JPH11281634A - Ultrasonic microscope device for quantitative measurement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve precision in the quantitative measurement of material characteristics by circulating temperature-controlled air in a case, enclosing a water coupler with a space shielding means to form approximately closed space, and suppressing temperature fluctuations due to the flow of air and temperature changes in the coupler due to the evaporation of the coupler. SOLUTION: Air temperature-controlled by an air conditioner is supplied from the upper part of a case by a circulating fan. Half space or closed space is formed around an ultrasonic device and a sample to interrupt the flow of air as much as possible, and the temperature of a water coupler 6 is stabilized. Furthermore, as environments around the water coupler 6 become much closer to a state of steam saturation, it is possible to suppress the evaporation of water coupler 6. By providing a curtain so as to surround the water coupler 6, the flow of air is interrupted, and steam in the environments is brought closer to saturation. In other words, a top plate 28 is provided above an ultrasonic device 24, and a curtain 29 is provided as a space shielding means so as to enclose the ultrasonic device 24 and the water coupler 6 from the circumferential edge of the top plate 28.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quantitative measurement ultrasonic microscope apparatus for measuring, for example, the propagation characteristics of leaky surface acoustic waves (LSAW), particularly the phase velocity with high accuracy.

[0002]

2. Description of the Related Art An ultrasonic microscope has been developed as a new technique for analyzing and evaluating substances and material properties. Measurement methods using an ultrasonic microscope include an image measurement method and a quantitative measurement method. In the quantitative measurement method, the V (z) curve analysis method is used to measure the propagation characteristics (phase velocity and propagation attenuation) of the LSAW excited on the sample surface. For this measurement, a point focused ultrasonic beam (PFB) and a linear focused ultrasonic beam (LFB) can be used. Here, the description will proceed with an LFB ultrasonic microscope (see Document 1) dedicated to quantitative measurement.

FIG. 1 is a block diagram showing the principle of a conventional ultrasonic microscope. The coordinate axes x, y, and z are set as shown in the figure. The ultrasonic microscope 14 includes an ultrasonic mechanism unit 14A and a control and measurement unit 1
4B. The ultrasonic mechanism section 14A includes an ultrasonic transducer 4, an LFB acoustic lens 5, a water coupler 6, a sample 7, a thermocouple 9, and a mechanical operation section 11. The control and measurement unit 14B includes the pulse mode measurement system 1, the directional bridge 3, the A / D converter 8, the digital voltmeter 10, the stage controller 12, and the computer 13. The high-frequency pulse signal 2 generated in the pulse mode measurement system 1 of the control and measurement unit 14B is provided to the ultrasonic transducer 4 through the directional bridge 3, and is converted into an ultrasonic signal, and the aperture surface is formed in a cylindrical shape. The LFB acoustic lens 5 converges in a wedge shape via a water coupler 6 and enters the sample 7. The reflected signal from the sample surface is converted into an electric signal again, and its output is detected by the pulse mode measurement system 1 through the directional bridge 3 and converted into a digital signal by the A / D converter 8. It is stored in the data recording medium inside.

Here, the distance between the sample 7 and the LFB acoustic lens 5 is
As the distance z approaches the focal position of the acoustic lens,
As shown in Fig. 2, the transducer output V (z) changes periodically.
Become This is called a V (z) curve, and the Z
(Vertical movement) A pulse synchronized with the stage movement
From the controller 12 to the A / D converter 8.
And is recorded as a function of z. In addition, thermocouple 9 and digital
Using the tall volt meter 10, the temperature of the water coupler 6
Measured at the same time. The machine operation unit 11 has a Z stage,
Θ (time) for measuring the propagation direction dependence of LSAW propagation characteristics
XY) for measuring distribution on stage and sample surface
(Horizontal movement) stage, alignment θ _x, Θ_y(Incline
(Oblique) It is composed of a stage, a sample stage and the like. X
The Y, Z and θ stages are each driven by a motor.
And is controlled by the stage controller 12. Ma
The computer 13 controls the entire system, and
Measure and analyze the line to determine the LSAW propagation characteristics.

[0005] From the interference period Δz in the V (z) curve, the LSAW phase velocity V _LSAW is calculated from the waveform attenuation rate to the normalized propagation attenuation rate α.
_LSAW is determined. Here, the measurement of the phase velocity will be described in detail. FIG. 2 is an example of a measured V (z) curve. V (z)
LSAW velocity V from the interference period Δz in the curve
_LSAW is determined. V _LSAW = V _W / ｛1− (1−V _W / 2fΔz) ² ｝ ^1/2 (1) where f is the ultrasonic frequency, and V _W is the velocity of the longitudinal acoustic wave in water. Since _VW is known as a function of temperature, it can be obtained by measuring the temperature of the water coupler 6 when measuring the V (z) curve. This indicates that the measurement accuracy of V _LSAW mainly depends on the measurement accuracy of the water temperature that determines V _W and the movement accuracy of the z stage.

For example, in order to obtain a 0.01% LSAW speed measurement resolution, a coupler temperature measurement accuracy within 0.1 ° C. is required (see Reference 2). In an actual device, the thermocouple 9 is installed as close as possible to the sound wave propagation region as shown in FIG. 1, but the thermocouple 9 cannot be directly inserted into the sound wave propagation region. Usually, there is a temperature distribution in the coupler. The main reasons for this are that the temperature near the surface of the coupler decreases due to the heat of vaporization due to the evaporation of the coupler, causing a temperature gradient in the coupler, and that the temperature environment around the coupler fluctuates due to the flow of air. Therefore, in order to measure the coupler temperature with high accuracy, it is very important to stabilize the temperature environment around the sample.

Furthermore, the elastic properties of a material generally have a temperature dependence. For example, the LSAW velocity of crystal X-axis propagation on a 128 ° rotated Y-plate lithium niobate single crystal substrate, which is a typical substrate for surface acoustic wave devices, has a temperature coefficient of -0.16 (m / s) / ° C (Reference 2). Therefore, for a temperature change of 1 ° C, LS
The AW speed changes by 0.16m / s (0.004%). Therefore, in order to compare the elastic characteristics between samples, it is necessary to realize a stable temperature environment and measure the LSAW propagation characteristics at the same temperature.

Further, as is well known, the moving characteristics of the mechanical stage change depending on the temperature due to the thermal expansion of the guide and the lead screw. Therefore, the stabilization of the temperature environment is extremely important in order to perform reproducible and highly accurate z-coordinate positioning. Until now, by installing the entire device in a constant temperature room, the stability of the temperature environment has been improved, the measurement accuracy of the LSAW speed has been improved, and the measurement reproducibility in a short time has been achieved ± 0.005% (Reference 2). reference). However, in the long term, the temperature stable point fluctuates,
There is a problem that the absolute value of the measured LSAW speed varies. In addition, it takes time to stabilize the temperature in a constant temperature room, the temperature stability point changes depending on the internal heat load conditions such as the number of people in the room, ON / OFF of indoor lighting, and the number of operating devices in the room. There are problems such as a local temperature change due to entry and exit and movement, and a change in the temperature environment of the atmosphere around the sample due to the blowing of air from the air conditioner. For this reason, the stable point of the coupler temperature fluctuates by about ± 1 ° C. depending on the measurement conditions, and the stability during the measurement is about ± 0.2 ° C.

Further, the water coupler between the ultrasonic device and the sample is once removed at the time of sample exchange, and is re-injected after setting the sample. Therefore, a waiting time is required until the temperatures of the sample and the water coupler are stabilized again, and it is difficult to measure a plurality of samples continuously and efficiently.

[0010]

As described above, in the conventional apparatus, it is not easy to stabilize the measurement environment at a desired temperature, and a highly uniform single crystal material used as an electronic device material is used. The measurement accuracy was insufficient to capture a slight change in elastic characteristics of a substrate or the like.

An object of the present invention is to provide a temperature-stabilized ultrasonic microscope apparatus capable of quantitatively measuring material characteristics with high accuracy.

[0012]

In the ultrasonic microscope apparatus for quantitative measurement of the present invention, a mechanical operation section including an ultrasonic device and a sample is installed in a case capable of temperature control, and the temperature is controlled by temperature control means. Circulated air through the case,
In addition, by making the space around the water coupler substantially closed by the space shielding means, temperature fluctuation due to air flow and temperature change in the coupler due to evaporation of the coupler are suppressed.

Further, when more precise temperature control, for example, within 0.01 ° C., is required, the area around the ultrasonic device and the sample is completely closed, and constant temperature water whose temperature is precisely controlled is circulated around the space. Thus, the temperature environment is further stabilized in accordance with the measurement accuracy of the LSAW speed required in the material evaluation. When measuring multiple samples continuously, 0.01 ° C temperature control to enable water coupler water supply and drainage, sample exchange, and alignment between the ultrasonic device and the sample without breaking the stabilized temperature environment A water supply / drainage device having a function, a sample transport device, and an automatic tilt stage are provided, so that more accurate measurement can be efficiently performed.

[0014]

FIG. 3 shows an embodiment of an ultrasonic microscope apparatus according to the present invention. The LPB ultrasonic microscope mechanism unit 14A provided in the case 15 shown in the figure is configured to include the transducer 4, the acoustic lens 5, the water coupler 6, the sample 7, the thermocouple 9, and the machine operation unit 11 shown in FIG. I have. Further, the control and measurement unit 14B provided outside the case 15 also includes the pulse mode measurement system 1 in FIG.
It is configured to include a directional bridge 3, an A / D converter 8, a digital voltmeter 10, a stage controller 12, and a computer 13.
5 are connected to the transducers.

An LFB ultrasonic microscope mechanism 14A including an ultrasonic device (transducer 4 and acoustic lens 5) and a mechanical operation unit 11 including a sample stage is installed in an acrylic case 15. Case 15 has a setting resolution of 0.00
The desired temperature can be set by the temperature controller 16 of 1 ° C. The temperature inside the case is measured by a temperature sensor 17 using a platinum resistance temperature sensor and input to a temperature controller 16. Air whose temperature is controlled by the air conditioner is supplied from the upper part of the case 15 by the circulation fan 18 through the ventilation duct 19 and the high-performance filter 20. The filter 20 removes dust in the air and acts as a buffer for the supplied air flow, thereby equalizing the air flow. The air discharged from the lower portion of the case 15 returns to the air conditioner through the exhaust duct 21. The air returned to the air conditioner is cooled by the cooler 22 and the electric heater 2
Reheated by 3. At this time, the output of the electric heater 23 is set so that the temperature at the installation position (control point) of the temperature sensor 17 inside the case 15 always becomes the set temperature.
PID control (proportional / integral /
Differential control). Here, it is needless to say that the temperature stability inside the case 15 can be further improved by using a material having a high heat insulating effect for the material of the case 15 and stabilizing the temperature outside the case 15.

FIGS. 4A, 4B and 4C show an embodiment of the ultrasonic microscope mechanism 14A in the embodiment of FIG. The main cause of the temperature distribution in the water coupler 6 is the fluctuation of the temperature environment due to the evaporation of the water coupler and the flow of the air around the water coupler 6 as described above. Therefore, the temperature of the water coupler 6 can be stabilized by cutting off the air flow as much as possible by making the ultrasonic device and the sample peripheral part a half space or a closed space. Further, since the atmosphere around the water coupler 6 becomes closer to the saturated state of water vapor, the evaporation of the water coupler can be suppressed accordingly, the temperature distribution in the coupler can be reduced, and the temperature environment can be further stabilized.

FIG. 4 shows some embodiments in which a curtain is provided around the periphery of the water coupler 6 to block the air flow and to make the water vapor in the atmosphere close to saturation. When the measurement of the sample surface distribution of the LSAW velocity or the measurement of the propagation direction dependence is performed, the movement of the XY stage 34 and the θ stage 33 constituting the machine operation unit 11 is accompanied. Therefore, a top plate 28 is provided on the ultrasonic device 24 as shown in the embodiment of FIG. 4A so as not to hinder the movement of the stage, and the ultrasonic device 24 and the water coupler 6 ,
A curtain 29 that does not reach the surface of the sample 7 on the sample stage 8 by a polyethylene film, a plastic film, an acrylic plate, or the like that extends downward so as to surround the sample 7.
Are provided as space shielding means. Thereby, the periphery of the LFB ultrasonic device 24 (the transducer 4 and the acoustic lens 5) and the periphery of the water coupler 6 can be made a semi-closed space. 4 and B, the curtain 29 may be covered to the extent that it covers the θ stage 33. Further, when the measurement at one fixed point or the sample is small and the moving amount of the XY stage 34 is small, the curtain 29 can be extended to the sample stage 32 as shown in the embodiment of FIG. Can be built. Thus, by creating a closed space according to the purpose, the stabilization of the temperature environment can be easily improved.

As shown in FIG. 5, in order to stabilize the water coupler 36 at a specific temperature with high precision, for example, within 0.01 ° C., the constant temperature water 38 whose temperature is precisely controlled by a constant temperature water circulating device 39 is used. The circulated wall constitutes a constant temperature chamber 40 as a space shielding means, in which a transducer, an ultrasonic device 24 including an acoustic lens, a water coupler 6, and a sample 7 are arranged. This prevents wind from hitting the water coupler 6 and makes the water vapor in the atmosphere closer to saturation. 5A is a case where the periphery of the LFB ultrasonic device 24 (transducer 4 and acoustic lens 5) and the sample 7 are surrounded by a constant temperature chamber 40, and the embodiment of FIGS. This is a case where the whole is enclosed including the bottom except for the electrical connection required for the above. In this way, the flow of the air introduced into the case 15 does not hit the water coupler 6 and the temperature is stabilized by the constant temperature water, so that high-precision quantitative measurement becomes possible.

By the way, when exchanging the sample, it is necessary to remove and re-inject the water coupler between the ultrasonic device and the sample. FIG. 6 is a block diagram of an example of a water supply / drainage device for supplying / draining the coupler without deteriorating the stability of the measurement environment.
As the ultrasonic microscope mechanism 14A, the one shown in the embodiment shown in FIGS. 4A, 4B and 5C or the embodiment shown in FIGS. 5A and 5B is used, but the ducts 19 and 21, the filter 20, the curtain 29 or the thermostat are used. The chamber 40 and the like are not shown. Pure water 44 used as the water coupler 6 is stored in a pure water tank 45 and injected between the acoustic lens 5 and the sample 7 by a water supply pump 46. After the measurement, the water is sucked out by the drainage pump 47 and discharged to the drainage tank 48. The pure water tank 45 is installed in a constant temperature water tank 50 whose temperature is controlled within 0.01 ° C. by a constant temperature water circulation device 49, so that pure water 44 at a constant temperature can always be supplied as the coupler 6. Further, the pure water 44 in the tank 45 is removed by a deaerator 51 to remove the air dissolved therein, and its purity is maintained by a pure water maintaining device 52.

In each of the embodiments shown in FIGS. 4, 5 and 6, the case where a water drop is injected between the acoustic lens 6 and the sample 7 as the water coupler 6 has been shown, but as shown in FIG.
And the entire sample 7 may be immersed in the water coupler 6. In the case of continuously measuring a plurality of samples, if the samples can be exchanged without deteriorating the stability of the temperature environment, it is not necessary to open and close the case 15, so that more accurate measurement can be performed and measurement efficiency can be improved. Can be achieved. FIG. 8 shows an example of a sample transport device for this purpose. The measurement sample 7 is set in the sample cassette 54 and is automatically transferred to the sample table 8 by the transfer arm 55 as needed. The sample 7 for which measurement has been completed is returned to the sample cassette 54 by the transfer arm 55 again. Since these are installed in the case 15 in which the temperature environment is stabilized as shown in FIG. 3, the work of exchanging the samples can be performed without opening and closing the case, and a plurality of samples can be continuously transferred while maintaining the stable temperature environment. Measurement can be performed efficiently and accurately.

After setting the sample and injecting the coupler, it is necessary to take alignment between the ultrasonic device and the sample. With respect to the ultrasonic device, alignment need only be performed when the device is installed, and thereafter, only alignment of the sample surface need be performed unless the device is replaced.
In the conventional device, the tilt stage on which the sample stage is installed had to be manually operated.However, the device of the present invention has a motor-driven automatic tilt stage, which destabilizes the measurement environment. Alignment of the sample surface can be automatically performed without any need.

Further, in order to perform high-precision z positioning, absolute z-coordinate positioning may be performed using a laser interferometer.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In improving the measurement accuracy of LSAW propagation characteristics by an ultrasonic microscope for quantitative measurement, the fundamental factor is to stabilize the temperature environment. In the prototype device, the air temperature at the temperature control point in the case was stable within the set value ± 0.005 ° C. A 200 MHz band LFB ultrasonic device having an opening surface curvature radius of 1 mm was used in the experiment, and the above-mentioned 128 ° rotated Y-plate lithium niobate single crystal substrate was used as a sample. The ultrasonic frequency is
225 MHz, the amount of water coupler between LFB ultrasonic device and the sample is approximately 1 cm ^3, in the form of water droplets. The temperature controller was set so that the temperature of the water coupler was around 23 ° C. The resolution of the automatic tilt stage used to align the ultrasonic device with the sample is 6 × 10 ^-7 rad,
Alignment can be performed with sufficient accuracy and reproducibility. An air bearing stage having excellent straightness was used as the Z stage, and absolute positioning of the z coordinate was performed by a laser interferometer (resolution 20 nm) installed on the z axis. However, in this embodiment, the sample transport device and the automatic water supply / drainage device are not used.

FIG. 9 shows the repetitive measurement of the LSAW propagation characteristics (印), the measurement of the propagation direction dependence (□), and the line scan (△), which are usually performed in the evaluation of the material by the LFB ultrasonic microscope. In this case, the average values of the coupler temperatures are shown. 100 times in repetition,
In the direction of propagation, a range of 200 ° was measured every 1 °, and an area of ± 30 mm was measured every 1 m in the line scan. Error bars indicate the maximum and minimum values of the coupler temperature during each measurement. It can be seen that the temperature change of the coupler as a whole is within 23 ° C. ± 0.1 ° C. throughout all the measurements, and the change in the average value of the temperature in each measurement is within 23 ° C. ± 0.05 ° C. From the above temperature coefficient (-0.16 (m / s) / ° C),
LSAW speed change for temperature change of ± 0.1 ° C is ± 0.016m /
s is small enough.

FIG. 10A shows the repetition at one fixed point.
It is a measurement result of the LSAW speed at the time of performing the measurement 0 times. L
The SAW propagation direction was the crystal X-axis direction. At this time, the average value of the coupler temperature was 23.043 ° C. and the maximum change was 0.017 ° C. In addition, the average value of the LSAW speed measurement results was 3898.21 m / s,
The standard deviation σ was 0.038 m / s (0.001%). 10 and B show the measurement results of the propagation attenuation at this time. The average value was 1.6373 × 10 ⁻² and σ was 7.4 × 10 ⁻⁶ (0.045%). Evaluating the measurement resolution of LSAW speed with ± 2σ is ± 0.0
02%.

Next, as shown in FIGS. 5 and 5B, the periphery of the sample was made a semi-closed space with a polyethylene film, and the measurement was repeated 100 times at one fixed point. The maximum change in the coupler temperature at this time was 0.007 ° C. The average value of the LSAW speed measurement results was 3988.23 m / s, and σ was 0.027 m / s (0.0007%)
Met. The average value of the measured propagation attenuation was 1.6377.
× 10 ^-2 and σ are 6.2 × 10 ^-6 (0.038%), which indicates that both the temperature stability and the measurement reproducibility are improved as compared with the measurement results in the open system described above.

Here, for example, the resolution of the LSAW speed desired for evaluating this single crystal material is set to 0.1 m / s (0.0026
%), It can be seen that the present apparatus realizes the stability of the measurement environment and the measurement reproducibility of the LSAW propagation characteristics that satisfy this.

[0028]

According to the present invention, it is possible to easily stabilize the temperature environment of the measurement by the ultrasonic microscope, particularly the water coupler and the periphery of the sample at a desired temperature, and improve the measurement accuracy of the LSAW propagation characteristics. High-precision analysis and evaluation of material properties becomes possible. In addition, since it can be set to any temperature,
The temperature dependency of the LSAW propagation characteristics can also be easily measured. Further, since the sample exchange can be performed while maintaining the stability of the temperature environment, highly accurate and efficient measurement can be performed even when a plurality of samples are continuously measured. Also, the same effect can be obtained by using a PFB ultrasonic microscope in a similar manner. Although the measurement of the LSAW propagation characteristics has been described here, the present device can easily replace the ultrasonic device with a bulk ultrasonic device to facilitate bulk wave propagation characteristics (phase velocity and propagation attenuation of longitudinal and transverse waves). Can also be applied to the measurement of

[Brief description of the drawings]

FIG. 1 is a block diagram of a conventional LFB ultrasonic microscope apparatus.

FIG. 2 is an example of a V (z) curve measured by an LFB ultrasonic microscope.

FIG. 3 is a block diagram showing the overall configuration of the ultrasonic microscope device of the present invention.

FIG. 4 shows an embodiment of the ultrasonic microscope mechanism in FIG. 3. A is a curtain lowered near the sample surface to form a closed space surrounding the water coupler, and B is a curtain lowered so as to cover the θ stage. To form a closed space,
C shows a case where the curtain is lowered so as to cover the sample stage to form a closed space.

FIG. 5A shows a configuration in which the periphery of the ultrasonic device, the water coupler, and the sample is arranged in a constant temperature chamber and the constant temperature water is circulated around the bottom except for the bottom surface. In this case, an embodiment will be described.

FIG. 6 shows an example of a coupler automatic water supply / drainage device.

FIG. 7 is an example of a form of installation of a water coupler between an ultrasonic device and a sample.

FIG. 8 shows an example of a sample transport device.

FIG. 9 is a graph showing a change in coupler temperature during measurement.

FIG. 10 shows measurement results of LSAW propagation characteristics at one fixed point after 100 repetitions, where A indicates LSAW speed and B indicates normalized propagation attenuation. References 1: J. Kushibiki and N. Chubachi, "Material ch
aracterization byline-focus-beam acoustic microsco
pe, "IEEE Trans. Sonics and Ultrason., SU-32, pp. 1
89-212 (1985). Literature 2: Takehiko Kobayashi, Junichi Kushibiki, Noriyoshi Nakabachi, "Measurement Accuracy of a Linear Focused Beam Ultrasonic Microscope", IEICE Techniques, US91-43, p.
p. 27-34 (1991).

Claims (13)

[Claims] 1. An ultrasonic microscope mechanism provided with an acoustic lens with a water coupler interposed between the sample surface and a sample surface, a case accommodating the ultrasonic microscope mechanism, and being shielded from an external environment; A control and measurement unit that is electrically connected to the ultrasonic microscope mechanism unit, supplies a high-frequency pulse, and measures the response signal to measure the characteristics of the sample. A temperature sensor that detects a temperature and outputs a detected temperature signal, and is connected by the case, the air duct, and the exhaust duct,
Air-conditioning means for circulating temperature-controlled air through the air duct, the case, and the exhaust duct; temperature control means for controlling air temperature in the air-conditioning means based on a detected temperature signal from the temperature sensor; And a space shielding means for forming a substantially closed space surrounding the periphery of the water coupler. 2. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein said ultrasonic microscope mechanism section receives a high-frequency pulse from said control and measurement section, emits an ultrasonic pulse, and leaks from said sample. A transducer for receiving the surface acoustic wave and providing the response signal to the control and measurement unit; an ultrasonic pulse from the transducer being focused and incident on the sample via the water coupler, and the leakage elastic surface from the sample is An acoustic lens that detects a wave and supplies the transducer to the transducer; and a mechanical operation unit that has a sample stage on which the sample is placed and moves the sample stage with respect to the acoustic lens. 3. The ultrasonic microscope for quantitative measurement according to claim 2, wherein the space shielding means includes a curtain provided around the water coupler, the acoustic lens, and the transducer. 4. The ultrasonic microscope apparatus for quantitative measurement according to claim 3, wherein said space shielding means includes a top plate provided on said transducer, and said curtain extends downward from a peripheral edge of said top plate. . 5. An ultrasonic microscope apparatus for quantitative measurement according to claim 2, wherein said space shielding means is provided so as to surround said water coupler, said acoustic lens and said transducer, and is constituted by a wall of constant temperature water. And a constant temperature water circulating means for controlling and circulating the temperature of the constant temperature water. 6. The ultrasonic microscope for quantitative measurement according to claim 1, wherein the water coupler is provided between a surface of the sample and a lower end surface of the acoustic lens in contact therewith. It is a water drop. 7. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein the water coupler is provided between the sample and a lower end of the acoustic lens which faces the surface of the sample at an interval. Includes water to be submerged and a container for containing the water. 8. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein the tank is provided outside the case, the outer periphery is surrounded by constant-temperature circulating water, and the inner side is a tank for containing pure water. A constant-temperature water tank, a constant-temperature circulating device for controlling and circulating the temperature of constant-temperature circulating water on the outer periphery of the tank, and a water supply means for supplying pure water in the tank to the water coupler in the case as necessary. In addition. 9. An ultrasonic microscope for quantitative measurement according to claim 8, further comprising a discharging means for discharging water from said water coupler out of said case. 10. An ultrasonic microscope for quantitative measurement according to claim 1, wherein the filter removes dust in the air and buffers an air flow at an entrance from the ventilation duct to the inside of the case. Is provided. 11. The ultrasonic microscope for quantitative measurement according to claim 1, wherein the air-conditioning unit heats the air under the control of the temperature control unit.
A circulation fan that sends the superheated air into the air duct and a cooler that cools the air from the exhaust duct are included. 12. An ultrasonic microscope for quantitative measurement according to claim 1, wherein a sample cassette for holding a plurality of samples arranged opposite to each other with a gap therebetween is provided.
A transfer arm for transferring the sample from the sample cassette to the sample table and transferring the measured sample from the sample table to the sample cassette is provided in the case. 13. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein the mechanical operation unit is provided in the case, and moves the sample stage in x, y, z, θ _x , and θ _y directions. And a movement control unit provided outside the case, electrically connected to the machine operation unit, and controlling the movement thereof.