JPH11273284A5 - - Google Patents
Info
- Publication number
- JPH11273284A5 JPH11273284A5 JP1998072789A JP7278998A JPH11273284A5 JP H11273284 A5 JPH11273284 A5 JP H11273284A5 JP 1998072789 A JP1998072789 A JP 1998072789A JP 7278998 A JP7278998 A JP 7278998A JP H11273284 A5 JPH11273284 A5 JP H11273284A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07278998A JP3764815B2 (ja) | 1998-03-20 | 1998-03-20 | 記憶装置および微小位置決め装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07278998A JP3764815B2 (ja) | 1998-03-20 | 1998-03-20 | 記憶装置および微小位置決め装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11273284A JPH11273284A (ja) | 1999-10-08 |
| JPH11273284A5 true JPH11273284A5 (en:Method) | 2005-03-17 |
| JP3764815B2 JP3764815B2 (ja) | 2006-04-12 |
Family
ID=13499518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07278998A Expired - Fee Related JP3764815B2 (ja) | 1998-03-20 | 1998-03-20 | 記憶装置および微小位置決め装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3764815B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7248444B1 (en) * | 2000-07-21 | 2007-07-24 | Lauer Mark A | Electromagnetic heads, flexures, gimbals and actuators formed on and from a wafer substrate |
| US6754047B2 (en) | 2002-04-24 | 2004-06-22 | Hitachi Global Storage Technologies Netherlands B.V. | Slide microactuator using S-shaped piezoelectric element |
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1998
- 1998-03-20 JP JP07278998A patent/JP3764815B2/ja not_active Expired - Fee Related