JPH11273994A - High voltage capacitor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a high voltage capacitor with high air-tight sealing performance in which a cover material can be easily and securely fixed to a case main body, and the joint part of metallic terminals with a capacitor element or the capacitor element is hardly broken. SOLUTION: This high voltage capacitor 1 has a a structure in which first and second metallic terminals 3 and 4 are joined with a capacitor element 2 in a ceramic case 6 having a case main body 6b and a cover member 6c, and a resin layer 10 is formed by resin packing. The first metallic terminal 3 is constituted so that the tip end face of the first metallic terminal 3 may be positioned in a through-hole 6e of the cover member, and further the high voltage capacitor is provided with a pressing terminal 7 mounted so as to be extended from the outside surface of the cover member 6c to the through-hole 6e, and fixed to the first metallic terminal 3 for suppressing the floating of the cover member 6c.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-voltage capacitor, and more particularly to an application requiring halogen resistance, for example,
The present invention relates to a high-voltage capacitor suitable for use in a halogen gas, such as a high-voltage capacitor for an excimer laser device.

[0002]

2. Description of the Related Art Conventionally, in an excimer laser device,
A high-voltage capacitor is used for discharge excitation. Since this high-voltage capacitor is used in an atmosphere containing a halogen gas, it is required to have excellent halogen resistance.

To meet the above-mentioned demand, Japanese Patent Application Laid-Open No. Hei 8-130158 discloses a high-voltage capacitor 51 shown in FIG. In the high-voltage capacitor 51, a capacitor body 52a made of dielectric ceramics
A capacitor element 52 having electrodes 52b and 52c formed on both surfaces thereof is used. Metal terminals 53 and 54 are provided on the electrodes 52b and 52c of the capacitor element 52, respectively.
Are joined.

The capacitor element 52 to which the metal terminals 53 and 54 are joined is disposed in a case 55. The case 55 includes a case main body 55a having an upper opening,
A lid member 55b for closing the opening, each of which is made of alumina having excellent halogen gas resistance. The metal terminal 53 penetrates the lid member 55b, and the metal terminal 54 penetrates the bottom surface of the case body 55a.

In order to achieve an airtight seal between the metal terminals 53 and 54 and the case 55, seal members 56 and 57 made of an elastic ring or the like are arranged. Further, in order to achieve an airtight seal between the case main body 55a and the lid member 55b, a seal member 58 made of an elastic ring is disposed on a joint surface between the two.

Further, an epoxy resin 59 is filled in the case 55 to improve the halogen resistance. In the high-voltage capacitor 51, the capacitor element 52 is formed by using the epoxy resin 59 having excellent halogen resistance as described above,
Halogen resistance is enhanced by covering the metal terminals 53 and 54 except for the parts from which the metal terminals 53 and 54 are drawn out, and by using the case 55 made of alumina having the hermetic sealing structure.

However, in the high-pressure capacitor 51, a seal member 58 made of an elastic ring is used to achieve a hermetic seal when joining the case body 55a made of alumina and the lid member 55b. Therefore, the work of assembling and fixing the lid member 55b to the case main body 55a is complicated. In addition, since the elastic ring has residual strain, the lid 55b may gradually open due to pressurization and decompression during gas exchange while the high-pressure condenser 51 is used in an excimer laser device or the like. there were.

In order to prevent the opening of the lid member as described above, Japanese Patent Application Laid-Open No. Hei 6-267778 discloses a high-voltage capacitor 61 shown in FIG. In the high-voltage capacitor 61, screw holes 63a, 64a are formed in the front end surfaces of the first and second metal terminals 63, 64, and the front end surfaces of the first and second metal terminals 63, 64 are covered with a cover material 55b. And it is arrange | positioned so that it may be located in the through-hole provided in the case main body 55a. Then, the holding terminal 6 inserted into the through hole from the outer surface of the lid member 55b and the case body 55a.
5, 66 are attached. Holding terminals 65, 66
Has male screw portions 65a and 66a that enter the through holes. The male screw portions 65a and 66a are
The cover member 55b can be firmly fixed to the case body 55a by screwing it into the case body 55a.

[0009]

However, in the high-voltage capacitor 61 shown in FIG.
The male screw portions 65a and 66a are
a, 64a, the capacitor element 52 is connected to the first and second metal terminals 53, 54 as indicated by arrows A, B.
Will be pulled outward. Therefore, in order to firmly fix the lid member 55b to the case body 55a,
The deeper the holding terminals 65 and 66 are screwed into the screw holes 63 a and 64 a, the greater the tensile stress is applied to the joint between the metal terminals 53 and 54 and the capacitor element 52, and the larger the distance between the metal terminals 53 and 54 and the capacitor element 52. In some cases, the joint portion was broken or the capacitor element 52 itself was broken.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned disadvantages of the prior art, and not only to easily and firmly fix a lid member to a case main body, but also to obtain a bonding portion between a metal terminal and a capacitor element. An object of the present invention is to provide a high-voltage capacitor in which the destruction of the capacitor element hardly occurs and which has excellent hermetic sealing in the case.

[0011]

According to the first aspect of the present invention, the first and second electrodes are respectively provided on opposing first and second surfaces of a capacitor body made of dielectric ceramics. The formed capacitor element and the first and first electrodes respectively joined to the first and second electrodes of the capacitor element
A second metal terminal, a case body having an opening on an upper surface,
A lid member attached so as to close the opening,
A ceramic case housing the capacitor element and the first and second metal terminals; and a resin layer disposed around the capacitor element and the first and second metal terminals in the ceramic case; In a high-voltage capacitor in which through-holes through which first and second metal terminals are respectively inserted are formed in the lid member and the bottom of the case main body, a tip end surface of the first metal terminal is located in the through-hole of the lid member. The first metal terminal is configured so as to extend from the outer surface of the lid material into the through hole,
It is characterized by further comprising a holding terminal fixed to the first metal terminal and suppressing lifting of the lid member.

According to the second aspect of the present invention, a screw hole is formed in a tip surface of the first metal terminal, and a tip of the holding terminal is screwed into the screw hole. According to the third aspect of the present invention, a hole is formed in the distal end surface of the first metal terminal, and the pressing terminal is provided with a plurality of resilient branch portions which resiliently press against the inner surface of the hole. Have been.

[0013] In the invention described in claim 4, the holding terminal is provided with a flange portion having a flange portion that comes into contact with the outer surface of the lid member. In the invention according to claim 5,
The holding terminal is hermetically fixed to the lid.

The ceramic case may be made of a suitable ceramic, but is preferably alumina having excellent halogen resistance, more preferably having a silicon content of 5%.
Alumina, which is less than or equal to weight percent, is used.

According to the invention described in claim 8, the resin constituting the resin layer filled in the ceramic case is:
The curing is performed at a temperature higher than the upper limit of the operating temperature range of the capacitor element.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be elucidated below with reference to non-limiting examples of the present invention.

FIG. 1 is a sectional view for explaining a high-voltage capacitor according to a first embodiment of the present invention. The high-voltage capacitor 1 is preferably used as a high-voltage capacitor for exciting discharge in an excimer laser device, but the application is not particularly limited.

The high-voltage capacitor 1 has a capacitor element 2. In the capacitor element 2, first and second electrodes 2b and 2c are respectively formed on opposed first and second surfaces of a disk-shaped or column-shaped capacitor body 2a.

The capacitor body 2a is made of dielectric ceramics, and is not particularly limited, but in this embodiment, it is made of strontium titanate-based dielectric ceramics. The electrodes 2b and 2c
Although it can be made of an appropriate conductive material, in the present embodiment, it is formed by applying and baking an Ag paste.

The electrodes 2b and 2c of the capacitor element 2
The first and second metal terminals 3 and 4 are respectively joined. The metal terminals 3 and 4 are made of an appropriate metal material, and preferably have outer surfaces coated with Ni, Ag, Au or the like. By forming the coating layer with Ni, Ag, Au or the like, the halogen resistance of the metal terminals 3 and 4 is improved.

The metal terminals 3 and 4 have a relatively large diameter flange 3 on the side joined to the electrodes 2b and 2c.
a, 4a, and the metal terminal body portions 3b, 4b are connected to the flange portions 3a, 4a.

FIG. 2A is a perspective view showing a structure in which metal terminals 3 and 4 are joined to the capacitor element 2. In this embodiment, in the capacitor element 2 to which the metal terminals 3 and 4 are joined, the epoxy resin is applied so as to cover the capacitor element 2 and the side surfaces of the flange portions 3a and 4a of the metal terminals 3 and 4 up to the intermediate height position. The resin outer casing 5 is formed. FIG. 2B is a perspective view showing a state in which the resin sheath 5 is formed.

In assembling the high-voltage capacitor 1, the metal terminals 3 and 4 are joined to the capacitor element 2 to form a resin sheath 5 and then the structure covered with the resin sheath 5 is shown in FIG.
Of the ceramic case 6 shown in FIG.

The ceramic case 6 has a case body 6b having an upper opening 6a, and a lid 6c attached so as to close the opening 6a. The case body 6b and the lid member 6c are made of ceramics, but are preferably made of alumina having excellent halogen gas resistance, more preferably alumina having a silicon content of 5% by weight or less.

A through hole 6d is formed in the bottom of the case body 6b. The terminal body 4b of the second metal terminal 4 is inserted into the through hole 6d, and the tip of the metal terminal 4 is
It is exposed to the outside from the through hole 6d.

On the other hand, a through hole 6e is also formed in the lid 6c. The terminal body 3b of the first metal terminal 3 is inserted into the through hole 6e. However, the distal end of the terminal main body 3b is held in the through hole 6e.
Length is chosen. In addition, a screw hole 3c is formed in the distal end surface of the terminal body 3b.

On the other hand, a through hole 6e is formed from the outer surface side of the lid 6c.
A holding terminal 7 is attached so as to be able to enter the inside. The holding terminal 7 has a flange portion 7a having a diameter larger than the through hole 6e, and a male screw portion 7b provided on the lower surface of the flange portion 7a. The male screw portion 7b has a smaller diameter than the through hole 6e, and enters the through hole 6e.
The male screw portion 7b is connected to the terminal body 3 of the first metal terminal 3.
It is configured to be screwed into the screw hole 3c provided on the distal end surface of the b.

In assembling the high-voltage capacitor 1, after inserting the structure shown in FIG. 2B into the case body 6b, the case 6 is filled with an epoxy resin having excellent halogen resistance. And cured, the resin layer 1
0 is formed. As the resin constituting the resin layer 10, other resins such as an allyl resin may be used as long as the resin has excellent halogen resistance, in addition to the epoxy resin.

However, the resin constituting the resin layer 10 has sufficient strength to fix the lid member 6c, and is flexible so that the tensile stress due to the difference in linear expansion coefficient can be reduced. It is desirable to use one having Therefore, it is desirable to use a flexible epoxy resin which exhibits a certain degree of flexibility after curing as the resin constituting the resin layer.

In the present embodiment, when the resin layer 10 was formed, after the epoxy resin was filled, the resin layer 10 was heated at 60 ° C. for 4 hours to cure the epoxy resin. The upper limit temperature of the high-voltage capacitor 1 according to the present embodiment in actual use is 50
° C.

As described above, when filling the case 6 with the thermosetting resin and forming the resin layer 10 by heating and curing, the resin is cured at a temperature higher than the upper limit temperature of the high-voltage capacitor in actual use. Preferably, thereby, thermal expansion of the resin layer 10 during actual use can be suppressed.

During actual use, the resin layer 10
When thermal expansion occurs, stress is generated on the lid member 6c in a direction away from the case body 6b. However, by setting the curing temperature of the resin forming the resin layer 10 as in the present embodiment, the stress caused by the thermal expansion can be suppressed, and the lifting of the lid 6c from the case body 6b can be prevented. It can be effectively prevented.

After filling the epoxy resin constituting the resin layer 10, the cover 6 c is attached, and the male screw portion 7 b of the holding terminal 7 is screwed into the screw hole 3 c of the first metal terminal 3 and fixed. Thus, the high-voltage capacitor 1 is obtained.

The case 6 in the high-voltage capacitor 1
The hermetic seal therein is achieved by a sealing member comprising an elastic ring such as an O-ring. That is, in order to hermetically seal between the through holes 6d and 6e and the metal terminals 3 and 4, seal members 8a and 8b made of an elastic member such as an O-ring are arranged on the inner peripheral wall of the through holes 6d and 6e. Have been.

On the other hand, the lid member 6c is attached to the case body 6b so as to close the opening 6a, and a sealing member 9 made of an elastic member such as an O-ring is disposed on a joint surface between the both. Thereby, the joint surface between the lid 6c and the case body 6b is hermetically sealed.

In the high-voltage capacitor 1 of this embodiment, the male screw 7b of the holding terminal 7 is screwed into the screw hole 3c, so that the flange 7a is pressed against the outer surface of the lid 6c, whereby the lid 6c is brought into contact with the case body. 6b is firmly fixed. That is, the lid 6c is air-tightly fixed to the case body 6b via the sealing member 9,
Is also used. Therefore, the flange portion 7 of the holding terminal 7
By simply rotating a, the lid 6c can be very easily and firmly fixed to the case body 6b.

In addition, in the conventional high-voltage capacitor 61 shown in FIG. 7, since the holding terminals 65 and 66 are screwed into both the first and second metal terminals 63 and 64, the capacitor element 52 and the metal terminal 63 are screwed. , 64 and the capacitor element 52 may be destroyed. However, in the high-voltage capacitor 1 of the present embodiment, only one metal terminal 3 is fixed to the pressing terminal 7, Even if the male screw portion 7b of the terminal 7 is screwed into the screw hole 3c,
It is difficult for stress to break the joints between the second metal terminals 3 and 4 and the capacitor element 2 to occur.

Next, specific experimental examples will be described. Outer diameter 40mmφ x thickness 16mm as capacitor element 2
Using a disk-shaped strontium titanate-based dielectric ceramic having Ag electrodes with a diameter of 38 mm formed on both surfaces thereof, first and second metal terminals 3 and 4 made of brass are joined with a conductive adhesive. Then, a resin sheath 5 was formed of an epoxy resin. The semi-finished product was housed in a bottomed cylindrical case main body 6b having an outer diameter of 50 mm, a lid material 6c was attached, filled with an epoxy resin, and heated and cured at 60 ° C. for 4 hours to form a resin layer 10. The case body 6b and the lid 6c were made of alumina having a silicon content of 0.5% by weight.

After the epoxy resin was filled, the holding terminal 7 was attached to obtain the high-voltage capacitor 1 of the above embodiment. For comparison, as a comparative example 1, a conventional high-voltage capacitor 51 obtained in substantially the same manner without using the presser terminal 7, and as a comparative example 2, a presser terminal 66 on the lower surface side of the case body. A conventional high-voltage capacitor 61 obtained in the same manner except that the capacitor was provided.

The high-voltage capacitors 1, 51 and 61 were evaluated by performing a heat cycle test and a repeated pressurization / decompression test in the following manner. The results are shown in Tables 1 and 2 below.
Shown in

Heat cycle test: A high-pressure capacitor was left at a temperature of -20 ° C. for 2 hours, then heated, left at a temperature of 60 ° C. for 2 hours, and cooled again to a temperature of −20 ° C. as one cycle. And a heat cycle test. At the time of evaluation, it was observed whether or not a gap had occurred between the lid member and the case body. The withstand voltage was measured, and when the withstand voltage was 60 kV or less, the withstand voltage was determined to be defective.

Pressure / decompression repetition test: After leaving the high-pressure capacitor for 1 hour in a pressurized atmosphere of 3 kg / cm ² ,
The process of standing for 1 hour under a reduced pressure of 1 Torr was defined as one cycle, and repeated pressurization / decompression tests were performed to visually check whether or not a gap was formed between the lid member and the case body.

[0043]

[Table 1]

[0044]

[Table 2]

The number of samples n in each test in Tables 1 and 2 was 10 in each of the examples and Comparative Examples 1 and 2. As is clear from Tables 1 and 2, in the high-voltage capacitor 51 of Comparative Example 1 in which the holding terminal was not used, a gap was generated between the lid member and the case body in the heat cycle test. During the heat cycle test, the high-voltage capacitor 51
2 and the cover material 5 due to expansion and contraction of the resin constituting the resin layer.
It is probable that a gap occurred between the lid member 55b and the case body 55a due to the lifting of 5b.

In the high-voltage capacitor 61 of Comparative Example 2, although no gap was generated between the lid member and the case body, withstand voltage failure occurred in the heat cycle test. When the defective high voltage capacitor 61 was disassembled, cracks occurred in the ceramics of the capacitor element 52. This is presumably because the metal terminals 63 and 64 were pulled by the holding terminals 65 and 66 on both sides due to the tensile stress due to the difference in linear expansion coefficient during the heat cycle, and cracks occurred in the capacitor element 52.

On the other hand, the high-voltage capacitor 1 of the embodiment
In both the heat cycle test and the pressurizing / depressurizing test, no gap was generated between the lid member and the case body, and no withstand voltage failure was observed.

That is, in the present embodiment, the second metal terminal 4 is movable in its length direction.
Therefore, by fixing the holding terminal 7 to the first metal terminal, the opening of the lid 6c is reliably suppressed. Even if the metal terminal 3 is pulled by the holding terminal 7 due to the difference in linear expansion coefficient during the heat cycle, the second metal terminal 4
Are not fixed, the stress applied to the capacitor element 2 and the joints between the capacitor element 2 and the metal terminals 3 and 4 are reduced.

FIG. 3 is a sectional view for explaining a high-voltage capacitor according to a second embodiment of the present invention. In this embodiment, the holding terminal 17 includes the flange portion 17a and the male screw portion 1.
7b. An annular concave portion 17c is provided on the lower surface of the flange portion 17a.
A sealing member 18 consisting of a ring is arranged; That is, the male screw portion 17b is screwed into the screw hole 3 of the first metal terminal 3.
When the lower surface of the flange portion 17a is pressed into contact with the lid member 6c by screwing it into the cover member 6c, the sealing member 18 is interposed therebetween to provide an airtight seal between the holding terminal 17 and the upper surface of the lid member 6c.

Further, since the above-mentioned hermetic sealing structure is provided between the holding terminal 17 and the lid member 6c, in this embodiment, the sealing member 8b shown in FIG. 1 is provided in the through hole 6e. Absent.

Since the other points are the same as those of the high-voltage capacitor 1 of the embodiment shown in FIG. 1, the same parts are denoted by the same reference numerals and their description is omitted.

As described above, with respect to the hermetic seal structure around the metal terminal 3, as in the first embodiment, the sealing member is interposed between the inner peripheral surface of the through hole 6e and the metal terminal 3.
An airtight seal structure may be provided between the cover member 6c and the airtight seal structure between the pressing terminal 17 and the cover member 6c as in the second embodiment.

However, as shown in FIG.
When a hermetic seal structure is formed between the metal terminal 3 and the lid 6c, the terminal body 3a of the metal terminal 3 and the through hole 6e of the lid 6 are formed.
May be generated between them, so that the processing of the lid member 6c is facilitated. The metal terminal 3 is connected to the case body 6b.
After arranging the inside, the operation of attaching the lid member 6c can be easily performed.

The seal member 18 may be formed using a flat gasket or the like in addition to the O-ring. In the case of a high-voltage capacitor used for a low-current application, instead of the screw-type press terminals 7 and 17 used in the first and second embodiments, a press terminal using spring properties may be used. A pressing terminal utilizing such a spring property will be described with reference to FIGS.

In the holding terminal 27 shown in FIG. 4, a portion to be inserted into the through hole of the lid member is connected to the lower surface of the flange portion 27a. A branch 27b is provided. Elastic branch 27b
Has a shape which is extended in the width direction and whose intermediate height position portion is convexly curved toward the outside in the radial direction. Therefore, when a force is applied to the center in the radial direction from the state shown in FIG. 4, the elastic branching portions 27 b exhibit a radially outward elastic force.

On the other hand, as shown in FIG. 5, the first metal terminal 3 is formed with a hole 3d extending from the tip end surface in the length direction. The tip of the holding terminal 27 is configured to be inserted into the hole 3d. When the resilient branch portion 27b of the holding terminal 27 is inserted into the hole 3d, the resilient branch portion 27b
The diameter of the hole 3d is selected so that b can be pressed against the inner wall of the hole 3d. Therefore, by simply inserting the resilient branch portion 27b of the holding terminal 27 into the hole 3d, the holding terminal 27 is moved to the first position.
Can be easily and reliably fixed to the metal terminal 3.

The pressing terminal 27 needs to be made of a metal material or a conductive material in order to achieve conduction. The hole 3d is provided in the metal terminal 3
May be penetrated in the axial direction, or may be a hole with a bottom.

[0058]

In the high voltage capacitor according to the first aspect of the present invention, a structure in which the first and second metal terminals are joined to the capacitor element is housed in a ceramic case having a case body and a lid member. In the above configuration, the tip end surface of the first metal terminal is configured to be located in the through hole of the lid member, and is attached so as to extend from the outer surface of the lid member into the through hole. Since the holding terminal is provided so as to be fixed to the first metal terminal so as to suppress the lifting of the lid material, the lifting of the lid material can be reliably prevented by the pressing terminal.

That is, even if the resin layer disposed in the ceramic case thermally expands at a high temperature during actual use,
The lifting of the lid member is suppressed by the holding terminal. Therefore,
It is possible to prevent the sealing performance from being deteriorated due to the floating of the lid material.For example, it is possible to configure a high-voltage capacitor with excellent halogen gas resistance, and it is suitable for a high-voltage capacitor for discharge excitation in an excimer laser device. Can be provided.

According to the second aspect of the present invention, since the screw hole is formed in the front end surface of the first metal terminal, and the front end of the holding terminal is configured to be screwed into the screw hole,
By simply rotating the holding terminal around the axis, the holding terminal
Can be easily and firmly fixed to the metal terminal.

According to the third aspect of the present invention, a hole is formed in the distal end surface of the first metal terminal, and the pressing terminal is provided with a plurality of resilient branch portions which resiliently press against the inner surface of the hole. Therefore, the holding terminal is fixed to the first metal terminal by the elastic force of the plurality of elastic branch portions. In this case, since it is only necessary to insert the holding terminal having the plurality of resilient branch portions into the hole of the first metal terminal, the holding terminal can be fixed to the first metal terminal by a simple operation. it can.

According to the fourth aspect of the present invention, the holding terminal is
By having a flange portion abutting on the outer surface of the lid member, by fixing the holding terminal to the first metal terminal,
The floating of the lid material is reliably prevented by the flange portion.

In the invention according to claim 5, the holding terminal is
Since the ceramic case is air-tightly fixed to the lid member, the airtight sealing property of the ceramic case in the portion where the holding terminal is provided can be ensured.

According to the sixth aspect of the present invention, since the ceramic case is made of alumina, the halogen resistance can be improved. In the seventh aspect of the present invention, the silicon content is 5 wt. % Or less of the ceramic case, the halogen resistance of the case itself can be further improved.

According to the present invention, the resin constituting the resin layer filled in the ceramic case is cured at a temperature higher than the upper limit of the operating temperature range of the capacitor element, so that the actual use of the resin layer is prevented. In the temperature range at the time, the resin constituting the resin layer does not expand so much, so that it is possible to effectively prevent the lid material from floating.

[Brief description of the drawings]

FIG. 1 is a sectional view for explaining a high-voltage capacitor according to a first embodiment of the present invention.

FIGS. 2 (a) and (b) show a structure in which first and second metal terminals are joined to a capacitor element housed in a ceramic case in the first embodiment, and the periphery of the structure, respectively. FIG. 3 is a perspective view showing a structure in which an exterior resin layer is formed in FIG.

FIG. 3 is a sectional view illustrating a high-voltage capacitor according to a second embodiment of the present invention.

FIG. 4 is a perspective view for explaining a holding terminal used in a modification of the present invention.

FIG. 5 shows a holding terminal using the holding terminal shown in FIG.
FIG. 5 is a partially cutaway sectional view for explaining a fixing structure with the metal terminal of FIG.

FIG. 6 is a sectional view showing an example of a conventional high-voltage capacitor.

FIG. 7 is a cross-sectional view illustrating another example of a conventional high-voltage capacitor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... High voltage capacitor 2 ... Capacitor element 2a ... Capacitor body 2b, 2c ... 1st, 2nd electrode 3, 4 ... 1st, 2nd metal terminal 3a, 4a ... Flange part 3b, 4b ... Terminal body part 3d ... Hole 5 ... Resin exterior 6 ... Ceramic case 6a ... Opening 6b ... Case body 6c ... Lid material 6d, 6e ... Through hole 7 ... Holding terminal 7a ... Flange part 7b ... Male thread part 10 ... Resin layer 17 ... Hold terminal 17a ... Flange Part 17b: Male screw part 27: Holding terminal 27a: Flange part 27b: Resilient branch part

Claims (8)

[Claims] The first and second surfaces of a capacitor body made of a dielectric ceramic are opposed to each other.
A capacitor element on which electrodes are respectively formed; first and second metal terminals respectively joined to the first and second electrodes of the capacitor element; a case body having an opening on an upper surface; A ceramic case having a lid member attached so as to be closed and containing the capacitor element and the first and second metal terminals; and a capacitor element and first and second And a resin layer disposed around the metal terminal of (a), wherein a through-hole through which the first and second metal terminals are respectively inserted is formed in the lid member and the bottom of the case body. The first metal terminal is configured such that the tip end surface of the metal terminal is located in the through hole of the lid member, and is attached so as to extend from the outer surface of the lid member into the through hole. It is fixed to the first metal terminal and further comprising a retainer pin suppress floating of the lid, high-voltage capacitor. 2. The high-voltage capacitor according to claim 1, wherein a screw hole is formed in a tip surface of said first metal terminal, and a tip of said holding terminal is screwed into said screw hole. . 3. A first metal terminal, wherein a hole is formed in a tip end surface of the first metal terminal, and the pressing terminal has a plurality of resilient branch portions which resiliently press against the inner surface of the hole. A high-voltage capacitor according to item 1. 4. The high-voltage capacitor according to claim 1, wherein said holding terminal has a flange portion abutting on an outer surface of the lid member. 5. The high-voltage capacitor according to claim 1, wherein said holding terminal is air-tightly fixed to a lid member. 6. The high-voltage capacitor according to claim 1, wherein said ceramic case is made of alumina. 7. The high-voltage capacitor according to claim 6, wherein the alumina is an alumina having a silicon content of 5% by weight or less. 8. The resin according to claim 1, wherein the resin constituting the resin layer filled in the ceramic case is cured at a temperature higher than an upper limit of a use temperature range of the capacitor element. A high-voltage capacitor according to item 1.