JPH11274184A - Apparatus for feeding solder to chip bonder - Google Patents

Apparatus for feeding solder to chip bonder

Info

Publication number
JPH11274184A
JPH11274184A JP7818798A JP7818798A JPH11274184A JP H11274184 A JPH11274184 A JP H11274184A JP 7818798 A JP7818798 A JP 7818798A JP 7818798 A JP7818798 A JP 7818798A JP H11274184 A JPH11274184 A JP H11274184A
Authority
JP
Japan
Prior art keywords
solder
pieces
suction head
chip
island
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7818798A
Other languages
Japanese (ja)
Inventor
Minoru Hase
稔 長谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Machinery Inc
Original Assignee
Nichiden Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichiden Machinery Ltd filed Critical Nichiden Machinery Ltd
Priority to JP7818798A priority Critical patent/JPH11274184A/en
Publication of JPH11274184A publication Critical patent/JPH11274184A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/743Apparatus for manufacturing layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L2224/743Apparatus for manufacturing layer connectors

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus for feeding solder to a chip bonder, wherein a solder material is commonly used for various chip sizes to eliminate the need for changing over according to the type of chips, the index hardly changes against the chip size and unwanted heat wall not be exposed to an unused solder material. SOLUTION: This apparatus comprises a solder pot 61 for storing spherical solder pieces 80 and a suction head 62 which chucks and holds to carry the solder pieces 80 to a solder feed position P and puts on island 3 of a lead frame, the chucking head 62 is replaceable with one for chucking the number of solder pieces according to the chip type, the solder pot 61 causes the solder pieces 80 to jump with air blown up from the bottom when the suction head 62 chucks the solder pieces 80 in the solder pot 61, and CCD sensor 64 for verifying the number of solder pieces 80 that the suction head 62 chucks is disposed on the way of carrying the solder pieces chucked by the suction head 62 onto the island 3.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明はチップボンダのソ
ルダ供給装置に関し、特にそのチップボンダをチップサ
イズの異なる品種に共用するに好適なソルダ供給装置に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solder supply device for a chip bonder, and more particularly to a solder supply device suitable for sharing the chip bonder with products having different chip sizes.

【0002】[0002]

【従来の技術】半導体チップを例えばリードフレームの
アイランドとかステムのような基材上にボンディングす
るのに半田等のソルダを用いるものがある。この種の従
来装置の例を図面を用いて説明する。図2はそれを概念
的に示す側断面図である。リードフレームがヒートレー
ル1内を図面左から右にヒートブロック2上を送られて
リードフレームのアイランド3が所定のソルダ供給位置
に止まると、ヒートブロック2により加熱されソルダの
溶融する温度になっている。そしてヒートレール1内を
非酸化性の雰囲気に保つようにかぶせられたカバー板4
には穴5が設けられていてそこからアイランド3上にソ
ルダ供給装置6によってソルダが供給される。
2. Description of the Related Art In some cases, solder such as solder is used to bond a semiconductor chip to a substrate such as an island or a stem of a lead frame. An example of this type of conventional apparatus will be described with reference to the drawings. FIG. 2 is a side sectional view conceptually showing this. When the lead frame is fed on the heat block 2 from the left to the right in the heat rail 1 and the island 3 of the lead frame is stopped at a predetermined solder supply position, the lead frame is heated by the heat block 2 to a temperature at which the solder melts. I have. Then, a cover plate 4 covered so as to keep the inside of the heat rail 1 in a non-oxidizing atmosphere.
Is provided with a hole 5 from which solder is supplied onto the island 3 by a solder supply device 6.

【0003】ソルダ供給装置6にはリール7に巻かれた
線状のソルダ8が送りローラ9にその回転方向によって
進退自在にセットされ、ソルダ8の先端はカバー板4の
穴5に位置するノズル10に通されている。そして、こ
のノズル10は穴5を通って上下動作する。
In the solder supply device 6, a linear solder 8 wound on a reel 7 is set on a feed roller 9 so as to be able to advance and retreat according to the rotation direction, and the tip of the solder 8 is a nozzle located in the hole 5 of the cover plate 4. 10 is passed. The nozzle 10 moves up and down through the hole 5.

【0004】アイランド3へのソルダ8の供給に際して
は、まずノズル10がその中にソルダ8の先端を保持し
た状態で降下し、先端をアイランド3に近づけソルダの
供給位置のバラツキをなるべく少なくする。引き続き送
りローラ9が回転してソルダ8をアイランド3に向けて
送り出すとソルダ8のアイランド3に接触した部分は溶
けてアイランド3に付着する。所定の長さを送ると送り
ローラ9が逆に回転してソルダ8の先端がノズル10の
先端位置もしくはノズル内に位置するように引き戻すと
共にノズル10が上昇してその先端をアイランド3から
遠ざける。その後リードフレームが送られ次のアイラン
ド3がセットされ上記のソルダの供給動作を繰り返す。
When supplying the solder 8 to the island 3, the nozzle 10 first descends while holding the tip of the solder 8 therein, thereby bringing the tip closer to the island 3 to minimize the variation in the solder supply position. Subsequently, when the feed roller 9 rotates and sends the solder 8 toward the island 3, the portion of the solder 8 in contact with the island 3 melts and adheres to the island 3. When a predetermined length is fed, the feed roller 9 rotates in the reverse direction and pulls back so that the tip of the solder 8 is located at the tip of the nozzle 10 or within the nozzle, and the nozzle 10 rises to move the tip away from the island 3. Thereafter, the lead frame is sent, the next island 3 is set, and the above-described solder supply operation is repeated.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記従
来例の装置を小さなアイランドに小さなチップをボンデ
ィングする品種と大きなアイランドに大きなチップをボ
ンディングする品種とで共用しようとした場合に小さな
アイランドに小さなチップをボンディングする場合は図
3aに示すように小さなアイランド3a上にソルダ8は
1点供給すればよくその量も少なくて良い。少ない量を
再現性良く供給するには細いものとして送りの寸法をあ
る程度確保する必要がある。この装置で図3bに示すよ
うに大きなアイランド3bに大きなチップをボンディン
グする場合は多量のソルダ8を供給しなければならず、
少量の供給に適した太さのソルダを使うと送り出しに時
間を要し、ボンディング動作のインデックスが遅くな
る。そこで必要な供給量に適した線径のソルダをセット
し直すこととなりその調整が煩雑で生産性を低下させる
のみならず、図3bのように1個所に多量にソルダを供
給したのではチップボンドがうまく出来ず後工程に供給
したソルダを広げる工程を要し、装置が複雑化する。そ
こで図3cに示すように個々のソルダ供給量は図3aに
示すソルダの供給量のように少ない供給として大きいア
イランド3bに分散して多点に供給することが考えられ
る。そうすれば使用するソルダの径は図3aに示す小さ
いアイランドに少量のソルダを供給する場合と共用が可
能であり全体の供給量は供給する点の数で調節でき、し
かもソルダ8は分散して供給されているので広げる工程
を設ける必要はない。しかしながら、この装置で多点に
ソルダ8を供給するにはノズル10またはリードフレー
ムをXYに移動可能としなければならず機構が複雑にな
るのみならず、各点順番にソルダを供給すると時間がか
かりボンディング動作のインデックスが遅くなる。又上
記装置によるソルダの供給方式では必要な供給が終わり
引き戻されたソルダ8の先端付近は溶融はしなかったが
溶融直前の高温になった部分であり、ヒートレール1内
は窒素雰囲気としているとは言え、完全な密閉状態では
ないので若干の酸素が混じって表面が酸化するのを防止
するのが困難で次に供給するソルダに酸化物が混入す
る。そこでこの発明は大小異なるチップサイズ品種に共
用してソルダ材料を品種に対応して切り替える必要が無
く、チップサイズによりインデックスがほとんど変わら
ず、未使用のソルダ材に不要な熱が当たらず従って酸化
が少ないソルダの供給装置を提供する。
However, in a case where the above-described conventional device is used for both a type in which a small chip is bonded to a small island and a type in which a large chip is bonded to a large island, the small chip is used for the small island. In the case of bonding, as shown in FIG. 3A, one point of the solder 8 may be supplied on the small island 3a, and the amount may be small. In order to supply a small amount with good reproducibility, it is necessary to secure a certain size of the feed as a thin material. When bonding a large chip to a large island 3b as shown in FIG. 3b with this apparatus, a large amount of solder 8 must be supplied.
If a solder having a thickness suitable for supplying a small amount is used, it takes a long time to feed and the index of the bonding operation becomes slow. Therefore, it is necessary to reset the solder having a wire diameter suitable for a necessary supply amount, and the adjustment is complicated, which not only lowers the productivity, but also a large amount of solder is supplied to one place as shown in FIG. However, the process cannot be performed well, and a step of expanding the solder supplied to the subsequent process is required, and the apparatus becomes complicated. Therefore, as shown in FIG. 3c, it is conceivable that the supply amount of each solder is distributed to a large island 3b and supplied to multiple points as a small supply like the supply amount of the solder shown in FIG. 3a. Then, the diameter of the solder to be used can be shared with the case where a small amount of solder is supplied to a small island shown in FIG. 3A, and the total supply amount can be adjusted by the number of supplied points, and the solder 8 is dispersed. There is no need to provide a spreading step since it is supplied. However, in order to supply the solder 8 to multiple points with this apparatus, the nozzle 10 or the lead frame must be movable in the XY direction, which not only complicates the mechanism, but also requires time to supply the solder in each point order. The index of the bonding operation becomes slow. Further, in the solder supply method using the above-described apparatus, the vicinity of the tip of the solder 8 which has been supplied and pulled back is not melted but is a high temperature portion just before melting, and the inside of the heat rail 1 is in a nitrogen atmosphere. Nevertheless, it is difficult to prevent the surface from being oxidized due to mixing of some oxygen because of not being in a completely closed state, and the oxide is mixed into the next solder to be supplied. Therefore, the present invention eliminates the need to share the solder material corresponding to the type by sharing chip sizes of different sizes, the index does not substantially change depending on the chip size, and unnecessary heat is not applied to the unused solder material, so that oxidation is not performed. Provide a supply device for a small amount of solder.

【0006】[0006]

【課題を解決するための手段】上記の課題を解決するた
めにこの発明はソルダ供給位置に加熱されて配置された
基材上にソルダを供給しその後ソルダ上にチップをボン
ディングするチップボンダにおけるソルダ供給装置にお
いて、所定形状のソルダ片を溜めておくソルダ溜と、前
記ソルダ片を吸着保持して移送し、ソルダ供給位置に配
置された基材上に置く吸着ヘッドとを備え、その吸着ヘ
ッドは品種に応じた数のソルダ片を吸着するもので交換
可能に構成されていることを特徴とするソルダ供給装置
である。上記構成によればチップサイズの小さい品種の
時は少数例えば1個のソルダ片を吸着する吸着ヘッドと
すれば良く、大きい品種の時は必要なソルダ量となるよ
うに数と配置を選べば良い。従って、チップサイズの大
きい品種の時も小さい品種の時と同じソルダ片を複数同
時に供給するので供給に要する時間は小さい品種い対し
て1個供給する場合に比較してさほど長くはならない。
またソルダ溜は高温にならないのでソルダが酸化するこ
とも無い。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a solder supply in a chip bonder for supplying solder to a substrate heated and arranged at a solder supply position and thereafter bonding a chip on the solder. The apparatus comprises: a solder pool for storing solder pieces of a predetermined shape; and a suction head for suction-holding and transferring the solder pieces and placing the solder pieces on a base material arranged at a solder supply position. The solder supply device is characterized in that it is configured to adsorb a number of solder pieces corresponding to the above and to be replaceable. According to the above configuration, a suction head for sucking a small number of, for example, one solder piece may be used for a product with a small chip size, and the number and arrangement may be selected so as to have a necessary amount of solder for a product with a large chip size. . Therefore, since the same solder piece is simultaneously supplied in the case of a product having a large chip size as in the case of a product having a small chip size, the time required for the supply is not so long as compared with the case of supplying one piece for a product having a small chip size.
Further, since the temperature of the solder reservoir does not become high, the solder does not oxidize.

【0007】[0007]

【発明の実施の形態】この発明のソルダ供給装置は例え
ばヒートレール上を送られてソルダの溶融温度に加熱さ
れた状態でソルダ供給位置に配置された例えばステムと
かリードフレームのアイランドとかの基材上にソルダを
供給し、その上に半導体チップのようなチップをボンデ
ィングするチップボンダに配設されるものである。ソル
ダはSn・Pb合金、Ag・Pb・Sn合金のようない
わゆるソフトソルダであってもAu・Si合金のような
ハードソルダであっても良い。ソルダの形状は球形が方
向性がなく好ましいが、サイコロ形状等他の形状でも可
能である。その大きさは適用する品種のチップサイズに
より選定出来、小さいチップの場合はソルダ片を少な
く、大きいチップの場合は多く使用して適当なソルダ量
とする物である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A solder supply device according to the present invention is, for example, a substrate such as a stem or an island of a lead frame which is arranged at a solder supply position while being heated on a heat rail and heated to a melting temperature of the solder. It is provided on a chip bonder for supplying a solder thereon and bonding a chip such as a semiconductor chip thereon. The solder may be a so-called soft solder such as an Sn-Pb alloy or an Ag-Pb-Sn alloy or a hard solder such as an Au-Si alloy. The shape of the solder is preferably spherical because it has no directionality, but other shapes such as a dice shape are also possible. The size can be selected according to the chip size of the kind to be applied. In the case of a small chip, a small amount of solder pieces is used, and in the case of a large chip, a large amount is used to obtain an appropriate amount of solder.

【0008】そして、本発明のソルダ供給装置はこのよ
うなソルダ片を溜めておくソルダ溜を備える。そして、
ソルダ片が特に整列等することなく多数入れられる。そ
して、品種に応じて設計され、ソルダ片を1個もしくは
複数真空吸着により吸着保持してソルダ供給位置に配置
された基材上に移送して置く吸着ヘッドを備える。その
吸着ヘッドはソルダ溜のソルダ片を直接吸着するように
出来る。吸着ヘッドを降下させソルダ片の上面に極近く
位置させて(例えば圧力センサで接触を確認して少し持
ち上げる)真空吸着を働かせる。その場合吸着するソル
ダ片の数が多いとソルダが吸着されていない個所が起こ
ることがある。そこでより完全に吸着させるために吸着
動作の際に吸着ヘッドかソルダ溜かをゆすったり、振動
させたりすると良い。あるいは、ソルダ片を躍らせてい
る状態でその中に吸着ヘッドを降下させても良い。ソル
ダ片を吸着保持した吸着ヘッドは上昇し、横方向に移動
しソルダ供給位置に配置されている基材上に到り降下し
て吸着を切りソルダを基材上に置くコの字動作でソルダ
片を移送するように構成するように出来る。移送の途中
にソルダ片の吸着に欠けているところがないか確認する
CCDセンサ等を配置し、吸着されたソルダ片が不足し
ている場合はソルダ溜に再度戻って吸着動作を追加する
ように構成するのが好ましい。吸着ヘッドが基材上にソ
ルダ片を置くに際してはソルダ片が基材に接触するまで
降下さるように出来る。ソルダ片が基材に接触すれば溶
けて基材に載る、しかしながら溶けすぎると吸着ヘッド
にも付着するおそれがあるので吸着ヘッドはソルダに濡
れない材質または濡れないように表面処理を施す方が良
い。又、ソルダ片が基材に接触する直前に止めて吸着を
切りソルダ片を落下させるようにすることも出来る。こ
の方が吸着ヘッドに伝わる熱が少なくて好都合である。
[0008] The solder supply device of the present invention includes a solder reservoir for storing such solder pieces. And
A large number of solder pieces are inserted without particular alignment. A suction head, which is designed according to the product type, is provided with one or a plurality of solder pieces sucked and held by vacuum suction and transferred onto a base material arranged at a solder supply position. The suction head can directly suck the solder pieces of the solder pool. The suction head is lowered to be positioned very close to the upper surface of the solder piece (for example, the contact is confirmed by a pressure sensor and lifted up a little) to activate the vacuum suction. In this case, if the number of solder pieces to be adsorbed is large, a portion where the solder is not adsorbed may occur. Therefore, it is preferable to shake or vibrate the suction head or the solder reservoir during the suction operation in order to perform the suction more completely. Alternatively, the suction head may be lowered into the solder piece while the solder piece is jumping. The suction head holding and holding the solder pieces rises, moves in the horizontal direction, reaches the base material located at the solder supply position, stops suction, turns the solder on the base material, and puts the solder on the base. It can be configured to transport the pieces. A CCD sensor, etc., is installed to check for any missing solder pieces during the transfer, and if the sucked solder pieces are insufficient, return to the solder pool and add suction action. Is preferred. When the suction head places the solder piece on the base material, it can be lowered until the solder piece contacts the base material. If the solder pieces come into contact with the base material, they melt and mount on the base material.However, if they are too melted, they may adhere to the suction head. Therefore, it is better to apply a surface treatment to the material that does not wet the solder or to prevent it from getting wet. . It is also possible to stop immediately before the solder piece comes into contact with the base material to stop the suction and drop the solder piece. This is advantageous because less heat is transmitted to the suction head.

【0009】そして、この吸着ヘッドは適用する品種毎
に適当に設計されて準備され、品種切り替え時に取り替
えるために交換容易に構成する。
The suction head is appropriately designed and prepared for each type of product to be applied, and is easily configured to be replaced when the type is changed.

【0010】[0010]

【実施例】この発明の一実施例を図面を用いて説明す
る。図1はその斜視図である。図において、リードフレ
ームがヒートレール(図示せず)内を図面左から右に
(X方向)送られてそのアイランド3はソルダの溶融温
度に加熱されてソルダ供給位置Pに止まっている。その
ようなアイランド3上にソルダを供給するためにソルダ
供給装置60がソルダ供給位置Pの後方(Y方向)に配
置されている。ソルダ供給装置60は図示しないステー
ジ上に箱状のソルダ溜61を備えその中に多数の球状の
ソルダ片80が入れられている。そして、ソルダ溜61
には底から空気が吹き上げて中のソルダ片80は浮き上
がって躍っている。又、吸着ヘッド62を備える。吸着
ヘッド60は適用する品種のソルダ供給配置の範囲に応
じた面積の下面を有し、その数の吸着穴(図示せず)を
備え図示しない配管で真空系(図示せず)につながって
おり、軸63の下端に着脱自在に取り付けられ、軸63
の移動により上下(Z)方向、前後(Y)方向に移動自
在でソルダ溜61内のソルダ片80を吸着して移送しア
イランド3上に置く動作を行なう。吸着ヘッド62がソ
ルダ片80を吸着保持して移送する経路の下方には例え
ば1次元のCCDセンサ64が配置され、吸着されたソ
ルダ片80の数を確認する。
An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view thereof. In the figure, a lead frame is fed in a heat rail (not shown) from left to right in the drawing (X direction), and the island 3 is heated to the melting temperature of the solder and stopped at the solder supply position P. A solder supply device 60 is provided behind the solder supply position P (in the Y direction) to supply the solder onto such an island 3. The solder supply device 60 includes a box-shaped solder reservoir 61 on a stage (not shown), in which a number of spherical solder pieces 80 are placed. And solder pool 61
Then, the air blows up from the bottom and the solder pieces 80 inside are floating and jumping. Further, a suction head 62 is provided. The suction head 60 has a lower surface of an area corresponding to the range of the solder supply arrangement of the kind to be applied, and has suction holes (not shown) of that number, and is connected to a vacuum system (not shown) by piping (not shown). , Is detachably attached to the lower end of the shaft 63.
Is moved in the vertical (Z) direction and in the front and rear (Y) direction by the movement of the solder piece 80, the solder piece 80 in the solder reservoir 61 is sucked, transferred, and placed on the island 3. A one-dimensional CCD sensor 64, for example, is disposed below a path through which the suction head 62 sucks, holds, and transfers the solder pieces 80, and checks the number of the sucked solder pieces 80.

【0011】次にこの装置の動作について説明する。 (1)まず吸着ヘッド62がソルダ溜61の中へ降下
し、真空吸着を開始すると吹き上げる空気により躍って
いるソルダ片80が吸着穴(図示せず)に吸着される。 (2)全ての吸着穴(図示せず)にソルダ片80が吸着さ
れると思われるような所定の時間その状態を保持した
後、吸着ヘッド62が吸着を保ったまま上昇し、ソルダ
供給位置Pに向け移動する。その途中に配置されたCC
Dセンサ64が吸着されているソルダ片80の数が不足
していないか確認する。 (3)確認の結果不足していれば吸着ヘッド62は後戻
りして(1),(2)の動作を繰り返す。不足していなけ
ればそのままソルダ供給ポジション上に移動し、降下
し、真空吸着を止めてソルダ片80をアイランド3上に
置く。その際吸着ヘッド62はソルダ片80がアイラン
ド3に接触しないで微細な間隔を残す状態で止まり、吸
着中のソルダボールが溶けないようにして、落下後アイ
ランド3に接触して溶けるようにする。 (4)次に吸着ヘッド62がソルダ溜61内に戻りソル
ダ片80の吸着を行なう。その間リードフレーの搬送が
行われ、次のアイランド3がソルダ供給位置Pにセット
される。 (5)以後、(2)〜(5)の動作が繰り返されて順次
ソルダが供給される。
Next, the operation of this device will be described. (1) First, the suction head 62 descends into the solder reservoir 61, and when vacuum suction is started, the rising solder pieces 80 are sucked into suction holes (not shown) by the blowing air. (2) After maintaining the state for a predetermined period of time such that the solder pieces 80 are considered to be sucked in all the suction holes (not shown), the suction head 62 is lifted while maintaining the suction, and the solder supply position is maintained. Move toward P. CC placed in the middle
It is confirmed whether the number of the solder pieces 80 to which the D sensor 64 is adsorbed is not insufficient. (3) If the result of the check is insufficient, the suction head 62 returns and repeats the operations (1) and (2). If it is not insufficient, it moves to the solder supply position as it is, descends, stops the vacuum suction, and places the solder piece 80 on the island 3. At this time, the suction head 62 stops in a state where the solder pieces 80 do not come into contact with the islands 3 and leave a fine space therebetween, so that the solder balls being sucked do not melt and come into contact with the islands 3 after dropping and melt. (4) Next, the suction head 62 returns to the inside of the solder reservoir 61 to suction the solder pieces 80. During this time, the lead frame is conveyed, and the next island 3 is set at the solder supply position P. (5) Thereafter, the operations of (2) to (5) are repeated, and solder is sequentially supplied.

【0012】上記の実施例によれば、チップサイズに応
じて供給されるソルダ片の数が選定され、その数の吸着
穴を備えた吸着ヘッドを用いるので、品種が変わったと
き吸着ヘッドを替えることにより、ソルダ片は替えるこ
となくソルダの供給が出来、しかもチップサイズの大き
い品種で多数のソルダ片を供給するのも一度に行なうの
でインデックスの低下も少ない。またソルダ溜は高温に
ならないのでソルダが酸化することも無い。
According to the above embodiment, the number of solder pieces to be supplied is selected according to the chip size, and the suction head having the suction holes of the number is used. Therefore, when the type is changed, the suction head is changed. Thus, the solder can be supplied without changing the solder pieces, and since a large number of solder pieces are supplied at once in a variety having a large chip size, a decrease in index is small. Further, since the temperature of the solder reservoir does not become high, the solder does not oxidize.

【0013】上記の実施例ではソルダ溜61内のソルダ
片80を底からの空気の吹き上げで躍らすようにした
が、振動を与えた躍らせても良い。
In the above embodiment, the solder pieces 80 in the solder reservoir 61 are made to fly by blowing air from the bottom, but they may be made to fly by applying vibration.

【0014】[0014]

【発明の効果】以上説明したように、この発明の装置に
よればチップサイズの小さい品種とチップサイズの大き
い品種とにチップボンダを共用するのに小さい品種の時
と同じ様な速さで大きい品種にもソルダを供給でき、品
種ごとにソルダの材料を準備する必要はない。またソル
ダ溜は高温にならないのでソルダが酸化することも無
い。
As described above, according to the apparatus of the present invention, a chip type can be shared between a small chip size type and a large chip size type at the same speed as a small type type. It is not necessary to prepare solder material for each product type. Further, since the temperature of the solder reservoir does not become high, the solder does not oxidize.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 この発明の一実施例を概念適に示す斜視図。FIG. 1 is a perspective view schematically showing an embodiment of the present invention.

【図2】 従来の装置を概念的に示す側断面図。FIG. 2 is a side sectional view conceptually showing a conventional device.

【図3】 アイランドにソルダを供給した状態を示す平
面図。
FIG. 3 is a plan view showing a state where solder is supplied to the island.

【符号の説明】[Explanation of symbols]

P ソルダ供給位置 3 アイランド(基材) 60 ソルダ供給装置 61 ソルダ溜 62 吸着ヘッド 64 CCDセンサ(センサ) 80 ソルダ片 P Solder supply position 3 Island (base material) 60 Solder supply device 61 Solder reservoir 62 Suction head 64 CCD sensor (sensor) 80 Solder piece

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】ソルダ供給位置に加熱されて配置された基
材上にソルダを供給しその後そのソルダ上にチップをボ
ンディングするチップボンダにおけるソルダ供給装置に
おいて、 所定形状のソルダ片を溜めておくソルダ溜と、前記ソル
ダ片を吸着保持して移送し、ソルダ供給位置に配置され
た基材上に置く吸着ヘッドとを備え、その吸着ヘッドは
品種に応じた数のソルダ片を吸着するもので交換可能に
構成されていることを特徴とするチップボンダのソルダ
供給装置
1. A solder supply device for a chip bonder for supplying solder to a substrate heated at a solder supply position and thereafter bonding a chip to the solder, wherein a solder piece having a predetermined shape is stored. And a suction head that sucks, holds and transfers the solder pieces and places it on a base material placed at a solder supply position, and the suction head is one that sucks the number of solder pieces according to the type and is replaceable. Solder supply device for chip bonder, characterized in that:
【請求項2】前記吸着ヘッドが前記ソルダ溜でソルダ片
を吸着する際に前記ソルダ溜の底から吹き上げる空気に
よりソルダ片が躍っていることを特徴とするチップボン
ダのソルダ供給装置
2. A solder supply device for a chip bonder, wherein when the suction head sucks the solder pieces in the solder pool, the solder pieces are jumped by air blown up from the bottom of the solder pool.
【請求項3】前記吸着ヘッドがソルダ片を吸着保持して
基材上に移送する途中に前記吸着ヘッドが吸着したソル
ダ片の数を確認するセンサを配置した請求項1又は2に
記載したチップボンダのソルダ供給装置。
3. The chip bonder according to claim 1, wherein a sensor for confirming the number of solder pieces adsorbed by the suction head is disposed while the suction head sucks and holds the solder pieces and transfers the solder pieces onto the substrate. Solder supply equipment.
JP7818798A 1998-03-26 1998-03-26 Apparatus for feeding solder to chip bonder Pending JPH11274184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7818798A JPH11274184A (en) 1998-03-26 1998-03-26 Apparatus for feeding solder to chip bonder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7818798A JPH11274184A (en) 1998-03-26 1998-03-26 Apparatus for feeding solder to chip bonder

Publications (1)

Publication Number Publication Date
JPH11274184A true JPH11274184A (en) 1999-10-08

Family

ID=13654987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7818798A Pending JPH11274184A (en) 1998-03-26 1998-03-26 Apparatus for feeding solder to chip bonder

Country Status (1)

Country Link
JP (1) JPH11274184A (en)

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