JPH11219975A - Alignment method of solder ball - Google Patents

Alignment method of solder ball

Info

Publication number
JPH11219975A
JPH11219975A JP1840798A JP1840798A JPH11219975A JP H11219975 A JPH11219975 A JP H11219975A JP 1840798 A JP1840798 A JP 1840798A JP 1840798 A JP1840798 A JP 1840798A JP H11219975 A JPH11219975 A JP H11219975A
Authority
JP
Japan
Prior art keywords
solder balls
solder
solder ball
alignment plate
ball alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1840798A
Other languages
Japanese (ja)
Inventor
Shingo Sato
慎吾 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1840798A priority Critical patent/JPH11219975A/en
Publication of JPH11219975A publication Critical patent/JPH11219975A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • H05K3/3478Applying solder preforms; Transferring prefabricated solder patterns

Abstract

PROBLEM TO BE SOLVED: To provide a method for aligning solder balls wherein solder balls are put, one by one, in all recessed parts provided on a solder ball alignment plate for easy alignment of the solder balls in a specified array pattern, with no occurrence of flaw or recess with the solder balls. SOLUTION: A lot of solder balls 2 are thrown in a solder ball alignment plate 1 where a lot of recessed parts 5 which, the solder balls 2 which are to be external connection terminals of a semiconductor element housing package being put one by one, comprises suction holes 5a at bottom surfaces, are aligned in a specified array pattern, then, while suction air from the suction holes 5a, the solder ball alignment plate 1 is rocked so that the solder balls 2 are sucked in the recessed parts 5 one by one, after that, an air is blown to the solder ball alignment plate 1 for removing excessive solder balls 2 so that the solder balls 2 are aligned on the solder ball alignment plate 1. Thus, the solder balls 2 are easily aligned in a specified array pattern with no flaw or recess occurred.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、半導体素子収納用
パッケージの外部接続端子となる半田ボールを半田ボー
ル整列板上に所定の配列で整列させるための半田ボール
の整列方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for arranging solder balls, which serve as external connection terminals of a package for housing semiconductor elements, on a solder ball alignment plate in a predetermined arrangement.

【0002】[0002]

【従来の技術】近時、半導体素子を収容する半導体素子
収納用パッケージとしてボールグリッドアレイ(BG
A)型の半導体素子収納用パッケージが多用されるよう
になってきている。
2. Description of the Related Art In recent years, a ball grid array (BG) has been used as a package for accommodating semiconductor elements.
A) type semiconductor element storage packages are increasingly used.

【0003】このBGA型半導体素子収納用パッケージ
は、例えば図2に断面図で示すように、半導体素子11を
収容するアルミナセラミックス等から成る絶縁容器12の
下面に、配線導体13およびボンディングワイヤ14を介し
て半導体素子11の電極に電気的に接続される半田ボール
から成る多数の外部接続端子15をほぼ格子(グリッド)
状の配列で取着させて成るものである。
In this BGA type semiconductor element housing package, as shown in a sectional view of FIG. 2, for example, a wiring conductor 13 and a bonding wire 14 are provided on the lower surface of an insulating container 12 made of alumina ceramic or the like for housing a semiconductor element 11. A large number of external connection terminals 15 composed of solder balls electrically connected to the electrodes of the semiconductor element 11 through a grid
They are attached in an array of shapes.

【0004】このBGA型半導体素子収納用パッケージ
は、内部に半導体素子11を収容した後、絶縁容器12の下
面に設けた半田ボールから成る外部接続端子15を図示し
ない外部配線基板の配線導体に半田リフロー等により接
続することによって内部に収容する半導体素子11が外部
電気回路に接続されるものであり、小型であって、かつ
高密度の表面実装が可能である。
In this package for housing a BGA type semiconductor device, after a semiconductor device 11 is housed inside, an external connection terminal 15 composed of a solder ball provided on a lower surface of an insulating container 12 is soldered to a wiring conductor of an external wiring board (not shown). The semiconductor element 11 housed inside by connection by reflow or the like is connected to an external electric circuit, and it is small and high-density surface mounting is possible.

【0005】このBGA型半導体素子収納用パッケージ
の絶縁容器12の下面に半田ボールから成る多数の外部接
続端子15を格子状の配列で取着させるには、絶縁容器12
の下面に、例えば表面にニッケルめっきや金めっきが施
されたタングステンメタライズ等から成る多数の接続パ
ッド16を配線導体13と電気的に接続されるようにして所
定の格子状の配列で設けておくとともに、これらの各接
続パッド16に半田ボールを位置合わせして当接させ、こ
れを加熱して半田ボールから成る外部接続端子15を接続
パッド16に溶着する方法が採用される。
In order to attach a large number of external connection terminals 15 made of solder balls to the lower surface of the insulating container 12 of the package for storing a BGA type semiconductor element, it is necessary to use an insulating container 12.
A large number of connection pads 16 made of, for example, a tungsten metallized metal plated with nickel or gold on the lower surface are provided in a predetermined lattice arrangement so as to be electrically connected to the wiring conductor 13. At the same time, a method is adopted in which the solder balls are aligned and brought into contact with these connection pads 16, which are heated to weld the external connection terminals 15 made of solder balls to the connection pads 16.

【0006】このとき、絶縁容器12の下面に被着させた
接続パッド16の各々に外部接続端子15となる半田ボール
を1個づつ別々に位置合わせするのは極めて煩雑な作業
となるため、通常は、接続パッド16に溶着されるべき全
ての半田ボールを予め所定の格子状の配列で整列させて
おき、これら整列された半田ボールと接続パッド16とを
一括して位置決めする方法が採用されている。
At this time, it is extremely troublesome work to individually and individually position solder balls to be the external connection terminals 15 on the connection pads 16 attached to the lower surface of the insulating container 12, respectively. A method is adopted in which all solder balls to be welded to the connection pads 16 are previously aligned in a predetermined lattice-like arrangement, and the aligned solder balls and the connection pads 16 are collectively positioned. I have.

【0007】従来、半田ボールを所定の格子状の配列で
整列させる方法としては、下記またはのような方法
が採用されている。
Conventionally, the following method has been adopted as a method for aligning solder balls in a predetermined lattice-like arrangement.

【0008】 図3に断面図で、また図4に図3の部
分拡大断面図で示すように、半田ボール21を1個づつ収
容可能でかつ底面に吸引孔22aを有する多数の凹部22が
上面に所定の格子状の配列で形成された半田ボール整列
板23の上に多数の半田ボール21を投入し、しかる後、吸
引孔22aから下方に空気を吸引しながら半田ボール整列
板23を揺動させることにより半田ボール21を各々の凹部
22内に収容させ整列させる方法。
As shown in the sectional view of FIG. 3 and the partially enlarged sectional view of FIG. 3, a large number of recesses 22 capable of accommodating solder balls 21 one by one and having suction holes 22 a on the bottom surface are formed on the top surface. Then, a large number of solder balls 21 are put on the solder ball alignment plate 23 formed in a predetermined lattice arrangement, and then the solder ball alignment plate 23 is swung while sucking air downward from the suction holes 22a. The solder balls 21
How to house and align in 22.

【0009】 図5に断面図で示すように、半田ボー
ル31を多数収容可能な箱体32の中に多数の半田ボール31
を投入するとともに、この箱体32の上方に所定の格子状
の配列で吸引孔33aを設けた吸着ヘッド33を配置し、吸
着ヘッド33の吸引孔33aから上方すなわち箱体32の外側
方向に空気を吸引しながら箱体32に振動を与えることに
よって、あるいは箱体32に設けられた図示しない空気吹
出孔から箱体32内に空気を吹き出すことによって、箱体
32内の半田ボール31を吸着ヘッド33に到達するように跳
ね上げ、跳ね上がった半田ボール31を吸着ヘッド33の吸
引孔33aに吸着させることによって整列させる方法。
As shown in a sectional view in FIG. 5, a large number of solder balls 31 are placed in a box 32 capable of accommodating a large number of solder balls 31.
A suction head 33 provided with suction holes 33a in a predetermined lattice arrangement is arranged above the box 32, and air is drawn upward from the suction holes 33a of the suction head 33, that is, outside the box 32. By applying vibration to the box 32 while sucking air, or by blowing air into the box 32 from an air outlet (not shown) provided in the box 32.
A method in which the solder balls 31 in 32 are flipped up to reach the suction head 33, and the jumped-up solder balls 31 are sucked into suction holes 33a of the suction head 33 to be aligned.

【0010】[0010]

【発明が解決しようとする課題】しかしながら、上記
の方法では、図4に示すように、吸引孔22aからの吸引
力により2〜3個の複数の半田ボール21が1つの凹部22
に同時に引き寄せられ、これらが互いにバランスをとっ
たまま横に並んで凹部22上を塞ぐようにして凹部22に吸
着されてしまいやすく、その結果、半田ボール整列板23
の全ての凹部22内に1個ずつの半田ボール21を収容させ
て所定の格子状の配列で整列させることが困難であると
いう問題点を有していた。
However, in the above method, as shown in FIG. 4, a plurality of solder balls 21 are formed in one recess 22 by suction force from suction holes 22a.
At the same time, these are arranged side by side while keeping a balance with each other, so that they are easily attracted to the recesses 22 so as to cover the recesses 22. As a result, the solder ball alignment plate 23
However, it is difficult to accommodate the solder balls 21 one by one in all the recesses 22 and to arrange them in a predetermined lattice-like arrangement.

【0011】また、上記の方法では、吸着ヘッド33の
1つの吸着孔33aに複数の半田ボール31が同時に吸い寄
せられることは皆無に等しいものの、半田ボール31を跳
ね上がらせる際に、半田ボール31と箱体32や吸着ヘッド
33とが、あるいは半田ボール31同士が激しく衝突するた
め、半田ボール31に傷や凹みを付けてしまうという問題
点があった。そして半田ボール31に傷や凹みがあるた
め、半田ボール31を半導体素子収納用パッケージの絶縁
容器の底面に設けられた接続パッドに当接させて溶着し
た際に、半田ボール31の傷や凹みと接続パッドとの間の
空気が溶着部に巻き込まれてしまい、その結果、半田ボ
ール31の接続パッドに対する取着強度が弱いものとなっ
てしまうという欠点を発生させるという問題点もあっ
た。
In the above-mentioned method, the plurality of solder balls 31 are not simultaneously sucked into one suction hole 33a of the suction head 33 at all. Body 32 and suction head
33 or the solder balls 31 violently collide with each other, so that there is a problem that the solder balls 31 are scratched or dented. Since the solder balls 31 have flaws and dents, when the solder balls 31 are welded by contacting the connection pads provided on the bottom surface of the insulating container of the semiconductor element storage package, the solder balls 31 There is also a problem that air between the connection pad and the connection pad is caught in the welded portion, and as a result, the strength of attachment of the solder ball 31 to the connection pad becomes weak.

【0012】本発明は上記事情に鑑みて案出されたもの
であり、その目的は、半田ボール整列板に設けられたす
べての凹部に1個ずつの半田ボールを収容して所定の配
列で半田ボールを容易に整列させることができ、しかも
半田ボールに傷や凹みを発生させることがない半田ボー
ルの整列方法を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to accommodate a single solder ball in every recess provided in a solder ball alignment plate and to form a solder in a predetermined arrangement. An object of the present invention is to provide a method of aligning solder balls that can easily align balls and does not cause scratches or dents in the solder balls.

【0013】[0013]

【課題を解決するための手段】本発明の半田ボールの整
列方法は、半導体素子収納用パッケージの外部接続端子
となる半田ボールを1個づつ収容可能であり、かつ底面
に吸引孔を有する多数の凹部が所定の配列で整列されて
いる半田ボール整列板上に多数の前記半田ボールを投入
し、次に前記吸引孔から空気を吸引しながら前記半田ボ
ール整列板を揺動して前記凹部内に前記半田ボールをそ
れぞれ1個ずつ吸着させ、しかる後、前記半田ボール整
列板上に空気を吹き付け、余分な前記半田ボールを除去
して前記半田ボール整列板に前記半田ボールを整列させ
ることを特徴とするものである。
According to the method of arranging solder balls of the present invention, a plurality of solder balls, each of which is capable of accommodating a solder ball to be an external connection terminal of a package for accommodating a semiconductor element, and having a suction hole on a bottom surface, are provided. A large number of the solder balls are put on the solder ball alignment plate in which the concave portions are aligned in a predetermined arrangement, and then the solder ball aligning plate is swung while sucking air from the suction holes to enter the concave portion in the concave portion. Adsorbing the solder balls one by one, and then blowing air on the solder ball alignment plate, removing excess solder balls and aligning the solder balls on the solder ball alignment plate. Is what you do.

【0014】本発明の半田ボール整列方法によれば、半
田ボール整列板上に所定の配列で形成された多数の凹部
の各々に、凹部底面の吸引孔から空気を吸引しながら半
田ボール整列板を揺動して、1個もしくは複数個の半田
ボールを吸着させた後、半田ボール整列板上に空気を吹
き付けて余分な半田ボールを除去することから、1つの
凹部に2〜3個の複数個の半田ボールが同時に吸着され
ていたとしても、空気が吹き付けられることにより1つ
の凹部に吸着された複数の半田ボールの吸着のバランス
がくずれ、これらの半田ボールのうち1個だけが凹部に
収容されることとなる。従って、半田ボール整列板に所
定の配列で設けられたすべての凹部に1個ずつの半田ボ
ールを収容して半田ボールを容易に整列させることがで
きる。
According to the solder ball aligning method of the present invention, the solder ball aligning plate is inserted into each of the plurality of concave portions formed in a predetermined arrangement on the solder ball aligning plate while sucking air from the suction holes on the bottom surface of the concave portion. After swinging and adsorbing one or more solder balls, air is blown onto the solder ball alignment plate to remove excess solder balls. Even if the solder balls are sucked simultaneously, the air is blown out, so the suction balance of the plurality of solder balls sucked in one recess is lost, and only one of the solder balls is accommodated in the recess. The Rukoto. Therefore, the solder balls can be easily aligned by accommodating one solder ball at a time in all the recesses provided in the solder ball alignment plate in a predetermined arrangement.

【0015】また本発明の半田ボールの整列方法によれ
ば、半田ボールは、半田ボール整列板を揺動することに
より整列されることから、半田ボールと半田ボール整列
板とが、あるいは半田ボール同士が激しく衝突して半田
ボールに傷や凹みを発生させることがない。
Further, according to the solder ball alignment method of the present invention, the solder balls are aligned by swinging the solder ball alignment plate, so that the solder balls and the solder ball alignment plate or the solder balls are aligned. Does not damage the solder ball due to heavy collision.

【0016】[0016]

【発明の実施の形態】次に、本発明の半田ボール整列方
法を添付の図面を基に詳細に説明する。
Next, a method for aligning solder balls according to the present invention will be described in detail with reference to the accompanying drawings.

【0017】図1(a)〜(d)は、本発明の半田ボー
ル整列方法の実施の形態の一例を説明するための工程毎
の断面図であり、同図において1は半田ボール整列板、
2は半導体素子収納用パッケージの外部接続端子となる
半田ボールである。
1 (a) to 1 (d) are cross-sectional views for explaining steps of an embodiment of a method of arranging solder balls according to the present invention. In FIG.
Reference numeral 2 denotes a solder ball serving as an external connection terminal of the package for housing a semiconductor element.

【0018】先ず、図1(a)に示すように、半田ボー
ル2を整列するための半田ボール整列板1を準備する。
First, as shown in FIG. 1A, a solder ball alignment plate 1 for aligning solder balls 2 is prepared.

【0019】半田ボール整列板1は、例えばベークライ
ト等の硬質樹脂やステンレス等の金属、あるいはこれら
の材料を組み合わせて成り、その上面中央部に半田ボー
ル2が整列される整列領域3を、またその上面外周部に
は整列領域3から10〜100 mm程度離れた位置に枠部4
を有している。
The solder ball alignment plate 1 is made of a hard resin such as bakelite, a metal such as stainless steel, or a combination of these materials, and has an alignment region 3 in which the solder balls 2 are aligned in the center of the upper surface thereof. At the outer periphery of the upper surface, a frame 4
have.

【0020】半田ボール整列板1の整列領域3には、底
面に吸引孔5aを有する凹部5が所定の格子状の配列で
形成されている。
In the alignment region 3 of the solder ball alignment plate 1, concave portions 5 having suction holes 5a on the bottom surface are formed in a predetermined lattice arrangement.

【0021】凹部5は、その内部に半田ボール2を1個
づつ収容可能な大きさ、具体的には半田ボール2の直径
より0.1 mm程度大きい直径で、半田ボール2の半径と
同じ程度の深さを有する凹部であり、さらにその底面に
は半田ボール2の直径より小さな直径の吸引孔5aを有
しており、この吸引孔5aから空気を下方に吸引するこ
とによって凹部5内に収容された半田ボール2を吸着保
持することが可能である。
The recess 5 has a size capable of accommodating the solder balls 2 therein one by one, more specifically, a diameter that is about 0.1 mm larger than the diameter of the solder ball 2 and has a depth about the same as the radius of the solder ball 2. The suction hole 5a having a diameter smaller than the diameter of the solder ball 2 is provided on the bottom surface thereof, and the air is accommodated in the recess 5 by sucking air downward from the suction hole 5a. It is possible to hold the solder ball 2 by suction.

【0022】枠部4は、半田ボール整列板1の外周部に
整列領域3の上面から2〜5cm程度の高さに立設され
ており、後述するように半田ボール整列板1上に半田ボ
ール2を投入して半田ボール整列板1を揺動させる際
に、半田ボール2が半田ボール整列板1上から外部にこ
ぼれ落ちるのを防止する作用をなす。
The frame portion 4 is erected on the outer peripheral portion of the solder ball alignment plate 1 at a height of about 2 to 5 cm from the upper surface of the alignment region 3, and is placed on the solder ball alignment plate 1 as described later. When the solder ball 2 is inserted and the solder ball aligning plate 1 is swung, the solder ball 2 prevents the solder ball 2 from spilling out of the solder ball aligning plate 1 to the outside.

【0023】次に、図1(b)に示すように、半田ボー
ル整列板1上に多数の半田ボール2を適量投入する。こ
のとき、投入する半田ボール2の数は、半田ボール整列
板1に形成された凹部5の数に対しておよそ5〜50倍の
数が好ましい。投入する半田ボール2の数が凹部5の数
に対して5倍未満では、後述するように凹部5の吸引孔
5aから下方に空気を吸引しながら半田ボール整列板1
を揺動させて各凹部5内に半田ボール2を吸着させる際
に、半田ボール整列板1上の半田ボール2の分布がまば
らとなりすぎて凹部5内に1個ずつの半田ボール2を効
率良く吸着させることができなくなる傾向にあり、また
50倍を超えると半田ボール整列板1上の半田ボール2の
分布が密なものとなりすぎて半田ボール2の動きが大き
く抑制され、やはり各凹部5内に1個ずつの半田ボール
2を効率良く吸着させることが困難となる傾向にある。
Next, as shown in FIG. 1B, a suitable number of solder balls 2 are put on the solder ball alignment plate 1. At this time, the number of the solder balls 2 to be charged is preferably about 5 to 50 times the number of the concave portions 5 formed in the solder ball alignment plate 1. If the number of the solder balls 2 to be supplied is less than five times the number of the concave portions 5, the solder ball aligning plate 1 is drawn while sucking air downward from the suction holes 5a of the concave portions 5 as described later.
When the solder balls 2 are adsorbed in the recesses 5 by swinging the solder balls 2, the distribution of the solder balls 2 on the solder ball alignment plate 1 becomes too sparse, and the solder balls 2 are efficiently placed one by one in the recesses 5. Tends to be unable to be adsorbed, and
If it exceeds 50 times, the distribution of the solder balls 2 on the solder ball alignment plate 1 becomes too dense, and the movement of the solder balls 2 is greatly suppressed. Adsorption tends to be difficult.

【0024】次に、図1(c)に示すように、図示しな
い吸引装置により半田ボール整列板1の凹部5の底面に
設けた吸引孔5aから400 〜600 mmHg程度の圧力で
下方に空気を吸引しながら、半田ボール整列板1を±約
30〜60゜の角度、2〜5秒/回の周期で1〜2回揺動す
ることによって、半田ボール整列板1の各凹部5に半田
ボール2を吸着する。
Next, as shown in FIG. 1 (c), air is drawn downward at a pressure of about 400 to 600 mmHg from a suction hole 5a provided on the bottom surface of the concave portion 5 of the solder ball alignment plate 1 by a suction device (not shown). While sucking, solder ball alignment plate 1
The solder ball 2 is attracted to each recess 5 of the solder ball alignment plate 1 by swinging once or twice at an angle of 30 to 60 ° and a cycle of 2 to 5 seconds / time.

【0025】この場合、半田ボール2は半田ボール整列
板1の揺動により半田ボール整列板1上を転がるだけな
ので、半田ボール2と半田ボール整列板1とが、あるい
は半田ボール2同士が激しく衝突して、半田ボール2に
傷や凹みが発生することはない。従って、この半田ボー
ル2を半導体素子収納用パッケージの絶縁容器の底面に
設けられた接続パッドに溶着させる際に、傷や凹みのた
めに接続パッドと半田ボール2との間に空気を巻き込む
ことはなく、半田ボール2から成る外部接続端子を接続
パッドに強固に取着させることができる。
In this case, since the solder ball 2 only rolls on the solder ball alignment plate 1 by the swing of the solder ball alignment plate 1, the solder ball 2 and the solder ball alignment plate 1 or the solder balls 2 collide violently. Thus, no scratches or dents occur in the solder ball 2. Therefore, when the solder balls 2 are welded to the connection pads provided on the bottom surface of the insulating container of the semiconductor device housing package, air is not entrapped between the connection pads and the solder balls 2 due to scratches or dents. In addition, the external connection terminals made of the solder balls 2 can be firmly attached to the connection pads.

【0026】なお、このとき各凹部5のいくつかには2
〜3個の半田ボール2が同時に吸着されることがあり、
1つの凹部5に2〜3個の半田ボール2が吸着された場
合には、1つの凹部5上を2〜3個の半田ボール2が横
に並んで塞ぐ形となり、従ってこの凹部5内には半田ボ
ール2が収容されていない状態となっている。
At this time, some of the recesses 5 have 2
~ 3 solder balls 2 may be adsorbed simultaneously,
When two or three solder balls 2 are sucked into one recess 5, two or three solder balls 2 are arranged side by side on one recess 5 so as to close the recess. Is in a state where the solder ball 2 is not accommodated.

【0027】そこで、図1(d)に示すように、孔径が
0.5 〜2mm程度の空気吹き付けノズル6により空気を
半田ボール整列板1上にその上面に対して約20〜40゜の
角度から2〜5気圧の圧力で0.5 〜2秒間程度吹き付け
て整列領域3上の余分な半田ボール2を除去して、各凹
部5の内部に1個づつの半田ボール2を収容する。
Therefore, as shown in FIG.
Air is sprayed onto the solder ball alignment plate 1 from the angle of about 20 to 40 ° at a pressure of 2 to 5 atmospheres for about 0.5 to 2 seconds from the angle of about 20 to 40 ° to the alignment area 3 by an air blowing nozzle 6 of about 0.5 to 2 mm. The excess solder balls 2 are removed, and one solder ball 2 is accommodated in each recess 5.

【0028】この場合、2〜3個の複数の半田ボール2
が同時に吸着されている、凹部5においては、空気の吹
き付けにより半田ボール2の吸着のバランスがくずれ、
そのうちの1個だけが凹部5内に収容されることとな
る。
In this case, two or three solder balls 2
Are sucked at the same time, in the recess 5, the balance of the suction of the solder ball 2 is lost by blowing air,
Only one of them will be accommodated in the recess 5.

【0029】なお、空気の吹き付けの角度や圧力・時間
等は、半田ボール2の大きさや数等に応じて概ね前述の
範囲内で適宜決定すれば良い。
It should be noted that the angle, pressure, time, etc. of the air blowing may be determined appropriately within the above-described range according to the size and number of the solder balls 2.

【0030】かくして本発明の半田ボールの整列方法に
よれば、半田ボール2に傷や凹みを発生させることな
く、半田ボール2を半田ボール整列板1の整列領域3に
おいて所定の格子状の配列で容易に整列させることがで
きる。
Thus, according to the method of arranging solder balls of the present invention, the solder balls 2 are arranged in a predetermined grid-like arrangement in the alignment area 3 of the solder ball alignment plate 1 without causing scratches or dents in the solder balls 2. Can be easily aligned.

【0031】[0031]

【発明の効果】本発明の半田ボール整列方法によれば、
半田ボール整列板を揺動して所定の配列に形成された各
凹部に半田ボールを吸着した後、半田ボール整列板上に
空気を吹き付けて余分な半田ボールを除去することか
ら、1つの凹部に複数個の半田ボールが同時に吸着され
ていたとしても空気を吹き付けることにより1つの凹部
に吸着された複数の半田ボールの吸着のバランスがくず
れてそのうちの1個だけが凹部に収容されることとなる
ので、すべての凹部に1個づつの半田ボールを収容して
半田ボールを所定の格子状の配列で容易に整列させるこ
とができる。
According to the solder ball alignment method of the present invention,
After the solder ball aligning plate is swung to adsorb the solder balls into the concave portions formed in a predetermined arrangement, air is blown onto the solder ball aligning plate to remove excess solder balls. Even if a plurality of solder balls are adsorbed at the same time, the air is blown to blow the air out of balance of the plurality of solder balls adsorbed in one recess, and only one of them is accommodated in the recess. Therefore, solder balls can be accommodated one by one in all the concave portions, and the solder balls can be easily arranged in a predetermined lattice-like arrangement.

【0032】また、本発明の半田ボールの整列方法によ
れば、半田ボールは、半田ボール整列板を揺動すること
により整列されることから、半田ボール整列板上を転が
るだけなので、半田ボールと半田ボール整列板とが、あ
るいは半田ボール同士が激しく衝突して半田ボールに溶
着工程において問題となるような傷や凹みを発生させる
ことはない。従って、半導体素子収納用パッケージの絶
縁容器の下面に設けられた接続パッドに外部接続端子と
して半田ボールを溶着する際に、接続パッドと半田ボー
ルとの間に傷や凹みに起因して空気を巻き込むことがな
くなり、半田ボールから成る外部接続端子を絶縁容器の
接続パッドに強固に取着させることができる。
According to the solder ball alignment method of the present invention, since the solder balls are aligned by swinging the solder ball alignment plate, they only roll on the solder ball alignment plate. The solder ball alignment plate or the solder balls do not violently collide with each other and do not cause scratches or dents which may cause a problem in the welding step on the solder balls. Therefore, when a solder ball is welded as an external connection terminal to a connection pad provided on the lower surface of the insulating container of the semiconductor element storage package, air is trapped between the connection pad and the solder ball due to a scratch or a dent. Therefore, the external connection terminals made of solder balls can be firmly attached to the connection pads of the insulating container.

【0033】以上により、本発明によれば、半田ボール
整列板に設けられたすべての凹部に1個ずつの半田ボー
ルを収容して所定の配列で半田ボールを容易に整列させ
ることができ、しかも半田ボールに傷や凹みを発生させ
ることがない半田ボールの整列方法を提供することがで
きた。
As described above, according to the present invention, all the recesses provided in the solder ball alignment plate can accommodate one solder ball at a time, and can easily align the solder balls in a predetermined arrangement. A method of aligning solder balls without causing scratches or dents in the solder balls can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)〜(d)は、それぞれ本発明の半田ボー
ルの整列方法の実施の形態の一例を説明するための工程
毎の断面図である。
1 (a) to 1 (d) are cross-sectional views for explaining steps of an embodiment of a method for aligning solder balls according to the present invention.

【図2】半田ボールから成る外部接続端子が取着された
ボールグリッドアレイ型半導体素子収納用パッケージを
示す断面図である。
FIG. 2 is a cross-sectional view showing a ball grid array type semiconductor element housing package to which external connection terminals made of solder balls are attached.

【図3】従来の半田ボールの整列方法を説明するための
断面図である。
FIG. 3 is a cross-sectional view for explaining a conventional solder ball alignment method.

【図4】図3に示す半田ボール整列方法における要部拡
大断面図である。
FIG. 4 is an enlarged sectional view of a main part in the solder ball alignment method shown in FIG. 3;

【図5】従来の他の半田ボールの整列方法を説明するた
めの断面図である。
FIG. 5 is a cross-sectional view for explaining another conventional solder ball alignment method.

【符号の説明】[Explanation of symbols]

1・・・・半田ボール整列板 2・・・・半田ボール 3・・・・整列領域 5・・・・凹部 5a・・・吸引孔 1 ··· Solder ball alignment plate 2 ··· Solder ball 3 ··· Alignment area 5 ··· Depression 5a ··· Suction hole

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 半導体素子収納用パッケージの外部接続
端子となる半田ボールを1個づつ収容可能であり、かつ
底面に吸引孔を有する多数の凹部が所定の配列で整列さ
れている半田ボール整列板上に多数の前記半田ボールを
投入し、次に前記吸引孔から空気を吸引しながら前記半
田ボール整列板を揺動して前記凹部内に前記半田ボール
をそれぞれ1個ずつ吸着させ、しかる後、前記半田ボー
ル整列板上に空気を吹き付け、余分な前記半田ボールを
除去して前記半田ボール整列板に前記半田ボールを整列
させることを特徴とする半田ボールの整列方法。
1. A solder ball alignment plate capable of accommodating one by one a solder ball to be an external connection terminal of a package for accommodating a semiconductor element, and having a plurality of concave portions having suction holes on a bottom surface arranged in a predetermined arrangement. Put a large number of the solder balls on the top, then swing the solder ball alignment plate while sucking air from the suction holes to adsorb the solder balls one by one in the recess, and then, A method of arranging solder balls, comprising blowing air onto the solder ball alignment plate, removing excess solder balls, and aligning the solder balls with the solder ball alignment plate.
JP1840798A 1998-01-30 1998-01-30 Alignment method of solder ball Pending JPH11219975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1840798A JPH11219975A (en) 1998-01-30 1998-01-30 Alignment method of solder ball

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1840798A JPH11219975A (en) 1998-01-30 1998-01-30 Alignment method of solder ball

Publications (1)

Publication Number Publication Date
JPH11219975A true JPH11219975A (en) 1999-08-10

Family

ID=11970826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1840798A Pending JPH11219975A (en) 1998-01-30 1998-01-30 Alignment method of solder ball

Country Status (1)

Country Link
JP (1) JPH11219975A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004200398A (en) * 2002-12-18 2004-07-15 K-Tech Devices Corp Electronic component with conductive ball connected to terminal thereof and its manufacturing method
KR20160006460A (en) * 2014-07-09 2016-01-19 삼성전기주식회사 Ball mounter head
JP2016026120A (en) * 2010-05-03 2016-02-12 ア レイモン エ シーA. Raymond Et Cie Process and apparatus for arranging adhesion element on matrix

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004200398A (en) * 2002-12-18 2004-07-15 K-Tech Devices Corp Electronic component with conductive ball connected to terminal thereof and its manufacturing method
JP2016026120A (en) * 2010-05-03 2016-02-12 ア レイモン エ シーA. Raymond Et Cie Process and apparatus for arranging adhesion element on matrix
KR20160006460A (en) * 2014-07-09 2016-01-19 삼성전기주식회사 Ball mounter head

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