JPH11231328A - Method and device for sticking liquid crystal substrates to each other - Google Patents

Method and device for sticking liquid crystal substrates to each other

Info

Publication number
JPH11231328A
JPH11231328A JP3442098A JP3442098A JPH11231328A JP H11231328 A JPH11231328 A JP H11231328A JP 3442098 A JP3442098 A JP 3442098A JP 3442098 A JP3442098 A JP 3442098A JP H11231328 A JPH11231328 A JP H11231328A
Authority
JP
Japan
Prior art keywords
substrate
liquid crystal
vacuum
vacuum suction
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3442098A
Other languages
Japanese (ja)
Inventor
Norihiko Egami
典彦 江上
Takayuki Nagahara
孝行 永原
Osamu Hirota
修 廣田
Shirou Sumida
祉朗 炭田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3442098A priority Critical patent/JPH11231328A/en
Publication of JPH11231328A publication Critical patent/JPH11231328A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal substrate sticking method which sticks two substrates, which are arranged in opposite positions to each other with a high precision. SOLUTION: One substrate 23 which has the front face coated with a seal agent 21 and has a liquid crystal material 22 arranged on the inside of this seal agent 21 has the outer periphery fixed and is put in a vacuum vessel 30, and all the outer front face of the other substrate 26 which is arranged so as to face one substrate 23 with a prescribed gap between them is fixed by vacuum attraction of a vacuum attraction mechanism 27. Both substrates 23 and 26 are aligned by relative movement in longitudinal and lateral directions of substrate surfaces, and at least one substrate is moved in the direction perpendicular to the substrate surface, and one substrate 23 and the other substrate 26 are stuck to each other with the seal agent 21 between them.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、パーソナルコンピ
ュータやTV受像機等の画像表示パネルとして用いられ
る液晶表示素子を構成する液晶基板の貼り合わせ方法に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for bonding a liquid crystal substrate constituting a liquid crystal display element used as an image display panel of a personal computer, a TV set or the like.

【0002】[0002]

【従来の技術】液晶表示素子を構成する液晶基板の構造
として、図6に示すように、透光性材料からなる下基板
1の表面に紫外線硬化型の接着剤(シール剤)3が配置
され、この下基板1と対向して配置された透光性材料か
らなる上基板2をシール剤3を介して上基板2を下基板
1に貼り付けるようになっており、更に、図7に示すよ
うに、シール剤3の内側に液晶材料4が配置されるよう
になっているものが知られている。
2. Description of the Related Art As a structure of a liquid crystal substrate constituting a liquid crystal display element, as shown in FIG. 6, an ultraviolet-curable adhesive (sealant) 3 is disposed on the surface of a lower substrate 1 made of a translucent material. The upper substrate 2 made of a light-transmissive material disposed to face the lower substrate 1 is attached to the lower substrate 1 via a sealant 3 and further shown in FIG. As described above, there is known a device in which the liquid crystal material 4 is arranged inside the sealant 3.

【0003】この液晶材料4をシール剤3の内側に配置
する方法としては、図7(b)に示すように、シール剤
3の内側に液晶材料4を滴下し、その後に図7(c)に
示すように、上基板2を重ね合わせ、紫外線ランプ10
から紫外線を照射してシール剤3を硬化させて下基板1
にシール剤3を介して上基板を貼り合わせてパネルを完
成させる液晶滴下工法が知られている次に図8に基づい
て、従来の液晶滴下工法による液晶基板の貼り合わせ方
法について更に詳細に説明する。
As a method of disposing the liquid crystal material 4 inside the sealant 3, as shown in FIG. 7B, the liquid crystal material 4 is dropped inside the sealant 3, and thereafter, FIG. As shown in FIG.
UV light is applied to cure the sealant 3 so that the lower substrate 1
A liquid crystal dropping method for completing a panel by bonding an upper substrate via a sealant 3 is known. Next, a method for bonding a liquid crystal substrate by a conventional liquid crystal dropping method will be described in further detail with reference to FIG. I do.

【0004】図8(a)に示すように、表面に厚さ5μ
mで塗布された紫外線硬化型のシール剤3及びシール剤
3の内部に液晶材料4が配置されたアレイ基板である下
基板1を、水平方向に移動可能なテーブル5上に搭載
し、その周辺を固定ピン6で固定する。
[0004] As shown in FIG.
The lower substrate 1 which is an array substrate in which a liquid crystal material 4 is disposed inside the ultraviolet-curing type sealant 3 coated with m and the sealant 3 is mounted on a horizontally movable table 5, and the periphery thereof is mounted. Is fixed with fixing pins 6.

【0005】次に図8(b)に示すように、厚さ1.0
mmのテフロン材料からなるスペーサ7を下基板1の周
辺部にシール剤3に接触しないように数カ所配置して下
基板1を固定する。
[0005] Next, as shown in FIG.
The lower substrate 1 is fixed by arranging spacers 7 made of a Teflon material having a thickness of 5 mm around the lower substrate 1 so as not to contact the sealant 3.

【0006】そして図8(c)に示すように、カラーフ
ィルター基板である上基板2を複数のスペーサ7の上に
配置し、その後に、下基板1を搭載したテーブル5を前
後左右に水平移動して、下基板1と上基板2との位置合
わせを行う。この下基板1と上基板2の位置合わせを行
う方法としては、例えば、透光性材料からなる下基板1
と上基板2にそれぞれ記された位置基準マーク(図示
略)を上基板2の上方から見て、上基板2の位置基準マ
ークに下基板1の表面の位置基準マークが合致している
かどうかを確かめ、これら位置基準マークが合致してい
ることを確認して位置合わせを行っている。
[0008] Then, as shown in FIG. 8 (c), the upper substrate 2, which is a color filter substrate, is arranged on a plurality of spacers 7, and then the table 5 on which the lower substrate 1 is mounted is horizontally moved back and forth and right and left. Then, the lower substrate 1 and the upper substrate 2 are aligned. As a method of aligning the lower substrate 1 and the upper substrate 2, for example, the lower substrate 1 made of a translucent material is used.
And the position reference marks (not shown) respectively written on the upper substrate 2 are viewed from above the upper substrate 2 to determine whether the position reference marks on the surface of the lower substrate 1 match the position reference marks on the upper substrate 2. After confirming that these position reference marks match, alignment is performed.

【0007】更に図8(d)に示すように、上基板2を
垂直方向下向きに加圧し、この状態で各スペーサ7を抜
き取り、上基板2をシール剤3を介して下基板1に貼り
合わせる。
[0008] Further, as shown in FIG. 8 (d), the upper substrate 2 is pressed vertically downward, each spacer 7 is removed in this state, and the upper substrate 2 is bonded to the lower substrate 1 via the sealant 3. .

【0008】その後に図8(e)に示すように、紫外線
ランプ10から紫外線を照射してシール剤3を硬化させ
て、下基板1と上基板2の貼り合わせを完了する。
[0008] Thereafter, as shown in FIG. 8 (e), ultraviolet rays are irradiated from an ultraviolet lamp 10 to cure the sealant 3, and the bonding of the lower substrate 1 and the upper substrate 2 is completed.

【0009】ところが、上述した従来の基板の貼り合わ
せ方法では、上基板2を下基板1の表面のシール剤3に
接触させるとき、即ちスペーサ7を抜き取るときに、上
基板2が規制又は支持されていないので、上基板2が下
降移動したときに、基板面方向(前後左右方向)に3μ
m以上ずれる場合があり、例えば液晶ディスプレイにお
いて位置ずれによる画像不良が発生するという問題があ
った。
However, in the above-described conventional method of bonding substrates, when the upper substrate 2 is brought into contact with the sealant 3 on the surface of the lower substrate 1, that is, when the spacer 7 is removed, the upper substrate 2 is restricted or supported. Therefore, when the upper substrate 2 moves down, 3 μm in the substrate surface direction (front-back, left-right direction).
m or more, and there is a problem in that, for example, an image defect occurs due to a displacement in a liquid crystal display.

【0010】また、このずれを3μm以内に矯正するた
めに、上基板2が下基板1の表面のシール剤3に接触し
た後に、下基板1又は上基板2を基板面方向(前後左右
方向)に移動させようとすると、シール剤3の剥離が発
生してシール剤3と液晶材料4との拡散混合によって液
晶特性が損なわれるという問題があった。
In order to correct this deviation to within 3 μm, after the upper substrate 2 comes into contact with the sealing agent 3 on the surface of the lower substrate 1, the lower substrate 1 or the upper substrate 2 is moved in the direction of the substrate surface (front-back, left-right direction). In such a case, there is a problem that the sealant 3 is peeled off and the liquid crystal properties are impaired due to the diffusion and mixing of the sealant 3 and the liquid crystal material 4.

【0011】これを解決しようとするものに、例えば、
図9に示す液晶基板の貼り合わせ方法が提案されてい
る。
In order to solve this, for example,
A method for bonding a liquid crystal substrate shown in FIG. 9 has been proposed.

【0012】図9に示す従来の液晶基板の貼り合わせ方
法では、まず、図9(a)に示すように、表面に紫外線
硬化型のシール剤3が塗布され、このシール剤3の内側
に液晶材料4が配置された下基板1を、水平方向に移動
可能なテーブル5上に搭載し、下基板1の周辺を固定ピ
ン6で固定する。
In the conventional method of bonding a liquid crystal substrate shown in FIG. 9, first, as shown in FIG. 9A, an ultraviolet-curable sealing material 3 is applied to the surface, and a liquid crystal is provided inside the sealing material 3. The lower substrate 1 on which the material 4 is disposed is mounted on a horizontally movable table 5, and the periphery of the lower substrate 1 is fixed with fixing pins 6.

【0013】次に、図9(b)に示すように、スペーサ
7を下基板1の周辺部に、シール剤3に接触しないよう
に数カ所配置して固定する。
Next, as shown in FIG. 9B, spacers 7 are arranged and fixed around the lower substrate 1 so as not to come into contact with the sealant 3 at the periphery.

【0014】更に図9(c)に示すように、上基板2
を、数カ所配置されたスペーサ7の上に載置した後に、
上基板2の外周をガイド部材8で固定し、下基板1を搭
載したテーブル5を前後左右の水平方向に移動させて、
上基板2の位置基準マーク(図示略)と下基板1の位置
基準マーク(図示略)とを合致させて下基板1と上基板
2との位置合わせを行う。
Further, as shown in FIG.
Is placed on the spacers 7 arranged at several places,
The outer periphery of the upper substrate 2 is fixed by a guide member 8, and the table 5 on which the lower substrate 1 is mounted is moved in the front, rear, left and right horizontal directions,
The position reference mark (not shown) of the upper substrate 2 and the position reference mark (not shown) of the lower substrate 1 are matched to perform alignment between the lower substrate 1 and the upper substrate 2.

【0015】次に、図9(d)に示すように、上基板2
を垂直方向に加圧し、この加圧状態でスペーサ7を抜き
取り、上基板2をガイド部材8の端面に沿って基板面に
対して垂直方向に移動させて、上基板2をシール剤3を
介して下基板1に貼り合わせる。
Next, as shown in FIG.
Is pressed in the vertical direction, the spacer 7 is removed in this pressed state, and the upper substrate 2 is moved in the direction perpendicular to the substrate surface along the end surface of the guide member 8, and the upper substrate 2 is To the lower substrate 1.

【0016】最後に図9(e)に示すように、紫外線ラ
ンプ10から紫外線を照射してシール剤3を硬化させ
て、下基板1と上基板2の貼り合わせは完了する。
Finally, as shown in FIG. 9 (e), ultraviolet rays are irradiated from an ultraviolet lamp 10 to cure the sealant 3, and the bonding of the lower substrate 1 and the upper substrate 2 is completed.

【0017】上記方法を改善するものとして、図10に
示す液晶基板の貼り合わせ方法が考えられる。この方法
では、まず、図10(a)に示すように、表面に紫外線
硬化型のシール剤3が塗布され、このシール剤3の内側
に液晶材料4が配置された下基板1を、水平方向に移動
可能なテーブル5上に搭載し、下基板1の周辺を固定ピ
ン6で固定する。
As a method for improving the above method, a method of bonding liquid crystal substrates shown in FIG. 10 can be considered. In this method, first, as shown in FIG. 10A, an ultraviolet-curable sealing agent 3 is applied to the surface, and the lower substrate 1 on which the liquid crystal material 4 is disposed inside the sealing agent 3 is moved in the horizontal direction. Is mounted on a movable table 5, and the periphery of the lower substrate 1 is fixed with fixing pins 6.

【0018】次に、図10(b)に示すように、スペー
サ7を下基板1の周辺部に、シール剤3に接触しないよ
うに数カ所配置して固定する。
Next, as shown in FIG. 10B, spacers 7 are arranged and fixed around the lower substrate 1 so as not to come into contact with the sealant 3 at the periphery.

【0019】更に図10(c)に示すように、上基板2
を、数カ所配置されたスペーサ7の上に載置した後に、
上基板2の外周をガイド部材8で固定し、下基板1を搭
載したテーブル5を前後左右の水平方向に移動して、上
基板2の位置基準マーク(図示略)と下基板1の位置基
準マーク(図示略)とを合致させて下基板1と上基板2
との位置合わせを行う。
Further, as shown in FIG.
Is placed on the spacers 7 arranged at several places,
The outer periphery of the upper substrate 2 is fixed by a guide member 8, and the table 5 on which the lower substrate 1 is mounted is moved in the front, rear, left and right horizontal directions, and the position reference mark (not shown) of the upper substrate 2 The lower substrate 1 and the upper substrate 2 are aligned with marks (not shown).
Align with.

【0020】次に、図10(d)に示すように、スペー
サ7を抜き取り、上基板2をガイド部材8で固定した状
態で、このガイド部材8とともに垂直方向に移動させ
て、上基板2をシール剤3を介して下基板1に加圧状態
下で貼り合わせる。
Next, as shown in FIG. 10D, the spacer 7 is removed, and the upper substrate 2 is moved in the vertical direction together with the guide member 8 while the upper substrate 2 is fixed by the guide member 8 so that the upper substrate 2 is moved. It is bonded to the lower substrate 1 via the sealant 3 under a pressurized state.

【0021】最後に図10(e)に示すように、紫外線
ランプ10から紫外線を照射してシール剤3を硬化させ
て、下基板1と上基板2の貼り合わせは完了する。
Finally, as shown in FIG. 10 (e), the sealant 3 is cured by irradiating ultraviolet rays from an ultraviolet lamp 10, and the bonding of the lower substrate 1 and the upper substrate 2 is completed.

【0022】[0022]

【発明が解決しようとする課題】ところが、上述した図
9、図10に示す液晶基板の貼り合わせ方法において
も、上基板2をスペーサ7の上に配置したときに、上基
板2の自重によって反りなどが生じて上基板2が変形し
てしまい、この状態で上基板2と下基板1の位置合わせ
を行い、上基板2の位置基準マークと下基板の位置基準
マークが合致した状態でも、スペーサ7を抜き取って上
基板2をシール剤3に接触させたときに、上基板2の反
り等の変形がなくなってその表面及び裏面が平坦面とな
り、上基板2の位置基準マークと下基板1の位置基準マ
ークとがずれた状態になってしまう。
However, in the above-described method of bonding the liquid crystal substrates shown in FIGS. 9 and 10, when the upper substrate 2 is disposed on the spacer 7, the warp is caused by the weight of the upper substrate 2. The upper substrate 2 is deformed due to, for example, the upper substrate 2 and the lower substrate 1 are aligned in this state, and even if the position reference mark of the upper substrate 2 and the position reference mark of the lower substrate match, the spacer 7, when the upper substrate 2 is brought into contact with the sealant 3, deformation such as warpage of the upper substrate 2 disappears, and the front and rear surfaces thereof become flat, and the position reference mark of the upper substrate 2 and the lower substrate 1 The state is shifted from the position reference mark.

【0023】このために、上基板2が下基板1に対し基
板面の前後左右方向に3μm近くずれて、完成された液
晶ディスプレイにおいて、下基板1に形成されている電
極パターン(図示略)と上基板2に形成されている画素
(図示略)との位置ずれが起こって色が変化し画像不良
が発生してしまうという問題があった。
For this reason, the upper substrate 2 is displaced from the lower substrate 1 by about 3 μm in the front-rear and left-right directions of the substrate surface, and the electrode pattern (not shown) formed on the lower substrate 1 in the completed liquid crystal display. There has been a problem that a color shift occurs due to a positional shift from a pixel (not shown) formed on the upper substrate 2 and an image defect occurs.

【0024】また、このずれを矯正するために、上基板
2がシール剤3に接触した後に、下基板1又は上基板2
を基板面の前後左右方向に移動させようとすると、シー
ル剤3の剥離が発生し、液晶特性が損なわれるという問
題があった。
In order to correct this shift, after the upper substrate 2 comes into contact with the sealant 3, the lower substrate 1 or the upper substrate 2
When the substrate is moved in the front-rear and left-right directions of the substrate surface, the sealant 3 is peeled off, and the liquid crystal characteristics are deteriorated.

【0025】本発明は、上記問題点を解消し、対向する
位置に配置された2枚の基板を精度良く貼り合わせるこ
とができる液晶基板の貼り合わせ方法を提供することを
目的としている。
An object of the present invention is to solve the above-mentioned problems and to provide a method for bonding a liquid crystal substrate which can bond two substrates disposed at opposing positions with high accuracy.

【0026】[0026]

【課題を解決するための手段】上記目的を達成するため
に、本発明は、表面にシール剤が塗布され、このシール
剤の内側に液晶材料が配置された一方側の基板の外周を
固定した状態で、この一方側の基板に対向するように所
定の間隔で配置された他方側の基板の外表面を真空吸着
機構による真空吸着で固定し、両方の基板を相対的に基
板面の前後左右方向に移動させて位置合わせを行った
後、少なくとも一方の基板を基板面に対して垂直方向に
移動させて、前記一方側の基板と前記他方側の基板とを
前記シール剤を介して貼り合わせるようにしたことを特
徴としている。
In order to achieve the above object, according to the present invention, a sealant is applied to the surface, and the outer periphery of one substrate on which a liquid crystal material is disposed is fixed inside the sealant. In this state, the outer surface of the substrate on the other side, which is arranged at a predetermined interval so as to face the substrate on one side, is fixed by vacuum suction by a vacuum suction mechanism, and both substrates are relatively moved back, forth, left, right, After moving in at least one direction, at least one substrate is moved in a direction perpendicular to the substrate surface, and the one side substrate and the other side substrate are bonded via the sealant. It is characterized by doing so.

【0027】また本発明において少なくとも前記貼り合
わせを真空雰囲気中で行うように構成すると好適であ
る。
In the present invention, it is preferable that at least the bonding is performed in a vacuum atmosphere.

【0028】また、前記真空吸着機構の真空度を前記真
空雰囲気の真空度より0.3Torr以上の高真空にす
ると好適である。
Preferably, the degree of vacuum of the vacuum suction mechanism is higher than that of the vacuum atmosphere by 0.3 Torr or more.

【0029】更に、前記真空吸着機構に真空密閉用弾性
体を設けることが好ましい。
Further, it is preferable to provide a vacuum sealing elastic body in the vacuum suction mechanism.

【0030】本発明によると、真空吸着機構で他方側の
基板を平坦面に吸着保持した状態で位置合わせを行うこ
とができるので、他方側の基板に反り等の変形が生じる
ことがなく、対向する位置に配置された両方の基板を精
度良く貼り合わせることができる。また真空雰囲気中で
少なくとも前記貼り合わせを行うと、液晶特性を良好に
保つことができる。
According to the present invention, since the positioning can be performed while the other substrate is suction-held on the flat surface by the vacuum suction mechanism, the other substrate is not deformed such as warpage. It is possible to accurately bond both substrates arranged at the positions where they are to be bonded. Further, when the bonding is performed at least in a vacuum atmosphere, good liquid crystal characteristics can be maintained.

【0031】この際に真空吸着機構の真空度が、真空雰
囲気の真空度より0.3Torr以上の高真空にする
と、真空吸着機構による基板の吸着を確実にできる。
At this time, if the degree of vacuum of the vacuum suction mechanism is set to a high vacuum of 0.3 Torr or more higher than the vacuum degree of the vacuum atmosphere, the suction of the substrate by the vacuum suction mechanism can be ensured.

【0032】更に本発明において、両方の基板を相対的
に水平移動させて位置合わせをした後、他方側の基板を
ガイド部材に沿って基板面に対して垂直方向に移動させ
たり、あるいは他方側の基板をガイド部材に固定した状
態でガイド部材とともに基板面に対して垂直方向に移動
させて、一方側の基板と前記他方側の基板を前記接着剤
を介して貼り合わせるように構成すると、対向する位置
に配置された両方の基板の貼り合わせ精度を、他方側の
基板を規制するガイド部材のクリアランス以内の精度に
抑制できて、対向する位置に配置された両方の基板をよ
り一層精度良く貼り合わせることができる。
Further, in the present invention, after the two substrates are relatively horizontally moved and aligned, the other substrate is moved in a direction perpendicular to the substrate surface along the guide member, or the other substrate is moved. When the substrate is fixed to the guide member and moved in the direction perpendicular to the substrate surface together with the guide member, and the substrate on one side and the substrate on the other side are bonded via the adhesive, Bonding accuracy of the two substrates arranged at the position where the two substrates are positioned can be suppressed to within the clearance of the guide member that regulates the substrate on the other side. Can be matched.

【0033】[0033]

【発明の実施の形態】以下、本発明に係る液晶基板の貼
り合わせ方法とその装置の実施の形態について、図を参
照しつつ説明する。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a liquid crystal substrate bonding method and apparatus according to an embodiment of the present invention.

【0034】本発明の第1実施形態の液晶基板の貼り合
わせ方法を図1〜図3に基づいて説明する。
The method for bonding the liquid crystal substrates according to the first embodiment of the present invention will be described with reference to FIGS.

【0035】まず、図1(a)に示すように、表面に紫
外線硬化型のシール剤21が塗布され、このシール剤2
1の内側に液晶材料22が配置された透光性材料(ガラ
ス)からなる下基板(一方側の基板)23を、水平方向
に移動可能なテーブル24上に搭載し、固定ピン25で
外周を固定する。
First, as shown in FIG. 1A, a UV-curable sealing agent 21 is applied to the surface,
A lower substrate (one substrate) 23 made of a translucent material (glass) in which a liquid crystal material 22 is disposed inside 1 is mounted on a horizontally movable table 24, and the outer periphery is fixed by fixing pins 25. Fix it.

【0036】次に、図1(b)に示すように、下基板2
3が搭載されたテーブル24を真空容器30内に入れ、
透光性材料(ガラス)からなる上基板(他方側の基板)
26の外表面の全面を真空吸着機構27による真空吸着
で固定する。ここで、また、真空吸着機構27の下面に
は無数の細孔(図示略)が形成されており、これら無数
の細孔での真空吸着によって上基板26が吸着固定され
るように構成すればよい。
Next, as shown in FIG.
3 is placed in a vacuum container 30 and
Upper substrate (substrate on the other side) made of translucent material (glass)
The entire outer surface of 26 is fixed by vacuum suction by a vacuum suction mechanism 27. Here, an infinite number of pores (not shown) are formed on the lower surface of the vacuum suction mechanism 27, and if the upper substrate 26 is suction-fixed by vacuum suction in these innumerable pores. Good.

【0037】そして、下基板23に記された位置基準マ
ーク(図示略)と上基板26に記された位置基準マーク
(図示略)とを真空吸着機構27に設けられた透明部
(図示略)から透視して、これら位置基準マークが合致
するように位置合わせを行う。
Then, a position reference mark (not shown) written on the lower substrate 23 and a position reference mark (not shown) written on the upper substrate 26 are combined with a transparent portion (not shown) provided on the vacuum suction mechanism 27. And positioning is performed so that these position reference marks match.

【0038】次に、図1(c)に示すように、真空吸着
機構27を垂直方向に下降させて、上基板26をシール
剤21を介して下基板23に加圧しつつ貼り合わせる。
Next, as shown in FIG. 1C, the vacuum suction mechanism 27 is lowered vertically, and the upper substrate 26 is bonded to the lower substrate 23 via the sealant 21 while applying pressure.

【0039】その後に、図1(d)に示すように、テー
ブル24とともに下基板23と上基板26とを真空容器
30から出して、紫外線ランプ31から紫外線を照射し
てシール剤21を硬化させて、下基板23と上基板26
との貼り合わせを完了する。
Thereafter, as shown in FIG. 1D, the lower substrate 23 and the upper substrate 26 are taken out of the vacuum vessel 30 together with the table 24 and irradiated with ultraviolet rays from an ultraviolet lamp 31 to cure the sealant 21. And the lower substrate 23 and the upper substrate 26
To complete the bonding.

【0040】この第1実施形態の液晶基板の貼り合わせ
方法によれば、上基板26を真空吸着機構27で真空吸
着し、上基板の平面度が確保された状態で位置合わせを
行うことができるので、下基板23と上基板26とを精
度良く貼り合わせることができる。
According to the liquid crystal substrate bonding method of the first embodiment, the upper substrate 26 is vacuum-sucked by the vacuum suction mechanism 27, and positioning can be performed in a state where the flatness of the upper substrate is ensured. Therefore, the lower substrate 23 and the upper substrate 26 can be bonded with high accuracy.

【0041】尚、真空吸着機構27の真空度を真空容器
30の真空度より0.3Toor以上の高真空にする
と、上基板26の吸着を確実に行うことができる。
When the degree of vacuum of the vacuum suction mechanism 27 is higher than that of the vacuum chamber 30 by 0.3 Ton or more, the suction of the upper substrate 26 can be surely performed.

【0042】また、図2に示すように、真空吸着機構2
7に真空密閉用弾性体28を設けて、この真空密閉用弾
性体28を介して上基板26を真空吸着すると、真空吸
着機構27の真空度を高くすることができて、上基板2
6の真空吸着を確実に行うことができる。
Further, as shown in FIG.
7 is provided with a vacuum-sealing elastic body 28, and the upper substrate 26 is vacuum-sucked through the vacuum-sealing elastic body 28, so that the degree of vacuum of the vacuum suction mechanism 27 can be increased.
6 can be reliably performed.

【0043】更に、図3に示すように、上基板26の外
周を真空吸着機構27に設けた固定ピン29で固定する
と、上基板26の固定を正しい位置に確実に行うことが
できる。
Further, as shown in FIG. 3, when the outer periphery of the upper substrate 26 is fixed by fixing pins 29 provided on the vacuum suction mechanism 27, the upper substrate 26 can be securely fixed at a correct position.

【0044】また、上基板26をシール剤21を介して
下基板23に貼り合わせるときに、上基板26を所定時
間以上加圧すると、下基板23と上基板26の貼り合わ
せを確実に行うことができ、特に、平坦度を必要とする
液晶基板の貼り合わせに有効である。
When the upper substrate 26 is bonded to the lower substrate 23 via the sealant 21 by pressing the upper substrate 26 for a predetermined time or more, the bonding of the lower substrate 23 and the upper substrate 26 is ensured. This is particularly effective for bonding a liquid crystal substrate that requires flatness.

【0045】本実施形態では、位置合わせと貼り合わせ
とを真空容器30内の真空雰囲気中で行っているが、液
晶材料22の滴下充填や紫外線照射をも真空容器30内
で行うこともできる。あるいは貼り合わせのみを真空雰
囲気中で行ってもよい。
In the present embodiment, the positioning and the bonding are performed in a vacuum atmosphere in the vacuum vessel 30. However, the liquid crystal material 22 may be dropped and filled or the ultraviolet rays may be irradiated in the vacuum vessel 30. Alternatively, only the bonding may be performed in a vacuum atmosphere.

【0046】本発明の第2実施形態の液晶基板の貼り合
わせ方法について、図4に基づいて説明する。尚、上述
した第1実施形態の液晶基板の貼り合わせ方法における
同一部材、同一部分には同じ符号を付して説明する。な
お第2実施形態においても、位置合わせと貼り合わせと
を真空容器内で行ったり、これに加え液晶材料の滴下充
填や紫外線照射をも真空容器内で行うことができ、ある
いは貼り合わせのみを真空雰囲気中で行うことができ
る。
A method for bonding liquid crystal substrates according to the second embodiment of the present invention will be described with reference to FIG. Note that the same members and the same portions in the method for bonding the liquid crystal substrates according to the first embodiment described above are denoted by the same reference numerals and described. Also in the second embodiment, the positioning and the bonding can be performed in a vacuum container. In addition, the liquid crystal material can be dropped and filled and the ultraviolet irradiation can be performed in the vacuum container. Can be performed in an atmosphere.

【0047】まず、図4(a)に示すように、表面に紫
外線硬化型のシール剤21が塗布され、このシール剤2
1の内側に液晶材料22が配置された下基板(一方側の
基板)23を、水平方向に移動可能なテーブル24上に
搭載し、固定ピン25で外周を固定する。
First, as shown in FIG. 4A, a UV-curable sealing agent 21 is applied to the surface,
A lower substrate (one substrate) 23 having a liquid crystal material 22 disposed inside 1 is mounted on a horizontally movable table 24, and the outer periphery is fixed by fixing pins 25.

【0048】次に、図4(b)に示すように、下基板2
3上にスペーサ32を設置した後に、上基板26を真空
吸着機構33で真空吸着し、平面度を確保した状態で上
基板26の外周をガイド部材34で固定する。この状態
で、下基板23を搭載したテーブル24を水平方向に移
動させて下基板23と上基板26との位置合わせをす
る。この位置合わせは、下基板23に記された位置基準
マーク(図示略)と上基板26に形成された位置基準マ
ーク(図示略)とが上方から見て合致するようにすれば
よい。
Next, as shown in FIG.
After the spacer 32 is set on the upper surface 3, the upper substrate 26 is vacuum-sucked by the vacuum suction mechanism 33, and the outer periphery of the upper substrate 26 is fixed by the guide member 34 in a state where the flatness is secured. In this state, the table 24 on which the lower substrate 23 is mounted is moved in the horizontal direction, and the lower substrate 23 and the upper substrate 26 are aligned. This alignment may be performed so that a position reference mark (not shown) written on the lower substrate 23 and a position reference mark (not shown) formed on the upper substrate 26 match when viewed from above.

【0049】そして、図4(c)に示すように、真空吸
着機構33による真空吸着状態を解除し、上基板26を
ガイド部材34に沿って垂直方向に下降させて、上基板
26をシール材21を介して下基板23に加圧しつつ貼
り合わせる。
Then, as shown in FIG. 4C, the vacuum suction state by the vacuum suction mechanism 33 is released, the upper substrate 26 is lowered vertically along the guide member 34, and the upper substrate 26 is sealed with a sealing material. The substrate 21 is bonded to the lower substrate 23 while being pressed through the substrate 21.

【0050】その後、図4(d)に示すように、紫外線
ランプ31から紫外線を照射してシール材21を硬化さ
せて、下基板23と上基板26の貼り合わせを完了す
る。
Thereafter, as shown in FIG. 4D, the sealing material 21 is cured by irradiating ultraviolet rays from an ultraviolet lamp 31 to complete the bonding of the lower substrate 23 and the upper substrate 26.

【0051】この第2実施形態の液晶基板の貼り合わせ
方法によれば、真空吸着機構33による上基板26の真
空吸着によって、上基板26の平面度が確保された状態
で上基板26と下基板23の位置合わせが行えるので、
対向する位置に配置された上基板26と下基板23の貼
り合わせ精度を上基板26を規制するガイド部材34の
加工精度以内に抑制でき、下基板23と上基板26とを
精度良く貼り合わせることができる。
According to the liquid crystal substrate bonding method of the second embodiment, the upper substrate 26 and the lower substrate 26 are maintained in a state where the flatness of the upper substrate 26 is secured by the vacuum suction of the upper substrate 26 by the vacuum suction mechanism 33. 23 can be aligned,
The bonding accuracy of the upper substrate 26 and the lower substrate 23 disposed at the opposing positions can be suppressed within the processing accuracy of the guide member 34 that regulates the upper substrate 26, and the lower substrate 23 and the upper substrate 26 can be bonded with high accuracy. Can be.

【0052】また、予め真空吸着機構(図示略)で上基
板26を真空吸着し、図5に示すように、上基板26を
ガイド部材34に固定した状態で、ガイド部材34とと
もに上基板26を垂直方向に降下させて、上基板26と
下基板23をシール材21を介して貼り合わせるように
してもよい。
Further, the upper substrate 26 is vacuum-adsorbed in advance by a vacuum suction mechanism (not shown), and the upper substrate 26 is fixed together with the guide member 34 with the upper substrate 26 fixed to the guide member 34 as shown in FIG. The upper substrate 26 and the lower substrate 23 may be bonded together via the sealing material 21 by being lowered vertically.

【0053】これによれば、真空吸着機構の真空吸着に
よって上基板26の平面度が確保された状態で上基板2
6と下基板23の位置合わせを行うことができるので、
下基板23と上基板26とを精度良く貼り合わせること
ができる。
According to this, the upper substrate 2 is kept in a state where the flatness of the upper substrate 26 is secured by the vacuum suction of the vacuum suction mechanism.
6 and the lower substrate 23 can be aligned.
The lower substrate 23 and the upper substrate 26 can be accurately bonded.

【0054】[0054]

【発明の効果】この発明によれば、対向する位置に配置
された2枚の基板を位置精度良く貼り合わせることがで
き、液晶特性の良い液晶ディスプレイを提供することが
できる。
According to the present invention, two substrates disposed at opposing positions can be bonded with high positional accuracy, and a liquid crystal display having good liquid crystal characteristics can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施形態の液晶基板の貼り合わせ
方法を説明するための模式的断面図である。
FIG. 1 is a schematic cross-sectional view for explaining a method of attaching a liquid crystal substrate according to a first embodiment of the present invention.

【図2】真空吸着機構に真空密閉用弾性体を設けた状態
を示す模式的断面図である。
FIG. 2 is a schematic sectional view showing a state in which a vacuum sealing elastic body is provided in a vacuum suction mechanism.

【図3】真空吸着機構で真空吸着された上基板の外周を
固定ピンで固定した状態を示す模式的断面図である。
FIG. 3 is a schematic cross-sectional view showing a state where the outer periphery of an upper substrate vacuum-sucked by a vacuum suction mechanism is fixed with fixing pins.

【図4】第2実施形態の液晶基板の貼り合わせ方法を説
明するための模式的断面図である。
FIG. 4 is a schematic cross-sectional view for explaining a method of attaching a liquid crystal substrate according to a second embodiment.

【図5】上基板をガイド部材とともに垂直方向に下降さ
せる状態を示す模式的断面図である。
FIG. 5 is a schematic cross-sectional view showing a state in which the upper substrate is lowered in a vertical direction together with a guide member.

【図6】液晶基板の構造を説明するための分解斜視図で
ある。
FIG. 6 is an exploded perspective view for explaining a structure of a liquid crystal substrate.

【図7】液晶滴下工法を説明するための模式的断面図で
ある。
FIG. 7 is a schematic cross-sectional view for explaining a liquid crystal dropping method.

【図8】従来例の液晶基板の貼り合わせ方法を説明する
ための模式的断面図である。
FIG. 8 is a schematic cross-sectional view for explaining a conventional method of attaching a liquid crystal substrate.

【図9】他の従来例の液晶基板の貼り合わせ方法を説明
するための模式的断面図である。
FIG. 9 is a schematic cross-sectional view for describing another conventional example of a method of attaching a liquid crystal substrate.

【図10】その他の液晶基板の貼り合わせ方法を説明す
るための模式的断面図である。
FIG. 10 is a schematic cross-sectional view for explaining another method of attaching a liquid crystal substrate.

【符号の説明】[Explanation of symbols]

21 シール剤 22 液晶材料 23 下基板(一方側の基板) 24 テーブル 25 固定ピン 26 上基板(他方側の基板) 27 真空吸着機構 28 真空密閉用弾性体 29 固定ピン 30 真空容器 33 真空吸着機構 34 ガイド部材 DESCRIPTION OF SYMBOLS 21 Sealant 22 Liquid crystal material 23 Lower substrate (one side substrate) 24 Table 25 Fixed pin 26 Upper substrate (other side substrate) 27 Vacuum suction mechanism 28 Elastic body for vacuum sealing 29 Fixing pin 30 Vacuum container 33 Vacuum suction mechanism 34 Guide member

───────────────────────────────────────────────────── フロントページの続き (72)発明者 炭田 祉朗 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Jiro Sumida 1006 Kazuma Kadoma, Kadoma City, Osaka Inside Matsushita Electric Industrial Co., Ltd.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 表面にシール剤が塗布され、このシール
剤の内側に液晶材料が配置された一方側の基板の外周を
固定した状態で、この一方側の基板に対向するように所
定の間隔で配置された他方側の基板の外表面を真空吸着
機構による真空吸着で固定し、両方の基板を相対的に基
板面の前後左右方向に移動させて位置合わせを行った
後、少なくとも一方の基板を基板面に対して垂直方向に
移動させて、前記一方側の基板と前記他方側の基板とを
前記シール剤を介して貼り合わせるようにしたことを特
徴とする液晶基板の貼り合わせ方法。
1. A sealant is applied to a surface of a substrate, and a liquid crystal material is disposed inside the sealant. A predetermined interval is provided so as to face the substrate on one side in a state where the outer periphery of the substrate is fixed. After fixing the outer surface of the substrate on the other side arranged by vacuum suction by a vacuum suction mechanism and moving both substrates relatively in the front, rear, left and right directions of the substrate surface, at least one of the substrates is aligned. Is moved in a direction perpendicular to the substrate surface, and the one side substrate and the other side substrate are bonded via the sealant.
【請求項2】 少なくとも貼り合わせを真空雰囲気中で
行うことを特徴とする請求項1に記載の液晶基板の貼り
合わせ方法。
2. The method according to claim 1, wherein the bonding is performed at least in a vacuum atmosphere.
【請求項3】 真空吸着機構の真空度を真空雰囲気の真
空度より0.3Torr以上の高真空にすることを特徴
とする請求項2に記載の液晶基板の貼り合わせ方法。
3. The method according to claim 2, wherein the degree of vacuum of the vacuum suction mechanism is higher than that of the vacuum atmosphere by 0.3 Torr or more.
【請求項4】 前記真空吸着機構に真空密閉用弾性体を
設けたことを特徴とする請求項1〜3のいずれかに記載
の液晶基板の貼り合わせ方法。
4. The method according to claim 1, wherein an elastic body for vacuum sealing is provided in the vacuum suction mechanism.
【請求項5】 両方の基板を相対的に水平移動させて位
置合わせをした後、他方側の基板をガイド部材に沿って
基板面に対して垂直方向に移動させて、一方側の基板と
前記他方側の基板を前記接着剤を介して貼り合わせるよ
うにしたことを特徴とする請求項1〜4のいずれかに記
載の液晶基板の貼り合わせ方法。
5. After positioning both substrates relative to each other by horizontal movement, the other substrate is moved in a direction perpendicular to the substrate surface along a guide member, and the one substrate is 5. The method for bonding liquid crystal substrates according to claim 1, wherein the other substrate is bonded via the adhesive.
【請求項6】 両方の基板を相対的に水平移動させて位
置合わせをした後、他方側の基板をガイド部材に固定し
た状態でガイド部材とともに基板面に対して垂直方向に
移動させて、一方側の基板と前記他方側の基板を前記接
着剤を介して貼り合わせるようにしたことを特徴とする
請求項1〜4のいずれかに記載の液晶基板の貼り合わせ
方法。
6. After positioning both substrates relative to each other by horizontal movement, the other substrate is moved in a direction perpendicular to the substrate surface together with the guide member while the other substrate is fixed to the guide member. The method according to any one of claims 1 to 4, wherein the substrate on one side and the substrate on the other side are bonded via the adhesive.
【請求項7】 表面にシール剤が塗布され、このシール
剤の内側に液晶材料が配置された一方側の基板と、この
一方側の基板に対向するように配置された他方側の基板
とを、前記シール剤を介して貼り合わせる液晶基板の貼
り合わせ装置において、一方側の基板の外周を固定する
固定手段と、他方側の基板の外表面を真空吸着で固定す
る真空吸着機構と、固定手段と真空吸着機構とを相対的
に基板面の前後左右方向に移動させて両基板の位置決め
を行う位置決め手段と、少なくとも一方の基板を基板面
に対して垂直方向に移動させて両基板を貼り合わせる貼
り合わせ手段と、前記固定手段、真空吸着機構、位置決
め手段及び貼り合わせ手段を内部に備えた真空容器とを
有することを特徴とする液晶基板の貼り合わせ装置。
7. A substrate on one side having a surface coated with a sealant and a liquid crystal material disposed inside the sealant, and a substrate on the other side disposed opposite to the one side substrate. A fixing device for fixing an outer periphery of one substrate, a vacuum suction mechanism for fixing an outer surface of the other substrate by vacuum suction, and a fixing device. Positioning means for relatively positioning the two substrates by moving the vacuum suction mechanism relative to the front, rear, left and right directions of the substrate surface, and bonding both substrates by moving at least one substrate in a direction perpendicular to the substrate surface An apparatus for bonding a liquid crystal substrate, comprising: a bonding means; and a vacuum container having therein the fixing means, a vacuum suction mechanism, a positioning means, and a bonding means.
JP3442098A 1998-02-17 1998-02-17 Method and device for sticking liquid crystal substrates to each other Pending JPH11231328A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3442098A JPH11231328A (en) 1998-02-17 1998-02-17 Method and device for sticking liquid crystal substrates to each other

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3442098A JPH11231328A (en) 1998-02-17 1998-02-17 Method and device for sticking liquid crystal substrates to each other

Publications (1)

Publication Number Publication Date
JPH11231328A true JPH11231328A (en) 1999-08-27

Family

ID=12413722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3442098A Pending JPH11231328A (en) 1998-02-17 1998-02-17 Method and device for sticking liquid crystal substrates to each other

Country Status (1)

Country Link
JP (1) JPH11231328A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6304311B1 (en) * 1998-11-16 2001-10-16 Matsushita Electric Industrial Co., Ltd. Method of manufacturing liquid crystal display device
JP2002040398A (en) * 2000-07-19 2002-02-06 Nec Corp Manufacturing device for liquid crystal display device and manufacturing method therefor
KR100503903B1 (en) * 2000-03-31 2005-07-26 미놀타가부시키가이샤 Method and apparatus for producing a display panel
JP2009192585A (en) * 2008-02-12 2009-08-27 Mitsubishi Electric Corp Substrate bonding device and substrate bonding method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6304311B1 (en) * 1998-11-16 2001-10-16 Matsushita Electric Industrial Co., Ltd. Method of manufacturing liquid crystal display device
KR100503903B1 (en) * 2000-03-31 2005-07-26 미놀타가부시키가이샤 Method and apparatus for producing a display panel
JP2002040398A (en) * 2000-07-19 2002-02-06 Nec Corp Manufacturing device for liquid crystal display device and manufacturing method therefor
JP4689797B2 (en) * 2000-07-19 2011-05-25 Nec液晶テクノロジー株式会社 Liquid crystal display device manufacturing apparatus and manufacturing method thereof
JP2009192585A (en) * 2008-02-12 2009-08-27 Mitsubishi Electric Corp Substrate bonding device and substrate bonding method

Similar Documents

Publication Publication Date Title
JP3828670B2 (en) Manufacturing method of liquid crystal display element
JP4199647B2 (en) Liquid crystal display element manufacturing apparatus and manufacturing method using the same
JP4078487B2 (en) Substrate assembly apparatus and method
US7936439B2 (en) Method and apparatus for stacking sheets, and method and apparatus for manufacturing liquid crystal display panel
KR100720414B1 (en) Method for manufacturing liquid crystal display device
JP2000137235A (en) Sticking method of liquid crystal substrate
JP2001215459A (en) Divice for manufacturing liquid crystal display element
JP2001066614A (en) Method for laminating substrate, laminating device and production of liquid crystal display device
JP2000310759A (en) Device for manufacturing liquid crystal display element and its method
JPH11231328A (en) Method and device for sticking liquid crystal substrates to each other
JPH11281988A (en) Production of liquid crystal display element
JP2001174835A (en) Glass substrate assembly device for liquid crystal display device and method for manufacturing liquid crystal display device
JPH11264990A (en) Method and device for sticking substrate
KR100720444B1 (en) Method for manufacturing liquid crystal display device
JP2000029051A (en) Manufacture of liquid crystal display device
JPH117031A (en) Sealing method and sealing device for liquid crystal cell
KR100720443B1 (en) Method for manufacturing liquid crystal display device
KR100261944B1 (en) A method for assembling the liquid crystal display and assembling apparatus
JP2002303871A (en) Manufacturing method and manufacturing apparatus for liquid crystal display device
KR100710154B1 (en) Method for manufacturing liquid crystal display device
JP2001264780A (en) Device and method for manufacture of liquid crystal display device
KR100688830B1 (en) Fabricating method of organic light emitting display device and fabricating apparatus of the same
JPH10333110A (en) Method for sticking substrate
JPH08201747A (en) Production of liquid crystal panel and device therefor
JP4449932B2 (en) Board assembly apparatus and board assembly method