JPH11282655A - Aligner and system therefor, semiconductor production device and system therefor, and device production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain the version-up of a program even during its execution by preparing a version-up means to update a program stored in a storage means while it's continuously executed. SOLUTION: A new program stored in an FD or MO is read by an external storage 109 (an FDD or MOD device) which is connected to a stepper and written into an auxiliary storage 104 etc. When the version-up is started, the new program is read out of a medium and compared with an old program to decide the version-up or version-down to the new program. When the version-up is decided, the old program stored in the storage 104 is preserved in a different name. Then the new program is preserved in the storage 104 in its original name, and a program update flag is set to complete the updating of the program.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus, a network-compatible exposure apparatus, an exposure apparatus system, and the like, which are used in a semiconductor manufacturing factory or the like and can add a function or correct a defect by upgrading a software program. The present invention relates to a semiconductor manufacturing apparatus, a semiconductor manufacturing system, and a device manufacturing method used.

[0002]

2. Description of the Related Art In recent years, the functions of control programs for semiconductor manufacturing equipment have been developed into software, and in order to improve maintainability, functions can be added or bugs can be corrected by upgrading software. Upgrading of software makes it possible to add a function or cope with a defect only by performing an upgrade operation using a medium storing a new software program without replacing hardware components.

In addition, with the progress of networking of semiconductor manufacturing factories, a semiconductor exposure apparatus (hereinafter, referred to as a stepper) is provided with a standard network protocol (TCP / I) such as Ethernet.
P, NetWare, AppleTalk, etc.)
It is increasingly connected using various LAN (local area network) connection devices or dedicated / public line networks. With the development and spread of standard network technology, it has become possible to control a stepper from a semiconductor exposure apparatus management apparatus (hereinafter, referred to as a server) connected to the network via the network.

[0004]

However, rewriting of a program while the apparatus is in operation, activation of the rewritten program, or rewriting of a program via a network, etc., require the exposure operation as a semiconductor exposure apparatus. It is difficult to realize during execution.

An object of the present invention is to provide an exposure apparatus, an exposure apparatus system, a semiconductor manufacturing apparatus, a semiconductor manufacturing system, and a device manufacturing method in which the version of a program is executed even during execution of the program. It is to be able to do up.

[0006]

According to a first aspect of the present invention, there is provided an exposure apparatus having a control means for controlling an apparatus by loading and executing a program from a storage means. It is characterized by comprising version upgrade means for updating the program stored in the storage means during execution of the program. Here, "continuation of the execution of the program" means to include the idling state of the program. According to this, the program in the storage unit is updated even during the execution of the program, so that a long-term production stop or a device stop due to the version upgrade is avoided, and the production efficiency in the semiconductor manufacturing factory is improved. .

According to a second aspect of the exposure apparatus, in the exposure apparatus provided with control means for controlling the apparatus by loading and executing the program, the exposure apparatus can be re-established while the execution of the program is continued. A feature is provided of a version upgrade means for switching a loaded program to a new program without performing an ascending operation, so that the program can be upgraded even during execution of the program. According to this, the dynamic switching to the new program is performed, and the version is upgraded without interrupting the device production by the exposure apparatus. Further, an exposure apparatus system according to the present invention includes the above-described exposure apparatus connected via a network interface and a management apparatus on a network.

[0008] A semiconductor manufacturing apparatus according to the present invention includes the above-described exposure apparatus.

Further, a semiconductor manufacturing system according to the present invention is provided with the above-described exposure apparatus system.

A device manufacturing method according to the present invention uses the above-described exposure apparatus, exposure apparatus system, semiconductor manufacturing apparatus, or semiconductor manufacturing system, and performs exposure while upgrading a program by version upgrading means. It is characterized by the following.

[0011]

In a preferred embodiment of the first invention, the version-up means saves the old program stored in the storage means under another name while the execution of the program continues, and replaces the new program with the original program. The program is updated by writing with the program name.

[0012] Further, a network interface may be provided, and the version upgrade means may update the program by transferring a new program from a management device on the network. According to this, the working time of the operator in the clean room can be shortened because the operator (operator) has to go to the clean room to upgrade the software.

[0013] Further, there is provided timer means for setting a restart timing for making the updated program effective.
According to this, in order to make the updated program effective, it is necessary to perform a reboot (restartup) of the exposure apparatus to make the new program effective.
By setting the timing at which the start-up process is performed to a time when the production can be suspended at the factory, the update program is validated without hindering the production.

When connected to a network, a restart to validate the updated program may be performed in response to a command from a management device on the network. That is, a reboot command, which is an instruction to switch from the old program to the new program, is remotely sent from the management apparatus (server) to the exposure apparatus via the network, thereby eliminating the need to manually restart the exposure apparatus and reduce the load on the operator. The reduction may be achieved.

In a preferred embodiment of the second invention,
The upgrade means loads the new program to an address different from that of the program during execution of the program, and switches the program to the new program by updating the program execution start address to a new address corresponding to the new program. Do. In this case, a network interface may be further provided, and the version upgrade means may transfer the new program from the management device on the network and switch to the new program. According to this, the version can be upgraded without interrupting work and production in the clean room.

[0016]

FIG. 1 is a block diagram showing a hardware system configuration of a semiconductor exposure apparatus according to a first embodiment of the present invention. In FIG. 1, reference numeral 101 denotes a console CPU, which controls console display of the semiconductor exposure apparatus and operation control by console command input.
102 is a RAM for the CPU 101 to store an execution program or data, 103 is a ROM for storing programs, and 104 is an auxiliary storage device (such as a hard disk) used to store data and programs. The execution program to be upgraded is stored on the auxiliary storage device 104. A portion belonging to so-called firmware, such as a boot program, is usually stored on the ROM 103.

The upgrade of the program stored in the auxiliary storage device 104 is performed by first overwriting and saving the new program in place of the old program on the auxiliary storage device 104 and loading the new program onto the RAM 102 when the device is started. Is realized. The present invention is to improve this version-up system. In addition, as a method for upgrading the program stored in the ROM 103, RO
Although a method by exchanging M parts is conceivable, when a software rewritable part such as a flash ROM or an EEP-ROM is used, the version upgrade method of the present invention is applicable to a program on the ROM 103. Become.

Reference numeral 105 denotes a LAN interface for communicating with the Ethernet communication network 108. The protocol for communication on the LAN interface 105 is T
Standard network protocols such as CP / IP are often used, but AppleTalk or NetWar
A commonly used protocol such as e may be used. However, in order to realize a function that does not require the use of a network, the LAN interface 105 is required.
Is not required.

Reference numeral 106 denotes a console device by which an operator (operator) can issue a command to the console CPU 101. Console device 106
A CRT, a liquid crystal display, an EL panel, a plasma display, or the like is generally used as a display device for the display. In addition, as an input device for the console device 106, a keyboard for inputting a command by a key is often used, but a keyboard input device (tablet) using an electronic pen or a touch panel may be used.

Reference numeral 109 denotes an external storage device. FDD (floppy disk drive) as the external storage device 109
And MOD (magneto-optical disk drive). When a drive capable of handling a new medium such as a DVD-RAM becomes widespread due to the development of technology, the new external storage device is used. The data of the new program stored in the medium is stored in the external storage device 109.
And stored on the auxiliary storage device 104.
When using a method for transferring a new program from the exposure apparatus management apparatus (server) as described later, the external storage device 109 is not essential.

Reference numeral 110 denotes a main CPU for controlling various control devices constituting the semiconductor exposure apparatus as a whole. The main CPU 110 and the console CPU 101 are connected to a main CP.
It is connected by the U bus 107 and operates as a semiconductor exposure apparatus. An illumination device 111 controls a light source for exposing a semiconductor manufacturing wafer to light, and a 112 controls loading and unloading of a reticle (photomask) depicting a pattern to be exposed on the semiconductor manufacturing wafer. A reticle driving device 113 for driving and controlling a wafer on an XY stage for exposing a wafer for semiconductor manufacturing in a step-and-repeat manner; and 114 a precision wafer for semiconductor manufacturing. This is an alignment TV system for performing accurate positioning and control. Each of the lighting devices 111 to the TV system 114 is connected to the main CPU 110 by a peripheral device bus 115.
Under the control of Although the peripheral device bus 115 uses SCSI in this embodiment, it may be configured with any general-purpose standard bus.

FIG. 2 is a flowchart showing an update operation in the semiconductor exposure apparatus (stepper). This operation is performed in parallel while the exposure apparatus is executing some program. The programs being executed include programs to be rewritten and updated.
To upgrade the version, prepare a medium that stores the new program. As the medium, an FD (floppy disk / flexible disk) or an MO (magneto-optical disk) can be considered. The new program stored in the FD or MO is stored in the external storage device 109 connected to the stepper.
(FDD, MOD device) and written to the auxiliary storage device 104 or the like.

When the version upgrade is started, as shown in FIG. 2, first in step S201, the new program is read from the medium, the versions of the new program and the old program are compared, and in step S202, the version upgrade to the new program is performed. And version down. As a result, when it is determined that the version is upgraded, the process proceeds to step S203, and when the version is reduced, the process proceeds to step S205. Step S205
Then, the operator confirms whether or not the version can be downgraded. If the version can be downgraded, the process proceeds to step S203. Otherwise, the process ends. In step 203, the old program on the auxiliary storage device 104 is stored under another name. Next, in step S204,
Save the new program in the auxiliary storage device 104 under the original name of the program (original name), and
At 206, a flag indicating that the program has been updated is set, and the update of the program is completed.

In the conventional system, during the operation of the program of the exposure apparatus, the old program is to be locked during execution, and the program on the auxiliary storage device 104 cannot be rewritten. A system that provides such a locking mechanism during execution includes a UNIX-based OS. On the other hand, in the present embodiment, in step S20
By providing means for storing (moving) the file once locked under another name by step 3 and step S204, it is possible to update the program of the exposure apparatus during operation. This point is different from the version upgrade method of the conventional exposure apparatus.

(Second Embodiment) FIG. 3 is a diagram showing an example of a network connection form of a semiconductor exposure apparatus system according to a second embodiment of the present invention. As shown in the figure, in this system, semiconductor exposure apparatuses (steppers) 3011 and 3012 are connected to a server 302 via an Ethernet communication network 108. The server 302 is a management device that performs various remote instructions and report data collection, management and maintenance of data files, new creation and editing of data files, and the like for each of the steppers 3011 and 3012 connected on the network. The server 302 has means for transferring a binary image of a new program to be upgraded to the steppers 3011 and 3012 via the Ethernet communication network 108. A standard LAN function is used as the transfer means. As a data transfer method using a LAN, it is easy to use a TCP / IP socket interface or an FTP (file transfer protocol), and it is generally used. May be adopted.

FIG. 4 is a flowchart showing a version upgrade operation in this system. The part where the new program is transferred from the server is added,
This is different from the flowchart of FIG. When the upgrade is started, first, in step S401, the new program data is transferred from the server to the auxiliary storage device 1.
04 as a temporary file. Next, in step S402, the versions of the old and new programs are compared, and in step S403, it is determined whether or not the version is upgraded.
04, if the version is down, step S40
Proceed to 7. In step S407, a query is made to the server as to whether or not the version can be downgraded, and the result is determined in step S408. If the version can be downgraded, the process proceeds to step S404; otherwise, the process proceeds to step S406. In step S404, the old program is stored, and in step S405, the old program is updated. Step S4
Steps 04 and 405 are the same as steps S203 and S204 in FIG. In the next step S406,
The server notifies the server of the success or failure of the upgrade, sets a flag indicating that the program has been rewritten in step S409, and ends the upgrade.

(Third Embodiment) This embodiment relates to a device of a reboot method for making the new program updated in the first embodiment and the second embodiment effective. According to the first embodiment and the second embodiment, a new program can be updated even during the operation of the exposure apparatus. However, the new program is enabled (the program is loaded into the memory and operates as an actual program). In such a case, it is necessary to restart the apparatus (reboot). Conventionally, re-startup has been performed manually by an operator. This involves problems in that it involves work in a clean room, and that it cannot be restarted at any time during which production can be stopped. In the present embodiment, these problems are solved by designating the reboot timing at an arbitrary time during which production can be stopped by designating a timer of the semiconductor exposure apparatus. The execution of the reboot by the timer specification is, for example, cron in UNIX.
This can be realized by a standard function such as a command function and an at command function.

(Fourth Embodiment) FIG. 5 is a flowchart showing an operation in an exposure apparatus system according to a fourth embodiment of the present invention. This exposure apparatus system has the same configuration as that of FIG. 3, and by remotely instructing a reboot from the server 302 of FIG. 3, the new program that has been upgraded can be validated without any work in the clean room 303. It will be realized.

As shown in FIG. 5, when a reboot instruction is issued from the server, a remote instruction is first received in step S501. Transmission and reception of remote instructions between the server and the stepper can be realized by communication means using a standard protocol such as TCP / IP. Next, step S50
In step 2, it is determined whether the received instruction is a reboot instruction for updating a program, and if it is determined that the instruction is a reboot instruction for updating a program, the process proceeds to step S503.
Otherwise, return to the idle state. In step S503, it is determined whether or not the stepper is in a state in which a reboot is possible. If the stepper is not in a rebootable state, the server is notified in step S509 that the state is in a state in which rebooting is not possible (busy state). If it is in the state (idle state), the flow advances to step S504 to limit the operation related to the new exposure operation of the stepper so that the state does not shift to the busy state.

Next, in step S505, the new program rewrite flag is referred to. The new program rewrite flag is set when a new program is updated. Therefore, if this flag is set, it indicates that rewriting to a new program has been performed during operation. If the new program has been rewritten, step S50
The process proceeds to step S510, otherwise the process proceeds to step S510 to notify the server that there is no program to be validated by rebooting, and return to the idle state. Step S5
In step 06, the new program rewriting flag is reset, and in step S507, the program rewriting in-reboot flag is set. Finally, in step S508, the system is shut down (falling down), and the state shifts to a reboot execution state.

FIG. 6 is a flowchart showing the operation in the reboot execution state. When the reboot of the system for controlling the exposure apparatus is started, first, in step S601,
It is determined whether the program rewriting rebooting flag has been set in step. If the flag has been set, the process proceeds to step S602; if not, the process proceeds to step S6.
Go to 03. In step S602, the flag under program rewrite reboot is reset. If the program rewriting flag is set, the program in the auxiliary storage device 104 has been updated, but the program loaded in the memory has not been validated because the reboot has not been performed. I have. Therefore, in this case, the new program is loaded into the memory (RAM 102) in step S603, and the new program becomes valid. Here, it is assumed that there are many programs to be upgraded that are related to each other, and rebooting is performed to enable these programs. However, if the program is a single function, only the relevant program is restarted. Just need.

(Fifth Embodiment) FIG. 7 is a flowchart showing the operation of a program in an exposure apparatus according to a fifth embodiment of the present invention. In this exposure apparatus, a program such as an exposure process can be dynamically updated while the program is being executed.

First, in the idle state, when the exposure program is started in step S701, the exposure program is loaded on the real memory (RAM 102) and the start address is held on the real memory. Normal,
Since the program is relocatable, the start address is not a fixed address. Next, step S70
In steps S2 to S704, the exposure processing is executed as a whole. Normally, when this exposure processing ends, the program ends, and the apparatus enters a waiting state (idle state) until the next operation from the operating system. Therefore, in this embodiment, in the program step immediately before the next start waiting,
The procedure from step S705 to step S707 is executed.

In step S705, it is determined whether or not the flag is set by referring to a "new program dynamic load flag" set in a version upgrade procedure described later. If it is set, the process proceeds to step S706. If it is not set, the process returns to the idle state.
In step S706, the start address of the new program is obtained, and the relocatable start address is rewritten. The start address of the new program is written at a specific position on the real memory by a version upgrade procedure described later. After the new address is set in step S706, the new program dynamic load flag is reset in step S707. By doing so, the next time the exposure program is started from the operating system, the start address used in step S701 becomes the address of the new program.

FIG. 8 is a flowchart of the version upgrade procedure. First, in step S801, the old program stored in the auxiliary storage device 104 is saved under another name. Next, in step S802, a new program is read and copied to the auxiliary storage device 104. Next, in step S803, the new program is loaded on the real memory (RAM 102). The load address is in a different area from the old program. Next, in step S804, a new program dynamic load flag is set so that it can be determined that the new program has been loaded on the memory. Finally, in step S805, the start address of the new program is set in a predetermined area on the memory, and the version upgrade procedure ends. The new program loaded on the memory is effective without stopping the apparatus according to the method shown in the flowchart of FIG.

FIG. 9 is a memory map showing the arrangement of the old program and the new program on the memory. A new program dynamic load flag 901 is specified at an arbitrary position on the RAM 102. Reference numeral 902 denotes a memory area for setting a start address of a relocatable program to be upgraded. A memory map 903 indicates an arrangement of the new program and the old program on the memory. The start address of the old program is A
The address and the start address of the new program are address B. Since the start address of the program is relocatable, it becomes an arbitrary position in the memory managed by the operating system. In this embodiment, the start address is stored in the area 902 as a program start address, and the program start address is rewritten in an upgrade program for executing the upgrade procedure (step S805). The program to be upgraded refers to the dynamic load flag 901 (step S705). If the flag is set, the new program is started using the new program start address (step S706). Version can be realized without stopping.

Although the new program is read from the medium in step S802 in FIG. 8, the new program may be transferred from the server 302 instead.

(Device Manufacturing Example) Next, a device manufacturing example that can use the above-described exposure apparatus or exposure system will be described. FIG. 10 shows a micro device (IC
1 shows a flow of manufacturing semiconductor chips such as LSIs and LSIs, liquid crystal panels, CCDs, thin-film magnetic heads, micromachines, and the like. In step 31 (circuit design), a device pattern is designed. Step 32 is a process for making a mask on the basis of the designed pattern. On the other hand, in step 33 (wafer manufacture), a wafer is manufactured using a material such as silicon or glass. Step 34 (wafer process) is referred to as a preprocess, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 35 (assembly) is called a post-process, and is a process of forming a semiconductor chip using the wafer prepared in step 34, and includes processes such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). including. Step 36 (inspection)
Then, inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in step 35 are performed. Through these steps, a semiconductor device is completed and shipped (step 37).

FIG. 11 shows a detailed flow of the wafer process. Step 41 (oxidation) oxidizes the wafer's surface. In step 42 (CVD), an insulating film is formed on the wafer surface. In step 43 (electrode formation), electrodes are formed on the wafer by vapor deposition. In step 44 (ion implantation), ions are implanted into the wafer. Step 4
In step 5 (resist processing), a resist is applied to the wafer.
In step 46 (exposure), the circuit pattern of the mask is printed on a plurality of shot areas of the wafer by printing using the above-described exposure apparatus or exposure method. Step 47
In (development), the exposed wafer is developed. Step 48
In (etching), portions other than the developed resist image are scraped off. In step 49 (resist removal), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer.

According to this, it is possible to manufacture a large-sized device, which was conventionally difficult to manufacture, at low cost.

[0041]

As described above, according to the present invention, the program stored in the storage means is updated while the program is being executed. Can be shortened.

Further, since a new program is transferred from the management device on the network to update the program, the upgrade work in the clean room by the operator, which has conventionally required a great deal of time and labor costs, is required. Labor can be saved.

Further, since there is provided a timer means for setting a re-start timing for validating the updated program, it is possible to set a re-start (reboot) timing for validating the rewritten program to be able to suspend production at the factory. The time can be designated, so that the influence of stopping the exposure apparatus at the time of restart can be reduced.

Further, since the re-startup for making the updated program effective is performed according to a command from a management device on the network, it is possible to further reduce the labor required to upgrade the version in the clean room by the operator. .

Further, during the continuation of the execution of the program, the program is switched to the new program without performing the restarting operation, so that the stop time of the exposure apparatus can be minimized. Further, in this case, by transferring the new program from the management apparatus on the network, the program of the operating semiconductor exposure apparatus can be rewritten and the new program can be immediately activated. Therefore, there is an effect that the version of the software program can be upgraded without affecting the production process by the exposure apparatus at all and without requiring a clean room operation.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a hardware configuration of a semiconductor exposure apparatus according to a first embodiment of the present invention.

FIG. 2 is a flowchart showing a version upgrade operation in the apparatus of FIG.

FIG. 3 is a diagram illustrating a network configuration of a semiconductor exposure apparatus system according to a second embodiment of the present invention.

FIG. 4 is a flowchart showing a version upgrade operation in the system of FIG. 3;

FIG. 5 is a flowchart showing an operation in an exposure apparatus system according to a fourth embodiment of the present invention.

FIG. 6 is a flowchart of a reboot operation according to a fourth embodiment of the present invention.

FIG. 7 is a flowchart showing an operation of a program in an exposure apparatus according to a fifth embodiment of the present invention.

FIG. 8 is a flowchart of a version upgrade operation according to a fifth embodiment of the present invention.

FIG. 9 is a diagram showing a memory map according to a fifth embodiment of the present invention.

FIG. 10 is a flowchart showing an example of manufacturing a device that can use the apparatus or method of the present invention.

FIG. 11 is a flowchart showing a detailed flow of a wafer process in FIG. 10;

[Explanation of symbols]

101: CPU for console, 102: RAM for storing programs and data, 103: ROM for storing programs, 104: auxiliary storage device for storing data and programs, 105: LAN interface, 106: console device, 107: main CPU bus, 108: Ethernet communication network, 109:
External storage device, 110: Main CPU, 111: Illumination device, 112: Reticle drive device, 113: Stage drive device, 114: TV system for alignment, 115:
Peripheral device bus, 302: server, 303: clean room, 901: new program dynamic load flag, 90
2: Area on memory for setting start address, 90
3: memory map, 3011 and 3012: semiconductor exposure apparatus (stepper).

Claims (13)

[Claims] 1. An exposure apparatus having a control unit for controlling an apparatus by loading a program from a storage unit and executing the program, wherein the program stored in the storage unit is updated during execution of the program. An exposure apparatus, comprising: 2. The version upgrade means stores the old program stored under another name in the storage means and writes a new program with an original program name in the storage means while the execution of the program is continued. 2. The exposure apparatus according to claim 1, wherein the updating is performed. 3. It has a network interface,
3. The exposure apparatus according to claim 1, wherein the upgrade unit transfers the new program from a management device on the network and updates the program. 4. The exposure apparatus according to claim 1, further comprising timer means for setting a re-start timing for validating the updated program. 5. The apparatus according to claim 1, further comprising means for connecting to a network and performing a restart to validate the updated program in response to a command from a management device on the network. The exposure apparatus according to any one of claims 1 to 3. 6. An exposure apparatus system comprising: the exposure apparatus according to claim 1 connected via a network interface; and a management apparatus on the network. 7. An exposure apparatus comprising control means for controlling an apparatus by loading and executing a program, wherein the loaded program is executed without performing a re-startup operation while the execution of the program is continued. An exposure apparatus comprising version upgrade means for switching a program to a new program. 8. The version upgrade means loads a new program to an address different from the program and updates the program execution start address to a new address corresponding to the new program while the program is being executed. 8. The exposure apparatus according to claim 7, wherein the switching to the new program is performed by the switching. 9. It has a network interface,
8. The system according to claim 7, wherein the upgrade unit transfers the new program from a management device on the network and switches to the new program.
Or the exposure apparatus according to 8. 10. An exposure apparatus system comprising: the exposure apparatus according to any one of claims 7 to 9 connected via a network interface; and a management apparatus on the network. 11. A semiconductor manufacturing apparatus comprising the exposure apparatus according to any one of claims 1 to 5 or the exposure apparatus according to any one of claims 7 to 9. 12. A semiconductor manufacturing system comprising the exposure apparatus system according to claim 6. 13. A device manufacturing method, characterized in that a device is manufactured by using the apparatus or system according to any one of claims 1 to 12 and performing exposure while upgrading a program by a version upgrading means.