０１０）のチャンバ内にセットした。
チャンバ内を真空到達度２×１０-7Ｐａとなるまで排気
し、基板１を２００℃まで加熱した後、この基板１上
に、面内磁性膜下地膜２（厚さ２００Å）、面内磁性膜
３、分離膜４、Ｃｏ−４０ａｔ％Ｃｒ（Ｃｏ４０Ｃｒ）
からなる非磁性中間層５、Ｃｏ−１８ａｔ％Ｃｒ−６ａ
ｔ％Ｐｔ−３ａｔ％Ｔａ（Ｃｏ１８Ｃｒ６Ｐｔ３Ｔａ）
からなる垂直磁性膜６を順次スパッタリングにより形成
した。垂直磁性膜６上には、引続き、厚さ１００Åのカ
ーボン保護膜を形成し、次いで、このカーボン保護膜上
に潤滑剤を塗布し、ＰＦＰＥからなる潤滑膜（厚さ２０
Å）を形成し、磁気記録媒体を得た。EXAMPLES (Test Examples 1 to 17) The average surface roughness Ra is 15 ° on the surface of an aluminum alloy substrate (diameter 84 mm, thickness 0.8 mm) having a NiP plating film (thickness 15 μm) formed on the surface. After mechanical texture processing as described above, the substrate 1 was set in a chamber of a DC magnetron sputtering apparatus (3010 manufactured by Anelva).
The chamber was evacuated to a vacuum attainment of 2 × 10 −7 Pa, and the substrate 1 was heated to 200 ° C., and then an in-plane magnetic film base film 2 (thickness: 200 °) was formed on the substrate 1. Membrane 3, Separation Membrane 4, Co-40 at% Cr (Co40Cr)
Non-magnetic intermediate layer 5, made of Co-18 at% Cr-6a
t% Pt-3at% Ta (Co18Cr6Pt3Ta)
Of perpendicular magnetic films 6 formed by sputtering. A carbon protective film having a thickness of 100 ° is subsequently formed on the perpendicular magnetic film 6, and then a lubricant is applied on the carbon protective film to form a lubricating film made of PFPE (having a thickness of 20 μm).
Å) was formed to obtain a magnetic recording medium.
【００２２】（試験例１８、１９）分離膜４、または非
磁性中間層５を設けないこと以外は試験例１〜１７と同
様にして磁気記録媒体を作製した。Test Examples 18 and 19 Magnetic recording media were manufactured in the same manner as in Test Examples 1 to 17, except that the separation film 4 or the nonmagnetic intermediate layer 5 was not provided.
【００２３】上記各試験例の磁気記録媒体の静磁気特性
を振動式磁気特性測定装置（ＶＳＭ）を用いて測定し
た。また、これら磁気記録媒体の記録再生特性を、再生
部に磁気抵抗（ＭＲ）素子を有する複合型薄膜磁気ヘッ
ドを用い、線記録密度２４０ｋＦＣＩにて測定した。測
定結果を表１に示す。ＳＮＲ（Ｓｉｇｎａｌ Ｎｏｉｓ
ｅ Ｒａｔｉｏ）を測定する際には、孤立波を測定対象
として信号量（Ｓｉｇｎａｌ）を測定した。The magnetostatic properties of the magnetic recording media of each of the above test examples were measured using a vibration type magnetic property measuring device (VSM). The recording and reproducing characteristics of these magnetic recording media were measured at a linear recording density of 240 kFCI using a composite type thin film magnetic head having a magnetoresistive (MR) element in the reproducing section. Table 1 shows the measurement results. SNR (Signal Nois
e Ratio), the signal amount (Signal) was measured with a solitary wave as a measurement target.
【００２４】[0024]
【表１】 [Table 1]
【００２５】表１より、分離膜４を設け、これをＴａ、
Ｒｅ、ＣｕＴｉ、ＳｉＣ、Ｗ、ＮｉＰ、Ｚｒ、Ｔｉ、ま
たはＣからなるものとした磁気記録媒体は、ノイズ特性
に優れたものとなったことがわかる。また、分離膜４の
厚さを３００Åとした試験例１２の磁気記録媒体は、再
生時の孤立波形がわずかにダイパルス波形を含むものと
なったが、他の試験例のものについては単峰型の孤立波
形が得られた。According to Table 1, a separation membrane 4 was provided,
It can be seen that the magnetic recording medium made of Re, CuTi, SiC, W, NiP, Zr, Ti, or C has excellent noise characteristics. In the magnetic recording medium of Test Example 12 in which the thickness of the separation film 4 was set to 300 °, the isolated waveform at the time of reproduction slightly contained a dipulse waveform. The isolated waveform of was obtained.
【００２６】[0026]
【発明の効果】以上説明したように、本発明の磁気記録
媒体にあっては、汎用の面内磁気記録媒体を再生する際
に用いられる信号処理法の適用が可能となり、しかもノ
イズ特性に優れたものとなる。As described above, in the magnetic recording medium of the present invention, the signal processing method used when reproducing a general-purpose in-plane magnetic recording medium can be applied, and the magnetic recording medium has excellent noise characteristics. It will be.
【図１】 本発明の磁気記録媒体の一実施形態を示す一
部断面図である。FIG. 1 is a partial cross-sectional view showing one embodiment of a magnetic recording medium of the present invention.
１・・・基板、２・・・面内磁性膜下地膜、３・・・面内磁性
膜、４・・・分離膜 ５・・・非磁性中間層、６・・・垂直磁性膜DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... In-plane magnetic film base film, 3 ... In-plane magnetic film, 4 ... Separation film 5 ... Non-magnetic intermediate layer, 6 ... Perpendicular magnetic film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 酒井 浩志 千葉県市原市八幡海岸通５−１ 昭和電工 株式会社ＨＤ研究開発センター内 (72)発明者 逢坂 哲彌 東京都新宿区大久保三丁目４番１号 学校 法人早稲田大学理工学部内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroshi Sakai 5-1 Yawata Kaigandori, Ichihara-shi, Chiba Prefecture Showa Denko HD Research & Development Center (72) Inventor Tetsuya Osaka 3-4-1 Okubo Shinjuku-ku, Tokyo No. School of Science and Engineering, Waseda University
Claims (6)
方向に配向した面内磁性膜と、磁化容易軸が基板に対し
垂直に配向した垂直磁性膜を備え、面内磁性膜が垂直磁
性膜よりも基板側に設けられ、面内磁性膜と垂直磁性膜
の間に、分離膜が設けられ、この分離膜が、Ｔａ、Ｒ
ｅ、ＣｕＴｉ、ＳｉＣ、Ｗ、ＮｉＰ、Ｚｒ、Ｔｉ、およ
びＣのうち１種または２種以上を主成分とするものであ
ることを特徴とする磁気記録媒体。1. A substrate comprising: an in-plane magnetic film having an easy axis of magnetization oriented in the in-plane direction with respect to the substrate; and a perpendicular magnetic film having an easy axis of magnetization oriented perpendicular to the substrate. A separation film is provided on the substrate side with respect to the perpendicular magnetic film, and a separation film is provided between the in-plane magnetic film and the perpendicular magnetic film.
A magnetic recording medium comprising one or more of e, CuTi, SiC, W, NiP, Zr, Ti, and C as main components.
分離膜の膜厚は５〜２００Åであることを特徴とする磁
気記録媒体。2. The magnetic recording medium according to claim 1, wherein
A magnetic recording medium, wherein the thickness of the separation film is 5 to 200 °.
において、分離膜と垂直磁性膜の間に、ｈｃｐ構造を有
する非磁性中間層を設けたことを特徴とする磁気記録媒
体。3. The magnetic recording medium according to claim 1, wherein a non-magnetic intermediate layer having an hcp structure is provided between the separation film and the perpendicular magnetic film.
磁気記録媒体において、面内磁性膜と垂直磁性膜の離間
距離が１０〜５００Åであることを特徴とする磁気記録
媒体。4. The magnetic recording medium according to claim 1, wherein a distance between the in-plane magnetic film and the perpendicular magnetic film is 10 to 500 °.
磁気記録媒体において、面内磁性膜の基板側に面内磁性
膜下地膜が設けられ、この面内磁性膜下地膜が、Ｃｒ、
またはＣｒにＴｉ、Ｍｏ、Ｗ、Ｖのうち１種以上を添加
した合金を主成分とするものであることを特徴とする磁
気記録媒体。5. The magnetic recording medium according to claim 1, wherein an in-plane magnetic film base film is provided on the substrate side of the in-plane magnetic film, and the in-plane magnetic film base film is Cr,
Alternatively, the magnetic recording medium is mainly composed of an alloy obtained by adding at least one of Ti, Mo, W, and V to Cr.
面内磁性膜が、Ｃｒの含有率が１２〜２５ａｔ％、Ｐｔ
の含有率が０〜１５ａｔ％、Ｔａの含有率が１〜１０ａ
ｔ％、Ｚｒ、Ｒｅ、Ｃｕ、およびＶのうち１種以上の含
有率が０〜１０ａｔ％、残部がＣｏからなるＣｏ合金を
主成分とするものであることを特徴とする磁気記録媒
体。6. The magnetic recording medium according to claim 5, wherein
The in-plane magnetic film has a Cr content of 12 to 25 at%, Pt
Content of 0 to 15 at%, content of Ta of 1 to 10 a
A magnetic recording medium characterized in that the content of at least one of t%, Zr, Re, Cu, and V is from 0 to 10 at%, and the balance is mainly a Co alloy consisting of Co.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7984698A JPH11283228A (en) | 1998-03-26 | 1998-03-26 | Magnetic recording medium |
| SG9901229A SG93828A1 (en) | 1998-03-26 | 1999-03-24 | Magnetic recording medium |
| US09/276,466 US6274233B1 (en) | 1998-03-26 | 1999-03-25 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7984698A JPH11283228A (en) | 1998-03-26 | 1998-03-26 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11283228A true JPH11283228A (en) | 1999-10-15 |
Family
ID=13701577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7984698A Withdrawn JPH11283228A (en) | 1998-03-26 | 1998-03-26 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11283228A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6414660B1 (en) | 1999-10-04 | 2002-07-02 | Matsushita Electric Industrial Co., Ltd. | Display device and method of controlling its brightness |
| JP2004046990A (en) * | 2002-07-12 | 2004-02-12 | Showa Denko Kk | Magnetic recording medium, its manufacturing method, and magnetic recording and reproducing device |
| WO2004075178A1 (en) * | 2003-02-20 | 2004-09-02 | Fujitsu Limited | Vertical magnetic recording medium |
-
1998
- 1998-03-26 JP JP7984698A patent/JPH11283228A/en not_active Withdrawn
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6414660B1 (en) | 1999-10-04 | 2002-07-02 | Matsushita Electric Industrial Co., Ltd. | Display device and method of controlling its brightness |
| US6441803B1 (en) | 1999-10-04 | 2002-08-27 | Matsushita Electric Industrial Co., Ltd. | Display device and luminance control method therefor |
| US6492965B2 (en) | 1999-10-04 | 2002-12-10 | Matsushita Electric Industrial Co., Ltd. | Display device and luminance control method therefor |
| US6509884B2 (en) | 1999-10-04 | 2003-01-21 | Matsushita Electric Industrial Co., Ltd. | Display device and luminance control method therefor |
| USRE39711E1 (en) | 1999-10-04 | 2007-07-03 | Matsushita Electric Industrial Co., Ltd. | Display device and luminance control method therefor |
| USRE39741E1 (en) | 1999-10-04 | 2007-07-24 | Matsushita Electric Industrial Co., Ltd. | Display device and luminance control method therefor |
| USRE39740E1 (en) | 1999-10-04 | 2007-07-24 | Matsushita Electric Industrial Co., Ltd. | Display device and method of controlling its brightness |
| USRE39742E1 (en) | 1999-10-04 | 2007-07-24 | Matsushita Electric Industrial Co., Ltd. | Display device and luminance control method therefor |
| JP2004046990A (en) * | 2002-07-12 | 2004-02-12 | Showa Denko Kk | Magnetic recording medium, its manufacturing method, and magnetic recording and reproducing device |
| WO2004075178A1 (en) * | 2003-02-20 | 2004-09-02 | Fujitsu Limited | Vertical magnetic recording medium |
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