JPH11277399A - Working roller for wire saw and manufacture of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately set detecting surface precision of a ring to be detected and finely detect displacement of a resin layer by forming a groove for setting a wire to an outer peripheral surface of the resin layer and fixing the ring to be detected for detecting the displacement of the resin layer to an end surface of the resin surface by integral molding. SOLUTION: A resin layer 26 is covered and molded to the outer periphery of a core bar 25. Annular grooves 15a, 16a, and 17a for setting a wire 18 are formed to the peripheral surface of the resin layer 26. A ring to be detected 31 made of metal, for detecting displacement of the resin layer 26, is fixed to the end portion of the resin layer 26 by integral molding. Therefore, this case is different from the case of fixing by a screw. That is, detecting surface precision of the ring to be detected 31 can be accurately set and the displacement of the resin layer 26 can be finely detected by a sensor 32 oppositely arranged to the ring to be detected 31. Simultaneously if the resin layer 26 is thin, the ring to be detected 31 can be firmly assembled to the end surface of the resin layer 26.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw processing roller for cutting a workpiece made of a hard and brittle material such as a semiconductor material, a magnetic material, and a ceramic using a wire. It relates to a manufacturing method.

[0002]

2. Description of the Related Art As a conventional processing roller for a wire saw of this type, for example, one having a configuration as shown in FIG. 5 is known. That is, in the conventional processing roller 41, a resin layer 43 such as urethane is formed on the outer periphery of the cored bar 42 by coating, and a large number of annular grooves 45 for mounting the wire 44 on the outer peripheral surface of the resin layer 43 are formed. Is formed. Also,
A detection ring 46 made of metal is attached to an end surface of the resin layer 43 by a plurality of screws 47.

Further, a processing roller 4 is provided on the wire saw.
A sensor 48 is arranged so as to correspond to the ring 46 to be detected. When the resin layer 43 is displaced in the axial direction of the metal core 42 due to thermal expansion or the like due to heat generated during processing of the work, the amount of displacement is determined by the sensor 48 based on the distance from the detected ring 46. Is to be detected.

[0004]

However, in the conventional wire saw processing roller, the metal detection ring 46 is partially displaced on the end face of the resin layer 43 by the tightening force of the plurality of screws 47. . For this reason, there has been a problem that the detection surface accuracy of the detected ring 46 cannot be accurately obtained, and the displacement due to the thermal expansion or the like of the resin layer 43 cannot be minutely detected.

The present invention has been made in view of the problems existing in the prior art, and an object thereof is to detect displacement of a resin layer finely. Also, for other purposes, even if the resin layer is thin,
An object of the present invention is to firmly attach a ring to be detected to an end face of a resin layer.

[0006]

According to a first aspect of the present invention, there is provided a roller for processing a wire saw, wherein a resin layer is formed on the outer periphery of a metal core, and the outer periphery of the resin layer is formed. A groove for wire mounting is formed on the surface, and a detection ring for detecting displacement of the resin layer is fixed to the end face of the resin layer by integral molding.

According to a second aspect of the present invention, in the wire saw processing roller according to the first aspect, the detected ring is made of metal, and is integrally formed in a resin layer on an inner end surface and an inner peripheral surface. It was done.

According to a third aspect of the present invention, there is provided a method for manufacturing a processing roller in a wire saw, wherein a space for forming a resin layer is formed on the outer periphery of a cored bar, and a detected ring is disposed at an edge of the space for forming. In addition, a resin layer is coated on the outer periphery of a cored bar, and a detection ring for detecting displacement of the resin layer is integrally formed on an end face of the resin layer.

According to a fourth aspect of the present invention, in the method of manufacturing a processing roller according to the third aspect, the molding space has a pair of metal fittings fitted at both ends of a cored bar. It is formed by laying a tubular member between gold.

According to a fifth aspect of the present invention, in the method for manufacturing a processing roller according to the fourth aspect, the detected ring is temporarily bonded to an inner surface of the backing metal, thereby forming an edge of the molding space. Is to be placed.

[0011] According to the invention described in claim 6, according to claims 3 to 5
In the method for manufacturing a wire saw processing roller according to any one of the above, an outer peripheral surface of the resin layer is processed after the resin layer is cured.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. First, the configuration of the wire saw will be described. As shown in FIGS. 1 and 2, a cutting mechanism 13 is mounted on a base 11 of the wire saw via a pair of support frames 14. The cutting mechanism 13 includes three processing rollers 15 extending in parallel,
16 and 17, and a number of annular grooves 15 a, 16 a and 17 a for wire mounting are formed on the outer periphery thereof.

The annular grooves 15a, 16a, and 17a are provided with 1
A book wire 18 is wound. A wire guide mechanism 19 including a plurality of guide rollers 20 is provided at a front portion of the support frame 14. Then, the processing rollers 15, 16, 17 are rotated by a wire running motor (not shown), so that the wire 18 is connected to the wire guide mechanism 1.
The roller 9 travels on processing rollers 15, 16, 17 via 9.

Above the cutting mechanism 13, the work supporting mechanism 2
A work 24 made of a hard and brittle material is removably set below the work 3. During the operation of the wire saw, the work supporting mechanism 23 is lowered toward the cutting mechanism 13 by a lifting motor (not shown) while the wire 18 travels between the processing rollers 15, 16, and 17 of the cutting mechanism 13. At this time, the slurry is supplied to the processing portion from a slurry supply mechanism (not shown), and the work 24 is pressed against the wire 18 to make contact therewith.
The work 24 is cut into a wafer by the lapping action.

Next, the processing rollers 15, 16, 17
Will be described in detail. As shown in FIG. 3, each of the processing rollers 15 to 17 includes a metal core 25 and the metal core 25.
Resin layer 26 made of urethane or the like coated on the outer periphery of
And Then, on the outer peripheral surface of the resin layer 26,
A large number of annular grooves 15a, 16a, 17a are formed at intervals.

At both ends of the core bar 25, small-diameter mounting portions 27 are provided.
, And a tapered engaging concave portion 28 is formed on an end surface of each mounting portion 27. And each support frame 14
A tapered engagement projection 30 projecting from the shaft end of the upper bearing unit 29 is engaged with the engagement recess 28 of the mounting portion 27.

At both end surfaces of the resin layer 26, a metal detection ring 31 is fixed on the inner end surface and the inner peripheral surface by integral molding, for example, by casting. A sensor 32 is disposed in the vicinity of the processing rollers 15 to 17 via a mounting bracket 33 so as to correspond to the outer end surfaces of the detected rings 31. When the resin layer 26 of the processing rollers 15 to 17 is displaced in the axial direction of the rollers 15 to 17 due to heat, wire tension, or the like generated during the processing of the work 24, the amount of displacement is determined by the detected ring 31. Is detected by the sensor 32 on the basis of the interval.

Next, a method of manufacturing the processing rollers 15 to 17 configured as described above will be described with reference to FIG.
When the processing rollers 15 to 17 are manufactured, an adhesive is applied to the end surfaces of the pair of metal pads 35 formed of a metal material in a ring shape, and the detected ring 31 is attached to the inner surfaces of the metal pads 35. Is temporarily bonded. In this state, each contact metal 35 is fitted to the mounting portions 27 at both ends of the core metal 25, and is fixed to the mounting portion 27 by a plurality of set screws 36.

Thereafter, a metal tubular member 37 is erected between the outer peripheral surfaces of both the contact members 35, and the inner peripheral surface of the tubular member 37, the outer peripheral surface of the core bar 25, A space 38 for molding the resin layer is formed between the resin layer and the inner peripheral surface. by this,
A pair of detected rings 31 are arranged on both end surfaces of the molding space 38. In this state, when molten resin such as urethane is injected into the molding space 38 from a gate (not shown), the core metal 2
The resin layer 26 is formed on the outer periphery of the resin layer 5, and the detected ring 31 is integrally formed on both end surfaces of the resin layer 26.

After the resin layer 26 has hardened, the cylindrical member 37 is removed, and the outer peripheral surface of the resin layer 26 is required as shown by the chain line in FIG. And the annular grooves 15a to 17
a is formed. Then, from both ends of the core bar 25,
5 is removed, the ring to be detected 31 is held in a state of being cast into both end surfaces of the resin layer 26, and is peeled from the temporary bonding to the backing 35. Thereafter, as shown by the chain line in FIG. 4, the detection surface of each of the detected rings 31 is processed while rotating the metal core 25 around the axis, so that the detected rings 31 are formed.
Can be obtained.

The effects that can be expected from the above embodiment will be described below. In the processing roller for the wire saw of this embodiment, a resin layer 26 is formed by coating the outer periphery of the core metal 25. On the outer peripheral surface of the resin layer 26, annular grooves 15a, 16a, 17a for mounting the wires 18 are formed.
A detection ring 31 made of metal for detecting displacement of the resin layer 26 is fixed to an end face of the resin layer 26 by integral molding.

Therefore, unlike the case of fixing with a screw, the detection surface accuracy of the detected ring 31 can be accurately obtained, and the sensor 32 arranged opposite to the detected ring 31 can be obtained.
Thereby, the displacement of the resin layer 26 can be finely detected. At the same time, even when the resin layer 26 is thin, the detected ring 31 can be firmly attached to the end face of the resin layer 26.

In the wire saw processing roller of this embodiment, the detected ring 31 is integrally formed in the resin layer 26 on the inner end face and the inner peripheral face. For this reason,
The detected ring 31 can be firmly formed on the end surface of the resin layer 26, and the assembling strength of the detected ring 31 can be ensured.

In the method of manufacturing a processing roller in a wire saw according to this embodiment, a molding space 38 for forming a resin layer is formed on the outer periphery of the cored bar 25, and a metal detection ring is formed on the edge of the molding space 38. 31 are arranged. In this state, molten resin is injected into the molding space 38 to form the resin layer 26 on the outer periphery of the metal core 25, and the end face of the resin layer 26 is used to detect the displacement of the resin layer 26. The detection ring 31 is formed.

Therefore, when the resin layer 26 is formed on the outer periphery of the metal core 25, the detected ring 3 is attached to the end face of the resin layer 26.
1 can be integrally formed, and the ring to be detected 31 can be easily assembled.

In the manufacturing method of the processing roller of this embodiment, the molding space 38 has the pair of backing plates 35 fitted to both ends of the core bar 25 and the cylindrical member 37 between the backing plates 35. Is formed by erection. Therefore, the molding space 3 for molding the resin layer is formed around the outer periphery of the cored bar 25.
8 can be easily formed, and by injecting molten resin into the molding space 38, the core metal 25 can be formed.
A resin layer 26 can be formed by coating the outer periphery of the resin layer.

In the method of manufacturing the processing roller according to the present embodiment, the ring to be detected 31 is temporarily bonded to the inner surface of the pad 35 so as to be disposed at the edge of the molding space 38. . For this reason, the detected ring 31 can be easily arranged at the edge of the molding space 38.

In the method of manufacturing a processing roller according to the present embodiment, since the outer peripheral surface of the resin layer 26 is processed after the resin layer 26 is cured, the outer diameter of the outer peripheral surface of the resin layer 26 can be accurately determined. Can be.

In the method of manufacturing the processing roller of this embodiment, after the resin layer 26 is cured, the outer peripheral surface of the resin layer 26 is processed while rotating the core metal 25 around the axis. For this reason, around the axis of the cored bar 25,
The outer diameter of the outer peripheral surface of the resin layer 26 can be accurately determined.

In the method of manufacturing a processing roller according to this embodiment, after the resin layer 26 is cured, the detection surface of the detection target ring 31 is processed while rotating the core metal 25 around the axis. . Therefore, the detection surface accuracy of the detected ring 31 with respect to the axis of the metal core 25 can be more accurately obtained.

This embodiment can be embodied with the following modifications. The detection ring 31 is integrally formed only on one end surface of the resin layer 26, and at one end of the processing rollers 15 to 17,
The sensor 32 detects the thermal expansion displacement of the resin layer 26.

Instead of casting the detection target ring 31 into the resin layer 26 and integrally molding the same, the molding is performed by another molding method. A retaining projection or a recess embedded and formed in the resin layer 26 is provided on at least one of the inner end surface and the inner peripheral surface of the detected ring 31.

Further, technical ideas other than the claims grasped by the embodiment will be described below together with their effects. The method for manufacturing a wire saw processing roller according to any one of claims 3 to 5, wherein after the resin layer is cured, the outer peripheral surface of the resin layer is processed while rotating the core metal around the axis.

According to this manufacturing method, the outer diameter of the outer peripheral surface of the resin layer can be accurately determined centering on the axis of the cored bar. The method according to any one of claims 3 to 5, wherein after the resin layer is cured, the detection surface of the detected ring is processed while rotating the core around the axis. .

According to this manufacturing method, the detection surface accuracy of the detected ring with respect to the axis of the cored bar can be more accurately obtained.

[0036]

The present invention is configured as described above, and has the following effects. According to the first aspect of the present invention, the detection surface accuracy of the detected ring can be accurately obtained, and the displacement of the resin layer can be finely detected.

According to the second aspect of the present invention, the ring to be detected can be firmly formed on the end face of the resin layer, and the accuracy of the detection surface of the ring to be detected when the processing roller rotates can be further assured. Can be improved.

According to the third aspect of the invention, when the resin layer is formed on the outer periphery of the cored bar, the detected ring can be integrally formed on the end surface of the resin layer, and the detection ring can be assembled. Can be easily performed.

According to the fourth aspect of the present invention, the molding space for the resin layer can be easily formed on the outer periphery of the cored bar, and the molten resin is injected into the molding space to form the core. A resin layer can be formed by coating the outer periphery of gold.

According to the fifth aspect of the present invention, the ring to be detected can be easily arranged at the edge of the molding space, and when the backing metal is removed from the core after the resin layer is cured, The contact metal can be easily separated from the temporary adhesion state with the ring to be detected.

According to the invention described in claim 6, the outer diameter of the outer peripheral surface of the resin layer can be accurately determined.

[Brief description of the drawings]

FIG. 1 is a side sectional view showing a main part of an embodiment of a wire saw.

FIG. 2 is a perspective view showing a cutting mechanism of the wire saw.

FIG. 3 is an enlarged sectional view of a main part of a processing roller of a cutting mechanism.

FIG. 4 is a sectional view of an essential part showing a method for manufacturing a processing roller.

FIG. 5 is a sectional view of a main part showing a conventional processing roller.

[Description of Signs] 13: Cutting mechanism, 15, 16, 17 ... Processing roller, 1
5a, 16a, 17a: annular groove, 18: wire, 21 ...
Slurry supply mechanism, 23: Work support mechanism, 24: Work, 25: Core, 26: Resin layer, 31: Detected ring,
32 sensor, 35 contact pad, 37 tubular member, 38
Molding space.

Claims (6)

[Claims] 1. A resin layer is formed on an outer periphery of a cored bar by forming a groove for wire mounting on an outer peripheral surface of the resin layer, and a displacement of the resin layer is detected on an end surface of the resin layer. A roller for processing wire saws with the ring to be detected fixed by integral molding. 2. The detection target ring is made of metal,
2. The resin sheet according to claim 1, wherein the inner end face and the inner peripheral face are integrally formed in the resin layer.
2. The roller for processing a wire saw according to claim 1. 3. A molding space for a resin layer is formed on the outer periphery of the core metal, a ring to be detected is arranged at an edge of the molding space, and the resin layer is coated and molded on the outer periphery of the core metal. A method for manufacturing a wire saw processing roller, wherein a detection ring for detecting displacement of a resin layer is integrally formed on an end face of the layer. 4. The wire saw according to claim 3, wherein the molding space is formed by fitting a pair of backing plates at both ends of a cored bar and laying a tubular member between the backing plates. Manufacturing method of processing roller. 5. The method for manufacturing a wire saw processing roller according to claim 4, wherein the ring to be detected is disposed at an edge of a molding space by temporarily adhering to an inner surface of a pad. 6. The method for manufacturing a wire saw processing roller according to claim 3, wherein an outer peripheral surface of the resin layer is processed after the resin layer is cured.