JPH05110154A - Piezoelectric actuator - Google Patents
Piezoelectric actuatorInfo
- Publication number
- JPH05110154A JPH05110154A JP3264629A JP26462991A JPH05110154A JP H05110154 A JPH05110154 A JP H05110154A JP 3264629 A JP3264629 A JP 3264629A JP 26462991 A JP26462991 A JP 26462991A JP H05110154 A JPH05110154 A JP H05110154A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric actuator
- effect element
- electrostrictive
- electrostrictive effect
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 17
- 239000000853 adhesive Substances 0.000 claims abstract description 12
- 230000001070 adhesive effect Effects 0.000 claims abstract description 12
- 230000000694 effects Effects 0.000 claims description 34
- 239000004020 conductor Substances 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000011796 hollow space material Substances 0.000 abstract description 2
- 239000012212 insulator Substances 0.000 abstract description 2
- 238000004299 exfoliation Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000002788 crimping Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧電アクチュエータに
関し、特に縦効果を利用した積層型の圧電アクチュエー
タの電歪効果素子の固着部の構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric actuator, and more particularly to a structure of a fixing portion of an electrostrictive effect element of a laminated piezoelectric actuator utilizing a vertical effect.
【０００２】[0002]
【従来の技術】電気エネルギを機械的エネルギに変換す
る電歪効果素子を利用した圧電アクチュエータは、現在
マスフローコントローラやＸＹテーブル駆動，射出成形
機などの工業分野で使用されている。2. Description of the Related Art Piezoelectric actuators utilizing electrostrictive effect elements for converting electrical energy into mechanical energy are currently used in industrial fields such as mass flow controllers, XY table drives and injection molding machines.
【０００３】図５は特願昭６３−１４９１５８による従
来の金属ケース入り圧電アクチュエータの縦断面図であ
る。FIG. 5 is a vertical sectional view of a conventional piezoelectric actuator encased in a metal case according to Japanese Patent Application No. 63-149158.
【０００４】従来、この圧電アクチュエータは、複数の
電歪材と内部電極を交互に積層して形成された電歪効果
素子１と、前記電歪効果素子１の両端に、エポキシ樹脂
などの接着剤９，９で固着され、ハーメチックシール端
子２を含む金属部材３と、金属部材６と、前記金属部材
３，６に溶接等でシール結合されたベローズ状の金属ケ
ース５とから構成されていた。Conventionally, this piezoelectric actuator has an electrostrictive effect element 1 formed by alternately laminating a plurality of electrostrictive materials and internal electrodes, and an adhesive such as an epoxy resin on both ends of the electrostrictive effect element 1. The metal member 3 is fixed by 9, 9 and includes the hermetically sealed terminal 2, the metal member 6, and the bellows-shaped metal case 5 that is seal-bonded to the metal members 3 and 6 by welding or the like.
【０００５】[0005]
【発明が解決しようとする課題】一般に電歪効果素子の
変位は、電圧による電歪材の縦歪を利用しているが、同
時に横歪も発生しており、その大きさは電界強度に比例
する。このため電圧印加時においては、接着部の電歪材
の電界強度は他の電歪材部と比べ数分の一から数百分の
一程度となり、横歪も同様の差が生じている。電歪効果
素子は、この横歪を吸収するために電歪効果素子端面部
の電歪材が凸状に変形する。従って、電歪効果素子を金
属部材に接着した場合、その接着面においては、電歪効
果素子に電圧が印加される毎に接着面は凸状に変形しよ
うとし、接着部近傍には大きな応力が発生する。Generally, the displacement of the electrostrictive effect element utilizes the longitudinal strain of the electrostrictive material due to the voltage, but at the same time, the transverse strain also occurs, and its magnitude is proportional to the electric field strength. To do. Therefore, when a voltage is applied, the electric field strength of the electrostrictive material of the adhesive portion is about a fraction to a few hundredth of that of the other electrostrictive material portions, and a similar difference occurs in lateral strain. In the electrostrictive effect element, the electrostrictive material at the end face portion of the electrostrictive effect element is deformed into a convex shape in order to absorb the lateral strain. Therefore, when the electrostrictive effect element is adhered to the metal member, the adhered surface tends to be deformed into a convex shape every time a voltage is applied to the electrostrictive effect element, and a large stress is generated in the vicinity of the adhered portion. Occur.
【０００６】また、温度変化（例えば常温〜２００℃）
のある環境で用いる場合にも、金属部材と電歪材の熱膨
張係数の違いにより、接着部近傍に大きな応力が発生す
る。Further, temperature change (for example, room temperature to 200 ° C.)
Even when used in a certain environment, a large stress is generated in the vicinity of the bonded portion due to the difference in thermal expansion coefficient between the metal member and the electrostrictive material.
【０００７】このため、繰り返し電圧をオン・オフする
ような使い方をしたり、温度変化のある場所に用いたり
すると、接着部近傍の電歪材にクラックが発生するなど
の欠点がある。また、接着面の接着剤の材質や厚みによ
っては、変位量が吸収され、変位量が数十パーセント程
度減少する欠点がある。For this reason, if the voltage is repeatedly turned on and off, or if it is used in a place where the temperature changes, there is a drawback that cracks occur in the electrostrictive material near the bonded portion. Further, there is a drawback that the displacement amount is absorbed and the displacement amount is reduced by about several tens of percent depending on the material and thickness of the adhesive on the adhesive surface.
【０００８】[0008]
【課題を解決するための手段】本発明の積層圧電アクチ
ュエータは、金属部材の内周より僅かに小さい円形状で
かつ電歪効果素子の断面積より僅かに大きい中空の広さ
を持つサポート部材に、電歪効果素子の端部を入れて、
電歪効果素子と金属部材間を接着剤なしで固着するとい
う特徴を備えている。The laminated piezoelectric actuator of the present invention is a support member having a circular shape slightly smaller than the inner circumference of a metal member and having a hollow space slightly larger than the cross-sectional area of the electrostrictive effect element. , Put the end of the electrostrictive effect element,
The feature is that the electrostrictive effect element and the metal member are fixed to each other without an adhesive.
【０００９】[0009]
【作用】上記の構成によると、電歪効果素子を接着剤な
しにサポート部材を会して金属部材に位置決め並びに固
着しているため、接着剤で固着していた場合の接着部近
傍の応力がなくなり、繰り返し電圧をオン・オフするよ
うな使い方や温度変化のある場所で用いたりしても、接
続部から剥がれを生じたり、金属部材に接する素子近傍
の電歪材にクラックを発生したりすることがなく、また
変位量の減少が少ない圧電アクチュエータを提供するこ
とができる。According to the above construction, since the electrostrictive effect element is positioned and fixed to the metal member by meeting the support member without the adhesive, the stress in the vicinity of the bonded portion when fixed by the adhesive is reduced. Even if it is used repeatedly to turn the voltage on and off, or if it is used in a place where there is a temperature change, it may peel off from the connection part or crack in the electrostrictive material near the element in contact with the metal member. It is possible to provide a piezoelectric actuator that does not cause a decrease in displacement amount.
【００１０】[0010]
【実施例】次に本発明の実施例について図面を参照して
説明する。図１は本発明の第１の実施例を示す圧電アク
チュエータの縦断面図である。Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a vertical sectional view of a piezoelectric actuator showing a first embodiment of the present invention.
【００１１】この圧電アクチュエータは、複数の電歪材
と内部電極が交互に積層されて形成された電歪効果素子
１の両端に、リード線４ａ，４ｂが接続され、ハーメチ
ックシール端子２ａ，２ｂが取り付けられている金属部
材３と、金属部材６が、前記電歪効果素子１の両端にサ
ポート部材７ａ，７ｂで固着され、伸縮機能を有するベ
ローズなどの金属ケース５が、金属部材３，６に溶接等
でシール結合されて気密封止されている。In this piezoelectric actuator, lead wires 4a and 4b are connected to both ends of an electrostrictive effect element 1 formed by alternately laminating a plurality of electrostrictive materials and internal electrodes, and hermetic seal terminals 2a and 2b are connected. The attached metal member 3 and the metal member 6 are fixed to both ends of the electrostrictive effect element 1 by support members 7a and 7b, and a metal case 5 such as a bellows having an expansion / contraction function is attached to the metal members 3 and 6. It is hermetically sealed by being welded and sealed.
【００１２】ここで、サポート部材７ａ，７ｂの形状に
ついて説明する。図２は、サポート部材７ａを含む電圧
アクチュエータの分解斜視図を示す。サポート部材７ａ
は、電歪効果素子の端面１ａの断面積より僅かに大きい
中空の広さの透孔を持ち、かつ外形は金属部材３，また
は６の内径φより僅かに小さい円形状をしており、材質
は加工精度がよく、２００℃以上の耐熱性を持つポリエ
ーテルサルフォン等の絶縁物からなる。Here, the shapes of the support members 7a and 7b will be described. FIG. 2 shows an exploded perspective view of the voltage actuator including the support member 7a. Support member 7a
Has a hollow through hole slightly larger than the cross-sectional area of the end face 1a of the electrostrictive effect element, and has an outer shape of a circular shape slightly smaller than the inner diameter φ of the metal member 3 or 6. Is made of an insulating material such as polyether sulfone having a high processing accuracy and a heat resistance of 200 ° C. or higher.
【００１３】次に、本実施例の圧電アクチュエータの製
造方法について説明する。ペロブスカイト結晶構造を持
つ多成分固溶体セラミック粉末に有機バインダを混合し
て１００μｍ程度の厚みのグリーンシート化し、その上
にペースト状の銀内部電極導体を塗布，乾燥後、数十層
に積層して焼結した積層体をまず用意する。この積層体
の対応する一組の側面に露出した銀内部電極導体の端部
に、一層おきに交互にガラス絶縁膜を被覆した後、さら
に外部電極導体を前記側面に形成して、銀内部電極導体
と外部電極導体が一層おきに交互に接続された電歪効果
素子１を得る。そして、リード線４ａ，４ｂを外部電極
導体に半田付けし、電歪効果素子の端面１ａをサポート
部材７ａに挿入し、金属部材３の凹部にサポート部材７
ａをはめ込み、電歪効果素子１が植立するように固定す
る。次に、電歪効果素子１に接続したリード線４ａ，４
ｂをハーメチックシール端子２ａ，２ｂの内側の端部と
半田付けする。Next, a method for manufacturing the piezoelectric actuator of this embodiment will be described. An organic binder is mixed with a multi-component solid solution ceramic powder having a perovskite crystal structure to form a green sheet having a thickness of about 100 μm, a paste-like silver internal electrode conductor is applied on the green sheet, dried, and then laminated into several dozen layers and baked. First, a laminated body is prepared. After alternately covering the end portions of the silver internal electrode conductors exposed on a corresponding pair of side surfaces of this laminate with a glass insulating film every other layer, external electrode conductors are further formed on the side surfaces to form a silver internal electrode. The electrostrictive effect element 1 in which conductors and external electrode conductors are alternately connected to each other is obtained. Then, the lead wires 4a and 4b are soldered to the external electrode conductor, the end face 1a of the electrostrictive effect element is inserted into the support member 7a, and the support member 7 is inserted into the concave portion of the metal member 3.
Insert a and fix the electrostrictive effect element 1 so as to stand. Next, the lead wires 4a, 4 connected to the electrostrictive effect element 1
b is soldered to the inner ends of the hermetically sealed terminals 2a and 2b.
【００１４】一方、金属ケース５の一方の開口部５ｂと
金属部材６とを予め溶接などでシール接合したものを用
意する。次に、金属ケース５の開口部５ａから金属部材
３が固定された電歪効果素子１の他の端面部１ｂを挿入
して、金属部材６の中央に電歪効果素子１が植立するよ
うにサポート部材７ｂで固定する。次に、金属部材３と
金属ケース５の開口部５ａとを溶接などでシール結合し
て密封して、金属ケース入りの圧電アクチュエータが形
成される。On the other hand, one in which the one opening 5b of the metal case 5 and the metal member 6 are sealed and joined in advance by welding or the like is prepared. Next, the other end face portion 1b of the electrostrictive effect element 1 to which the metal member 3 is fixed is inserted from the opening 5a of the metal case 5 so that the electrostrictive effect element 1 is planted in the center of the metal member 6. To the support member 7b. Next, the metal member 3 and the opening 5a of the metal case 5 are sealed and joined together by welding or the like to form a piezoelectric actuator containing the metal case.
【００１５】実施例１で構成される圧電アクチュエータ
を使用し、温度サイクル試験を行った。Using the piezoelectric actuator constructed in Example 1, a temperature cycle test was conducted.
【００１６】 条件：−２５℃（３０分）→常温（３０分）→＋２００
℃（３０分） ５０サイクル，測定数ｎ＝２１ｐ 結果：不良発生はなく、クラック等の発生もなかった。 以上の効果が確認された。Conditions: -25 ° C. (30 minutes) → normal temperature (30 minutes) → + 200
50 ° C. (30 minutes) 50 cycles, number of measurements n = 21 p Result: No defect was found and no cracks were found. The above effects were confirmed.
【００１７】[0017]
【実施例２】図３はこの発明の第２の実施例を示す圧電
アクチュエータの断面図である。この実施例は、前記第
１の実施例のサポート部材の材質に、４２合金のような
熱膨張係数の低い金属に絶縁物（例えばフッ素コーティ
ング）で表面処理したものを用いた点を除いては、第１
の実施例と同様であるため、同一部分には同一参照符号
を付してその説明を省略する。この実施例では、金属材
を用いることで加工精度が容易に出せ、熱膨張係数が低
く、３００℃以上の高温下で用いることができる。[Second Embodiment] FIG. 3 is a sectional view of a piezoelectric actuator according to a second embodiment of the present invention. In this example, except that the material of the support member of the first example was a metal having a low coefficient of thermal expansion, such as 42 alloy, which was surface-treated with an insulator (for example, fluorine coating), except that , First
Since it is the same as the embodiment described above, the same parts are designated by the same reference numerals and the description thereof will be omitted. In this embodiment, by using a metal material, the processing accuracy can be easily obtained, the coefficient of thermal expansion is low, and the material can be used at a high temperature of 300 ° C. or higher.
【００１８】[0018]
【実施例３】図４（ａ）（ｂ）はこの発明の第３実施例
を説明するためのサポート部材７ａの斜視図である。こ
の実施例で前記第１の実施例と異なる点は、サポート部
材７ａの中空部を凹部に形成するとともに、その下面に
突起７ａを付けた点を除いては第１の実施例と同様であ
るため、同一部分には同一参照符号を付してその説明を
省略する。この実施例では、サポート部材７ａ，７ｂと
金属部材３，６とが点接触となるため、金属ケースのバ
ネ圧で圧着固定する際、素子にねじれの力がかかわない
という利点がある。Third Embodiment FIGS. 4 (a) and 4 (b) are perspective views of a support member 7a for explaining a third embodiment of the present invention. The difference between this embodiment and the first embodiment is the same as the first embodiment except that the hollow portion of the support member 7a is formed in a concave portion and the projection 7a is attached to the lower surface thereof. Therefore, the same parts are designated by the same reference numerals and the description thereof will be omitted. In this embodiment, since the support members 7a and 7b and the metal members 3 and 6 are in point contact with each other, there is an advantage that a twisting force is not applied to the element when crimping and fixing by the spring pressure of the metal case.
【００１９】[0019]
【発明の効果】以上説明したように本発明は、電歪効果
素子を固着する時、サポート部材に素子を組み込んで金
属ケースのバネ圧で圧着固定することにより、積層圧電
アクチュエータに電圧を印加した時、接着部近傍の電歪
材と内部電極導体層間の電歪材との電界強度の差によっ
て生じる電歪効果素子接続部の変形が妨げられず、繰り
返し電圧をオン・オフさせた場合においても電歪材にク
ラックが入ったりするのを防止する効果がある。As described above, according to the present invention, when the electrostrictive effect element is fixed, the voltage is applied to the laminated piezoelectric actuator by incorporating the element in the support member and crimping and fixing with the spring pressure of the metal case. At this time, the deformation of the electrostrictive effect element connection part caused by the difference in the electric field strength between the electrostrictive material near the adhesion part and the electrostrictive material between the internal electrode conductor layers is not hindered, and even when the voltage is repeatedly turned on and off. It has the effect of preventing the electrostrictive material from cracking.
【００２０】また、電歪効果素子と金属部材間の接続に
接着剤を用いないことにより、接着工数の大幅な低減が
でき、接着硬化時や高温環境下での熱応力による接着界
面の破損防止効果がある。Further, since the adhesive is not used for the connection between the electrostrictive effect element and the metal member, the number of bonding steps can be greatly reduced, and the damage of the bonding interface due to the thermal stress at the time of curing the bonding or under the high temperature environment can be prevented. effective.
【図１】 本発明の第１の実施例を示す圧電アクチュエ
ータの縦断面図FIG. 1 is a vertical sectional view of a piezoelectric actuator showing a first embodiment of the present invention.
【図２】 図１に示した電歪効果素子接続時の要部分解
斜視図FIG. 2 is an exploded perspective view of essential parts when the electrostrictive effect element shown in FIG. 1 is connected.
【図３】 本発明の第２の実施例を示す圧電アクチュエ
ータの縦断面図FIG. 3 is a longitudinal sectional view of a piezoelectric actuator showing a second embodiment of the present invention.
【図４】 本発明の他の実施例に使用するサポート部材
の斜視図FIG. 4 is a perspective view of a support member used in another embodiment of the present invention.
【図５】 従来の金属ケース入り圧電アクチュエータの
縦断面図FIG. 5 is a vertical sectional view of a conventional piezoelectric actuator encased in a metal case.
１ 電歪効果素子 １ａ，１ｂ 端面 ２ａ，２ｂ ガラス端子 ３，６ 金属部材 ４ａ，４ｂ リード線 ５ 金属ケース ５ａ，５ｂ 開口部 ７ａ，７ｂ サポート部材 ８ 半田 ９ 接着剤 DESCRIPTION OF SYMBOLS 1 Electrostrictive effect element 1a, 1b End surface 2a, 2b Glass terminal 3,6 Metal member 4a, 4b Lead wire 5 Metal case 5a, 5b Opening 7a, 7b Support member 8 Solder 9 Adhesive
Claims (2)
された電歪効果素子を金属ケースと金属部材により密封
してなる圧電アクチュエータにおいて、前記電歪効果素
子の金属部材側端部にボート部材を設けて、電歪効果素
子を接着剤を用いることなく固定したことを特徴とする
圧電アクチュエータ。1. A piezoelectric actuator in which an electrostrictive effect element, in which a plurality of electrostrictive materials and internal electrode conductors are alternately laminated, is sealed by a metal case and a metal member, wherein an end portion of the electrostrictive effect element on the metal member side is sealed. A piezoelectric actuator, characterized in that a boat member is provided on the substrate, and the electrostrictive effect element is fixed without using an adhesive.
積より僅かに大きい中空の広さを持ち、外径が金属部材
の内周よりも僅かに小さいリング形状を有し、体積膨張
率の低い絶縁物からなることを特徴とする請求項１記載
の圧電アクチュエータ。2. The support member has a hollow area slightly larger than the cross-sectional area of the electrostrictive effect element, has an outer diameter of a ring shape slightly smaller than the inner circumference of the metal member, and has a volume expansion coefficient. The piezoelectric actuator according to claim 1, wherein the piezoelectric actuator is made of an insulating material having a low dielectric constant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3264629A JP3010835B2 (en) | 1991-10-14 | 1991-10-14 | Piezo actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3264629A JP3010835B2 (en) | 1991-10-14 | 1991-10-14 | Piezo actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05110154A true JPH05110154A (en) | 1993-04-30 |
| JP3010835B2 JP3010835B2 (en) | 2000-02-21 |
Family
ID=17406001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3264629A Expired - Lifetime JP3010835B2 (en) | 1991-10-14 | 1991-10-14 | Piezo actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3010835B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6874475B2 (en) | 2000-06-26 | 2005-04-05 | Denso Corporation | Structure of fuel injector using piezoelectric actuator |
-
1991
- 1991-10-14 JP JP3264629A patent/JP3010835B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6874475B2 (en) | 2000-06-26 | 2005-04-05 | Denso Corporation | Structure of fuel injector using piezoelectric actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3010835B2 (en) | 2000-02-21 |
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| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19991109 |