JPH11277008A - Method for washing and drying object to be washed and apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for washing and drying an object to be washed and capable of carrying out drying at normal temperature by an organic solvent mist and carrying out washing immediate before the drying and to provide an apparatus for the method. SOLUTION: This washing and drying apparatus 10 dries a wet object 20 by setting a normal temperature organic solvent 16 in a washing and drying tank 12 in which a vibration plate 14 stuck to a sonic vibrator is built in the bottom face, generating a normal temperature organic solvent mist 18 in layered state by oscillating the vibration plate 14 with ultrasonic waves, and putting the wet object 20 in an organic solvent mist 18. Moreover, corresponding to the necessity, instead of small and round plate type PZT vibrators conventionally used for an ultrasonic humidifier, one or a plurality of rectangular PZT vibrators with a wide surface area are arranged and used as the ultrasonic vibrator used for the washing and drying apparatus 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for cleaning and drying a cleaning object.

[0002]

2. Description of the Related Art Conventionally, a method for drying a cleaning object (object to be cleaned) using an organic solvent mist is to heat an organic solvent to a boiling point by a heater to form a mist on an upper portion, and for example, water or the like is included in the mist. When the cleaning material that has been rinsed and rinsed is introduced, the solvent solidifies on the surface of the cleaning material, and the moisture adhering to the surface of the cleaning material is replaced by an organic solvent that is more easily evaporated and dried. The cleaning material in the mist gradually reaches the mist temperature (boiling point), and is taken out of the mist atmosphere. As a result, the attached solvent component evaporates rapidly due to its low latent heat of evaporation, and the drying is completed.

In this method, a heating means for converting the organic solvent into mist and a cooling means for condensing and recovering the evaporated mist are required, and the power consumption is large and expensive.
In recent years, it has also been required to be environmentally friendly,
Room temperature cleaning and drying are being pursued from the viewpoint of saving chemicals and energy.

When washing and drying at room temperature, it is necessary to form a mist of an organic solvent at room temperature. As a method of forming mist in an organic solvent at normal temperature, for example, a method of bubbling an organic solvent at normal temperature with a carrier gas has already been disclosed, and a washing / drying method and an apparatus using this method have been disclosed in JP-A-2-291.
No. 128 is proposed.

There is also a method of producing an organic solvent mist at room temperature by a technique such as an ultrasonic humidifier. This method uses a disk-shaped PZT vibrator, always keeping the distance between the vibrator and the water surface constant so that the ultrasonic waves concentrate on a very small part of a diameter of about 5 mm, and concentrating the power at one point, and dispersing the mist on the washing And drying is performed.

[0006]

However, in the case of this method, since the ultrasonic waves are concentrated at one point, the mist density is not uniform over a wide range, so that cleaning unevenness occurs, or cleaning time is required. There is a problem that too. In addition, when the cleaning object is put into an organic solvent, the water level rises and fluctuates, so that the power of the ultrasonic wave fluctuates and the generation of mist also fluctuates.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method and an apparatus for cleaning and drying a cleaning object which is small in size, can be dried at room temperature with an organic solvent mist, and can be cleaned immediately before the drying.

[0008]

In order to solve the above-mentioned problems, the present invention employs the following means. The cleaning and drying method of the cleaning object according to claim 1 is to put a room temperature organic solvent into a cleaning and drying tank in which a vibration plate to which an ultrasonic vibrator is adhered is mounted on the bottom of the tank, and excite the vibration plate with ultrasonic waves. An organic solvent mist at room temperature is generated in a layered form, and the washed material washed with water or the like is put into the layered mist and dried, and then taken out from the layered mist and dried.

According to a second aspect of the present invention, there is provided a method for cleaning and drying a cleaning object, wherein a diaphragm is formed in a double structure of an inner tank and an outer tank, and an ultrasonic vibrator is attached to the bottom of the outer tank. An organic solvent at room temperature is put into the inner tank of the washing and drying tank formed so that the thickness of the bottom of the inner tank is suitable for passing ultrasonic energy, and the diaphragm is excited with ultrasonic waves to remove the organic solvent at room temperature. While generating the solvent mist in layers, circulating cooling water is flowed between the inner tank and the outer tank, and the washed material after washing with water etc. is put into the layered mist, dried, and further taken out therefrom It is characterized in that drying is completed.

According to a third aspect of the present invention, there is provided a method for cleaning and drying a cleaning object according to the first or second aspect of the present invention, wherein first, the surface adhering substance immersed in an organic solvent and adhered to the surface is peeled off and removed by an ultrasonic action. And dried by transferring to a layered mist portion.

[0011] The method for cleaning and drying a cleaning object according to claim 4 is characterized in that the particle size of the organic solvent mist is 30 µm or less.

According to a fifth aspect of the present invention, there is provided an apparatus for cleaning and drying a cleaning object, wherein a room temperature organic solvent is put into a cleaning and drying tank in which a vibration plate to which an ultrasonic vibrator is adhered is mounted on the bottom of the tank. An apparatus for cleaning and drying a cleaning object, wherein the apparatus is configured to generate an organic solvent mist at room temperature by excitation in a layered manner.

According to a sixth aspect of the present invention, there is provided an apparatus for cleaning and drying a cleaning object according to the fifth aspect of the present invention, wherein the cleaning and drying tank has a double structure of an inner tank and an outer tank, and a superstructure is provided on the bottom of the outer tank. Incorporates a vibrating plate to which an ultrasonic vibrator is adhered, and makes the inner tank bottom thickness suitable for passing ultrasonic energy, and allows the circulation cooling water to flow between the inner tank and the outer tank. It is characterized by doing.

According to a seventh aspect of the present invention, there is provided an apparatus for cleaning and drying a cleaning object according to the fifth or sixth aspect, wherein the upper portion of the cleaning and drying tank can be variably sealed.

The cleaning and drying apparatus according to the eighth aspect of the present invention is the apparatus according to any one of the fifth, sixth, and seventh aspects, wherein the cleaning substance is provided on a side wall of the cleaning and drying tank corresponding to the organic solvent mist layer. An opening for carrying in and carrying out is provided.

According to a ninth aspect of the present invention, there is provided an apparatus for cleaning and drying a cleaning object according to the eighth aspect of the present invention, wherein a drying space chamber communicating with the opening is provided adjacent to the cleaning and drying tank.

According to a tenth aspect of the present invention, there is provided an apparatus for cleaning and drying a cleaning object according to any one of the fifth and eighth aspects.
The particle size of the organic solvent mist is 30 μm or less.

According to the eleventh aspect of the present invention, there is provided an apparatus for cleaning and drying a cleaning object according to any one of the fifth to tenth aspects, wherein a liquid pool remaining at an edge portion of the cleaning object to be dried in the cleaning and drying tank has a tip. It is characterized in that the part has a detachable and heatable edge knife.

According to a twelfth aspect of the present invention, there is provided an apparatus for cleaning and drying a cleaning object according to the eleventh aspect, wherein the edge knife is made of a hydrophilic material or a material whose surface is processed to be hydrophilic. And

[0020]

The present invention is configured as described above.
When a predetermined amount of the organic solvent is put into the washing and drying tank and the ultrasonic vibrator is excited by megahertz class ultrasonic waves, an organic solvent mist having a particle size of 30 μm or less at room temperature is formed in a layer on the organic solvent. When a cleaning material washed with water or the like is put into a mist of this size, the mist is uniformly agglomerated on the surface of the cleaning material, moisture is replaced by an organic solvent and eliminated, and drying is performed. Subsequently, by taking out the cleaning object outside the mist atmosphere, the attached solvent component evaporates due to its low latent heat of evaporation, and the drying is rapidly completed.

When an organic solvent at room temperature is put into the washing and drying tank beyond the time when the cleaning object is immersed, the cleaning object is first immersed in the organic solvent, and the surface-adhering substance adhered to the surface is peeled off and removed by an ultrasonic action. It can be transferred to the layered mist portion and dried, and washing and drying can be performed in the same tank.

When the washing / drying tank is formed by an inner tank and an outer tank, and circulating cooling water flows between the inner tank and the outer tank, a rise in the temperature of the inner tank is suppressed, and Even when the organic solvent in the tank is empty, the ultrasonic vibrator does not become empty.

Further, since the upper portion of the washing / drying tank can be variably sealed, it is possible to prevent dust from entering and prevent intrusion of ignition sources, which is preferable for safety measures. Furthermore, since an opening is provided in the side wall of the washing and drying tank corresponding to the portion of the organic solvent mist layer, it is possible to carry in and carry out the washings in such a manner that mist does not leak from this portion. In addition, since a drying space chamber communicating with the opening was provided,
It is possible to prevent the organic solvent mist from diffusing to the outside, and to carry out the washing after reliably drying the washed matter.

Further, the liquid pool remaining at the edge of the cleaning object to be dried in the cleaning and drying tank can be easily removed with an edge knife. Since the edge knife is made of a hydrophilic material or a material whose surface is processed to be hydrophilic, the liquid at the edge of the cleaning object can be positively guided downward, and the liquid pool can be quickly eliminated. You can do it.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a method and an apparatus for cleaning and drying a cleaning object according to the present invention will be described with reference to the drawings. FIG. 1 shows a first embodiment of the present invention. As shown in the drawing, the cleaning / drying apparatus 10 has a cleaning / drying tank 12, and a diaphragm 14 to which an ultrasonic vibrator is adhered is built in the bottom of the tank. A normal temperature organic solvent 16 is put in the washing and drying tank 12, and the vibration plate 14 is excited by ultrasonic waves to generate a normal temperature organic solvent mist 18 in a layered manner.

The ultrasonic vibrator used in the washing and drying apparatus 10 is a small circular plate type P used in an ultrasonic humidifier.
One or more rectangular PZT vibrators having a wide area are arranged as needed in order to uniformly generate an ultrasonic sound field in a relatively wide washing / drying tank 12 instead of a ZT vibrator. An organic solvent that has a boiling point lower than that of water, has a lower specific gravity than water, has a low vapor pressure, easily forms a mist, and is easily soluble in water is suitable. IPA (Iso-propil alcohl) or the like having the property is most suitable.

An organic solvent (eg, IPA) is poured into a washing / drying tank of a washing / drying tank capable of ultrasonic excitation to a depth of about 1 to 10 mm, and when ultrasonic waves are applied, the organic solvent is caused by an ultrasonic cavitation phenomenon. Is on the surface of the tank 100
An organic solvent mist layer having a thickness exceeding about mm can be formed. Since the mist layer is not formed any more, the consumption of the organic solvent is extremely small, and an environment friendly to the earth for a chemical-saving liquid cleaning and drying can be realized. Moreover, since it is in a normal temperature environment, it is also energy saving.

When the operation is actually performed for a long time, the temperature of the organic solvent slightly increases due to the ultrasonic action, so that the thickness of the mist layer 18 also changes, but this is within a range that does not hinder practical use. In addition, it has been confirmed that the decomposition of the IPA of the organic solvent does not progress by ultrasonic waves such as megasonic,
Since there is no need to continuously supply new IPA, drug saving can be achieved.

The method of actually drying the cleaning object is as follows. First, IPA is introduced into the cleaning / drying tank 12 to a depth of about 1 to 10 mm, and the ultrasonic vibrator is excited by 1 MHz class ultrasonic waves. A normal temperature IPA mist 18 having a particle size of 30 μm or less is formed in a layer having a thickness of about 100 mm. When a cleaning material (wafer) 20 as shown in FIG. 1, for example, which is wet by cleaning with water or the like, is put into the IPA mist layer 18, the water on the surface of the wafer 20 is absorbed by the IPA and the surface tension is increased. Reduces the wafer 20
Can be separated from the surface. That is, drying can be performed. Subsequently, by removing the cleaning object from the mist atmosphere, the attached IPA component evaporates due to its low latent heat of evaporation, and the drying is rapidly completed.

In the washing and drying tank 12, IPA at room temperature is
2, the cleaning object 20 is first immersed in the IPA 16 horizontally, and the surface-adhering substance adhered to the surface is peeled off by ultrasonic action and then pulled up as shown in FIG. Then, it is also possible to transfer to the layered mist portion 18 for drying, further arrange nitrogen N ₂ on the layered mist portion 18, pull it up therein, and dry it.
Washing and drying can be performed in the same tank. As a result, a cleaning object having a size of a CD-ROM, which has been frequently used recently, can be easily immersed in the IPA 16 if placed horizontally, and uniform cleaning can be performed.

As described above, when the surface of the cleaning object has a small amount of dirt, the former is put into the direct mist 18 and only drying is performed. Either of the drying methods can be selected. In addition, since the temperature of IPA rises to 50 ° C. in long-term operation, if this heating phenomenon is used as it is, the washing and drying effect is further improved. Further, when the simple operation is used, cleaning and drying are promoted by performing auxiliary heating using a heating device such as a Teflon coat heater.

Next, a second embodiment of the cleaning / drying apparatus according to the present invention will be described. Note that the same reference numerals are given to the same or corresponding parts as those of the cleaning / drying apparatus in the first embodiment. As shown in FIG. 3, the washing and drying tank 12 of the apparatus 10 has a double structure of an inner tank 12a and an outer tank 12b, and a vibration plate 14 having an ultrasonic vibrator bonded to the bottom of the outer tank 12b. The inner bottom of the inner tank 12a has a thickness suitable for allowing ultrasonic energy to pass therethrough, and the circulating cooling water 22 is allowed to flow between the inner tank 12a and the outer tank 12b. . Drying or washing and drying are performed in the same manner as in the first embodiment.
The temperature rise of 2a is appropriately suppressed by the circulating cooling water,
In addition, even when the IPA in the inner tank 12a is empty, the ultrasonic vibrator is not ignited due to the water circulating between the inner tank 12a and the outer tank 12b, and there is no fear of being damaged. .

In the first and second embodiments,
As shown in FIG. 4, a lid 24 that can be variably sealed may be provided on the upper part of the washing and drying tank 12. This way,
This is preferable in terms of safety measures because it is possible to prevent dust from entering and prevent intrusion of ignition sources. In addition, washing thing 2
In the case where 0 is a small and thin object such as a wafer or a CD-ROM, as shown in FIG. An opening 26a may be provided. This opening 26
The cleaning object 20 can be carried in from a. Further, it is also possible to provide an opening 26b for carrying out so as to face the opening 26a for carrying in, and to continuously dry the cleaning object. FIG.
, A drying space chamber 28 communicating with the carry-out opening 26b may be provided. If an opening 30 for carrying out is provided in this drying space chamber 28 and a heating device 32 is arranged inside and nitrogen N ₂ is filled, IPA can be externally provided.
The mist can be prevented from being diffused, and the cleaning object 20 can be reliably dried before being transported to the outside.

Further, as shown in FIG. 7, an edge knife 34 having a sharp tip 34a and a through hole 34b provided in the vicinity of the tip 34a is provided in the washing and drying tank 12, as shown in FIG. As shown in the figure, the distal end portion 34a of the liquid pool 20a remaining at the edge of the cleaning object 20 is configured to be able to freely contact and separate. It is preferable that a Teflon-coated nichrome wire is fitted into the through hole 34b so that only the tip portion 34a can be heated. The heating temperature varies depending on the organic solvent used. For example, in the case of IPA, the boiling point is 82 ° C., so that the heating is performed to reach that temperature. The edge knife 34 is preferably made of quartz glass in consideration of chemical resistance, heat resistance and the like.

When the edge knife 34 is brought into contact with a liquid pool remaining at the edge of the cleaning object 20 during drying, the liquid pool evaporates quickly, so that the drying time can be reduced. In this case, if the edge knife 34 is made of a hydrophilic material or a material whose surface is processed to be hydrophilic, FIG.
As shown in (1), the liquid remaining at the edge of the cleaning object 20 can be positively guided downward, and the liquid pool can be quickly eliminated.

As described above, although the cleaning / drying apparatus 10 has a small size and a simple apparatus configuration, if the wet cleaning material 20 after rinsing with water or the like is clean, the cleaning / drying apparatus 10 is placed in the room temperature organic solvent mist 18. Only drying can be performed, and when there is dirt, both of the ultrasonic cleaning in the organic solvent 16 and the subsequent drying in the organic solvent mist 18 can be continuously performed at room temperature. It is very efficient. It should be noted that, even with the conventional method, it is possible to form a room temperature mist by heating with a heater.
It is necessary to keep the distance between the T-vibrator and the water surface constant at all times, and the control becomes very complicated. However, the present apparatus has solved these problems.

In the above embodiment, a wafer or a CD-ROM is taken as an example of a cleaning object. However, a flat object such as a liquid crystal glass, a hard disk substrate having a diameter of 100 mm or less,
It goes without saying that small-sized objects such as lenses can be washed and dried.

[0038]

As described above, according to the present invention,
A room temperature organic solvent mist is generated in a layer by ultrasonic waves,
Since the washed material washed with water or the like is dried in the mist, energy saving can be achieved, and the organic solvent mist becomes a layer, so that the emission of the organic solvent is reduced and the chemicals can be saved. If dirt remains on the cleaning material, the cleaning material is first immersed in an organic solvent to remove the dirt by ultrasonic action, and then transferred to a layered mist portion and dried. There is an advantage that it can be performed in the same tank.

Further, when the washing / drying tank is formed of an inner tank and an outer tank, and circulating cooling water flows between the inner tank and the outer tank, the rise in temperature of the inner tank is suppressed, and Even when the organic solvent in the tank is empty, there is an effect that the ultrasonic vibrator does not enter an empty state.

Further, since the upper portion of the washing / drying tank can be variably sealed, the contamination of dust can be eliminated and the intrusion of ignition sources can be prevented, so that safety can be achieved.
Furthermore, since an opening is provided on the side wall of the washing and drying tank corresponding to the portion of the organic solvent mist layer, loading and unloading of the cleaning object is facilitated, and a drying space chamber communicating with the opening is provided. In addition, the organic solvent mist can be prevented from being diffused, and the washed object can be reliably dried before being carried out.

Further, since an edge knife capable of heating the tip is provided, the liquid pool remaining on the edge of the cleaning object can be easily removed by the edge knife, and the drying time can be reduced. Furthermore, since the edge knife is made of a hydrophilic material or a material whose surface is processed to be hydrophilic,
The liquid at the edge of the cleaning object can be positively guided downward, and the liquid pool can be quickly eliminated.

[Brief description of the drawings]

FIG. 1 is a view schematically showing a first embodiment of a cleaning / drying apparatus according to the present invention.

FIG. 2 is a diagram illustrating an example of a usage method.

FIG. 3 is a view schematically showing a second embodiment of the cleaning / drying apparatus according to the present invention.

FIG. 4 is a diagram in which a lid is added to the washing and drying apparatus shown in FIG. 1;

FIG. 5 is a diagram in which a carry-in port and a carry-out port for a cleaning object are added to the position of the mist layer in the cleaning / drying tank.

FIG. 6 is a diagram in which a drying space chamber is provided adjacent to a washing and drying tank.

FIG. 7 is a perspective view of an edge knife.

FIG. 8 is a view showing a state in which an edge knife is brought into contact with a liquid pool at an edge portion of a cleaning object.

FIG. 9 is a diagram illustrating a state in which a liquid pool at an edge portion of a cleaning object is sucked by an edge knife.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Washing-drying apparatus 12 Washing-drying tank 12a Inner tank 12b Outer tank 14 Vibration plate 16 IPA (organic solvent) 18 IPA mist layer (organic solvent mist layer) 20 Washing object (wafer) 20a Liquid pool 22 Circulating cooling water 24 Cover 26 Opening Portion 26a Carry-in opening 26b Carry-out opening 28 Drying space chamber 30 Opening 32 Heating device 34 Edge knife

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akio Fujie 3-1-1, Sakaemachi, Hamura-shi, Tokyo Inside Kaijo Co., Ltd. (72) Inventor Tadahiro Omi 2-1 Yonegabukuro, Aoba-ku, Sendai, Miyagi Prefecture. 17− 301

Claims (12)

[Claims] 1. A room temperature organic solvent is put in a washing and drying tank in which a vibration plate to which an ultrasonic vibrator is bonded is incorporated into the bottom of the tank, and the vibration plate is excited by ultrasonic waves to generate a layer of room temperature organic solvent mist. Washing and washing with water or the like, the washed matter is put into the layered mist and dried, and then taken out from the layered mist to finish drying. 2. A diaphragm having a double structure of an inner tank and an outer tank, a vibration plate having an ultrasonic vibrator bonded to the bottom of the outer tank is incorporated, and the thickness of the inner tank bottom is reduced by ultrasonic energy. In the inner tank of the washing and drying tank formed as a thickness suitable for passing,
A normal temperature organic solvent is put in, and the diaphragm is excited by ultrasonic waves to generate a normal temperature organic solvent mist in layers, and circulating cooling water is flown between the inner tank and the outer tank, and then washed with water or the like. A method for washing and drying a washed object, wherein the washed object is put into a layered mist and dried, and is taken out of the layered mist and dried. 3. The method according to claim 1, wherein the cleaning object is first immersed in an organic solvent, and the surface adhering substance adhering to the surface is peeled and removed by an ultrasonic action, and then transferred to a layered mist portion and dried. Or the washing and drying method of the washing according to item 2. 4. The method according to claim 1, wherein the particle size of the organic solvent mist is 30 μm or less. 5. A room temperature organic solvent is put into a washing and drying tank in which a vibration plate to which an ultrasonic vibrator is bonded is incorporated into the bottom of the tank, and the vibration plate is excited by ultrasonic waves to generate a layer of room temperature organic solvent mist. An apparatus for cleaning and drying a cleaning object, characterized in that the apparatus is configured to cause the cleaning. 6. The washing / drying tank has a double structure of an inner tank and an outer tank, and a diaphragm having an ultrasonic vibrator bonded to the bottom of the outer tank is incorporated so that the thickness of the inner tank bottom can be increased. The cleaning and drying apparatus for a cleaning object according to claim 5, wherein the apparatus is configured to have a thickness suitable for allowing sonic energy to pass therethrough and to further allow circulating cooling water to flow between the inner tank and the outer tank. 7. An apparatus for cleaning and drying a cleaning object according to claim 5, wherein an upper portion of the cleaning and drying tank can be variably sealed. 8. The cleaning / drying tank corresponding to the organic solvent mist layer has a side wall provided with openings for carrying in / out of the cleaning object, according to claim 5, 6, and 7. Washing and drying equipment for washing items. 9. The cleaning and drying apparatus for a cleaning object according to claim 8, wherein a drying space chamber communicating with the opening is provided adjacent to the cleaning and drying tank. 10. The apparatus for cleaning and drying a cleaning object according to claim 5, wherein the particle size of the organic solvent mist is 30 μm or less. 11. A liquid pool remaining at an edge portion of a cleaning object to be dried in a cleaning / drying tank is provided with a heatable edge knife whose tip portion can be freely attached and detached.
11. The washing and drying apparatus for washing articles according to any one of claims to 10. 12. The apparatus according to claim 11, wherein the edge knife is made of a hydrophilic material or a material whose surface is processed to be hydrophilic.