JPH02196479A - Piezoelectric actuator and manufacture thereof - Google Patents
Piezoelectric actuator and manufacture thereofInfo
- Publication number
- JPH02196479A JPH02196479A JP1016713A JP1671389A JPH02196479A JP H02196479 A JPH02196479 A JP H02196479A JP 1016713 A JP1016713 A JP 1016713A JP 1671389 A JP1671389 A JP 1671389A JP H02196479 A JPH02196479 A JP H02196479A
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive
- effect element
- piezoelectric actuator
- electrostrictive effect
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 230000000694 effects Effects 0.000 claims abstract description 22
- 238000010030 laminating Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000011521 glass Substances 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims description 41
- 239000002184 metal Substances 0.000 claims description 41
- 238000007789 sealing Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- 230000010287 polarization Effects 0.000 claims description 9
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 4
- 239000010935 stainless steel Substances 0.000 abstract description 4
- 238000003466 welding Methods 0.000 abstract description 4
- 238000009434 installation Methods 0.000 abstract description 3
- 239000004020 conductor Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- RYZCLUQMCYZBJQ-UHFFFAOYSA-H lead(2+);dicarbonate;dihydroxide Chemical compound [OH-].[OH-].[Pb+2].[Pb+2].[Pb+2].[O-]C([O-])=O.[O-]C([O-])=O RYZCLUQMCYZBJQ-UHFFFAOYSA-H 0.000 description 3
- 238000005476 soldering Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は圧電アクチュエータに関し、特に縦効果を利用
した積層型の圧電アクチュエータおよびその製造方法に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric actuator, and more particularly to a stacked piezoelectric actuator that utilizes a longitudinal effect and a method for manufacturing the same.
（従来の技術〕
電気エネルギーを機械的エネルギーに変換する電歪効果
素子を利用した圧電アクチュエータは、現在マスフロラ
コントローラやＸＹテーブル駆動、射出成形機などの工
業分野で使用されている。(Prior Art) Piezoelectric actuators using electrostrictive elements that convert electrical energy into mechanical energy are currently used in industrial fields such as mass flow controllers, XY table drives, and injection molding machines.
第３図は従来の金属ケース入り圧電アクチュエータの縦
断面図である。FIG. 3 is a longitudinal sectional view of a conventional piezoelectric actuator enclosed in a metal case.
電歪材と内部電極が交互に積層された電歪効果素子１か
ら導出されたリード線４ａ、４ｂを金属部材３に取付け
られたリード端子２ａ、２ｂにそれぞれ半田接続をした
後、金属部材３の凹部に電歪効果素子１の一方の端面１
ａをエポキシ樹脂などの接着剤で接着する。次に、金属
部材３の外周部に設けられたリング溝３ａにパイトンな
どを成形したＯリング１０を挿入した後、有底の筒状金
属ケース９の開口部９ａから電歪効果素子１を他方の端
部１ｂ側から挿入して端部１ｂと金属ケース９の底部９
ｂをエポキシ樹脂などの接着剤で接着固定して気密封止
構造の圧電アクチュエータが完成する。After the lead wires 4a and 4b led out from the electrostrictive effect element 1 in which electrostrictive materials and internal electrodes are alternately laminated are respectively soldered and connected to the lead terminals 2a and 2b attached to the metal member 3, the metal member 3 One end surface 1 of the electrostrictive effect element 1 is placed in the recess of
Glue a with an adhesive such as epoxy resin. Next, after inserting the O-ring 10 made of python or the like into the ring groove 3a provided on the outer periphery of the metal member 3, the electrostrictive element 1 is inserted into the other side through the opening 9a of the bottomed cylindrical metal case 9. Insert from the end 1b side of the end 1b and the bottom 9 of the metal case 9.
b is adhesively fixed with an adhesive such as epoxy resin to complete a piezoelectric actuator having an airtight sealing structure.
上述した従来の圧電アクチュエータは、０リングの接触
圧で電歪効果素子をシールする構造となっているので次
のような欠点がある。The conventional piezoelectric actuator described above has the following drawbacks because it has a structure in which the electrostrictive effect element is sealed by the contact pressure of the O-ring.
（１）電歪効果素子の積層方向の引張強度が弱いため、
取付時に該部から積層方向に引張力が加わると素子が破
断する。(1) Because the tensile strength of the electrostrictive element in the stacking direction is weak,
If a tensile force is applied from this part in the stacking direction during installation, the element will break.
（２）金属部材を介して電歪効果素子の積層方向と直角
方向に外力が加わると素子か破断する。(2) If an external force is applied through the metal member in a direction perpendicular to the stacking direction of the electrostrictive element, the element will break.
（課題を解決するための手段〕
本発明の圧電アクチュエータは、複数の電歪材と内部電
極が交互に積層されて形成された電歪効果素子が金属ケ
ースと金属部材およびガラス端子によフて気密封止され
た圧電アクチュエータにおいて、前記金属ケースまたは
金属部材のいずれかに伸縮部が設けられ、伸縮部の収縮
力が電歪効果素子の積層方向に加わるように電歪効果素
子がｔめ一定寸法だけ伸ばされている。(Means for Solving the Problems) In the piezoelectric actuator of the present invention, an electrostrictive effect element formed by alternately laminating a plurality of electrostrictive materials and internal electrodes is fixed by a metal case, a metal member, and a glass terminal. In the hermetically sealed piezoelectric actuator, either the metal case or the metal member is provided with a telescopic section, and the electrostrictive element is fixed at a constant value t so that the contractile force of the telescopic section is applied in the stacking direction of the electrostrictive element. Only the dimensions have been increased.
また、前記圧電アクチュエータの製造方法は、電歪効果
素子の密封処理工程の前に電歪効果素子の分極を除去す
る工程を、密封処理工程の後に電歪効果素子の分極工程
を有している。Further, the piezoelectric actuator manufacturing method includes a step of removing polarization of the electrostrictive element before the sealing process of the electrostrictive element, and a step of polarizing the electrostrictive element after the sealing process. .
本発明は、伸縮機能を有する金属ケースに素子を挿入し
、かつ予め素子に圧縮力を加えた状態で密封処理を施す
ものである。In the present invention, an element is inserted into a metal case having a telescopic function, and a sealing process is performed with a compressive force applied to the element in advance.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の第１の実施例を示゛す圧電アクチュエ
ータの縦断面図である。FIG. 1 is a longitudinal sectional view of a piezoelectric actuator showing a first embodiment of the present invention.
この圧電アクチュエータは、複数の電歪材と内部電極が
交互に積層されて形成された電歪幼果素子１の両端にリ
ード端子２ａ、２ｂが取付けられている断面コの字形で
円形のステンレスからなる金属部材３と、同じく断面コ
の字形で円形のステンレスからなる金属部材６とか固着
され、そして内径が電歪効果索子１の外径寸法より大き
く、かつ金属部材３，６の外径とほぼ同一である、材質
がステンレスの伸縮機能を有するベローズなどの金属ケ
ース５が金属部材３．６に溶接によりシール結合されて
電歪効果素子１が気密封止されている。そして電歪効果
素子１は予め一定寸法だけ伸ばされて金属ケース５の収
縮力が電歪効果素子１の積層方向に加わるように形成さ
れている。This piezoelectric actuator is made of circular stainless steel and has a U-shaped cross section, with lead terminals 2a and 2b attached to both ends of an electrostrictive infant element 1 formed by alternately laminating a plurality of electrostrictive materials and internal electrodes. A metal member 3 made of stainless steel and a circular metal member 6 having a U-shaped cross section are fixed to each other. A metal case 5, such as a bellows, which is substantially the same and is made of stainless steel and has an elastic function, is sealingly connected to the metal member 3.6 by welding, and the electrostrictive effect element 1 is hermetically sealed. The electrostrictive element 1 is stretched in advance by a certain dimension so that the contractile force of the metal case 5 is applied in the stacking direction of the electrostrictive element 1.
次に、本実施例の圧′にアクチュエータの製造方法につ
いて説明する。Next, a method of manufacturing the pressure actuator of this embodiment will be explained.
ペロブスカイト結晶構造をもつ多成分固溶体セラミック
粉末に有機バインダーを混合して１００１程度の厚みの
グリーンシート化し、その上にベースト状の銀白部電極
導体を塗布、乾燥後、数十層（例えば６４層）に積層し
て焼結した積層体をまず用意する。この積層体の側面に
は銀白部電極導体の端部が露出しているので、端部を選
択的にガラス絶縁膜で被覆した後外部電極導体を側面に
形成して銀白部電極導体を一層おきに交互に接続して２
つのくし歯形電極を形成する。そしてリード線４ａ、４
ｂを外部電極導体に半田付で接続し、側面だけを樹脂で
被覆する。このようにして製作された電歪効果素子１を
密封処理する前にセラミックス材料の固有のキュリー温
度以トの温度（例えば１５０〜１７０℃）で分極が消え
る時間（例えば０．５〜２時間）だけ熱処理を実施した
後、金属部材（上部）３の内側凹部面に電歪効果素子１
が植立するようにエポキシ樹脂などの接着剤で固定する
。次に、電歪効果素子１のリート端子２ａ、２ｂの内側
の端部とを半田付けで接続する。次に、金属ケース５の
一方の開口部５ｂと金属部材６とを予め溶接などでシー
ル接合したものを用意する。次に、金属ケース５の開口
部５ａから金属部材３が固定された電歪効果素子１の他
の端面側１ｂを挿入して金属部材６の凹面に電歪効果素
子１が植立するようにエポキシ樹脂などの接着剤で固定
する。次に、金属部材３と金属ケース５の開口部５ａと
を溶接などでシール接合して密封を完了させる。次に、
金属部材３に取付けられたリード端子２ａ、２ｂの外側
の端子間に電歪効果素子１が分極できる直流電圧（例え
ば１５０Ｖ・ＤＣ）を１０〜２０秒間印加して分極を行
なうことにより電歪効果素子ｌが残留分極分だけ伸びた
状態にする。このときの残留分極分の伸び量に対する金
属ケース５の収縮力か電歪効果素子１の最大発生応力の
２０〜１００％程度（例えば２０〜５０ｋｇ−ｆ）にな
るように金属ケース５のバネ定数を持たせておくと、電
歪効果素子１が最大発生応力の２０〜１００％程度の力
で予め圧縮された状態で組立てられた金属ケース入り圧
電アクチュエータか形成できる。A multi-component solid solution ceramic powder with a perovskite crystal structure is mixed with an organic binder to form a green sheet with a thickness of about 1001.A base-like silver white electrode conductor is applied on top of the green sheet, and after drying, several tens of layers (for example, 64 layers) are formed. First, a laminate is prepared by laminating and sintering. Since the ends of the silver-white electrode conductors are exposed on the side surfaces of this laminate, after selectively covering the ends with a glass insulating film, external electrode conductors are formed on the side surfaces, and the silver-white electrode conductors are placed in a layer. Connect alternately to 2
Form two comb-shaped electrodes. And lead wires 4a, 4
b is connected to the external electrode conductor by soldering, and only the side surfaces are covered with resin. Before sealing the electrostrictive effect element 1 manufactured in this way, the polarization disappears (for example, 0.5 to 2 hours) at a temperature below the specific Curie temperature of the ceramic material (for example, 150 to 170 degrees Celsius). After heat treatment, the electrostrictive element 1 is placed on the inner concave surface of the metal member (upper part) 3.
Fix with adhesive such as epoxy resin so that it is planted. Next, the inner ends of the lead terminals 2a and 2b of the electrostrictive element 1 are connected by soldering. Next, one opening 5b of the metal case 5 and the metal member 6 are sealed in advance by welding or the like and are prepared. Next, the other end surface 1b of the electrostrictive element 1 to which the metal member 3 is fixed is inserted through the opening 5a of the metal case 5 so that the electrostrictive element 1 is planted in the concave surface of the metal member 6. Fix with adhesive such as epoxy resin. Next, the metal member 3 and the opening 5a of the metal case 5 are sealed together by welding or the like to complete the sealing. next,
The electrostrictive effect is created by applying a direct current voltage (for example, 150 V DC) that can polarize the electrostrictive effect element 1 for 10 to 20 seconds between the outer terminals of the lead terminals 2a and 2b attached to the metal member 3 to perform polarization. The element 1 is made to be extended by the amount of residual polarization. At this time, the spring constant of the metal case 5 is set so that the contractile force of the metal case 5 with respect to the elongation of the residual polarization is about 20 to 100% (for example, 20 to 50 kg-f) of the maximum generated stress of the electrostrictive effect element 1. By providing this, it is possible to form a piezoelectric actuator housed in a metal case in which the electrostrictive effect element 1 is assembled in a state in which it is pre-compressed with a force of about 20 to 100% of the maximum generated stress.
第２図は本発明の第２の実施例の圧電アクチュエータの
縦断面図である。FIG. 2 is a longitudinal sectional view of a piezoelectric actuator according to a second embodiment of the present invention.
本実施例が第１の実施例と異なる点は、下部の金属部材
の代りにダイアフラム７が取付けられ、伸縮機能を無く
した金属ケース８が使用されダイアフラム７の凹面が電
歪効果素子１の下端面に接着されていることである。This embodiment differs from the first embodiment in that a diaphragm 7 is attached in place of the lower metal member, a metal case 8 without an expansion and contraction function is used, and the concave surface of the diaphragm 7 is placed below the electrostrictive element 1. It is glued to the end face.
本実施例では、ダイアフラム７および金属ケース８が第
１の実施例に比べて低コストで製造できる利点がある。This embodiment has the advantage that the diaphragm 7 and the metal case 8 can be manufactured at lower cost than in the first embodiment.
以上説明したように本発明は、金属ケースまたは金属部
材のいずれかに伸縮部を設け、電歪効果素子の密封処理
前に分極除去を実施し、密封処理後に分極を実施して伸
縮部により予め電歪効果素子に圧縮力を加えて密封処理
を完了することにより、次の効果がある。As explained above, the present invention provides an elastic part in either the metal case or the metal member, removes polarization before sealing the electrostrictive element, performs polarization after the sealing process, and removes polarization by the elastic part in advance. By applying compressive force to the electrostrictive element to complete the sealing process, the following effects can be obtained.
（１）取付時に外部から引張力が加わった時の素子破断
が防止できる。(1) Element breakage can be prevented when tensile force is applied from the outside during installation.
（２）ハーメ端子を介して電歪効果素子の積層方向と直
角方向に加力が加わっても素子または素子端面接合部で
の破断が防止できる。(2) Even if force is applied through the hermetic terminal in a direction perpendicular to the stacking direction of the electrostrictive element, breakage at the element or the element end surface joint can be prevented.
第１図は本発明の第１の実施例を示す圧電アクチュエー
タの縦断面図、第２図は本発明の第２の実施例を示す圧
電アクチュエータの縦断面図、第３図は従来の金属ケー
ス入り圧電アクチュエータの縦断面図である。
１・・・・・・電歪効果素子、 Ｉａ、Ｉｂ・・・・・
・端面、２ａ、２ｂ・・・・・・リード端子、３．６・
・・・・・・・・金属部材、４ａ、４ｂ ・・・・・・
リード線、
５．８．９−−−−−−金属ケース、５ａ、５ｂ、９ａ
−開口部、７・・・・・・・・・・・・ダイアフラム、
９ｂ・・・・・・・・・・・・底部、 １０・・
・・・・・・−−−−０リング。FIG. 1 is a longitudinal sectional view of a piezoelectric actuator showing a first embodiment of the present invention, FIG. 2 is a longitudinal sectional view of a piezoelectric actuator showing a second embodiment of the invention, and FIG. 3 is a conventional metal case. FIG. 2 is a longitudinal cross-sectional view of a piezoelectric actuator. 1... Electrostrictive effect element, Ia, Ib...
・End face, 2a, 2b...Lead terminal, 3.6・
・・・・・・Metal parts, 4a, 4b ・・・・・・
Lead wire, 5.8.9----Metal case, 5a, 5b, 9a
- opening, 7... diaphragm,
9b......Bottom, 10...
・・・・・・－－－0 ring.
Claims (2)
れた電歪効果素子が金属ケースと金属部材およびガラス
端子によって気密封止された圧電アクチュエータにおい
て、 前記金属ケースまたは金属部材のいずれかに伸縮部が設
けられ、前記伸縮部の収縮力が前記電歪効果素子にその
積層方向に加わるように前記電歪効果素子が予め一定寸
法だけ伸ばされていることを特徴とする圧電アクチュエ
ータ。1. In a piezoelectric actuator in which an electrostrictive effect element formed by alternately laminating a plurality of electrostrictive materials and internal electrodes is hermetically sealed by a metal case, a metal member, and a glass terminal, either the metal case or the metal member A piezoelectric actuator, characterized in that the electrostrictive element is provided with an extensible part, and the electrostrictive element is expanded in advance by a certain dimension so that the contractile force of the extensible part is applied to the electrostrictive element in the stacking direction thereof.
いて、 電歪効果素子の密封処理工程の前に前記電歪効果素子の
分極を除去する工程を、密封処理工程の後に前記電歪効
果素子の分極工程を含むことを特徴とする圧電アクチュ
エータの製造方法。2. 2. The method of manufacturing a piezoelectric actuator according to claim 1, further comprising: removing the polarization of the electrostrictive element before the electrostrictive element sealing process; and performing the polarizing process of the electrostrictive element after the sealing process. A method of manufacturing a piezoelectric actuator, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1016713A JP2508234B2 (en) | 1989-01-25 | 1989-01-25 | Piezoelectric actuator and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1016713A JP2508234B2 (en) | 1989-01-25 | 1989-01-25 | Piezoelectric actuator and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02196479A true JPH02196479A (en) | 1990-08-03 |
| JP2508234B2 JP2508234B2 (en) | 1996-06-19 |
Family
ID=11923908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1016713A Expired - Lifetime JP2508234B2 (en) | 1989-01-25 | 1989-01-25 | Piezoelectric actuator and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2508234B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5410789A (en) * | 1992-11-13 | 1995-05-02 | Murata Manufacturing Co., Ltd. | Method of manufacturing piezoelectric-resonator having vibrating spaces formed therein |
| JP2002323312A (en) * | 2001-04-26 | 2002-11-08 | Mitsutoyo Corp | High precision movement mechanism |
| US7269885B2 (en) * | 2001-10-31 | 2007-09-18 | Seiko Instruments Inc. | Method of manufacturing a piezoelectric vibrator |
-
1989
- 1989-01-25 JP JP1016713A patent/JP2508234B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5410789A (en) * | 1992-11-13 | 1995-05-02 | Murata Manufacturing Co., Ltd. | Method of manufacturing piezoelectric-resonator having vibrating spaces formed therein |
| JP2002323312A (en) * | 2001-04-26 | 2002-11-08 | Mitsutoyo Corp | High precision movement mechanism |
| US7269885B2 (en) * | 2001-10-31 | 2007-09-18 | Seiko Instruments Inc. | Method of manufacturing a piezoelectric vibrator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2508234B2 (en) | 1996-06-19 |
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