JPH11245133A - Jig for manufacturing slider - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent electrical breakdown of a magnetic resistance effect element layer in a thin-film element by forming a jig for retaining slider having a thin-film element out of semiconductive material. SOLUTION: A jig 15 is formed out of conductive plastic, example, and the surface resistance of the jig 15 is adjusted suitably so as to be from 1×10<6> (Ω/square) to 1×10<12> (Ω/square) exclusive. Even if a slider 14 having a thin-film element 13 is jointed to the fixture 15, no electrostatic polarization occurs at a metallic layer in the thin-film element 13, so that no discharging occurs between the metallic layers, which was found in the past. Thus, a magnetic resistance effect element layer can be protected from electrical breakdown.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for holding a slider having a thin film element for recording / reproducing when a slider having the thin film element is formed into a predetermined shape. The present invention relates to a jig for manufacturing a slider which can be prevented.

[0002]

2. Description of the Related Art A magnetic head used in a hard disk drive or the like has a slider made of a ceramic material provided at the tip of a support member made of a leaf spring material, and a thin film is formed on the trailing side of the slider. An element has been deposited. This thin-film element is formed by laminating a magnetic material such as permalloy (Ni—Fe alloy) or an insulating material such as alumina, and has a magnetic detection unit for reproducing a magnetic recording signal recorded on a magnetic recording medium, or a magnetic recording unit. It includes a magnetic recording unit for recording a magnetic signal on a medium, or both a magnetic detection unit and a magnetic recording unit. The magnetic detection unit is, for example, an MR head including a magnetoresistive element (MR element). Further, the magnetic recording section is constituted by an inductive head in which a coil and a core are patterned.

The ceramic material serving as the base material of the slider is first formed in a disk shape, and then the plurality of thin film elements are formed in parallel on the ceramic material. Then, the ceramic material is cut into a square bar shape as a slider bar, and the slider bar is fixed to a jig 30 shown in FIG.

FIG. 7 is a perspective view of a jig and a slider bar fixed to the jig, and FIG. 8 is a plan view of FIG. FIG.
As shown in the figure, the jig 30 has a plurality of grooves 3 at its tip.
1 is formed. The jig 30 is made of, for example, an insulating ceramic.

First, wax or the like is applied to the surface of the jig 30 to be joined to the slider bar 40, and as shown in FIG.
The slider bar 40 is joined to the jig 30. Reference numeral 41 denotes the above-described thin film element. Then, as shown in FIG. 8, from the direction of the arrow parallel to each groove 31,
While spraying the cooling water, the slider bar 40 is cut by a rotating grindstone or the like. By this cutting step, a plurality of sliders can be obtained from one slider bar 40.

[0006]

By the way, conventionally,
As described above, the jig 30 shown in FIG. 7 is formed of, for example, an insulating ceramic. However, when the jig 30 is formed of an insulator having a high surface resistance, when the slider bar 40 is joined to the jig 30, the inside of the thin-film element 41 formed on the end face of the slider bar 40 is reduced. The electric charge of the metal layer causes polarization (electrostatic polarization), and a discharge easily occurs inside the thin film element 41. By this discharge,
There has been a problem that the magnetoresistive element layer of the magnetic detection unit is destroyed by heat.

When the jig 30 is formed of a conductor having a low surface resistance, the slider bar 40 is
When it is bonded to zero, there is a problem that an excessive current flows from the jig 30 to the magnetoresistive element layer, thereby destroying the magnetoresistive element layer.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems. A jig for holding a slider having a thin film element is formed of a semiconductive material, and a magnetoresistive effect in the thin film element is provided. It is an object of the present invention to provide a jig for manufacturing a slider which can prevent electrical destruction of an element layer.

[0009]

According to the present invention, there is provided a jig used for forming a slider having a thin film element for recording / reproducing into a predetermined shape.
× 10 ⁶ (Ω / square) or more and 1 × 10 ¹² (Ω / s)
(quer).

In the present invention, the jig may be formed of semiconductive ceramics (such as ionic conductive ceramics), or may be formed of semiconductive plastic (such as ionic conductive polymers). May be.

Alternatively, a composite conductive material in which carbon powder or a conductive filler is mixed in a polymer material may be used.

The jig may be formed by attaching a surfactant to the surface of the insulator, or may be formed by attaching moisture to the surface of the insulator.

In the present invention, the jig is used to hold the slider bar when cutting the slider bar into individual sliders, or when forming a floating surface on the slider surface. This is for holding the slider.

Conventionally, a jig 30 used to cut a slider bar 40 shown in FIG.
For example, it was formed of an insulator such as ceramic.

As shown in FIG. 7, a thin film element 41 is formed on the end face (trailing side end face) of the slider bar 40.

The thin-film element 41 has an AMR film composed of three layers of a magnetoresistive element layer, a SHUNT layer and a SAL layer;
Alternatively, an MR head (magnetic detection section) having a magnetoresistive element layer such as a spin valve film composed of a free magnetic layer, a nonmagnetic conductive layer, a fixed magnetic layer, and an antiferromagnetic layer, and an inductive head composed of a core and a coil (Magnetic recording section)
The MR head and the inductive head have a laminated structure of a metal layer formed of, for example, permalloy and an insulating layer.

Conventionally, as shown in FIG. 7, when the slider bar 40 is bonded to the insulating jig 30, there is a problem that the magnetoresistive element layer in the MR head of the thin film element 41 is thermally destroyed. there were.

FIG. 5 is a schematic view of each metal layer constituting the MR head. Referring to FIG.
The mechanism of thermal destruction is described below.

Since the jig 30 is an insulator as described above, as shown in FIG. 5, if the jig 30 is charged to a positive charge, as shown in FIG. The negative charge of 1 (formed of, for example, permalloy) is attracted to the jig 30 side, and the positive charge and the negative charge are electrostatically polarized as shown in FIG.

Similarly, the negative charge of the magnetoresistive element layer 2 formed on the lower shield layer 1 via an insulating layer (not shown) also becomes a positive charge polarized in the upper layer of the lower shield layer 1. By being attracted, positive charges and negative charges are electrostatically polarized.

As shown in FIG. 5, reference numeral 3 formed on both sides of the magnetoresistive element layer 2 denotes, for example, Co.
5 is a hard bias layer 3 made of a Pt (cobalt-platinum) alloy or the like, and reference numeral 4 is a conductive layer 4 made of Cr (chromium) or the like.
As shown in (1), the positive and negative charges are electrostatically polarized.

Further, the negative charge of the upper shield layer 5 made of permalloy or the like formed on the conductive layer 4 with an insulating layer (not shown) interposed between the magnetoresistive element layer 2 and the conductive layer 4 Is attracted to the positive charges polarized in the upper layer, and the positive charges and the negative charges are electrostatically polarized.

As described above, each metal layer of the MR head is in an electrostatically polarized state as shown in FIG. 5, and when the potential difference between the respective metal layers exceeds the dielectric breakdown voltage determined by the distance between the layers and the material, during this time, Then, a current is concentrated at a location where the discharge occurs, and the metal layer is melted by heat.

In particular, when the potential difference between the metal layers becomes 500 V or more, it is considered that a discharge occurs during this period, and the discharge destroys the magnetoresistive element layer 2 by heat.

Even when the material used for the jig 30 is formed of a conductor having a low surface resistance in place of the insulator, the magnetoresistive effect element 2 can be formed in the same manner as when the insulator jig 30 is used.
May be destroyed by heat. This phenomenon will be described with reference to FIG.

Since the lower gap layer 6 and the upper gap layer 7 which are laminated on the upper and lower sides of the magnetoresistive hardening element layer 2 are formed of an insulating material, each gap layer is affected by friction during film formation and an external charge. 6 and 7 may be charged with static electricity. For example, as shown in FIG. 6, when the upper and lower gap layers 6 and 7 are charged with a positive charge, the magnetoresistive element layer 2 and the hard bias layer 3 formed on the lower gap layer 6 are removed. Negative charges are attracted to the lower layer side.

Similarly, the magnetoresistive element layer 2 and the conductive layer 4
The negative charge is attracted to the upper layer portion.

As described above, the negative charges are attracted to the lower layer side of the hard bias layer 3 and the magnetoresistive element layer 2 and the upper layers of the conductive layer 4 and the magnetoresistive element layer 2 as shown in FIG. In addition, between the hard bias layer 3 and the conductive layer 4 and in the middle of the magnetoresistive element layer 2,
Positive charge becomes dominant and becomes in an equilibrium state.

When the conductive jig comes into contact with the hard bias layer 4 or the like while such electrostatic polarization is occurring, the electrons of the jig are dominated by the positive charge of the conductive layer 4. An excessive current flows from the conductive layer 4 to the magnetoresistive element layer 2, and heat is generated in the magnetoresistive element layer 2 by Joule heat, and migration occurs between layers to cause deterioration or Melt fracture may occur due to heat.

According to the present invention, based on the above-described electrostatic polarization mechanism, the jig holding the slider having the thin-film element is less likely to be charged than the insulator, and the electrostatic polarization of the magneto-resistance effect element layer and the like is reduced. Is gradually eliminated to prevent an excessive current from flowing through the element, that is, a so-called semiconductive material.

Here, the conductor, the semiconductor, and the insulator are defined. Generally, the surface resistance of the conductor is 0%.
Is less than 1 × 10 ⁶ (Ω / square), the surface resistance as a semiconductor is 1 × 10 ⁶ (Ω / square) or more and less than 1 × 10 ¹² (Ω / square), and the surface resistance as an insulator is It is 1 × 10 ¹² (Ω / square) or more.

Therefore, in the present invention, the jig for holding the slider having the thin film element has a surface resistance of 1 × 10
⁶ (Ω / square) or more and 1 × 10 ¹² (Ω / square)
re)).

In the present invention, the surface resistance is 1 × 10 ⁶ or more and 1
If it is within the range of less than × 10 ¹² (Ω / square),
The material of the jig may be any material.

The jig is made of, for example, conductive ceramics. As conductive ceramics, Z
An ionic conductor formed by a composition formula of rO ₂ —Y ₂ O _{3 or} the like can be given.

In place of the conductive ceramic, a conductive plastic can be used. As conductive plastic, conductive polymers such as polyacetylene,
A conductive filler obtained by mixing a filler such as a metal powder with a plastic, or an ion conductive polymer can be used.

Further, according to the present invention, a surface active agent or moisture is attached to the surface of an insulating ceramic which has been conventionally used as a jig, so that the jig has a surface resistance of 1 × 10 ^6.
(Ω / square) or more and 1 × 10 ¹² (Ω / square)
e) It may be adjusted appropriately so as to fall within the range of less than e).

For example, in a state where the slider bar 40 is bonded to the jig 30 shown in FIG. 7 via wax, the slider bar 40 is cut into individual sliders, and the slider is then attached to the jig 30 using a surfactant. Remove from

In the present invention, the surface resistance of the jig is reduced to 1 × 10 by storing the jig in a state where the surfactant remains attached, or by attaching moisture or a surfactant to the jig. ⁶
(Ω / square) or more and 1 × 10 ¹² (Ω / square)
e) It is set to be within the range below.

The present invention is applied to all jigs for holding the slider when the slider having the thin film element is formed in a predetermined shape.

For example, the jig is for holding the slider when cutting the slider into a predetermined shape, or for holding the slider when forming a floating surface on the slider surface. Things.

[0041]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a slider of the present invention mounted on a hard disk or the like, which has a surface (AB) facing a recording medium.
FIG. 2 is a perspective view showing an S surface (floating surface) facing upward. The slider 8 shown in FIG. 1 is formed of a ceramic material such as alumina / titanium carbide or Si (silicon). Air grooves 9 are formed in a portion facing a hard disk as a recording medium, and on both sides thereof. Rail portions 10, 10 are formed.

As shown in FIG. 1, the rail portions 10, 1
0 is formed in a predetermined crown shape, and the surfaces of the rail portions 10 and 10 are provided with a surface facing the recording medium (ABS).
Surface; air bearing surface) 11,11. An inclined portion 1 is provided at the leading end A of the rails 10 and 10.
2, 12 are formed. A thin film element 13 is provided on an end surface (end portion) of the slider 8 on the trailing side A. The thin film element 13 is a reproducing M layer having a magnetoresistive element layer such as an AMR element or a spin valve thin film element.
An R head, a recording inductive head formed of a magnetic material core and a coil are stacked.

FIG. 2 is a sectional view showing the structure of a recording MR head. The symbol 1 shown in FIG.
The lower shield layer is made of an Fe-based alloy (Permalloy) or the like. The lower shield layer 1 is provided on the trailing B side end surface of the slider 8 shown in FIG. A lower gap layer 6 made of a non-magnetic material such as Al ₂ O ₃ (alumina) is formed on the lower shield layer 1, and a magnetoresistive element layer 2 is further formed thereon.

The magnetoresistive element layer 2 is made of AMR (am
It is composed of an isotropic magnetoresistive (GMT) element and a GMR (giant magnetoresistive) element typified by a spin-valve film, and detects a leakage magnetic field from a recording medium as a resistance change, and can output it as a voltage change. On both sides of the magnetoresistive element 2, a hard bias layer 3 is formed as a vertical bias layer, and a nonmagnetic conductive material such as Cu (copper) or W (tungsten) having a low electric resistance is formed on the hard bias layer 3. A conductive layer 4 of a conductive material is formed.

Then, as shown in FIG. 2, an upper gap layer 7 made of a non-magnetic material such as alumina is formed on the conductive layer 4, and on the upper gap layer 7, sendust, permalloy or the like is formed. The upper shield layer 5 is formed. The slider 8 shown in FIG. 1 has a lower surface side, that is, a surface facing the recording medium (ABS surface; floating surface).
A support member such as a flexure or a load beam made of a leaf spring material is attached to the opposite side of the magnetic head device, thereby completing the magnetic head device. The magnetic head device operates according to the CSS system or the like, and performs recording / reproduction by the thin film element 13 in a state where the slider 8 shown in FIG.

In the slider 8 shown in FIG. 1, a ceramic material as a base material is first formed in a disk shape. Thereafter, the thin film element 13 is placed on the ceramic material.
When a plurality of patterns are formed in parallel, and the ceramic material is cut into slices, a plurality of slider bars 14 as shown in FIG. 3 are formed from one disk-shaped ceramic material. At this time, as shown in FIG.
3 is formed.

Reference numeral 15 shown in FIG. 3 is a jig for holding the slider bar 14 when the slider bar 14 is cut into individual sliders 8. The jig 15 has a step 16 at its tip. As shown in FIG. 3, the step 16 has a plurality of grooves 17 formed therein.
Is, for example, a relief groove of the rotary grindstone when cut with a rotary grindstone. When cutting the slider bar 14 into individual sliders 8, a step 16
The slider bar 14 is bonded to the bonding surface 18 of the jig 15 via the wax, for example, by applying wax or the like to the bonding surface 18.

FIG. 4 is a plan view showing a state where the slider bar 14 is joined to the jig 15. As shown in FIG.
When the slider bar 14 is joined to the jig 15, the groove 17
The slider bar 14 is cut into individual sliders 8 by, for example, a rotating grindstone from the direction of the arrow parallel to the slider bar 14.

In the present invention, the surface resistance of the jig 15 is not less than 1 × 10 ^{6 and} less than 10 ¹² (Ω / square).
e). Within this range, the jig 15 has a so-called semi-conductive property. As shown in FIG. 4, when the slider bar 14 is joined to the jig 15, It is possible to prevent the magnetoresistive element layer 2 (see FIG. 2) in the formed thin film element 13 from being electrically damaged.

That is, in the present invention, the jig 15 is not formed of a material having a high surface resistance such as an insulator, and the charging of the jig 15 can be suppressed as much as possible.
The lower shield layer 1, the magnetoresistive element layer 2, the hard bias layer 3, the conductive layer 4, and the upper shield layer 5 shown in FIG.
Electrostatic polarization as shown in FIG. 5 does not easily occur. Therefore, no discharge occurs due to electrostatic polarization between the magnetoresistive element layer 2 and the lower shield layer 1 and between the magnetoresistive element layer 2 and the upper shield layer 5.
Can be protected.

In the present invention, since the jig 15 is not formed of a material having a low surface resistance such as a conductor,
As shown in FIG. 6, even if the jig 15 comes into contact with the magnetoresistive element layer 2, the hard bias layer 3, and the conductive layer 4 sandwiched between the charged insulating layers 6 and 7, the magnetic field is maintained as in the related art. An excessive current does not easily flow through the resistance effect element layer 2, and the magnetoresistance effect element layer 2 can be protected.

In the present invention, 1 × 10 ⁶ (Ω / square)
e) As a semiconductive material having a surface resistance in a range of not less than 1 × 10 ¹² (Ω / square), first, a conductive ceramic can be presented. Examples of conductive ceramics include ZrO ₂ —Y ₂ O ₃ and Bi ₂ O _{3
-Y 2 O 3, PbCl 2,} Li 14 Mg (GeO 4) 4, PbF
₂ , Li ₃ N (single crystal), Na-β-alumina (polycrystal), 7CuBr · C ₆ H ₁₂ N ₄ CH ₃ Br, H ₃ PW ₁₂ O
₄₀ · 29H ₂ O, Na-β-alumina (single crystal), Rb
An ionic conductor represented by Ag ₄ I ₅ or the like can be exemplified.

In the present invention, a conductive plastic may be used in addition to the conductive ceramic. As the conductive plastic, for example, polyacetylene,
Poly-p-phenylenevinylene, poly-2.5-tunylenevinylene, poly-p-phenylene, polypyrrole,
Conductive polymer represented by polythiophene, polyaniline, polyisothianaphthene, polyberinaphthalene, etc .; conductive filler in which metal matrix such as carbon black, metal powder or metal-plated inorganic substance is mixed with plastic matrix, polyethylene oxide +
LiClO ₄ (12: 1), crosslinked polyethylene oxide by gamma irradiation + LiClO ₄ (1: 8), polypropylene + LiCF ₃ SO ₃ (9: 1), polyethylene
Adipic acid derivative + LiCF ₃ SO ₃ (4: 1), polyethylene succinic acid derivative + LiB ¢ ₄ (6: 1), polyphosphazene (ME7P) + LiCF ₂ SO ₃ (16:
1), crosslinked polyphosphene (1XMP) + LiCF ₃
SO ₃ (32: 1), linear complex polysiloxane (PMM5
7) + LiClO ₄ (25: 1), triol-type polyethylene oxide cross-linked with unsaturated urethane + LiC
_{lO 4 (50: 1),} 3 one was crosslinked urethane having a functional group PEO-PPO-PEO block copolymer +
An ion conductive polymer such as LiClO ₄ (20: 1) can be exemplified.

According to the present invention, even when the jig 15 is formed of an insulating material as in the prior art, the surface of the jig 15 is made to adhere to a surface active agent or moisture so that the jig 15 is formed. The surface resistance of the tool 15 can be in the range of 1 × 10 ⁶ (Ω / square) or more and less than 1 × 10 ¹² (Ω / square).

In the present invention, a jig for holding the slider 8 used in the manufacturing process of the slider 8 is used when the slider bar 14 as shown in FIG. The present invention is applied to all jigs for holding the slider 8 having the thin film element 13.

Except for the jig 15 shown in FIG. 3, for example, as shown in FIG. 1, an air groove 9 is formed on the surface of the slider 8, and the surface facing the recording medium (step) higher than the air groove 9 is formed. Although the ABS 11 is formed, a jig for holding both side surfaces of the slider 8 when forming the ABS 11 also has a surface resistance of 1 × 10 ⁶ (Ω / Ω). square) or more and 1 × 10 ¹² (Ω)
/ Square).

As described above, in the present invention, the surface resistance of the jig used to hold the slider 8 is 1 × 10 ⁶ (Ω)
/ Square) or more and 1 × 10 ¹² (Ω / square)
The electrostatic polarization is hardly generated in the metal layer in the thin film element 13 formed on the end face of the slider, and therefore, the discharge caused by the electrostatic polarization and the excessive current The destruction of the magnetoresistive element layer 2 can be prevented.

[0058]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, jigs for holding a slider are made of conductive zirconia, insulating zirconia, and alumina, and the surface resistance, ground leakage resistance,
And the triboelectric voltage was measured. The surface resistance was measured by measuring the resistance between the measurement electrodes in a state where two measurement electrodes having conductive rubber were in contact with the surface of each jig.

The ground leakage resistance is obtained by measuring the resistance between the measurement electrode and the ground electrode while the measurement electrode having conductive rubber is in contact with the surface of each jig and the ground electrode is dropped to the ground. Was done. The earth leakage resistance is the sum of the resistance of the object itself, the ground resistance of the electrodes, and the ground resistance.
The resistance between an object and the earth. The surface resistance,
The measurement of the ground leakage resistance was performed with the measurement voltage set to 15V.

The frictional charged voltage was measured by rubbing the surface of each jig with a cloth or the like, and then using a non-contact surface electrometer. In the experiment, first, the surface resistance of each jig and the ground leakage were measured in a state where a surfactant was applied to the surface of the jig formed of conductive zirconia, insulating zirconia, and alumina (hereinafter referred to as “before IPA cleaning”). The resistance and the triboelectric voltage were measured. Next, the surfactant is washed away from the surface of each jig by IPA (hereinafter referred to as IPA).
After that, the surface resistance, the ground leakage resistance, and the frictional charged voltage of each jig were measured. The experimental results are shown in Tables 1 to 3.

[0061]

[Table 1]

As shown in Table 1, in the case of a jig made of conductive zirconia, before IPA cleaning (in a state where a surfactant is attached) and after IPA cleaning (in a state where no surfactant is attached). In either case, the surface resistance and ground leakage resistance of the jig are 1 × 10 ⁶ (Ω / square).
e) It is in the range of not less than 1 × 10 ¹² (Ω / square). Further, the friction band voltage is 0 (V) before and after the IPA cleaning. For this reason, for example, if the jig 15 shown in FIG. 3 is made of conductive zirconia, the surfactant may or may not be attached.

[0063]

[Table 2]

[0064]

[Table 3]

Next, as shown in Tables 2 and 3, in the case of a jig made of insulating zirconia and alumina, the surface resistance and the ground leakage resistance of the jig in a state where the surfactant is attached. Is 1 × 10 ⁶ (Ω / square) or more and 1
It is within the range of less than × 10 ¹² (Ω / square). It can also be seen that the friction band voltage has a relatively low value.

On the other hand, the surface resistance and the ground leakage resistance of the jig after removing the surfactant by IPA were 1 × 1.
0 ¹² (Ω / square), indicating that the frictional band voltage is also higher than before the IPA cleaning. That is, for example, when the jig 15 shown in FIG. 3 is formed of an insulator such as insulating zirconia and alumina, the surface resistance of the jig 15 can be obtained by attaching a surfactant to the jig 15. To 1 × 10 ⁶ (Ω / s
(quare) or more and less than 1 × 10 ¹² (Ω / square).

[0067]

As described above in detail, according to the present invention, when a slider having a thin film element is formed in a predetermined shape, the surface resistance of a jig for holding the slider is set to 1 × 10 ^6.
(Ω / square) or more and 1 × 10 ¹² (Ω / square)
e), the electrostatic polarization is hardly generated in the metal layer in the thin film element.
Discharge between the metal layers and destruction of the magnetoresistive element layer due to excessive current can be prevented.

In the present invention, the jig is formed of, for example, conductive ceramics or conductive plastic.

Further, according to the present invention, a surface active agent or moisture is attached to the surface of an insulator conventionally used as a jig to reduce the surface resistance of the jig to 1 × 10 ⁶ (Ω / square).
e) It is also possible to set it within the range of not less than 1 × 10 ¹² (Ω / square).

[Brief description of the drawings]

FIG. 1 is a perspective view showing a slider of the present invention mounted on a hard disk or the like with a surface facing a recording medium (ABS surface; floating surface) facing upward;

FIG. 2 is a sectional view showing the structure of a recording MR head.

FIG. 3 is a perspective view showing a structure of a jig for holding a slider bar as one embodiment;

FIG. 4 is a plan view showing a joint state between the jig and the slider bar shown in FIG. 3;

FIG. 5 is a schematic diagram showing a distribution of charges of a metal layer in the thin film element when a slider having a thin film element and an insulator jig are joined;

FIG. 6 is a schematic diagram showing a distribution of electric charge between a metal layer and an insulating layer in the thin film element when a slider having a thin film element and a conductor jig are joined;

FIG. 7 is a perspective view showing a state in which a slider bar is joined to a conventional jig;

8 is a plan view of FIG. 7,

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Lower shield layer 2 Magnetoresistive element layer 3 Hard bias layer 4 Conductive layer 5 Upper shield layer 6 Lower gap layer 7 Upper gap layer 8 Slider 9 Air groove 10 Rail part 11 Opposing surface (ABS surface; air bearing surface) 12 Slope 13 Thin film element 14 Slider bar 15 Jig 16 Step 17 Groove 18 Joining surface

Claims (7)

[Claims] 1. A jig used for forming a slider having a thin film element for recording / reproducing into a predetermined shape, wherein the jig has a surface resistance of 1 × 10 ⁶ (Ω / square).
j) A jig for manufacturing a slider, wherein the jig is in a range of at least re) and less than 1 × 10 ¹² (Ω / square). 2. The slider manufacturing jig according to claim 1, wherein said jig is formed of semiconductive ceramics. 3. The slider manufacturing jig according to claim 1, wherein said jig is formed of semiconductive plastic. 4. The jig for manufacturing a slider according to claim 1, wherein the jig is formed by attaching a surfactant to a surface of an insulator. 5. The slider manufacturing jig according to claim 1, wherein said jig is formed by attaching moisture to a surface of an insulator. 6. The slider manufacturing jig according to claim 1, wherein the jig is for holding the slider bar when the slider bar is cut into individual sliders. Utensils. 7. The slider manufacturing jig according to claim 1, wherein the jig is for holding the slider when forming a floating surface on the slider surface.