JPH1123221A - Position detector - Google Patents

Position detector

Info

Publication number
JPH1123221A
JPH1123221A JP18737597A JP18737597A JPH1123221A JP H1123221 A JPH1123221 A JP H1123221A JP 18737597 A JP18737597 A JP 18737597A JP 18737597 A JP18737597 A JP 18737597A JP H1123221 A JPH1123221 A JP H1123221A
Authority
JP
Japan
Prior art keywords
light
scale plate
light receiving
light beam
fixed scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18737597A
Other languages
Japanese (ja)
Inventor
Shigeo Nakajima
中嶋  茂雄
Junichi Murakami
村上  順一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP18737597A priority Critical patent/JPH1123221A/en
Publication of JPH1123221A publication Critical patent/JPH1123221A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To improve the output signal of a light receiving element by reducing the influence of unnecessary light on the output signal. SOLUTION: A luminous flux from a light emitting element is made incident to a fixed scale plate 13 faced oppositely to a mobile scale plate 12 through the light transmitting sections 12b of the mobile scale plate 12. The luminous flux made incident to the fixed scale plate 13 are split into luminous fluxes in three directions through the inclined surfaces 14a and 14b of V-shaped groove sections and the flat surface sections 15 of the plate 13 and the signal luminous fluxes which are made incident to the inclined surfaces 14a and 14b at angles of about 30 deg. are received by means of light receiving elements 16a and 16b oriented in the direction of the luminous fluxes with high sensitivity and the luminous flux passed through the flat surface section 15 advances straight and is received by means of the elements 15 with half sensitivity.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、V溝を有する光学
素子を使用して位置検出を行う位置検出装置に関するも
のである。
[0001] 1. Field of the Invention [0002] The present invention relates to a position detecting device for performing position detection using an optical element having a V-groove.

【0002】[0002]

【従来の技術】従来、ビデオカメラ等の撮像装置では、
ズームやフォーカスのためにレンズを所定の速度及び位
置精度で動作しなければならない。最近、このためのレ
ンズ駆動制御装置としてリニアモータが用いられるよう
になり、このリニアモータを制御するためにはレンズの
位置を検出する検出装置が必要となる。この位置検出装
置の例としては、位置変化に対して位相のずれた複数の
繰り返し周期波形の信号を発生する光学式エンコーダが
知られており、特開平1−121723号公報に開示さ
れている。
2. Description of the Related Art Conventionally, in an imaging apparatus such as a video camera,
The lens must operate at a given speed and position accuracy for zoom and focus. Recently, a linear motor has been used as a lens drive control device for this purpose, and a control device for detecting the position of the lens is required to control the linear motor. As an example of the position detection device, an optical encoder that generates a plurality of signals having a plurality of repetitive periodic waveforms whose phases are shifted with respect to a position change is known, and is disclosed in Japanese Patent Application Laid-Open No. 1-123723.

【0003】図6は光学式エンコーダの側面図を示し、
発光素子1には集光レンズ2が取り付けられており、集
光レンズ2の下側には、被測定物の例えばレンズ部に取
り付けられた可動スケール板3が配置され、可動スケー
ル板3には斜面から成る光遮光部と平面から成る光透過
部が格子状にピッチPの等間隔で周期的に設けられてい
る。
FIG. 6 shows a side view of an optical encoder.
A condenser lens 2 is attached to the light emitting element 1, and a movable scale plate 3 attached to, for example, a lens portion of the device under test is disposed below the condenser lens 2. A light shielding portion having a slope and a light transmitting portion having a flat surface are periodically provided at regular intervals of a pitch P in a lattice pattern.

【0004】また、可動スケール板3の下側には対向し
て固定スケール板4が配置され、固定スケール板4には
可動スケール板3の格子ピッチPと等しい間隔で共に入
射面となるV型溝部4aと平面部4bが設けられてい
る。また、固定スケール板4の下側には、固定スケール
板4の各領域からの光束を受光する2つの受光素子5
a、5bが、その受光入射を直進方向の光束方向に向け
て配置されている。
[0004] A fixed scale plate 4 is disposed on the lower side of the movable scale plate 3 so as to be opposed to the movable scale plate 3. A groove 4a and a plane portion 4b are provided. Also, below the fixed scale plate 4, two light receiving elements 5 for receiving light beams from each area of the fixed scale plate 4 are provided.
a and 5b are arranged such that the light-receiving and incident light are directed in the light beam direction in the straight traveling direction.

【0005】可動スケール板3の光透過部からの光束
は、図6の状態のときは固定スケール板4のV型溝部4
aで屈折されて、受光素子5a、5bに入射する。一
方、図6とピッチが1/2ずれた図7の状態のときは、
可動スケール板3の光透過部からの光束は、固定スケー
ル板4の平面部4bを直進して受光素子5a、5bに入
射する。
In the state shown in FIG. 6, the light flux from the light transmitting portion of the movable scale plate 3 is
The light is refracted by a and enters the light receiving elements 5a and 5b. On the other hand, in the state of FIG.
The light beam from the light transmitting portion of the movable scale plate 3 travels straight on the flat portion 4b of the fixed scale plate 4 and enters the light receiving elements 5a and 5b.

【0006】[0006]

【発明が解決しようとする課題】しかしながら上述の従
来例においては、固定スケール板4の平面部4bを通過
した光束は、受光素子5a、5bに垂直に入射し、V型
溝部4aの傾斜面を通過した光束に対して有害光とな
り、受光素子5a、5bの出力信号の出力レベルや位相
などに影響を及ぼすという問題がある。
However, in the above-mentioned conventional example, the light beam passing through the flat portion 4b of the fixed scale plate 4 is incident perpendicularly on the light receiving elements 5a and 5b, and the inclined surface of the V-shaped groove portion 4a is formed. There is a problem that harmful light becomes harmful to the transmitted light flux and affects the output level and phase of the output signals of the light receiving elements 5a and 5b.

【0007】本発明の目的は、上述の問題点を解消し、
不要光の影響を少なくして受光素子の出力信号を良好な
ものとする位置検出装置を提供することにある。
An object of the present invention is to solve the above-mentioned problems,
It is an object of the present invention to provide a position detecting device that reduces the influence of unnecessary light and improves the output signal of a light receiving element.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
の本発明に係る位置検出装置は、発光素子からの光束を
V型溝を使用して少なくとも2方向に分割し、該分割し
た光束を受光素子により受光して位置を検出する位置検
出装置において、指向性を有する前記受光素子の感度の
高い方向を前記屈折光束方向に正対させたことを特徴と
する。
A position detecting device according to the present invention for achieving the above object divides a light beam from a light emitting element into at least two directions using a V-shaped groove, and splits the divided light beam. In a position detecting device for detecting a position by receiving light with a light receiving element, a direction in which the light receiving element having directivity has high sensitivity is directly opposed to the refracted light beam direction.

【0009】[0009]

【発明の実施の形態】本発明を図1〜図5に図示の実施
例に基づいて詳細に説明する。図1は実施例の側面図を
示し、発光素子11の下側には、図示しない被測定物の
例えばレンズ部に取り付けられた平行平板状の透明材料
から成る可動スケール板12が配置され、可動スケール
板12の下面には斜面から成る光遮光部12aと平面か
ら成る光透過部12bが、格子状にピッチPの等間隔で
周期的に配置されている。可動スケール板12の下側に
は、平行平板状の透明材料から成る固定スケール板13
が対向的に配置されており、図2に示すように可動スケ
ール板12の格子ピッチPと等しい間隔で、固定スケー
ル板13の表面には共に光透過部であるV型溝部14と
平面部15が設けられ、V型溝部14の傾斜面14a、
14bは平面部15に対して45度の角度とされてい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the embodiments shown in FIGS. FIG. 1 shows a side view of the embodiment. A movable scale plate 12 made of a parallel plate-shaped transparent material attached to, for example, a lens portion of an object to be measured (not shown) is arranged below a light emitting element 11. On the lower surface of the scale plate 12, light-shielding portions 12a formed of inclined surfaces and light-transmitting portions 12b formed of flat surfaces are periodically arranged at regular intervals of a pitch P in a grid pattern. Below the movable scale plate 12, a fixed scale plate 13 made of a parallel plate-shaped transparent material is provided.
Are arranged facing each other, and as shown in FIG. 2, the V-shaped groove portion 14 and the flat portion 15 which are both light transmitting portions are formed on the surface of the fixed scale plate 13 at intervals equal to the lattice pitch P of the movable scale plate 12. Are provided, and the inclined surface 14a of the V-shaped groove portion 14,
14b is at an angle of 45 degrees with respect to the plane portion 15.

【0010】更に、固定スケール板13の下方位置に
は、固定スケール板13に対して約30度傾斜して2つ
の受光素子16a、16bが互いに内側を向くように配
置されており、固定スケール板13から屈折されてくる
光束にほぼ正対して受光できるようになっている。ま
た、これら受光素子16a、16bは感度に指向性を有
し、30度傾斜した方向から入射する光に対する感度は
垂直方向の半分とされている。
Further, below the fixed scale plate 13, two light receiving elements 16a and 16b are arranged so as to be inclined toward the fixed scale plate 13 by about 30 degrees so as to face each other. The light beam refracted from the light beam 13 can be received almost directly. Further, the light receiving elements 16a and 16b have directivity in sensitivity, and the sensitivity to light incident from a direction inclined at 30 degrees is half that in the vertical direction.

【0011】図1は可動スケール板12の光透過部12
bが固定スケール板13のV型溝部14に一致し、可動
スケール板12の光遮光部12aが固定スケール板13
の平面部15に一致している状態を示し、発光素子11
からの光束は可動スケール板12の光透過部12bを通
って、対向する固定スケール板13のV型溝部14の傾
斜面14a、14bに入射する。V型溝部14の傾斜面
14a、14bが互いに90度の角度でかつ固定スケー
ル板13の光屈折率が1.58のときは、固定スケール
板13を通過した後に屈折されて、鉛直線に対して約3
0度、正確には30度12分の傾きを持つ光束となる。
そして、これらの光束はほぼ垂直に近い方向からそれぞ
れ受光素子16a、16bに受光される。
FIG. 1 shows a light transmitting portion 12 of a movable scale plate 12.
b coincides with the V-shaped groove 14 of the fixed scale plate 13, and the light shielding portion 12 a of the movable scale plate 12
And the light-emitting element 11
The light flux from the light source passes through the light transmitting portion 12b of the movable scale plate 12, and is incident on the inclined surfaces 14a and 14b of the V-shaped groove portion 14 of the fixed scale plate 13 opposed thereto. When the inclined surfaces 14a and 14b of the V-shaped groove portion 14 are at an angle of 90 degrees to each other and the light refractive index of the fixed scale plate 13 is 1.58, the light is refracted after passing through the fixed scale plate 13 and becomes perpendicular to the vertical line. About 3
It becomes a light beam having an inclination of 0 degree, more precisely 30 degrees and 12 minutes.
These light beams are received by the light receiving elements 16a and 16b, respectively, from directions substantially perpendicular to each other.

【0012】また、図3は可動スケール板12の光透過
部12bが固定スケール板13の平面部15に一致し、
可動スケール板12の光遮光部12aが固定スケール板
13のV型溝部14に一致した状態を示し、発光素子1
1からの光束は、可動スケール板12の光透過部12b
を通って対向する固定スケール板13の平面部15に入
射し、そのまま通過する。
FIG. 3 shows that the light transmitting portion 12b of the movable scale plate 12 coincides with the flat portion 15 of the fixed scale plate 13,
The light-shielding portion 12a of the movable scale plate 12 corresponds to the V-shaped groove portion 14 of the fixed scale plate 13, and the light-emitting element 1
1 from the light transmitting portion 12b of the movable scale plate 12.
And enters the opposed flat surface portion 15 of the fixed scale plate 13 and passes as it is.

【0013】また、可動スケール板12が固定スケール
板13に対し図1と図3の間に位置する場合には、図4
に示すように可動スケール板12の光透過部12bを通
った光束は、固定スケール板13のV型溝部14と平面
部15に入射する。V型溝部14に入射した光束は屈折
され、平面部15に入射した光束は直進する。このと
き、受光素子16a、16bは共に固定スケール板13
に対して約30度、直進光に対して約60度傾斜してい
るので、固定スケール板13で屈折された光束に対して
大きな感度を有し、一方で固定スケール板13を直進す
る光束は、受光素子16a、16bに対して30度の角
度を有して斜め方向から入射するために半分の感度とな
る。
When the movable scale plate 12 is positioned between FIG. 1 and FIG. 3 with respect to the fixed scale plate 13, FIG.
As shown in (2), the light flux passing through the light transmitting portion 12b of the movable scale plate 12 enters the V-shaped groove 14 and the flat portion 15 of the fixed scale plate 13. The light beam incident on the V-shaped groove portion 14 is refracted, and the light beam incident on the flat portion 15 goes straight. At this time, the light receiving elements 16a and 16b are both fixed scale plates 13
, And about 60 degrees with respect to the straight light, it has high sensitivity to the light flux refracted by the fixed scale plate 13, while the light beam that goes straight through the fixed scale plate 13 is Since the light is incident obliquely at an angle of 30 degrees with respect to the light receiving elements 16a and 16b, the sensitivity becomes half.

【0014】このとき、例えばV型溝部14をピッチP
の1/2の幅とし、2つの傾斜面14a、14bの幅が
等しくかつそれぞれP/4となるようにし、平面部15
をピッチPの1/2の幅になるように設定すれば、受光
素子16a、16bからの出力信号Sa、Sbは、図5に示
すように可動スケール板12の位置変化に対して90度
位相のずれた周期Pの繰り返し信号となる。この出力信
号Sa、Sbを演算することによって、可動スケール板12
の固定スケール板13に対する相対位置を検出すること
ができる。
At this time, for example, the V-shaped groove 14 is
And the width of the two inclined surfaces 14a and 14b is equal and P / 4, respectively.
Is set to have a width equal to a half of the pitch P, the output signals Sa and Sb from the light receiving elements 16a and 16b have a phase difference of 90 degrees with respect to the change in the position of the movable scale plate 12, as shown in FIG. Is a repetitive signal with a period P shifted by By calculating the output signals Sa and Sb, the movable scale plate 12
Can be detected relative to the fixed scale plate 13.

【0015】このように、3方向に分割した光束の内の
V型溝部14の傾斜面14a、14bを通る信号光束に
対する感度を上げて、平面部15を透過する光束の感度
を下げることにより、受光素子16a、16bの信号出
力を向上させて所望の位相差の信号を受光することがで
きる。
As described above, by increasing the sensitivity to the signal light beam passing through the inclined surfaces 14a and 14b of the V-shaped groove portion 14 of the light beam divided into three directions and decreasing the sensitivity of the light beam transmitted through the plane portion 15, By improving the signal output of the light receiving elements 16a and 16b, a signal having a desired phase difference can be received.

【0016】なお、実施例の固定スケール板13におい
ては光束を3方向に分割するようにしたが、分割は2方
向、或いは更に斜面の傾き角を多数階として光束を更に
複数方向に分割することもできる。また、2枚のスケー
ル板12、13の何れを固定スケール板、可動スケール
板としても支障はない。
Although the light beam is divided into three directions in the fixed scale plate 13 of the embodiment, the light beam may be divided into two directions, or the light beam may be further divided into a plurality of directions by setting the inclination angle of the slope to many floors. Can also. Further, there is no problem even if either of the two scale plates 12 and 13 is used as a fixed scale plate or a movable scale plate.

【0017】[0017]

【発明の効果】以上説明したように本発明に係る位置検
出装置は、発光素子からの光束をスケール板のV型溝を
利用して少なくとも2方向に分割し、受光素子への入射
角を変えることにより、受光信号に入射方向による勾配
を持たせることができ、更に有害光に影響されずに、所
望の位相差で光束を受光することができるので、正確な
位置検出を行うことが可能となる。
As described above, the position detecting device according to the present invention divides the light beam from the light emitting element into at least two directions by using the V-shaped groove of the scale plate, and changes the angle of incidence on the light receiving element. As a result, the received light signal can have a gradient depending on the incident direction, and further, the light beam can be received with a desired phase difference without being affected by harmful light, so that accurate position detection can be performed. Become.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例の側面図である。FIG. 1 is a side view of an embodiment.

【図2】固定スケール板の斜視図である。FIG. 2 is a perspective view of a fixed scale plate.

【図3】可動スケール板が1/2ピッチ移動したときの
側面図である。
FIG. 3 is a side view when the movable scale plate moves by a half pitch.

【図4】透過光束の説明図である。FIG. 4 is an explanatory diagram of a transmitted light beam.

【図5】受光素子の出力電圧のグラフ図である。FIG. 5 is a graph showing an output voltage of the light receiving element.

【図6】従来例の側面図である。FIG. 6 is a side view of a conventional example.

【図7】可動スケール板が1/2ピッチ移動したときの
側面図である。
FIG. 7 is a side view when the movable scale plate moves by ピ ッ チ pitch.

【符号の説明】[Explanation of symbols]

11 発光素子 12 可動スケール板 13 固定スケール板 14 V型溝部 14a、14b 傾斜面 15 平面部 16a、16b 受光素子 DESCRIPTION OF SYMBOLS 11 Light emitting element 12 Movable scale plate 13 Fixed scale plate 14 V-shaped groove part 14a, 14b Inclined surface 15 Flat part 16a, 16b Light receiving element

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 発光素子からの光束をV型溝を使用して
少なくとも2方向に分割し、該分割した光束を受光素子
により受光して位置を検出する位置検出装置において、
指向性を有する前記受光素子の感度の高い方向を前記屈
折光束方向に正対させたことを特徴とする位置検出装
置。
1. A position detecting device for dividing a light beam from a light emitting element into at least two directions using a V-shaped groove, and receiving the divided light beam by a light receiving element to detect a position.
A position detecting device, wherein a direction of high sensitivity of the light receiving element having directivity is directly opposed to the direction of the refracted light beam.
【請求項2】 前記受光素子を前記直進方向光束に対し
約60度傾けるようにした請求項1に記載の位置検出装
置。
2. The position detecting device according to claim 1, wherein said light receiving element is tilted by about 60 degrees with respect to said light beam in the straight direction.
JP18737597A 1997-06-27 1997-06-27 Position detector Pending JPH1123221A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18737597A JPH1123221A (en) 1997-06-27 1997-06-27 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18737597A JPH1123221A (en) 1997-06-27 1997-06-27 Position detector

Publications (1)

Publication Number Publication Date
JPH1123221A true JPH1123221A (en) 1999-01-29

Family

ID=16204918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18737597A Pending JPH1123221A (en) 1997-06-27 1997-06-27 Position detector

Country Status (1)

Country Link
JP (1) JPH1123221A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6643342B1 (en) 1998-07-15 2003-11-04 Nec Corporation Unique word detection circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6643342B1 (en) 1998-07-15 2003-11-04 Nec Corporation Unique word detection circuit

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