JPH11241489A - Vibrationproof frame for clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simple vibrationproof frame, in which a place can be changed easily in response to even the alteration of machine kinds and the reconsideration of a site planning, which can be removed and exchanged simply even at the time, etc. of the generation of trouble and in which the amplification of vibrations can be inhibited without the generation of dust and works, etc., in which water is used, averted in a clean room, in the vibrationproof frame adapted to the module size of floor structure. SOLUTION: A ruler table 3 is stuck onto the top face of a frame body 2 adapted to the module size of a floor and a back plate 4 onto an underside respectively, a vibration-damping material 5 is annexed onto the internal surface of the ruler table 3 and a vibrationproof frame body 1 is formed, and a proper number of leveling devices 6 and clamping devices 7 are arranged at the edge section or corner section of the vibrationproof frame body 1. Vibration-damping gel mainly comprising a urethane resin is used as the vibration-damping material 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration isolator for a clean room.

[0002]

2. Description of the Related Art Generally, a free-access floor (grating floor) is often used as a floor of a clean room in order to secure cleanliness and a space for installing piping. When this free access floor is viewed from the viewpoint of vibration, there is a disadvantage that the vibration becomes large even when a person walks around the periphery because the floor is lightweight. On the other hand, in a clean room, it is necessary to dispose a number of various precision devices that dislike micro vibration. In general, if the arrangement of such precision equipment that dislikes microvibration is known from the design stage of a building (clean room), a concrete machine foundation is to be constructed at each location instead of free access. However, in semiconductor-related factories, etc., in several years, about half a year, model changes and layout plans have been reviewed.
During the operation, the work of changing the layout plan is performed, and therefore, a concrete machine base that requires a large-scale remodeling work each time is not suitable. However, this steel frame base may amplify vibration with an iron plate depending on precision equipment, and may rather cause vibration disturbance.

[0003]

By the way, most clean room buildings at present have an air circulation system in which the second floor is a high-grade clean room for the purpose of ensuring cleanliness and the first floor is a urethane chamber. Things. Therefore, the floor structure of the second floor is a structure of only girders and small beams, there is no floor slab, and the air blown out from the ceiling of the second floor passes through the opening of the floor structure on the second floor and is sucked into the retane chamber on the first floor . In such a floor structure, joists are usually run on girders and small beams at a pitch of 600 mm, and free access floors are laid on the joists. Therefore, the present invention relates to a vibration-isolation gantry adapted to the module dimensions of such a floor structure, which can be easily repositioned in accordance with the change of the model or the review of the arrangement plan, and the occurrence of troubles. It is intended to provide a simple anti-vibration gantry that can be easily removed and replaced in the event of a vibration, etc., and can suppress vibration amplification without the generation of dislikes or use of water in a clean room. is there.

[0004]

In order to achieve the above object, the invention according to claim 1 provides a frame 2 adapted to the size of a floor module.
The base plate 3 is adhered to the upper surface of the base plate, and the back plate 4 is adhered to the lower surface, and the vibration damping member 5 is attached to the inner surface of the base plate 3 to form the vibration-isolated gantry body 1. An appropriate number of level adjusting devices 6 and fastening devices 7 are provided at the edges or corners of the.

According to a second aspect of the present invention, there is provided the anti-vibration gantry for a clean room according to the first aspect, wherein the vibration damping material 5 is made of a damping gel mainly composed of urethane resin.

[0006] The invention of claim 3 is claim 1 or claim 2.
In the anti-vibration gantry for a clean room, the level adjusting device 6 is provided with a screw cylinder 8 having an internal thread that is opened up and down at an important part of an edge or a corner of the anti-vibration gantry main body 1, The lower end of the level adjusting bolt 9 is screwed into the screw cylinder to project the lower end thereof, and the lock nut 10 is screwed to the lower end of the level adjusting bolt 9. A screw hole 11 is formed, and a fastening bolt 12 is screwed into the screw hole from below.

[0007] The invention of claim 4 is the invention of claim 1 or claim 2.
In the anti-vibration gantry for a clean room of the present invention, the anti-vibration gantry for a clean room according to claim 1 or claim 2 is provided. And a screw nut 8 having an internal thread is provided, and a level adjusting bolt 9 is screwed into the screw cylinder to project a lower end portion, and a lock nut is attached to the lower end portion.
A screw hole 14 is formed in the back plate 4 in the vicinity of the level adjusting device 6 for the fastening device 7, and a clamp 13 is provided below the level adjusting device 6.
And the fastening metal is fastened by mounting bolts 15 screwed into the screw holes 14 thereof.

[0008] The invention of claim 5 is based on claim 1, claim 2,
The clean room vibration isolator according to claim 3 or 4, wherein a hanging means is provided at an appropriate position of the surface plate 3.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. FIGS.
The first embodiment of the anti-vibration gantry for a clean room according to the invention of claims 3 to 5 is shown.

FIG. 1 is an explanatory view of a floor of a clean room. As in the prior art, joists C (see FIG. 2) of H-section steel or channel steel are flowed at a pitch of 600 mm on girders and small beams, and free beams are laid thereon. An access floor (grating) B is laid out, and an appropriate number of anti-vibration racks A adapted to the module size are arranged in place of the free access floor B so as to be detachable, repositionable, and exchangeable. It is also possible to process an integral multiple of 600 mm, such as 600 mm × 1,200 mm.

[0011] The vibration isolation gantry A is made of a steel hollow frame material 18.
And a hollow reinforcing member 19 to form a square frame 2 having a square planar shape adapted to the module size of the floor, a steel platen 3 on the upper surface of the frame, and a steel back plate 4 on the lower surface. Paste each,
A vibration damping material 5 made of a vibration damping gel containing urethane resin as a main component is attached to the inner surface of the surface plate 3 to form a vibration-isolation gantry main body 1.
Three level adjustment devices 6 and three fastening devices 7 are provided at the left and right edges of the main body of the anti-vibration gantry, respectively, at the corners and intermediate portions.

The vibration damping material 5 is a vibration damping gel containing a urethane resin as a main component. For example, all of the following main agent and curing agent are mixed and injected into the vibration isolator main body 1, and 3 and gelled. The injection method is appropriate, but, for example, the surface plate 3 may be attached to the frame body 2 and then inverted and injected, gelled, and then the back plate 4 may be attached. Alternatively, a back plate 4 having an opening for injection may be adhered, and the injection may be performed through the opening for injection and gelled, and then the opening for injection may be closed with a lid plate or the like. .

[Table 1]

[Table 2]

The level adjusting device 6 is opened vertically at each of three corners and intermediate portions of both edges of the vibration-isolation gantry body 1 and vertically penetrated through the hollow frame member 18 so as to have a lower inner peripheral portion. Is provided with a steel screw tube 8 having an internal thread by welding, a steel level adjusting bolt 9 is screwed into the screw tube from above to project only the lower end portion, and a lock nut is attached to the lower end portion. The level is adjusted by screwing the level adjustment bolt 9 and then the lock nut 10 is tightened to set the level. A stainless steel cover plate 21 is detachably fitted to the upper opening, that is, the opening 20 formed in the base plate 3.

The fastening device 7 is provided with a screw hole 11 which opens downward at the lower end of the level adjusting bolt 9, and a fastening bolt 12 is screwed into the screw hole from below.

The anti-vibration gantry body 1 is provided with hanging holes 16 near the four corners of the surface plate 3 as hanging means, and a hanging hardware 17 is detachably screwed into the screw holes. I have. The hanging metal may be an eyebolt.

[0016] The anti-vibration gantry A is 600 mm
On a clean room floor (Fig. 1) in which free access floors B are laid on joists C (Fig. 2) of H-section steels arranged at a pitch, detachable and repositioning are performed in place of important free access floors B. , Arrange freely. At the time of attaching / detaching, repositioning, or replacing the anti-vibration gantry A, a hanging hardware 17 is screwed into the screw hole 16 of the surface plate 3 to be lifted and lowered. Joist C
The anti-vibration pedestal A placed on the upper surface of the base plate abuts the lower end of the level adjustment bolt 9 on the upper surface of the upper flange of the joist C in each level adjustment device 6, removes the lid plate 21 from the opening 20 of the surface plate 3, The level of each part of the anti-vibration gantry is adjusted by screwing the level adjustment bolt 9, and the level is set by tightening the lock nut 10. Thereafter, the cover plate 21 is fitted again into the opening 20 of the surface plate 3 and the opening 20 is closed. In addition, through holes are formed in the upper flange of the joist C in advance so as to pass the fastening bolts 12 in correspondence with the lower ends of the respective level adjusting bolts 9, and in each fastening device 7, the through holes are fastened from below. The bolt 12 is screwed into the screw hole 11 at the lower end of each level adjustment bolt, and the vibration isolator A is attached to the joist C and fixed. Then, the hanging hardware 17 is screwed out of the screw hole 16 of the surface plate 3. Note that when detaching, the reverse procedure may be performed.

In this manner, the vibration sensor is placed on the vibration-isolation gantry A fixed on the joist C and the free-access floor B.
The vibration environment during human walking was measured and compared. At this time, the anti-vibration pedestal A had a square shape with a width of 600 mm and a thickness of 218 mm.
(The thickness of the base plate and the back plate is 9mm each), the height including the level adjustment bolts is 250mm (+ 20mm, -10mm), the vertical cross section of the frame material is 100mm x 100
mm (plate thickness: 4.5 mm), the diameter of the level adjustment bolt was 30 mm, the diameter of the fastening bolt was 12 mm, the thickness of the vibration damping material was 70 mm inside and outside, and the free access floor B was adapted to this. The vibration measurement results are shown in FIGS. According to this, when walking alone, the free access floor B (FIG. 8)
It can be seen that the vibration acceleration level of 0.4 to 0.6 gal is reduced to about 0.1 to 0.2 gal in the anti-vibration gantry A (FIG. 7).

The vibration environment was measured and compared in the same manner when a truck was run. 9 and 10 show the results of the vibration measurement. According to this, the vibration acceleration level of 1 to 2 gal on the free access floor B (FIG. 10) during traveling of the bogie, and 1 gal on the anti-vibration gantry A (FIG. 9).
It can be seen that it has been reduced to the extent.

Further, the damping characteristics of impact vibration were measured and compared. 11 and 12 show free damping waveforms when an impact vibration is applied. According to this, on the normal free access floor B (FIG. 12), the vibration continues for 0.2 seconds or more after the impact is applied, whereas the vibration-isolation base A (FIG. 11)
Shows that the vibration disappears after 0.04 seconds.

FIG. 6 shows an embodiment 2 of a vibration isolator for a clean room according to the invention of claim 4 (including claims 1, 2 and 5).

In this case, only the fastening device 7 is different in the vibration isolator A of FIGS. 1 to 5 according to the first embodiment. That is, in the above-mentioned anti-vibration gantry A, as the fastening device 7, a screw hole 14 is formed in the back plate 4 in the vicinity of the level adjusting device 6, and the fixing device 7 is pinched below the level adjusting device 6. A metal fitting 13 is arranged, and the clamped metal is fastened by a mounting bolt 15 screwed into its screw hole 14, and the lower end of the level adjustment bolt 9 and the clamped metal 13 are fixed.
And the upper surface of the joist C is clamped from above and below to the upper flange of the joist C.

More specifically, the clamp 13 has a mounting hole at its base.
22 is drilled, and the mounting bolt 15 is inserted through the mounting hole to fasten and fix it at the base, and a screw hole 23 is drilled at the tip corresponding to the level adjustment bolt 9. A pivot bolt 24 is screwed into the screw hole from below and tightened. Therefore, no through hole is required in the upper flange of the joist C, and the fastening bolt 12 passing therethrough is not required.
After fastening, epoxy resin 25 is filled in the gap between the lower surface of the edge of the back plate 4 of the vibration-isolation pedestal main body 1, the upper surface of the upper flange of the joist C, and the upper surface of the base end of the clamp metal 13, and The mount A is fixed and the gap is sealed.

[0023]

According to the first, second, third, fourth and fifth aspects of the present invention, the platen 3 is provided on the upper surface of the frame 2 which is adapted to the module size of the floor. A back plate 4 is adhered to the lower surface, and a vibration damping material 5 is attached to the inner surface of the surface plate 3 to form the vibration isolator main body 1. Level adjustment device 6 and fastening device 7
Because it is deployed, it can be used conveniently for installation of various precision equipment that dislikes micro vibrations arranged in the clean room,
The vibration generated by the precision instrument and the vibration applied from the outside can be absorbed by the vibration damping material 5 to attenuate it accurately and promptly, so that the vibration amplification can be performed without generating unpleasant dust in a clean room or using water. Can be suppressed and can be formed simply. In addition, since the anti-vibration gantry A is adapted to the module dimensions of the floor structure, it can be used arbitrarily in place of the free access floor B at a key point, and it is necessary to change the model of various precision instruments to be arranged and to check the arrangement plan. In this way, the position can be easily changed corresponding to this, and it can be easily removed and replaced when trouble occurs.

According to the second aspect of the present invention, since the damping gel mainly composed of urethane resin is used as the damping material 5 attached to the inner surface of the surface plate 3, the vibration of the surface plate 3 can be rapidly reduced to minute vibration. In addition, it is possible to sufficiently absorb and attenuate, and it is possible to secure an extremely favorable environment close to non-vibration for various precision instruments to be installed.

According to the third aspect of the present invention, the level adjusting device 6 is provided with an internally threaded screw cylinder 8 which is vertically opened at key points at the edges or corners of the vibration isolator main body 1. A level adjusting bolt 9 is screwed into the screw cylinder to project the lower end, and a lock nut 10 is screwed to the lower end,
Further, in the fastening device 7, a screw hole 11 that opens downward is provided at the lower end of the level adjusting bolt 9, and the fastening bolt 12 is screwed into the screw hole from below. For example, with respect to the fastening device 7, a screw hole 14 is formed in the back plate 4 near the level adjusting device 6, and a clamp 13 is arranged below the level adjusting device 6, so that the clamp is attached. Since it is fastened by the mounting bolt 15 screwed into the screw hole 14, the vibration isolator A mounted on the upper flange of the joist C made of H-section steel is level-adjusted by the level adjuster 6. The level can be adjusted very easily by screwing of the bolt 9, the posture after the adjustment can be secured by the lock nut 10, and the fastening bolt 12 is tightened or pinched to the upper flange of the joist C in the fastening device 7. Hardware 13
Can be attached and fixed very easily, and can be removed very easily. Of course,
In either case, the structure and production are simple and inexpensive.

According to the fifth aspect of the present invention, since the hanging means is provided at an appropriate position on the surface plate 3, the anti-vibration gantry A can be easily lifted using the hang means, and the anti-vibration gantry A can be easily mounted. It can be attached and detached and replaced.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a floor of a clean room.

FIG. 2 is a plan view showing a first embodiment of the invention according to claims 1 to 3 and 5;

FIG. 3 is a side view in the embodiment.

FIG. 4 is an enlarged sectional view of a main part in the embodiment.

FIG. 5 is an enlarged side view of a main part member in the embodiment.

FIG. 6 (Claim 1, Claim 2 and Claim 5)
FIG. 8 is an enlarged sectional view of a main part showing Embodiment 2 of the present invention (including (2)).

FIG. 7 is a graph showing “frequency characteristics of a vibration-isolation gantry when walking alone” according to the first embodiment of the present invention.

FIG. 8 is a graph showing “frequency characteristics of free access when walking alone”.

FIG. 9 is a graph showing “frequency characteristics of a vibration isolating gantry during traveling of a bogie” for the first embodiment according to the first to third and third and fifth aspects of the present invention.

FIG. 10 is a graph showing “frequency characteristics of free access during traveling of a bogie”.

FIG. 11 is a graph showing “free-damping waveforms when shock is applied to the vibration-isolation gantry” according to the first embodiment of the inventions of claims 1 to 3 and 5;

FIG. 12 is a graph showing a “free-damping waveform during free-access shock excitation”.

[Explanation of symbols]

A: anti-vibration pedestal B: free access floor C: joist 1 ... anti-vibration pedestal main body 2 ... frame body 3 ... surface plate 4 ... back plate 5 ... vibration damping material 6 ... level adjusting device 7 ... fastening device 8 ... screw tube 9 ... Level adjustment bolt 10 ... Lock nut 11 ... Screw hole 12 ... Tightening bolt 13 ... Holding hardware 14 ... Screw hole 15 ... Mounting bolt 16 ... Screw hole 17 ... Hanging hardware 18 ... Hollow frame material 19 ... Hollow reinforcing material 20 ... Opening Part 21: lid plate 22 ... mounting hole 23 ... screw hole 24 ... pivot bolt 25 ... epoxy resin

Claims (5)

[Claims] 1. A platen 3 is adhered to an upper surface of a frame 2 adapted to a module size of a floor, and a back plate 4 is adhered to a lower surface, and a vibration damping material 5 is attached to an inner surface of the platen 3. A vibration isolator mount for a clean room, wherein the vibration isolator mount main body 1 is formed by means of the vibration isolator mount main body 1 and an appropriate number of level adjusting devices 6 and fastening devices 7 are arranged at the edges or corners of the vibration isolator mount main body. 2. A clean room vibration isolator according to claim 1, wherein said vibration damping material is a vibration damping gel mainly composed of urethane resin. 3. The level adjusting device 6 is provided with an internally threaded screw tube 8 which is vertically opened at key points on the edge or corner of the vibration isolation gantry main body 1, and the level is inserted into the screw tube. Screw the adjustment bolt 9 to project the lower end,
A lock nut 10 is screwed into the lower end, and a screw hole 11 that opens downward at the lower end of the level adjustment bolt 9 is provided for the fastening device 7, and a fastening bolt 12 is screwed into the screw hole from below. The anti-vibration gantry for a clean room according to claim 1 or 2, which is combined. 4. The level adjusting device 6 is provided with an internally threaded screw tube 8 which is opened up and down at key points at the edges or corners of the anti-vibration pedestal main body 1, and has a level in the screw tube. Screw the adjustment bolt 9 to project the lower end,
A lock nut 10 is screwed into the lower end, and a screw hole 14 is formed in the back plate 4 in the vicinity of the level adjusting device 6 for the fastening device 7. 3. The anti-vibration gantry for a clean room according to claim 1 or 2, wherein a clamp 13 is disposed on the base, and the clamp is fastened by a mounting bolt 15 screwed into the screw hole 14. 5. The anti-vibration gantry for a clean room according to claim 1, wherein a hanging means is provided at an appropriate position of the surface plate 3.