JPH11221660A - Manufacture of vacuum chamber - Google Patents
Manufacture of vacuum chamberInfo
- Publication number
- JPH11221660A JPH11221660A JP2242598A JP2242598A JPH11221660A JP H11221660 A JPH11221660 A JP H11221660A JP 2242598 A JP2242598 A JP 2242598A JP 2242598 A JP2242598 A JP 2242598A JP H11221660 A JPH11221660 A JP H11221660A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- manufacturing
- aluminum
- molten metal
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Details (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造工程に
おいてウエハを収納する際に使用される真空チャンバの
製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a vacuum chamber used for storing a wafer in a semiconductor manufacturing process.
【０００２】[0002]
【従来の技術】半導体装置の製造装置においては、ウエ
ハに膜を形成するための複数個の反応処理チャンバと、
ウエハを各反応処理チャンバ間で移動させる際に、経由
地として使用されるトランスファチャンバとが設けられ
ている。反応処理チャンバにおいては、ウエハ上にＣＶ
Ｄ（化学気相成長）又はＰＶＤ（物理的気相成長）によ
り、種々の膜を形成する。そして、反応処理チャンバか
ら別の反応処理チャンバにウエハを移載する際には、一
旦、トランスファチャンバ内にウエハを移し、その後、
目的の反応処理チャンバにウエハを移動させる。なお、
反応処理チャンバにおいては、１０-9ｔｏｒｒという高
真空が必要であるが、トランスファチャンバにおいて
は、１０-3〜１０-4程度の真空で足りる真空チャンバで
ある。2. Description of the Related Art In a semiconductor device manufacturing apparatus, there are provided a plurality of reaction processing chambers for forming a film on a wafer;
When a wafer is moved between the respective reaction processing chambers, a transfer chamber used as a stopover is provided. In the reaction processing chamber, CV
Various films are formed by D (chemical vapor deposition) or PVD (physical vapor deposition). Then, when transferring a wafer from one reaction processing chamber to another reaction processing chamber, the wafer is once transferred into a transfer chamber, and then,
The wafer is moved to a target reaction processing chamber. In addition,
A high vacuum of 10 -9 torr is required in the reaction processing chamber, but a vacuum chamber of about 10 -3 to 10 -4 is sufficient for the transfer chamber.
【０００３】この真空チャンバは、従来、アルミニウム
合金板を箱状に組み立て、各板を溶接により接合して組
み立てるか、又は機械加工により板からの削り出しで製
作している。Conventionally, this vacuum chamber is manufactured by assembling an aluminum alloy plate into a box shape and joining the respective plates by welding, or by machining from the plate by machining.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、この従
来の真空チャンバは、アルミニウム板を溶接により接合
して組み立てているため、この溶接部に欠陥が発生する
虞があるという難点がある。また、この溶接部の欠陥を
防止するためには、溶接作業に熟練が必要であるという
難点がある。However, since this conventional vacuum chamber is assembled by joining aluminum plates by welding, there is a problem that a defect may occur in the welded portion. Further, there is a disadvantage that skill is required for welding work in order to prevent the defect of the welded portion.
【０００５】本発明はかかる問題点に鑑みてなされたも
のであって、溶接欠陥の発生を防止した真空チャンバの
製造方法を提供することを目的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide a method for manufacturing a vacuum chamber in which occurrence of welding defects is prevented.
【０００６】[0006]
【課題を解決するための手段】本発明に係る真空チャン
バの製造方法は、真空容器として使用される真空チャン
バの製造方法において、アルミニウム又はアルミニウム
合金からなる５枚の板を箱形状に仮組立し、砂型を前記
板との間に間隙を有して配置し、アルミニウム又はアル
ミニウム合金の溶湯を前記間隙に注入することにより、
前記板を前記溶湯で鋳ぐるみ、前記板組成を芯材とし、
前記溶湯組成を被覆材とする真空チャンバを製造するこ
とを特徴とする。According to a method of manufacturing a vacuum chamber according to the present invention, in a method of manufacturing a vacuum chamber used as a vacuum vessel, five plates made of aluminum or an aluminum alloy are temporarily assembled in a box shape. By arranging a sand mold with a gap between the plate and the molten metal of aluminum or aluminum alloy into the gap,
Casting the plate with the molten metal, using the plate composition as a core material,
A vacuum chamber using the molten metal composition as a coating material is manufactured.
【０００７】本発明に係る他の真空チャンバの製造方法
は、真空容器として使用される真空チャンバの製造方法
において、純アルミニウムからなる５枚の板を箱形状に
仮組立し、砂型を前記板との間に間隙を有して配置し、
Ａｌ−Ｓｉ系アルミニウム合金の溶湯を前記間隙に注入
することにより、前記板を前記溶湯で鋳ぐるみ、純アル
ミニウムを芯材とし、前記アルミニウム合金を被覆材と
する真空チャンバを製造することを特徴とする。Another method for manufacturing a vacuum chamber according to the present invention is a method for manufacturing a vacuum chamber used as a vacuum vessel, comprising: temporarily assembling five plates made of pure aluminum into a box shape; With a gap between them,
By injecting a molten metal of an Al-Si-based aluminum alloy into the gap, the plate is made of the molten metal, and a vacuum chamber is manufactured using pure aluminum as a core material and the aluminum alloy as a coating material. I do.
【０００８】本発明においては、例えば、純アルミニウ
ム板をＡｌ−Ｓｉ系合金等のアルミニウム合金の溶湯に
よる鋳ぐるみにより固定し、箱形状に組み立てるので、
溶接が不要であり、溶接に伴う欠陥が生じない。In the present invention, for example, a pure aluminum plate is fixed by casting with a molten metal of an aluminum alloy such as an Al-Si alloy and assembled in a box shape.
No welding is required, and no welding defects occur.
【０００９】[0009]
【発明の実施の形態】以下、本発明の実施例について、
添付の図面を参照して具体的に説明する。図１は本発明
の実施例方法を示す図である。側板１（１ａ、１ｂ、１
ｃ、１ｄ）と、底板（図示せず）との５枚の板を箱形状
に組合せ、ボルトで仮止めする。これにより、５枚の板
をチャンバ形状に仮組立する。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described.
This will be specifically described with reference to the accompanying drawings. FIG. 1 is a diagram showing a method according to an embodiment of the present invention. Side plate 1 (1a, 1b, 1
c, 1d) and a bottom plate (not shown) are combined in a box shape and temporarily fixed with bolts. Thereby, the five plates are temporarily assembled in a chamber shape.
【００１０】この側板１及び底板からなる５枚の純アル
ミニウム板をチャンバ形状に仮組立した後、その内部に
砂型２を配置し、外部に砂型３を配置する。砂型２は直
方体形状を有し、側板１に囲まれた空間内に、各側板１
との間に適長間隔を有して離隔するように配置されてい
る。また、側板１の外側に配置される砂型３は側板１を
囲むようにして、側板１との間に適長間隔をおいて配置
されている。After temporarily assembling the five pure aluminum plates comprising the side plate 1 and the bottom plate into a chamber shape, a sand mold 2 is arranged inside and a sand mold 3 is arranged outside. The sand mold 2 has a rectangular parallelepiped shape, and each side plate 1 is placed in a space surrounded by the side plates 1.
Are disposed so as to be separated from each other with an appropriate interval. Further, the sand mold 3 disposed outside the side plate 1 is disposed so as to surround the side plate 1 and to have an appropriate distance from the side plate 1.
【００１１】次いで、Ａｌ−Ｓｉ系アルミニウム合金の
溶湯を、側板１と砂型２，３との間の隙間に注入し、前
記アルミニウム合金溶湯を凝固させることにより、純ア
ルミニウムからなる側板１及び底板をＡｌ−Ｓｉ系アル
ミニウム合金溶湯で鋳ぐるむ。これにより、アルミニウ
ムが芯材、アルミニウム合金が前記芯材を被覆する被覆
材となる真空チャンバが組み立てられる。なお、側板１
及び底板は、その厚さが例えば３０ｍｍであり、鋳ぐる
む部分は片面５ｍｍづつ、両面で１０ｍｍとすることが
でき、これにより、肉厚が４０ｍｍのチャンバが製造さ
れる。Next, a molten metal of an Al-Si-based aluminum alloy is poured into a gap between the side plate 1 and the sand molds 2 and 3, and the molten aluminum alloy is solidified to form the side plate 1 and the bottom plate made of pure aluminum. It is cast in a molten Al-Si aluminum alloy. Thus, a vacuum chamber in which aluminum is a core material and an aluminum alloy is a coating material for coating the core material is assembled. The side plate 1
The bottom plate has a thickness of, for example, 30 mm, and the cast-in portion can be 5 mm on one side and 10 mm on both sides, thereby producing a chamber having a thickness of 40 mm.
【００１２】本実施例においては、芯材となる純アルミ
ニウム板をボルトにより仮止めした後、アルミニウム合
金の溶湯でこれを鋳ぐるむことにより、前記純アルミニ
ウム板からなる側板１及び底板を固定するから、溶接に
より接合した場合の溶接欠陥が回避される。このため、
本発明によれば、従来のように、溶接作業のために熟練
者が必要であるとか、溶接欠陥の検査が必要である等の
不都合が回避される。In this embodiment, a pure aluminum plate serving as a core material is temporarily fixed with bolts, and then is cast with a molten aluminum alloy to fix the side plate 1 and the bottom plate made of the pure aluminum plate. Therefore, welding defects when joining by welding are avoided. For this reason,
ADVANTAGE OF THE INVENTION According to this invention, the inconvenience that an expert is required for a welding operation | work and the inspection of a welding defect is needed like a conventional is avoided.
【００１３】なお、芯材としては、純アルミニウムの外
に、ＪＩＳ ５０００系又は６０００系アルミニウム合
金がある。これらの５０００系又は６０００系アルミニ
ウム合金はＣｕ及びＺｎを含有しないため、製造が容易
である。As the core material, there is JIS 5000 series or 6000 series aluminum alloy in addition to pure aluminum. Since these 5000 or 6000 aluminum alloys do not contain Cu and Zn, they are easy to manufacture.
【００１４】また、被覆材としては、Ａｌ−Ｓｉ系アル
ミニウム合金を使用すると、巣が発生しにくいため、好
ましい。It is preferable to use an Al-Si-based aluminum alloy as the coating material because cavities are less likely to occur.
【００１５】[0015]
【発明の効果】以上説明したように、本発明によれば、
熟練作業を要することなく、欠陥がない真空チャンバを
容易に製造することができる。As described above, according to the present invention,
A defect-free vacuum chamber can be easily manufactured without requiring a skilled operation.
【図１】本発明の実施例方法を示す図である。FIG. 1 is a diagram showing a method according to an embodiment of the present invention.
１，１ａ，１ｂ，１ｃ，１ｄ：側板 ２、３：砂型 1, 1a, 1b, 1c, 1d: side plate 2, 3: sand mold
Claims (3)
の製造方法において、アルミニウム又はアルミニウム合
金からなる５枚の板を箱形状に仮組立し、砂型を前記板
との間に間隙を有して配置し、アルミニウム又はアルミ
ニウム合金の溶湯を前記間隙に注入することにより、前
記板を前記溶湯で鋳ぐるみ、前記板組成を芯材とし、前
記溶湯組成を被覆材とする真空チャンバを製造すること
を特徴とする真空チャンバの製造方法。In a method of manufacturing a vacuum chamber used as a vacuum vessel, five plates made of aluminum or an aluminum alloy are temporarily assembled in a box shape, and a sand mold is arranged with a gap between the plates. Then, by injecting a molten metal of aluminum or aluminum alloy into the gap, the plate is cast with the molten metal, and a vacuum chamber is manufactured using the plate composition as a core material and the molten metal composition as a coating material. Manufacturing method of a vacuum chamber.
の製造方法において、純アルミニウムからなる５枚の板
を箱形状に仮組立し、砂型を前記板との間に間隙を有し
て配置し、Ａｌ−Ｓｉ系アルミニウム合金の溶湯を前記
間隙に注入することにより、前記板を前記溶湯で鋳ぐる
み、純アルミニウムを芯材とし、前記アルミニウム合金
を被覆材とする真空チャンバを製造することを特徴とす
る真空チャンバの製造方法。2. A method of manufacturing a vacuum chamber used as a vacuum vessel, wherein five plates made of pure aluminum are temporarily assembled in a box shape, and a sand mold is disposed with a gap between the plates. By injecting a molten metal of an Al-Si-based aluminum alloy into the gap, the plate is made of the molten metal, and a vacuum chamber is manufactured using pure aluminum as a core material and the aluminum alloy as a coating material. Of manufacturing a vacuum chamber.
フランジ部材も共に前記溶湯で鋳ぐるむことを特徴とす
る請求項１又は２に記載の真空チャンバの製造方法。3. The method for manufacturing a vacuum chamber according to claim 1, wherein a cooling pipe and a flange member are cast in the molten metal in addition to the box-shaped plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2242598A JPH11221660A (en) | 1998-02-03 | 1998-02-03 | Manufacture of vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2242598A JPH11221660A (en) | 1998-02-03 | 1998-02-03 | Manufacture of vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11221660A true JPH11221660A (en) | 1999-08-17 |
Family
ID=12082344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2242598A Pending JPH11221660A (en) | 1998-02-03 | 1998-02-03 | Manufacture of vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11221660A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008060683A1 (en) | 2007-12-20 | 2009-06-25 | Kurt Ansperger | Versatile vacuum chamber for vaporization or coating of samples, used e.g. in educational- and research establishments, includes lightweight, square tubular body |
| KR20170070538A (en) * | 2015-12-14 | 2017-06-22 | 주식회사 씨에이치솔루션 | Vacuum chamber casting apparatus, vacuum chamber manufacturing method and vacuum chamber manufactured by the method |
-
1998
- 1998-02-03 JP JP2242598A patent/JPH11221660A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008060683A1 (en) | 2007-12-20 | 2009-06-25 | Kurt Ansperger | Versatile vacuum chamber for vaporization or coating of samples, used e.g. in educational- and research establishments, includes lightweight, square tubular body |
| DE202008017738U1 (en) | 2007-12-20 | 2010-05-27 | Ansperger, Kurt | Vacuum chamber for vapor deposition or coating |
| KR20170070538A (en) * | 2015-12-14 | 2017-06-22 | 주식회사 씨에이치솔루션 | Vacuum chamber casting apparatus, vacuum chamber manufacturing method and vacuum chamber manufactured by the method |
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