JPH11237499A - Electron beam generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain stable beam output by minimizing the number of electron guns that will stop in the event of the failure of them. SOLUTION: This device is equipped with a high voltage direct-current power source 1, an alternating current breaker 8, electron guns, isolators 31 to 35, and sensors 41 to 45 and a controller 5. An alternating-current voltage is inputted into the power source 1, from which a direct-current voltage is outputted. The alternating current breaker is placed on the input side of the power source 1. The electron guns are connected parallel on the output terminal side of the high-voltage direct current power source 1. The isolators 31 to 35 are placed on the input side of the electron guns respectively. Each of the sensors 41 to 45 is provided in accordance with each of the electron guns and detects an electric current that flows in the electron guns through the isolators 31 to 35. The controller 5, where a detection signal is inputted from each of the sensors, determines whether trouble occurs in the device if a detection signal exceeds a set value of a current that runs in the electron guns and gives a trip command to the alternating current breaker. Thereafter, the controller 5 gives an open command to an isolator in correspondence with a troubled electron gun and then gives an input command to the alternating current breaker 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an electron beam generator for generating an electron beam from a plurality of electron guns connected in parallel to one high-voltage DC power supply.

[0002]

2. Description of the Related Art Generally, in an electron beam generator,
By applying a negative DC high voltage from a high-voltage DC power supply to the electron gun section, electrons generated by the electron gun are accelerated and are extracted as a beam.

In this case, since the maximum capacity of the electron gun is limited, a method of connecting two electron guns to one high-voltage DC power supply has been adopted. Further, when it is necessary to obtain a large beam output, a plurality of the electron beam generators described above are provided.

[0004]

When a plurality of electron beam generators are installed as described above, the installation space becomes large. Therefore, a plurality of electron guns are connected to one large-capacity high-voltage DC power supply. In this configuration, the apparatus is made compact.

FIG. 7 is a circuit diagram showing an example of such a conventional electron beam generator. In FIG. 7, reference numeral 1 denotes a high-voltage DC power supply, which is connected to an AC power supply (not shown) via a circuit breaker 3 and converts AC into DC. Guns 21 and 22 are connected in parallel.

However, in the electron beam generator having such a configuration, since two electron guns 21 and 22 are connected in parallel to the high voltage output terminal 4, any one of the electron guns is grounded. When a failure such as occurs, all of the current flows to the failed part, so that the high-voltage DC power supply must be stopped.

On the other hand, in order to make the entire apparatus compact,
It is preferable to increase the number (N) of electron guns connected in parallel to one high-voltage DC power supply 1, but the larger N is, the higher the failure occurrence rate of the electron gun part and the higher the failure rate at the time of failure occurrence There is a problem that the number of missing electron guns increases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide an electron beam generator capable of stably obtaining a high-power electron beam by making the entire apparatus compact.

[0009]

According to the present invention, in order to achieve the above object, an electron beam generator is constituted by the following means. According to a first aspect of the present invention, there is provided an electron beam generating apparatus for connecting an electron gun to an output terminal of a high-voltage DC power supply for generating a DC voltage from an AC voltage, and accelerating electrons generated from the electron gun to extract an electron beam. In the above, a plurality of electron guns connected to the output terminal of the high-voltage DC power supply are provided in parallel and can be separated from each other, and if the current flowing through each of these electron guns exceeds a predetermined value, it is determined that a failure has occurred and The high-voltage DC power supply.

According to a second aspect of the present invention, there is provided a high-voltage DC power supply for generating a DC voltage by inputting an AC voltage, an AC circuit breaker provided on an input side of the high-voltage DC power supply, Each is connected in parallel to the output terminal of the power supply,
A plurality of electron guns for accelerating electrons generated by application of a high voltage and extracting them as electron beams, opening / closing means respectively provided on the input side corresponding to each of the electron guns, and corresponding to each of the electron guns A sensor for detecting a current flowing to the electron gun through the opening / closing means, and a detection signal input from each of the sensors. If the detection signal exceeds a set value of the current flowing to the electron gun, it is determined to be faulty and Control means for giving a trip command to the AC circuit breaker, then giving an opening command to the opening / closing means corresponding to the failed electron gun, and then giving a closing command to the AC circuit breaker.

According to a third aspect of the present invention, in the electron beam generator according to the first or second aspect of the present invention, the electron gun is opened to the output terminal side of the high-voltage DC power supply during maintenance and inspection of the electron gun. Switch.

According to a fourth aspect of the present invention, in the electron beam generator according to the first or second aspect, the electron gun is opened to the output terminal side of the high-voltage DC power supply during maintenance and inspection of the electron gun. And a switch for grounding the output terminal side.

Therefore, in the electron beam generator according to the present invention, when a failure occurs in the electron gun, the circuit breaker on the AC side is opened once and the failure occurs. After disconnecting only the electron gun instantaneously, the circuit breaker is turned on again to enable operation with only the remaining electron guns, so that a high-power beam can be obtained stably and the current is cut off on the AC side. Therefore, it is not necessary to provide a large-scale DC circuit breaker on the DC side, and the number of opening / closing means may be provided in correspondence with the number of electron guns.

Further, in the invention corresponding to the third and fourth aspects, when the switch is opened at the time of maintenance and inspection of the electron gun, the capacitor existing inside the high-voltage DC power supply is charged. However, the maintenance and inspection of the electron gun can be performed safely.

According to a fifth aspect of the present invention, an electron gun having a control drive circuit is connected to an output terminal of a high-voltage DC power supply for generating a DC voltage from an AC voltage, and the AC voltage is insulated from the control drive circuit. In an electron beam generator that accelerates electrons generated from the electron gun and extracts it as an electron beam by applying the voltage through a transformer, a plurality of electron guns connected to the output terminal of the high-voltage DC power supply are arranged in parallel. And the control drive circuit of each electron gun can be separated from the insulating transformer. When the current flowing through each of these electron guns exceeds a predetermined value, it is determined that a failure has occurred and the corresponding electron gun is damaged. Are separated from the high-voltage DC power supply, and the control drive circuit is separated from the insulating transformer.

According to a sixth aspect of the present invention, there is provided a high-voltage DC power supply for generating a DC voltage by inputting an AC voltage, a first AC circuit breaker provided on an input side of the high-voltage DC power supply, An electron gun having a plurality of control drive circuits connected in parallel to output terminals of a high-voltage DC power supply and accelerating electrons generated by application of a high voltage and extracting the electrons as an electron beam; An insulating transformer having a DC insulation capacity capable of withstanding a voltage, and one end of a secondary terminal connected to an output terminal of the high-voltage DC power supply, and the other end connected to a control drive circuit of each electron gun; A second AC circuit breaker provided on a primary side of the insulating transformer, first and second opening / closing means provided on an input side corresponding to each of the electron guns and the control drive circuit, and Each corresponding to each electron gun And a sensor for detecting a current flowing to the electron gun through the first opening / closing means, and a detection signal input from each of these sensors. If the detection signal exceeds a set value of the current flowing to the electron gun, it is determined that a failure has occurred. The first
After giving a trip command to the AC circuit breaker, a trip command is given to the second circuit breaker, and then an opening command is given to first and second opening / closing means corresponding to the failed electron gun,
Then, a control means for giving an input command to the first and second AC circuit breakers is provided.

According to a seventh aspect of the present invention, in the electron beam generator according to the fifth or sixth aspect of the present invention, the output terminal side of the high-voltage DC power supply and the secondary side of the insulating transformer are provided. Each switch is opened when the electron gun is maintained or inspected.

According to an eighth aspect of the present invention, in the electron beam generator according to the fifth or sixth aspect, the output terminal side of the high-voltage DC power supply and the secondary side of the insulating transformer are connected to each other. Switches provided to be opened during maintenance and inspection of the electron gun are provided, and switches for grounding the output terminal side of the high-voltage DC power supply and the secondary side of the insulating transformer are provided.

Therefore, in the electron beam generator according to the present invention, when a failure occurs in the electron gun, only the failed electron gun is supplied from the high-voltage DC power supply. At the same time as disconnecting the control drive circuit from the isolation transformer, it was made possible to operate only with the remaining electron gun, so that a high-power beam could be obtained stably and the current was cut off on the AC side. It is not necessary to provide a large-scale DC circuit breaker on the DC side, and it is sufficient to provide as many opening and closing means as the number corresponding to the electron gun, so that the entire apparatus can be made inexpensive and compact.

Further, in the invention corresponding to the seventh and eighth aspects, the switch existing in the high-voltage DC power supply is charged by opening the switch at the time of maintenance and inspection of the electron gun. However, the maintenance and inspection of the electron gun can be performed safely.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a circuit diagram showing a first embodiment of an electron beam generator according to the present invention, and the same parts as those in FIG. 7 are denoted by the same reference numerals.

In FIG. 1, reference numeral 1 denotes a high-voltage DC power supply for converting an AC voltage input from an AC power supply through a circuit breaker 3 to a DC voltage. Bus 2 with branches (N = 5 is shown)
Is connected.

Electron guns 21 to 25 are respectively connected to the branch points of the bus 2 via sensors 41 to 45 for detecting current and disconnectors 31 to 35 in series. On the other hand, 5 is a control device to which a detection signal of a current flowing to the electron guns 21 to 25 from the branch point detected by each of the sensors 41 to 45 is input. When it is determined that a failure has occurred in any of the electron guns, a trip command is given to the circuit breaker 3 and, after a short time has passed, an open command is given to the disconnector corresponding to the failed electron gun, and then the circuit breaker 3 is again contacted. This is to give an injection command.

In this case, the control device 5 includes sensors 41 to 45
The change in the current flowing through the electron guns 21 to 25 detected by the above is monitored, and the presence or absence of a failure is determined based on whether or not the value of the current flowing through the electron gun exceeds a preset value. Here, the current setting value serving as a criterion is a constant value obtained by multiplying the rated current value of the electron gun by the tolerance sf (sf ≧ 1) or the normally set operation current value by the tolerance sf (sf ≧ 1). Is set in advance to a constant value multiplied by.

In the electron beam generator having such a configuration, the disconnectors 31 to 35 are normally closed, all N electron guns 21 to 25 are connected to the bus 2, and the electron beam is applied by applying a high DC voltage. Has occurred.

In such a state, for example, the electron gun 2
When a failure occurs in the electron gun 1 and a failure of the electron gun 21 is detected from a change in a current flowing through the electron gun 21 based on a detection signal input to the control device 5 from the sensor 41, a trip command is given to the circuit breaker 3 and a minute Later, an open command is given to the disconnector 31 to disconnect the electron gun 21 from the bus 2. Thereafter, a closing command is given to the circuit breaker 3.

When a failure occurs in the electron gun as described above, the circuit breaker 3 on the AC side is once opened to instantaneously disconnect only the failed electron gun, and then the circuit breaker is turned on again to supply the remaining electrons. Because it can be operated only with a gun, a high output beam can be obtained stably, and the current is cut off on the AC side, so instead of a large DC breaker on the DC side,
Since it is sufficient to install the disconnectors for the number of branches, the entire apparatus can be made inexpensive and compact.

FIG. 2 is a circuit diagram showing a second embodiment of the electron beam generator according to the present invention. The same parts as those in FIG. 1 are denoted by the same reference numerals, and their description is omitted. Is described.

In the electron beam generator shown in FIG. 2, each of the electron guns 21 to 25 is provided with an individual control drive circuit 51 to 55 for controlling a current and the like. Since it is disposed in the high potential portion of the guns 21 to 25, it is necessary to supply power via the transformer 6 having DC insulation capability.

Therefore, in the second embodiment, the primary side of the insulating transformer 6 is connected to the AC power supply via the circuit breaker 8, and one end A of the secondary side is connected to the output terminal 4 of the high-voltage DC power supply 1. The other end B is connected to a bus 7 having N branch points. Then, one end C of the individual control drive circuits 51 to 55 is connected to the electron guns 21 to 25, and the other end D is connected to the bus 7 via disconnectors 61 to 65.

In the electron beam generator having such a configuration, all the disconnectors 31 to 35 and 61 to 65 are normally closed, and all N electron guns 21 to 25 and the individual control drive circuit 5 are connected.
1 to 55 are connected to the buses 2 and 7, and generate an electron beam by applying a high DC voltage.

In such a state, for example, the electron gun 2
1 and a detection signal is input from the sensor 41 to the control device 5, the control device 5 determines from the change in the current flowing through the electron gun 21 that the electron gun 21 has a failure, 3, a trip command is given to make the output of the high-voltage DC power supply 1 zero, and then a trip command is given also to the circuit breaker 8 on the input side of the transformer 6 to make the current of the individual drive circuit zero.

Subsequently, the control device 5 gives a disconnection command to the disconnecting switches 31, 61 corresponding to the failed electron gun 21 to disconnect the electron gun 21 and its individual control drive circuit 51 from the buses 2, 7.

After that, the control device 5 gives an input command to the circuit breaker 8 on the input side of the transformer 6 to operate the individual control drive circuit 51, and then gives an input command for the circuit breaker 3 to supply the high voltage DC power supply 1. Restart operation.

In this case, the control device 5 controls the electron gun 21 detected by the sensors 41 to 45 similarly to the first embodiment.
The change in the current flowing through the electron gun is monitored, and the presence or absence of a failure is determined based on whether or not the value of the current flowing through the electron gun exceeds a preset value. Here, as the current set value serving as a criterion, the tolerance sf (sf ≧
A method of presetting a constant value multiplied by 1) or a constant value obtained by multiplying a normally set operating current value by a margin sf (sf ≧ 1), and an actual value at that time commanded to the individual control drive circuit There is a method of multiplying the current command value by a certain margin and changing the value with time.

Also in the electron beam generator having such a configuration, when a failure occurs in the electron gun, the circuit breaker 3 on the AC side is opened once, and then the circuit breaker 8 on the input side of the transformer 6 is opened. After the current of the individual control drive circuit is reduced to zero and only the failed electron gun is instantaneously disconnected, a turn-on command is given to the circuit breaker 8 on the input side of the transformer 6 to operate the individual control drive circuit 51. Then, by giving a turn-on command to the circuit breaker 3 and restarting the operation of the high-voltage DC power supply 1, it is possible to operate only with a healthy electron gun. The beam can be obtained stably, and the current is cut off on the AC side. Instead of a large DC breaker on the DC side, it is sufficient to install disconnectors for the number of branches. Can be achieved.

FIG. 3 is a circuit diagram showing a third embodiment of the electron beam generator according to the present invention. The same parts as those in FIG. 1 are denoted by the same reference numerals, and their description is omitted. Is described.

In the third embodiment, the high-voltage DC power supply 1
A switch 9 is provided between the output terminal 4 and the bus 2 of FIG. 1, and the other configuration is the same as that of FIG. With such a configuration, in addition to the same operation and effect as the first embodiment, when maintenance and inspection of the electron gun are performed, the switch 9 is opened so that the inside of the high-voltage DC power supply 1 can be opened. The maintenance and inspection work of the electron gun can be performed safely even when the capacitor existing in the battery is charged.

FIG. 4 is a circuit diagram showing a fourth embodiment of the electron beam generator according to the present invention. The same parts as those in FIG. 2 are denoted by the same reference numerals, and the description thereof will be omitted. Is described.

In the fourth embodiment, the high-voltage DC power supply 1
A switch 9 is provided between the output terminal 4 of the transformer 6 and the bus 2 and a switch 10 is provided between the secondary terminal B of the transformer 6 and the bus 7. Is the same.

With such a configuration, in addition to the same operation and effect as the second embodiment, when maintenance and inspection of the electron gun are performed, the switches 9 and 10 are opened, whereby
As in the third embodiment, the maintenance and inspection of the electron gun can be secured safely even when the capacitor existing inside the high-voltage DC power supply 1 is charged.

FIG. 5 is a circuit diagram showing a fifth embodiment of the electron beam generator according to the present invention. The same parts as those in FIG. 1 are denoted by the same reference numerals, and their description is omitted. Is described.

In the fifth embodiment, the high-voltage DC power supply 1
A switch 9 is provided between the output terminal 4 and the bus 2, and a switch 11 is further provided between the bus 2 and the ground. The other configuration is the same as that of FIG.

With such a configuration, normally, by closing the switch 9 and opening the switch 11, in addition to the same operation and effect as in the first embodiment, the electron gun is inspected or replaced. In this case, by opening the switch 9 and closing the switch 11, the high potential portion is grounded.
You can work safely.

FIG. 6 is a circuit diagram showing a sixth embodiment of the electron beam generator according to the present invention. The same parts as those in FIG. 2 are denoted by the same reference numerals, and their description is omitted. Is described.

In the sixth embodiment, the high-voltage DC power supply 1
A switch 9 is provided between the output terminal 4 and the bus 2 of the transformer 6, a switch 10 is provided between the secondary terminal B of the transformer 6 and the bus 7, and a switch 1 is provided between the bus 2 and the ground.
1 and a switch 12 is also provided between the bus 7 and the ground, and the other configuration is the same as that of FIG.

With such a configuration, normally, by closing the switches 9 and 10 and opening the switches 11 and 12, the same operation and effect as those of the first embodiment can be obtained. , When checking or replacing the electron gun,
By opening the switches 9 and 10 and closing the switches 11 and 12, the high potential portion is grounded, so that the operation can be performed safely.

[0048]

As described above, according to the present invention, a plurality of electron guns can be connected to one large-capacity high-voltage DC power supply, and the number of electron guns that stop even when the electron gun fails can be minimized. Therefore, it is possible to provide a compact electron beam generator capable of obtaining a stable beam output.

[Brief description of the drawings]

FIG. 1 is a circuit diagram showing a first embodiment of an electron beam generator according to the present invention.

FIG. 2 is a circuit diagram showing a second embodiment of the electron beam generator according to the present invention.

FIG. 3 is a circuit diagram showing a third embodiment of the electron beam generator according to the present invention.

FIG. 4 is a circuit diagram showing a fourth embodiment of the electron beam generator according to the present invention.

FIG. 5 is a circuit diagram showing a fifth embodiment of the electron beam generator according to the present invention.

FIG. 6 is a circuit diagram showing a sixth embodiment of the electron beam generator according to the present invention.

FIG. 7 is a circuit diagram showing an example of a conventional electron beam generator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... High voltage DC power supply 2,7 ... Bus 3,8 ... Circuit breaker 4 ... High voltage output terminal 5 ... Control device 6 ... Transformer 9-12 ... Switch 21-25 ... Electron gun 31-35, 61-65 disconnector 41-45 sensor 51-55 individual control drive circuit

Claims (8)

[Claims] 1. An electron beam generator, wherein an electron gun is connected to an output terminal of a high-voltage DC power supply for generating a DC voltage from an AC voltage, and electrons generated by the electron gun are accelerated and extracted as an electron beam. A plurality of electron guns connected to the output terminal of the voltage DC power supply are provided in parallel and detachably provided, and when the current flowing through each of these electron guns exceeds a predetermined value, it is determined that a failure has occurred and the corresponding electron gun is determined. An electron beam generator, wherein the electron beam generator is separated from the high-voltage DC power supply. 2. A high-voltage DC power supply for inputting an AC voltage to generate a DC voltage, an AC circuit breaker provided on an input side of the high-voltage DC power supply, and an output terminal of the high-voltage DC power supply in parallel. A plurality of electron guns connected to each other, for accelerating electrons generated by application of a high voltage, and extracting the electrons as an electron beam; opening / closing means provided on an input side corresponding to each of the electron guns; A sensor is provided corresponding to the gun, and detects a current flowing to the electron gun through the opening / closing means. A detection signal is input from each of the sensors, and if the detection signal exceeds a set value of the current flowing to the electron gun, a failure occurs. Control means for determining and giving a trip command to the AC circuit breaker, then giving an open command to the opening / closing means corresponding to the failed electron gun, and thereafter giving a closing command to the AC circuit breaker; An electron beam generator, comprising: 3. The electron beam generator according to claim 1, wherein a switch that is opened at the time of maintenance and inspection of the electron gun is provided on an output terminal side of the high-voltage DC power supply. Electron beam generator. 4. An electron beam generating apparatus according to claim 1, wherein a switch which is opened at the time of maintenance and inspection of said electron gun is provided on an output terminal side of said high voltage DC power supply, and said output terminal side is connected to said output terminal side. An electron beam generator comprising a switch for grounding. 5. An electron gun provided with a control drive circuit is connected to an output terminal of a high-voltage DC power supply that generates a DC voltage from an AC voltage, and an AC voltage is applied to the control drive circuit via an insulating transformer. Thereby, in the electron beam generator for accelerating the electrons generated from the electron gun and extracting it as an electron beam, a plurality of electron guns connected to the output terminal of the high-voltage DC power supply are provided in parallel and can be separated from each other. The control drive circuit of each electron gun can be separated from the insulating transformer, and when the current flowing through each electron gun exceeds a predetermined value, it is determined that a failure has occurred and the corresponding electron gun is disconnected from the high-voltage DC power supply. An electron beam generator wherein the control drive circuit is separated from the insulating transformer while being separated. 6. A high-voltage DC power supply for generating a DC voltage by inputting an AC voltage, a first AC circuit breaker provided on an input side of the high-voltage DC power supply, and an output terminal of the high-voltage DC power supply. And an electron gun having a plurality of control driving circuits for accelerating electrons generated by application of a high voltage and extracting the electrons as an electron beam, and a DC insulation capacity capable of receiving an AC voltage and withstanding the DC voltage And an insulating transformer having one end of a secondary terminal connected to the output terminal of the high-voltage DC power supply and the other end connected to a control drive circuit of each electron gun, and a primary side of the insulating transformer. A second AC circuit breaker provided on the input side, first and second opening / closing means provided on the input side corresponding to each of the electron guns and the control drive circuit, and corresponding to each of the electron guns. The first opening / closing hand provided respectively. A sensor for detecting a current flowing to the electron gun through the stage, and a detection signal from each of these sensors. When the detection signal exceeds a set value of the current flowing to the electron gun, it is determined that a failure has occurred and the first AC circuit breaker is determined. After giving the trip command, the trip command is given to the second circuit breaker, and then the opening command is given to the first and second opening / closing means corresponding to the failed electron gun. An electron beam generator, comprising: a control unit for giving a closing command to a circuit breaker. 7. The electron beam generator according to claim 5, wherein said electron gun is opened to an output terminal side of said high-voltage DC power supply and a secondary side of said insulating transformer during maintenance and inspection of said electron gun. An electron beam generator comprising a switch. 8. The electron beam generator according to claim 5, wherein the electron gun is opened to an output terminal side of the high-voltage DC power supply and a secondary side of the insulating transformer during maintenance and inspection of the electron gun. An electron beam generator, comprising a switch, and a switch for grounding an output terminal side of the high-voltage DC power supply and a secondary side of the insulating transformer.