JPH11242345A - パターン形成方法 - Google Patents

パターン形成方法

Info

Publication number
JPH11242345A
JPH11242345A JP10043107A JP4310798A JPH11242345A JP H11242345 A JPH11242345 A JP H11242345A JP 10043107 A JP10043107 A JP 10043107A JP 4310798 A JP4310798 A JP 4310798A JP H11242345 A JPH11242345 A JP H11242345A
Authority
JP
Japan
Prior art keywords
resist film
resist
acid
pattern
polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10043107A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11242345A5 (enrdf_load_stackoverflow
Inventor
Masataka Endo
政孝 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10043107A priority Critical patent/JPH11242345A/ja
Priority to US09/212,412 priority patent/US6331378B1/en
Publication of JPH11242345A publication Critical patent/JPH11242345A/ja
Publication of JPH11242345A5 publication Critical patent/JPH11242345A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP10043107A 1998-02-25 1998-02-25 パターン形成方法 Pending JPH11242345A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10043107A JPH11242345A (ja) 1998-02-25 1998-02-25 パターン形成方法
US09/212,412 US6331378B1 (en) 1998-02-25 1998-12-16 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10043107A JPH11242345A (ja) 1998-02-25 1998-02-25 パターン形成方法

Publications (2)

Publication Number Publication Date
JPH11242345A true JPH11242345A (ja) 1999-09-07
JPH11242345A5 JPH11242345A5 (enrdf_load_stackoverflow) 2004-07-08

Family

ID=12654622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10043107A Pending JPH11242345A (ja) 1998-02-25 1998-02-25 パターン形成方法

Country Status (1)

Country Link
JP (1) JPH11242345A (enrdf_load_stackoverflow)

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