JPH11218238A - Gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the reliability and the like, by locking in a gate opening condition and a gate closing condition, and preventing the operation of the gate by pressure change in a chamber, the dead weight of the gate, and the like. SOLUTION: A stem 8 and a gate 2 are moved in the axial direction by an air cylinder 19, and when the gate 2 is opposed to a flow passage port 3, the stem 8 and the gate 2 are oscillated to open and close the flow passage port 3 by a cam mechanism which consists of a roller cam 26 having a cam groove 25, a roller 24 for cam, and the like. A piston type lock device 40 which is engaged to a piston 19' by the bottom side and the top side of the air cylinder device 19, and locks the gate blocking and the gate releasing respectively, is also provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a gate valve particularly suitable for use in a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art Conventionally, as a gate valve of this kind,
With the expansion and contraction of the cylinder device, the gate is moved to a forward position facing the flow path port and a retreat position perpendicular to the axis of the flow path port, and the gate is moved along the axial direction of the flow path port at the forward position. There has been known a configuration in which the flow path port is opened and closed. Or by swinging the gate with the stem in the advanced position as described above,
A configuration that opens and closes a flow path port is known.

[0003]

By the way, when the gate valve is used particularly as a partition for transferring a wafer in a semiconductor manufacturing apparatus, the pressure in the chamber, the weight of the gate, and the weight of the gate are reduced when the operating pressure of the cylinder device is lost. The gate operates due to inertia or the like, and may destroy the wafer transfer device. Also, when the gate valve is mounted downward, if the operating pressure is lost and the gate operates as described above, the sealing surface may be rubbed and particles may be generated. In some cases, the gate valve is mounted horizontally, and it is desired that the gate be mechanically locked whether the valve is closed or opened.

The present invention is intended to solve the above-mentioned conventional problems. When the operating pressure of the cylinder device is lost, the gate operates due to a change in pressure in the chamber, the weight of the gate, the inertia of the gate, and the like. Accordingly, it is an object of the present invention to provide a gate valve capable of preventing the occurrence of the above-mentioned problem and improving the reliability.

[0005]

According to the present invention, there is provided a gate valve which can open and close a flow path opening, a forward position facing the flow path opening, and an axial center of the flow path opening. Moving means having a cylinder device for moving the gate so as to open and close the flow port at the forward position while moving the gate to a retreat position in a direction perpendicular to the opening direction; Locking means for locking the expansion and contraction operation of the cylinder device at at least one of the positions.

[0006] In the above construction, as the moving means, a cylinder device, a stem supporting the gate, and the stem are supported so as to be axially movable between a forward position and a retracted position, and to be swingable at the forward position. And a swinging device that moves the stem in the axial direction as the cylinder device expands and contracts and swings the stem at a forward position.

As a swinging device, a cam plate attached to a piston rod of a cylinder device, a roller cam having a cam groove attached to the cam plate, a roller holder attached to a stem, and a roller holder And a cam roller engaged with the cam groove of the roller cam for swinging the stem, and a spring for urging the stem and the gate toward the open side of the flow path port.

The cam groove of the roller cam may have a gentle slope, and the flow path port may be closed by a gate in a state where the cam roller is positioned on the slope.

As a locking means, a mounting hole formed in the housing of the cylinder device, a lock housing which is mounted in the mounting hole in a sealed state and has an air supply hole around the distal end portion, and a mounting means which is mounted on the lock pin housing. A lock pin flange having an air communication hole, and a slidably supported seal inside the lock housing and the lock pin flange. A piston pin that can be engaged or disengaged and a spring that urges the piston pin toward the engagement side with the piston can be provided.

[0010]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a gate valve according to an embodiment of the present invention. First, a first embodiment of the present invention will be described. As shown in FIGS. 1 to 7, O 2 is provided on the peripheral edge of the surface of the gate 2 that opens and closes the flow path opening 3 of the body 1.
A ring 4 is provided. The stem 8 of the gate 2 protrudes from the body 1 and is inserted into the bellows 14 in a sealed state, and is connected to the upper end of the bellows 14.
5 is supported. A heater (not shown) is provided on the back surface of the gate 2 opposite to the O-ring 4 as necessary. A sheath heater 51 is provided on the outer periphery of the bellows 14 as necessary. A fulcrum roller 18 is pivotally supported on both sides of the stem holder 15, and each fulcrum roller 18 is opposed to a housing 20 of a pair of air cylinder devices 19 mounted on both sides of the body 1 in the axial direction of the piston rod 22. It is supported movably and rotatably in a guide groove 21 formed along. Both ends of the cam plate 23 are connected to the upper ends of the piston rods 22 of the air cylinder devices 19 on both outer sides.

The cam grooves 25 are formed on both sides of the inner surface of the cam plate 23.
A pair of roller cams 26 are mounted so as to be position-adjustable by long holes 23a and screws 23b. A roller holder 27 coupled to the upper end of the stem 8 is movably disposed at the center of the cam plate 23, and cam rollers 24 are supported on both sides of the roller holder 27.
The pair of cam rollers 24 are engaged with the cam grooves 25 of the roller cam 26. Therefore, in a state where the fulcrum roller 18 is positioned at the end of the guide groove 21 on the body 1 side, the piston rod 2 of the air cylinder device 19 is controlled.
The cam roller 24 is moved along the cam groove 25 by moving the cam plate 23 and the roller cam 26 with the expansion and contraction of the stem 2, and the stem 8, the gate 2, and the like are oscillated via the fulcrum roller 18. It has become.

As is apparent from FIGS. 3 and 6, the cam groove 25 is formed to have a gentle and straight inclined surface. The stem 8, the gate 2, and the like are swung as described above, and the cam roller 24 is set to stop halfway along the inclined surface of the cam groove 25 with the flow path port 3 closed by the gate 2. I have. Further, since the roller cam 26 is mounted on the cam plate 23 so as to be adjustable as described above, the swing angle range of the stem 8, the gate 2, and the like can be easily and accurately set. Springs 30 are stretched on both sides of the stem holder 14 and opposite sides of the roller cam 26 so as to urge the stem 8, the gate 2, and the like in the opening direction of the flow path port 3, respectively.

The outer peripheral groove 19'a of the piston 19 'and the upper peripheral groove 1 of the piston 19' are located at the extended and retracted positions of the piston rod 22 in the outer air cylinder devices 19, respectively.
There is provided a piston pin type locking device 40 which engages 9'b to lock the gate closing and the gate opening, respectively. As shown in FIG. 7, the piston pin type lock device 40 has an O-ring 42 set in a mounting hole 41 provided in the housing 20 of the air cylinder device 19, and further has an air supply hole 43 around the distal end. Lock pin housing 44
A piston pin 46 having an O-ring 45 on its outer periphery is slidably inserted into the lock pin housing 44, and a spring 47 is arranged behind the piston pin 46 to have an atmosphere communication hole 48. Lock pin flange 49
Are fitted and fixed to the lock pin housing 44.

The piston pin 46 is connected to the spring 4
7, the distal end thereof protrudes into the housing 20 from the lock pin housing 44 and engages with one of the grooves 19'a and 19'b at the outer peripheral portions at both ends of the piston 19 '. Accordingly, the movement of the piston 19 'and the piston rod 22 can be prevented. Conversely, the piston pin 46 retracts into the lock pin housing 44 against the elasticity of the spring 47, and the grooves 19'a,
By separating from the piston 19'b, the piston 19 'and the piston rod 22 can be released.

The operation of the gate valve according to the embodiment of the present invention configured as described above will be described. By supplying air to the piston rod 22 side of the air cylinder device 19 and contracting the piston 19 'and the piston rod 22, the cam plate 23 and the roller cam 26 are moved to the body 1 side as shown in FIGS. Let it. Accordingly, as shown in FIG. 6, the fulcrum roller 18 and the guide groove 21 guide the roller through the cam roller 24 held by the tension force of the spring 30 on the gentle linear inclined surface of the cam groove 25. The holder 27, the stem holder 15, the stem 8 and the gate 2 are moved by compressing the bellows 14, and the gate 2 faces the flow path port 3. In this state, the fulcrum roller 18 stops at the end of the guide groove 21 on the body 1 side, and the axial movement of the stem holder 15, the stem 8, and the gate 2 stops.

Further, by contracting the piston 19 'and the piston rod 22 of the air cylinder device 19,
When the cam plate 23 and the roller cam 26 are moved toward the body 1, the cam roller 24 is forcibly and gently moved in a direction against the tensile force of the spring 30 due to the gentle slope of the cam groove 25, and the roller The holder 27, the stem holder 15, the stem 8, and the gate 2 tilt around the fulcrum roller 18 as a fulcrum, and the gate 2 closes the flow path port 3. When this gate is closed,
The gate 2 has a cushion provided by the tightening force of the O-ring 4 at the peripheral edge of the surface, and the gate 2 is gently adhered to the peripheral edge of the flow path opening 3 to reduce vibration and to be securely sealed.

When the gate 2 is closed as described above, the cam roller 24 stops in the middle of the gentle linear inclined surface of the cam groove 25. In the case where the air cylinder device 19 is used upside down as in the illustrated example, the gate 2 may be opened due to a pressure change in the chamber, the weight of the gate 2 or the like. The piston pin type lock device 40 on the bottom side of the air cylinder device 19 operates. That is, air is no longer supplied into the lock pin housing 44 of the piston pin type lock device 40 shown in FIG. 7, and the piston pin 46 is urged by the spring 47 to protrude from the lock pin housing 44, as shown in FIG. The gate 2 can be locked in the closed state by engaging with the groove 19'a on the bottom side outer periphery of the piston 19 'of the air cylinder device 19.

Conversely, when air is supplied to the piston 19 'side of the air cylinder device 19, air is supplied into the lock pin housing 44 of the piston pin type lock device 40 at the bottom of the air cylinder device 19. Then, the piston pin 46 is retracted against the elasticity of the spring 47, and the piston 19 'is released. As shown in FIGS. 1 to 3, the piston 19', the piston rod 22, the cam plate 23 and the roller cam 26 are moved. It moves to the side away from the body 1. Accordingly, the cam roller 24 held on the gentle inclined surface of the cam groove 25 moves gently in the tensioning direction of the spring 30, and as a result, the roller holder 2
7, the stem holder 15, the stem 8 and the gate 2 are gently rotated around the fulcrum roller 18 as a fulcrum,
Is gently separated from the periphery of the flow path opening 3.

Further, by extending the piston 19 'and the piston rod 22 of the air cylinder device 19,
When the cam plate 23 and the roller cam 26 are moved away from the body 1, the roller holder 27, the stem holder 15, the stem 8 and the gate 2 extend the bellows 14 via the cam roller 24 held in the cam groove 25. Then, by the guide between the fulcrum roller 18 and the guide groove 21, it moves in the direction perpendicular to the axis of the flow path port 3 and stops.

When the gate 2 is opened as described above, the operating pressure of the air cylinder device 19 is lost.
The gate 2 may move, but the air cylinder device 19
Is no longer supplied with air into the lock pin housing 44 of the piston pin type lock device 40 on the top side of the air cylinder device 19, and the piston pin 46 is urged by the spring 47 to lock the lock pin housing 44. The gate 2 can protrude from the inside and engage with the groove 19 ′ b on the top side outer periphery of the piston 19 ′ of the air cylinder device 19 to lock the gate 2 in the open state.

The pin of the piston pin 46 in the piston pin type locking device 40 shown in FIG. 7 has a columnar shape.
As shown in FIG. 1B, the notch C is
9 fits into the grooves 19'a, 19'b of the piston 19 'of the air cylinder device 19 shown in FIG.
As shown in FIGS. 10A and 10B, the piston of the piston pin 46 and the lock pin flange 49 are formed in a rectangular or oblong fitting detent structure, or as shown in FIG. 46 pins and lock pin housing 4
4 and a pin to prevent rotation, or as shown in FIG.
As shown in FIG.
The locking hole 41 and the lock pin housing 44 can be made to have a detent structure by a pin and a key.

According to the gate valve of the present embodiment, the stem 8 integral with the gate 2 is swung while the cam roller 24 is rollingly engaged with the gentle slope of the cam groove 25 of the roller cam 26. The cam groove 2
The cam roller 24 engaged with 5 moves forcibly slowly, and the gate opening / closing operation becomes gentle. When the gate is closed, the tightening force of the O-ring on the periphery of the gate surface serves as a cushion, so that it comes into close contact with the periphery of the flow path port. In addition, vibration is reduced and sealing is ensured. Further, when the gate is opened, the cam roller 24 moves slowly, so that the vibration is drastically reduced. Therefore, when the gate is opened and closed, the generation of particles is reduced. In particular, when the gate is used for partitioning the wafer transfer, the wafer does not shift from the claw for transferring the wafer, and the wafer can be transferred stably. Further, when the operating pressure of the cylinder device 19 is lost in the state where the gate is opened and the gate is closed, the piston 19 'of the cylinder device 19 is moved to the piston pin type locking device 40.
, And can be locked in a state where the gate is opened and the gate is closed, so that the gate 2 does not operate due to a pressure change in the chamber, the weight of the gate 2, inertia, and the like. Further, since there is almost no sliding portion inside the body 1, it is difficult to generate dust. In addition, even in a reverse pressure state in which pressure is applied from the back surface of the gate 2, by performing the opening operation of the gate 2 in the same manner as described above. There is an advantage that the rubbing phenomenon of the O-ring 4 is almost eliminated.

Next, a second embodiment of the present invention will be described. In this embodiment, as shown in FIGS. 11 and 12, the cam groove 25 of the roller cam 26 is formed in a bent shape, and a locking step 25a is formed in the middle of the cam groove 25. Engaging portion 25b having a radius substantially equal to that of the roller 24 is formed.
It is characterized in that it is formed on the reverse inclined surface 25c subsequent to 5a, and the other configurations and operations are the same as those of the first embodiment. Is omitted.

According to the gate valve of this embodiment, during the transition from the gate open state shown in FIG.
4 is engaged with the engaging portion 25b of the cam groove 25, so that it is possible to prevent the gate 2 from swinging to the closed position before facing the flow path port 3 due to its own weight and inertia. Also,
When closing the flow path port 3 with the gate 2, the cam roller 24
By changing the step 25a in the cam groove 25,
The tightening thrust of the gate 2 can be increased, and the lock can be performed without operating pressure of the air cylinder device 19, but the operation of the air cylinder device 19 is locked by using the lock device 40 as described above. Thus, the locking can be performed more reliably. In addition, this embodiment also has the same advantages as the first embodiment.

Next, a third embodiment of the present invention will be described. In the present embodiment, as shown in FIGS. 13 and 14, the cam groove 25 of the roller cam 26 is formed in a bent shape having an engaging portion 25b for locking, and the step portion 25a in the second embodiment is The cam roller 24 is formed on the inclined surface 25d and the inclined surface 25d is
c, the passage 2 is closed by the gate 2, and the inclined surface 25d is characterized in that the stem 8 can take a stroke when the gate 2 swings. Other configurations and operations are the same as those of the first and second embodiments. This embodiment also has the same advantages as the first and second embodiments.

In the first embodiment, the air cylinder device 1 is used only when the gate is closed and when the gate is opened.
Although the lock state is maintained by the lock of FIG. 9, an arcuate engaging portion 25b is formed in the cam groove 25 as in the second and third embodiments, and the gate is changed from the gate open state to the gate closed state. During the movement, the cam roller 24 is
5b may be engaged and held in a locked state. Further, in each of the above embodiments, the roller cam 26 having the cam groove and the cam roller 24 are used in combination as the mechanism for swinging the stem 8 and the gate 2, but other cam mechanisms, link mechanisms, and the like are used. be able to. In addition, the present invention can be applied to various types of gate valves, such as a type in which the gate 2 can be opened and closed by moving the gate 2 at a position facing the flow path port 2 substantially in parallel with the axis thereof. Further, in the above-described embodiment, the operation of the air cylinder device 19 is locked at both the gate open position and the gate closed position, but may be locked at only one of the positions. In this case, at the other position, it can be locked using another lock mechanism as needed. In addition, the present invention can be variously changed in design without departing from the basic technical idea.

[0027]

As described above, according to the present invention, when there is no operating pressure of the cylinder device in the valve closed state and the valve open state, the gate can be kept in the locked state, so that the pressure change in the chamber can be maintained. In addition, the gate can be prevented from operating due to its own weight, the inertia of the gate, and the like, so that the reliability can be improved.

[Brief description of the drawings]

FIG. 1 is a vertical sectional front view showing a gate valve according to a first embodiment of the present invention, with a gate open.

FIG. 2 is a vertical sectional side view of the gate valve taken along the line AA of FIG. 1;

FIG. 3 is an enlarged vertical sectional side view showing a cam mechanism used for the gate valve in a gate open state.

FIG. 4 is a vertical sectional front view showing the gate valve in a gate closed state.

FIG. 5 is a longitudinal sectional side view similar to FIG. 2 showing the gate valve and in a gate closed state.

FIG. 6 is an enlarged vertical sectional side view showing a cam mechanism used for the gate valve in a gate closed state.

FIG. 7 is an enlarged vertical sectional view showing a piston pin type lock device used for the gate valve.

8A and 8B show a partially modified example of the piston pin type lock device, wherein FIG. 8A is a longitudinal sectional view and FIG. 8B is a front view.

9 (a) and 9 (b) show examples of a detent structure between the piston of the piston pin and the lock pin flange in the piston pin type locking device of FIG. 8, respectively, and FIG.
It is -B sectional drawing.

10A is a view showing a structure for preventing rotation of a pin of a piston pin and a lock pin housing in the piston pin type lock device of FIG. 8, and FIG. 10B is a diagram showing a mounting hole and a lock pin of a housing of an air cylinder device. It is a figure which shows the detent structure with a housing.

FIG. 11 shows a gate valve according to a second embodiment of the present invention, and is a longitudinal sectional side view similar to FIG. 2 in a gate open state.

FIG. 12 is a vertical sectional side view similar to FIG. 5 showing the gate valve in a gate closed state;

FIG. 13 is an enlarged longitudinal sectional side view showing a cam mechanism used for a gate valve according to a third embodiment of the present invention, with a gate open.

FIG. 14 is an enlarged vertical sectional side view showing a cam mechanism used for the gate valve in a gate closed state.

[Explanation of symbols]

 2 Gate 3 Flow path port 4 O-ring 8 Stem 14 Bellows 15 Stem holder 18 Support point roller 19 Air cylinder device 19 'Piston 19'a Groove 19'b groove 20 Housing 21 Guide groove 22 Piston rod 23 Cam plate 24 Cam roller 25 Cam Groove 26 Roller cam 27 Roller holder 30 Spring 40 Piston pin type locking device 41 Mounting hole 42 O-ring 43 Air supply hole 44 Lock pin housing 45 O-ring 46 Piston pin 47 Spring 48 Atmospheric communication hole 49 Lock pin flange

Claims (5)

[Claims] 1. A gate capable of opening and closing a flow path port, and moving the gate between a forward position facing the flow path port and a retreat position in a direction perpendicular to an axis of the flow path port.
Moving means having a cylinder device for moving the gate so as to open and close the flow path port at the advance position; and the cylinder device at at least one of an open position and a closed position of the flow path port by the gate. And a lock means for locking the telescopic operation of the gate valve. 2. A moving means, comprising: a cylinder device; a stem for supporting a gate; and a support for supporting the stem axially movable between an advanced position and a retracted position and swingably at the advanced position. With the device, with the expansion and contraction of the cylinder device,
2. The gate valve according to claim 1, further comprising: a swing device that moves the stem in an axial direction and swings the stem at a forward position. 3. A swinging device comprising a cam plate mounted on a piston rod of a cylinder device, a roller cam having a cam groove mounted on the cam plate, a roller holder mounted on a stem, and the roller holder. 3. A cam roller for supporting the stem and swinging the stem engaged with a cam groove of the roller cam, and a spring for urging the stem and the gate toward the opening side of the flow path port. The described gate valve. 4. The gate valve according to claim 3, wherein the cam groove of the roller cam has a gentle slope, and the flow path port is closed by a gate in a state where the cam roller is located on the slope. 5. A lock housing having a mounting hole formed in a housing of a cylinder device, a seal housing mounted in the mounting hole, and an air supply hole around a distal end portion, and a locking means mounted on the lock pin housing. A lock pin flange having an air communication hole, and a slidably supported seal inside the lock housing and the lock pin flange. The gate valve according to any one of claims 1 to 4, further comprising a piston pin that can be engaged or disengaged, and a spring that biases the piston pin toward an engagement side with the piston.