JP3392041B2 - Ultrasonic microscope for quantitative measurement - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic microscope apparatus for quantitative measurement for performing propagation measurement of leaky surface acoustic waves (LSAW), in particular, phase velocity with high accuracy.

[0002]

2. Description of the Related Art An ultrasonic microscope has been developed as a new material / material property analysis / evaluation technology. The measurement method using an ultrasonic microscope includes an image measurement method and a quantitative measurement method. In the quantitative measurement method, the V (z) curve analysis method is used to measure the propagation characteristics (phase velocity / propagation attenuation) of the LSAW excited on the sample surface. A point-focused ultrasonic beam (PFB) and a linear-focused ultrasonic beam (LFB) can be used for this measurement. Here, an explanation will be given by taking an LFB acoustic microscope (see Document 1) dedicated to quantitative measurement.

FIG. 1 is a principle block diagram of a conventional ultrasonic microscope. The coordinate axes x, y, z are taken as shown in the figure. The ultrasonic microscope 14 includes an ultrasonic mechanism section 14A and a control measurement section 1
4B. The ultrasonic mechanism unit 14A includes an ultrasonic transducer 4, an LFB acoustic lens 5, a water coupler 6, a sample 7, a thermocouple 9, and a machine operation unit 11. The control measurement unit 14B includes a pulse mode measurement system 1, a directional bridge 3, an A / D converter 8, a digital voltmeter 10, a stage controller 12, and a computer 13. The high frequency pulse signal 2 generated in the pulse mode measurement system 1 of the control measurement unit 14B is given to the ultrasonic transducer 4 via the directional bridge 3 and converted into an ultrasonic signal, and the opening surface is formed into a cylindrical shape. The LFB acoustic lens 5 converges in a wedge shape through the water coupler 6 and makes the light incident on the sample 7. The reflected signal from the sample surface is converted again into an electric signal, the output of which is detected by the pulse mode measurement system 1 via the directional bridge 3 and converted into a digital signal by the A / D converter 8, and then the computer 13 It is stored in the data recording medium in.

Here, between the sample 7 and the LFB acoustic lens 5.
When the distance z is approached from the focal position of the acoustic lens,
As shown in 2, the transducer output V (z) changes periodically.
Turn into. This is called the V (z) curve and is the Z of the machine operation unit 11.
(Vertical movement) A pulse synchronized with the movement of the stage is
By sending from the controller 12 to the A / D converter 8.
Is recorded as a function of z. Also, thermocouple 9 and digital
Using the Talvolt meter 10, the temperature of the water coupler 6
It is measured at the same time. In addition to the Z stage, the machine operation unit 11
Θ (times for measuring the propagation direction dependence of LSAW propagation characteristics
XY stage for measuring the distribution on the stage and sample surface
(Horizontal movement) Stage, θ for alignment _x, Θ_y(Tilt
It is composed of a stage, sample stand, etc. X
The Y, Z and θ stages are each driven by a motor.
And is controlled by the stage controller 12. Well
Also, the computer 13 controls the entire system, and V (z) songs
Lines are measured and analyzed to obtain LSAW propagation characteristics.

From the interference period Δz in the V (z) curve, the phase velocity V _LSAW of the _LSAW is calculated from the waveform attenuation rate to the normalized propagation attenuation rate α.
_LSAW is required. Here, the measurement of the phase velocity will be described in detail. FIG. 2 is an example of the measured V (z) curve. V (z)
LSAW velocity V from the interference period Δz in the curve
_LSAW is required. V _LSAW = V _W / {1- (1-V _W / 2fΔz) ² } ^1/2 (1) where f is the ultrasonic frequency, and V _W is the longitudinal sound velocity in water. Since V _W is known as a function of temperature, it can be obtained by measuring the temperature of the water coupler 6 when measuring the V (z) curve. From this, it can be seen that the measurement accuracy of V _LSAW mainly depends on the measurement accuracy of water temperature that determines V _W and the movement accuracy of the z stage.

For example, in order to obtain the measurement resolution of 0.01% LSAW speed, the measurement accuracy of the coupler temperature within 0.1 ° C. is required (see Reference 2). In an actual device, as shown in FIG. 1, the thermocouple 9 is installed as close to the sound wave propagation region as possible, but the thermocouple 9 cannot be directly inserted into the sound wave propagation region. Usually there is a temperature distribution within the coupler. The main causes of this are that the temperature near the coupler surface decreases due to the heat of vaporization due to the evaporation of the coupler and a temperature gradient occurs in the coupler, and the temperature environment around the coupler changes due to the air flow. Therefore, in order to measure the coupler temperature with high accuracy, it is extremely important to stabilize the temperature environment around the sample.

Furthermore, the elastic properties of materials are generally temperature dependent. For example, the LSAW velocity of crystal X-axis propagation on a 128 ° rotated Y plate lithium niobate single crystal substrate, which is a typical substrate for surface acoustic wave devices, has a temperature coefficient of -0.16 (m / s) / ° C (Reference 2). Therefore, LS for a temperature change of 1 ° C
The AW speed changes by 0.16m / s (0.004%). Therefore, in order to compare the elastic characteristics between samples, it is essential to realize a stable temperature environment and measure the LSAW propagation characteristics at the same temperature.

Also, as is well known, the movement characteristics of the mechanical stage change depending on the temperature due to the thermal expansion of the guide and the lead screw. Therefore, stabilization of the temperature environment is extremely important also for performing highly accurate positioning of the z coordinate with reproducibility. Up to now, by installing the entire device in a temperature-controlled room, the stability of the temperature environment was improved, the measurement accuracy of the LSAW speed was improved, and a measurement reproducibility of ± 0.005% was achieved in a short time (Reference 2). reference). However, in the long run, there will be fluctuations in the temperature stability point,
There is a problem that the absolute value of the measured LSAW speed will fluctuate. In addition, it takes time to stabilize the temperature in a temperature-controlled room, the temperature stability point changes due to internal heat load conditions such as the number of people in the room, ON / OFF of indoor lighting, and the number of operating devices in the room. There are problems that a local temperature change occurs due to entry and exit or movement, and that the temperature environment of the atmosphere around the sample changes due to the blowing of air from the air conditioner. Therefore, the stable point of the coupler temperature fluctuates by about ± 1 ° C depending on the measurement conditions, and the stability during measurement is about ± 0.2 ° C.

Further, the water coupler between the ultrasonic device and the sample is once removed when the sample is exchanged, and then reinjected after the sample is installed. Therefore, a waiting time is required until the temperature of the sample and the water coupler stabilizes again, and it is difficult to continuously and efficiently measure a plurality of samples. References 1: J. Kushibiki and N. Chubachi, "Material ch
aracterization byline-focus-beam acoustic microsco
pe, "IEEE Trans. Sonics and Ultrason., SU-32, pp. 1
89-212 (1985). Reference 2: Takehiko Kobayashi, Junichi Kushibiki, Noriyoshi Nakabachi , "Linear Focusing Bi"
Accuracy of dome ultrasonic microscope ”,” Technical Techniques, US91-43, p ”
p. 27-34 (1991).

[0010]

As described above, in the conventional apparatus, it is not easy to stabilize the measurement environment at a desired temperature, and a highly uniform single crystal material used as an electronic device material. The measurement accuracy was insufficient to capture a slight change in the elastic properties of the substrate.

An object of the present invention is to provide a temperature-stabilized ultrasonic microscope apparatus which enables quantitative measurement of material properties with high accuracy.

[0012]

In the quantitative measurement ultrasonic microscope apparatus of the present invention, a mechanical operation unit including an ultrasonic device and a sample is installed in a case capable of temperature control, and the temperature is controlled by the temperature control means. Circulate the air inside the case,
In addition, the space shielding means surrounds the water coupler to form a substantially closed space, thereby suppressing temperature fluctuations due to air flow and temperature fluctuations inside the coupler due to evaporation of the coupler.

Further, when more precise temperature control within, for example, 0.01 ° C. is required, the ultrasonic device and the periphery of the sample are made into a completely closed space, and constant temperature water whose temperature is precisely controlled is circulated around the space. In this way, the temperature environment will be further stabilized according to the LSAW speed measurement accuracy required for material evaluation. When continuously measuring multiple samples, 0.01 ° C temperature control is required to enable water supply / drainage of the water coupler, sample exchange, and alignment between the ultrasonic device and the sample without disrupting the stabilized temperature environment. It is equipped with a water supply / drainage device having a function, a sample transport device, and an automatic tilting stage, and it is possible to efficiently perform more accurate measurement.

[0014]

FIG. 3 shows an embodiment of an ultrasonic microscope apparatus according to the present invention. The LPB ultrasonic microscope mechanism unit 14A provided in the case 15 in the figure is configured to include the transducer 4, the acoustic lens 5, the water coupler 6, the sample 7, the thermocouple 9, and the mechanical operation unit 11 in FIG. There is. Further, the control measurement unit 14B provided outside the case 15 also includes the pulse mode measurement system 1 in FIG.
The directional bridge 3, the A / D converter 8, the digital voltmeter 10, the stage controller 12, and the computer 13 are configured to be included, and the case 1 is wired.
5 is connected to the transducer.

The LFB ultrasonic microscope mechanism unit 14A including the ultrasonic device (transducer 4 and acoustic lens 5) and the mechanical operation unit 11 including the sample stage is installed in the acrylic case 15. Set resolution 0.00 in case 15
A desired temperature can be set by the temperature controller 16 of 1 ° C. The temperature inside the case is measured by a temperature sensor 17 using a platinum resistance temperature detector and input to the temperature controller 16. Air whose temperature is controlled by an air conditioner is supplied from the upper part of the case 15 by a circulation fan 18 through a blower duct 19 and a high-performance filter 20. The filter 20 removes dust in the air and acts as a buffer for the flow of the supplied air to make the air flow uniform. Further, the air discharged from the lower part of the case 15 returns to the air conditioner through the exhaust duct 21. The air returned to the air conditioner is cooled by the cooler 22, and the electric heater 2
Reheated by 3. At this time, the output of the electric heater 23 is such that the temperature at the installation position (control point) of the temperature sensor 17 inside the case 15 is always the set temperature.
PID control (proportional, integral,
Differential control). Here, it goes without saying that the temperature stability inside the case 15 can be further improved by using a material having a high heat insulating effect as the material of the case 15 and stabilizing the temperature outside the case 15.

4A, 4B, and 4C respectively show an embodiment of the ultrasonic microscope mechanism section 14A in the embodiment of FIG. The main cause of the temperature distribution inside the water coupler 6 is the evaporation of the water coupler and the fluctuation of the temperature environment due to the air flow around the water coupler 6, as described above. Therefore, the temperature of the water coupler 6 can be stabilized by making the ultrasonic device and the peripheral portion of the sample into a half space or a closed space to block the air flow as much as possible. Furthermore, since the atmosphere around the water coupler 6 becomes closer to the saturated state of water vapor, evaporation of the water coupler can be suppressed accordingly, and the temperature distribution in the coupler can be reduced and the temperature environment can be further stabilized.

FIG. 4 shows some embodiments in which a curtain is provided around the water coupler 6 to block the air flow and bring the water vapor in the atmosphere close to saturation. When the sample surface distribution of the LSAW velocity and the propagation direction dependency are measured, the XY stage 34 and the θ stage 33 that form the mechanical operation unit 11 are moved. Therefore, in order not to hinder the movement of the stage, a top plate 28 is provided on the ultrasonic device 24 as shown in the embodiment of FIG. 4A, and the ultrasonic device 24 and the water coupler 6 are provided from the periphery of the top plate 28. ，
A curtain 29 that does not reach the surface of the sample 7 on the sample table 8 by a polyethylene film, a plastic film, an acrylic plate, etc.
Is provided as a space shielding means. Accordingly, the periphery of the LFB ultrasonic device 24 (transducer 4 and acoustic lens 5) and the water coupler 6 can be a semi-closed space. Further, as in the embodiment of FIGS. 4 and B, the curtain 29 may be covered to the extent that it covers the θ stage 33. Further, when the measurement at one fixed point or the sample is small and the movement amount of the XY stage 34 is small, the curtain 29 is extended to the sample table 32 as shown in the embodiment of FIGS. Can be built. By thus forming the closed space according to the purpose, it is possible to easily improve the stabilization of the temperature environment.

Further, as shown in FIG. 5, in order to stabilize the water coupler 36 at a specific temperature with extremely high accuracy, for example, within 0.01 ° C., the constant temperature water 38 whose temperature is precisely controlled by the constant temperature water circulating device 39 is used. The circulated wall constitutes the constant temperature chamber 40 as a space shielding means, and the ultrasonic device 24 including a transducer, an acoustic lens, the water coupler 6, and the sample 7 are arranged inside the constant temperature chamber 40. This prevents wind from hitting the water coupler 6 and brings water vapor in the atmosphere closer to saturation. The embodiment of FIG. 5A is a case where the periphery of the LFB ultrasonic device 24 (transducer 4 and acoustic lens 5) and the sample 7 is surrounded by a constant temperature chamber 40, and the embodiment of FIGS. This is the case when the whole is enclosed, including the bottom, except for the necessary electrical connections. By doing so, the flow of air introduced into the case 15 does not hit the water coupler 6 and the temperature is stabilized by the constant temperature water, so that highly accurate quantitative measurement becomes possible.

By the way, when exchanging the sample, it is necessary to remove and re-inject the water coupler between the ultrasonic device and the sample. FIG. 6 is a block diagram of an example of a water supply / drainage device for water supply / drainage of a coupler without degrading the stability of the measurement environment.
As the ultrasonic microscope mechanism unit 14A, one shown in any one of the embodiments of A, B, and C of FIG. 4 or the embodiment of FIGS. 5A and 5B is used. The ducts 19, 21, the filter 20, the curtain 29, or the constant temperature is used. The chamber 40 and the like are not shown. Pure water 44 used as the water coupler 6 is stored in a pure water tank 45 and injected between the acoustic lens 5 and the sample 7 by a water supply pump 46. After the measurement, the water is pumped out by the drainage pump 47 and discharged to the drainage tank 48. The pure water tank 45 is installed in a constant temperature water tank 50 whose temperature is controlled within 0.01 ° C. by a constant temperature water circulating device 49, so that pure water 44 having a constant temperature can always be supplied as the coupler 6. Further, the pure water 44 in the tank 45 is removed by the degassing device 51 from the air that has been dissolved therein, and the purity thereof is maintained by the pure water maintaining device 52.

In each of the embodiments shown in FIGS. 4, 5 and 6, the case where a water drop is injected between the acoustic lens 6 and the sample 7 as the water coupler 6 is shown, but as shown in FIG.
Alternatively, the entire sample 7 may be immersed in the water coupler 6. In the case of continuously measuring a plurality of samples, if the samples can be exchanged without degrading the stability of the temperature environment, it is not necessary to open and close the case 15, and more accurate measurement can be performed and the measurement efficiency can be improved. Can be achieved. FIG. 8 shows an example of a sample transport device for this purpose. The measurement sample 7 is installed in the sample cassette 54, and is automatically transferred to the sample table 8 by the transfer arm 55 as needed. The sample 7 for which the measurement has been completed is returned to the sample cassette 54 by the transfer arm 55. Since these are installed in the case 15 in which the temperature environment shown in FIG. 3 is stabilized, the sample exchange work can be performed without opening and closing the case, and a plurality of samples can be continuously processed while maintaining a stable temperature environment. Can be efficiently and accurately measured.

After setting the sample and injecting the coupler, it is necessary to perform alignment between the ultrasonic device and the sample. Regarding the ultrasonic device, alignment may be performed only when the device is installed, and thereafter, only alignment of the sample surface may be performed unless the device is replaced.
In the conventional apparatus, the tilt stage on which the sample stage is installed has to be manually operated, but in the apparatus of the present invention, the stability of the measurement environment is deteriorated by providing a motor-driven automatic tilt stage. Without this, the sample surface can be automatically aligned.

Further, in order to perform highly accurate z-positioning, a laser interferometer may be used to perform absolute positioning of the z-coordinate.

[0023]

[Example] In improving the measurement accuracy of the LSAW propagation characteristics by the ultrasonic microscope for quantitative measurement, the fundamental factor is the stabilization of the temperature environment. In the prototype device, the air temperature at the temperature control point in the case was stable within the set value ± 0.005 ° C. In the experiment, a 200MHz band LFB ultrasonic device with a radius of curvature of 1mm was used, and the 128 ° rotated Y-plate lithium niobate single crystal substrate was used as a sample. Ultrasonic frequency
The amount of water coupler between the 225 MHz, LFB ultrasonic device and the sample is about 1 cm ³ , in the form of water droplets. The temperature controller was set so that the temperature of the water coupler was around 23 ° C. The resolution of the automatic tilt stage used to align the ultrasonic device and the sample is 6 × 10 ^-7 rad,
Alignment can be performed with sufficient accuracy and reproducibility. An air bearing stage with excellent straightness was used as the Z stage, and absolute positioning of the z coordinate was performed by a laser interferometer (resolution 20 nm) installed on the z axis. However, in this embodiment, the sample transport device and the automatic water supply / drainage device are not used.

FIG. 9 shows repeated measurements of LSAW propagation characteristics (circle mark), propagation direction dependence measurement (square mark), and line scan (triangle mark), which are usually carried out in the evaluation of materials by an LFB acoustic microscope. The respective average values of the coupler temperatures at that time are shown. 100 times in repetition,
Measurements were made in the range of 200 ° per 1 ° in the propagation direction dependency, and in the range of ± 30 mm per 1m in the line scan. Error bars indicate the maximum and minimum values of coupler temperature during each measurement. It can be seen that the temperature change of the coupler is 23 ° C ± 0.1 ° C or less throughout the measurement, and the average temperature change in each measurement is 23 ° C ± 0.05 ° C or less. From the above temperature coefficient (-0.16 (m / s) / ℃),
The change of LSAW speed with respect to the temperature change of ± 0.1 ℃ is ± 0.016m /
s, which is small enough.

FIG. 10A shows repetition 10 at one fixed point.
It is the measurement result of the LSAW velocity when the measurement was performed 0 times. L
The SAW propagation direction was the crystal X-axis direction. The coupler temperature at this time had an average value of 23.043 ° C and a maximum change of 0.017 ° C. In addition, the LSAW speed measurement results have an average value of 3898.21 m / s,
The standard deviation σ was 0.038 m / s (0.001%). Further, FIGS. 10 and B show the measurement results of the propagation attenuation at this time, and the average value was 1.6373 × 10 ⁻² and σ was 7.4 × 10 ⁻⁶ (0.045%). Evaluating LSAW velocity measurement resolution by ± 2σ gives ± 0.0
It is 02%.

Next, as shown in FIG. 5B, a polyethylene film was used as a semi-closed space around the sample, and measurement was repeated 100 times at one fixed point. The maximum change in coupler temperature at this time was 0.007 ° C. In addition, the LSAW velocity measurement results have an average value of 3898.23 m / s and σ of 0.027 m / s (0.0007%).
Met. Also, the measurement result of the propagation attenuation is 1.6377 as an average value.
× 10 ^-2 , σ is 6.2 × 10 ^-6 (0.038%), and it can be seen that both the temperature stability and the measurement reproducibility are improved as compared with the measurement result in the above-mentioned open system.

Here, for example, the resolution of the LSAW velocity desired to evaluate this single crystal material is 0.1 m / s (0.0026
%), This device realizes the stability of the measurement environment and the measurement reproducibility of the LSAW propagation characteristics that satisfy this condition.

[0028]

According to the present invention, it is possible to easily stabilize the temperature environment of measurement in an ultrasonic microscope, especially around the water coupler and the sample to a desired temperature, and improve the measurement accuracy of LSAW propagation characteristics. It enables highly accurate analysis and evaluation of material properties. Also, since the temperature can be set to any temperature,
The temperature dependence of LSAW propagation characteristics can be easily measured. Furthermore, since the samples can be exchanged while maintaining the stability of the temperature environment, highly accurate and efficient measurement can be performed even when a plurality of samples are continuously measured. Also, when a PFB ultrasonic microscope is used, the same effect can be obtained by the same method. Although the measurement of LSAW propagation characteristics has been described here, this equipment can easily perform bulk wave propagation characteristics (phase velocity and propagation attenuation of longitudinal and transverse waves) by replacing the ultrasonic device with a bulk ultrasonic device. It can also be applied to the measurement of.

[Brief description of drawings]

FIG. 1 is a block diagram of a conventional LFB ultrasonic microscope apparatus.

FIG. 2 is an example of a V (z) curve measured by an LFB acoustic microscope.

FIG. 3 is a block diagram showing the overall configuration of the ultrasonic microscope apparatus of the present invention.

FIG. 4 shows an embodiment of the ultrasonic microscope mechanism portion in FIG. 3, where A is a curtain lowered near the sample surface to form a closed space surrounding the water coupler, and B is a curtain lowered so as to cover the θ stage. To form a closed space,
C shows the case where the curtain is lowered so as to cover the sample stand to form a closed space.

FIG. 5A is a view in which the ultrasonic device, the water coupler, and the periphery of the sample are placed in a constant temperature chamber and constant temperature water is circulated around the bottom surface except for the bottom surface. In that case, an example will be shown.

FIG. 6 shows an example of an automatic coupler water supply / drainage device.

FIG. 7 shows an example of the form of installation of a water coupler between the ultrasonic device and the sample.

FIG. 8 shows an example of a sample transport device.

FIG. 9 is a graph showing changes in coupler temperature during measurement.

FIG. 10 is a measurement result of LSAW propagation characteristics repeated 100 times at one fixed point, where A indicates LSAW velocity and B indicates normalized propagation attenuation .

Claims (13)

(57) [Claims] 1. An ultrasonic microscope mechanism section in which an acoustic lens is provided with a water coupler interposed between the sample surface and the case, a case for accommodating the ultrasonic microscope mechanism section and shielding from the external environment, and the case described above. A control measurement unit that is provided outside the device, is electrically connected to the ultrasonic microscope mechanism unit, supplies a high-frequency pulse, and measures the response signal thereof to measure the characteristics of the sample, and is provided inside the case. The temperature sensor that detects the temperature and outputs the detected temperature signal is connected to the case by the air duct and the exhaust duct.
An air-conditioning unit that circulates temperature-controlled air through the blower duct, the case, and the exhaust duct; a temperature control unit that controls a blown temperature in the air-conditioning unit based on a temperature signal detected by the temperature sensor; and the case. An ultrasonic microscope apparatus for quantitative measurement, comprising: a space shielding means for forming a substantially closed space surrounding the water coupler inside. 2. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein the ultrasonic microscope mechanical section emits an ultrasonic pulse upon receiving a high frequency pulse from the control measuring section, and leaks from the sample. A transducer which receives a surface acoustic wave and gives the response signal to the control measuring section, focuses an ultrasonic pulse from the transducer and makes it enter the sample through the water coupler, and the leaky elastic surface from the sample An acoustic lens that detects a wave and applies it to the transducer, and a mechanical operation unit that has a sample stage on which the sample is placed and moves the sample stage with respect to the acoustic lens are included. 3. The ultrasonic microscope apparatus for quantitative measurement according to claim 2, wherein the space shielding means includes a curtain surrounding the water coupler, the acoustic lens, and the transducer. 4. The ultrasonic microscope apparatus for quantitative measurement according to claim 3, wherein the space shielding means includes a top plate provided on the transducer, and the curtain extends downward from a peripheral edge of the top plate. . 5. An ultrasonic microscope apparatus for quantitative measurement according to claim 2, wherein said space shielding means is provided surrounding said water coupler, said acoustic lens and said transducer, and is a constant temperature chamber constituted by a wall of constant temperature water. And a constant temperature water circulating means for controlling and circulating the temperature of the constant temperature water. 6. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein the water coupler is provided between the surface of the sample and the lower end surface of the acoustic lens so as to be in contact with them. It is a drop of water. 7. The ultrasonic microscope apparatus for quantitative measurement according to any one of claims 1 to 5, wherein the water coupler comprises the sample and a lower end portion of the acoustic lens facing the surface of the sample with a space therebetween. It includes water to be flooded and a container for containing the water. 8. The ultrasonic microscope apparatus for quantitative measurement according to any one of claims 1 to 7, which is provided outside the case, is surrounded by constant temperature circulating water, and is an inner tank for storing pure water. A constant temperature water tank, a constant temperature circulation device for controlling and circulating the temperature of constant temperature circulating water around the tank, and a water supply means for supplying pure water in the tank to the water coupler in the case as needed. Further included. 9. The quantitative measurement ultrasonic microscope apparatus according to claim 8, further comprising: a discharging unit configured to discharge water from the water coupler to the outside of the case. 10. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein a filter that removes dust in the air and buffers an air flow at the entrance from the air duct to the inside of the case. Is provided. 11. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, wherein the air conditioning unit heats air according to the control of the temperature control unit.
A circulation fan that sends the overheated air to the blower duct and a cooler that cools the air from the exhaust duct are included. 12. The ultrasonic microscope apparatus for quantitative measurement according to claim 1, further comprising a sample cassette for holding a plurality of samples arranged facing each other with a gap therebetween.
A transport arm that transports a sample from the sample cassette to the sample stage and transports a measured sample from the sample stage to the sample cassette is provided in the case. 13. The ultrasonic microscope apparatus for quantitative measurement according to claim 1 or 2, further comprising a machine operation unit which is provided in the case and moves the sample table in x, y, z, θ _x , θ _y directions. And a movement control section that is provided outside the case and that is electrically connected to the machine operation section and that controls the movement thereof.